KR100786232B1 - Deposition Source for Organic Material - Google Patents

Abstract

The present invention relates to an organic vapor deposition apparatus, the configuration comprising: a mounting table on which a substrate is placed; And a first transporting device and a second transporting device pivoted in conjunction with the mounting table, wherein the substrate is horizontally transported to enable organic material deposition.

The present invention has the effect of minimizing particle generation during substrate transfer and improving organic material deposition uniformity.

Conveyer, articulated arm, reduction member, drive part

Description

Deposition Source for Organic Material

1 is a cross-sectional view showing a conventional organic material deposition apparatus.

2 is a cross-sectional view showing an organic material deposition apparatus of the present invention.

3 is a partially enlarged cross-sectional view showing the substrate transfer device shown in FIG.

Figure 4 is a plan view showing an operating state according to the organic material deposition apparatus of the present invention.

5 is a plan view illustrating a state in which the substrate illustrated in FIG. 4 is transferred;

<Explanation of symbols for the main parts of the drawings>

10 deposition chamber 12 evaporation source

20: first transfer device 30: second transfer device

210,310: Drive part 212,312: Reference axis

220,320: First joint cancer 230, 330: Second joint cancer

240: loading table

The present invention relates to an organic material deposition apparatus, and more particularly, to an organic material deposition apparatus capable of minimizing particle generation during substrate transfer and improving organic material deposition uniformity.

In general, EL (Electro Luminecence) device is a spontaneous light emitting display device, attracting attention as a next-generation display device because of its advantages of wide viewing angle, excellent contrast, and fast response speed. EL devices are classified into inorganic EL devices and organic EL devices according to materials for forming an emitting layer, and organic EL devices have excellent luminance, driving voltage, and response speed characteristics and are capable of multicoloring, compared to inorganic EL devices. have.

Recently, with the rapid development of information and communication technology and the expansion of the market, a flat panel display has been spotlighted as a display device. Such flat panel displays include liquid crystal displays, plasma display panels, organic light emitting diodes, and the like.

 Among them, the organic light emitting diode has a very good advantages such as fast response speed, lower power consumption than conventional liquid crystal display, light weight, no need for a separate back light device, and can be made ultra thin, and high brightness. It is spotlighted as an element.

Such an organic light emitting device is a principle in which a suitable energy difference is formed in the organic thin film and emits light by applying a voltage between the anode and the cathode by coating an anode film, an organic thin film, and a cathode film on a substrate. That is, the excitation energy left by recombination of injected electrons and holes is generated as light. In this case, since the wavelength of light generated according to the amount of the dopant of the organic material may be adjusted, full color may be realized.

The detailed structure of the organic light emitting device is an anode, a hole injection layer, a hole transfer layer, an emitting layer, an electron transfer layer, an electron injection on a substrate A layer (Eletron Injection Layer) and a cathode (Cathode) is formed by laminating in order. In this case, ITO (Indium Tin Oxide) having a small sheet resistance and good permeability is mainly used as the anode. And an organic thin film is composed of a hole injection layer, a hole transport layer, light emitting layer, an electron transport layer, the electron injection layer, the multi-layer to increase the light emitting efficiency, an organic material used for the light emitting layer is Alq _3, TPD, PBD, m-MTDATA, TCTA. As the cathode, a LiF-Al metal film is used. In addition, since the organic thin film is very weak to moisture and oxygen in the air, an encapsulation film is formed on the top to increase the life time of the device.

The organic light emitting device is driven as follows. First, when voltage is applied between the selected anode and the cathode, holes injected from the selected anode move in the light emitting layer via the hole transport layer. Meanwhile, electrons injected from the cathode from the cathode are injected into the emission layer via the electron transport layer, and carriers are recombined in the emission layer to generate excitons. The exciton is changed from the excited state to the ground state, whereby an image is formed by the light emission of the molecules on which the light emitting layer is formed.

In the organic light emitting diode, the above-described electrode layer and the organic thin film layer are deposited for each pixel on the upper surface of the substrate by using a metal deposition mask to realize three colors of red, blue, and green at the time of manufacture.

Conventional organic material deposition equipment is provided with a deposition chamber 1, the deposition is performed on the substrate (S) in the interior, as shown in Figure 1, the upper side in the deposition chamber 1, the substrate (S) and the shadow mask ( The substrate mounting table 3 is provided with a separate alignment device (not shown) for aligning the correct position to the correct position, and the substrate mounting table 3 is provided below the substrate mounting table 3 on which the substrate S is mounted. An evaporation source 2 for evaporating the organic material to deposit S) is provided on the inner bottom surface.

