TW514618B - A transfer system and apparatus for workpiece containers and method of transferring the workpiece containers using the same - Google Patents

Abstract

In an unmanned transferring apparatus of a workpiece container and transferring method thereof whit the same, respective facilities is installed with a load port attached from the front side plane of the entrance chambers for horizontally protruding toward the bay side to support the container or release the support with respect to the container. An unmanned transport shuttle has a lifter integrally formed with a support stand for placing the container thereon to unload the container supported by the load port by vertically moving the support stand at the right lower portion of the load port or to load the container unload from the support stand onto the load port, and a transport shuttle integrally mounted with the lifter for utilizing the right lower space of the load port to be moved to the right lower portion of the load port designated by an operation control signal. A guide rail is installed along the right bottom portion of the load port of the bay to guide the transport shuttle to travel through the right lower space of the load port.

Description

A7 V. Description of the invention (B7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs t1 · Scope of the invention The invention relates to automatic and more particularly unmanned transfer in a factory ". Transportation system, device and method, The workpiece is used to transfer and lock the coke from a certain place, which is called Japanese zodiac, and the method by which it is used to transfer the container. It is mounted on another processing member, and the benefit 2 · Relevant technical description When manufacturing, The semiconductor fabrication printing and drawing process m "and then to various processes, such as light lithography, the previous etching process and film formation process have been implemented. The second set of wafers for locking the wafers is transported in the container by lock. Automatic human transport system : Manual transmission of the pass, and 8-inch increase in production without help, the wafer size is T, increased to 12-inch.] 9 Chang 4 _ inch wafers occupy a larger foot # 1, 阳 inch The area of wafer processing equipment is larger than 8-II area, and the mother one can hold 25 wafers = kilograms. When manual transmission, it makes workers, especially female workers, continue. Second, it can predict the use of a large number of 12-inch wafers. Health, spring Use unmanned transfer system. Locked wafer container, in terms of _8_ inch wafer size, the main open wafer 厍, / GE Xiu + _ Ren take close, a closed container is called the front open sheet = (hereafter Jane Spear is "F0UP", which is called a workpiece container or OR = ": a wafer container), which is mainly used to avoid the possible pollution caused by wafers passing through the straw. Especially FOUP is already available in large numbers, as it is known, which is a well-matched transfer container with an unmanned transfer system. 1

Please read the precautions of the back first. 乐 Leaf I I, English-made binding -4-This paper size applies to China National Standard (CNS) A4 (210 X 297 Public Love 514618 A7 B7) 5. Description of the invention (2) Such as transmission system And device representative examples, an overhead transmission (hereinafter referred to as "OHT") or overhead conveyor (OHC) system, and an automated guided vehicle (AGV or RGV) system are known. The OHT (or OHC) ) The system is formed, as shown in Figure 1, so that the linear rails 18a and 18b are installed on the flat roof, and the hangers 22a and 22b are installed on the linear rails 18a and 18b. A FOUP is suspended under the hanger 22a with a FOUP 20a, Transfer along the linear track 18a, and load it on the FOUP indexing head 16a of the designated processing member. In addition, the FOUP 20b placed on the FOUP indexing head 16b is pulled up and follows the straight line 18b, Move over another designated processing member, and then load it on the FOUP indexing head 16a. As a reference, as an example invention of the above-mentioned OHT system, it has been proposed in No. 5,927,472 entitled `` Conveyor Transfer Unit '' US Patent. The 0HT System Because the space above the FOUP index 16a and 16b can be used to reduce the interval W 1 between the load or the machine width B 1, so that it has advantages in terms of space tightness or equipment space usage. However, the OHT system is installed in clean The disadvantages of the flat top of the chamber machine are as follows. First, due to the weight of the wafer, a strong structural member must be installed in order for the FOUP to be used for the transfer of 12-inch wafers. Second, when the general height of the clean room is considered At 4 meters, the installation height of the 0HT system is so high that it requires an operating tool such as a sectioner, and an additional operating space for the maintenance of the sectioner. Third, if the power supply fails, etc. As a result, the power supply is abnormal. When considering the height of the wafer FOUP, it is impossible for the workers to manually transmit the FOUP, so the operation may be interrupted. Fourth, when the information or indexing machine is moved relative to the suspended FOUP-5- This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) Please read the note on the back page printed by the Intellectual Property Bureau, Ministry of Economic Affairs, Consumer Consumption Cooperative 5 14618 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. The description of the invention (3's itinerary, which is neither large nor precise, unless the computer monitor is used, the worker can hardly determine the transmission itinerary. Fifth, if OHT is considered The weight and height of the FOUP in the system, a safety device such as a guard rail designed for safe transmission, is required to be installed. Sixth, the FOUP indexing head of the device, in other words, the length between the load port and the OHT makes it necessary Many times are used for loading and unloading of FOUP. Finally, the FOUP load / unload path is mainly installed on a part of the device user interface (operation panel) to restrict the installation of the user interface. The problems mentioned above adversely affect the advantages sufficiently, in other words, the high compactness of the OHT system equipment. Next, as shown in FIG. 2, the AGV system uses a multi-axis joint to automatically guide the vehicles 22a and 22b, moves by suspending FOUPs 20a and 20b, and loads the FOUP 20a on the designated processing member FOUP indexing head 16a. , And the FOUP 20b is unloaded by the FOUP indexing head 16b. To facilitate understanding, one exemplary invention of the AGV system described above has been proposed in U.S. Patent No. 5,332,013, entitled "Unmanned Conveyor in a Clean Room". However, this AGV system has the disadvantages listed below. First, the machine system needs to be widened to reduce the tightness of the equipment in the clean room. Install the maximum width B2 of the machine shown in Figure 2, including the device loads 璋 16a and 16b, which are located on both sides of the machine, a space, which is positioned parallel to each other, allowing two AGVs to perform loading / unloading operations, and A worker moves between two AGVs. Second, the workers and the transfer robot, in other words, the AGV is operating simultaneously in the machine, usually involving the danger of a safety incident. Third, because of the use of multi-axis robots, the AGV system is quite large (or bulky), which limits its transmission speed, and it is difficult to install a large number of robots in the machine space. Fourth, for 12-English -6-This paper size applies Chinese National Standard (CNS) A4 (210 X 297 mm). Please read the note on the back side first.

