EP1553212B1 - Electromagnetic wave shield material and process for producing the same - Google Patents
Electromagnetic wave shield material and process for producing the same Download PDFInfo
- Publication number
- EP1553212B1 EP1553212B1 EP03741353.1A EP03741353A EP1553212B1 EP 1553212 B1 EP1553212 B1 EP 1553212B1 EP 03741353 A EP03741353 A EP 03741353A EP 1553212 B1 EP1553212 B1 EP 1553212B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- electromagnetic wave
- wave shielding
- shielding material
- material according
- fine line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K9/00—Screening of apparatus or components against electric or magnetic fields
- H05K9/0073—Shielding materials
- H05K9/0094—Shielding materials being light-transmitting, e.g. transparent, translucent
- H05K9/0096—Shielding materials being light-transmitting, e.g. transparent, translucent for television displays, e.g. plasma display panel
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1603—Process or apparatus coating on selected surface areas
- C23C18/1607—Process or apparatus coating on selected surface areas by direct patterning
- C23C18/1608—Process or apparatus coating on selected surface areas by direct patterning from pretreatment step, i.e. selective pre-treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1603—Process or apparatus coating on selected surface areas
- C23C18/1607—Process or apparatus coating on selected surface areas by direct patterning
- C23C18/1612—Process or apparatus coating on selected surface areas by direct patterning through irradiation means
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/2006—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30
- C23C18/2046—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30 by chemical pretreatment
- C23C18/2073—Multistep pretreatment
- C23C18/208—Multistep pretreatment with use of metal first
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/2006—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30
- C23C18/2046—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30 by chemical pretreatment
- C23C18/2073—Multistep pretreatment
- C23C18/2086—Multistep pretreatment with use of organic or inorganic compounds other than metals, first
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/28—Sensitising or activating
- C23C18/30—Activating or accelerating or sensitising with palladium or other noble metal
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/54—Electroplating of non-metallic surfaces
- C25D5/56—Electroplating of non-metallic surfaces of plastics
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/001—Magnets
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12861—Group VIII or IB metal-base component
- Y10T428/12896—Ag-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
- Y10T428/24917—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including metal layer
Definitions
- the present invention relates to an electromagnetic wave shielding material which is equipped with a device to which various electronic equipments, communication devices such as a display device, etc., and having both of good light transmittance and a good shielding property of electromagnetic wave, and a process for preparing the same.
- a conductive metal such as silver, copper, nickel, indium, etc., or a conductive metal compound of these metals is formed on a transparent resin film substrate as a metal thin film by a sputtering method, an ion plating method, an ion beam assist method, a vacuum deposition method, or a wet coating method.
- an object of the present invention is to provide an electromagnetic wave shielding material having high conductivity and a high total luminous transmittance even when a fine line pattern with a fine line width which causes a higher aperture rate is provided.
- Another object of the present invention is to provide a process for preparing an electromagnetic wave shielding material having high conductivity and a high total luminous transmittance with low cost and high productivity.
- a basic process for preparing an electromagnetic wave shielding material of the present invention comprises dissolving silver halide with a soluble silver complex salt-forming agent to make a soluble silver complex salt, and simultaneously reducing it with a reducing agent (developing agent) such as hydroquinone, etc., to precipitate physical metal silver with an optional fine line pattern on a physical development nuclei, and subjecting to plating with.a metal such as copper, nickel, etc., using the physically developed silver as a catalytic nucleus, which applies a DTR development method known as the photographic development method.
- a reducing agent such as hydroquinone, etc.
- the electromagnetic wave shielding material of the present invention is defined in claim 1. Also, a process for preparing the electromagnetic wave shielding material of the present invention is defined in claim 9.
- a plastic resin film which is transparent at visible region, having flexibility, and preferably having good heat resistance may be mentioned.
- a transparency it may be a transparency with a total luminous transmittance of 70 to 90% or so, but in view of maintaining the total luminous transmittance as an electromagnetic wave shielding material to a higher value, higher total luminous transmittance of the transparent substrate is more preferred.
- Such a transparent substrate may include, for example, a polyester resin such as polyethylene terephthalate, etc., diacetate resin, triacetate resin, acrylic resin, polycarbonate resin, polyvinyl chloride, polyimide resin, polyamide resin, etc., which is a single layer or a complex film with a thickness of 10 to 600 ⁇ m.
- a polyester resin such as polyethylene terephthalate, etc., diacetate resin, triacetate resin, acrylic resin, polycarbonate resin, polyvinyl chloride, polyimide resin, polyamide resin, etc.
