JPH09181142A - Substrate conveying equipment and intermediate delivering equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To increase the maximum range while restraining the arm moving radius. SOLUTION: Three arms 41, 42, 43 are linked together, and an arm linkage body is made. The base end portion of the body is subjected to pivotal motion control by a motor 44. The power of the motor 44 is transmitted by pulleys 61, 62, 64, 65 and belts 63, 66. While the joint part linking together the arms 42, 43 is bent, the attitude facing an exposure unit of the substrate mounting arm 41 is maintained. In this state, the substrate mounting arm 41 is rectilinearly moved. Thereby the arm moving radius is restrained in the length range of one out of the arms 42, 43, and the maximum range to the exposure unit side can be inceased up to the sum length of the three arms 41, 42, 43.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to, for example, a processing unit for performing various substrate processings such as resist coating before and after exposure processing, baking, and development, and an exposure unit for performing exposure processing. The present invention relates to a substrate transfer device and an intermediate transfer device for transferring (intermediate transfer) of substrates between different units.

[0002]

2. Description of the Related Art In a substrate processing apparatus for performing various substrate processing in a photolithography process on a substrate, a processing unit for performing various substrate processing before and after the exposure process in the photolithography process has been conventionally used. , And an exposure unit for performing an exposure process.

The processing unit is a spin coater, a spin developer, a bake unit (hot plate) for performing each substrate processing before exposure processing such as resist coating and pre-baking, and each substrate processing after exposure processing such as development and post-baking. (Including a cool plate) and various devices, such as a substrate transfer robot that performs substrate transfer within the processing unit, etc.

The exposure unit is an exposure machine such as a reduction projection exposure machine (stepper) for performing exposure, an alignment mechanism for performing positioning for printing an exposure pattern in the exposure machine, and a substrate in the exposure unit. Substrate transfer robots for carrying out the above are integrated into a unit and configured.

In such a substrate processing apparatus, first, the processing unit performs the substrate processing before the exposure processing, then the exposure unit performs the exposure processing, and the processing unit again performs the substrate processing after the exposure processing. Is performed. Therefore, it is necessary to transfer (intermediate transfer) the substrate between the processing unit and the exposure unit, and usually an intermediate transfer device for transferring the substrate between these units is provided. This intermediate delivery device is conventionally provided with a substrate transfer table for delivering a substrate to a processing unit side substrate transfer robot, a buffer section for temporarily storing the substrate when a trouble occurs in the processing unit or the exposure unit, and the substrate. In addition to a substrate transfer robot that moves substrates to a transfer table or a buffer unit, usually, a substrate loading device for delivering a pre-exposure substrate to an exposure unit, and an exposed substrate that has been subjected to exposure processing from the exposure unit. And a substrate unloading device for loading into the intermediate delivery device. FIG. 8 and FIG. 9 are diagrams showing a substrate carry-in device and a substrate carry-out device (hereinafter, these devices will be collectively referred to as “IF substrate carrying section”). The IF substrate transfer unit includes an arm 101 for mounting and transferring a substrate and an arm 10 for transferring the substrate.
1. A support arm 102 for rotatably supporting 1 is driven by a pulse motor 103 and a power transmission means 104.

Here, the power transmission means 104 is composed of four pulleys 105, 117, 118, 121 and two timing belts 111, 112. The arm 101 and the pulley 105 are fixed to each other by a shaft 115. In addition, the support arm 102 and the shaft 11
6 is fixed to each other, a pulley 117 is fixed to the lower end of the shaft 116, and is connected to a pulley 119 fixed to the rotary shaft 118 of the motor 103 via the timing belt 111. Further, the pulley 121 on which the shaft 116 is loosely fitted is non-rotatably fixed to the base of the IF substrate transport unit main body (not shown), and is connected to the pulley 105 via the timing belt 112. The diameter ratio between the pulley 105 and the pulley 121 is 1: 2, so that the rotation speed ratio between the shaft 115 and the shaft 116 is 2: 1. Further, the distance from the center point of the substrate mounting area of the arm 101 to the axis 115 is defined as “arm length”,
Assuming that the distance from the shaft 115 to the shaft 116 is “support arm length”, both arm length and support arm length are set to the same dimension Ra.

The operation of this configuration will be described. First, as shown in FIG. 9, when the substrate is placed on the three pins 124 of the placing tool 124a at the standby position Pw for transferring the substrate, the supporting arm 102 is moved in the Rr direction by the driving force of the motor 103. To the axis 1, and in synchronization with this, the axis 1
15 is rotated in the opposite Qr direction by the aforementioned power transmission means. As a result, the mounting portion 101 of the arm 101
a goes straight in the Rev direction. At this time, the arm 101 is operating at a position lower than the substrate on the pin 124. Then, the arm 101 moves the mounting tool 12 at the standby position Pw.
When reaching 4a, the arm 1 is moved by a cylinder (not shown).
01 moves up, and the substrate is picked up by the mounting portion 101a and received. Next, the support arm 102 is rotated in the Rf direction by the driving force of the motor 103, and in synchronization with this, the shaft 11
5 is rotated in the opposite Qf direction by the aforementioned power transmission means. As a result, the mounting portion 101a of the arm 101 is
The upper substrate goes straight in the For direction. When the arm 101 reaches a predetermined position Pl in the exposure unit, the arm 101 is lowered by a cylinder (not shown), and the substrate is placed on the pin 125 in the exposure unit. Then the arm 101
Moves away in the Rev direction and stops at a predetermined position Po.

[0008]

In the prior art, the following problems have been pointed out.