Win again I A i Order m

j 丄 HOIS A7 B7 V. Description of the Invention (In the case of 4-inch wafers, the number of F0UPs that can be transmitted per AGV is limited due to it, and the cost of a single Foup is expensive. Therefore, in order to overcome the above general Disadvantages of technology, one of the first objects of the present invention is to provide a beneficiary transfer system and device that can automatically transfer workpiece containers such as wafers, and shuttle buses used to transfer containers. The lower space of the indexing head (load port) is moved by the guide rail, and through = vertical movement, the container is loaded on the F0UP indexing head, and the container is unloaded by the _ octave head. That is, a method is provided for controlling the placement of the helmet so as to achieve the above-mentioned first purpose, thereby suitably loading / unloading = the third aspect of the present invention-the unmanned transmission system and equipment, which can be effectively used The installation space of the processing device, after installation-shuttle method, is used to transfer the processing device below the F0UP indexing head (load bee) = the intermediate wafer carrier, and the wafer carrier is loaded on the F0UP: line degree head by upward movement. And via The F0UP indexing head unloads the wafer carrier. The knives and helmets are unloaded. In addition, a fourth object of the present invention is to provide a method for controlling the printer's transmission device of the employee's consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs to achieve the above. A third object is to appropriately load / carry a wafer carrier. In order to achieve the first object of the present invention, it provides an unmanned transfer device having a processing environment in which equipment is arranged at least along the boundary side of the machine for use by a A piece of equipment transfers a container with a workpiece to a piece of equipment. Each piece of equipment is installed in a load port, which is connected to the front side of each entrance compartment. 7- This paper standard applies to the Chinese National Standard (CNS) A4 specification (χ Norwegian (Public love) ^ 丄 " + υ 丄 δ ^ 丄 " + υ 丄 δ Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 _ B7 V. Description of the invention (5) The plane is used to project horizontally toward the machine side. Supporting the container, or releasing the support relative to the container. An unmanned transport shuttle includes a lifter integrated in the support base, which is used to place the container. Zai Chunzhi is going down, so that the container supported by the load port is unloaded, or the load is unloaded from the support base (container to the load port, and the shuttle is integrated with the lifter, so that the space directly below the load port is used to move to The portion directly below the load port designated by the operation control signal. Preferably, the unmanned transmission device further includes a guide track, which is installed along the bottom of the portion directly below the load of the machine for guiding the shuttle. The vehicle is transported through the space directly below the load port. More preferably, the unmanned transmission device further has a transmission / reception sheet 7L 'for wireless communication with the central control unit. The unmanned shuttle shuttle transmits the position through the transmission / reception unit Information and status information to the central control unit, and carry out loading and unloading operations in response to the control signals received by the control unit. As in the unmanned transfer device of the preferred first embodiment of the present invention, in a clean room for manufacturing semiconductors, it has a device arranged at the side of the random station, and a device to transfer one of the storage wafers to another device. container. It also includes a load port accessory, which is used to support or release the bracket relative to the cartridge phase 4. It includes a right-angled ring-shaped support member connected to the entrance room 1: and the front side is used to horizontally protrude toward the machine. Side, and has a central part penetrating through the center to allow the container to pass through, at least one central part penetrating through the protruding member toward the supporting member for supporting the container. This paper is compliant with China National Standard (CNS) A4 size ⑵G χ 297 public reply) -------- Order --------- line one (please write this page before βτReading Back **) # 'packing and then fill in Shi V. invention description ( 2 'But when the container passes the push member, it is used to load the container to the support member, and the container is unloaded and shrunk by the support member, and-the latch control sheet 2 is used to control the protrusion and shrink of the support pin to reflect the predetermined The control unit 0 ^ outer lifting unit is integrated with a support base for placing the assembly phase, and the support unit is vertically moved under the load port unit by moving the support unit vertically, so that it can be unloaded: closed by the load port Containers, or loading by support stand The unloaded golden closed container is connected to the load port unit. In addition, the 'integrated shuttle car installed with the lifting unit uses the space under the load bee unit' to move to the square part of the load specified by an operation control signal. In terms of 'a guide track is installed directly below the load port of the machine ^ Shao installation' is used to guide the shuttle unit to be transported through the space directly under the load bee unit. A container that transfers one of the storage wafers from a certain device to another device, such as the unmanned transfer device of the preferred second embodiment of the present invention, has a random station boundary side setting in a clean room for manufacturing semiconductors.

The Ar / T phase support provides a load port unit, including a U-shaped support member with a central portion for supporting the container or releasing the bracket f relative to the container, and the m-angle rotational connection opposite to its opening part. Population room: front side plane 'and-drive unit, #container is made of a right-angled support member when the container is raised or lowered, used to retract the support member with the front side plane of the population room ^, and rotated in any other state to Right-angled support structure-9 This paper size is applicable to Chinese National Standard (CNS) A4 specification (210 X 297 mm) A7 B7 V. Description of the invention (7 pieces' for horizontally protruding support members facing the machine side. Kg addition'- Hoisting unit integration_cutting machine base, which is used to place the container phase, is vertically moved to the load to fill the army gt, and the early and early stage of the war is directly under the support base, which is unloaded and supported by the load port unit Container, or load the container unloaded by the support base to the load port unit. — In addition. Include; k car single fan (accessories, which are integrated and installed in the lifting unit, and the use of the load 4 single το 2 rooms directly below — The part directly below the load port unit indicated by the control signal. Step-by-step '--the guide rail is installed along the machine directly below the load port unit'. The induction shuttle unit is transported through the load port unit. The space directly below it. In order to achieve the second object of the present invention, it provides a method for conveying material along the guide rail by using at least-unmanned transmission device for controlling packing from -a certain device to another-device. This method is to understand the working occasions including equipment along the machine-border side, where each device has a load port connected to a front plane of the entrance compartment for horizontal protrusion to the machine side to support storage The container of the workpiece and a guide rail are installed at the bottom of the lower part of the load port of the equipment. This method is implemented through an unloading step, which is used to move the unmanned transmission device to the lower portion of the load port of the equipment to be transmitted. The vertical lifting of the lifting unit of the container support base makes the container placed slightly in the negative autumn port, retracting the supporting element supporting the container, and loading the lower lifting unit 2 Container with human transmission device. In addition, it is implemented through a loading step. It is used to move the unmanned transmission device with a container to the destination. -10- This paper size applies to Chinese national standards ( CNS) A4 size (0 x 297 public love) i〇

、 Explanation of the invention (the part directly below the load port of the equipment, allow the container supporting machine water = pieces to its original position, and lower the lifting unit to unload the container: ground 'This method further includes the step of selecting a single unmanned transmission device Ί = Device S can analyze the information about the transmission request, and quickly respond to the transmission request. The request includes position information, and information about the departure and arrival positions provided by the plurality of unmanned transmission devices. Motor to the third objective of the present invention ❸, _The device is used for conveying—wafers · carriers to a plurality of wafer processing members, which are arranged in a clean room in the a-axis direction and formed in the central part before having a wafer inlet, so that the device includes ^ Horizontal conveyor, a vertical conveyor, and control accessories. 水平 The horizontal conveyor located in front of each wafer processing component, including the transport surface formed under the wafer inlet, and extending in the X-axis direction so that the X -The wafer carrier is transported in the axial direction. The vertical conveyor located at the front of each wafer processing member moves the wafer population and horizontal conveyor in a z-axis universal # Between the conveying surfaces, the wafer carrier is transported vertically. Two control accessories control the position of the horizontal and vertical conveyors, thereby horizontally transporting the wafer carrier to each wafer processing member, and vertically transporting the wafer carrier to the round entrance. 『日 曰 = The horizontal feeder includes a sliding rotor conveyor, and the wafer carrier includes a front opening integrated container. 3 The vertical conveyor includes a paper ruler located outside the front part of each wafer processing member. (Please read the precautions of Back® and fill in this page first) ----- Order --------- Line 1 Printed clothing by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs -11-丄 A7 V. Invention Explanation (B7 The frame printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, the front and back parts of the frame are opened and the conveyor is conveyed on the surface for two days. In the frame, the ζ-axis conveying device is installed on the two ζ of the outer frame. The shafts are extended in the universal direction. 嵙 ^ ^ J and the two-axis moving members are installed on the Z-axis through the Z-axis. And a pair of gripper arms for wafer carrier :: Move the member in the Z-axis, the gripper arm is from the wafer: the system is protruding—exceeding the side protrusion of the horizontal carrier to convey the wafer carrier. The female gripper arm includes -y-axis conveying device. The '... moving member is conveyed through the two-axis and direction, and the y-axis moving member has a side protrusion of the 0 carrier for the support. The Wenchen conveying device includes a -reversible motor and a -reversible motor. : "... tired rod" The z-axis moving member is spirally coupled to the conveying screw shaft, so that when the conveying screw rotates in the forward and reverse direction, the duo moves up and down along the-vertical guide surface. Every z- The shaft conveying device includes a hydraulic cylinder that moves a piston up and down by using hydraulic pressure. The z-axis moving member is connected to one end of the piston rod and moves up and down against a vertical guide surface. Each Z-axis conveying device includes a child of a linear motor having a guide track, and the Z-axis moving member includes a rotor of the linear motor. In the meantime, to achieve the fourth object of the present invention, a method is used for conveying a wafer carrier to a plurality of wafer processing members, and the members are arranged in an X-square. Placed in a clean room and formed before it has a wafer entrance: a component, the method including the steps of: transporting the wafer via a conveyor to center the load 12-