- a physical development nuclei layer Onto the transparent substrate, a physical development nuclei layer has been provided previously.
- the physical development nuclei fine particles (a particle size thereof is 1 to several tens nm or so) comprising a heavy metal or a sulfide thereof may be used.
- a fine particle layer of these physical development nuclei can be formed on the transparent substrate by the vacuum deposition method, cathode sputtering method, coating method, etc. In view of production efficiency, the coating method is preferably employed.
- a content of the physical development nuclei in the physical development nuclei layer is suitably 0.1 to 10 mg or so per 1 m 2 with a solid content.
- An adhesive layer comprising a polymer latex layer such as vinylidene chloride, polyurethane, etc. may be provided onto the transparent substrate, and an intermediate layer comprising a hydrophilic binder such as gelatin, etc. may be formed between the adhesive layer and the physical development nuclei layer.
- a polymer latex layer such as vinylidene chloride, polyurethane, etc.
- an intermediate layer comprising a hydrophilic binder such as gelatin, etc.
- the physical development nuclei layer may preferably contain a hydrophilic binder.
- An amount of the hydrophilic binder is preferably 10 to 300% by weight or so based on the amount of the physical development nuclei.
- the hydrophilic binder gelatin, Gum Arabic, cellulose, albumin, casein, sodium alginate, various kinds of starches, polyvinyl alcohol, polyvinyl pyrrolidone, polyacrylamide, a copolymer of acrylamide and vinyl imidazole, etc., may be used.
- the physical development nuclei layer may contain a crosslinking agent of the hydrophilic binder.
- the physical development nuclei layer or an intermediate layer, etc. it can be carried out by, for example, a coating system such as a dip coating, a slide coating, a curtain coating, a bar coating, an air knife coating, a roll coating, a gravure coating, a spray coating and the like.
- a coating system such as a dip coating, a slide coating, a curtain coating, a bar coating, an air knife coating, a roll coating, a gravure coating, a spray coating and the like.
- the physical development nuclei layer is preferably provided by the above-mentioned coating method generally as a continuous and uniform layer.
- a supplying method of the silver halide for precipitating metal silver onto the physical development nuclei layer there are methods including a method in which a physical development nuclei layer and a silver halide emulsion layer are integrally provided in this order onto a transparent substrate, or a method in which a soluble silver complex salt is supplied from a silver halide emulsion layer provided on another substrate such as paper or a plastic resin film, etc.
- a soluble silver complex salt is supplied from a silver halide emulsion layer provided on another substrate such as paper or a plastic resin film, etc.
- the silver halide emulsion to be used in the present invention can be produced according to the general preparation method of the silver halide emulsion in the field of the light-sensitive silver halide photographic material.
- the silver halide emulsion can be prepared, in general, by mixing and ripening an aqueous silver nitrate solution and an aqueous halide solution such as sodium chloride and sodium bromide, etc., in the presence of gelatin.
- a silver halide composition of the silver halide emulsion layer to be used in the present invention preferably comprises 80 mol% or more of silver chloride, particularly preferably 90 mol% or more of silver chloride. By making the silver chloride content high, conductivity of the formed physically developed silver increases.
- the silver halide emulsion layer to be used in the present invention has light-sensitivity to various kinds of light sources.
- the methods for preparing an electromagnetic wave shielding material there may be mentioned, for example, a method in which a physically developed silver having a fine line pattern shape such as a lattice-like pattern, etc. is formed. In this case, the silver halide emulsion layer is revealed to a fine line pattern shape, and as the exposing methods, there are a method in which a transparent pattern mask with a fine line pattern and a silver halide emulsion layer are closely contacted and exposed with ultraviolet rays, or a method in which scanning exposure is carried out by using various kinds of laser beams.
- chemical sensitization or spectral sensitization using a sensitizing dye may be applied to the silver halide.
- a metal sensitization using a gold compound or a silver compound, a sulfur sensitization using a sulfur compound, or both sensitizations are used in combination. It is preferably a gold-sulfur sensitization using a gold compound and a sulfur compound in combination.
- a dye or a pigment for preventing from halation or irradiation may be contained in an optional portion of the transparent substrate on which a physical development nuclei layer is to be provided, for example, in an adhesive layer, an intermediate layer, a physical development nuclei layer or a silver halide emulsion layer, or in a back coating layer provided at the back surface of the substrate.
