CN106887458B - Semiconductor device and method for manufacturing the same - Google Patents

Semiconductor device and method for manufacturing the same Download PDF

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CN106887458B
CN106887458B CN201710118912.2A CN201710118912A CN106887458B CN 106887458 B CN106887458 B CN 106887458B CN 201710118912 A CN201710118912 A CN 201710118912A CN 106887458 B CN106887458 B CN 106887458B
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insulating film
layer
oxide semiconductor
semiconductor layer
electrode
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CN106887458A (en
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山崎舜平
秋元健吾
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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Abstract

In an active matrix display device, electrical characteristics of a thin film transistor constituting a circuit are important, and the electrical characteristics affect the performance of the display device. Accordingly, the present invention provides a semiconductor device in which an oxide semiconductor film from which hydrogen is completely removed is used for a thin film transistor of an inverted staggered type to reduce unevenness in electrical characteristics, and a method for manufacturing the same. For this reason, three layers of a gate insulating film, an oxide semiconductor layer, and a channel protective film are formed successively by a sputtering method without being exposed to the atmosphere. The film of the oxide semiconductor layer is formed in an atmosphere containing oxygen at a flow ratio of 50% to 100%. The layers above and below the channel formation region of the oxide semiconductor layer are silicon oxynitride films having a silicon content of 3 at% to 30 at%.

Description

Semiconductor device and method for manufacturing the same
Technical Field
The present invention relates to a semiconductor device having a circuit including a thin film transistor (hereinafter, referred to as a TFT) in which an oxide semiconductor film is used for a channel formation region, and a method for manufacturing the semiconductor device. For example, the present invention relates to an electronic apparatus in which a light-emitting display device, which is an electro-optical device typified by an organic light-emitting element or a liquid crystal display panel, is mounted as a component thereof.
In this specification, a semiconductor device refers to all devices which can operate by utilizing semiconductor characteristics, and thus an electro-optical device, a semiconductor circuit, and an electronic apparatus are all semiconductor devices.
Background
There are a variety of metal oxides and they are used in a wide variety of applications. Indium oxide is a well-known material, and is used as an electrode material having light-transmitting properties necessary for a liquid crystal display or the like.
Some metal oxides exhibit semiconductor characteristics. Examples of the metal oxide exhibiting semiconductor characteristics include tungsten oxide, tin oxide, indium oxide, and zinc oxide, and a thin film transistor in which such a metal oxide exhibiting semiconductor characteristics is used as a channel formation region is known (see patent documents 1 to 4 and non-patent document 1).
In addition, as the metal oxide, not only a mono-oxide but also a multi-oxide is known. For example, as a multi-component oxide semiconductor containing In, Ga, and Zn, InGaO having a homolog (homologous compound) is known3(ZnO)m(m: natural number) (non-patent documents 2 to 4).
It has been confirmed that an oxide semiconductor composed of an In — Ga — Zn based oxide as described above can be used as a channel layer of a thin film transistor (see patent document 5, non-patent documents 5 and 6).
Patent document
[ patent document 1] Japanese patent application laid-open No. Sho 60-198861
[ patent document 2] Japanese patent application laid-open No. Hei 8-264794
[ patent document 3] Japanese PCT International application translation No. 11-505377
[ patent document 4] Japanese patent application laid-open No. 2000-150900
[ patent document 5] Japanese patent application laid-open No. 2004-
[ non-patent document 1] M.W.Prins, K.O.Grosse-Holz, G.Muller, J.F.M.Cillessen, J.B.Giesbers, R.P.Weening, and R.M.Wolf, "A ferroelectric transfer thin-film transistor" (transparent ferroelectric thin film transistor), appl.Phys.Lett., 17June 1996, Vol.68p.3650-3652
[ non-patent document 2]M.Nakamura，N.Kimizuka，and T.Mohri，″The Phase Relations in the In2O3-Ga2ZnO4-ZnO System at 1350℃″ (In2O3-Ga2ZnO4Phase relationship of ZnO class at 1350 ℃), J.solid State chem., 1991, Vol.93, p.298-315
[ non-patent document 3]N.Kimizuka，M.Isobe，and M.Nakamura，″Syntheses and Single-Crystal Data of Homologous Compounds，In2O3(ZnO)m(m＝3， 4，and 5)，InGaO3(ZnO)3，and Ga2O3(ZnO)m(m＝7，8，9，and 16) in the In2O3-ZnGa2O4ZnO System "(Synthesis of homologs and Single Crystal data, In)2O3-ZnGa2O4In of-ZnO group2O3(ZnO)m(m＝3，4，and 5)，InGaO3(ZnO) 3，and Ga2O3(ZnO)m(m＝7，8，9，and 16))，J.Solid State Chem.，1995， Vol.116，p.170-178
[ non-patent document 4]]Zhongcun Zhenzuo , Junzhuang, Royaling and Yangshang, smooth and regular, "ホモロガス phase, InFeO3(ZnO)mSynthesis of およ prosthesis (analogous compound, InFeO (natural number)) とそ patient-shaped Compound(s) (analogous compound, InFeO oxide (InFeO)3(ZnO)m) (m is a natural number) and the synthesis and crystal structure of compounds of the same type), SOLID physics (SOLID STATE PHYSICS), 1993, Vol.28, No.5, p.317-327
[ non-patent document 5] K.Nomura, H.Ohta, K.Ueda, T.Kamiya, M.Hirano, and H.Hosono, "Thin-film transistor with single-crystal transparent oxide semiconductor", SCIENCE, 2003, Vol.300, p.1269-1272
[ non-patent document 6] K.Nomura, H.Ohta, A.Takagi, T.Kamiya, M.Hirano, and H.Hosono, "from-temperature failure of transparent flexible thin-film transistors using amorphous oxide semiconductors" (manufacturing of transparent flexible thin-film transistors using amorphous oxide semiconductors at Room temperature), NATURE, 2004, Vol.432p.488-492
A thin film transistor in which a channel formation region is provided in an oxide semiconductor can realize higher field effect mobility than a thin film transistor using amorphous silicon.
A thin film transistor is formed over a glass substrate, a plastic substrate, or the like using these oxide semiconductors, and application thereof to a device such as a liquid crystal display, an electroluminescent display, or electronic paper is expected.
In an active matrix display device, electrical characteristics of a thin film transistor constituting a circuit are important, and the electrical characteristics affect the performance of the display device. In particular, the threshold voltage (Vth) is important among the electrical characteristics of the thin film transistor. It goes without saying that high field-effect mobility is preferable, and even if the field-effect mobility is high, when the threshold voltage value is high or the threshold voltage value is negative, it is difficult to perform control as a circuit. When the threshold voltage value of the thin film transistor is high and the absolute value of the threshold voltage is large, the TFT cannot function as a switch when the driving voltage is low, and there is a possibility that a load is caused. When the threshold voltage value is negative, even if the gate voltage is OV, a current is generated between the source electrode and the drain electrode, and the state tends to be a so-called normally on state (normal on).
In the case of using an n-channel thin film transistor, it is preferable to use a transistor in which a channel is formed only by applying a positive voltage to a gate voltage, and a drain current is generated. A transistor in which a channel is formed only by increasing a driving voltage or a transistor in which a channel is formed even in a negative voltage state and a drain current is generated is not suitable for a thin film transistor used for a circuit.
Disclosure of Invention
An object of the present invention is to provide a thin film transistor using an oxide semiconductor film, in which a channel is formed at a positive threshold voltage at which a gate voltage of the thin film transistor is as close to 0V as possible.
Another object of the present invention is to reduce variation in electrical characteristics of a thin film transistor including an oxide semiconductor film. In particular, in a liquid crystal display device, when there is large unevenness among elements, display unevenness due to unevenness of TFT characteristics may occur.
In addition, there is a concern about a display device having a light-emitting element as follows: when a constant current is applied to the pixel electrode, the TFT is arranged (in a driving state)TFT for supplying current to light emitting element of circuit or pixel) on current (I)on) When the unevenness of (2) is large, unevenness of luminance occurs in the display screen.
Another object of the present invention is to provide a highly reliable semiconductor device using an oxide semiconductor.
One embodiment of the invention disclosed in the present specification solves at least one of the above problems.
In order to improve the characteristics of the oxide semiconductor layer and reduce the unevenness of the characteristics, it is important to reduce the hydrogen concentration in the oxide semiconductor layer.
Accordingly, by using an oxide semiconductor in which the hydrogen content is completely reduced, the electric characteristics of the thin film transistor are improved, and a highly reliable thin film transistor with less variation in characteristics is realized.
The characteristics of the thin film transistor in which the channel formation region is provided in the oxide semiconductor are affected by the interface of the oxide semiconductor layer, that is, the interface of the oxide semiconductor layer and the gate insulating film, the interface of the oxide semiconductor layer and the protective insulating film, or the interface of the oxide semiconductor layer and the electrode, and are also greatly affected by the characteristics of the oxide semiconductor layer itself.
The gate insulating film, the oxide semiconductor layer, and the channel protective film are formed continuously without being exposed to the atmosphere so that the interface is formed in a clean state. Preferably, by forming these three layers continuously under reduced pressure, an oxide semiconductor layer having a good interface can be realized, and a thin film transistor with low leakage current at the time of off of the TFT and high current driving capability can be realized. In particular, the oxide semiconductor layer is formed by a sputtering method in an atmosphere containing oxygen at a flow rate ratio of 50% to 100%, preferably 70% to 100%, whereby hydrogen in the oxide semiconductor layer can be prevented from being mixed.
Further, as the oxide semiconductor film, an oxide semiconductor of zinc oxide (ZnO) in the following state can be used, i.e., an amorphous state, a polycrystalline state, or a microcrystalline state in which an amorphous state and a polycrystalline state are mixed, one or more of impurity elements such As a first group element (for example, lithium (Li), sodium (Na), potassium (K), rubidium (Rb), and cesium (Cs)), a thirteenth group element (for example, boron (B), gallium (Ga), indium (In), and thallium (Tl)), a fourteenth group element (for example, carbon (C), silicon (Si), germanium (Ge), tin (Sn), and lead (Pb)), a fifteenth group element (for example, nitrogen (N), phosphorus (P), arsenic (As), antimony (Sb), and bismuth (Bi)), or a seventeenth group element (for example, fluorine (F), chlorine (Cl), bromine (Br), and iodine (I)) In the periodic table are added to the zinc oxide. Alternatively, an oxide semiconductor in an amorphous state, a polycrystalline state, or a microcrystalline state in which an amorphous state and a polycrystalline state are mixed, in which zinc oxide to which any impurity element is not added, can be used.
As a specific example, magnesium zinc oxide (Mg) can be usedxZn(1-x)O), cadmium Zinc oxide (Cd)xZn(1-x)Oxide semiconductor such as O) cadmium oxide (CdO), or InGaO3 (ZnO)5Any of a representative In-Ga-Zn-O-based oxide semiconductor (a-IGZO), In-Sn-Zn-O-based oxide semiconductor, Ga-Sn-Zn-O-based oxide semiconductor, In-Zn-O-based oxide semiconductor, Sn-Zn-O-based oxide semiconductor, In-Sn-O-based oxide semiconductor, and Ga-Zn-O-based oxide semiconductor. Further, since the In-Ga-Zn-O-based oxide semiconductor is a material having a wide energy gap (Eg), an increase In off-current can be suppressed even when two gate electrodes are provided above and below the oxide semiconductor film, which is preferable.
Further, as the oxide semiconductor film, a film formed by using a film containing SiO may be usedxThe oxide semiconductor target of (a) and the oxide semiconductor film containing silicon oxide obtained by a sputtering method are typically obtained by using a sputtering target containing 0.1 wt% or more and 20 wt% or less of SiO2Preferably, the SiO is contained in an amount of 1 to 6 wt%2Forming an oxide semiconductor film containing SiO which inhibits crystallizationX(X > 0) and a thin film transistor having a channel formed at a positive threshold voltage as close to 0V as possible to the gate voltage of the thin film transistor can be realized.
The oxide semiconductor layer can be formed by a gas phase method such as a pulse laser deposition method (PLD method) or an electron beam deposition method. In view of reducing hydrogen, a sputtering method performed in an atmosphere containing only oxygen is preferably used. Generally, when the sputtering method is employed, film formation is performed in an atmosphere containing a rare gas such as Ar or Kr, but since the mass of these rare gas elements is larger than the mass of oxygen, there is a possibility that desorption of a hydrogen-containing gas such as moisture or hydrocarbon adhering to the inner wall of the film formation chamber or the tool during sputtering may be promoted.
By using only oxygen as the atmosphere during sputtering, it is possible to prevent the gas adhering to the inner wall of the film formation chamber or the tool from being released. However, in order to increase the film formation rate, oxygen and a rare gas may be mixed and used without affecting the release of the gas from the inner wall of the film formation chamber. Specifically, the sputtering is performed in an atmosphere in which the flow rate ratio of oxygen is set to 50% or more and 100% or less, preferably 70% or more and 100% or less.
One embodiment of the invention disclosed in this specification is a method for manufacturing a semiconductor device, including the steps of: forming a gate electrode over a substrate having an insulating surface; an oxide semiconductor layer formed over the first insulating film by a sputtering method in an atmosphere containing oxygen at a flow rate ratio of 50% to 100%, preferably 70% to 100%, without exposing the first insulating film to the atmosphere over the gate electrode, and a second insulating film formed over the oxide semiconductor layer; selectively etching the second insulating film to form a protective film at a position overlapping with the gate electrode; forming a conductive film over the oxide semiconductor layer and the protective film; and selectively etching the conductive film and the oxide semiconductor layer.
Another embodiment of the invention disclosed in this specification is a method for manufacturing a semiconductor device, including the steps of: forming a gate electrode over a substrate having an insulating surface; forming a first insulating film on the gate electrode; forming a conductive film over the first insulating film; forming a source electrode or a drain electrode by selectively etching the conductive film; a second insulating film formed over the oxide semiconductor layer and the oxide semiconductor layer by a sputtering method in an atmosphere containing oxygen at a flow rate of 50% to 100%, preferably 70% to 100%, without being exposed to the air; selectively etching the second insulating film and the oxide semiconductor layer to form a protective film and an island-shaped semiconductor layer; and forming a third insulating film so as to cover the protective film and the island-shaped semiconductor layer.
The present invention solves at least one of the above problems.
In the above manufacturing process, one of the features is that a silicon oxynitride film is used as the first insulating film and the second insulating film. By adopting a structure in which the oxide semiconductor layer is sandwiched between the silicon oxynitride films, intrusion or diffusion of hydrogen, moisture, or the like into the oxide semiconductor layer can be prevented. For example, a silicon oxynitride film can be formed by a sputtering method using silicon, silicon oxide, or the like as a sputtering target in an atmosphere containing oxygen and nitrogen, or a silicon oxynitride film can be formed by a so-called CVD method such as high-density plasma CVD. When the film is formed by the CVD method, silane, dinitrogen monoxide, and nitrogen may be appropriately mixed and used as a reaction gas, for example.
The sputtering method includes the following methods: as the sputtering power source, an RF sputtering method using a high-frequency power source, a DC sputtering method, and a pulse DC sputtering method using a pulsed bias voltage are used. The RF sputtering method is mainly used for forming an insulating film, and the DC sputtering method is mainly used for forming a metal film.
Further, there is also a multi-sputtering apparatus in which a plurality of targets of different materials can be provided. The multi-sputtering apparatus can form different material films by stacking in the same processing chamber, and can form a film by discharging a plurality of materials simultaneously in the same processing chamber.
In addition, there are also sputtering apparatuses using the magnetron sputtering method and sputtering apparatuses using the ECR sputtering method: in a sputtering apparatus using a magnetron sputtering method, a magnet mechanism is provided inside a processing chamber; in a sputtering apparatus using the ECR sputtering method, plasma generated by using a microwave is used without using glow discharge.
Although an insulating film such as a silicon oxide film or a silicon nitride film may be used as the first insulating film or the second insulating film, by using a silicon oxynitride film having a nitrogen content of 3 at% or more and 30 at% or less, intrusion or diffusion of hydrogen, moisture, or the like into the oxide semiconductor layer can be prevented. The insulating film is preferably formed under such a condition that no hysteresis or charge occurs in the thin film transistor.
In addition, In the deposition of an oxide semiconductor by a sputtering method, an oxide semiconductor target containing at least In, Ga, and Zn is used, and it is necessary to reduce the hydrogen concentration In the target as much as possible. SIMS analysis revealed that the target of a general oxide semiconductor contained 1020atoms/cm3Above and 1021atoms/cm3The following hydrogen, but 10 is preferred19atoms/cm3The following.