(1) Conventionally, the mounting portion 1 of the arm 101
01a has pins 124 and 125 as shown in FIGS.
It is necessary to adopt a shape that does not interfere with. However, since the arm 101 moves back and forth in the For / Rev directions while rotating in the Qf / Qr directions around the shaft 115, the operation becomes complicated, and thus the mounting portion 101a has a pin avoiding notch 101b. Then it has to be complicated. Then, there is a problem that the manufacturing cost becomes high at the stage of mold manufacturing.

(2) The IF substrate transfer section is arranged in the intermediate transfer device and is used to transfer the substrate.
01 is rotating around the shaft 115 in the Qf and Qr directions and is F
Since it moves back and forth in the or. Rev direction, it is necessary to secure a space for the arm 101 to rotate and move back and forth in the intermediate delivery device, which causes a problem that the intermediate delivery device itself becomes large.

(3) Further, the IF substrate transfer section is usually arranged in the intermediate transfer device and is used for transferring the substrate to and from the exposure unit.
Since it moves in the For / Rev direction while rotating in the Qr direction, the substrate is received in the exposure unit, and when the substrate is unloaded from the exposure unit, the transfer unit of the exposure unit does not interfere with the arm 101. Since an opening having a large size must be formed, the processing atmosphere in the exposure unit is disturbed due to this opening.

(4) Standby position P in the IF unit
By providing the w mounting tool 124a itself, the device space of the IF unit was enlarged.

In view of the above problems, it is an object of the present invention to provide a substrate transfer apparatus which can prevent the arm shape from becoming complicated and can reduce the arm turning radius, and also can be made small and compact, and further, a processing unit. It is an object of the present invention to provide an intermediate transfer device that does not disturb the processing atmosphere in the exposure device when applied to the intermediate transfer device between the exposure unit and the exposure unit.

[0014]

According to a first aspect of the present invention, there is provided a substrate transfer device for advancing and retracting a substrate to and from an external predetermined substrate transfer part, the substrate transfer device being arranged at the most tip end. An arm connecting body in which three or more odd-numbered arms including the mounting arm are connected, a rotating means for controlling rotation of a base end portion of the arm connecting body, and a rotational force of the rotating means is transmitted. Then, while bending at least one joint part that connects a pair of arms other than the substrate mounting arm, while maintaining the posture of the substrate mounting arm facing the predetermined substrate transfer portion, Power transmission means for linearly moving the mounting arm.

According to a second aspect of the present invention, there is provided the substrate transfer apparatus according to the first aspect, wherein the arm connecting member is a first arm as a substrate mounting arm connected to the most tip, and A second arm that rotatably supports the base end portion of the first arm around the first rotation shaft, and the base end portion of the second arm is the third arm.
A third arm that is supported about the rotation axis of the second arm and that rotatably supports the base end portion of the second arm about the second rotation axis. The distance between the rotary shaft and the second rotary shaft and the distance between the second rotary shaft and the third rotary shaft are set to be the same.

According to a third aspect of the invention, there is provided the substrate transfer apparatus according to the first aspect, wherein the arm coupling body includes a first arm as a substrate mounting arm which is coupled to a tip end of the arm. A second arm that rotatably supports a first rotation shaft fixed to the base end of the first arm and that is rotatably supported by the second arm is supported around the third rotation shaft. And a third arm that rotatably supports a second rotation shaft fixed to a base end portion of the second arm and rotatably supports the second rotation shaft. The distance between the second rotating shafts and the distance between the second rotating shaft and the third rotating shaft are set to be the same.

Further, the power transmission means includes a first rotator fixed to the first rotation shaft of the first arm,
An annular second rotator fixed to a bearing portion of the second rotation shaft of the third arm, and a first rotator connecting the first rotator and the second rotator. 1 connecting member and the second
A third rotator fixed to the second rotative shaft of the arm, and a stationary member that is unrotatable with respect to the main body of the substrate transfer device and bears the third rotative shaft. And a second connecting member that connects the third rotating element and the stationary element. The diameter of the first rotator is twice the diameter of the second rotator, and the diameter of the third rotator is half the diameter of the stationary element.

According to a fourth aspect of the present invention, there is provided the substrate transfer apparatus according to the first aspect, wherein the substrate mounting arm is provided with positioning means for positioning the substrate.

According to a fifth aspect of the present invention, there is provided an intermediate transfer device interposed between the first substrate processing unit and the second substrate processing unit, wherein the second substrate processing of the intermediate transfer device is performed. The substrate transfer device is disposed at a boundary with respect to the unit, and advances and retracts the substrate to and from a predetermined substrate transfer part in the second substrate processing unit, wherein the substrate transfer device is disposed at the most tip end. An arm connecting body in which three or more odd-numbered arms including the mounting arm are connected, a rotating means for rotating and controlling a base end portion of the arm connecting body, and a rotating force of the rotating means. And a power transmission unit for linearly advancing and retreating the substrate mounting arm of the arm coupling body while maintaining a posture facing the predetermined substrate transfer portion.

According to a sixth aspect of the present invention, there is provided the intermediate transfer device according to the fifth aspect, wherein the arm connecting body is a first arm as a substrate mounting arm connected to the most tip, and A second arm that rotatably supports the base end portion of the first arm around the first rotation shaft, and the base end portion of the second arm is the third arm.
A third arm that is supported about the rotation axis of the second arm and that rotatably supports the base end portion of the second arm about the second rotation axis. The distance between the rotary shaft and the second rotary shaft and the distance between the second rotary shaft and the third rotary shaft are set to be the same.

According to a seventh aspect of the invention, there is provided the intermediate transfer device according to the fifth aspect, wherein the arm connecting body is a first arm serving as a substrate mounting arm which is connected to the most distal end, and A second arm that rotatably supports a first rotation shaft fixed to the base end of the first arm and that is rotatably supported by the second arm is supported around the third rotation shaft. And a third arm that rotatably supports a second rotation shaft fixed to a base end portion of the second arm and rotatably supports the second rotation shaft. The distance between the second rotating shafts and the distance between the second rotating shaft and the third rotating shaft are set to be the same.

