JPH1116981A - Substrate treatment equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a substrate treatment equipment with a substrate-carrying transfer mechanism wherein the stroke of an arm is loNg, an operating region of a movable part is small and an arm warps and vibrates only slightly. SOLUTION: When a pulley PU4 is driven by a motor built in a head 24 and rotates in one direction, a boom 42 connected to a belt BE goes ahead in an AB direction and protrudes from the head 24. When the boom 42 protrudes from the head 24, the belt BE put on a pulley PU1 of the bottom 42 also rotates, since it is fixed to the side of the head 24 via a stopping member 47, and a holder member 41 connected to the belt BE goes ahead to the AB direction and protrudes from the boom 42. As a result, the holder member 41 moves to a position of a solid line, wherein the transfer arm 40 is expanded most.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention performs a series of processes including a heating process, a cooling process, and a chemical solution process on a thin substrate (hereinafter, simply referred to as a "substrate") such as a semiconductor substrate or a liquid crystal glass substrate. The present invention relates to a substrate processing apparatus.

[0002]

2. Description of the Related Art Conventionally, in a substrate processing apparatus as described above, a substrate is taken out of a cassette by a substrate transfer robot provided in a substrate loading / unloading section, and the substrate is transferred by a substrate transfer robot provided in a unit arrangement section. The substrate is circulated and transported between various processing units such as a heat treatment unit for performing a heat treatment, a cooling treatment unit for performing a cooling treatment, and a chemical treatment unit for performing a chemical treatment, thereby achieving a series of substrate treatments.

FIGS. 14 and 15 show examples of the structure of a substrate transfer robot and a substrate transfer robot used in a conventional substrate processing apparatus.

[0004] The substrate transfer robot shown in FIG. 14 is a slide type robot, which has a head which can move up and down along a vertical axis and can rotate around the vertical axis. The structure is such that the substrate is held on an arm which is guided and moved back and forth by a guide, and this arm is moved forward and backward in the cassette (FIG. 14A shows a state where the arm is retracted, and FIG. 14B shows a state where the arm is retracted. , The state where the arm has moved forward.)

[0005] The substrate transfer robot shown in FIG. 15 is an articulated robot having a head which can move up and down along a vertical axis and can rotate around the vertical axis, and bends and extends an arm extending from the head. 15 (a) shows a state in which the substrate held on the arm advances and retreats into the processing unit.
(B) shows a state where the arm is extended. ).

[0006]

However, the above-mentioned robot cannot easily extend the stroke of the arm. For example, in some cases, it may be necessary to increase the stroke of the arm due to the increase in the diameter of the substrate or the arrangement of the processing unit. As a result, there is a problem that an operation area to be secured for the movable portion to perform rotation and other operations is widened, and that the substrate processing apparatus is increased in size. In addition, if the stroke of the arm is lengthened under the limitation of the thickness dimension below a certain value, the amount of deflection of the arm increases, vibration is likely to occur, and the displacement of the substrate occurs, or the held substrate and the arm are displaced. There is also a problem that the particles are rubbed, causing particles to be generated.

Accordingly, an object of the present invention is to provide a substrate processing apparatus provided with a substrate transfer device or a substrate transfer device in which the stroke of the arm is long, the operation area of the movable portion is small, and the deflection and vibration of the arm are small. I do.

[0008]

According to a first aspect of the present invention, there is provided a substrate processing apparatus, comprising: a unit arranging section in which a plurality of processing units for performing a predetermined process on a substrate are arranged; A substrate loading / unloading unit that transfers a substrate between the substrate processing unit and the substrate loading / unloading unit, the substrate loading / unloading unit rotating the transfer arm holding the substrate around a vertical axis and moving up and down along the vertical axis. It is characterized by including a substrate transfer device having an elevating mechanism and an expansion / contraction mechanism that expands / contracts the transfer arm linearly in a plurality of stages in a substantially horizontal direction.

According to a second aspect of the present invention, there is provided a substrate processing apparatus, comprising: a unit arranging section in which a plurality of processing units for performing predetermined processing on a substrate are arranged; and a substrate carry-in / out section for transferring the substrate between the unit arranging section. A substrate loading and unloading unit, wherein the substrate loading and unloading unit rotates the base end of the transfer arm that holds the substrate around a vertical axis and moves up and down along the vertical axis, and a transfer arm. A substrate transfer device having a bending and stretching mechanism for bending and extending over a plurality of steps in a substantially horizontal plane to linearly move the distal end of the transfer arm in a substantially horizontal direction while maintaining a posture.

According to a third aspect of the present invention, there is provided a substrate processing apparatus, comprising: a unit arranging section in which a plurality of processing units for performing a predetermined process on a substrate are arranged; and a substrate carry-in / out section for transferring the substrate between the unit arranging section. A rotation unit that rotates a base end of a transfer arm holding a substrate around a vertical axis and moves up and down along the vertical axis, and a transfer arm in a substantially horizontal plane. And a bending / stretching mechanism that linearly moves the tip end of the transfer arm in a substantially horizontal direction while maintaining a posture by bending and extending over a plurality of stages.