In general, a target is formed by bonding a target material to a metal plate called a backing plate. For example, at the same ratio (In)2O3∶Ga2O3ZnO is 1: 1[ mol ratio]) An oxide semiconductor target is produced by mixing oxides including In (indium), Ga (gallium), and Zn (zinc) and sintering the mixture at a high temperature of 800 ℃ or higher. By sintering under an inert gas (nitrogen or a rare gas), hydrogen, moisture, hydrocarbon, or the like mixed into the target material can be prevented. The sintering may be performed in a vacuum or a high-pressure atmosphere, or may be performed while applying a mechanical pressure.
The target material may be amorphous or crystalline, and the target material may contain 0.1 wt% to 20 wt% of SiO as described above2Preferably, the SiO is contained in an amount of 1 to 6 wt%2. In the present specification, the target material may be referred to as a target unless otherwise specified.
In general, since the backing plate is used for cooling the target and also as a sputtering electrode, copper having excellent thermal and electrical conductivity is mainly used. By forming a cooling passage inside or on the back surface of the backing plate and circulating water, grease, or the like used as a coolant through the cooling passage, the cooling efficiency of the target can be improved. However, since the vaporization temperature of water is 100 ℃, when the target is maintained at 100 ℃ or higher, grease or the like may be used instead of water.
For example, the target material and the backing plate may be bonded by electron beam melting. Electron beam welding refers to a method of: by accelerating and condensing electrons generated in a vacuum atmosphere and irradiating the electrons to an object, it is possible to melt and weld only a desired portion without damaging material properties other than the welded portion. Since the shape of the welded portion and the depth of welding can be controlled and welding is performed in vacuum, adhesion of hydrogen, moisture, hydrocarbon, or the like to the target can be prevented.
When the manufactured target is conveyed, the conveyance is performed in a state where the target is kept in a vacuum atmosphere or an inert atmosphere (nitrogen or rare gas atmosphere). By this step, adhesion of hydrogen, moisture, hydrocarbon, or the like to the target can be prevented.
When the target is mounted in the sputtering apparatus in an inert gas atmosphere (nitrogen or rare gas atmosphere) without exposure to the atmosphere, adhesion of hydrogen, moisture, hydrocarbon, or the like to the target can also be prevented.
After the target is mounted on the sputtering apparatus, a dehydrogenation treatment may be performed to remove hydrogen remaining on the surface of the target or inside the target. As the dehydrogenation treatment, there are a method of heating the film formation treatment chamber to 200 ℃ or more and 600 ℃ or less under reduced pressure, a method of repeating introduction and exhaust of nitrogen or an inert gas in a heated state, and the like. As the target coolant in this case, grease or the like may be used without using water. Although a certain effect can be obtained even when the introduction and exhaust of nitrogen are repeated without heating, it is more preferable to perform the above-described step in a heated state. Further, oxygen, an inert gas, or both oxygen and an inert gas may be introduced into the film formation processing chamber, and a plasma of the inert gas or oxygen may be generated using a high frequency wave or a microwave. Although a certain effect can be obtained even in a non-heated state, it is more preferable to perform the above-described step in a heated state.
As a vacuum pump used in a vacuum apparatus such as a sputtering apparatus, for example, a cryopump may be used. The cryopump is a pump that has a very low temperature surface in a vacuum chamber, condenses or adsorbs gas molecules in the vacuum chamber onto the surface, captures the gas molecules, and exhausts the gas molecules. The cryopump has a high hydrogen or water discharge capacity.
In particular, after hydrogen, moisture, and hydrocarbon in the atmosphere are sufficiently reduced by the heating and other methods, the first insulating film, the oxide semiconductor, and the second insulating film are formed.
As a gas used in the production of a thin film transistor, a high-purity gas having a concentration of hydrogen, moisture, hydrocarbon, or the like as reduced as possible is preferably used. By providing a purification apparatus between the gas supply source and each apparatus, the gas purity can be further improved. The gas purity may be 99.9999% or more. In addition, in order to prevent the gas from being mixed in from the gas through the inner wall of the pipe, the inner surface is mirror-polished and made of Cr2O3Or Al2O3The passive gas is passed through the tube. As a joint (joint) or a valve passing through the pipe, an all-metal valve in which resin is not used in a sealant portion may be used.
Note that, in this specification, the continuous film formation refers to a state in which: in a series of steps from the first film formation step to the second film formation step, the atmosphere in which the substrate to be processed is placed is controlled to be vacuum or an inert gas atmosphere (nitrogen atmosphere or rare gas atmosphere) without being in contact with a contaminated atmosphere such as the atmosphere. By performing the continuous film formation, the film formation can be performed while preventing hydrogen, moisture, hydrocarbon, or the like from being attached again to the cleaned target substrate.
Further, the conductive film functions as a source electrode or a drain electrode. The conductive film is preferably formed using a single layer or a stacked layer of aluminum or an aluminum alloy to which an element for improving heat resistance such as copper, silicon, titanium, neodymium, scandium, or molybdenum or an element for preventing hillock generation is added. Alternatively, a single layer or a laminate of aluminum or an aluminum alloy, and one or both of the lower side and the upper side may be laminated with a high-melting-point metal layer such as titanium, molybdenum, or tungsten. In particular, titanium is given as a material having excellent interface characteristics with the oxide semiconductor layer. In particular, when a stack of a titanium film, an aluminum film, and a titanium film is used as the conductive film, resistance is low, and hillocks due to the aluminum film are less likely to be generated by sandwiching upper and lower surfaces by the titanium film, so that the stack is suitable for a source electrode or a drain electrode.
Further, a structure in which a silicon nitride film or a silicon oxide film is further provided between the gate electrode and the first insulating film may be employed. That is, two or more layers of gate insulating films may be used, a silicon oxynitride film is preferably used as the first insulating film which is the uppermost layer in contact with the oxide semiconductor layer, and a silicon nitride film or a silicon oxide film may be used as the insulating film provided below the silicon oxynitride film. The silicon nitride film or the silicon oxide film is provided to serve as an etching stopper film for preventing the substrate surface from being etched in the manufacturing process of the TFT. The silicon nitride film or the silicon oxide film also has the following effects: it is possible to suppress the change of the electrical characteristics of the TFT due to the intrusion of mobile ions such as sodium into the semiconductor region from the glass substrate containing alkali metal such as sodium.
A structure in which a channel is formed using a positive threshold voltage at which the gate voltage of a thin film transistor using an oxide semiconductor film is as close to 0V as possible can be realized. In addition, unevenness of threshold values can be reduced, deterioration of electrical characteristics can be prevented, and shift of the TFT to the normally-on state side can be reduced, and more preferably, the shift can be eliminated.
Drawings
Fig. 1A to 1E are sectional views showing a manufacturing process of a thin film transistor according to an embodiment of the present invention;
fig. 2A to 2F are sectional views showing a manufacturing process of a thin film transistor according to an embodiment of the present invention;
fig. 3A to 3E are sectional views showing a manufacturing process of a thin film transistor according to an embodiment of the present invention;
fig. 4A to 4E are sectional views showing a manufacturing process of a thin film transistor according to an embodiment of the present invention;
fig. 5A and 5B are diagrams illustrating a block diagram of a semiconductor device;
fig. 6 is a diagram illustrating the structure of a signal line driver circuit;
fig. 7 is a timing chart illustrating the operation of the signal line driver circuit;
fig. 8 is a timing chart illustrating the operation of the signal line driver circuit;
fig. 9 is a diagram illustrating the structure of a shift register;
fig. 10 is a diagram illustrating a connection structure of the flip-flop;
fig. 11a1 to 11B are diagrams illustrating a semiconductor device according to one mode of the present invention;
fig. 12 is a diagram illustrating a semiconductor device according to one embodiment of the present invention;
fig. 13 is a diagram illustrating a semiconductor device according to one embodiment of the present invention;
fig. 14 is a diagram illustrating a pixel equivalent circuit of a semiconductor device according to one embodiment of the present invention;
fig. 15A to 15C are diagrams illustrating a semiconductor device according to one embodiment of the present invention;
fig. 16A and 16B are diagrams illustrating a semiconductor device according to one embodiment of the present invention;
fig. 17A and 17B are diagrams illustrating an example of a manner of use of electronic paper;
fig. 18 is an external view showing one mode of an electronic book reader;
fig. 19A and 19B are external views showing one mode of a television set and a digital photo frame;
fig. 20A and 20B are external views showing one mode of a gaming machine;
fig. 21A and 21B are external views showing one embodiment of a mobile phone;
FIGS. 22A and 22B are diagrams illustrating one mode of an electronic book reader;
FIG. 23 is a diagram illustrating one aspect of an electronic book reader;
fig. 24A to 24E are sectional views showing a manufacturing process of a thin film transistor according to an embodiment of the present invention;
fig. 25A to 25C are graphs showing Hall (Hall) effect measurement results of an oxide semiconductor;
fig. 26 is a graph showing XRD measurement results of the oxide semiconductor layer.
Detailed Description
Hereinafter, embodiments of the present invention will be described.
Embodiment mode 1
In this embodiment mode, a thin film transistor and a manufacturing process thereof will be described with reference to fig. 1A to 1E.
First, a gate electrode 101 is formed over a substrate 100 (see fig. 1A).
As the substrate 100, for example, an alkali-free glass substrate manufactured by a melting method or a float method such as barium borosilicate glass, aluminoborosilicate glass, or aluminosilicate glass, a ceramic substrate, or a plastic substrate having heat resistance that can withstand the processing temperature in this manufacturing process, or the like can be used. Further, a substrate in which an insulating film is provided on a surface of a metal substrate such as a stainless alloy can be used. As the size of the substrate 100, 320mm × 400mm, 370mm × 470mm, 550mm × 650mm, 600mm × 720mm, 680mm × 880mm, 730mm × 920mm, 1000mm × 1200mm, 1100mm × 1250mm, 1150mm × 1300mm, 1500mm × 1800mm, 1900mm × 2200mm, 2160mm × 2460mm, 2400mm × 2800mm, 2850mm × 3050mm, or the like can be used.
In addition, a base insulating film may be formed over the substrate 100 before the gate electrode 101 is formed. The base insulating film may be formed of a single layer or a stacked layer of a silicon oxide film, a silicon nitride film, a silicon oxynitride film, or a silicon nitride oxide film by a CVD method, a sputtering method, or the like. A small amount of a halogen element such as fluorine or chlorine may be added to the base insulating film to immobilize mobile ions such as sodium. Preferably, the concentration of the halogen element contained in the insulating film is such that a concentration peak value obtainable by analysis using SIMS (secondary ion mass spectrometry) is 1 × 1015cm-3Above and 1 × 1020cm-3Within the following ranges.
The gate electrode 101 is formed using a metal material such as titanium, molybdenum, chromium, tantalum, tungsten, or aluminum, or an alloy material thereof. The gate electrode 101 can be formed by forming a conductive film over the substrate 100 by a sputtering method or a vacuum evaporation method, forming a mask over the conductive film by a photolithography technique or an inkjet method, and etching the conductive film using the mask. Alternatively, the gate electrode 101 may be formed by discharging a conductive nanopaste of silver, gold, copper, or the like by an ink jet method and baking the discharged conductive nanopaste. As a barrier metal for improving the adhesion of the gate electrode 101 and preventing the gate electrode 101 from diffusing into the substrate or the base film, a nitride film of the above-described metal material may be provided between the substrate 100 and the gate electrode 101. The gate electrode 101 may have a single-layer structure or a stacked-layer structure, and for example, a structure in which a molybdenum film and an aluminum film are stacked on the substrate 100 side, a structure in which a molybdenum film and an alloy film of aluminum and neodymium are stacked, a structure in which a titanium film and an aluminum film are stacked, a structure in which a titanium film, an aluminum film, and a titanium film are stacked, or the like can be used.
Here, a stacked film of an aluminum film and a molybdenum film is formed by a sputtering method, and etching is selectively performed by a photolithography technique. At this time, the first photomask is used. Note that since a semiconductor film and a wiring are formed over the gate electrode 101, an end portion thereof is preferably tapered in order to prevent breakage of the semiconductor film and the wiring.
Next, the first insulating film 102, the semiconductor film 103, and the second insulating film 104 which are gate insulating films are formed continuously without being exposed to the air (see fig. 1B). By continuously forming the film without contacting the air, the productivity is high and the reliability of the thin film interface is stable. Further, each stacked layer interface can be formed without being contaminated by moisture, hydrogen carbide, and other contaminating impurity elements contained in the atmosphere, and hydrogen can be prevented from being taken into the semiconductor film.
The first insulating film 102 and the second insulating film 104 can be formed using a silicon oxide film, a silicon nitride film, a silicon oxynitride film, or a silicon nitride oxide film by a CVD method, a sputtering method, or the like. Here, as the first insulating film 102 and the second insulating film 104, a silicon oxynitride film containing 3 at% or more and 30 at% or less of nitrogen is formed by an RF sputtering method. By using a silicon oxynitride film having a nitrogen content of 3 at% or more and 30 at% or less, hydrogen, moisture, or the like which intrudes into or diffuses into the semiconductor film 103 can be prevented. The insulating film is preferably formed under such a condition that no hysteresis or charge occurs in the thin film transistor.
Further, the first insulating film 102 may be formed by stacking two or more layers. As the uppermost layer film in contact with the oxide semiconductor layer, a silicon oxynitride film is preferably used. As the insulating film provided on the lower layer thereof, a silicon nitride film or a silicon oxide film can also be used. Such an underlying film also has an effect of preventing generation of hillocks when a material that is likely to generate hillocks is used as the material of the gate electrode 101.
Here, an oxide semiconductor layer (IGZO semiconductor layer) serving as the semiconductor layer 103 is formed by a DC magnetron sputtering method. In this specification, a semiconductor layer formed using an oxide semiconductor film containing In, Ga, and Zn is referred to as an "IGZO semiconductor layer". The IGZO semiconductor layer has a high degree of freedom in the composition ratio of the metal elements, and is used as the semiconductor layer in a wide range of mixing ratios. For example, indium oxide containing 10% by weight of zinc oxide, a material In which indium oxide, gallium oxide, and zinc oxide are mixed In equimolar amounts, or an oxide In which metal elements are present In a ratio of In, Ga, and Zn of 2.2: 1.0[ atom ratio ] In the film may be mentioned as an example. In order to reduce the variation in the electrical characteristics of the thin film transistor, the IGZO semiconductor layer is preferably in an amorphous state.
The semiconductor film 103 is formed in an atmosphere of only oxygen. Generally, when the sputtering method is used, film formation is often performed in an atmosphere containing a rare gas such as Ar or Kr, but since the mass of these rare gas elements is larger than the mass of oxygen, desorption of moisture or a hydrogen-containing gas such as hydrocarbon adhering to the inner wall of the film formation chamber or a tool during sputtering is promoted. However, in order to increase the film formation rate, oxygen and a rare gas may be mixed and used in a range that does not affect the desorption of gas from the inner wall of the film formation chamber. Specifically, the sputtering may be performed in an atmosphere in which the flow ratio of oxygen is 50% or more and 100% or less, preferably 70% or more and 100% or less. In the case of forming the semiconductor film 103, the substrate temperature is preferably set to room temperature (25 ℃) or higher and lower than 200 ℃.
Next, in order to pattern the semiconductor film 103, the second insulating film 104 is selectively etched to form an insulator 106, and the semiconductor film 103 is selectively etched to form an IGZO semiconductor layer 105. Etching was performed by a dry etching method using chlorine gas. The insulator 106 serves as a channel protective film. At this stage, in a region where the semiconductor film 103 is removed, the surface of the gate insulating film is exposed. A second photomask is used herein. Ashing treatment is performed under an oxygen atmosphere to remove the mask formed on the second insulating film 104 when patterning is performed. The cross-sectional structure of the substrate at this stage corresponds to the cross-sectional view of the substrate shown in fig. 1C (see fig. 1C). In order to remove moisture as much as possible in the manufacturing process of the thin film transistor, the subsequent washing with water may not be performed.
Then, the heat treatment is preferably performed at 200 ℃ to 600 ℃, typically 300 ℃ to 500 ℃. Here, heat treatment was performed at 350 ℃ for one hour in a furnace under a nitrogen atmosphere containing oxygen. By this heat treatment, rearrangement of the IGZO semiconductor layer 105 at an atomic level is performed. Since the strain that hinders the carrier migration is released by this heat treatment (including also photo annealing). The timing of performing the heat treatment is not particularly limited as long as it is after the semiconductor film 103 is formed. In this embodiment, it is preferable to cover the IGZO semiconductor layer 105 with the insulator 106 because the IGZO semiconductor layer 105 can be reduced in degradation after the heat treatment.