- a silver complex diffusion transfer development occurs by exposing closely contacting a transparent pattern mask with an optional fine line pattern such as a lattice-like pattern with the above-mentioned light-sensitive material, or, subjecting the above-mentioned light-sensitive material to scanning exposure using an output machine which can emit various kinds of laser beams with an optional fine line pattern digital image, and then, treating the resulting material in an alkali solution in the presence of a soluble silver complex salt-forming agent and a reducing agent, whereby silver halide at an unexposed portion is dissolved to become a silver complex salt, and reduced on physical development nuclei to precipitate metal silver, so that a physically developed silver thin film with a fine line pattern can be obtained.
- DTR development silver complex diffusion transfer development
- the exposed portion becomes black silver by being chemically developed in the silver halide emulsion layer.
- the silver halide emulsion layer and the intermediate layer, or the protective layer provided depending on the necessity are removed by washing, whereby a physically developed silver thin film with fine line pattern is revealed at the surface.
- the removing method of the silver halide emulsion layer, etc., provided on the physical development nuclei layer after the DTR development may include a method in which they are removed by washing with water, or they are peeled off by transferring them to a peeling paper, etc.
- Removal by washing with water may include a method in which they are removed by using a scrabbling roller, etc. while spraying hot water as a shower, or a method in which they are removed by jet spraying hot water with a force of water.
- a physically developed silver thin film with a fine line pattern precipitated on physical development nuclei can be obtained by subjecting a silver halide emulsion layer to exposure in the same manner as mentioned above, the transparent substrate on which the physical development nuclei layer has been coated and the different light-sensitive material on which the silver halide emulsion layer has been coated are closely contacted in an alkali solution in the presence of a soluble silver complex salt-forming agent and a reducing agent, and after taking out the material from the alkali solution, both materials are peeled apart after a lapse of several tens seconds to several minutes.
- the soluble silver complex salt-forming agent is a compound which dissolves silver halide to form a soluble silver complex salt
- the reducing agent is a compound to reduce the soluble silver complex salt to precipitate metal silver on the physical development nuclei, and these reactions are carried out in an alkali solution.
- a thiosulfate such as sodium thiosulfate, ammonium thiosulfate, etc.
- a thiocyanate such as sodium thiocyanate, ammonium thiocyanate, etc., alkanol amine
- a sulfite such as sodium sulfite, potassium hydrogen sulfite, etc.
- reducing agent to be used in the present invention developing agents known in the field of photographic development may be used.
- polyhydroxybenzenes such as hydroquinone, catechol, pyrogallol, methylhydroquinone, chlorohydroquinone, etc.
- 3-pyrazolidones such as 1-phenyl-4,4-dimethyl-3-pyrazolidone, 1-phenyl-3-pyrazolidone, 1-phenyl-4-methyl-4-hydroxymethyl-3-pyrazolidone, etc., p-methylaminophenol, p-aminophenol, p-hydroxyphenylglycine, p-phenylenediamine, and the like.
- the above-mentioned soluble silver complex salt-forming agent and the reducing agent may be coated with the physical development nuclei layer on the transparent substrate, may be added into the silver halide emulsion layer, or may be added into the alkali solution, and further may be added to a plural number of positions, and it is preferred to add to at least into the alkali solution.
- a content of the soluble silver complex salt-forming agent into the alkali solution is suitably used in the range of 0.1 to 5 mol per liter of the developing solution, and a content of the reducing agent is suitably used in the range of 0.05 to 1 mol per liter of the developing solution.
- a pH of the alkali solution is preferably 10 or higher, more preferably 11 to 14.
- As the alkali agent sodium hydroxide, potassium hydroxide, sodium triphosphate, amino alcohol, etc., may be used.
- a developing time is preferably 5 to 60 seconds, more preferably 7 to 45 seconds or so.
- a developing temperature is preferably 10 to 40°C, more preferably 15 to 35°C or so.
- a method of applying the alkali solution to carry out the silver complex diffusion transfer development may be a dipping system or a coating system.
- the dipping system is carried out, for example, by transporting a transparent substrate on which a physical development nuclei layer and a silver halide emulsion layer are provided while dipping it in an alkali solution stored in a tank with a large amount.
- the coating system is, for example, to coat an alkali solution on a silver halide emulsion layer with an amount of 40 to 120 ml or so per 1 m 2 .
- the fine line pattern there is a pattern, for example, in which fine lines with a line width of 10 to 100 ⁇ m or so are provided in a lattice state to lengthwise and crosswise directions.