According to a fourth aspect of the present invention, there is provided a substrate processing apparatus, wherein a plurality of processing units for performing a predetermined process on a substrate are arranged around a substrate transfer device that transfers the substrate between the plurality of processing units. And a substrate loading / unloading unit for transferring a substrate between the unit and the unit arrangement unit, wherein the substrate transport device rotates a base end of a transport arm that holds the substrate around a vertical axis. A rotary elevating mechanism that raises and lowers along the vertical axis, and a bending and stretching mechanism that moves the transfer arm linearly in a substantially horizontal direction while maintaining the attitude of the transfer arm by bending and extending the transfer arm over multiple steps in a substantially horizontal plane It is characterized by having.

According to a fifth aspect of the present invention, in the substrate processing apparatus, the unit arranging section is configured such that a plurality of processing units are arranged around a substrate transfer device that transfers a substrate to and from the processing unit. And

According to a sixth aspect of the present invention, in the substrate processing apparatus, the transfer arm is a rotatable body including at least three odd-numbered arm segments including the substrate mounting portion at the distal end portion, the rotatably connected arm segments. In this case, the effective length of each arm segment excluding the substrate mounting arm is equal.

Further, in the substrate processing apparatus according to a seventh aspect of the present invention, the transfer arm is a connecting body in which at least three odd-numbered arm segments including the substrate mounting portion at the tip end are rotatably connected. The effective length of each arm segment excluding the substrate mounting arm is equal.

[0015]

BEST MODE FOR CARRYING OUT THE INVENTION

First Embodiment FIG. 1 is a plan view of a substrate processing apparatus 10 according to a first embodiment of the present invention, and FIG. 2 is a front view of the apparatus 10.

As shown, the substrate processing apparatus 10 comprises:
Unit arrangement section MP in which a plurality of processing units are appropriately arranged
Is arranged at the center, and on both sides thereof, an indexer unit ID serving as a substrate loading / unloading unit and an interface unit IF connected to the exposure apparatus are arranged.

The unit arrangement section MP includes a first processing section group G1 composed of a liquid processing unit and a second processing section group G2 including a heat treatment unit for performing a series of processing on the substrate. The first and second processing unit groups G1 and G2 are arranged in two rows in parallel, and a transfer unit that transfers substrates between them is a first substrate transfer robot that mainly accesses the first processing unit group G1. TR1 and a second substrate transport robot TR2 that accesses only the second processing unit group G2.
The substrate is circulated and transported in a desired procedure by the cooperation of the first and second substrate transport robots TR1 and TR2.

The indexer unit ID includes a mounting table 21 on which the cassette CA containing the substrates is mounted, and a substrate sequentially taken out of the cassette CA on the mounting table 21 and the unit mounting unit MP
And transfer the substrate received from the second substrate transfer robot TR2 to the cassette C.
And a substrate transfer robot TR3 housed in A.

The interface unit IF has a function of temporarily stocking the substrate on which the resist application has been completed by the circulating transport so as to transfer the substrate to the exposure apparatus or to receive the exposed substrate from the exposure apparatus. Although not shown, the robot includes a robot for transferring a substrate to and from the second substrate transport robot TR2, and a buffer cassette for mounting the substrate.

In the above-described apparatus 10, when the cassette CA conveyed by the external conveying device is set on the mounting table 21 of the indexer unit ID, the substrate transfer robot TR3
Sequentially takes out the substrates from the cassette CA and passes them to the second substrate transport robot TR2. Thereafter, the first and second substrate transport robots TR1 and TR2 move the first and second processing unit groups G1 and TR1, respectively.
The substrate is circulated and transported to each processing unit included in G2, and a series of processing is automatically performed in those processing units.

Hereinafter, details of the arrangement of the processing units in the unit arrangement section MP will be described. In the first processing unit group G1, a spin coater SC and a spin developer SD not related to the heat treatment are arranged in a line. On the other hand, the second
In the processing unit group G2, the heating unit HP, the cooling unit CP, and the edge exposure unit EEW are two-dimensionally stacked and arranged on the upper stage, and the non-heated transfer unit IU is arranged on the lowermost stage. The transfer unit IU and the cooling unit CP function as a bidirectional interface between the first and second processing unit groups G1 and G2. That is, the transfer unit I
The U and the cooling unit CP are accessible from both the first and second substrate transport robots TR1, TR2, and the first and second substrate transport robots TR1, TR2 cooperate to form the first and second substrate transport robots TR1, TR2. And the first and second processing units G as well as the circulating transfer of the substrate in the second processing unit groups G1 and G2.
1. The exchange of substrates can be performed between G2.

FIG. 3 is a view for explaining the transfer of a substrate in the indexer unit ID, the transfer of a substrate in the unit arrangement unit MP, and the transfer of a substrate between the unit arrangement unit MP and the indexer unit ID.

The substrate transfer robot TR3 provided in the indexer unit ID can be reciprocated in the ± Y direction on a path provided in the indexer unit ID as a whole by a Y drive mechanism including a motor 22a, a male screw 22b, and a guide rail 22c. It is. The substrate transfer robot TR3 includes a stage 23 that moves up and down in ± Z directions, that is, a vertical direction by a Z drive mechanism (not shown), and a Z-axis that is a vertical axis on the stage 23 by a Z-axis rotation mechanism (not shown). And a head 24 that rotates.