Further, the power transmission means includes a first rotary member fixed to the first rotary shaft of the first arm,
An annular second rotator fixed to a bearing portion of the second rotation shaft of the third arm, and a first rotator connecting the first rotator and the second rotator. 1 connecting member and the second
A third rotator fixed to the second rotative shaft of the arm, and a stationary member that is unrotatable with respect to the main body of the substrate transfer device and bears the third rotative shaft. And a second connecting member that connects the third rotating element and the stationary element. The diameter of the first rotator is twice the diameter of the second rotator, and the diameter of the third rotator is half the diameter of the stationary element.

The invention according to claim 8 is the intermediate transfer device according to any one of claims 5 to 7, wherein the second substrate processing unit is an exposure device.

[0024]

BEST MODE FOR CARRYING OUT THE INVENTION

<Structure> FIG. 1 is a plan sectional view showing the structure of an entire substrate processing apparatus including a substrate transfer apparatus according to an embodiment of the present invention.
FIG. 2 is a front view of the intermediate delivery device viewed from the exposure unit side. 1 and subsequent figures are provided with an XYZ orthogonal coordinate system in order to clarify the positional relationship.

In the present embodiment and various modifications, the case where the present invention is applied to a substrate processing apparatus for performing each substrate processing in a photolithography process on a semiconductor wafer (substrate) is taken as an example. However, the present invention can be similarly applied to a substrate processing apparatus for various substrates such as a glass substrate for a liquid crystal display.

As shown in FIG. 1, a substrate processing apparatus to which a substrate transfer apparatus according to the present invention is applied includes an indexer 1, a processing unit 2 (first substrate processing unit), an interface unit (intermediate delivery apparatus, hereinafter, An “IF unit”) 3, an exposure unit 4 (second substrate processing unit), and the like are provided.

The indexer 1 is a loading / unloading table 1 for delivering a carrier C to and from an automatic guided vehicle (hereinafter referred to as "AGV") 5 of the carrier.
1 or the carrier C placed on the loading / unloading table 11
And a substrate transfer robot 23 in the processing unit 2, which will be described later, and the like.

The processing unit 2 includes a first device placement section 21.
And a second device placement section 22 and a transfer path 24 of the substrate transfer robot 23. In the first device placement unit 21,
A plurality of spin coaters SC for applying resist, spin developers SD for developing, and the like are provided along the X-axis direction in FIG.
In addition, the second device placement unit 22 is provided with a bake unit BU for performing pre-baking, post-baking, and the like, a plurality of edge exposure units EEW, and the like.

Further, in the present embodiment, in order to transfer the substrate W to the first substrate transfer robot 31 in the IF unit 3 which will be described later, in the vicinity of the end of the second apparatus placement portion 22 on the IF unit 3 side. The substrate transfer table 25 is provided. A plurality of substrate support pins 25 a are vertically fixed and erected on the substrate transfer table 25.
The substrate W is placed on a and the substrate W is delivered.

The transfer path 24 of the substrate transfer robot 23 is
It is provided between the first and second device placement parts 21 and 22. The substrate transfer robot 23 appropriately rotates the hand 23b around a vertical axis (hereinafter referred to as the Z axis), moves in the X and Z axis directions (delivery position adjustment direction), and expands and contracts to appropriately combine the spin coater SC and the spin coater SC. Developer SD,
Access to processing devices such as the bake unit BU and the edge exposure unit EEW (loading / unloading operation of the substrate W to / from each device), and placement / loading of the substrate W on the substrate transfer table 25.
Substrate W between each device in the take-out and processing unit 2
It is used for transportation. The substrate transfer robot 23 includes a horseshoe-shaped hand 23b having a plurality of protrusions 23a for placing and supporting the substrate W, and a telescopic unit 23c for expanding and contracting the hand 23b in the horizontal direction (XY plane). Has been done. The expansion / contraction part 23c is composed of a well-known uniaxial moving mechanism including a screw shaft (not shown), a motor, etc., and is rotated around the Z axis by a predetermined motor (not shown).

For example, when the substrate W is placed on the substrate transfer table 25, first, the X-axis direction of the hand 23b and the Z direction.
The hand 23b can be expanded and contracted above the substrate transfer table 25 by appropriately performing axial movement and rotation around the Z axis. Next, the hand 23b is extended in the direction of the substrate transfer table 25, and the substrate W supported and placed is placed on the substrate transfer table 25.
It is located slightly above the substrate support pin 25a. Then, the hand 23b is lowered in the Z-axis direction, the substrate W is placed on the substrate support pins 25a and delivered, and the hand 23b is retracted at a position further lowered. Substrate transfer table 25
The substrate W placed on the substrate W is taken out by the operation reverse to the above, so that the hand 23b lifts the substrate W from below the substrate W placed on the substrate delivery table 25.

The IF unit 3 is a portion corresponding to the intermediate transfer device according to the present invention, and as shown in FIGS. 1 and 2, the first substrate transfer robot 31, the buffer section 32, and the second substrate transfer robot. 33, the substrate loading device 34, and the substrate unloading device 35 are integrally configured as a unit. Further, in the present embodiment, the IF unit 3 is also provided with two table bases 37a and 37b for respectively setting the first and second cassettes 36a and 36b.

The first substrate transfer robot 31 places / takes out the substrate W on / from the substrate transfer table 25 in the processing unit 2 and an arbitrary storage rack 32 of the buffer section 32 which will be described later.
The substrate W is stored / removed in / from the a, and as shown in FIG.
b, a rotation driving unit 31c, a telescopic driving unit 31d, a substrate supporting unit 31e, and the like.