Next, a part of the insulator 106 is also removed and a contact hole (opening) 107 for connecting a source electrode 108 or a drain electrode 109 formed later and the IGZO semiconductor layer 105 is formed. In order to selectively perform etching to form a contact hole (opening) 107 exposing a part of the IGZO semiconductor layer 105, a photolithography technique is used. A third photomask is used herein. Etching was performed by a dry etching method using chlorine gas. For the etching for forming the contact hole (opening) 107 here, conditions that have an etching rate sufficiently different from that of the IGZO semiconductor layer 105 are used. Alternatively, only the insulator 106 may be selectively removed by laser irradiation to form the contact hole (opening) 107.
The contact hole (opening) 107 may be formed as small as possible to eliminate the influence of hydrogen, moisture, hydrocarbon, or the like on the IGZO semiconductor layer 105 during formation. However, if it is formed to be too small, the characteristics of the completed thin film transistor cannot be sufficiently obtained, so it is sufficient to form it to be small within a range that does not affect it.
Next, a metal multilayer film to be a source electrode or a drain electrode is formed. Here, an aluminum film was laminated on the titanium film by a DC magnetron sputtering method, and a titanium film was further laminated on the aluminum film. By providing a titanium target and an aluminum target in a sputtering chamber and laminating them in order using a shutter plate to perform continuous film formation, they can be continuously laminated in the same chamber. In this case, the layers may be stacked in an atmosphere of only a rare gas such as Ar or Kr. This is because: a structure in which the IGZO semiconductor layer 105 is sandwiched by the first insulating film 102 and the second insulating film 104 has been achieved, and particularly the channel formation region in the IGZO semiconductor layer 105 is not affected by hydrogen, moisture, hydrocarbon or the like caused by desorption of gas from the inner wall of the processing chamber.
Before the metal multilayer film is formed, the IGZO semiconductor layer in the contact hole (opening) 107 may be etched by reverse sputtering to about 10 nm. The reverse sputtering refers to a method of: a voltage is applied to the substrate side in an inert gas or oxygen atmosphere without applying a voltage to the target side to form plasma on the substrate side to etch the surface. By the reverse sputtering, a good interface state between the IGZO semiconductor layer and the metal multilayer film can be achieved, and the contact resistance can be reduced.
Further, an oxide semiconductor film to be a buffer layer may be formed between the IGZO semiconductor layer and the metal multilayer film. For example, titanium oxide, molybdenum oxide, zinc oxide, indium oxide, tungsten oxide, magnesium oxide, calcium oxide, tin oxide, or the like can be used. Further, an Al-Zn-O based non-single crystal film or an Al-Zn-O based non-single crystal film containing nitrogen, that is, an Al-Zn-O-N based non-single crystal film may be used. The aluminum contained in the Al-Zn-O-based oxide semiconductor or the Al-Zn-O-N-based oxide semiconductor is preferably 1 wt% or more and 10 wt% or less.
Note that the Al — Zn — O — N-based oxide semiconductor film shown here does not mean that the stoichiometric ratio is Al: Zn: O: N of 1: 1, and is described only for easy representation. The structural ratio of these elements can be appropriately adjusted according to the film formation conditions.
The buffer layer may contain an impurity imparting n-type or p-type conductivity. As the impurity element, indium, gallium, aluminum, zinc, tin, or the like can be used.
Since the buffer layer has a higher carrier concentration than the IGZO semiconductor layer and is excellent in conductivity, contact resistance can be reduced as compared with the case where the source or drain electrode and the IGZO semiconductor layer are directly joined.
The buffer layer may also be referred to as a source region or a drain region.
Next, the metal multilayer film is selectively etched to form the source electrode 108 or the drain electrode 109. Here, a fourth photomask is used. The conductive film having a three-layer structure in which a titanium film, an aluminum film, and a titanium film are stacked in this order can be etched by a dry etching method using chlorine gas. When the buffer layer is formed between the IGZO semiconductor layer and the metal multilayer film, the buffer layer may be etched at the same time as the etching of the metal multilayer film. The cross-sectional structure of the substrate at this stage corresponds to the cross-sectional view of the substrate shown in fig. 1E (see fig. 1E).
The channel formation region in this embodiment refers to a region from an end of a contact hole (opening) 107 for connecting the source electrode 108 to the IGZO semiconductor layer 105 to an end of the contact hole (opening) 107 for connecting the drain electrode 109 to the IGZO semiconductor layer 105 in a region where the gate electrode 101 of the IGZO semiconductor layer 105 and the IGZO semiconductor layer 105 overlap. L1 in fig. 1D corresponds to the channel length.
By sandwiching the channel formation region of the IGZO semiconductor layer 105 between silicon oxynitride films having a nitrogen content of 3 atomic% or more and 30 atomic% or less, hydrogen, moisture, or the like can be prevented from entering or diffusing into the channel formation region. The silicon oxynitride film is preferably formed under such a condition that hysteresis or charge is not generated in the thin film transistor.
Embodiment mode 2
In this embodiment mode, a thin film transistor and a manufacturing process thereof will be described with reference to fig. 2A to 2F. Repeated descriptions of the same portions as embodiment 1 or portions and steps having the same functions as those in embodiment 1 are omitted.
First, a gate electrode 201 is formed over a substrate 200. Here, a first photomask is used (see fig. 2A).
Next, a first insulating film 202, a first semiconductor film 203, and a second insulating film 204 which are gate insulating films are formed continuously without being exposed to the air (see fig. 2B). Here, a silicon oxynitride film having a nitrogen content of 3 at% or more and 30 at% or less is formed as the first insulating film 202 and the second insulating film 204 by an RF sputtering method, and Zn (zinc) is added as the first semiconductor film 203The oxide semiconductor (ZnO) contains 0.1-20 wt% of SiO2The oxide semiconductor layer is formed by the DC magnetron sputtering method of the oxide semiconductor target of (1). As described in embodiment 1, the oxide semiconductor layer is formed in an atmosphere containing only oxygen, but the oxide semiconductor layer may be formed in an atmosphere containing a rare gas in which the flow rate ratio of oxygen is 50% or more and 100% or less, preferably 70% or more and 100% or less. In addition, when the first semiconductor film 203 is formed, the substrate temperature is preferably set to room temperature (25 ℃) or higher and lower than 200 ℃.
Next, the second insulating film 204 is etched so that only a portion overlapping with the gate electrode and a portion overlapping with a position to be a channel formation region of the first semiconductor film 203 remains, thereby forming an insulator 206. The insulator 206 serves as a channel protective film. In order to selectively perform etching to form the insulator 206, a photolithography technique is used. Here, a second photomask is used. Here, etching for forming the insulator 206 is performed by a dry etching method, and conditions that have an etching rate sufficiently different from that of the first semiconductor film 203 are used (see fig. 2C). In an oxygen atmosphere, ashing treatment is performed to remove a mask formed on the second insulating film 204 when patterning is performed. In order to remove moisture as much as possible in the manufacturing process of the thin film transistor, the subsequent washing with water may not be performed.
In addition, when the insulator 206 is formed, a mask may be selectively formed at a position overlapping with the gate electrode by back exposure without using a photomask in a self-alignment manner. In particular, the first semiconductor film 203 is an oxide semiconductor film, and it has high light transmittance and is suitable for back exposure. However, in the case of back-surface exposure, the first insulating film 202 and the second insulating film 204 need to be made of materials having sufficient light transmittance.
Then, the heat treatment is preferably performed at 200 ℃ to 600 ℃, typically 300 ℃ to 500 ℃. Here, heat treatment was performed at 350 ℃ for one hour in a furnace under a nitrogen atmosphere containing oxygen. By this heat treatment, rearrangement of the first semiconductor film 203 at an atomic level is performed. Since the strain that hinders the carrier migration is released by this heat treatment (including photo annealing). The timing of performing the heat treatment is not particularly limited as long as it is after the first semiconductor film 203 is formed. In this embodiment mode, since the structure in which the first semiconductor film 203 is covered with the insulator 206 is employed, degradation of the first semiconductor film 203 after the heat treatment can be reduced, which is preferable.
Next, a second semiconductor film 212 which becomes a buffer layer and a metal multilayer film 211 which becomes a source electrode or a drain electrode are formed. Here, a titanium oxide film serving as the second semiconductor film 212 was formed by a DC magnetron sputtering method, a titanium film serving as the metal multilayer film 211 was stacked over the second semiconductor film 212, an aluminum film was stacked over the titanium film, and a titanium film was stacked over the aluminum film (see fig. 2D).
Since the second semiconductor film 212 which serves as a buffer layer has a higher carrier concentration than the oxide semiconductor layer and is excellent in conductivity, contact resistance can be reduced in the case where the buffer layer is provided, as compared with the case where the source or drain electrode and the semiconductor layer are directly bonded.
After the second semiconductor film 212 which is a buffer layer is formed, heat treatment is preferably performed at 200 ℃ to 600 ℃, typically 300 ℃ to 500 ℃. Here, heat treatment was performed at 350 ℃ for one hour in a furnace under a nitrogen atmosphere containing oxygen. By this heat treatment, rearrangement of the second semiconductor film 212 at an atomic level is performed. Since the strain that hinders the carrier migration is released by this heat treatment (including photo annealing).
Next, the stacked metal film is selectively etched to form a source electrode 208 or a drain electrode 209. Here, a third photomask is used. Etching was performed by a dry etching method. At this time, the source electrode 208, the drain electrode 209, the source-side buffer layer 213, the drain-side buffer layer 214, and the semiconductor layer 205 can be formed in the same etching step by etching under conditions that can etch all of the metal multilayer film 211, the second semiconductor film 212, and the first semiconductor film 203. The insulator 206 serves as a channel protective film and prevents the semiconductor layer 205 in the channel formation region from being etched (see fig. 2E).
The channel formation region in this embodiment mode is a region where the gate electrode 201, the semiconductor layer 205, and the insulator 206 in the semiconductor layer 205 overlap, and the width L2 of the insulator 206 corresponds to a channel length.
By forming silicon oxynitride films having a nitrogen content of 3 at% or more and 30 at% or less in the upper layer and the lower layer of the channel formation region of the semiconductor layer 205 and sandwiching the channel formation region between the silicon oxynitride films, hydrogen, moisture, or the like which intrudes into or diffuses into the channel formation region can be prevented.
The third insulating film 210 may be formed so as to cover the thin film transistor in order to prevent hydrogen, moisture, or the like from entering or diffusing from the side surface of the semiconductor layer. The third insulating film 210 can be formed using a silicon oxide film, a silicon nitride film, a silicon oxynitride film, or a silicon nitride oxide film. For example, a silicon oxynitride film having a nitrogen content of 3 at% or more and 30 at% or less may be formed by a sputtering method. By using a silicon oxynitride film having a nitrogen content of 3 to 30 atomic%, hydrogen, moisture, carbon hydride, or the like which intrudes into or diffuses into the thin film transistor can be prevented. The silicon oxynitride film is preferably formed under such a condition that hysteresis or charge is not generated in the thin film transistor.
Embodiment 3
In this embodiment mode, a thin film transistor and a manufacturing process thereof will be described with reference to fig. 3A to 3E. Repeated descriptions of the same portions as embodiment 1 or portions and steps having the same functions as those in embodiment 1 are omitted.
First, a gate electrode 301 is formed over a substrate 300. Here, a first photomask is used.
Next, a first insulating film 302 which becomes a gate insulating film and a metal multilayer film 311 which becomes a source electrode or a drain electrode are formed.
The first insulating film 302 is formed using a silicon oxide film, a silicon nitride film, a silicon oxynitride film, or a silicon nitride oxide film by a CVD method, a sputtering method, or the like. Here, as the first insulating film 302, a silicon oxynitride film having a nitrogen content of 3 at% or more and 30 at% or less is formed by an RF sputtering method.
As the metal multilayer film 311 serving as a source electrode or a drain electrode, an aluminum film was stacked over a titanium film by a DC magnetron sputtering method, and a titanium film was stacked over the aluminum film (see fig. 3A).
Next, the metal multilayer film is selectively etched to form a source electrode 308 or a drain electrode 309. Here, a second photomask is used (see fig. 3B).
Next, the semiconductor film 303 and the second insulating film 304 are formed continuously without being exposed to the atmosphere (see fig. 3C). An oxide semiconductor layer (ZnO — SiO) is used as the semiconductor film 303X(X > 0) a semiconductor layer) formed by a DC magnetron sputtering method using a target in which zinc oxide contains 10% by weight of silicon oxide. As described in embodiment 1, the oxide semiconductor layer is formed in an atmosphere containing only oxygen, but the oxide semiconductor layer may be formed in an atmosphere containing a rare gas in which the flow rate ratio of oxygen is 50% or more and 100% or less, preferably 70% or more and 100% or less. In the case of forming the semiconductor film 303, the substrate temperature is preferably set to room temperature (25 ℃) or higher and lower than 200 ℃.
Here, the result of evaluating the crystallinity of the oxide semiconductor layer (ZnO — SiO semiconductor layer) measured by XRD is shown. Measurements were made on three oxide semiconductor layers (ZnO — SiO semiconductor layers) formed with targets in which zinc oxide was made to contain 7.5 wt%, 10 wt%, 12.5 wt% of silicon oxide.
Fig. 26 shows XRD measurement results. The horizontal axis represents the rotation angle (2 θ) of the measurement sample and the signal detection section with respect to the incident X-ray, and the vertical axis represents the X-ray diffraction intensity. In the figure, a measurement result 601 of a silicon oxide content of 7.5 wt%, a measurement result 602 of a silicon oxide content of 10 wt%, and a measurement result 603 of a silicon oxide content of 12.5 wt% are shown.
From the measurement results of fig. 26, it can be seen that: the peak 604 showing crystallinity is detected when the content of silicon oxide is 7.5 wt%, but the peak showing crystallinity is not detected when the content of silicon oxide is 10 wt% or more, and is an amorphous silicon film. In addition, when ZnO-SiOXWhen the content of silicon oxide in the (X > 0) semiconductor layer is 10% by weight or more, the amorphous state can be maintained even when the heat treatment is performed at 700 ℃.
Before the semiconductor film 303 is formed, the surfaces of the first insulating film 302, the source electrode 308, and the drain electrode 309 may be etched by reverse sputtering to about 10 nm. By performing reverse sputtering, hydrogen, moisture, hydrocarbon, or the like adhering to the surfaces of the first insulating film 302, the source electrode 308, and the drain electrode 309 can be removed.
Next, in order to pattern the semiconductor film 303, the second insulating film 304 is selectively etched to form an insulator 306, and the semiconductor film 303 is selectively etched to form ZnO — SiOX(X > 0) a semiconductor layer 305. A third photomask is used herein. The mask formed on the second insulating film 304 when patterned is removed by ashing treatment under an oxygen atmosphere. The insulator 306 serves as a channel protective film. Etching was performed by a dry etching method. In order to remove as much moisture as possible in the manufacturing process of the thin film transistor, the subsequent washing with water may not be performed.
Then, the heat treatment is preferably performed at 200 ℃ to 600 ℃, typically 300 ℃ to 500 ℃. Here, heat treatment was performed at 350 ℃ for one hour in a furnace under a nitrogen atmosphere containing oxygen. By this heat treatment, rearrangement of the semiconductor layer 305 at an atomic level is performed. Since the strain that hinders the carrier migration is released by this heat treatment (including photo annealing). The timing of performing the heat treatment is not particularly limited as long as it is after the semiconductor film 303 is formed. In this embodiment mode, it is preferable to cover the semiconductor layer 305 with the insulator 306, since degradation of the semiconductor layer 305 after heat treatment can be reduced.
The channel formation region in this embodiment mode is ZnO-SiOX(X > 0) Gate electrode 301 and ZnO-SiO in semiconductor layer 305X(X > 0) a region where the semiconductor layer 305 overlaps and is sandwiched between the source electrode 308 and the drain electrode 309. The distance L3 between the source electrode 308 and the drain electrode 309 corresponds to the channel length.
By forming silicon oxynitride films with a nitrogen content of 3 at% or more and 30 at% or less on the upper layer and the lower layer of the channel formation region of the semiconductor layer 305 and sandwiching the channel formation region between the silicon oxynitride films, hydrogen, moisture, or the like that intrudes into or diffuses into the channel formation region can be prevented. The silicon oxynitride film is preferably formed under such a condition that hysteresis or charge is not generated in the thin film transistor.
In addition, to prevent from ZnO-SiOX(X > 0) the third insulating film 310 may be formed so as to cover the thin film transistor by hydrogen, moisture, or the like entering or diffusing from the side surface of the semiconductor layer. The third insulating film 310 is preferably formed under such a condition that hysteresis or charging does not occur in the thin film transistor. The third insulating film 310 is formed using a silicon oxide film, a silicon nitride film, a silicon oxynitride film, or a silicon nitride oxide film. For example, a silicon oxynitride film having a nitrogen content of 3 at% or more and 30 at% or less may be formed by an RF sputtering method. By using a silicon oxynitride film having a nitrogen content of 3 at% or more and 30 at% or less, hydrogen, moisture, or the like which enters or diffuses into the thin film transistor can be prevented.
