JP2004080033A - シリコン酸化膜を利用した微細パターン形成方法 - Google Patents
シリコン酸化膜を利用した微細パターン形成方法 Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32139—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer using masks
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
- G03F7/405—Treatment with inorganic or organometallic reagents after imagewise removal
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
Abstract
【解決手段】 微細パターンを形成しようとする物質膜上にフォトレジストパターンを形成する。そして、その上にシリコン酸化膜を蒸着するが、下部のフォトレジストパターンに損傷を加えずにコンフォーマルに薄く形成しなければならない。次に、下部膜に対してドライエッチングを実施するが、初期にはフォトレジストパターンの側壁にスペーサを形成し、次にフォトレジストパターン上にポリマー膜を形成する。本発明によれば、フォトレジストパターンの薄型化現象を防止してエッチングプロファイルを維持でき、パターニングされた物質膜にストリエーションやウィグリングなどの現象が生じることが防止できる。
【選択図】 図1B
Description
110 物質膜
120 フォトレジストパターン
130 シリコン酸化膜
Claims (18)
- 半導体基板上に形成された物質膜をエッチングして微細パターンを形成する方法において、
前記物質膜上にフォトレジスト膜を形成する段階と、
前記フォトレジスト膜を露光及び現像してフォトレジストパターンを形成する段階と、
前記物質膜及びフォトレジストパターン上に前記フォトレジストパターンに損傷が生じないようにコンフォーマルに第1シリコン酸化膜を形成する段階と、
前記物質膜をドライエッチングして物質膜パターンを形成する段階と、を含むことを特徴とする微細パターン形成方法。 - 前記第1シリコン酸化膜は常温〜400℃の間の温度で形成することを特徴とする請求項1に記載の微細パターン形成方法。
- 前記第1シリコン酸化膜は200Å以下の厚さに形成することを特徴とする請求項1に記載の微細パターン形成方法。
- 前記第1シリコン酸化膜はALDを利用して形成することを特徴とする請求項3に記載のパターン形成方法。
- 前記物質膜パターンはラインタイプのパターンであることを特徴とする請求項1に記載の微細パターン形成方法。
- 前記物質膜パターンはビットラインパターンまたはワードラインパターンであることを特徴とする請求項5に記載の微細パターン形成方法。
- 前記物質膜は第2シリコン酸化膜、ポリシリコン膜、金属シリサイド膜及び反射防止膜の積層体であることを特徴とする請求項6に記載の微細パターン形成方法。
- 前記物質膜パターンはホールタイプのパターンであることを特徴とする請求項1に記載の微細パターン形成方法。
- 半導体基板上に形成された物質膜をエッチングして微細パターンを形成する方法において、
前記物質膜上にフォトレジスト膜を形成する段階と、
前記フォトレジスト膜を露光及び現像してフォトレジストパターンを形成する段階と、
前記物質膜及びフォトレジストパターン上に前記フォトレジストパターンに損傷が生じないようにコンフォーマルにシリコン酸化膜を形成する段階と、
エッチングが前記フォトレジストパターンより前記第1シリコン酸化膜に対してもっとよく生じる工程条件で前記物質膜をエッチングする第1ドライエッチング段階と、
エッチングが前記第1シリコン酸化膜より前記フォトレジストパターンに対してもっとよくよく生じる工程条件で前記物質膜をエッチングして物質膜パターンを形成する第2ドライエッチング段階と、を含むことを特徴とする微細パターン形成方法。 - 前記第1シリコン酸化膜は常温〜400℃の間の温度で形成することを特徴とする請求項9に記載の微細パターン形成方法。
- 前記第1シリコン酸化膜は200Å以下の厚さに形成することを特徴とする請求項9に記載の微細パターン形成方法。
- 前記第1シリコン酸化膜はALDを利用して形成することを特徴とする請求項11に記載のパターン形成方法。
- 前記第1ドライエッチング段階では、前記フォトレジストパターンの側壁に前記第1シリコン酸化膜でスペーサを形成することを特徴とする請求項9に記載の微細パターン形成方法。
- 前記第2ドライエッチング段階では、ポリマー膜が前記フォトレジストパターンの上部に形成されることを特徴とする請求項9に記載の微細パターン形成方法。
- 前記物質膜パターンはラインタイプのパターンであることを特徴とする請求項9に記載の微細パターン形成方法。
- 前記物質膜パターンはビットラインパターンまたはワードラインパターンであることを特徴とする請求項15に記載の微細パターン形成方法。
- 前記物質膜は第2シリコン酸化膜、ポリシリコン膜、金属シリサイド膜及び反射防止膜の積層体であることを特徴とする請求項16に記載の微細パターン形成方法。
- 前記物質膜パターンはホールタイプパターンであることを特徴とする請求項9に記載の微細パターン形成方法。
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KR10-2002-0047233A KR100480610B1 (ko) | 2002-08-09 | 2002-08-09 | 실리콘 산화막을 이용한 미세 패턴 형성방법 |
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KR100480610B1 (ko) | 2005-03-31 |
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