The Z-axis direction drive section 31a is provided in the IF unit 3
Is fixed to the lower surface of the screw shaft 31aa, a screw shaft 31aa is rotatably provided in the Z-axis direction, a guide shaft (not shown) is provided parallel to the screw shaft 31aa, and the screw shaft 31aa is provided in the forward and reverse directions. A motor 31ab for rotating the motor is also provided inside.

The base end portion of the connecting member 31b is screwed onto the screw shaft 31aa in the Z-axis direction drive portion 31a, and is slidably fitted to the guide shaft. By rotating the connecting member 31b, the connecting member 31b is moved in the Z-axis direction (moving up and down in the vertical direction). Further, the rotation driving unit 31 is provided at the tip of the connecting member 31b.
c is fixed.

The rotary drive unit 31c is provided with an upper rotary shaft 31c.
a is erected so as to be rotatable in the Z-axis (vertical) direction, and a motor 31cb for rotating the rotating shaft 31ca in the forward and reverse directions is internally provided. An extension / contraction drive unit 31d is fixed to the tip of the rotary shaft 31ca. This extension drive unit 31d
Is a timing belt 31 driven by a motor 31da
db is internally provided. This timing belt 31db
The base end of the substrate support 31e is connected to a part of
By driving the timing belt 31db, the board support portion 31e is expanded and contracted with respect to the expansion and contraction drive portion 31d. Further, by rotating the rotary shaft 31ca of the rotary drive unit 31c in the forward and reverse directions, the expansion and contraction drive unit 3 is rotated.
1d and the substrate support portion 31e are rotated around the Z axis (vertical), so that the substrate support portion 31e can be expanded and contracted in any direction within the XY plane (horizontal plane). Further, by rotating the screw shaft 31aa of the Z-axis direction driving portion 31a in the forward and reverse directions, the board supporting portion 31e is expanded and contracted through the connecting member 31b, the rotation driving portion 31c, and the expansion and contraction driving portion 31d.
The height in the axial (vertical) direction is adjustable. Reference numeral 2a in FIG. 2 indicates an opening through which the first substrate transfer robot 31 supporting the substrate W passes when the substrate W is transferred between the processing unit 2 and the IF unit 3. There is.

Further, the substrate supporting portion 31e is connected to the processing unit 2
The expansion / contraction drive unit 31d is arranged in front of the substrate transfer table 25 in the X-axis direction and in front of the buffer section 32 in the Y-axis direction so as to be expandable / contractible with respect to the substrate transfer table 25 and a buffer section 32 described later. Further, the extension / contraction drive unit 31d is Z
The Z-axis direction drive unit 31a includes the extension / contraction drive unit 31d and the rotation drive unit 31 via the connecting member 31b so that the extension / contraction drive unit 31d can rotate about the Z-axis even in the state of being lowered in the axial direction.
It is arranged at a position displaced from the lower side of c.

The buffer section 32 is arranged at a position sandwiched between the first substrate transfer robot 31 and a second substrate transfer robot 33 described later, and is supported on the inner surface of the IF unit 3. In the buffer section 32, a plurality of (for example, 50) storage shelves 32a are stacked and formed in a multi-step manner in the Z-axis (vertical) direction. In addition, each of the storage shelves 32a has an opening in a surface facing the first substrate transfer robot 31 and a second substrate transfer robot 33 described later, and these first and second substrate transfer robots 31 and 33 are opened. The substrate W is configured to be stored / removed.

The second substrate transfer robot 33 stores / unloads the substrate W into / from the arbitrary storage rack 32 a of the buffer section 32, places the substrate W on the substrate loading device 34, and transfers the substrate W from the substrate unloading device 35. For loading / unloading the substrate W into / from cassettes 36a, 36b, which will be described later, and includes a Y-axis direction drive portion 33a, a first connecting member 33b, a Z-axis direction driving portion 33c, and a second connecting member. 33d, a rotation drive unit 33e, a telescopic drive unit 33f, a substrate support unit 33g, and the like.

The Y-axis direction drive unit 33a includes the IF unit 3
Is fixed to the inner side surface of the guide shaft 33, the screw shaft 33aa is rotatably provided in the Y-axis direction, and is parallel to the screw shaft 33aa.
ab is provided internally, and a motor 33ac for rotating the screw shaft 33aa in the forward and reverse directions is also provided internally. The Y-axis direction drive unit 33a includes the expansion / contraction drive unit 33f and the substrate support unit 33g of the second substrate transfer robot 33, and the buffer unit 3a.
It is movably arranged between the Y axis direction front surface 2 and the X axis direction front surface of the substrate loading device 34 described later.

The base end of the first connecting member 33b has the above-mentioned Y
The first connecting member 33b is screwed onto the screw shaft 33aa in the axial drive unit 33a and is slidably fitted to the guide shaft 33ab, and the first connecting member 33b is rotated by rotating the screw shaft 33aa in the forward and reverse directions. It is configured to move in the direction (horizontal 1-axis direction). Further, a Z-axis direction driving portion 33c is fixedly provided on the tip end portion of the first connecting member 33b.