Further, ZnO-SiO may be used as requiredX(X > 0) an oxide semiconductor film serving as a buffer layer is formed between the semiconductor layer and the metal laminated film.
Embodiment 4
In this embodiment mode, a thin film transistor and a manufacturing process thereof will be described with reference to fig. 4A to 4E. Repeated descriptions of the same portions as embodiment 1 or portions and steps having the same functions as those in embodiment 1 are omitted.
First, a gate electrode 401 is formed over a substrate 400. Here, a first photomask is used (see fig. 4A).
Next, the first insulating film 402, the first semiconductor film 403, and the second semiconductor film 412 which are gate insulating films are formed continuously without being exposed to the air (see fig. 4B). Here, as the first insulating film 402, a silicon oxynitride film having a nitrogen content of 3 at% or more and 30 at% or less is formed by an RF sputtering method, an IGZO semiconductor layer is formed by a DC magnetron sputtering method as the first semiconductor film 403, and an Al — Zn — O — N-based oxide semiconductor film is formed as the second semiconductor film 412. When the oxide semiconductor film is formed, the substrate temperature is preferably set to room temperature (25 ℃) or higher and lower than 200 ℃.
Note that the Al — Zn — O — N-based oxide semiconductor film shown here does not mean that the stoichiometric ratio is Al: Zn: O: N of 1: 1, and is described only for easy representation. The structural ratio of these elements can be appropriately adjusted according to the film formation conditions.
Next, the heat treatment is preferably performed at 200 ℃ or lower and 600 ℃ or lower, typically 300 ℃ or lower and 500 ℃ or lower. Here, heat treatment was performed at 350 ℃ for one hour in a furnace under a nitrogen atmosphere containing oxygen. By this heat treatment, the IGZO semiconductor layer and the Al — Zn — O — N based oxide semiconductor film are rearranged at the atomic level. Since the strain that hinders the carrier migration is released by this heat treatment (including photo annealing). The timing of performing the heat treatment is not particularly limited as long as it is after the first semiconductor film 403 and the second semiconductor film 412 are formed.
Next, in order to pattern the first semiconductor film 403, the second semiconductor film 412 is selectively etched, and the IGZO semiconductor layer 405 is formed by selectively etching the first semiconductor film 403. Etching was performed by a dry etching method using chlorine gas. The second semiconductor film 412 functions as a buffer layer. In this stage, in the region where the first semiconductor film 403 is removed, the surface of the gate insulating film is exposed. A second photomask is used herein. Ashing treatment is performed under an oxygen atmosphere to remove the mask formed over the second semiconductor film 412 when patterning is performed. The cross-sectional structure of the substrate at this stage corresponds to the cross-sectional view of the substrate shown in fig. 4C (see fig. 4C). In order to remove moisture as much as possible in the manufacturing process of the thin film transistor, the subsequent washing with water may not be performed.
Since the second semiconductor film 412 serving as a buffer layer has a higher carrier concentration than the IGZO semiconductor layer and is excellent in conductivity, contact resistance can be reduced in the case where the buffer layer is provided, as compared with the case where the source or drain electrode and the IGZO semiconductor layer are directly joined.
Next, a metal multilayer film to be a source electrode or a drain electrode is formed. Here, an aluminum film was laminated on the titanium film by a DC magnetron sputtering method, and a titanium film was further laminated on the aluminum film. By providing a titanium target and an aluminum target in a sputtering chamber and laminating them in order using a shutter plate to perform continuous film formation, they can be continuously laminated in the same chamber.
Next, the metal multilayer film is selectively etched to form a source electrode 408 or a drain electrode 409. A third photomask is used herein. Etching is performed by dry etching. At this time, the metal multilayer film and the second semiconductor film 412 may be etched under conditions that are sufficiently different from the etching rate of the IGZO semiconductor layer 405. Thus, the source buffer layer 413 and the drain buffer layer 414 can be formed by the same etching step (see fig. 4D).
Next, a third insulating film 410 is formed so as to cover the thin film transistor in order to prevent hydrogen, moisture, or the like from entering or diffusing from the outside. The third insulating film 410 is preferably formed under such a condition that hysteresis or charging is not generated in the thin film transistor. The third insulating film 410 can be formed using a silicon oxide film, a silicon nitride film, a silicon oxynitride film, or a silicon nitride oxide film. For example, a silicon oxynitride film having a nitrogen content of 3 at% or more and 30 at% or less may be formed by an RF sputtering method. By using a silicon oxynitride film having a nitrogen content of 3 at% or more and 30 at% or less, hydrogen, moisture, or the like which enters or diffuses into the thin film transistor can be prevented.
Before the third insulating film 410 is formed, the surfaces of the IGZO semiconductor layer 405, the source electrode 408, and the drain electrode 409 may be etched by reverse sputtering to about 10 nm. By performing reverse sputtering, hydrogen, moisture, hydrocarbon, or the like attached to the surfaces of the source electrode 408 and the drain electrode 409 is removed.
The channel formation region in this embodiment is a region in the IGZO semiconductor layer 405 where the gate electrode 401 and the IGZO semiconductor layer 405 overlap each other and are sandwiched between the source-side buffer layer 413 and the drain-side buffer layer 414. The distance L4 between the source buffer layer 413 and the drain buffer layer 414 corresponds to the channel length (see fig. 4E).
By adopting a structure in which silicon oxynitride films having a nitrogen content of 3 at% or more and 30 at% or less are formed on the upper layer and the lower layer of the channel formation region of the IGZO semiconductor layer 405 and the channel formation region is sandwiched by the silicon oxynitride films, hydrogen, moisture, or the like which intrudes into or diffuses into the channel formation region can be prevented.
Embodiment 5
In this embodiment mode, a thin film transistor and a manufacturing process thereof will be described with reference to fig. 24A to 24E. Repeated descriptions of the same portions or portions having the same functions as those in embodiment 1 and steps will be omitted.
First, a gate electrode 701 is formed over a substrate 700. Here, a first photomask is used (see fig. 24A).
Next, a first insulating film 702 to be a gate insulating film and a semiconductor film 703 are formed continuously without being exposed to the atmosphere (see fig. 24B). Here, as the first insulating film 702, a silicon oxynitride film having a nitrogen content of 3 at% or more and 30 at% or less is formed by an RF sputtering method, and a semiconductor film 703 is formed by a sputtering method using a target In which silicon oxide is added to an oxide containing In (indium), Ga (gallium), and Zn (zinc). In the formation of the semiconductor film 703, the substrate temperature is preferably set to room temperature (25 ℃) or higher and lower than 200 ℃.
When the semiconductor film 703 is formed, physical properties of an oxide semiconductor film serving as the semiconductor film 703 are separately evaluated. Fig. 25A is a perspective view of a sample 510 for evaluating physical properties of an oxide semiconductor film. A sample 510 for evaluation of physical properties was manufactured and Hall (Hall) effect measurement was performed at room temperature to evaluate the carrier concentration and Hall mobility of the oxide semiconductor film. An insulating film 501 made of silicon oxynitride is formed over a substrate 500, an oxide semiconductor film 502 to be evaluated is formed thereover, and electrodes 503 to 506 are formed thereover to prepare a sample 510 for physical property evaluation. Three targets of 2 wt%, 5 wt%, and 10 wt% silicon oxide were added to the target material to form an oxide semiconductor film to be evaluated. A sample 510 for evaluation of physical properties was produced for each oxide semiconductor film, and hall effect measurement was performed at room temperature. Further, as a reference value, a sample in which an oxide semiconductor film was formed using a target to which silicon oxide was not added was prepared and subjected to the same evaluation.
Fig. 25B shows the carrier concentration of the oxide semiconductor film obtained from the hall effect measurement. In fig. 25B, the horizontal axis represents the silicon oxide addition amount, and the vertical axis represents the carrier concentration. Followed byThe amount of silicon oxide added was increased from 0% by weight to 2%, 5% by weight, and 10% by weight, and the carrier concentration was 1.6X 1019/cm3The reduction is 8.0 × 1017/cm3、2.7×1016/cm3、 2.0×1012/cm3。
Fig. 25C shows the hall mobility of the oxide semiconductor film derived from the hall effect measurement. In fig. 25C, the horizontal axis represents the amount of silicon oxide added, and the vertical axis represents the hall mobility. The respective carrier concentrations were from 15.1cm as the amount of silicon oxide added increased from 0% by weight to 2%, 5%, and 10% by weight2A reduction in/Vs of 8.1cm2/Vs、2.6cm2/Vs、1.8cm2/Vs。
From the results shown in fig. 25B and 25C, a tendency that the carrier concentration and the hall mobility decrease as the addition amount of silicon oxide increases was observed, but when the addition amount of silicon oxide was 5 wt% and 10 wt%, there was no great difference in the hall mobility. Thus, when silicon oxide is added to the IGZO semiconductor layer, silicon oxide may be added to the target in a range of more than 0 wt% and 10 wt% or less, and preferably in a range of more than 0 wt% and 6 wt% or less. That is, the carrier concentration is 2.0X 1012/cm3Above and below 1.6X 1019/cm3May be, but is preferably, lower than 2.0X 1016/cm3Above and 1.6X 1019/cm3Within the range of (1). Furthermore, the Hall mobility is at 1.8cm2More than Vs and less than 15.1cm2In the range of/Vs, it is also preferred that the thickness is less than 15.1cm2Vs and 2.4cm2In the range of/Vs or more.
After the semiconductor film 703 is formed, heat treatment is preferably performed at 200 ℃ to 600 ℃, typically 300 ℃ to 500 ℃. Here, heat treatment was performed at 350 ℃ for one hour in a furnace under a nitrogen atmosphere containing oxygen. By this heat treatment, rearrangement of the IGZO semiconductor layer at the atomic level is performed. Since the strain that hinders the carrier migration is released by this heat treatment (including photo annealing). The timing of performing the heat treatment is not particularly limited as long as it is after the semiconductor film 703 is formed.
Next, in order to pattern the semiconductor film 703, the semiconductor film 703 is selectively etched to form an IGZO semiconductor layer 705. Etching was performed by a dry etching method using chlorine gas. At this stage, in a region where the semiconductor film 703 is removed, the surface of the gate insulating film is exposed. A second photomask is used herein. Ashing treatment is performed under an oxygen atmosphere to remove a mask formed over the semiconductor film 703 when patterning is performed. The cross-sectional structure of the substrate at this stage corresponds to the cross-sectional view of the substrate shown in fig. 24C (see fig. 24C). In order to remove moisture as much as possible in the manufacturing process of the thin film transistor, the subsequent washing with water may not be performed.
Next, a metal multilayer film to be a source electrode or a drain electrode is formed. Here, an aluminum film was laminated on the titanium film by a DC magnetron sputtering method, and a titanium film was laminated on the aluminum film. The titanium target and the aluminum target are provided in the sputtering chamber and are sequentially stacked by using the shutter to perform continuous film formation, and they can be continuously stacked in the same chamber.
Next, the metal multilayer film is selectively etched to form a source electrode 708 or a drain electrode 709. A third photomask is used herein. Etching was performed by a dry etching method. At this time, the metal multilayer film may be etched under conditions that are sufficiently different in etching rate from the IGZO semiconductor layer 705. Thus, the source electrode 708 and the drain electrode 709 can be formed by the same etching step (see fig. 24D).
Next, a third insulating film 710 is formed so as to cover the thin film transistor in order to prevent hydrogen, moisture, or the like from entering or diffusing from the outside. The third insulating film 710 is preferably formed under a condition that hysteresis or charging is not generated in the thin film transistor. The third insulating film 710 is formed using a silicon oxide film, a silicon nitride film, a silicon oxynitride film, or a silicon nitride oxide film. For example, a silicon oxynitride film having a nitrogen content of 3 at% or more and 30 at% or less may be formed by an RF sputtering method. By using a silicon oxynitride film having a nitrogen content of 3 at% or more and 30 at% or less, hydrogen, moisture, or the like which enters or diffuses into the thin film transistor can be prevented.
Before the third insulating film 710 is formed, the surfaces of the IGZO semiconductor layer 705, the source electrode 708, and the drain electrode 709 may be etched by reverse sputtering to about 10 nm. By performing reverse sputtering, hydrogen, moisture, hydrocarbon, or the like attached to the surfaces of the source electrode 708 and the drain electrode 709 can be removed.
The channel formation region in this embodiment is a region in the IGZO semiconductor layer 705, in which the gate electrode 701 and the IGZO semiconductor layer 705 overlap each other and are sandwiched between the source electrode 708 and the drain electrode 709. A distance L5 between the source electrode 708 and the drain electrode 709 corresponds to a channel length (see fig. 24E).
By adopting a structure in which silicon oxynitride films having a nitrogen content of 3 at% or more and 30 at% or less are formed on the upper layer and the lower layer of the channel formation region of the IGZO semiconductor layer 705, and the channel formation region is sandwiched by the silicon oxynitride films, hydrogen, moisture, or the like which intrudes into or diffuses into the channel formation region can be prevented.
A thin film transistor using an IGZO semiconductor layer can be manufactured through the above-described steps.
As can be seen from fig. 25C and 26: by adding silicon oxide, an effect of promoting amorphization of the oxide semiconductor layer and reducing unevenness in characteristics in manufacturing a semiconductor device can be obtained. In addition, Ga contained in the IGZO semiconductor layer has an effect of promoting amorphization, but expensive Ga contained in the IGZO semiconductor layer can be reduced or deleted by using silicon oxide instead of Ga to improve productivity.
Embodiment 6
In this embodiment, an example in which at least a part of a driver circuit and a thin film transistor provided in a pixel portion are formed over the same substrate in a display device which is one embodiment of a semiconductor device will be described below.
The thin film transistor provided in the pixel portion is formed according to embodiments 1 to 5. In addition, since the thin film transistors described in embodiments 1 to 5 are n-channel TFTs, part of the driver circuit which can be formed of an n-channel TFT among the driver circuits is formed over the same substrate as the thin film transistor of the pixel portion.
Fig. 5A shows an example of a block diagram of an active matrix type liquid crystal display device which is one embodiment of a semiconductor device. The display device illustrated in fig. 5A includes, over a substrate 5300: a pixel portion 5301 having a plurality of pixels each including a display element; a scan line driver circuit 5302 which selects each pixel; and a signal line driver circuit 5303 which controls input of a video signal to the selected pixel.
The pixel portion 5301 is connected to the signal line driver circuit 5303 via a plurality of signal lines S1 to Sm (not shown) arranged to extend in the column direction from the signal line driver circuit 5303, is connected to the scan line driver circuit 5302 via a plurality of scan lines G1 to Gn (not shown) arranged to extend in the row direction from the scan line driver circuit 5302, and has a plurality of pixels (not shown) arranged in a matrix corresponding to the signal lines S1 to Sm and the scan lines G1 to Gn. Each pixel is connected to a signal line Sj (any one of the signal lines S1 to Sm) and a scan line Gi (any one of the scan lines G1 to Gn).
Note that the thin film transistors described in embodiments 1 to 5 are n-channel TFTs, and a signal line driver circuit including n-channel TFTs will be described with reference to fig. 6.
The signal line driver circuit shown in fig. 6 includes: a driver IC 5601; switch groups 5602_1 to 5602_ M; a first wiring 5611; a second wiring 5612; a third wiring 5613; and wirings 5621_1 to 5621_ M. The switch groups 5602_1 to 5602_ M each include a first thin film transistor 5603a, a second thin film transistor 5603b, and a third thin film transistor 5603 c.
The driver IC5601 is connected to the first wiring 5611, the second wiring 5612, the third wiring 5613, and the wirings 5621_1 to 5621_ M. Further, the switch groups 5602_1 to 5602_ M are connected to the first wiring 5611, the second wiring 5612, and the third wiring 5613, respectively, and the wirings 5621_1 to 5621_ M corresponding to the switch groups 5602_1 to 5602_ M, respectively. The wirings 5621_1 to 5621_ M are connected to three signal lines (the signal line Sm-2, the signal line Sm-1, and the signal line Sm (M — 3M)) via the first thin film transistor 5603a, the second thin film transistor 5603b, and the third thin film transistor 5603c, respectively. For example, a wiring 5621_ J (any of the wirings 5621_1 to 5621_ M) in the J-th column is connected to the signal line Sj-2, the signal line Sj-1, and the signal line Sj (J is 3J) through the first thin film transistor 5603a, the second thin film transistor 5603b, and the third thin film transistor 5603c included in the switch group 5602_ J.