This paper size applies to China National Standard (CNS) A4 (210 X 297

A7

V. Description of the invention (11) FIG. 4 is a sectional view of FIG. 3 taken along the direction taken along line A-A of FIG. 3, which is used to illustrate the installation position of the rigid P indexing head, the material track and the transportation shuttle. Figures and diagrams are respectively used to illustrate the perspective of the indexing head and the shuttle shuttle structure of the first embodiment of the present invention, taken from the perspective m-line B_B-sectional view 'and Figure 5C is along the line c_c of Figure 5B The cross-sections taken; F2 and Guangxi are respectively used to illustrate the other embodiment of the perspective view of the structure of the knife head and the transport shuttle, as shown in the second embodiment of the present invention, and A line D -A cross-sectional view taken by D; Fig. 7 ... shows another embodiment of a side cross-sectional view, respectively, Sr ::: The car is provided in a vertical two-stage form ... The base transfer shuttle car Figs. 8A, 8B, 8C , 8D and other main -m ^ r, ^ #, table is not used to illustrate the operation status of the loading process of transferring wafer stacking X from the carrier to the F0UP indexing head; Figure 9 shows the continuous loading process Flow chart of the program; Figures 10A, 10B, ioc, ion Fenshiyi and 10E show the operation flow chart used to illustrate the unloading of crystal = boxing, howling degree _ unloading process of the transport shuttle; Figures 11 of various examples of closed circuits are used to illustrate the continuous process of the unloading process. Figures 12A, 12B, and 12C show the formation of an open circuit or guide track; Figure 13 shows the installation of a A dynamic guided transport device for transporting: a semiconductor production line of a round carrier; Figure 14 shows the diagram of the automatic guided transport device; Yixia is used to transport the side of the wafer carrier

The paper W Tongcai_Home Standard (CNS) A4 size (210 297 mm) A7

V. Description of the invention (12) FIG. 15 is a front view of the automatic guide conveying device shown in FIG. 13; FIG. 16 is a perspective view of a vertical conveyor of a preferred embodiment of the present invention; Figure 3 shows the block diagram of the control function of the automatic guided conveying device; Figure 18 is a perspective view showing another embodiment of the semiconductor production line equipped with an automatic guided conveying device for wafer carriers; Figure 19 is another embodiment of the present invention Example is a side view of an automatic guided conveying device for conveying a wafer carrier; and FIG. 20 is a front view of the automatic guided conveying device for conveying a wafer carrier as shown in FIG. 19. Detailed Description of the Preferred Embodiment FIG. 3 illustrates a complete structural diagram of a transmission system installed on a machine as the preferred embodiment of the present invention. In the clean room, the machines i22a and 122b provide a working space to obtain a space for the transfer device or workers. On the two boundary sides 109a and 109b of the machine 122a & 122b, a plurality of stackers 102 are used to store containers, for example, FOUPs 120, 120a, 120b, and 120c, which lock workpieces such as wafers, and process components 100, l 00a, 100b, 100c, 100d, 100e, and 100f are installed in parallel with each other. The Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs printed guide rails 108, 108a, 108b, and 108c along equipment such as processing components 100, 100a, 100b, 100c, 100d, 100e, and i00f, Extending on the bottom of the machines 122a and 122b. In particular, the guide rails 108, 108a, 108b, and 108c are placed directly under the load port 106 or the indexing head. A load port or indexing head means a device that accepts similar wafers. -15- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)

Container for work pieces. As a preferred example of the guide rail, a track such as a magnetic tape or a railway track may be suggested. When the magnetic tape is used as the guide track, it can be installed along the transport path under the load port and installed on the bottom surface of the machine. Alternatively, if a railway track is used, as shown in FIG. 4, the bottom surface of the machine is cut slightly along the conveying path to form a groove, and the railway track is installed as a guide rail 108 along the groove. Since the bottom of the clean room in a semiconductor factory is formed by a thumb grid, the grid is cut slightly downwards to fix the laid railway track, in other words, the path of the rail 108. The mounting form of the guide rail 108 can be changed. For example, as shown in FIG. 12A, it can be installed along two boundary sides of respective machines to form separate open circuits. Alternatively, as shown in Figs. 12B and 12C, it may be installed along two boundary sides of the machine to form a closed circuit, or a closed circuit may be formed by connecting a plurality of machine boundary sides. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. A plurality of transport shuttles 110, 110a, 110b, 110c, i10d, u0e, 1 lOf and 1 lOg are placed on the guide rail 108. The transportation shuttle transmits its own position information, status information, etc. to the central control system 200 via wireless communication with the central control system 200, and completes the transport and F0up loading / unloading operations to The response comes from the control signal received by the central control system 2000. When the rail 108 is installed as an open circuit, the transportation shuttle linearly travels between the two ends of the rail 108. When the structure of the guide rail 108 is this closed circuit, in other words, a circular loop, the transportation shuttle changes direction to obtain a closed circuit cycle, while performing linear motion. FIG. 4 is a cross-sectional view taken along line A-A in FIG. 3 and is used to illustrate the installation positions of the equipment, in other words, the FOUP indexing head 106, the guide rail 108, and the transportation shuttle 110 of the processing member 100. As far as the processing component is concerned, it is implemented relative to a wafer. -16- This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm). 11 an nn tmt —ϋ · 一 — 口, 9 _1 emmt i mmm§ n (Please read the notes on the back of 53 'before filling this page)