The Z-axis direction drive unit 33c of the second substrate transfer robot 33, the second connecting member 33d, and the rotation drive unit 33.
e, the expansion / contraction drive unit 33f, and the substrate support unit 33g are the first
The substrate transport robot 31 has the same configuration as the Z-axis direction drive unit 31a, the connecting member 31b, the rotation drive unit 31c, the expansion / contraction drive unit 31d, and the substrate support unit 31e, and performs the same operation. That is, the substrate support portion 33g is the extension drive unit 3
It is expandable / contractible with respect to 3f, and the expansion / contraction drive unit 33e and the substrate support unit 33g are Z-axis (vertical) by the rotation drive unit 33e.
The substrate support portion 33g can be expanded and contracted in an arbitrary direction within the XY plane (horizontal plane) by being rotated around. In addition, the Z-axis direction driving portion 33c causes the second connecting member 33
It is possible to adjust the height in the Z-axis (vertical) direction in which the substrate support portion 33g is expanded and contracted via d, the rotation drive portion 33e, and the expansion / contraction drive portion 33f. Furthermore, this second substrate transfer robot 3
In 3, the first connecting member 33b, the Z-axis driving portion 33c, and the second connecting member 33 are driven by the Y-axis direction driving portion 33a.
The position of the expansion / contraction drive unit 33f and the substrate support unit 33g in the Y-axis direction can be displaced via the rotation drive unit 33e.

In the present embodiment, the first substrate transfer robot 31, the buffer unit 32, and the second substrate transfer robot 33 are arranged in that order in the Y-axis direction drive unit 33a (one axis) of the second substrate transfer robot 33. (Direction moving means) is arranged in a straight line in parallel with the moving direction (Y-axis direction).

The substrate carry-in device 34 delivers the pre-exposure substrate to the substrate delivery section 4a of the exposure unit 4, and the substrate carry-out device 35 delivers the exposed substrate which has been exposed by the exposure unit 4 to the exposure unit. 4 is taken out from the substrate transfer part 4b and is taken into the IF unit 3. In the following description, the board loading device 34 in the IF unit 3 will be described.
The substrate unloading device 35 will be generically referred to as an "IF substrate transporting unit" as in the case of the conventional technique. As shown in FIGS. 3 to 7, the IF substrate transfer parts 34 and 35 are provided with a first arm (substrate mounting arm) for mounting the substrate W thereon.
41, a second arm 42 that rotatably supports the first arm 41 in a horizontal plane, and a third arm 43 that rotatably supports the second arm 42 in a horizontal plane. Rotating means 4 for rotating the third arm 43 in a horizontal plane
4 (electric motor), an arm base 45 for supporting the third arm 43 upward, and a second arm 42 and a first arm 41 when the third arm 43 is rotated by the rotating means 44. Power transmission means 46 for transmitting power to control these postures and movement directions. In addition, what connected three arms 41, 42, 43 is called an "arm connection body." And this arm connection body,
It has three joints.

The first arm 41 has two strip-shaped mounting pieces 51 arranged in parallel so as to mount the substrate W, and one connecting the base end portions of these mounting pieces 51. Is formed into a substantially U-shape in a plan view from the strip-shaped connecting portion 52 of
A stopper 54 (first positioning means) for contacting and positioning the substrate W is fixed to the base end and the tip of each mounting piece 51 by a pin or the like. Also, the connecting portion 5
A part of 2 has a positioning guide pin 8 which will be described later from the rear.
A positioning notch 54a (second positioning means) is formed to fit 8 to position the substrate on the first arm 41. Further, in the central portion of the connecting portion 52, as shown in FIG.
The first rotating shaft 55 shown in FIG.

A first bearing hole 56 for rotatably bearing the first rotating shaft 55 is formed at the tip of the second arm 42. A second rotating shaft 57 is vertically fixed to the base end of the second arm 42.

The third arm 43 is set to have the same length dimension as the second arm 42, and a tip end portion thereof has a second bearing hole for rotatably bearing the second rotating shaft 57. 58
Are drilled. A third rotating shaft 59, to which the turning force of the rotating means 44 is transmitted via a coupling coupling mechanism or the like, is vertically fixed to the base end portion of the third arm 43. ing.

The power transmission means 46 is the rotation means 4 described above.
4, a third rotating shaft 59, a first pulley (first rotating member) 61 fixed to the lower end of the first rotating shaft 55, and a second bearing hole of the third arm 43. A second pulley (second rotator) 62 fixed to the upper surface side of 58 and the first pulley 6
The first timing belt (first connecting member) 63 laid between the first and second pulleys 62 and the first timing belt fixed to the lower surface side of the second bearing hole 58 of the third arm 43. A third pulley (third rotator) 64, a fourth pulley (fourth rotator) 65 fixed to the arm 45 and loosely fitted to the third rotation shaft 59, and a third A second timing belt (second connecting member) 66 spanned between the pulley 64 and the fourth pulley 65. Here, the diameter of the first pulley 61 and the diameter of the second pulley 62 are set to 2 to 1, and the diameter of the third pulley 64 and the diameter of the fourth pulley 65 are set to 1 to 2. ing.

Further, as shown in FIG. 7, the first arm 4
The distance from the center point of the first substrate mounting area to the first rotating shaft 55 is defined as "first arm length Rw". Furthermore, the distance from the first rotation shaft 55 to the second rotation shaft 57 (hereinafter,
The “second arm length”) and the distance from the second rotation shaft 57 to the third rotation shaft 59 (hereinafter, referred to as “third arm length”) have the same length Ra. When the transport distance from the standby position of the substrate to the predetermined position in the exposure unit is 2Lr, Ra is set to about ½ of Lr. Then, the mounting position Pm of the rotating means 44 is arranged on the boundary line between the IF unit 3 and the exposure unit 4 so that the substrate is delivered as far as possible in the exposure unit 4.

Incidentally, the arm connecting body is the supporting plate 87.
The lifting / lowering cylinder 80 has a rod connected to the arm base 45 and is vertically moved with respect to the support plate 87. In addition, both the IF substrate transfer units 34 and 35
In order to move and adjust the Y-axis in the Y-axis direction, the support plate 87 is moved through the sliding member 76 as shown in FIGS.
It is slidably supported by the shaft rail 73. Further, two positioning guide pins 88 are erected on the support plate 87 at a position on the processing unit 2 side, and the guide pin movement for moving the positioning guide pins 88 in the same advancing and retreating direction as the first arm 41. A cylinder 89 for use is provided. The Y-axis rail 73 is supported by four Z-axis rails 81 so as to be movable and adjustable in the Z-axis direction. Reference numeral 85 in FIG. 3 indicates a support column for connecting and supporting the four Z-axis rails 81 to each other.