Here, by precisely aligning the substrate S and the shadow mask, the resolution of the organic light emitting panel may be improved by clarifying the distinction of each pixel in manufacturing the organic light emitting device.

In order to perform uniform deposition on the substrate S, a transfer device 3 is provided on the left and right sides of the deposition chamber 1, and when the transfer device 4 is driven by an external applied power source, The substrate mounting table 3 in which the shadow mask is placed moves at a constant speed, and deposits are uniformly deposited on the entire surface of the substrate S by the evaporation source 2. As the transfer device 4, a driving method using a rack, a pinion or a belt provided with an LM guide is adopted.

However, in the case of the transfer device 4, the LM or the belt is operated in a state in which a plurality of particles are provided, thereby generating particles due to each friction, and the substrate is damaged by the particles as particles are scattered in the deposition chamber. There was this.

The present invention has been made to solve the above problems, an object of the present invention is to provide an organic material deposition apparatus that can improve the organic material deposition uniformity while minimizing the generation of particles during substrate transfer.

The present invention has the following configuration to achieve the above object.

An organic material deposition apparatus of the present invention, the mounting table on which the substrate is placed; And a first transporting device and a second transporting device pivoted in conjunction with the mounting table, wherein the substrate is horizontally transported to enable organic material deposition.

In addition, in the organic material deposition apparatus of the present invention, the first transfer device and the second transfer device are connected to the first, second, third reduction member and the first, second, third reduction member, respectively, The drive unit is interlocked with the reduction member, the driving unit is driven with a uniform reduction ratio, and the first joint arm and the second joint arm rotated by the rotational force of the first, second, and third reduction members, and the connection member It is made by any one selected from a chain, a belt and a gear, and the driving unit is located outside the deposition chamber, the first and second joint arms are provided inside.

The deceleration member is configured such that the first deceleration member and the third deceleration member have the same deceleration ratio, and the second deceleration member is driven with a reduction ratio smaller than that of the first and third deceleration members. An imaginary baseline is placed on the reference axis of the joint cancer so that the change in angle between the first and second joint arms has a reduction ratio that is always doubled than the change in the angle between the first and second joint cancers. The reduction member preferably has a reduction ratio having a change amount always equal to the change in the angle of the reference axis of the first joint arm.

In addition, the first and second joint cancers can maintain the inside of the airtight.

Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings.

As shown in FIG. 2 or FIG. 3, the organic material deposition apparatus includes a deposition chamber 10 for performing deposition on a substrate S provided therein, and a substrate S disposed above the deposition chamber 10. And a substrate stacker 240 having a separate alignment device (not shown) for aligning a shadow mask (not shown) to an accurate position, and depositing the substrate S at the center of the bottom surface of the deposition chamber 10. An evaporation source 12 for evaporating organic matters is provided.

Here, at least one evaporation source 12 is provided so as to deposit the organic material of any one evaporation source 12 of the plurality of evaporation sources 12 when the deposition process is first performed, and then the organic material of the evaporation source 12 disappears. When the exchange is required, the evaporation source 12 is closed, the other evaporation sources 12 are connected to each other, and the organic materials are sequentially exchanged while the organic material is supplied to the deposition chamber 10 by the evaporation source 12.

Here, by precisely aligning the substrate (S) and the shadow mask on the substrate mounting table 240 to make the distinction of each pixel in the manufacturing of the organic light emitting device to improve the resolution of the organic light emitting panel (panel).

In addition, in order to uniformly deposit the organic material on the substrate (S) repeatedly performing the horizontal movement of the substrate (S), pivoting the mounting table 240 on which the substrate is placed, the mutually opposite folding motion The 1st conveyance apparatus 20 and the 2nd conveyance apparatus 30 are provided. The first transfer device 20 and the second transfer device 30 are provided with reference parts 212 and 312 of the drive parts 210 and 310 in a state where the drive parts 210 and 310 connected to the inside of the deposition chamber 10 are provided on the bottom surface thereof. It is drawn into the deposition chamber 10. At this time, the reference axis and the deposition chamber to maintain the mutual airtight using a packing (not shown). The first deceleration members are positioned inside the first joint arms 220 and 320 while the reference shafts 212 and 312 are inserted and the first joint arms 220 and 320 are positioned to one side. 222). Since the first transfer device and the second transfer device have the same configuration, only the configuration of the first transfer device 20 will be described. At this time, a hole (not shown) formed by coupling by the first joint arm 220 and the reference axis 212 is kept tight by using a packing (not shown), which is rotated by the driving unit. 1 To prevent the particles from being released into the deposition chamber even if particles are generated in the reduction member.