Line 0 514618 A7 B7 Fifth, the purpose of the process (M). First, the FOUPs in the stocker 102 are transferred to the FOUP indexing head 106 and to the transfer shuttle 110. The transfer shuttle 110 is moved to one of processing members such as a light lithographic printing apparatus, a deposition apparatus, an etching apparatus' or the like. After F0UP 120 moves to the F0UP indexing head 10 of the processing member 100, the transfer robot 104 in the transfer chamber transfers the wafer in F0UP 120 to the load gate 103. After completing the process in the processing member 100, the transfer robot 104 transfers the wafer from the load gate 103 to the FUP 120 placed on the FOP indexing head 106 in the opposite way. Not only the above operations in the processing component, but also the operation of transporting the shuttle 110 outside the processing component, and the loading / unloading operation of the FUP 120, are performed through the wired / wireless communication of the central control system 200. 5A and 5B are perspective views respectively showing a preferred embodiment of the structure with respect to the F0Up indexing head and the transport shuttle 110, and the cross-sectional views taken along the line b-b. Fig. 5C is a cross-sectional view of the FOP UP indexing head 106 taken along the line. The transport shuttle 110 has a plurality of wheels 135 for performing basic transportation, and: a transmitting / receiving accessory 150 for performing wireless communication with the central control unit 200, and a control accessory 132 for supplying via the transmitting / receiving accessory 15 Its location information or shipping information to the central control system 200. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. In addition, the transport shuttle 1 can be transported along pre-set transport paths corresponding to the guide rails. The relevant structure of the institute has different types of guide rails. When the guide rail 10 is a 8-track railway track, the ship's nuclear fish 110, as shown in FIG. 4 or FIGS. 5a and 5b, has a mounting member 134, which is suitable for railway rails. So that it slides along its body. However, the winter magnetic and field magnetic tape systems are installed as guide rails 108 -17- 514618 A7 V. Description of the invention (15) 'Transport shuttle m must be equipped with an induction device (not shown) so that the magnetic field formed by the magnetic tape can be recognized Shipping path. The structure of each transportation shuttle controlled by a (Global Positioning System) can be implemented on guide rails and related devices, but it will cause heavy cost problems. The order transport shuttle 110 further has a lifting member which performs vertical up and down movements for loading the FOUP 120 on the F0up indexing head 106 and unloading the F0up 120 from the FOUP indexing head 106. The lifting member can be formed in several ways. As shown in FIGS. 5A and 5B, a first embodiment of a lifting member is a foldable arm assembly driven by a motor. The accessories included in the lifting member are a support frame for loading Foi20; a motor—the gear assemblies 114c and 114d are introduced to both sides of the buzzer motor to perform linear movements in opposite directions to each other; and a The foldable arm assembly has a lower end part which can slidably connect the gear assembly 14c and 14d pairs; an upper end part which can be connected to the supporting base 114a and a central part connected by a hinge crossing. The lower end of the arm assembly 114b is connected to the interval between the gear assembly 丨 Mc and 114d, which is increased or decreased according to the rotation direction of the motor 130. As such, the level of the support base 114a will fall and rise. Printed by the Consumer Affairs Agency of the Intellectual Property Bureau of the Ministry of Economic Affairs. A second embodiment of one of the lifting members uses a hydraulic drive mechanism. Figs. 6A and 6B are perspective views showing the structure of a lifting member such as a hydraulic drive mechanism, and cross sections taken along the line D-D, respectively. For example, the lifting member of the above system is formed by a supporting frame 114a for placing the FUP 120, and a hydraulic cylinder assembly is connected to allow its upper part to suspend the supporting frame 14a. The hydraulic cylinder assembly has a hydraulic cylinder 160, a valve member 162 for controlling fluid injection into the hydraulic cylinder 160, a fluid tank 168 for storing the fluid, and a hydraulic pump 164 for 18- This paper size applies to Chinese national standards ( CNS) A4 specification (21〇X 297 public love)

V. Description of the invention (16) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The fluid stored in the fluid tank 168 is supplied to the hydraulic cylinder 16 or, conversely, the fluid is drawn from the hydraulic cylinder 160 to the fluid tank 168. The lifting member can be further added with a foldable folding arm assembly for supporting the horizontal balance of the support base. For reference, a control part 132a and a transmitting / receiving part 150a are shown in the figure, where the former is provided to control the operation of the opening / closing valve 162 or the hydraulic pump 164, and the latter covers the above-mentioned and central control Wireless transmission / reception of system 200. As previously configured, the control unit 132a controls the operation of the hydraulic pump 164 and the valve member 162 based on the loading / unloading information supplied via the transmission / reception unit 15 & to allow the hydraulic cylinder 160 to move vertically.

On the other hand, the structure of the FOUP indexing head 1 () 6 must fit well with this point. The loading / unloading of its AFQUP 120 is performed by the vertical movement of the lifting member. The structure of the first embodiment, such as load 崞, is shown in Figs. 5A, 5β, and 5C. The illustration is a cross-sectional view cut along Fig. 5b-b, and the diagram is a cross-sectional view cut along line C-C of Fig. 5B. As indicated in the figure, the Foouw head 106 has a right-angled annular support member, which is connected to the front surface of the entrance compartment. It protrudes at a level of 7jc toward the side of the machine with the central part to support it through FOUP 120, and multiple supports. The latch is used to protrude through a central component side toward the support member to support the FOUp 120. If a support member is changed, a U-shaped support member can be constructed, which has an opening member connected to the entrance chamber. When the FOUP is used to load the supporting building members through the supporting members, and unloaded by the supporting members, it is necessary to retract the supporting bolts so that the process cannot be interrupted. The width and length dimensions of the support member running through the central portion are larger than 0, so that when the support r pin is retracted, FOUP -19- this paper is suitable for financial institutions i ^ JS) A4 size coffee Public

514618 A7

V. Description of Invention (17) 120 passes through the central part. In addition, even in a state where the support latch is projected, the support base 114a preferably has a size capable of passing through the central portion. The structure for controlling the protruding and retracting of the supporting pins 116a, 116b, 116c, and 116d can be embedded in several ways by using mechanical or electromagnetic principles. As an example, the pattern shows an electromagnetic coil drive system supporting latch. The metal support pins 116a, 116b, 116c, and 116d are retracted toward the inside of the support member by means of a magnetic field formed by the electromagnetic coils 138a, 138b, 138c, and 138d supplied by the magnetic power source, and are cut off by the magnetic power supply to make the elastic yellow The elasticity of 136a, 136b, 136c, and 136d protrudes to their original positions. The structure of a second embodiment, such as a FOUP indexing head, is shown in Fig. 6B. In this embodiment, the FOUP indexing head 106 has a U-shaped form penetrating the central part. In addition, the supporting member 106 has an elbow opposite to the opening member, which can be connected to the side wall in front of the entrance compartment at a right angle, and the motors 140a and 140b allow the supporting member I06a to be parallel to the side wall in front of the entrance compartment. Back, or horizontally protrude toward the machine side corresponding to the upward and downward movement of the lifting device. The width 02 through the central portion of the supporting member 106a is narrower than the width D 3 of the container 120 and wider than the width di of the supporting base 1Ua. Based on the drive of the motor 140a, when the lifting member is raised and lowered under the condition of loading f0up 120 in the supporting base 114a, the supporting member 10 is retracted parallel to the side wall in front of the entrance compartment without hindering the lifting The components move up and down, and in any other general state, rotate horizontally to project horizontally to the machine side. Figures 7A and 7B are a side cross-sectional view and a plan view, respectively, of a structure in which a transport shuttle is mounted on a vertical two-stage support base structure. The transport shuttle 11 includes a transmitting / receiving piece 150b, a control part 132b, and an assembly member 134. -20- This paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 public love) Please read Γ Back®-Precautions Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs

514618 A7 V. Description of the invention (18) The X-pass tool 135 and a track 108 perform the same functions as in the embodiment described above. As a characteristic, the lifting member of the transport shuttle 10b has support bases 184 and 186 provided by the upper and lower double stages, and an auxiliary panel 82 is integratedly connected to the two-stage support base 184 with a gear transmission chain 189 and 186. The gear transmission chain is arranged along a bend in a predetermined interval. In addition, the lifting member of the transportation shuttle 1101) includes a motor 1301), which is controlled by the control part 1321 ^ (below for generating a rotating power, and a chain 188 is introduced into the gear transmission chain engaging the auxiliary panel 182) 189, to transmit the rotational power of the motor nob to the auxiliary panel 182. Typically, because the device 100 or 102 series is formed with two FOUP indexing heads on the right and left sides, once it encounters the supporting base with double As a result of the two-stage structure and further increase of operating efficiency, the two F0ups can be loaded or unloaded. In addition, the F0UP indexing head 106b is shown in FIG. 7B, which preferably uses an xj-shaped structure, which helps to cooperate with the auxiliary panel The rise of 182. In addition, the supporting pins 116e, 116f, U6g, and U6h are protruded and retracted by the reciprocating action of the springs 136e, 136f, 136g, and 136h and the electromagnetic coils 138e, 138f, n8g, and 138h. '' FOUP 120 will be described with reference to Figures 8A, 8B, 8C, 8D and 8E and Figure 9 printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 2 Loads called F0UP transfer operations are subject to a wafer storage device replaced by D stack Feeder 102 everywhere The processing of the component 100, or the processing of the FOUP that has been completed in the processing component 100, is from the processing component 100 to the stocker 102. The loading operation is carried out as follows. Initially, a certain transportation shuttle was not responsible for the situation. 1 () 2tFOUP indexing head is difficult to move to the requesting equipment-21-A7 -------_____ V. Description of the invention (19) Bottom directly below. At this time, the center control system 200 decides which shuttle The car system responds to the above-mentioned transportation request. The central control system 200 analyzes the individual location information provided by the plurality of transportation shuttles, and the transmission request information, which includes information about the departure and arrival positions provided by the operator, This option is the single transportation shuttle that can respond to the request as quickly as possible. After that, the central control system 2000 provides information on the location of equipment leaving and arriving, as well as information on the operations performed. In other words, the loading or Unloading operation. The shuttle shuttle receiving the first action and operation instruction 丨 10 is moved along the guide rail 108 to the device F0UP that requested the operation (Figure 8A, steps S10, Sll, S12, S13, S14, S15, and S16) Division The lower part of the head. The fully moving transport shuttle 110 raises a lifter 114 to slightly lift the container 120 placed on the FOUP indexing head 106, so as to face the support base 114a (FIG. 8B, step s). 18). Next, the magnetizing power supply is supplied to the solenoid coils 38a, 38b, 38c, and 13d 'to retract the supporting pins 116a, n6b, 116c, and 116d of the supporting container i20, so as to face the inside of the supporting member 106a ( As shown in the second embodiment of FIGS. 6a and 6b, as for the FOUP indexing head, the motor 140a is driven to rotate the branch member 106a at a right angle to retract the side wall in front of the parallel entrance compartment). Thereafter, the lifter 114 is lowered to place the FOUP 120 on the transport shuttle 110 (FIGS. 8C and 8D, steps S20 and S22). Then, the power is supplied to the electromagnetic coils 138a, 138b, 13 8c, and 13 8d or the motor 140a is stopped, and the support pins 116a, 116b, 116c, and 116d or the support member 106a are returned to the original position (FIG. 8E, step S24). . Now, referring to Figures 10A, 10B, 10C, 10D, and 10E and Figure 11, -22- This paper size applies to China National Standard (CNS) A4 (210 x 297 mm) (Please read the precautions on the back before (Fill in this page) Order --------- line ί Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Printed by the Employee Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Printed by 514618 A7 --------- B7 _ V 、 DESCRIPTION OF THE INVENTION (2) Uninstallation procedure of FOUP 120 *. This #load is referred to as the operation opposite to loading. The F0UP subjected to the processing operation is transferred to the processing device, or to transfer the 70-processed FOUP to the stacker. The FOUP is placed by the shuttle shuttle to the FOUP indexing head. First of all, the transport shuttle 100 with F00up 120 loaded by the above loading program is moved to the central control system 2000 (Figure 10A, step s26) to the FOUP indexing head of the target device 100. 〇6b, directly below. When it is determined that the transport shuttle 110 has arrived, the F0UP indexing head 106b provides magnetized power to the electromagnetic coil, thereby retracting the supporting pins 116a, U6b, 116 (:, and 116d. As far as the FOUP indexing head is concerned, as shown in the figure In the second embodiment of the present invention shown in FIGS. 6A and 6B, the motor 140a is driven in the same manner as described above, thereby rotating the support member 106a at a vertical angle to retract the side wall surface before the parallel entrance compartment (FIG. 10B, step S28). Next, the lifter 114 ascends vertically to place the FOUP support stand 114a loaded with 1.01; 1 > 120, slightly higher than the level of the FOUP indexing head i06b, (Fig. 10C, step S30). After this operation, the magnetizing power supply to the electromagnetic coil system is interrupted to place the supporting pins 116a, 116b, 116c, and 116d to their original positions, or the power system is supplied to the motor 140a and rotated at a right angle (FIG. 10D, step S32), The support member 106a is placed in the original position. Next, the lifter 114 is lowered to allow the FOUP 120 to be loaded on the FOUP indexing head i〇6b supported by the support pins 116a, 116b, 116c, and 116d (FIG. 10E, step S34). After that, the present invention is another Examples will be described. -23- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page) K. Binding ---- A7 ___ V. Description of the invention (21) FIG. 13 shows a semiconductor production line equipped with a self-guided conveying device for conveying wafer carriers according to the present invention. The machine B3 is installed in a clean room to provide for automatic Guide the transport device and the user's work space. Multiple stackers are used to store containers with wafers, such as FOUP or wafer processing equipment 201, which are installed in a straight line on both sides of machine B3. The wafer processing equipment 201 includes an entrance chamber 1: 202, which is formed on a central portion with a wafer entrance 204, and a process chamber 208 having a load gate 21. A transfer robot 2 〇6 is installed in the entrance compartment 202. The transfer robot 20 receives wafers from the wafer carrier 400 installed at the wafer inlet 204, and transfers the wafers to the load gate 210, or transfers the wafers from the load gate 2丨 〇 to the wafer carrier. A sliding rotor conveyor 300 series Installed at the bottom of machine B3. Sliding rotor conveyor 300 is positioned to form a space below the F0up indexing head, which protrudes in the front direction of wafer processing equipment 201. Sliding rotor conveyor 3〇 The height of 〇 is lower than the height of the wafer entrance 204. In a situation like this, when a wafer carrier 400 stays in the wafer entrance 204, other wafer carriers can pass through without touching and staying. Wafer carrier 400. A vertical conveyor 500 is installed between the entrance chamber 202 and the sliding rotor conveyor 300 so as to move the wafer carrier conveyed by the conveyor to the wafer entrance 204. The vertical conveyor 500 has a pair of gripper arm members 502 that move vertically along the vertical conveyor 500. Therefore, the length of the vertical conveyor 500 in the front-rear direction is more general than the FOUP indexing head, in other words, the wafer carrier support is relatively reduced. Because the wafer carrier support is not required in this embodiment, -24- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page)