As shown in the drawing, when the substrate transfer robot TR3 moves in the ± Y direction as a whole and the head 24 appropriately moves in the ± Z direction and faces the front of the substrate transfer robot TR2, the transfer hand is moved. The substrate 40 moves forward in the X direction (that is, the unit arrangement section MP side), and the substrate W is transferred to and from the front substrate transport robot TR2. On the other hand, as a whole, the substrate transfer robot TR3 moves ± Y
When the head 24 moves around in the Z direction after moving appropriately in the ± Z direction to be in a state of facing the front of the cassette CA, the transfer hand 40 is moved to −. The substrate W is transferred in the X direction to and from the cassette CA.

The substrate transport robot TR2 provided in the unit arrangement portion MP can reciprocate in the ± X direction on the passage as a whole by an X drive mechanism including a motor 32a, a male screw 32b, and a guide rail 32c. The substrate transport robot TR1 includes a stage 33 that moves up and down in the ± Z direction by a Z drive mechanism (not shown) and a head 34 that rotates around the Z axis on the stage 33 by a Z-axis rotation mechanism (not shown). .

The substrate transfer robot TR2 transfers the substrate W to and from the substrate transfer robot TR3 as described above, and also transfers the substrate W to and from the second processing unit group G2.
Is passed. That is, the substrate transport robot TR2
Performs access to the processing units such as the heating unit HP and the cooling unit CP to carry in and carry out the substrate W.

The substrate transport robot TR2 has a pair of transport hands 36a and 36b for mounting and supporting the substrate W above the head 34 for transporting and transferring the substrate W. XY for 36a and 36b
An advance / retreat mechanism is provided to advance / retreat within a plane (horizontal plane). The entire substrate transfer robot TR2 moves in the ± X direction from the position shown in the figure to the front of any of the processing units, and the head 34 moves appropriately in the ± Z direction, rotates around the Z axis, and moves in front of the processing unit. When being in the facing state, one of the empty transfer hands 36b moves in the ± Y direction and ± Z direction to carry out the processed substrate W from the processing unit,
The other transport hand 36a moves in the ± Y direction and ± Z direction, and carries the unprocessed substrate W into the processing unit.

FIGS. 4 to 6 are views for explaining the structure and operation of the substrate transfer robot TR3. FIG. 4 is a perspective view of the substrate transfer robot TR3, FIG. 5 is a diagram showing the structure of the side surface of the substrate transfer robot TR3, and FIG. 6 is a diagram showing the operation of the transfer arm of the substrate transfer robot TR3. FIG.

As shown in FIG. 4, the substrate transfer robot TR
The stage 23 supporting the third head 24 is a male screw 22
b, a Z drive mechanism 25, which is an elevating mechanism provided between the base 26 that moves in the ± Y direction by a Y drive mechanism including a guide rail 22c and the like, can move up and down in the ± Z direction. The Z drive mechanism 25 has a pantograph structure, and a screw shaft 25b is rotated by forward and reverse rotation of a motor 25a fixed on a base 26, and a connecting member 25c screwed to the screw shaft 25b is ± Y Move in the direction. And
As the connecting member 25c moves, the connecting member 25
A pair of pantograph links 25d connected to both ends of c
Will bend and stretch. A pair of pantograph links 25
The stage 23 is connected and supported at the upper end of d, and as a result, the forward / reverse rotation of the motor 25a is converted into the vertical movement of the stage 23 through the bending / extension drive of the pantograph link 25d.

The stage 23 has a built-in Z-axis rotating mechanism (not shown) for rotating a vertical rotating shaft 23a extending from the lower center of the head 24. With this Z-axis rotation mechanism, the head 24 can turn and rotate to any position around the Z-axis. Further, the transfer arm 40 provided on the head 24 includes a holder member 41 which is a substrate mounting portion. The holder member 41 can be advanced and retracted in the X direction by a mechanism provided in the head 24 in the illustrated state.

As shown in the side view of FIG.
1 can be reciprocated in the AB direction by a telescopic drive mechanism 50 built in the head 24.

The extension / retraction drive mechanism 50 causes the transfer arm 40 having a two-stage structure including a holder member 41 and a boom 42 for increasing a stroke to extend and retract. A sliding member 53 that is guided by a guide 52 provided on the head 24 side and reciprocates in the AB direction is fixed to the boom 42. Further, a sliding member 55 which is guided by a guide 54 provided on the boom 42 side and reciprocates in the AB direction is fixed to the holder member 41. A pair of pulleys P provided on the side surface of the boom 42
U1 is covered with a belt BE.
A sliding member 55 is fixed to a part of E. A belt BE is also applied to a plurality of pulleys PU2, PU3, PU4 provided inside the head 24, and a boom 42 is fixed to a part of the belt BE. The pulley P
U4 is connected to the motor MO.
To rotate appropriately.