- line widths are made small and intervals between lines are made large, then light transmittance is improved but conductivity is lowered.
- the line widths are made large and intervals between lines are made small, then light transmittance is lowered while conductivity is heightened.
- this physically developed silver has the conductivity of a surface specific resistance of 50 ohm/ ⁇ or less, preferably 20 ohm/ ⁇ or less, and when it was made a total luminous transmittance of 50% or higher with a fine line width of 40 ⁇ m or less, for example, with a pattern of a fine line width of 20 ⁇ m, the surface resistance becomes several hundreds ohm/ ⁇ to several thousands ohm/ ⁇ or higher.
- this physically developed silver itself has conductivity since a firm silver image has been formed.
- the resulting material has the conductivity of a surface resistance of 10 ohm/ ⁇ or less, preferably 7 ohm/ ⁇ or less to 0.001 ohm/ ⁇ even when the light transmittance thereof is a total luminous transmittance of 50% or higher, preferably 60% or higher.
- a thickness of the fine line pattern formed by metal plating can be optionally varied depending on the desired characteristics, and preferably in the range of 0.5 to 15 ⁇ m, more preferably in the range of 2 to 12 ⁇ m.
- the thickness is thinner than the above range, a desired surface resistance value sometimes cannot be obtained, while the thickness is thicker than the above range, there is no significant problem, but a decreasing effect of the surface resistance value cannot be expected whereas efficiency of plating work is lowered.
- the electromagnetic wave shielding material of the present invention can provide a shielding effect of 30 dB or more over the higher frequency band of 30 MHz to 1,000 MHz or more.
- plating of the physically developed silver of the fine line pattern can be carried out by either of the electroless plating method, the electrolytic plating method or the plating method in which both of the above are combined.
- the method of electrolytic plating or electroless plating is used in combination thereto, in the viewpoint that a role of the treatments of at least exposure of the fine line pattern, developing treatment and plating treatment can be applied continuously with a roll state as such to a continuous web in a roll state in which a physical development nuclei layer and a silver halide emulsion layer have been formed on a transparent substrate and in view of working efficiency of plating.
- the plating layer of the physical development silver of the fine line pattern has a high electric conductivity, so that electrolytic plating can be carried out easily.
- the metal plating method can be carried out by the conventionally known method.
- the electrolytic plating method can be carried out by using a metal such as copper, nickel, silver, gold, solder, or copper/nickel, etc., and the conventionally known method in which a multi-layer or a composite type electrolytic plating film(s) thereof are formed can be used.
- literatures such as " Surface Treatment Technique Comprehensive; K.K. Gijutsu Shiryo Center, 1987/12/21 Initial Edition, pp. 281 to 422 ", and the like can be referred to.
- Examples of the electrolytic plating may include a method in which the above-mentioned transparent substrate on which the physically developed silver has been formed is dipped in a bath comprising copper sulfate and sulfuric acid, etc., as main components and passing electricity with a current density of 1 to 20 ampere/dm 2 at 10 to 40°C.
- the fine line pattern when the fine line pattern has a thickness of 0.5 to 15 ⁇ m and a line width of 1 to 40 ⁇ m, it can show excellent light-transmitting property and conductive property of a total luminous transmittance of 50% or higher, and a surface resistance of 10 ohm/ ⁇ or less, and show a shielding effect of 30 dB or more over higher frequency region of 30 MHz to 1,000 MHz or more. And the shielding effects can be expected sufficiently over higher frequency bands of several tens GHz bands.
- the electromagnetic wave shielding material of the present invention may have an optional layer at the side having the electromagnetic wave shielding layer or at the opposite side of the substrate, for example, a protective layer, a near infrared absorption layer, etc., and these layers may be provided by coating or adhering a film.
- the surface of the plating layer is preferred to subject the surface of the plating layer to a blackening treatment by using an acid or an alkali, or by plating.
- a polyethylene terephthalate film having a thickness of 100 ⁇ m and a total luminous transmittance of 89% was used as a transparent substrate.
- This film substrate has a subbing layer comprising a vinylidene chloride and a gelatin layer with 50 mg/m 2 .
- a hydrosol solution containing 0.4 mg/m 2 of palladium sulfate in terms of a solid content was coated and dried to form a physical development nuclei layer.