-Equipment -------- Order --------- Line I Printing of clothing by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, Invention Description (22) Machine B 3 has enough space to use. FIG. 14 is a side view of the automatic guided conveying device for conveying a wafer carrier, and FIG. 15 is a front view of the automatic guided conveying device shown in FIG. 13. As shown in FIG. 15, the wafer carrier 400 has protrusions 402 protruding from both sides of the wafer carrier 400. The protrusion 402 is supported by the supporting member 504 of the gripper arm member 502. The lower side of the protrusion 402 must be kept horizontal. The vertical conveyor 500 has a right-angled outer frame 506 with a working space 508 therein. The working space 508 extends from the conveying surface 300 of the conveyor 300 to the wafer entrance 204. The gripper arm pieces 502 are installed on both sides of the working space 508, and the gripper arm pieces 502 and the wafer carrier 400 are conveyed to the working space 508. Fig. 16 is a preferred embodiment of the present invention. Perspective view of vertical conveyor. Because the vertical 500 series is symmetrically formed, only the vertical conveyor 5 is provided. The half series is shown in FIG. As shown in Fig. 16, a conveying screw 51o, which is a z-pull conveying device, extends along the inner surface of the outer frame 506 in a z-axis direction. A guide member 512 is installed parallel to the direction of the conveying screw training. The guide member 512 has a cylindrical shape 'without a spiral portion on its surface, and guides a moving member 514' so that when the moving member 514 moves up and down, the moving member flb slides up and down. The moving member 5 and 14 are spirally connected to the conveying screw 5.0. When the conveying screw 51 () rotates in the forward direction, so that the moving member 514 moves upwards and when the conveying screw rotates in the reverse direction, it moves 0 downwards. Tired talents 5 10, ^ A motor (not shown) is driven to rotate the break wheel in the forward and reverse directions-the driven gear can be installed on the motor shaft and lose 514618

V. Description of the invention (23) Between the feeding screw 510, in order to reduce the moving speed of the moving member 514. The gripper arm member 502 is fixed inside the moving member 514. Therefore, the gripper arm member 502 also operates when the moving member 514 moves up and down. The gripper arm 502 is a protrusion 402 protruding beyond the wafer carrier 400, which is transported by the front part of the wafer processing member via the transport system 300. The gripper arm member 502 includes a y-axis conveying device 518, such as a conveying screw, for conveying the wafer carrier 400 in a y-axis direction, and a y-axis moving member 52, which is passed through the y- The shaft conveying device 518 conveys in the y-axis direction. y-axis moving member 520 has a supporting member 504 for supporting the protrusion 402 of the wafer carrier 400. A motor and a gear box 516 mounted on the rear of the gripper arm member 502 rotate a y-axis conveying device 518. After the rotation of the y-axis conveying device 518, the y-axis moving member 5 2 0 moves in the forward and reverse directions. The supporting member 504 connected to the y-axis moving member 5 2 0 moves in the forward and reverse directions within the length of the gripper arm member 502 so that the supporting member 504 is positioned below the protrusion 402 of the wafer carrier 400. In addition, the support 504 moves vertically so as to support the support 504. Fig. 17 is a block diagram for explaining the control function of the automatic guided conveying device shown in Fig. 13. The control accessory 522 of the automatic guide conveying device controls the movement of the 300 wafer carrier 400 through a motor CM, and a pulse generator is used to detect the rotation speed of the motor C M and an encoder p G. In addition, the control accessory 522 is connected to a vertical conveyor 500 mounted on the wafer device 001 so as to control the transportation work. A wafer carrier detector WCD is mounted in front of the wafer device 201 so that the wafer carrier 400 is inspected when the wafer carrier 400 reaches a predetermined position. When the wafer carrier 400 is not selected, the y-axis moving member 520 is set to -26- This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling (This page) Order --------- line j Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 514618 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (24) Located at the rear position, and The gripper arm member 502 is controlled at a top position by controlling a z-axis motor ZM and a y-axis motor YM. The rear position is detected by a rear detector RD, and the uppermost position is detected by an upper detector u D. When the wafer carrier is detected by the wafer carrier detector WCD, the y-axis moving member 520 By using a lowermost position detector d D to move to a lowermost position. When the wafer carrier reaches the lowermost position, the y-axis moving member 520 is moved upward to a forward position by using a forward detector f0. When the y-axis moving member 5 2 0 moves to the forward position, the wafer carrier 400 positioned at the forward position is selected. When the wafer carrier 400 is selected by the gripper member 502, the Z-axis motor 21 ^ rotates in the opposite direction so that the gripper arm member 502 moves upward to the uppermost position. When the gripper arm member 502 reaches the uppermost position, the y-axis moves the member to transport the wafer carrier 400 to the rear position. The downward movement of the wafer carrier 400 is performed, which is opposite to the upward movement of the wafer carrier 400. FIG. 18 is a perspective view showing another embodiment of a semiconductor production line equipped with an automatic guided conveying device for conveying a wafer carrier. In this embodiment, the two vertical conveyors can be operated alternately or simultaneously so that the wafer carrier up / down speed can be doubled. FIG. 19 is a side view of an automatic guided conveying device for conveying a wafer carrier according to another embodiment of the present invention, and FIG. 20 is a front view of an automatic guided conveying device for conveying a wafer carrier as shown in FIG. Referring to FIG. 19, the components on the wafer carrier are grasped by using an empty nozzle. Therefore, the space of the vertical conveyor -27- This paper size is applicable to the Chinese National Standard (CNS) A4 specification (21 × 297 mm) (Please read the precautions on the back before filling this page) «

Order --------- Line I 514618 A7 V. Invention Description (25) The central space below is not needed so that the machine space can be used better. In Fig. 19, the outer frame of the vertical conveyor 54o is mounted above the wafer inlet and is a component. A gripper lever 542 extending from the bottom surface of an outer frame is provided with an empty suction head 544. The empty tip 544 attracts the surface of the wafer carrier 400 to select the wafer carrier 400. The gripper guard 542 can be mounted on the outer frame so that it can move in the y-axis direction. The present invention has been described in detail regarding its preferred embodiments, but those skilled in the art must understand that various changes, substitutions and alterations can be obtained without departing from the scope of the invention as defined by the appended claims. For example, the Z-axis conveying device can be constructed as a linear motor with a certain sub-track, and a rotor, or with a hydraulic or pneumatic cylinder and a piston rod. When the shaft conveying device is constructed by a linear motor, the gripper arm member or the gripper member is fixed to the rotor. When the z-axis conveying device is a hydraulic red structure and a piston rod member, the gripper arm member is fixed to the end member of the piston rod member. The structure of the shaft conveying device can be changed like the 2-axis conveying device with various lines. The structure of the y-axis conveying device and the 2-axis conveying device can be formed by combining upper and lower parts or by combining reciprocating mechanisms. As described above, the present invention has one aspect of utilizing the airtight feature of FOUP. :: The container is not guaranteed to be airtight. In other words, the open-type wafer cassette is more suitable. Due to the perennial water_material, for this reason, the transfer operation is carried on the lower part of the FOUP indexing head. The guide rail of the present invention is placed along the lower part of the F0up indexing head, and the processing device is operated by hand and its stability. It is not necessary for the AGV slave multi-axis robot system, but a simple lifter is required, which can be 28- X 297 mm) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 514618 A7 5. Description of the invention (%) Simplify the device by moving vertically up and down. Because the shuttle shuttle and the second use the space below the FOUP indexing head for transportation, the width of the machine is reduced to increase the compactness of the device or use space, thereby reducing maintenance costs. Furthermore, a work space is provided for workers to work at the same time, in case of urgent complaints, such as power failure or non-periodic operation, which results in performing manual operation processes. The present invention has been specifically shown and described with regard to its special embodiments, but it must be understood by those skilled in the art, that various forms and details can be changed without departing from the scope of the invention as defined by the appended patent application. :, -29 This paper size is applicable to China National Standard (CNS) A4 (210 χ 297 mm)

Claims (1)