FIG. 6 is a view for explaining the movement of the holder member 41 shown in FIG. When the pulley PU4 is rotated in one direction by being driven by a motor incorporated in the head 24, the boom 42 connected to the belt BE advances in the AB direction and protrudes from the head 24. When the boom 42 protrudes from the head 24, the belt BE hung on the pulley PU1 of the boom 42 also rotates due to being fixed to the head 24 side via the locking member 47, and is connected to the belt BE. The holder member 41 moves forward in the AB direction and protrudes from the boom 42, and as a result, the holder member 41
Moves to the position indicated by the solid line in the most extended state. In addition,
The dotted line indicates a state in which the transfer arm 40 has been reduced most.

According to the first embodiment described above, the indexer unit ID includes the substrate transfer robot TR3 that extends and contracts the transfer arm 40 linearly in two stages in the horizontal direction, so that the stroke of the transfer arm 40 can be reduced. Not only can the length be easily increased, but also the minimum operation area required when the transfer arm 40 in the contracted state rotates and moves up and down can be narrowed. Therefore, the indexer unit ID where the substrate transfer robot TR3 is arranged can be reduced,
The footprint of the substrate processing apparatus 10 can be reduced.

[Second Embodiment] A substrate processing apparatus according to a second embodiment is a modification of the substrate processing apparatus 10 according to the first embodiment. Articulated board transfer robot TR13
Is replaced by Therefore, description of other common parts will be omitted, and only the structure of the substrate transfer robot TR13 will be described.

FIG. 7 is a view showing the structure of the substrate transfer robot TR13, FIG. 7 (a) is a plan view, and FIG. 7 (b)
Is a side view.

As shown, the stage 123 supporting the head 124 of the substrate transfer robot TR13 is moved up and down in the ± Z direction by a Z drive mechanism 125 having the same pantograph structure as the substrate transfer robot TR3 shown in FIG. It is possible.

The stage 123 has a built-in Z-axis rotation mechanism 123b for rotating and driving a vertical rotation shaft 123a extending from the lower center of the head 124.
3b allows the head 124 to pivot and move to an arbitrary position around the Z axis. The transfer arm 140 provided on the head 124 has a structure in which the first to third arm segments 141, 142, 143 are connected.
The first arm segment 141 on the distal end side serves as a substrate mounting portion for supporting the substrate W, and is provided inside the head 124 and the second arm segment 141.
Further, a mechanism provided in the third arm segments 142 and 143 is capable of moving forward and backward in the illustrated AB direction.

FIG. 8 is a side sectional view showing the internal structure of the transfer arm 140. The transfer arm 140 includes a first arm segment 141 on the distal end side on which the substrate W is placed, a second arm segment 142 that rotatably supports the first arm segment 141 in a horizontal plane, and a second arm segment 142. A third arm segment 143 that rotatably supports the second arm segment 142 in a horizontal plane;
And a rotary drive device 144 for rotating the base 43 in a horizontal plane.
A power transmission means 146 which is a bending and stretching mechanism for transmitting power to the second arm segment 142 and the first arm segment 141 when the 43 is rotated to control the posture and the movement direction thereof.

At the base end of the first arm segment 141, a first rotating shaft 151 is vertically fixed downward. Further, a first bearing hole 152 for rotatably bearing the first rotation shaft 151 is provided at a distal end portion of the second arm segment 142.
Are drilled. Also, the second arm segment 142
A second rotation shaft 153 is vertically fixed downward at the base end of the second rotation shaft 153. The third arm segment 143 is set to have the same length as the second arm segment 142, and a second bearing hole 154 for rotatably supporting the second rotation shaft 153 is formed at the distal end thereof. Have been. Further, a rotation driving device 144 is provided at the base end of the third arm segment 143.
The third rotating shaft 155 to which the turning force is transmitted is vertically fixed downward.

The power transmission means 146 includes a first rotating shaft 151.
A first pulley 161 fixed to the lower end of the first pulley, a second pulley 162 fixed to the second rotating shaft 153 on the upper surface side of the second bearing hole 154, a first pulley 161 and a second pulley 1
The first timing belt 163 stretched between the first timing belt 163 and the second timing belt 163
And the third pulley 1 fixed to the lower end of the second rotating shaft 153
64 and the third arm segment 145 fixed to the third arm segment 145.
A fourth pulley 165 in which the rotation shaft 155 is loosely fitted, and a second pulley bridged between the third pulley 164 and the fourth pulley 165.
And a timing belt 166.

Here, the diameter of the first pulley 161 and the diameter of the second pulley 162 are set to 2: 1, and the diameter of the third pulley 164 and the diameter of the fourth pulley 165 are set to 1: 2. Have been. Further, the first rotation shaft 151 is moved from the second rotation shaft 15
3 (hereinafter referred to as the “effective length of the second arm segment”) and the distance from the second rotation shaft 153 to the third rotation shaft 15.
The distance to 5 (hereinafter referred to as “effective length of the third arm segment”) is set to the same length R.

The operation will be described.
When 44 rotates the third arm segment 143 counterclockwise by the angle α via the third rotating shaft 155, the second rotating shaft 153 bearing at the distal end of the third arm segment 143 becomes the second rotating shaft 153. Through the second belt 166 and the third pulley 164, the third rotation shaft 155 is rotated clockwise by twice the angle β = 2α. Thereby, the second arm segment 1
The first rotating shaft 151 supported by the tip of the fork 42 is AB
Go straight in the direction. At this time, the rotation angle of the first rotation shaft 151 is controlled through the second pulley 162 and the first belt 163. Here, on the basis of the second arm segment 142, the first rotation shaft 151 rotates counterclockwise by an angle γ = α that is 倍 times the second rotation shaft 153. The second arm segment 142 itself is rotating, and as a result, the first arm segment 141 moves straight while maintaining the attitude with respect to the rotary driving device 144, that is, the head 124.