Further, signals are input to the first wiring 5611, the second wiring 5612, and the third wiring 5613, respectively.
Further, the driver IC5601 is preferably formed using a single crystal semiconductor. Further, the switch groups 5602_1 to 5602_ M are preferably formed over the same substrate as the pixel portion. Therefore, it is preferable that the driver IC5601 and the switch groups 5602_1 to 5602_ M are formed over different substrates and the driver IC5601 and the switch groups 5602_1 to 5602_ M are connected by an FPC or the like. Alternatively, the driver IC5601 may be formed by bonding a single crystal semiconductor layer over the same substrate as the pixel portion.
Next, the operation of the signal line driver circuit shown in fig. 6 will be described with reference to the timing chart of fig. 7. In addition, the timing chart of fig. 7 shows the timing chart when the i-th row scanning line Gi is selected. Further, the selection period of the ith scanning line Gi is divided into a first sub-selection period T1, a second sub-selection period T2, and a third sub-selection period T3. The signal line driver circuit in fig. 6 operates similarly to that in fig. 7 even when a scanning line in another row is selected.
The timing chart of fig. 7 shows a case where the J-th column wiring 5621_ J is connected to the signal line Sj-2, the signal line Sj-1, and the signal line Sj through the first thin film transistor 5603a, the second thin film transistor 5603b, and the third thin film transistor 5603 c.
The timing chart of fig. 7 shows timing when the i-th row scanning line Gi is selected, timing 5703a of on/off of the first thin film transistor 5603a, timing 5703b of on/off of the second thin film transistor 5603b, timing 5703c of on/off of the third thin film transistor 5603c, and a signal 5721_ J input to the J-th column wiring 5621_ J.
In the first sub-selection period T1, the second sub-selection period T2, and the third sub-selection period T3, different video signals are input to the wirings 5621_1 to 5621_ M. For example, a video signal input to the wiring 5621_ J in the first sub-selection period T1 is input to the signal line Sj-2, a video signal input to the wiring 5621_ J in the second sub-selection period T2 is input to the signal line Sj-1, and a video signal input to the wiring 5621_ J in the third sub-selection period T3 is input to the signal line Sj. The video signals input to the wiring 5621_ J in the first sub-selection period T1, the second sub-selection period T2, and the third sub-selection period T3 are Data _ J-2, Data _ J-1, and Data _ J, respectively.
As shown in fig. 7, in the first sub-selection period T1, the first thin film transistor 5603a is turned on, and the second thin film transistor 5603b and the third thin film transistor 5603c are turned off. At this time, Data _ J-2 input to the wiring 5621_ J is input to the signal line Sj-2 through the first thin film transistor 5603 a. In the second sub-selection period T2, the second thin film transistor 5603b is turned on, and the first thin film transistor 5603a and the third thin film transistor 5603c are turned off. At this time, Data _ J-1 input to the wiring 5621_ J is input to the signal line Sj-1 through the second thin film transistor 5603 b. In the third sub-selection period T3, the third thin film transistor 5603c is turned on, and the first thin film transistor 5603a and the second thin film transistor 5603b are turned off. At this time, Data _ J input to the wiring 5621_ J is input to the signal line Sj through the third thin film transistor 5603 c.
In this manner, the signal line driver circuit in fig. 6 can input video signals from one wiring 5621 to three signal lines in one gate selection period by dividing the one gate selection period into three. Therefore, the signal line driver circuit in fig. 6 can set the number of connections between the substrate over which the driver IC5601 is formed and the substrate over which the pixel portion is formed to about 1/3 of the number of signal lines. By setting the number of connections to about 1/3, the signal line driver circuit in fig. 6 can improve reliability, yield, and the like.
As shown in fig. 6, the arrangement, number, driving method, and the like of the thin film transistors are not limited as long as one gate selection period is divided into a plurality of sub-selection periods, and video signals are input to a plurality of signal lines from any one of the wirings in each of the plurality of sub-selection periods.
For example, when video signals are input to three or more signal lines from one wiring in each of three or more sub-selection periods, a thin film transistor and a wiring for controlling the thin film transistor may be added. However, when one gate selection period is divided into four or more sub-selection periods, one sub-selection period becomes shorter. Therefore, it is preferable to divide one gate selection period into two or three sub-selection periods.
As another example, as shown in the timing chart of fig. 8, one selection period may be divided into a precharge period Tp, a first sub-selection period T1, a second sub-selection period T2, and a third sub-selection period T3. Further, a timing chart of fig. 8 shows a timing of selecting the i-th row scanning line Gi, a timing 5803a of turning on/off the first thin film transistor 5603a, a timing 5803b of turning on/off the second thin film transistor 5603b, a timing 5803c of turning on/off the third thin film transistor 5603c, and a signal 5821_ J input to the J-th column wiring 5621_ J. As shown in fig. 8, in the precharge period Tp, the first thin film transistor 5603a, the second thin film transistor 5603b, and the third thin film transistor 5603c are turned on. At this time, the precharge voltage Vp input to the wiring 5621_ J is input to the signal line Sj-2, the signal line Sj-1, and the signal line Sj through the first thin film transistor 5603a, the second thin film transistor 5603b, and the third thin film transistor 5603 c. In the first sub-selection period T1, the first thin film transistor 5603a is turned on, and the second thin film transistor 5603b and the third thin film transistor 5603c are turned off. At this time, Data _ J-2 input to the wiring 5621_ J is input to the signal line Sj-2 through the first thin film transistor 5603 a. In the second sub-selection period T2, the second thin film transistor 5603b is turned on, and the first thin film transistor 5603a and the third thin film transistor 5603c are turned off. At this time, Data _ J-1 input to the wiring 5621_ J is input to the signal line Sj-1 through the second thin film transistor 5603 b. In the third sub-selection period T3, the third thin film transistor 5603c is turned on, and the first thin film transistor 5603a and the second thin film transistor 5603b are turned off. At this time, Data _ J input to the wiring 5621_ J is input to the signal line Sj through the third thin film transistor 5603 c.
Accordingly, since the signal line driver circuit of fig. 6 to which the timing chart of fig. 8 is applied can precharge the signal line by providing the precharge selection period before the sub-selection period, writing of a video signal to the pixel can be performed at high speed. In fig. 8, the same portions as those in fig. 7 are denoted by the same reference numerals, and detailed descriptions of the same portions or portions having the same functions are omitted.
In addition, a structure of the scanning line driver circuit is described. The scanning line driving circuit comprises a shift register and a buffer. Further, a level shifter (level shift) may be further included according to circumstances. In the scanning line driving circuit, a clock signal (CLK) and a start pulse Signal (SP) are input to the shift register, thereby generating a selection signal. The generated selection signal is buffer-amplified in the buffer and supplied to the corresponding scanning line. The gate electrodes of the transistors of the pixels for one line are connected to the scanning line. Further, since it is necessary to turn on the transistors of the pixels for one line all at once, a buffer capable of generating a large current is used.
One embodiment of a shift register used as part of a scan line driver circuit is described with reference to fig. 9 and 10.
Fig. 9 shows a circuit configuration of the shift register. The shift register shown in fig. 9 is constituted by a plurality of flip-flops, i.e., flip-flops 5701_1 to 5701_ n. In addition, a first clock signal, a second clock signal, a start pulse signal, and a reset signal are input to operate.
The connection relationship of the shift register of fig. 9 is explained. The flip-flop 5701_1 in the first stage is connected to a first wiring 5711, a second wiring 5712, a fourth wiring 5714, a fifth wiring 5715, a seventh wiring 5717_1, and a seventh wiring 5717_ 2. In addition, the flip-flop 5701_2 of the second stage is connected to a third wiring 5713, a fourth wiring 5714, a fifth wiring 5715, a seventh wiring 5717_1, a seventh wiring 5717_2, and a seventh wiring 5717_ 3.
Similarly, the i-th flip-flop 5701_ i (any of the flip-flops 5701_1 to 5701_ n) is connected to one of the second wiring 5712 and the third wiring 5713, the fourth wiring 5714, the fifth wiring 5715, the seventh wiring 5717_ i-1, the seventh wiring 5717_ i, and the seventh wiring 5717_ i + 1. Here, when i is an odd number, the flip-flop 5701_ i of the ith stage is connected to the second wiring 5712, and when i is an even number, the flip-flop 5701_ i of the ith stage is connected to the third wiring 5713.
In addition, the n-th flip-flop 5701_ n is connected to the fourth wiring 5714, the fifth wiring 5715, the seventh wiring 5717_ n-1, the seventh wiring 5717_ n, and the sixth wiring 5716, which are one of the second wiring 5712 and the third wiring 5713.
The first wiring 5711, the second wiring 5712, the third wiring 5713, and the sixth wiring 5716 may be referred to as a first signal line, a second signal line, a third signal line, and a fourth signal line, respectively. The fourth wiring 5714 and the fifth wiring 5715 may be referred to as a first power supply line and a second power supply line, respectively.
Next, the detailed structure of the flip-flop shown in fig. 9 will be described with reference to fig. 10. The flip-flop shown in fig. 10 includes a first thin film transistor 5571, a second thin film transistor 5572, a third thin film transistor 5573, a fourth thin film transistor 5574, a fifth thin film transistor 5575, a sixth thin film transistor 5576, a seventh thin film transistor 5577, and an eighth thin film transistor 5578. The first thin film transistor 5571, the second thin film transistor 5572, the third thin film transistor 5573, the fourth thin film transistor 5574, the fifth thin film transistor 5575, the sixth thin film transistor 5576, the seventh thin film transistor 5577, and the eighth thin film transistor 5578 are n-channel transistors, and are turned on when a gate-source voltage (Vgs) exceeds a threshold voltage (Vth).
In addition, the flip-flop illustrated in fig. 10 includes a first wiring 5501, a second wiring 5502, a third wiring 5503, a fourth wiring 5504, a fifth wiring 5505, and a sixth wiring 5506.
Here, an example in which all the thin film transistors are enhancement type n-channel type transistors is shown, but the present invention is not limited to this, and the driver circuit may be driven when, for example, depletion type n-channel type transistors are used.
Next, the connection structure of the flip-flop shown in fig. 10 is shown below.
A first electrode (one of a source electrode and a drain electrode) of the first thin film transistor 5571 is connected to the fourth wiring 5504, and a second electrode (the other of the source electrode and the drain electrode) of the first thin film transistor 5571 is connected to the third wiring 5503.
A first electrode of the second thin film transistor 5572 is connected to the sixth wiring 5506, and a second electrode of the second thin film transistor 5572 is connected to the third wiring 5503.
A first electrode of the third thin film transistor 5573 is connected to the fifth wiring 5505, a second electrode of the third thin film transistor 5573 is connected to the gate electrode of the second thin film transistor 5572, and a gate electrode of the third thin film transistor 5573 is connected to the fifth wiring 5505.
A first electrode of the fourth thin film transistor 5574 is connected to the sixth wiring 5506, a second electrode of the fourth thin film transistor 5574 is connected to the gate electrode of the second thin film transistor 5572, and a gate electrode of the fourth thin film transistor 5574 is connected to the gate electrode of the first thin film transistor 5571.
A first electrode of the fifth thin film transistor 5575 is connected to the fifth wiring 5505, a second electrode of the fifth thin film transistor 5575 is connected to the gate electrode of the first thin film transistor 5571, and a gate electrode of the fifth thin film transistor 5575 is connected to the first wiring 5501.
A first electrode of the sixth thin film transistor 5576 is connected to the sixth wiring 5506, a second electrode of the sixth thin film transistor 5576 is connected to the gate electrode of the first thin film transistor 5571, and a gate electrode of the sixth thin film transistor 5576 is connected to the gate electrode of the second thin film transistor 5572.
A first electrode of the seventh thin film transistor 5577 is connected to the sixth wiring 5506, a second electrode of the seventh thin film transistor 5577 is connected to the gate electrode of the first thin film transistor 5571, and a gate electrode of the seventh thin film transistor 5577 is connected to the second wiring 5502.
A first electrode of the eighth thin film transistor 5578 is connected to the sixth wiring 5506, a second electrode of the eighth thin film transistor 5578 is connected to the gate electrode of the second thin film transistor 5572, and a gate electrode of the eighth thin film transistor 5578 is connected to the first wiring 5501.
In addition, a connection portion between the gate electrode of the first thin film transistor 5571, the gate electrode of the fourth thin film transistor 5574, the second electrode of the fifth thin film transistor 5575, the second electrode of the sixth thin film transistor 5576, and the second electrode of the seventh thin film transistor 5577 is a node 5543. A connection portion between the gate electrode of the second thin film transistor 5572, the second electrode of the third thin film transistor 5573, the second electrode of the fourth thin film transistor 5574, the gate electrode of the sixth thin film transistor 5576, and the second electrode of the eighth thin film transistor 5578 is used as the node 5544.
The first wiring 5501, the second wiring 5502, the third wiring 5503, and the fourth wiring 5504 may also be referred to as a first signal line, a second signal line, a third signal line, and a fourth signal line, respectively. The fifth wiring 5505 and the sixth wiring 5506 may be referred to as a first power supply line and a second power supply line, respectively.
In the flip-flop 5701_ i of the i-th stage, the first wiring 5501 in fig. 10 and the seventh wiring 5717_ i-1 in fig. 9 are connected. Further, the second wiring 5502 in fig. 10 and the seventh wiring 5717 — i +1 in fig. 9 are connected. Further, the third wiring 5503 and the seventh wiring 5517 — i in fig. 10 are connected. Further, the sixth wiring 5506 and the fifth wiring 5715 in fig. 10 are connected.
When i is an odd number, the fourth wiring 5504 in fig. 10 is connected to the second wiring 5712 in fig. 9. When i is an even number, the fourth wiring 5504 in fig. 10 is connected to the third wiring 5713 in fig. 9. Further, the fifth wiring 5505 in fig. 10 is connected to the fourth wiring 5714 in fig. 9.
However, in the flip-flop 5701_1 of the first stage, the first wiring 5501 in fig. 10 is connected to the first wiring 5711 in fig. 9. Further, in the flip-flop 5701 — n of the nth stage, the second wiring 5502 in fig. 10 is connected to the sixth wiring 5716 in fig. 9.
Note that the signal line driver circuit and the scan line driver circuit can be manufactured using only the n-channel TFTs described in embodiment modes 1 to 5. Since the n-channel TFTs described in embodiments 1 to 5 have high transistor mobility, the driving frequency of the driver circuit can be increased. That is, the frequency characteristics (referred to as f characteristics) can be improved by using an oxide semiconductor layer for the n-channel TFTs described in embodiments 1 to 5. For example, since a scan line driver circuit using the n-channel TFT shown in embodiment modes 1 to 5 can be operated at high speed, black insertion can be achieved by increasing the frame frequency.
Further, by increasing the channel width of the transistor of the scanning line driver circuit, or by arranging a plurality of scanning line driver circuits, or the like, a higher frame frequency can be realized. In the case where a plurality of scanning line driver circuits are arranged, for example, by arranging a scanning line driver circuit for driving scanning lines of even-numbered rows on one side and a scanning line driver circuit for driving scanning lines of odd-numbered rows on the opposite side, an increase in frame frequency can be achieved. In addition, the plurality of scanning line driving circuits output signals to the same scanning line is advantageous for increasing the size of the display device.
In the case of manufacturing an active matrix light-emitting display device which is one embodiment of a semiconductor device, it is preferable to dispose a plurality of scanning line driver circuits since a plurality of thin film transistors are disposed in at least one pixel. Fig. 5B shows an example of a block diagram of an active matrix light-emitting display device.
The light-emitting display device shown in fig. 5B includes, over a substrate 5400: a pixel portion 5401 having a plurality of pixels each including a display element; a first scanning line driver circuit 5402 and a second scanning line driver circuit 5404 which select each pixel; and a signal line driver circuit 5403 which controls input of a video signal to the selected pixel.
In the case where a video signal inputted to a pixel of the light-emitting display device shown in fig. 5B is in a digital form, the pixel is in a light-emitting state or a non-light-emitting state by switching on and off of a transistor. Therefore, gray scale display can be performed by using an area gray scale method or a time gray scale method. The area gradation method is a driving method: gray scale display is performed by dividing one pixel into a plurality of sub-pixels and driving each sub-pixel in accordance with a video signal. Further, the time gray scale method is a driving method of: gray scale display is performed by controlling the period during which the pixel emits light.
Since the response speed of the light-emitting element is faster than that of a liquid crystal element or the like, the light-emitting element is suitable for a time gray scale method as compared with a liquid crystal element. Specifically, when the time gray scale method is used for display, one frame period is divided into a plurality of subframe periods. Then, in accordance with the video signal, the light-emitting element of the pixel is caused to emit light or not in each sub-frame period. By dividing one frame period into a plurality of subframe periods, the total length of a period during which a pixel actually emits light in one frame period can be controlled by a video signal, and a gray scale can be displayed.