- a silver halide emulsion layer (prepared so that it becomes 90 mol% of silver chloride and 10 mol% of silver bromide, and an average particle size of 0.23 ⁇ m) prepared by a general double-jet mixing method of a silver halide emulsion for photography was coated on the above-mentioned physical development nuclei layer. It was coated so that a weight ratio of silver (silver nitrate)/ gelatin in the silver halide emulsion layer became 1.5 and a silver halide amount (calculated on silver nitrate) of 4 g/m 2 to prepare a light-sensitive material.
- This light-sensitive material was exposed through a transparent pattern mask with a fine line pattern using a daylight film vacuum contact printer which employs a mercury lamp as a light source, subsequently developed by dipping in a commercially available developer for a silver complex salt diffusion transfer at 25°C for 40 seconds, and then, washed away the silver halide emulsion layer to form a physically developed silver thin film with a fine line pattern which has a fine line width of 20 ⁇ m, a thickness of the fine line of 0.05 to 0.1 ⁇ m and a fine line interval of 200 ⁇ m.
- the total luminous transmittance of the electromagnetic wave shielding material (Comparative sample 1) in which a fine line pattern state silver thin film had been formed obtained as mentioned above was 76%.
- the surface resistance value of the Comparative sample 1 was measured according to the measurement method of JIS K 7194. As a result, the surface resistance value was 850 ohm/ ⁇ .
- Comparative sample 1 showed a shielding property of 27 dB at 500 MHz and of 23 dB at 1,000 MHz.
- the above-mentioned light-sensitive material was developed without exposure in the same manner as in Comparative sample 1 and a physically developed silver thin film was formed on the whole surface.
- the surface specific resistance of this sample was 13 ohm/ ⁇ .
- Comparative sample 1 was subjected to electrolytic plating treatment as mentioned below.
- a processing solution for an electrolytic copper plating copper sulfate: 75 g/l, sulfuric acid: 190 g/l, chloride ion: 50 ppm
- copper plating was applied on the physically developed silver film with a thickness of 5 ⁇ m to prepare Sample A of the present invention.
- Sample A of the present invention had the total luminous transmittance of 73% and the surface resistance value of 0.5 ohm/ ⁇ , and it showed a shielding property of 56 dB at 500 MHz and of 63 dB at 1,000 MHz.
- Sample B of the present invention was prepared. As results of the measurements of the total luminous transmittance and the surface resistance value, Sample B of the present invention had the total luminous transmittance of 71% and the surface resistance value of 0.3 ohm/ ⁇ , and it showed a shielding property of 60 dB at 500 MHz, and of 64 dB at 1,000 MHz.
- an electromagnetic wave shielding material having excellent light transmittance and shielding property over wide frequency bands can be obtained.
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- Metallurgy (AREA)