FIG. 9 is a diagram conceptually illustrating the operation of the transfer arm 140. Third arm segment 1 at base end
When 43 is rotated counterclockwise by angle α, second arm segment 142 rotates clockwise by angle β = 2α. Further, the first arm segment 143 rotates counterclockwise by an angle γ = α. Here, the effective length of the second arm segment 142 and the third arm segment 14
3 is equal to R, and the first arm segment 1
41 moves straight while maintaining its attitude with respect to the head 124. The transfer arm 140 according to the second embodiment includes three arm segments 141, 142, 1
Although 43 are connected, five or more odd-numbered arm segments may be connected.

Also in the second embodiment, the indexer unit ID includes the substrate transfer robot TR13 which moves straight while the first arm segment 141 on the distal end side of the transfer arm 140 keeps the attitude with respect to the head 124.
The stroke can be extended while the operation area of the transfer arm 140 is kept narrow. Therefore, the substrate transfer robot T
The indexer ID at which R3 is disposed can be reduced, and the footprint of the substrate processing apparatus can be reduced.

[Third Embodiment] The substrate processing apparatus of the third embodiment is a modification of the substrate processing apparatus 10 of the first embodiment.

FIG. 10 shows a substrate processing apparatus 1 according to the third embodiment.
It is a figure explaining the structure of 00. The apparatus 100 includes an indexer unit ID for carrying in / out a substrate, a unit arrangement unit MP for performing various processes on the substrate, and an interface IF connected to the exposure apparatus.

The unit disposition portion MP includes, at its four corners, coating processing units SC1 and S4 for forming a resist film on the substrate as liquid processing units for processing the substrate with a processing liquid.
C2 and development processing units SD1 and SD2 for performing development processing on the exposed substrate are arranged. Further, above these liquid processing units, a multi-stage heat treatment unit 20 for performing heat treatment on the substrate is disposed at the front and rear of the apparatus. In addition, between both coating processing units SC1 and SC2,
A cleaning processing unit SS that supplies a cleaning liquid such as pure water to the substrate to clean the substrate is provided.

In the center of the apparatus sandwiched between the coating processing units SC1 and SC2 and the developing processing units SD1 and SD2, a substrate transfer robot for accessing all the surrounding processing units and transferring the substrates to and from them. TR21 is arranged. The substrate transfer robot TR21 is movable in the vertical direction and is rotatable around a central vertical axis.

Above the coating unit SC1, a three-stage heat treatment unit TU1, TU2, TU3 is arranged as a multi-stage heat treatment unit 20. The multi-stage heat treatment unit 20 is also provided above the coating treatment unit SC2.
As three-stage heat treatment units TU0, TU4, TU
5 are located. Above the development processing unit SD1, two-stage heat treatment units TU6 and TU7 are arranged as a multi-stage heat treatment unit 20. further,
Above the development processing unit SD2, a one-stage heat treatment unit TU8 is disposed as the multi-stage heat treatment unit 20. Each of the heat treatment units TU1 to TU8 includes a combination of a heating unit HP and a cooling unit CP, a combination of an adhesion strengthening unit AH and a cooling unit CP, and
It is either a combination of the post-exposure bake unit PEB and the cooling unit CP. Each heat treatment unit TU
The loading / unloading entrance of 1 to TU8 is on the cooling unit CP side, and the substrate once loaded into the cooling unit CP is subjected to heat treatment in any of the heating unit HP, the adhesion strengthening unit AH, and the post-exposure bake unit PEB. Is cooled by the cooling unit CP and is carried out from here.

In the substrate processing apparatus of the third embodiment, an articulated substrate transfer robot TR21 as shown in FIG. 11 is arranged in the unit arrangement section MP. The substrate transfer robot TR21 will be described with reference to FIG.

FIG. 11 is a view showing the structure of the substrate transfer robot 21. FIG. 11 (a) is a plan view and FIG.
(B) is a front view.

The stage 223 supporting the head 224 of the substrate transfer robot 21 can be moved up and down in the ± Z direction by a Z-axis drive mechanism having a pantograph structure similar to that of the substrate transfer robot TR3 shown in FIG. Further, the head 224 can be rotationally moved to an arbitrary position around the Z-axis by a Z-axis rotating mechanism (not shown) provided on the stage 223.

On the head 224, there is provided a first
And second transfer arms 240A and 240B. Each of the transfer arms 240A and 240B bends and extends by the same mechanism as that shown in FIG. 8, and the first arm segments 241A and 241B connected to the distal ends of the transfer arms 240A and 240B respectively have the head 2
The vehicle travels straight in the AB direction while maintaining the posture with respect to 24. Note that the first arm segment 241A is connected to the upper surface side of the second arm segment 242A. Meanwhile, the first
The arm segment 241B is the first arm segment 2
In order to avoid interference with the third arm segment 243B, the third arm segment 243B
And the second and third arm segments 242A, 243A
And are connected so as to avoid interference. If the transfer arms 240A and 240B are bent alternately, the processed substrate W in the processing unit at the front can be taken out, and the unprocessed substrate W can be carried into the processing unit.