In addition, in the light-emitting display device shown in fig. 5B, an example is shown in which when two switching TFTs are arranged in one pixel, a signal input to a first scan line of a gate wiring of one switching TFT is generated using the first scan line driver circuit 5402, and a signal input to a second scan line of a gate wiring of the other switching TFT is generated using the second scan line driver circuit 5404. However, one scan line driver circuit may be used in common to generate a signal input to the first scan line and a signal input to the second scan line. In addition, for example, depending on the number of switching TFTs included in one pixel, a plurality of scanning lines for controlling the operation of the switching element may be provided in each pixel. In this case, all signals input to the plurality of scan lines may be generated by one scan line driver circuit, or all signals input to the plurality of first scan lines may be generated by each of the plurality of scan line driver circuits.
In the light-emitting display device, a part of the driver circuit which can be formed of an n-channel TFT in the driver circuit may be formed over the same substrate as the thin film transistor in the pixel portion. Note that the signal line driver circuit and the scan line driver circuit can be manufactured using only the n-channel TFTs described in embodiments 1 to 5.
The driving circuit is not limited to the liquid crystal display device or the light-emitting display device, and may be used for an electronic paper in which electronic ink is driven by an element electrically connected to a switching element. Electronic paper is also called an electrophoretic display device (electrophoretic display) and has the following advantages: the display device can be formed to be thin and light, and has the same legibility as paper and lower power consumption than other display devices.
Embodiment 7
A semiconductor device having a display function (also referred to as a display device) can be manufactured by manufacturing the thin film transistor described in embodiment modes 1 to 5 and using the thin film transistor for a pixel portion and further for a driver circuit. In addition, a system-on-panel (system-on-panel) can be formed by integrally forming part or the whole of a driver circuit using the thin film transistor described in embodiment modes 1 to 5 over the same substrate as the pixel portion.
The display device includes a display element. As the display element, a liquid crystal element (also referred to as a liquid crystal display element) or a light-emitting element (also referred to as a light-emitting display element) can be used. The light-emitting element includes an element for controlling luminance by current or voltage, and specifically includes an inorganic EL (Electro Luminescence) element, an organic EL element, and the like. In addition, a display medium whose contrast changes by an electric action, such as electronic ink, may be used.
Further, the display device includes a panel in a state where a display element is sealed, and a module in a state where an IC or the like including a controller is mounted in the panel. In addition, in the manufacturing process of the display device, an element substrate corresponding to one embodiment before completion of a display element includes a unit for supplying current to the display element in each of a plurality of pixels. Specifically, the element substrate may be in a state where only a pixel electrode of the display element is formed, or may be in a state after a conductive film to be a pixel electrode is formed and before the conductive film is etched to form the pixel electrode. The element substrate can take various forms.
In addition, a display device in this specification refers to an image display device, a display device, or a light source (including an illumination device). In addition, the display device also includes a module mounted with a connector such as an FPC (Flexible Printed Circuit), a TAB (Tape Automated Bonding) Tape, or a TCP (Tape Carrier Package); or a module in which a printed wiring board is provided at an end of the TAB tape or the TCP; or a module in which an IC (integrated circuit) is directly mounted On a display element by a COG (Chip On Glass) method.
In this embodiment, an appearance and a cross section of a liquid crystal display panel corresponding to one embodiment of a semiconductor device will be described with reference to fig. 11a1, 11a2, and 11B. Fig. 11a1 and 11a2 are plan views of a panel in which highly reliable thin film transistors 4010 and 4011 each using an oxide semiconductor layer and liquid crystal elements 4013 which are formed over a first substrate 4001 and over the first substrate 4006 are sealed with a sealant 4005, respectively, which are formed over the first substrate 4001 and which use an oxide semiconductor layer. Fig. 11B corresponds to a sectional view along the line M-N of fig. 11a1 and 11a 2.
A sealant 4005 is provided so as to surround a pixel portion 4002 and a scan line driver circuit 4004 which are provided over a first substrate 4001. Further, a second substrate 4006 is provided over the pixel portion 4002 and the scan line driver circuit 4004. Therefore, the pixel portion 4002 and the scan line driver circuit 4004 are sealed together with a liquid crystal layer 4008 by the first substrate 4001, the sealant 4005, and the second substrate 4006. Further, a signal line driver circuit 4003 is mounted in a region different from a region surrounded by the sealant 4005 over the first substrate 4001, and the signal line driver circuit 4003 is formed over a separately prepared substrate using a single crystal semiconductor film or a polycrystalline semiconductor film.
In addition, a connection method of a driver circuit formed separately is not particularly limited, and a COG method, a wire bonding method, a TAB method, or the like can be employed. Fig. 11a1 is an example of mounting the signal line driver circuit 4003 by a COG method, and fig. 11a2 is an example of mounting the signal line driver circuit 4003 by a TAB method.
Further, the pixel portion 4002 and the scan line driver circuit 4004 which are provided over the first substrate 4001 include a plurality of thin film transistors. Fig. 11B illustrates a thin film transistor 4010 included in the pixel portion 4002 and a thin film transistor 4011 included in the scan line driver circuit 4004. Insulating layers 4020 and 4021 are provided over the thin film transistors 4010 and 4011.
As the thin film transistors 4010 and 4011, the thin film transistors described in embodiment modes 1 to 5 which use an oxide semiconductor layer and have high reliability can be used. In this embodiment mode, the thin film transistors 4010 and 4011 are n-channel thin film transistors.
In addition, the pixel electrode layer 4030 included in the liquid crystal element 4013 is electrically connected to the thin film transistor 4010. Further, the counter electrode layer 4031 of the liquid crystal element 4013 is formed over the second substrate 4006. A portion where the pixel electrode layer 4030, the counter electrode layer 4031, and the liquid crystal layer 4008 overlap corresponds to the liquid crystal element 4013. The pixel electrode layer 4030 and the counter electrode layer 4031 are provided with insulating layers 4032 and 4033 serving as alignment films, respectively, and sandwich the liquid crystal layer 4008 with the insulating layers 4032 and 4033 interposed therebetween.
As the first substrate 4001 and the second substrate 4006, glass, metal (typically, stainless steel), ceramic, or plastic can be used. As the plastic, FRP (fiber-Reinforced Plastics) sheets, PVF (polyvinyl fluoride) films, polyester films or acrylic resin films can be used. Further, a sheet having a structure in which an aluminum foil is sandwiched between PVF films or polyester films may also be used.
Further, reference numeral 4035 denotes a columnar spacer obtained by selectively etching an insulating film, and it is provided for controlling a distance (cell) gap between the pixel electrode layer 4030 and the counter electrode layer 4031. In addition, a spherical spacer may also be used. In addition, the counter electrode layer 4031 is electrically connected to a common potential line provided over the same substrate as the thin film transistor 4010. The counter electrode layer 4031 can be electrically connected to the common potential line by conductive particles provided between the pair of substrates using the common connection portion. In addition, conductive particles are contained in the sealant 4005.
In addition, a liquid crystal exhibiting a blue phase without using an alignment film may also be used. The blue phase is one of liquid crystal phases, and is a phase that appears immediately before a cholesteric phase changes to a homogeneous phase when the temperature of cholesteric liquid crystal is increased. Since the blue phase is present only in a narrow temperature range, a liquid crystal composition mixed with 5 wt% or more of a chiral agent is used for the liquid crystal layer 4008 in order to improve the temperature range. The liquid crystal composition comprising a liquid crystal exhibiting a blue phase and a chiral agent has a short response speed, i.e., 10 to 100. mu.s, and has a small viewing angle dependence since it has optical isotropy without requiring an alignment treatment.
In addition, this embodiment mode is an example of a transmissive liquid crystal display device. The present invention can also be applied to a reflective liquid crystal display device or a semi-transmissive liquid crystal display device.
In the liquid crystal display device of this embodiment, a polarizing plate is provided on the outer side (visible side) of the substrate, and a colored layer and an electrode layer for a display element are provided in this order on the inner side. The laminated structure of the polarizing plate and the colored layer is not limited to the structure of the present embodiment, and may be set as appropriate depending on the materials of the polarizing plate and the colored layer and the production process conditions. In addition, a light-shielding film serving as a black matrix may be provided.
In addition, in this embodiment mode, in order to reduce surface irregularities of the thin film transistor and improve reliability of the thin film transistor, a structure in which the thin film transistor obtained in embodiment modes 1 to 5 is covered with an insulating layer (the insulating layer 4020 and the insulating layer 4021) functioning as a protective film or a planarizing insulating film can be employed. In addition, the protective film is preferably a dense film for preventing the entry of contaminants such as organic substances, metal substances, and water vapor suspended in the air. The protective film may be formed by a sputtering method using a single layer or a stacked layer of a silicon oxide film, a silicon nitride film, a silicon oxynitride film, a silicon nitride oxide film, an aluminum nitride film, an aluminum oxynitride film, or an aluminum nitride oxide film. Although the protective film is formed by a sputtering method in this embodiment mode, the protective film is not limited to this and can be formed by various methods.
Here, the insulating layer 4020 having a stacked-layer structure is formed as a protective film. Here, a silicon oxide film is formed as a first layer of the insulating layer 4020 by a sputtering method. When a silicon oxide film is used as the protective film, there is an effect of preventing hillocks of the aluminum film used as the source electrode layer and the drain electrode layer.
In addition, an insulating layer is formed as a second layer of the protective film. Here, a silicon nitride film is formed as the second layer of the insulating layer 4020 by a sputtering method. When a silicon nitride film is used as the protective film, it is possible to suppress a phenomenon in which movable ions such as sodium intrude into the semiconductor region and the electrical characteristics of the TFT change.
Further, annealing (300 ℃ to 400 ℃) of the oxide semiconductor layer may be performed after the formation of the protective film.
As a planarizing insulating film, an insulating layer 4021 is formed. As the insulating layer 4021, an organic material having heat resistance such as polyimide, acrylic resin, benzocyclobutene, polyamide, or epoxy resin can be used. In addition, in addition to the above-described organic materials, a low dielectric constant material (low-k material), a siloxane-based resin, PSG (phosphosilicate glass), BPSG (borophosphosilicate glass), or the like can be used. Further, the insulating layer 4021 may be formed by stacking a plurality of insulating films formed of these materials.
The siloxane-based resin corresponds to a resin containing an Si — O — Si bond formed using a siloxane-based material as a starting material. The siloxane-based resin may also use an organic group (e.g., an alkyl group or an aryl group) or a fluorine group as a substituent. In addition, the organic group may also include a fluorine group.
The method for forming the insulating layer 4021 is not particularly limited, and can be formed by a sputtering method, an SOG method, a spin coating method, a dipping method, a spray method, a droplet discharge method (an ink jet method, screen printing, offset printing, or the like), a doctor blade, a roll coater, a curtain coater, a blade coater, or the like, depending on the material thereof. In the case of forming the insulating layer 4021 using a material solution, the oxide semiconductor layer may be annealed (300 ℃ to 400 ℃) at the same time as the baking step. By performing both the baking step of the insulating layer 4021 and the annealing of the oxide semiconductor layer, a semiconductor device can be manufactured efficiently.
As the pixel electrode layer 4030 and the counter electrode layer 4031, a conductive material having a light-transmitting property, such as indium oxide containing tungsten oxide, indium zinc oxide containing tungsten oxide, indium oxide containing titanium oxide, indium tin oxide (hereinafter, referred to as ITO), indium zinc oxide, indium tin oxide to which silicon oxide is added, or the like can be used.
The pixel electrode layer 4030 and the counter electrode layer 4031 can be formed using a conductive composition containing a conductive polymer (also referred to as a conductive polymer). The pixel electrode formed using the conductive composition preferably has a sheet resistance of 10000 Ω/□ or less, and a light transmittance at a wavelength of 550nm of 70% or more. The resistivity of the conductive polymer contained in the conductive composition is preferably 0.1 Ω · cm or less.
As the conductive polymer, a so-called pi-electron conjugated conductive polymer can be used. For example, polyaniline or a derivative thereof, polypyrrole or a derivative thereof, polythiophene or a derivative thereof, a copolymer of two or more of the above materials, and the like can be given.
Further, various signals and potentials are supplied from an FPC4018 to the signal line driver circuit 4003, the scan line driver circuit 4004, and the pixel portion 4002 which are formed separately.
In this embodiment mode, a connection terminal electrode 4015 is formed using the same conductive film as a pixel electrode layer 4030 included in a liquid crystal element 4013, and a terminal electrode 4016 is formed using the same conductive film as source and drain electrode layers of thin film transistors 4010 and 4011.
The connection terminal electrode 4015 is electrically connected to a terminal provided in an FPC4018 through an anisotropic conductive film 4019.
Note that although an example in which the signal line driver circuit 4003 is separately formed and mounted over the first substrate 4001 is shown in fig. 11a1, 11a2, and 11B, this embodiment is not limited to this structure. The scanning line driver circuit may be separately formed and mounted, or only a part of the signal line driver circuit or a part of the scanning line driver circuit may be separately formed and mounted.
Fig. 12 shows an example of a liquid crystal display module which is used as a semiconductor device and which is formed using a TFT substrate 2600 manufactured using the TFTs described in embodiment modes 1 to 5.
Fig. 12 shows an example of a liquid crystal display module, in which a pixel portion 2603 including a TFT and the like, a display element 2604 including a liquid crystal layer, and a coloring layer 2605 are provided between a TFT substrate 2600 and a counter substrate 2601 which are fixed by a sealing material 2602 to form a display region. When a color display is performed, the coloring layers 2605 are required, and when the RGB system is adopted, coloring layers corresponding to red, green, and blue are provided for each pixel. A polarizing plate 2606, a polarizing plate 2607, and a diffusion sheet 2613 are arranged outside the TFT substrate 2600 and the counter substrate 2601. The light source includes a cold cathode tube 2610 and a reflective plate 2611, and a circuit board 2612 is connected to a wiring circuit portion 2608 of the TFT substrate 2600 by a flexible wiring board 2609 and incorporates an external circuit such as a control circuit and a power supply circuit. Further, the polarizing plate and the liquid crystal layer may be laminated with a phase difference plate interposed therebetween.
The Liquid Crystal display module may employ a TN (Twisted Nematic) mode, an IPS (In-Plane-Switching) mode, an FFS (Fringe Field Switching) mode, an MVA (Multi-domain Vertical Alignment) mode, a PVA (Patterned Vertical Alignment) mode, an ASM (Axially Symmetric aligned Micro-cell) mode, an OCB (Optically self-Compensated bend) mode, an FLC (Ferroelectric Liquid Crystal) mode, an afli (antiferroelectric Liquid Crystal) mode, and the like.
Through the above steps, a highly reliable liquid crystal display panel can be manufactured as a semiconductor device.
Note that the structure described in this embodiment can be used in combination with the structures described in other embodiments as appropriate.
Embodiment 8
In this embodiment, an example of electronic paper is shown as one embodiment of a semiconductor device to which the thin film transistor described in embodiments 1 to 5 is applied.
In fig. 13, active matrix electronic paper is shown as an example of a semiconductor device. The thin film transistors described in embodiment modes 1 to 5 can be applied to the thin film transistor 581 used for a semiconductor device.
The electronic paper of fig. 13 is an example of a display device using a twist ball display method. The twist ball display mode is a method of: spherical particles having one hemispherical surface of black and the other hemispherical surface of white are arranged between a first electrode layer and a second electrode layer which are electrode layers for a display element, and a potential difference is generated between the first electrode layer and the second electrode layer to control the directions of the spherical particles, so that display is performed.
The thin film transistor 581 formed over a substrate 596 is a thin film transistor of a bottom gate structure, and is electrically connected by a source electrode layer or a drain electrode layer in contact with a first electrode layer 587 in an opening formed in an insulating layer 585. Spherical particles 589 are provided between the first electrode layer 587 and a second electrode layer 588 formed over the substrate 597, the spherical particles 589 each have a black region 590a and a white region 590b, a cavity 594 filled with a liquid is provided around the spherical particles 589, and a filler 595 such as a resin is filled around the spherical particles 589 (see fig. 13). In this embodiment mode, the first electrode layer 587 corresponds to a pixel electrode, and the second electrode layer 588 corresponds to a common electrode. The second electrode layer 588 is electrically connected to a common potential line provided over the same substrate as the thin film transistor 581. In one of the common connection portions described in embodiment modes 1 to 5, the second electrode layer 588 can be electrically connected to the common potential line through conductive particles provided between a pair of substrates.