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- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
- Electroplating Methods And Accessories (AREA)
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PCT/JP2003/008842 WO2004007810A1 (ja) | 2002-07-12 | 2003-07-11 | 電磁波シールド材およびその製造方法 |
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US (1) | US7749620B2 (ko) |
EP (1) | EP1553212B1 (ko) |
JP (2) | JP4429901B2 (ko) |
KR (1) | KR100936527B1 (ko) |
CN (1) | CN100346003C (ko) |
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EP1553212B1 (en) * | 2002-07-12 | 2017-08-23 | Fujimori Kogyo Co., Ltd. | Electromagnetic wave shield material and process for producing the same |
US7934966B2 (en) | 2004-06-23 | 2011-05-03 | Fujifilm Corporation | Light-transmitting electromagnetic wave shielding film and process for producing the same |
JP4570436B2 (ja) * | 2004-10-12 | 2010-10-27 | 三菱製紙株式会社 | 金属メッシュおよび配線パタン転写シート |
JP4870963B2 (ja) * | 2004-10-19 | 2012-02-08 | 株式会社ブリヂストン | 電磁波シールド性光透過窓材の製造方法及びその方法に用いられるメッキ装置 |
KR101234872B1 (ko) * | 2005-03-15 | 2013-02-19 | 후지필름 가부시키가이샤 | 도금 방법, 투광성 도전성막 및 전자기파 차폐막 |
WO2006098333A1 (ja) * | 2005-03-15 | 2006-09-21 | Fujifilm Corporation | 透光性導電性膜及び透光性導電性膜の製造方法 |
TWI386522B (zh) | 2005-03-15 | 2013-02-21 | Fujifilm Corp | 連續電解鍍敷方法及導電性膜的製造方法 |
JP4895516B2 (ja) * | 2005-03-16 | 2012-03-14 | 三菱製紙株式会社 | 銀拡散転写受像材料の製造方法および導電性銀薄膜の形成方法 |
KR20080011644A (ko) * | 2005-06-03 | 2008-02-05 | 후지필름 가부시키가이샤 | 도금 처리 방법, 도전성 필름 및 투광성 전자기파 차폐필름 |
JP2007009326A (ja) * | 2005-06-03 | 2007-01-18 | Fujifilm Corp | めっき処理方法、導電性膜、及び透光性電磁波シールド膜 |
JP4719512B2 (ja) * | 2005-06-06 | 2011-07-06 | 富士フイルム株式会社 | めっき処理方法、透光性導電性膜、及び透光性電磁波シールド膜 |
JP4943673B2 (ja) * | 2005-06-28 | 2012-05-30 | 三菱製紙株式会社 | 導電性材料の製造方法 |
US20070015094A1 (en) * | 2005-07-13 | 2007-01-18 | Konica Minolta Medical & Graphic, Inc. | Electromagnetic wave shielding material, method for manufacturing the same and electromagnetic wave shielding material for plasma display panel |
JP4512535B2 (ja) * | 2005-08-08 | 2010-07-28 | 三菱製紙株式会社 | 導電性材料の製造方法 |
JP4856921B2 (ja) * | 2005-09-22 | 2012-01-18 | 富士フイルム株式会社 | めっき処理方法、導電性膜、透光性電磁波シールド膜および光学フィルター |
JP4902167B2 (ja) * | 2005-10-20 | 2012-03-21 | 藤森工業株式会社 | 電磁波シールド材及びその製造方法 |
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JP4880287B2 (ja) * | 2005-11-08 | 2012-02-22 | 三菱製紙株式会社 | 導電性材料の製造方法 |
KR101050137B1 (ko) * | 2005-12-16 | 2011-07-19 | 주식회사 엘지화학 | 전도성 패턴의 제조방법 및 이에 의해 제조된 전도성 패턴 |
JPWO2007069495A1 (ja) * | 2005-12-16 | 2009-05-21 | コニカミノルタエムジー株式会社 | 電磁波遮蔽材料、電磁波遮蔽材料の製造方法及びプラズマディスプレイパネル用電磁波遮蔽材料 |
JP4846360B2 (ja) * | 2005-12-27 | 2011-12-28 | 藤森工業株式会社 | 周波数選択透過型の電磁波シールド材およびその製造方法 |
JP2007180114A (ja) * | 2005-12-27 | 2007-07-12 | Fujimori Kogyo Co Ltd | 周波数選択遮蔽型の電磁波シールド材およびその製造方法 |
JP2007208133A (ja) * | 2006-02-03 | 2007-08-16 | Fujifilm Corp | 透光性電磁波シールドフィルム、透光性電磁波シールド性積層体、光学フィルター、およびプラズマディスプレイパネル |
WO2007102605A1 (ja) * | 2006-03-09 | 2007-09-13 | Fujifilm Corporation | めっき処理方法、導電性膜およびその製造方法、並びに透光性電磁波シールド膜 |
JP4896553B2 (ja) * | 2006-03-29 | 2012-03-14 | 藤森工業株式会社 | マイクロレンズアレイシートの製造方法 |