FIG. 12 is a view for explaining the transfer of the substrate W in the unit arrangement section MP, the transfer of the substrate in the indexer section ID, and the transfer of the substrate between the unit arrangement section MP and the indexer section ID.

The substrate transfer robot TR3 provided for the indexer unit ID has the structure shown in FIG.
A transfer arm 40 for transferring a substrate to and from the P-side substrate transfer robot TR21 is provided.

The substrate transfer robot TR3 receives the substrate W transferred to the transfer position P1 by the substrate transfer robot TR21 on the unit placement part MP side, stores the substrate W in the cassette CA, and stores the substrate W in the cassette CA in the cassette CA. It is taken out of the CA, moved to the transfer position P1, and transferred to the substrate transfer robot TR21. That is, as a whole, the substrate transfer robot TR3 can reciprocate in the Y direction on the path provided in the indexer unit ID. In the illustrated position, the transfer arm 40
Moves in the ± Z direction and the X direction to transfer the substrate W to and from the front substrate transfer robot TR21. On the other hand, when the substrate transfer robot TR3 moves in the ± Y direction from the position shown in the figure and the head 224 rotates to be in a state of facing the front of any of the cassettes CA, the transfer arm 40 moves in the ± Z direction and -X direction. To transfer the substrate W to and from the cassette CA.

The substrate transfer robot TR21 provided at the center of the unit placement section MP transfers the substrate W received from the substrate transfer robot TR3 at the transfer position P1 to a surrounding processing unit (for example, a cleaning processing unit SS).

Note that the exchange of the substrates is performed at the transfer positions P1 and P2 with respect to the indexer unit ID and the interface IF. That is, the substrate transport robot TR21 moves the substrate W, which has completed the processing in the unit placement section MP in the forward direction, to the transfer position P2, where the substrate is exchanged with the interface IF. Also,
The substrate transport robot TR21 moves the substrate W having completed the processing in the reverse direction to the transfer position P1, where the substrate is exchanged with the indexer unit ID.

As described above, in the substrate processing apparatus according to the third embodiment, the first arm segments 241A and 241B on the tip end sides of the first and second transfer arms 240A and 240B are positioned at the unit arrangement portion MP with respect to the head 224. And the first and second transfer arms 240A and 240B.
The stroke can be extended while keeping the operation area of the device narrow. Therefore, it is possible to reduce the unit arrangement portion MP in which the substrate transport robot TR21 is arranged, and to achieve a footprint reduction of the substrate processing apparatus.

[Fourth Embodiment] A substrate processing apparatus according to a fourth embodiment is a modification of the substrate processing apparatus according to the third embodiment. The substrate transport robot TR21 shown in FIG. This is replaced with a substrate carrier robot TR31 of a slide extendable type. Therefore, the description of the other common parts is omitted, and the substrate transport robot TR31 is omitted.
Only the structure will be described.

FIG. 13 is a perspective view showing the structure of the main part of the substrate transport robot TR31. Substrate transfer robot TR31
The stage 323 that supports the head 324 can be moved up and down in the ± Z direction by a Z drive mechanism 325 having a pantograph structure similar to that of the substrate transfer robot TR3 shown in FIG. Also, the head 324 is mounted on the stage 323.
Is driven by a vertical rotation shaft 323a connected to a Z-axis rotation mechanism (not shown) provided in the above-described configuration, and can be rotated to any position around the Z-axis.

On the head 324, a first substantially identical structure
And second transfer arms 340A and 340B. Each of the transfer arms 340A and 340B expands and contracts by the same mechanism as that shown in FIG. 5, and when accessing the processing unit, takes out the processed substrate W in the processing unit and supports it on the holder member 341B. The unprocessed substrate W on the holder member 341A can be carried into this processing unit.

As described above, in the substrate processing apparatus according to the fourth embodiment, the first and second transfer arms 340A and 340B can be extended and contracted in the unit arrangement section MP by the same mechanism as that shown in FIG. Therefore, the stroke can be extended, and the minimum operation area required when the contracted first and second transfer arms 340A and 340B rotate and move up and down can be narrowed. Therefore, the unit arrangement part MP in which the substrate transport robot TR31 is arranged can be reduced, and the footprint of the substrate processing apparatus can be reduced.

[Fifth Embodiment] The substrate processing apparatus of the fifth embodiment is a modification of the substrate processing apparatus 10 of the first embodiment. In this apparatus, the substrate transport robot TR1 provided in the unit arrangement section MP is replaced with an articulated substrate transport robot TR21 as shown in FIG. 11 or a slide-expandable substrate transport robot TR31 as shown in FIG. FIG. 14 shows the substrate transfer robot TR3 provided for the section ID.
A conventional substrate transfer robot shown in FIG. In this case, at least in the unit arrangement part MP, the area of the transfer unit including the substrate transfer robot TR21 and the substrate transfer robot TR31 is reduced.