<Operation> Next, the operation of the substrate processing apparatus having the above configuration will be described. As shown in FIG. 1, first, the carrier C is set on the loading / unloading table 11 by the AGV 5, the unprocessed substrate W is transferred from the carrier C to the substrate transfer robot 23 in the processing unit 2, and then the baking by the bake unit BU and the spin coater SC are performed. Various processes such as resist coating by the above and edge exposure by the edge exposure unit EEW are performed.

Then, the IF unit 3 transfers the pre-exposure substrate W from the processing unit 2 to the exposure unit 4. At this time, as shown in FIGS. 1 and 2, the pre-exposure substrate W placed on the substrate transfer table 25 is taken out by the first substrate transfer robot 31 in the IF unit 3 and is stored in an arbitrary storage shelf of the buffer section 32. It is stored in 32a. The pre-exposure substrate W stored in the storage rack 32 a is taken out by the second substrate transfer robot 33, and the substrate loading device 34
Placed on At this time, the second substrate transfer robot 33
After placing the substrate directly on the placing piece 51 of the substrate carry-in device 34, remove the arm (not shown) of the second substrate transfer robot 33 from the space corresponding to the step between the placing piece 51 and the connecting portion 52. Just take it. Then, the guide pin moving cylinder 89
Is driven to move the positioning guide pin 89 to the exposure unit 4 side, and the positioning guide pin 88 and the mounting piece 51 are moved.
The substrate W is sandwiched between it and the stopper 54 at the front end of the substrate for positioning.

Next, when the rotating means 44 rotates the third arm 43 in the direction of Aω (counterclockwise) in FIG. 6 through the third rotating shaft 59 under the control of the control device (not shown),
The second rotating shaft 57 that is supported by the second bearing hole 58.
Rotates in the direction of Bω (clockwise) in FIG. 6 at the double rotation speed of the third rotation shaft 59 through the second belt 66 and the third pulley 64. As a result, the first rotating shaft 55 and the first arm 41, which are borne by the tip end portion of the second arm 42, go straight in the xl direction (X-axis direction) in FIG.

At this time, the rotation angle of the first pulley 61 is controlled by the second pulley 62 and the first belt 63. Here, since the diameter of the first pulley 61 is twice as large as the diameter of the second pulley 62, if the second arm 42 is used as a reference, the rotation speed is 1/2 times that of the second pulley 62. Although it rotates counterclockwise, since the second arm 42 itself is rotating and the fourth pulley 65 is immovable with respect to the support plate 87, the first pulley 61 is supported. The relative rotation angle with respect to the plate 87 does not change and the vehicle goes straight in the direction of xl in FIG. 6 (X-axis direction). Therefore, the first arm 41 moves straight while maintaining a posture facing the support plate 87 in the xl direction (direction toward the exposure unit 4). In this way, the loading of the pre-exposure substrate W placed on the first arm 41 into the exposure unit 4 is completed.

In the exposure unit 4, the substrate W is delivered to the alignment mechanism for positioning processing, and is delivered to the exposure machine in the aligned state to print a predetermined exposure pattern. Then, the exposed substrate W for which the exposure processing has been completed is carried out of the exposure unit 4 by the substrate carry-out device 35 and discharged into the IF unit 3.

At this time, when the rotating means 44 rotates the third arm 43 in the direction of Aμ (clockwise) in FIG. 6 through the third rotating shaft 59 under the control of the control device (not shown), The second rotary shaft 5 bearing in the second bearing hole 58.
7 rotates in the direction of Bμ (clockwise) in FIG. 6 at a rotation speed twice as high as that of the third rotation shaft 59 through the second belt 66 and the third pulley 64. As a result, the first rotation shaft 55 and the first arm 41, which are borne by the tip end of the second arm 42, retreat in the xμ direction in FIG.

At this time, the rotation angle of the first pulley 61 is controlled through the second pulley 62 and the first belt 63. Since the diameter of the first pulley 61 is twice the diameter of the second pulley 62, assuming that the second arm 42 is used as a reference, the first pulley 61 rotates clockwise at a rotation speed that is ½ times that of the second pulley 62. Although it rotates, the second arm 42 itself is rotating, and the fourth pulley 65 is immovable with respect to the support plate 87. Therefore, the first pulley 61 with respect to the support plate 87 is rotated. The vehicle moves straight in the direction of xμ in FIG. 6 without changing the relative rotation angle. Therefore,
The first arm 41 retreats in the xμ direction while maintaining a posture facing the support plate 87 in the xl direction (direction toward the exposure unit 4). In this way, after the post-exposure substrate W is completely withdrawn from the exposure unit 4 to the IF unit 3, the guide pin moving cylinder 89 on the support plate 87 is driven to move the positioning guide pin 88 to the exposure unit 4 side. Move this positioning guide pin 8
8 and the stopper 54 at the tip of the mounting piece 51
Position by sandwiching. Then, an arm (not shown) of the second substrate transfer robot 33 is inserted from the space corresponding to the step between the mounting piece 51 and the connecting portion 52, the substrate is mounted on this arm, and the buffer unit 32 and the first substrate are mounted. After exposure, the substrate is returned to the processing unit 2 via the transfer robot 31.

In this way, each IF board transport section 34, 35
Since the two joints are used, the substrate can be delivered without changing the attitude of the first arm 41 on which the substrate is placed with respect to the exposure unit 4, and the opening size of the exposure unit 4 can be made approximately the substrate diameter. It can be reduced to the same size. Then, the gas component of the atmosphere in the exposure unit can be easily adjusted, and the quality of exposure can be improved.