514618 C8 C8 : Each gear assembly pair,-the upper part, which is connected to the seat, and-the central part, which is used by a hinged light and light two support machine, which is based on the lower part of the rotation direction arm assembly of the child motor- Zone ::: Pair ^ Lower the level of the support base. ',' 5 ,. The price is reduced to increase and as the patent application _ item 丨 unmanned load-right-angle ring or u-shaped support member, which is connected to the population compartment (front side plane, the level of the material protrudes toward the On the machine side, and having-a through-center member to allow the container to pass therethrough; and, at least one support pin, which is used to support the container by the through-center member protruding toward the support member, but when the support is passed through When the component is retracted, it is used to load the container to the support member, and to unload the container by the support member. 6. If the unmanned transmission device of the scope of patent application item 5, further includes a latch control device, which responds to a predetermined control The signal is used to electromagnetically control the protruding and retracting of the support pin. 7. The unmanned transmission device of item 1 of the patent application range, wherein the load port includes: a support member having a U-shaped member penetrating the central part And has an elbow opposite to an opening member, and is connected at a right angle to a front side plane of the entrance compartment; and a driving member for responding Should move up and down the lifting device, retract the supporting member so as to be parallel to the front side plane of the entrance compartment, or horizontally protruding -2- This paper size applies to China National Standard (CNS) A4 (210X 297 mm) 514618 A8 The scope of B8, C8, and D8 patent applications indicates that the supporting member faces the machine side, and the width of the through-center part of the child supporting device is wider than the width of the collection and packing, but narrower than the width of the supporting member. The unmanned wheel transmission device in the scope of patent application No. 7 wherein the supporting device is retracted so as to be parallel to the front plane of the passenger compartment. When the lifting device is loaded with the container, it is raised and lowered to the container base so that It will interrupt the upward and downward movements of the lifting device, and in other general states (in the Sui shape, the horizontal rotation of the base will protrude toward the machine side at a right angle. 9. If the unmanned transmission device in the scope of the patent application, item 丨, further Including a guide rail installed along the bottom of the load port device of the machine for sensing the shuttle device to transport the space directly below the load port device 10. The unmanned transmission device according to item 9 of the scope of patent application, wherein the guide rail is composed of at least one magnetic tape. The magnetic tape is connected along the bottom plane of the machine, and the shuttle device is formed by sensing the magnetic tape. The magnetic field enables the cognitive transport path. 11. The unmanned transmission device according to item 9 of the patent application scope, wherein the guide rail is composed of at least one track excavated under the plane of the bottom of the machine, = the bottom of the child shuttle device The track is installed on the plane part so that it can slide along the track and be transported along the track. 12 · For example, the unmanned transmission device of the patent application scope item 9, where the track is installed along each machine The two sides of the boundary form a minus point, whereby the shuttle device is reciprocated at both ends of the guide rail. -3-Size of this paper is suitable for wealth _ Jiaxian (CNS) A4 size ^ 210X297 (published) — Binding 514618 13. The unmanned transmission device according to item 9 of the patent application scope, wherein the guide rail is installed so as to form a closed loop along both sides of the machine, or a plurality of boundary sides of the machine are connected to form a closed circuit, thereby The shuttle is mounted around the closed loop. 14 · If the scope of patent application is the first! The unmanned transfer device of the item, wherein the container provided for storing the semiconductor wafer has an air-tight and inflow of an external pollution source. 15. Such as the scope of patent application! The unmanned transmission device of the item further includes a transmitting / receiving device for performing wireless communication with an external central control unit, whereby its position information and status information are transmitted to the central control unit via the transmitting / receiving device, and responding The control signals received by the central control unit perform the transport and loading / unloading operations. 16. An unmanned transmission device for transferring a container for storing workpieces from a certain device to another device in a clean room with at least one device for manufacturing semiconductors arranged along the boundary side of the machine, including: a load port device, which It is used for supporting the container or releasing the bracket relative to the container, and includes a right-angled annular Su—annular support member connected to the front side plane of the entrance compartment, for horizontally protruding toward the machine, and having a through central part. To allow the container to pass therethrough; at least one support pin is protruded toward the through central part of the support member for supporting the container, but is retracted when the container passes the support member for loading the container box to The support member, and the container being unloaded by the support member; and the latch control device, which responds to a predetermined control signal for controlling the protrusion and retraction of the support latch; Binding Patent application Installation I: The 2 straight body is formed on a support base 'for placing the ㈣ part, so that the plus 2 # base is directly below the ㈣zhen oblique device, so that the load supported by the load port device is loaded by the The loading unit unloads the negative load or P ^ device, which is integrated with the lifting device, and is used to use the load to move to the load device designated by an operation control signal < And a guide rail is used along the machine to sense the square space of the shuttle device. The bottom portion of the load port device is installed to transport 17 · -unmanned transmission devices passing directly below the load port device for cleaning semiconductor manufacturing rooms with at least one device along the side of the machine. A container for transferring workpieces from a certain device to another device includes: a load port unit including a u-shaped supporting member with a central part for supporting the container and releasing a bracket relative to the container; the central part The component has an elbow opposite to an opening component, which is connected to the front side surface of the entrance compartment at a right angle, and a driving device. When the container is raised or lowered, the support member is controlled at a right angle for retraction The support member is parallel to the front side plane of the entrance compartment, or in any other state, the support member is rotated at a right angle to horizontally protrude the support member toward the machine side; the hoisting device 'is integrally formed on a support machine Base, so that the container is placed, and the support base is vertically moved to the portion directly below the load port device for loading the load The container supported by the port device, or unloaded -5- This paper size applies to the Chinese National Standard (CNS) A4 specification (210X 297 mm) Loading the container unloaded by the support base to the load port The shuttle device, its overall safety, the lifting device, uses the space directly below the _ device to make a guide to the bottom of the load port device, which is moved to the lower part of the load port device by the-operation control signal. The track, which is installed along the track, is used to sense the child shuttle device to make the transportation pass through the space directly under the load port device two. < 18. A control method in a workplace, the workplace includes at least one device arranged along one of the boundary sides of the machine, each of which has a loading port, which is connected to the front of the π room. Plane, secretly protruding toward the machine side to support a container or release bracket for storing workpieces, and a guide rail, which is installed along the bottom of the lower part of the load port of the equipment, a method for controlling the container transport , By using at least one unmanned transmission device transported from one device to another device along the guide rail, the method includes: ": loading step for moving the unmanned transmission device to the load port of the requesting transmission device The lower part, the vertical ascending connection-the container support, the lifting device of the seat, slightly raises the container placed on the load port, a support member that supports the container, and lowers the lifting device to load the The container is on the unmanned transmission device; and the loading step 'its use; ^ moving the unmanned transmission to load the container, placing it' to-directly below the load of the target device To raise the lifting device vertically and retract the member to allow the container support base south to the level of the support member, and return the support member to its original -6-this paper ruler _ ^ 5 ^ S) A4 ^ (210X297 ^ 514618 A8 B8 C8 D8 applies for the patent scope to the location, and lowers the child lifting device to unload the container to the load 19. 