JP2007310091A (ja) * | 2006-05-17 | 2007-11-29 | Fujifilm Corp | プラズマディスプレイパネル |
CN100455179C (zh) * | 2006-05-26 | 2009-01-21 | 中国科学院理化技术研究所 | 包覆型复合碳基电磁屏蔽材料及其制备方法和用途 |
JP4650812B2 (ja) | 2006-09-06 | 2011-03-16 | 東レフィルム加工株式会社 | ディスプレイ用フィルター及びその製造方法並びにディスプレイの製造方法 |
CN101005755B (zh) * | 2006-12-12 | 2011-04-20 | 中国乐凯胶片集团公司 | 一种电磁波屏蔽膜及其制造方法 |
JP4846558B2 (ja) * | 2006-12-22 | 2011-12-28 | 藤森工業株式会社 | 周波数選択透過型の電磁波シールド材およびその製造方法 |
JP5058583B2 (ja) * | 2006-12-22 | 2012-10-24 | 藤森工業株式会社 | 周波数選択遮蔽型の電磁波シールド材およびその製造方法 |
JP5144074B2 (ja) * | 2007-01-05 | 2013-02-13 | 三菱製紙株式会社 | 導電性基材の作製方法 |
JP4909123B2 (ja) * | 2007-03-01 | 2012-04-04 | 三菱製紙株式会社 | 導電性材料前駆体 |
JP5588597B2 (ja) | 2007-03-23 | 2014-09-10 | 富士フイルム株式会社 | 導電性材料の製造方法及び製造装置 |
JP5192713B2 (ja) | 2007-03-30 | 2013-05-08 | 富士フイルム株式会社 | 導電膜及びその製造方法 |
EP2009977A3 (en) | 2007-05-09 | 2011-04-27 | FUJIFILM Corporation | Electromagnetic shielding film and optical filter |
WO2009004957A1 (ja) * | 2007-06-29 | 2009-01-08 | Toray Industries, Inc. | ディスプレイ用フィルター |
US7666568B2 (en) | 2007-10-23 | 2010-02-23 | E. I. Du Pont De Nemours And Company | Composition and method for providing a patterned metal layer having high conductivity |
BRPI0822649B8 (pt) * | 2008-05-09 | 2022-07-12 | Stora Enso Oyj | Aparelho, método para estabelecer um padrão condutor sobre um substrato isolante plano, o substrato isolante plano e chipset do mesmo |
CN102067743B (zh) * | 2008-06-26 | 2014-02-19 | 加川清二 | 电磁波吸收膜以及利用该吸收膜的电磁波吸收体 |
JP5515010B2 (ja) * | 2008-07-02 | 2014-06-11 | 国立大学法人東北大学 | 導電性膜の製造方法、及び、導電性膜 |
CN102165334A (zh) | 2008-07-17 | 2011-08-24 | 东丽薄膜先端加工股份有限公司 | 显示器用过滤器 |
JP5010554B2 (ja) * | 2008-08-13 | 2012-08-29 | 三菱製紙株式会社 | 導電性パタンの形成方法 |
KR101688471B1 (ko) | 2009-02-13 | 2016-12-21 | 세이지 까가와 | 선상흔이 형성된 금속 박막-플라스틱 복합 필름 및 그 제조 장치 |
CN102415230B (zh) * | 2009-12-25 | 2015-09-02 | 加川清二 | 复合电磁波吸收薄膜 |
CN102154815A (zh) * | 2010-12-24 | 2011-08-17 | 北京美格赛斯无纺科技有限公司 | 具有电磁屏蔽功能抗菌抗病毒非织造布及生产方法和装置 |
JP5323970B2 (ja) * | 2012-07-02 | 2013-10-23 | 藤森工業株式会社 | 周波数選択遮蔽型の電磁波シールド材およびその製造方法 |
DE102013114572A1 (de) | 2013-12-19 | 2015-06-25 | Leibniz-Institut Für Neue Materialien Gemeinnützige Gmbh | Verfahren zur Herstellung strukturierter metallischer Beschichtungen |
CN107636209B (zh) * | 2015-06-26 | 2021-07-02 | 住友金属矿山股份有限公司 | 导电性基板 |
CN110294857B (zh) * | 2019-05-08 | 2022-02-01 | 广东石油化工学院 | 一种协同增强电磁屏蔽薄膜及其制备方法 |
Family Cites Families (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2352014A (en) * | 1941-07-21 | 1944-06-20 | Rott Andre | Photomechanical printing process and printing material for carrying out the same |
JPS492621B1 (ko) | 1970-12-29 | 1974-01-22 | ||
JPS60170845A (ja) * | 1984-02-16 | 1985-09-04 | Fuji Photo Film Co Ltd | 銀塩拡散転写用感光材料 |
CN2079848U (zh) * | 1990-05-19 | 1991-06-26 | 国家建筑材料工业局南京玻璃纤维研究设计院 | 镀金属膜的玻璃纤维屏蔽毡 |
US5043244A (en) | 1990-09-10 | 1991-08-27 | E. I. Du Pont De Nemours And Company | Process for defined etching of substrates |
JPH05287542A (ja) | 1992-04-08 | 1993-11-02 | Mitsubishi Paper Mills Ltd | 無電解銀メッキ方法 |
JPH07134421A (ja) | 1993-11-09 | 1995-05-23 | Mitsubishi Paper Mills Ltd | 画像形成材料およびそれを用いた画像形成方法 |