In addition, an electrophoretic element may be used instead of the twist ball. Microcapsules having a diameter of about 10 to 200 μm, in which a transparent liquid, positively charged white microparticles and negatively charged black microparticles are enclosed, are used. When an electric field is applied from the first electrode layer and the second electrode layer to the microcapsule provided between the first electrode layer and the second electrode layer, the white microparticles and the black microparticles move to opposite directions, so that white or black can be displayed. A display element to which this principle is applied is an electrophoretic display element, and is generally called electronic paper. The electrophoretic display element has a higher reflectance than the liquid crystal display element, and thus does not require auxiliary lighting. In addition, the power consumption is low, and the display portion can be identified even in a dark place. Further, since the once-displayed image can be held without supplying power to the display unit, the displayed image can be held even if the semiconductor device having a display function (simply referred to as a display device or a semiconductor device including a display device) is separated from the radio wave emission source.
The electrophoretic display element is a display element utilizing a so-called dielectrophoretic effect. In this dielectrophoresis effect, a substance having a high dielectric constant moves to a high electric field region. The electrophoretic display element does not require a polarizing plate required for a liquid crystal display device, and thus can be reduced in thickness and weight as compared with the liquid crystal display device.
A solution in which the above microcapsules are dispersed in a solvent is called an electronic ink, and the electronic ink can be printed on the surface of glass, plastic, cloth, paper, or the like. In addition, color display can be performed by using a color filter or particles having a pigment.
Further, by appropriately providing a plurality of the above-described microcapsules on an active matrix substrate so that the microcapsules are sandwiched between two electrodes, an active matrix type display device is completed, and display can be performed when an electric field is applied to the microcapsules. For example, an active matrix substrate obtained using the thin film transistors in embodiment modes 1 to 5 can be used.
The fine particles in the microcapsules may be formed using one or a composite material of a conductive material, an insulating material, a semiconductor material, a magnetic material, a liquid crystal material, a ferroelectric material, an electroluminescent material, an electrochromic material, and a magnetophoretic material.
Note that this embodiment can be implemented in combination with the structures described in other embodiments as appropriate.
Embodiment 9
In this embodiment, an example of a light-emitting display device is shown as one embodiment of a semiconductor device to which the thin film transistor described in embodiment modes 1 to 5 is applied. Here, a display device using an electroluminescent light-emitting element is shown as a display element included in the display device. A light-emitting element utilizing electroluminescence is generally referred to as an organic EL element, and a light-emitting material thereof is generally referred to as an inorganic EL element, depending on whether the light-emitting material is an organic compound or an inorganic compound.
In an organic EL element, when a voltage is applied to a light-emitting element, electrons and holes are injected from a pair of electrodes into a layer containing a light-emitting organic compound, respectively, and a current is generated. Then, as these carriers (electrons and holes) are recombined, the light-emitting organic compound reaches an excited state, and when the excited state returns to a ground state, light emission is obtained. According to this mechanism, the light-emitting element is referred to as a current excitation type light-emitting element.
Inorganic EL elements are classified into dispersion-type inorganic EL elements and thin-film-type inorganic EL elements according to the element structure. The dispersion-type inorganic EL element includes a light-emitting layer in which particles of a light-emitting material are dispersed in a binder, and its light-emitting mechanism is donor-acceptor recombination type light emission utilizing a donor level and an acceptor level. The thin film inorganic EL element has a structure in which a light-emitting layer is sandwiched between dielectric layers and the light-emitting layer is also sandwiched between electrodes, and its light-emitting mechanism is localized light emission utilizing inner layer electron transition of metal ions. Here, the description will be made using an organic EL element as a light-emitting element.
Fig. 14 shows an example of a pixel structure which can use digital time gray scale driving as an example of a semiconductor device to which the present invention is applied.
The structure of a pixel which can be driven using digital time gray scale and the operation of the pixel will be described. Here, an example of two n-channel transistors in which an oxide semiconductor layer is used for a channel formation region, which is described in embodiment modes 1 to 5, in one pixel is described.
The pixel 6400 includes a switching transistor 6401, a driving transistor 6402, a light-emitting element 6404, and a capacitor 6403. In the switching transistor 6401, a gate is connected to a scan line 6406, a first electrode (one of a source electrode and a drain electrode) is connected to a signal line 6405, and a second electrode (the other of the source electrode and the drain electrode) is connected to a gate of the driving transistor 6402. In the driving transistor 6402, a gate is connected to a power supply line 6407 through a capacitor 6403, a first electrode is connected to the power supply line 6407, and a second electrode is connected to a first electrode (a pixel electrode) of the light-emitting element 6404. The second electrode of the light-emitting element 6404 corresponds to a common electrode 6408. The common electrode 6408 is electrically connected to a common potential line formed over the same substrate.
In addition, the second electrode (common electrode 6408) of the light-emitting element 6404 is set to a low power supply potential. The low power supply potential is a potential satisfying the low power supply potential < the high power supply potential with reference to the high power supply potential set in the power supply line 6407, and can be set to, for example, GND or 0V as the low power supply potential. The potential difference between the high power supply potential and the low power supply potential is applied to the light-emitting element 6404, and the potentials of the high power supply potential and the low power supply potential are set so that the potential difference is equal to or higher than the forward threshold voltage of the light-emitting element 6404, in order to allow the light-emitting element 6404 to emit light.
In addition, the gate capacitance of the driver transistor 6402 may be used instead of the capacitor 6403, and the capacitor 6403 may be omitted. As for the gate capacitance of the driver transistor 6402, capacitance may be formed between the channel formation region and the gate electrode.
Here, in the case of the voltage input voltage driving method, a video signal which can sufficiently turn on or off the driving transistor 6402 is input to the gate of the driving transistor 6402. That is, the driver transistor 6402 operates in a linear region. Since the driver transistor 6402 operates in a linear region, a voltage higher than the voltage of the power supply line 6407 is applied to the gate of the driver transistor 6402. Further, a voltage equal to or higher than (power line voltage + Vth of the driving transistor 6402) is applied to the signal line 6405.
In addition, when analog gray scale driving is performed instead of digital time gray scale driving, the same pixel configuration as that of fig. 14 can be used by making the input of signals different.
In the case of analog grayscale driving, a voltage equal to or higher than Vth of the driving transistor 6402 plus a forward voltage of the light-emitting element 6404 is applied to the gate of the driving transistor 6402. The forward voltage of the light-emitting element 6404 is a voltage at which a desired luminance is set, and includes at least a forward threshold voltage. Further, by inputting a video signal which operates the driving transistor 6402 in a saturation region, a current can be caused to flow through the light-emitting element 6404. In order to operate the driver transistor 6402 in the saturation region, the potential of the power supply line 6407 is set higher than the gate potential of the driver transistor 6402. By setting the video signal to an analog system, a current according to the video signal can be generated in the light-emitting element 6404, and analog grayscale driving can be performed.
In addition, the pixel structure shown in fig. 14 is not limited thereto. For example, a new switch, a resistance element, a capacitance element, a transistor, a logic circuit, or the like may be added to the pixel shown in fig. 14.
Next, the structure of the light-emitting element is described with reference to fig. 15A to 15C. Here, a cross-sectional structure of the pixel will be described by taking a case where the driving TFT is an n-type as an example. TFTs 7001, 7011, and 7021 used for driving TFTs of the semiconductor devices In fig. 15A, 15B, and 15C can be manufactured In the same manner as the thin film transistors described In embodiments 1 to 5, and these TFTs are highly reliable thin film transistors using an oxide semiconductor layer typified by an In-Ga-Zn-O-based non-single crystal film.
In order to extract light emission, at least one of the anode and the cathode of the light-emitting element may be transparent. Further, a thin film transistor and a light-emitting element are formed over a substrate, and there is a light-emitting element having a structure in which top emission in which light emission is extracted from a surface opposite to the substrate, bottom emission in which light emission is extracted from a surface on the substrate side, and double-sided emission in which light emission is extracted from the substrate side and a surface opposite to the substrate side. The pixel structure of the present invention can be applied to a light emitting element of any emission structure.
A light emitting element of a top emission structure is explained with reference to fig. 15A.
A cross-sectional view of a pixel when the TFT7001 which drives the TFT is an n-type and light emitted from the light-emitting element 7002 passes to the anode 7005 side is shown in fig. 15A. In fig. 15A, a cathode 7003 of a light-emitting element 7002 and a TFT7001 of a driving TFT are electrically connected, and a light-emitting layer 7004 and an anode 7005 are stacked in this order over the cathode 7003. As the cathode 7003, various materials can be used as long as they are conductive films which have a low work function and reflect light. For example, Ca, Al, MgAg, AILi and the like can be mentioned. Further, the light-emitting layer 7004 may be formed of a single layer or a stack of layers. In the case of a multilayer structure, an electron injection layer, an electron transport layer, a light-emitting layer, a hole transport layer, and a hole injection layer are sequentially stacked over the cathode 7003. In addition, all of these layers need not be provided. The anode 7005 is formed using a light-transmitting conductive material, and for example, a light-transmitting conductive film such as indium oxide containing tungsten oxide, indium zinc oxide containing tungsten oxide, indium oxide containing titanium oxide, indium tin oxide (hereinafter referred to as ITO), indium zinc oxide, or indium tin oxide to which silicon oxide is added may be used.
A region where the cathode 7003 and the anode 7005 sandwich the light-emitting layer 7004 corresponds to the light-emitting element 7002. In the pixel illustrated in fig. 15A, light emitted from the light-emitting element 7002 is emitted to the anode 7005 side as indicated by an arrow.
Next, a light-emitting element of a bottom emission structure is described with reference to fig. 15B. A cross-sectional view of a pixel in a case where the driving TFT7011 is of an n-type and light emitted from the light-emitting element 7012 is emitted to the cathode 7013 side is shown. In fig. 15B, a cathode 7013 of a light-emitting element 7012 is formed over a light-transmitting conductive film 7017 which is electrically connected to a driving TFT7011, and a light-emitting layer 7014 and an anode 7015 are stacked in this order over the cathode 7013. When the anode 7015 has light-transmitting properties, a shielding film 7016 for reflecting light or shielding light may be formed so as to cover the anode. As in the case of fig. 15A, as the cathode 7013, any of various materials can be used as long as it is a conductive material having a low work function. However, the thickness thereof is a degree of transmitting light (preferably about 5nm to 30 nm). For example, an aluminum film having a thickness of 20nm may be used as the cathode 7013. Further, as in fig. 15A, the light-emitting layer 7014 may be formed of a single layer or a stack of a plurality of layers. The anode 7015 does not need to transmit light, but can be formed using a conductive material having light-transmitting properties as in fig. 15A. The shielding film 7016 may be made of, for example, a metal that reflects light, but is not limited to a metal film. For example, a resin to which a black pigment is added may be used.
A region where the light-emitting layer 7014 is sandwiched between the cathode 7013 and the anode 7015 corresponds to the light-emitting element 7012. In the pixel shown in fig. 15B, light emitted from the light-emitting element 7012 is emitted to the cathode 7013 side as indicated by an arrow.
Next, a light-emitting element of a double-sided emission structure is described with reference to fig. 15C. In fig. 15C, a cathode 7023 of a light-emitting element 7022 is formed over a light-transmitting conductive film 7027 which is electrically connected to a driving TFT7021, and a light-emitting layer 7024 and an anode 7025 are stacked in this order over the cathode 7023. As in the case of fig. 15A, as the cathode 7023, any of various materials can be used as long as it is a conductive material having a low work function. However, the thickness thereof is a degree of transmitting light. For example, Al having a thickness of 20nm can be used as the cathode 7023. Further, as in fig. 15A, the light-emitting layer 7024 can be formed of a single layer or a stack of a plurality of layers. The anode 7025 can be formed using a light-transmitting conductive material which transmits light, as in fig. 15A.
The portion where the cathode 7023, the light-emitting layer 7024, and the anode 7025 overlap corresponds to the light-emitting element 7022. In the pixel shown in fig. 15C, light emitted from the light-emitting element 7022 is emitted to both the anode 7025 side and the cathode 7023 side as indicated by arrows.
In addition, although an organic EL element is described herein as a light emitting element, an inorganic EL element may be provided as a light emitting element.
In addition, although this embodiment mode shows an example in which a thin film transistor (driving TFT) for controlling driving of a light emitting element and the light emitting element are electrically connected, a structure in which a current control TFT is connected between the driving TFT and the light emitting element may be employed.
The semiconductor device according to this embodiment is not limited to the structure shown in fig. 15A to 15C, and various modifications can be made according to the technical idea of the present invention.
Next, the appearance and cross section of a light-emitting display panel (also referred to as a light-emitting panel) corresponding to one embodiment of a semiconductor device to which the thin film transistor described in embodiment modes 1 to 5 is applied will be described with reference to fig. 16A and 16B. Fig. 16A is a top view of a panel in which a thin film transistor and a light-emitting element formed over a first substrate are sealed with a sealing material between the panel and a second substrate. Fig. 16B corresponds to a sectional view taken along H-I of fig. 16A.
A sealing material 4505 is provided so as to surround the pixel portion 4502, the signal line driver circuits 4503a and 4503b, and the scan line driver circuits 4504a and 4504b provided over the first substrate 4501. In addition, a second substrate 4506 is provided over the pixel portion 4502, the signal line driver circuits 4503a and 4503b, and the scan line driver circuits 4504a and 4504 b. Therefore, the pixel portion 4502, the signal line driver circuits 4503a and 4503b, and the scan line driver circuits 4504a and 4504b are sealed together with the filler 4507 by the first substrate 4501, the sealant 4505, and the second substrate 4506. In order to prevent exposure to the atmosphere, it is preferable to seal (seal) the package with a protective film (a bonding film, an ultraviolet curable resin film, or the like) or a covering material having high airtightness and little outgassing.
In addition, the pixel portion 4502, the signal line driver circuits 4503a and 4503b, and the scan line driver circuits 4504a and 4504b provided over the first substrate 4501 include a plurality of thin film transistors. A thin film transistor 4510 included in the pixel portion 4502 and a thin film transistor 4509 included in the signal line driver circuit 4503a are illustrated in fig. 16B.
As the thin film transistors 4509 and 4510, the thin film transistors described In embodiment 1 to embodiment 5 can be applied, which use an oxide semiconductor layer typified by an In-Ga-Zn-O-based non-single crystal film and have high reliability. In this embodiment mode, the thin film transistors 4509 and 4510 are n-channel thin film transistors.
Note that 4511 corresponds to a light-emitting element, and a first electrode layer 4517 of a pixel electrode included in the light-emitting element 4511 is electrically connected to a source electrode layer or a drain electrode layer of the thin film transistor 4510. Note that the structure of the light-emitting element 4511 is a stacked-layer structure of the first electrode layer 4517, the electroluminescent layer 4512, and the second electrode layer 4513, but the structure is not limited to that described in this embodiment. The structure of the light-emitting element 4511 may be appropriately changed depending on the direction of light extracted from the light-emitting element 4511, or the like.
The partition 4520 is formed using an organic resin film, an inorganic insulating film, or organopolysiloxane. It is particularly preferable that the partition wall 4520 be formed under the following conditions: a photosensitive material is used, and an opening is formed in the first electrode layer 4517, and a sidewall of the opening is formed to be an inclined surface having a continuous curvature.
The electroluminescent layer 4512 may be formed of a single layer or a stack of layers.
A protective film may be formed over the second electrode layer 4513 and the partition 4520 so that oxygen, hydrogen, moisture, carbon dioxide, or the like does not enter the light-emitting element 4511. As the protective film, a silicon nitride film, a silicon oxynitride film, a DLC film, or the like can be formed.
Various signals and potentials to be supplied to the signal line driver circuits 4503a and 4503b, the scan line driver circuits 4504a and 4504b, or the pixel portion 4502 are supplied from FPCs 4518a and 4518 b.
In this embodiment, a connection terminal electrode 4515 is formed using the same conductive film as the first electrode layer 4517 included in the light-emitting element 4511, and a terminal electrode 4516 is formed using the same conductive film as the source and drain electrode layers included in the thin film transistors 4509 and 4510.
The connection terminal electrode 4515 is electrically connected to a terminal provided in an FPC4518a through an anisotropic conductive film 4519.
The second substrate 4506 which is a substrate in a direction in which light is extracted from the light-emitting element 4511 needs to have light-transmitting properties. In this case, a material having light transmittance such as a glass plate, a plastic plate, a polyester film, an acrylic film, or the like is used.
As the filler 4507, an ultraviolet curable resin or a thermosetting resin can be used in addition to an inert gas such as nitrogen or argon. PVC (polyvinyl chloride), acrylic resin, polyimide, epoxy resin, silicone resin, PVB (polyvinyl butyral), EVA (ethylene vinyl acetate), or the like can be used. This embodiment may use nitrogen as a filler.