Meanwhile, the second joint arm 230 is positioned on the other side to which the first joint arm 220 and the reference axis 212 are coupled, and the second joint arm 230 and the first joint arm 220 are positioned. A pair of second deceleration members 232a and 232b connected to each other by a shaft (not shown) is positioned to be in contact with each other. In this case, as described above, the airtightness of the through hole (not shown) of the second joint arm and the first joint arm can be maintained. After coupling the third reduction member 234 to the other side of the second reduction member 232a coupled to the second joint arm 230, the third reduction member 234 and the shaft (not shown) may be used. Combine with the mounting table 240. In this state, when each of the first, second, and third deceleration members is connected using the connection member 250, the substrate S is seated on the mounting table 240 by the driving force of the driving unit 210, and the horizontal movement is performed horizontally. By repeatedly performing the movement, it is possible to prevent the scattering of particles that may occur when driving the deceleration member, and at the same time, to simplify the transfer operation. The first deceleration member and the third deceleration member have the same reduction ratio, and the second reduction member is driven with a reduction ratio smaller than the first and third reduction members so that the loading table can be transferred using the rotational force transmission of the driving unit 210. The loading table allows horizontal movement, not curved movement.

Here, the connection member 250 is made by any one selected from the chain, belt and gear, it is preferable that the driving force is transmitted by the belt. This is because the generation of particles due to friction between the deceleration member and the connecting member can be minimized, and the mechanical response speed is fast and the operation error is small.

Hereinafter, the operating state of the present invention will be described with reference to the accompanying drawings, FIGS. 4 to 6.

First, referring to FIG. 4, the substrate S and the shadow mask (not shown) are mounted on the mounting table 240. At this time, the first transfer device 220 is located in a folded state, and the second transfer device 30 is located in an unfolded state. This is because when the first joint arm (220,320) and the second joint arm (230,330) to form a virtual reference line (Fiducially-F) on the reference axis (212,312), the mounting table 240 and each second joint The sum of the angles θ3 and θ3 'between the arms 230 and 330 and the reference line F and the angles θ1 and θ1' between the respective first joint arms 220 and 320 is equal to the loading table 240 and the reference axis 212. It is equal to the angle (θ2, θ2 ') between the first joint arm (220,320) and the second joint arm (230,330) connecting the. The first reduction member and the third reduction member for driving the first joint arm and the second joint arm, the reduction ratio of the first reduction member and the third reduction member has the same reduction ratio, the second reduction member is the first, 3 It is to allow the loading table to move horizontally by allowing the first joint arm and the second joint arm to have a constant angular change by being driven with a reduction ratio smaller than the reduction member.

For example, when the angles θ1, θ2, and θ3 formed by folding the first joint arm 220 and the second joint arm 230 provided in the first transfer device are small, the second transfer device The angles θ1 ', θ2', and θ3 'formed on each of the first joint arm 320 and the second joint arm 330 provided at each of the first joint arm 320 and the second joint arm 330 may be larger than the first transfer device. . On the contrary, as shown in FIG. 5, the second transfer device is folded and the first transfer device is configured such that the reduction ratios of the reduction members have the same angle change in order to be in an extended state. As such, the first and second joint arms are driven at different angles, thereby allowing uniform organic material deposition from the evaporation source 12 located on the bottom surface of the substrate through horizontal movement of the substrate S. FIG.

Here, in order to make the angle change of each of the angles θ1, θ2, and θ3 constant, it is preferable that the reduction ratio of the first reduction member and the third reduction member is always doubled with respect to the reduction ratio of the second reduction member. Do.

The present invention is not limited to the embodiments described above, and various modifications and changes can be made by those skilled in the art, which are included in the spirit and scope of the present invention as defined in the appended claims.

The present invention has the following effects by the above configuration.

The present invention has the effect of minimizing particle generation during substrate transfer and improving organic material deposition uniformity.

Claims (8)

In the organic material deposition apparatus, A mounting table on which a substrate is placed; A connection member for interlocking the first, second and third reduction members and the first, second and third reduction members, a drive unit interlocked with the speed reduction member and driven with a uniform speed reduction ratio, and the first, second and third speed reduction members; And a first conveying device and a second conveying device, each consisting of a first joint arm and a second joint arm rotated by the rotational force of the deceleration member. The first transfer device and the second transfer device is an organic deposition device, characterized in that the mutual movement of the mutually opposite, pivoting the mounting table on which the substrate is placed to allow the substrate to be transported horizontally and to deposit organic matter. delete delete The method of claim 1, The driving unit is located outside the deposition chamber, and the first joint arm and the second joint arm is characterized in that the organic vapor deposition apparatus characterized in that it is provided. delete delete delete The method of claim 4, wherein The first joint arm and the second joint arm is an organic material deposition apparatus, characterized in that to keep the inside airtight.

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