JPH0953030A (ja) | 1995-08-11 | 1997-02-25 | Sumitomo Osaka Cement Co Ltd | 透明導電塗料及び透明導電膜 |
JPH09306647A (ja) * | 1996-05-17 | 1997-11-28 | Mitsui Toatsu Chem Inc | 透明面状ヒーター、電磁波シールド体、および液晶装置 |
JPH10151858A (ja) | 1996-11-25 | 1998-06-09 | Konica Corp | 画像形成材料及びその製造方法 |
JPH11126024A (ja) | 1997-10-22 | 1999-05-11 | Dainippon Printing Co Ltd | ディスプレイ用前面板 |
JPH11232939A (ja) | 1998-02-10 | 1999-08-27 | Fuji Photo Film Co Ltd | 透明導電体の製造方法およびそれを用いた透明導電性フイルム |
JP2000040896A (ja) | 1998-07-23 | 2000-02-08 | Shield Tec Kk | 電磁波遮蔽材、その製造方法および電磁波シールド対策製品 |
US6013203A (en) * | 1998-08-19 | 2000-01-11 | Enthone-Omi, Inc. | Coatings for EMI/RFI shielding |
JP2000223885A (ja) * | 1999-01-28 | 2000-08-11 | Hitachi Chem Co Ltd | 電磁波シールドフィルムの製造方法 |
JP3040395B1 (ja) * | 1999-02-12 | 2000-05-15 | 住友ゴム工業株式会社 | 透光性電磁波シ―ルド部材の製造方法 |
JP2000261186A (ja) | 1999-03-11 | 2000-09-22 | Mikuni Color Ltd | 透明電磁波シールド部材の作製方法 |
JP2000261187A (ja) | 1999-03-11 | 2000-09-22 | Mikuni Color Ltd | 金属パターン形成方法 |
JP2000265087A (ja) | 1999-03-11 | 2000-09-26 | Mikuni Color Ltd | 金属パターン形成方法 |
JP2000294980A (ja) * | 1999-04-06 | 2000-10-20 | Nippon Sheet Glass Co Ltd | 透光性電磁波フィルタおよびその製造方法 |
JP2000329934A (ja) | 1999-05-18 | 2000-11-30 | Mitsui Chemicals Inc | 透明導電性フィルム |
JP2000357414A (ja) | 1999-06-11 | 2000-12-26 | Sumitomo Osaka Cement Co Ltd | 透明導電膜および表示装置 |
JP2001038843A (ja) | 1999-07-28 | 2001-02-13 | Mitsui Chemicals Inc | 透明導電性フィルム |
JP2001047549A (ja) | 1999-08-06 | 2001-02-20 | Mitsui Chemicals Inc | 透明導電性フィルム |
JP2001051610A (ja) | 1999-08-16 | 2001-02-23 | Mitsubishi Chemicals Corp | ディスプレイ用フィルター |
JP2001057110A (ja) | 1999-08-18 | 2001-02-27 | Mitsui Chemicals Inc | 透明導電性フィルム |
JP2001060416A (ja) | 1999-08-23 | 2001-03-06 | Fuji Photo Film Co Ltd | 透明導電性フイルムおよびそのアース方法 |
CA2396570A1 (en) * | 2000-01-07 | 2001-07-19 | President And Fellows Of Harvard College | Fabrication of metallic microstructures via exposure of photosensitive composition |
JP4540883B2 (ja) * | 2000-10-19 | 2010-09-08 | パナソニック電工株式会社 | 透視性電磁波シールド・近赤外線カット材料及びその製造方法 |
EP1553212B1 (en) * | 2002-07-12 | 2017-08-23 | Fujimori Kogyo Co., Ltd. | Electromagnetic wave shield material and process for producing the same |
-
2003
- 2003-07-11 EP EP03741353.1A patent/EP1553212B1/en not_active Expired - Lifetime
- 2003-07-11 KR KR1020057000564A patent/KR100936527B1/ko active IP Right Grant
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-
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Non-Patent Citations (1)
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JP5002634B2 (ja) | 2012-08-15 |
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US20060115636A1 (en) | 2006-06-01 |
CN1668783A (zh) | 2005-09-14 |
EP1553212A4 (en) | 2012-01-25 |
AU2003280996A8 (en) | 2004-02-02 |
US7749620B2 (en) | 2010-07-06 |
CN100346003C (zh) | 2007-10-31 |
JP4429901B2 (ja) | 2010-03-10 |
JPWO2004007810A1 (ja) | 2005-11-10 |
EP1553212A1 (en) | 2005-07-13 |
AU2003280996A1 (en) | 2004-02-02 |
KR20050026476A (ko) | 2005-03-15 |
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