Further, as shown in FIG. 7, the distance from the mounting position Pm of the rotating means 44 is set to be longer than the total length 2Ra of the second arm length and the third arm length by the first arm length Rw. Since it is possible (that is, Lr + Rw), it is possible to deal with an exposure unit having a deeper depth than the conventional one without increasing the turning radius of the arm.

Further, unlike the conventional technique shown in FIGS. 8 and 9, it is not necessary to avoid the pins for mounting the wafer in a complicated shape, and therefore, two strip-shaped mounting pieces 51 and strip-shaped mounting pieces 51 are provided. An extremely simple structure such as the connecting portion 52 of can be adopted,
Manufacturing cost can be reduced at the stage of mold manufacturing, etc.

Further, in this embodiment, since the substrate is directly placed on the first arm 41 arranged at the standby position, the placing tool 124 at the standby position Pw is used as in the conventional case.
Since it is not necessary to provide a, the space of the IF unit can be saved.

Further, in this embodiment, since the substrate is positioned on the first arm 41 arranged at the standby position, it is not necessary to provide a dedicated space for the positioning mechanism on the IF unit. Space saving of the IF unit can be achieved.

Further, in this embodiment, since the first arm 41 can be moved while maintaining the attitude facing the exposure unit 4, the arm for placing the substrate in the intermediate transfer device is rotated. It is possible to eliminate the need for a space for entering the market and reduce the size of the intermediate delivery device itself.

In the above-described embodiment, the IF unit 3 arranged between the processing unit 2 and the exposure unit 4.
However, the present invention is not limited to such an apparatus.

Further, in the above-described embodiment, the first arm 41, the second arm 42 and the third arm 43.
However, any number may be used as long as it has an odd number of arms of 3 or more, such as 5, 7, for example. In this case, the arm connecting body expands and contracts in a zigzag shape while bending each joint portion that connects a pair of arms other than the substrate mounting arm, and faces the predetermined substrate transfer part of the substrate mounting arm at the tip. Since the substrate mounting arm can be moved linearly while maintaining the above, the same effect as that of the above-described embodiment can be obtained.

[0066]

【The invention's effect】

(1) According to the inventions of claims 1 and 5,
Since the substrate placing arm is moved linearly while maintaining the posture facing the substrate passing portion of the substrate placing arm by the power transmission means, the pin avoiding notch is formed as in the conventional technique to place the substrate placing arm. It is not necessary to make the shape of the part complicated, so that the manufacturing cost can be reduced at the stage of manufacturing the mold or the like as compared with the conventional technique.

(2) According to the inventions of claim 1, claim 2, claim 5 and claim 6, an odd number of three or more arms are rotatably connected to each other to form an arm connecting body. And a posture in which at least one joint portion connecting the pair of arms other than the substrate placing arm is bent by the rotating means and the power transmitting means while facing the predetermined substrate passing portion of the substrate placing arm. Since the substrate mounting arm is moved linearly while maintaining it, the turning radius of the arm is
A pair of arms with a joint part bent,
That is, it is possible to suppress the length to one arm other than the substrate mounting arm. Therefore, it is possible to prevent the intermediate transfer device from increasing in size as in the conventional technique. Moreover, since three or more arms are used, the maximum reachable distance of the arm connecting body can be set to the total length of three or more arms, as compared to the conventional case where only two arms are used. In addition, the degree of freedom in design can be increased, and the versatility with respect to an external predetermined substrate transfer section can be increased.

(3) Further, according to the inventions of claim 5, claim 6, and claim 7, (especially when the second substrate processing unit is an exposure apparatus as in claim 8). In addition, the manufacturer and the manufacturing time of the second substrate processing unit are different from those of the first substrate processing unit, and the substrate transfer position between them is the substrate transfer scheduled by the first substrate processing unit. Even if the position is different, the versatility can be dramatically improved by increasing the maximum reachable distance of the arm coupling body to the second substrate processing unit side. In this case, the arm turning angle can be suppressed as in the conventional case. In particular, according to the invention described in claims 3 and 7, the power transmission means has an extremely simple structure, and the predetermined radius of the arm of the substrate mounting arm can be provided to the predetermined substrate transfer part without increasing the turning radius of the arm. The substrate mounting arm can be moved linearly while maintaining the facing position. Therefore, the second substrate processing unit (exposure device in claim 8)
Since the space around the opening of the second substrate processing unit can be saved, it is possible to secure a large working area for performing maintenance work such as chuck cleaning, and to reduce the size of the opening. Can be easily adjusted.

(4) According to the invention described in claim 4, the substrate mounting arm positioning means allows the substrate to be mounted by the positioning means of the substrate mounting arm without providing a mounting tool at the standby position in the IF unit as in the prior art. Can be easily positioned. Therefore,
The device space of the IF unit can be reduced as compared with the conventional technology.

[Brief description of the drawings]

FIG. 1 is a plan view showing an overall configuration of a substrate processing apparatus including a substrate transfer apparatus according to an embodiment of the present invention.

FIG. 2 is a front view of the substrate transfer device according to the embodiment of the present invention viewed from the exposure unit side.

FIG. 3 is a partially cutaway perspective view showing an IF substrate carrying section according to an embodiment of the present invention.

FIG. 4 is a plan view showing an IF substrate transport section according to an embodiment of the present invention.

FIG. 5 is a partially cutaway side view showing an IF substrate transport section according to an embodiment of the present invention.

FIG. 6 is a perspective view showing the operating principle of the power transmission means according to the embodiment of the present invention.