19 · A use as described in the 18th scope of the patent application The method for transmitting a workpiece container by an unmanned transmission device, further comprising the step of selecting a single unmanned transmission device, which can analyze the information about the transmission request to enable a quick response to the transmission request, the information including location information and information about transmission by plural unmanned persons. Departure and arrival positions provided by the device. 20 · —A device for transporting a wafer carrier to a plurality of wafer processing components, which are arranged in a X-axis direction in a clean room and formed in the same With a central portion in front of the wafer inlet, the device includes: a horizontal conveyor 'located immediately adjacent to the front portion of each wafer processing member, and having a conveyor The surface is formed below the wafer entrance. The horizontal conveyor extends in the X-axis direction to convey the wafer carrier in the x-axis direction. A vertical conveyor is positioned in front of each wafer processing member. The vertical conveyer moves vertically between the wafer inlet and the horizontal conveyer conveying surface in the z-axis direction to convey the wafer carrier vertically; and a control unit that controls the positions of the horizontal and vertical conveyers, thereby horizontally conveying The wafer carrier is processed to each wafer and the wafer carrier is transported vertically to the wafer entrance. 21. The device of claim 20, wherein the horizontal conveyor includes a sliding rotor conveyor. 22. · If applied The device of the scope of the patent No. 20, wherein the wafer carrier includes a paper size applicable to the Chinese National Standard (CNS) A4 specification (210X 297 mm) 514618 A BCD 6. Application for a patent scope of cut-open integrated container. 23. The device of claim 20 in the patent application range, wherein the vertical conveyor includes: an outer frame, which is positioned in front of each wafer processing member, and the outer frame < the front and rear portions are open, A space is formed in the center of the outer frame, and the wafer inlet and the conveying surface of the horizontal conveyor are placed in the space; a pair of Z-axis conveying devices are installed on both inner sides of the outer frame, and a Extend in the Z-axis direction; a pair of Z-axis moving members, which are moved up and down by the z-axis conveying device; and a pair of gripper arm pieces for gripping the wafer carrier, gripper The arm piece is positioned on the Z-axis moving member. The gripper arm piece protrudes beyond the lateral protrusion of the carrier conveyed by the horizontal conveyor from the front part of the wafer processing member. 24. The device according to item 23 of the patent application, wherein each gripper arm member includes a y-axis conveying member for conveying the wafer carrier in the y-axis direction, and a y, -axis moving member passing through the y-axis Conveying member—Axial conveying, the y-axis moving member has a support for supporting a lateral protrusion of the wafer carrier. 25. If the device is called item 23 of the patent scope, wherein each z-axis conveying member includes a reversible motor, and one conveying screw is rotated by the reversible motor. The z-axis moving member is connected to the conveying screw by the screw. When the conveying screw rotates in the forward and reverse directions, so that the z-axis moving member moves up and down along a vertical guide surface. 26. If the device of the scope of patent application No. 23, in which every 2 axis conveying member -8-This paper size is suitable for the national standard (CNS) A4 specification (21G X 297 male cage 514618 A8 B8 C8 ----- ------ D8__________ 6. The scope of patent application includes a hydraulic cylinder that uses a liquid to transport a piston up and down. The two-axis member is connected to one end of the piston rod and moves up and down along a vertical guide surface. 27. The device according to item 23 of the patent application, wherein each z-axis conveying member includes a stator of a linear motor having a guide rail, and the z-axis moving member includes a rotor of the linear motor. A method for transporting a wafer carrier to a plurality of wafer processing members, the member is disposed in a clean room in an X-axis direction, and is formed in a central portion before it has a wafer inlet. The method includes: Use a conveyor to transport the wafer below the wafer entrance of each wafer processing member; i) When the wafer carrier is transported below the wafer entrance, the transport gripper arm is moved from an uppermost position to a the bottom Set; ii) at the lowermost position by using the gripper arm gripping the wafer; and in) the gripper arm of the vertical transporting member to the uppermost position, which should be based on one of the wafer inlet position. 29. The method of claim 28, wherein in step η), the support member mounted on the gripper arm is moved from a rear position to a front position to support a lateral protrusion of the wafer carrier, and When the gripper arm reaches the uppermost position, the support is moved to the rear position. 30. An apparatus for conveying a wafer carrier to a plurality of wafer processing members, the member is disposed in a clean room in an X-axis direction, and is formed in a central portion in front of which has a pair of wafer inlets The device includes: a horizontal conveyor positioned immediately before each wafer processing member _ -9- This paper size applies to China National Standard (CNS) A4 (210X297 mm) A conveying surface is formed below the entrance of the wafer and the water. The conveyer extends in the χ-axis direction so as to convey the round carrier in the X-axis direction; β, a vertical conveyor positioned at the front of each wafer processing member, the second processing member corresponding to the pair of wafer inlets, the vertical The conveyor is vertically moved between the corresponding wafer inlet and the horizontal conveyance state input surface in the ζ-axis direction so as to vertically convey the wafer carrier; and & manufacturing components' which control the horizontal and vertical conveyors. Position, whereby the child wafer carrier is transported horizontally to each wafer processing member and the wafer carrier is transported vertically to the wafer inlet. 31 ·: A device for conveying a wafer carrier to a plurality of wafer processing members. The core member is arranged in a clean room with an x-axis direction, and is formed in a central part before it has a wafer inlet. The device includes ..., a horizontal conveyor, which is positioned immediately adjacent to the square portion 6 in front of each wafer processing member, and has a conveying surface formed below the wafer entrance, and the horizontal conveyor extends in the X-axis direction, In order to transport the wafer carrier in the first axis direction, a vertical conveyor positioned at the front part of the wafer entrance of each wafer processing member < the upper part, the vertical conveyor is vertically moved in a Z-axis direction to the Between the wafer inlet and the horizontal conveyor conveying surface to vertically convey the wafer carrier; and a control unit that controls the position of the horizontal and vertical conveyors, thereby horizontally conveying the wafer carrier to each wafer processing member And vertically transferring the wafer carrier to the wafer inlet. ———— * 10- This paper size is in accordance with Chinese National Standard (CNS) A4 specification (21〇 \ 297) 514618 A8 B8 32. If the item 31 of the scope of patent application-sliding rotor loses office. Its water reader includes 33. The device as claimed in item 31 of the patent application, wherein the front opening integrates the container. ⑼ 34 ·: The device of the scope of application for the patent No. 31, wherein the vertical conveyor includes: an outer frame, which is positioned on one of the upper parts of the wafer inlet front part of each wafer processing member; a Z-axis conveying member, which Can be moved in the y-axis direction within the outer frame; a moving member that moves up and down via the z-axis conveying member, and true jade and head 'which is fixed to one end member of the Z-axis moving member' in order to use a Vacuum suction grips the upper central portion of the wafer carrier. 35. The device according to item 34 of the patent application scope, wherein the 2-axis conveying member includes: a y-axis moving member which is positioned in the outer frame and forms a screw hole; a reversible motor which is fixed to the y -A shaft moving member; and a conveying screw, which is rotated by the reversible motor, so that the feeding screw moves up and down in the screw hole. 36. The device of claim 34, wherein the Z-axis conveying member includes a hydraulic cylinder which conveys a piston up and down via a hydraulic pressure, the hydraulic cylinder can move in the y-axis direction in an outer frame, and the vacuum suction head It is fixed to one end part of the hydraulic cylinder rod. 37. The device according to item 34 of the scope of patent application, where the Z-axis conveying mechanism _ -11-This paper is suitable for standard g Standards (CNS) A4 specifications (21G X 297 public love 514618 A8 B8 C8 D8 Six The scope of the patent application can be moved in the y-axis direction in the outer frame. The z-axis conveying member includes a stator of a linear motor, the motor has a guide rail extending vertically, and the vacuum suction head is fixed to One end part of a rod, which is extended downward by one of the rotors of the linear motor. -12- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)