[Sixth Embodiment] The substrate processing apparatus of the sixth embodiment is a modification of the substrate processing apparatus 100 of the third embodiment. In this apparatus, the substrate transport robot TR21 provided in the unit arrangement section MP is the same as the conventional substrate transport robot R2 shown in FIG. 3 (however, the stage 33 is not moved). In this case, at least the indexer ID can be reduced.

[Seventh Embodiment] The substrate processing apparatus of the seventh embodiment is a modification of the substrate processing apparatus 100 of the third embodiment. In this apparatus, the substrate transfer robot TR3 provided in the indexer unit ID is a conventional substrate transfer robot as shown in FIG. In this case, at least the unit arrangement part MP can be reduced.

[0068]

As is apparent from the above description, according to the apparatus of the first aspect, the substrate loading / unloading section has the expansion / contraction mechanism that expands / contracts the transfer arm linearly in a plurality of stages in a substantially horizontal direction. Since the transfer device is provided, not only can the stroke of the transfer arm be easily increased as required, but also when the transfer arm rotates and moves up and down while the transfer arm holding the substrate is contracted. The minimum operation area required for the operation can be narrowed. That is, the transport stroke can be increased while keeping the unit space of the substrate transfer device small, and the substrate carrying-in / out portion can be reduced in size, and a footprint of the substrate processing device can be reduced. Furthermore, if the dimensions of the arm are secured on the base end side of the transfer arm and the mechanical strength is increased, the deflection and vibration of the transfer arm can be reduced.

Further, according to the apparatus of the second aspect, the substrate carrying-in / out portion bends and extends the transfer arm over a plurality of steps in a substantially horizontal plane so that the distal end of the transfer arm is maintained in a substantially horizontal direction while maintaining the posture. Since the moving arm has a bending and stretching mechanism for linearly moving the moving arm, it is possible to easily lengthen the stroke of the transferring arm while keeping the operating area of the transferring arm narrow. Accordingly, the size of the substrate loading / unloading unit can be reduced, and the footprint of the substrate processing apparatus can be reduced. Furthermore, if the dimensions of the arm are secured on the base end side of the transfer arm and the mechanical strength is increased, the deflection and vibration of the transfer arm can be reduced.

Further, according to the apparatus of the third aspect, the unit disposing portion bends and extends the transfer arm over a plurality of steps in a substantially horizontal plane, thereby linearly moving the transfer arm in a substantially horizontal direction while maintaining the end of the transfer arm. Not only the stroke of the transfer arm can be easily increased, but also the minimum operation required when the transfer arm rotates and moves up and down in a contracted state. By reducing the area, the unit arrangement portion can be reduced in size, and the footprint of the substrate processing apparatus can be reduced. Further, if the dimensions of the arm are secured on the base end side of the transfer arm to increase the mechanical strength, the deflection and vibration of the transfer arm can be reduced.

According to the apparatus of the fourth aspect, the substrate transfer device provided in the unit arrangement portion bends and extends the transfer arm in a plurality of steps in a substantially horizontal plane, thereby maintaining the posture of the tip end of the transfer arm. Since the bending / stretching mechanism that moves linearly in a substantially horizontal direction is provided, it is possible to easily increase the stroke of the transfer arm while keeping the operation area of the transfer arm narrow according to the arrangement of the plurality of processing units around the transfer unit. Therefore, the size of the unit arrangement portion can be reduced, and the footprint of the substrate processing apparatus can be reduced. Further, if the dimensions of the arm are secured on the base end side of the transfer arm to increase the mechanical strength, the deflection and vibration of the transfer arm can be reduced.

Further, according to the apparatus of claim 5, since the unit arranging section arranges a plurality of processing units around the substrate transfer device which transfers the substrate to and from these processing units, As the transfer stroke of the substrate transfer device on the loading / unloading unit side is increased, the transfer stroke of the substrate transfer device provided on the unit placement unit side is kept to a minimum, and this substrate transfer device and the substrate transfer / in / out unit The substrate can be transferred to and from the substrate transfer device on the side.

According to the apparatus of the sixth or seventh aspect, the transfer arm or the transfer arm rotatably connects three or more odd-numbered arm segments including the substrate mounting portion at the leading end. Since the effective length of each arm segment except the substrate mounting arm is equal, the angle of the base end arm segment is α, and the adjacent one of the arm segments except the substrate mounting arm is α When the angle β formed between them is equal to 2α and the angle γ formed between the substrate mounting arm and the arm segment adjacent thereto is α, the substrate mounting arm at the distal end is maintained in the horizontal direction while maintaining its posture. It can be moved linearly.

[Brief description of the drawings]

FIG. 1 is a plan view illustrating a substrate processing apparatus according to a first embodiment.

FIG. 2 is a front view illustrating the substrate processing apparatus according to the first embodiment.

FIG. 3 is a view for explaining transfer of a substrate between an indexer unit and a unit arrangement unit, and the like.

FIG. 4 is a perspective view illustrating the structure of the transfer robot.

FIG. 5 is a side view illustrating an upper structure of the transfer robot.

FIG. 6 is a diagram for explaining the operation of the transfer robot of FIG. 4;

FIGS. 7A and 7B are a plan view and a side view illustrating an upper structure of a transfer robot incorporated in a substrate processing apparatus according to a second embodiment.