FIG. 7 is a diagram showing an operation of the IF substrate transport section according to the embodiment of the present invention.

FIG. 8 is a front view showing an IF substrate transfer section according to a conventional technique.

FIG. 9 is a side view showing an IF substrate transfer section according to a conventional technique.

[Explanation of symbols]

 1 Indexer 2 Processing Unit 3 IF Unit 4 Exposure Unit 5 AGV 31 First Substrate Transfer Robot 32 Buffer Section 33 Second Substrate Transfer Robot 34 Substrate Loading Device 35 Substrate Unloading Device 41 First Arm 42 Second Arm 43 No. 3 arm 44 rotation means 46 power transmission means 47 position adjustment means 71 first adjustment section 72 second adjustment section 73 Y-axis rail 74 guide groove 75 sliding member 76 fixing screw 77 screw hole 81 Z-axis rail 82 guide Groove 83 Fitting member 87 Support plate

Claims (8)

[Claims] 1. A substrate transfer device for advancing and retracting a substrate to and from an external predetermined substrate transfer part, wherein an odd number of three or more arms including a substrate mounting arm arranged at the most tip end. An arm connecting body, a rotating means for rotating the base end portion of the arm connecting body, and a pair of arms other than the substrate mounting arm for transmitting the turning force of the rotating means. A power transmission means for linearly moving the substrate mounting arm while bending at least one joint part connecting the substrate mounting arm and maintaining the posture of the substrate mounting arm facing the predetermined substrate transfer part; A substrate transfer apparatus comprising: 2. The substrate transfer apparatus according to claim 1, wherein the arm coupling body has a first arm as a substrate mounting arm that is coupled to the most distal end, and a base end of the first arm. A second arm for rotatably supporting the portion around a first rotation axis, and a base end portion thereof supported around a third rotation axis and a base end portion of the second arm. A third arm that rotatably supports the second rotation shaft as a center, and a distance between the first rotation shaft and the second rotation shaft, and a second arm. A substrate transfer device, wherein a rotation axis and a distance between the third rotation axis are set to be the same. 3. The substrate transfer apparatus according to claim 1, wherein the arm connection body has a first arm as a substrate mounting arm that is connected to the most tip, and a base end of the first arm. A second arm that rotatably supports a first rotation shaft fixed to the second portion, and a base end of the second arm that is supported around the third rotation shaft and the second arm. A third arm that rotatably supports a second rotation shaft fixed to a base end portion of the first rotation shaft between the first rotation shaft and the second rotation shaft. Is set to be equal to the distance between the second rotation shaft and the third rotation shaft, and the power transmission means is fixed to the first rotation shaft of the first arm. First done
Rotator, an annular second rotator fixed to a bearing portion of the second rotation shaft of the third arm, the first rotator and the second rotation. 1st connecting child
And a third member fixed to the second rotation shaft of the second arm.
Rotator, a stationary element that is non-rotatable with respect to the main body of the substrate transfer device and bears the third rotational axis, and connects the third rotational element and the stationary element. And a second connecting member, wherein the diameter of the first rotator is twice the diameter of the second rotator, and the diameter of the third rotator is the same as that of the stationary element. A substrate transfer device characterized by being half the diameter. 4. The substrate transfer apparatus according to claim 1, wherein the substrate mounting arm is provided with positioning means for positioning the substrate. 5. An intermediate transfer device interposed between a first substrate processing unit and a second substrate processing unit, the intermediate transfer device being disposed at a boundary of the intermediate transfer device with respect to the second substrate processing unit. The second substrate processing unit includes a substrate transfer device that advances and retracts a substrate to and from a predetermined substrate transfer unit, and the substrate transfer device includes a substrate mounting arm arranged at the most tip end. An arm connection body in which an odd number of arms or more is connected, rotation means for controlling rotation of a base end portion of the arm connection body, and rotational force of the rotation means is transmitted to the arm connection body. An intermediate transfer device comprising: a power transmission unit that linearly advances and retracts the substrate mounting arm of the body while maintaining an attitude facing the predetermined substrate transfer unit. 6. The intermediate transfer device according to claim 5, wherein the arm coupling body has a first arm as a substrate mounting arm that is coupled to the most distal end, and a base end of the first arm. A second arm for rotatably supporting the portion around a first rotation axis, and a base end portion thereof supported around a third rotation axis and a base end portion of the second arm. A third arm that rotatably supports the second rotation shaft as a center, and a distance between the first rotation shaft and the second rotation shaft, and a second arm. An intermediate delivery device, wherein the rotation axis and the distance between the third rotation axis are set to be the same. 7. The intermediate transfer device according to claim 5, wherein the arm connection body has a first arm as a substrate mounting arm connected to the most distal end, and a base end of the first arm. A second arm that rotatably supports a first rotation shaft fixed to the second portion, and a base end of the second arm that is supported around the third rotation shaft and the second arm. A third arm that rotatably supports a second rotation shaft fixed to a base end portion of the first rotation shaft between the first rotation shaft and the second rotation shaft. Is set to be equal to the distance between the second rotation shaft and the third rotation shaft, and the power transmission means is fixed to the first rotation shaft of the first arm. First done
Rotator, an annular second rotator fixed to a bearing portion of the second rotation shaft of the third arm, the first rotator and the second rotation. 1st connecting child
And a third member fixed to the second rotation shaft of the second arm.
Rotator, a stationary element that is non-rotatable with respect to the main body of the substrate transfer device and bears the third rotational axis, and connects the third rotational element and the stationary element. And a second connecting member, wherein the diameter of the first rotator is twice the diameter of the second rotator, and the diameter of the third rotator is the same as that of the stationary element. An intermediate delivery device characterized by being half the diameter. 8. The intermediate transfer device according to claim 5, wherein the second substrate processing unit is an exposure device.