FIG. 8 is a diagram illustrating a telescopic mechanism of a transfer arm of the transfer robot of FIG. 7;

FIG. 9 is a view for explaining the operation of the transfer arm of FIG. 8;

FIG. 10 is a diagram illustrating an arrangement configuration of a substrate processing apparatus according to a third embodiment.

FIGS. 11A and 11B are a plan view and a front view illustrating an upper structure of a transfer robot incorporated in a substrate processing apparatus according to a third embodiment.

FIG. 12 is a view for explaining transfer of a substrate between an indexer unit and a unit arrangement unit, and the like.

FIG. 13 is a perspective view illustrating an upper structure of a transfer robot incorporated in a substrate processing apparatus according to a fourth embodiment.

FIG. 14 is a side view illustrating the structure of a conventional transfer robot.

FIG. 15 is a plan view illustrating the structure of a conventional transfer robot.

[Explanation of symbols]

 10, 100 Substrate processing apparatus 40, 140 Transfer arm 141 142, 143 First to third arm segments 240A, 340A First transfer arm 240B, 340B Second transfer arm TR1, TR2, TR21, TR31 Transfer robot TR3, TR13 On-board robot ID indexer IF interface

Continuing on the front page (72) Inventor Masao Tsuji 322 Habushishi Furukawacho, Fushimi-ku, Kyoto, Japan Dainippon Screen Manufacturing Co., Ltd. (72) Inventor Yuki Iwami 322 Habushishi, Furukawacho, Fushimi-ku, Kyoto, Japan Inside Screen Manufacturing Co., Ltd. (72) Inventor J 一 ichi Nishimura 322 Hahazushi Furukawacho, Fushimi-ku, Kyoto-shi Dainichi Inside Screen Manufacturing Co., Ltd. (72) Inventor Akihiko Morita Hashizushi Furukawacho, Fushimi-ku, Kyoto-shi 322 Dainichi Screen Manufacturing Co., Ltd.

Claims (7)

[Claims] 1. A substrate processing apparatus comprising: a unit arrangement section in which a plurality of processing units for performing predetermined processing on a substrate are arranged; and a substrate carry-in / out section for transferring the substrate to and from the unit arrangement section. The substrate loading / unloading unit is configured to rotate a transfer arm that holds a substrate around a vertical axis and move up and down along the vertical axis, and extend and contract the transfer arm linearly in a substantially horizontal direction over a plurality of stages. A substrate processing apparatus comprising: a substrate transfer device having an extension mechanism. 2. A substrate processing apparatus comprising: a unit arrangement section in which a plurality of processing units for performing a predetermined process on a substrate are arranged; and a substrate carry-in / out section for transferring the substrate to and from the unit arrangement section. The substrate loading / unloading unit includes a rotation elevating mechanism that rotates a base end of a transfer arm that holds a substrate around a vertical axis and moves up and down along the vertical axis, and flexes and extends the transfer arm over a plurality of steps in a substantially horizontal plane. A substrate transfer device having a bending and stretching mechanism for linearly moving the distal end of the transfer arm in a substantially horizontal direction while maintaining a posture. 3. A substrate processing apparatus comprising: a unit arrangement section in which a plurality of processing units for performing predetermined processing on a substrate are arranged; and a substrate carry-in / out section for transferring the substrate to and from the unit arrangement section. The unit disposition portion is configured to rotate the base end of the transfer arm that holds the substrate around a vertical axis and move up and down along the vertical axis, and by bending and extending the transfer arm over a plurality of steps in a substantially horizontal plane. A substrate processing apparatus, comprising: a substrate transfer device having a bending and stretching mechanism for linearly moving a distal end of the transfer arm in a substantially horizontal direction while maintaining a posture. 4. A unit disposing unit which disposes a plurality of processing units for performing a predetermined process on a substrate around a substrate transfer device which transfers a substrate between the plurality of processing units and the unit disposing unit. A substrate transfer apparatus for transferring a substrate by a substrate transfer apparatus, wherein the substrate transfer apparatus rotates a base end of a transfer arm holding a substrate around a vertical axis and moves up and down along the vertical axis. A lifting / lowering mechanism, and a bending / extension mechanism for bending and extending the transfer arm in a plurality of steps in a substantially horizontal plane to linearly move the distal end of the transfer arm in a substantially horizontal direction while maintaining a posture. Substrate processing equipment. 5. The apparatus according to claim 1, wherein the unit arranging section arranges the plurality of processing units around a substrate transfer device that transfers a substrate to and from the processing unit. 3. The substrate processing apparatus according to any one of 2. 6. The transfer arm is a connection body including three or more odd-numbered arm segments rotatably connected to each other including a substrate mounting portion at a tip end, excluding the substrate mounting arm. 3. The substrate processing apparatus according to claim 2, wherein the effective length of each arm segment is equal. 7. The transfer arm is a connected body including three or more odd-numbered arm segments rotatably connected to each other including a substrate mounting portion at a tip end, and excluding the substrate mounting arm. 5. The substrate processing apparatus according to claim 3, wherein the effective lengths of the arm segments are equal.