If necessary, an optical film such as a polarizing plate, a circularly polarizing plate (including an elliptically polarizing plate), a retardation plate (λ/4 plate, λ/2 plate), a color filter, or the like may be appropriately provided on the emission surface of the light-emitting element. Further, an antireflection film may be provided on the polarizing plate or the circular polarizing plate. For example, an anti-glare treatment may be performed, which reduces glare by diffusing reflected light using surface irregularities.
The signal line driver circuits 4503a and 4503b and the scan line driver circuits 4504a and 4504b may be mounted as driver circuits formed using a single crystal semiconductor film or a polycrystalline semiconductor film over a substrate separately prepared. Further, the signal line driver circuit or a part thereof, or the scanning line driver circuit or a part thereof may be separately formed and mounted, and the configuration is not limited to the configuration of fig. 16A and 16B.
Through the above steps, a light-emitting display device (display panel) with high reliability can be manufactured as a semiconductor device.
Note that the structure described in this embodiment can be used in combination with the structures described in other embodiments as appropriate.
Embodiment 10
The thin film transistor described in embodiment modes 1 to 5 can be used as electronic paper. Electronic paper can be used for electronic devices in various fields for displaying information. For example, electronic paper can be applied to electronic book readers (electronic books), posters, in-car advertisements for vehicles such as electric trains, displays on various cards such as credit cards, and the like. Fig. 17A and 17B and fig. 18 show an example of an electronic apparatus.
Fig. 17A shows a poster 2631 manufactured using electronic paper. The exchange of advertisements is manually performed in the case where the advertisement medium is a printed matter of paper, but if electronic paper is used, the display content of advertisements can be changed in a short time. Further, display is not disturbed and a stable image can be obtained. The poster may transmit and receive information wirelessly.
Fig. 17B shows an in-vehicle advertisement 2632 for a vehicle such as an electric train. If the advertisement medium is a printed matter of paper, the exchange of advertisements is performed manually, but if electronic paper is used, the display content of advertisements can be changed without requiring much manual work in a short time. Further, the display is not disturbed and a stable image can be obtained. In addition, the advertisement in the vehicle may be configured to wirelessly transmit and receive information.
In addition, fig. 18 shows an example of an electronic book reader 2700. For example, the electronic book reader 2700 includes two housings, a housing 2701 and a housing 2703. The housing 2701 and the housing 2703 are integrally formed with a shaft portion 2711, and can be opened and closed with the shaft portion 2711 as an axis. With this configuration, an operation like a paper book can be performed.
The housing 2701 is assembled with a display portion 2705, and the housing 2703 is assembled with a display portion 2707. The display portions 2705 and 2707 may be configured to display a continuous screen or different screens. By adopting a configuration in which different screens are displayed, for example, a text can be displayed on the right display portion (the display portion 2705 in fig. 18), and an image can be displayed on the left display portion (the display portion 2707 in fig. 18).
Fig. 18 shows an example in which the housing 2701 includes an operation unit and the like. For example, the housing 2701 includes a power switch 2721, operation keys 2723, a speaker 2725, and the like. Pages can be turned by the operation key 2723. Further, a configuration may be adopted in which a keyboard, a pointing device, and the like are provided on the same surface as the display portion of the housing. Further, an external connection terminal (an earphone terminal, a USB terminal, a terminal connectable to various cables such as an AC adapter and a USB cable, or the like), a recording medium insertion portion, and the like may be provided on the back surface or the side surface of the housing. Further, the electronic book reader 2700 may have a function of an electronic dictionary.
The electronic book reader 2700 may transmit and receive information wirelessly. It is also possible to adopt a configuration in which desired book data or the like is purchased wirelessly from an electronic book server and then downloaded.
Note that the structure described in this embodiment can be used in combination with the structures described in other embodiments as appropriate.
Embodiment 11
The semiconductor device using the thin film transistor described in embodiment modes 1 to 5 can be applied to various electronic devices (including a game machine). Examples of the electronic devices include a television set (also referred to as a television or a television receiver), a monitor of a computer or the like, a digital camera, a digital video camera, a digital photo frame, a mobile phone set (also referred to as a mobile phone or a mobile phone device), a portable game machine, a portable information terminal, an audio reproducing device, a large-sized game machine such as a pachinko machine, and the like.
Fig. 19A illustrates an example of a television set 9600. In the television set 9600, a display portion 9603 is incorporated in a housing 9601. The display portion 9603 can display images. Here, a structure in which the frame 9601 is supported by a bracket 9605 is shown.
The television set 9600 can be operated by an operation switch provided in the housing 9601 or a remote controller 9610 provided separately. The channel and volume can be operated by the operation keys 9609 of the remote controller 9610, and images displayed on the display portion 9603 can be operated. Note that the remote controller 9610 may be provided with a display portion 9607 for displaying information output from the remote controller 9610.
The television device 9600 is configured to include a receiver, a modem, and the like. General television broadcasting can be received by using a receiver. Further, by connecting to a wired or wireless communication network via a modem, information communication can be performed in one direction (from a sender to a receiver) or in two directions (between a sender and a receiver or between receivers).
Fig. 19B shows an example of a digital photo frame 9700. For example, in the digital photo frame 9700, a display portion 9703 is incorporated in a housing 9701. The display portion 9703 can display various images, and can exhibit the same function as a general photo frame by displaying image data captured by a digital camera or the like, for example.
The digital photo frame 9700 has a configuration including an operation unit, an external connection terminal (a USB terminal, a terminal connectable to various cables such as a USB cable, and the like), a recording medium insertion unit, and the like. This structure may be assembled to the same surface as the display unit, but is preferable because the design is improved by providing the display unit on the side surface or the back surface. For example, a memory storing image data captured using a digital camera may be inserted into a recording medium insertion portion of a digital photo frame, the image data may be extracted, and the extracted image data may be displayed on the display portion 9703.
In addition, the digital photo frame 9700 may transmit and receive information wirelessly. A configuration may be employed in which desired image data is wirelessly extracted and displayed.
Fig. 20A shows a portable game machine which is constituted by two housings, a housing 9881 and a housing 9891, and which are connected to each other so as to be openable and closable by a connecting portion 9893. The housing 9881 is attached with the display portion 9882, and the housing 9891 is attached with the display portion 9883. The portable game machine shown in fig. 20A further includes a speaker portion 9884, a recording medium insertion portion 9886, an LED lamp 9890, an input unit (operation keys 9885, a connection terminal 9887, a sensor 9888 (including a function for measuring a force, a displacement, a position, a velocity, an acceleration, an angular velocity, a number of rotations, a distance, light, liquid, magnetism, a temperature, a chemical substance, sound, time, hardness, an electric field, a current, a voltage, electric power, radiation, a flow rate, humidity, inclination, vibration, odor, or infrared ray), a microphone 9889), and the like. Of course, the structure of the portable game machine is not limited to the above-described structure as long as a structure including at least the semiconductor device according to the present invention is adopted, and a structure in which other accessory devices are appropriately provided may be adopted. The portable game machine shown in fig. 20A has the following functions: reading out the program or data stored in the recording medium and displaying it on the display section; and information sharing by wireless communication with other portable game machines. The functions of the portable game machine shown in fig. 20A are not limited to these, and various functions may be provided.
Fig. 20B shows an example of a slot machine 9900 which is one type of large-sized gaming machine. A display portion 9903 is attached to a housing 9901 of the slot machine 9900. The slot machine 9900 is further provided with an operation unit such as a start lever or a stop switch, a slot, a speaker, and the like. Of course, the configuration of the slot machine 9900 is not limited to this, and may be configured to include at least the configuration provided in one embodiment of the present invention, and other accessories may be appropriately provided.
Fig. 21A shows an example of the mobile phone 1000. The mobile phone 1000 includes an operation button 1003, an external connection port 1004, a speaker 1005, a microphone 1006, and the like in addition to the display portion 1002 attached to the housing 1001.
The mobile phone 1000 shown in fig. 21A can input information by touching the display portion 1002 with a finger or the like. Further, the display portion 1002 can be touched with a finger or the like to make a call or perform an operation such as inputting an email.
The screen of the display portion 1002 mainly has three modes. The first mode is a display mode mainly used for displaying images, and the second mode is an input mode mainly used for inputting information such as characters. The third mode is a mode in which the display mode and the input mode are combined.
For example, when a call is made or an email is written, the display portion 1002 may be set to a character input mode mainly for inputting characters, and the characters displayed on the screen may be input. In this case, it is preferable that a keyboard or number buttons be displayed on most of the screen of the display portion 1002.
In addition, a detection device having a sensor for detecting inclination, such as a gyroscope or an acceleration sensor, is provided inside the mobile phone 1000, and the display of the screen on the display portion 1002 can be automatically switched by determining the orientation (vertical or horizontal) of the mobile phone 1000.
The screen mode is switched by touching the display portion 1002 or by operating the operation button 1003 of the housing 1001. The screen mode may be switched according to the type of image displayed on the display portion 1002. For example, the display mode is switched to the display mode when the image signal displayed on the display unit is moving image data, and the input mode is switched to the text data.
In the input mode, when it is known that no touch operation input is made to the display portion 1002 for a certain period of time by detecting a signal detected by the optical sensor of the display portion 1002, the screen mode can be controlled to be switched from the input mode to the display mode.
The display portion 1002 can also be used as an image sensor. For example, by touching the display portion 1002 with a palm or a finger, a palm print, a fingerprint, or the like is captured, and identification can be performed. Further, by using a backlight that emits near-infrared light or a sensing light source that emits near-infrared light in the display portion, it is also possible to photograph finger veins, palm veins, and the like.
Fig. 21B also illustrates an example of a mobile phone. The mobile phone handset in fig. 21B includes a display device 9410 and a communication device 9400; the display device 9410 includes a frame 9411 including a display portion 9412 and operation keys 9413; the communication device 9400 has a frame 9401 including an operation button 9402, an external input terminal 9403, a microphone 9404, a speaker 9405, and a light-emitting portion 9406 which emits light when an incoming call is received; the display device 9410 having a display function can be detached from or attached to the communication device 9400 having a telephone function in two directions shown by arrows. Accordingly, the display device 9410 and the communication device 9400 can be attached to each other along their short or long axes. When only a display function is required, the display device 9410 can be detached from the communication device 9400 to use the display device 9410 alone. Each of the communication device 9400 and the display device 9410 can transmit and receive images or input information by wireless communication or wired communication, and each has a rechargeable battery.
Note that the structure described in this embodiment can be used in combination with the structures described in other embodiments as appropriate.
Embodiment 12
This embodiment mode shows an example of an electronic book reader as one mode of applying a semiconductor device using the thin film transistor described in embodiment modes 1 to 5. In this embodiment, an example in which a double-sided display type third display panel 4313 is mounted between a first display panel 4311 and a second display panel 4312 using fig. 22A, 22B, and 23 will be described. Fig. 22A is a state in which the electronic book reader is opened, and fig. 22B is a state in which the electronic book reader is closed. Further, fig. 23 is a cross-sectional view of the electronic book reader as viewed from the lateral direction.
The electronic book reader shown in fig. 22A and 22B includes: a first display panel 4311 having a first display portion 4301; a second display panel 4312 including an operation portion 4304 and a second display portion 4307; a third display panel 4313 having a third display portion 4302 and a fourth display portion 4310; and a binding portion 4308 provided at one end portion of the first, second, and third display panels 4311, 4312, and 4313. The third display panel 4313 is interposed between the first display panel 4311 and the second display panel 4312. The electronic book reader in fig. 22A and 22B includes four display screens, i.e., a first display portion 4301, a second display portion 4307, a third display portion 4302, and a fourth display portion 4310.
The first display panel 4311, the second display panel 4312, and the third display panel 4313 are flexible and easy to bend. Further, a thin electronic book reader can be realized by using a plastic substrate for the first display panel 4311 and the second display panel 4312 and a film for the third display panel 4313. That is, in fig. 23, according to a cross-sectional view of the electronic book reader as an example viewed from the lateral direction, the third display panel 4313 can be more easily bent than the first display panel 4311 and the second display panel 4312. Thus, by making the display panel outside the third display panel 4313 hard, an operation can be performed with a feeling like a book, and damage to the third display panel 4313 can be suppressed.
The third display panel 4313 is a double-sided display panel having a third display portion 4302 and a fourth display portion 4310. As the third display panel 4313, a double-sided emission type display panel may be used, or a single-sided emission type display panel may be bonded to be used. Further, two liquid crystal display panels sandwiching a backlight (preferably, a thin EL light emitting panel) therebetween may also be used.
In addition, the electronic book reader shown in fig. 22A and 22B includes: a scanning line driver circuit (not shown) for performing display control of the first display portion 4301; scanning line driver circuits 4322a and 4322b for controlling the display of the second display portion 4307; a scanning line driver circuit (not shown) for performing display control of the third display portion 4302 and/or the fourth display portion 4310; a signal line driver circuit 4323 for controlling display in the first display portion 4301, the second display portion 4307, the third display portion 4302, and/or the fourth display portion 4310. In addition, a scanning line driver circuit which performs display control of the first display portion 4301 is provided in the first display panel 4311, scanning line driver circuits 4322a and 4322b are provided in the second display panel 4322, and a signal line driver circuit 4323 is provided in the inside of the bookbinding portion 4308.
Further, in the electronic book reader shown in fig. 22A and 22B, the second display panel 4312 includes an operation portion 4304 and may correspond to functions such as a power input switch, a display changeover switch, and the like.
Further, the input operation of the electronic book reader shown in fig. 22A and 22B can be performed by touching the first display portion 4301 or the second display portion 4307 with a finger, an input pen, or the like, or by operating the operation portion 4304. Fig. 22A illustrates a display button 4309 displayed on the second display portion 4307. The input can be made by touching the display button 4309 with a finger or the like.
In addition, as an example of a method of using the electronic book reader inserted into the third display panel 4313 shown in fig. 22A and 22B, it is convenient that: the first display portion 4301 and the fourth display portion 4310 are used to view a sentence, and the second display portion 4307 and the third display portion 4302 are used to refer to the drawings. At this time, since the third display portion 4302 and the fourth display portion 4310 cannot be simultaneously displayed on the third display panel 4313, the display of the third display portion 4302 is switched to the display of the fourth display portion 4310 when page turning is started.
When the third display panel 4313 starts to turn down a page after the first to third display portions 4301 to 4302 are viewed, the fourth display portion 4310 and the second display portion 4307 display the next page at a certain angle. After the fourth display portion 4310 and the second display portion 4307 are used up, when the third display panel 4313 starts to be turned over, the third display portion 4302 and the first display portion 4301 display the next page at a certain angle. This makes it possible to suppress visual discomfort without switching the screen.
Note that the structure described in this embodiment can be used in combination with the structures described in other embodiments as appropriate.
Description of the reference numerals
100 a substrate; 101 a gate electrode; 102 an insulating film; 103 a semiconductor film; 104 an insulating film; 105 IGZO semiconductor layer; 106 an insulator; 107 contact holes (openings); 108 a source electrode; 109 a drain electrode; 200. 300, 400, 500, 700 substrates; 201. 301, 401, 701 gate electrodes; 202. 302, 402, 702 insulating films; 203. 303, 403, 703 semiconductor films; 204. 304 an insulating film; 205. 305 a semiconductor layer; 206. 306 an insulator; 208. 308, 408, 708 source electrodes; 209. 309, 409, 709 drain electrode; 210. 310, 410, 710 insulating films; 211. 311 a metal multilayer film; 212. 412 a semiconductor film; 213. 413 a source-side buffer layer; 214. 414 drain side buffer layer; 405. 705 an IGZO semiconductor layer; 501 an insulating film; 502 an oxide semiconductor film; 503 electrodes; 510 samples for evaluation of physical properties; 581 thin film transistor; 585 an insulating layer; 587. 588 an electrode layer; 589 spherical particles; 594 a cavity; 595 a filler material; 596. 597 a substrate; 601. 602, 603 measurement results; 604 peak value; 1000 mobile phone; 1001. 2701, 2703 housings; 1002. 2705 and 2707 display units; 1003 operating buttons; 1004 an external connection port; 1005. 2725 speaker; 1006 a microphone; 2600 TFT substrate; 2601 an opposing substrate; 2602 a sealing material; 2603 a pixel portion; 2604 a display element; 2605 a coloring layer; 2606. 2607 a polarizing plate; 2608 a wiring circuit portion; 2609 a flexible circuit board; 2610 cold cathode tube; 2611 reflective plate; 2612 a circuit substrate; 2613 a diffusion plate; 2631 the poster; 2632 in-car advertising; 2700 an electronic book reader; 2711 a shaft portion; 2721 power switch; 2723 operation keys; 4001. 4501, 5300, 5400 substrates; 4002. 4502, 5301, and 5401 pixel portions; 4003. 5303, 5403 signal line driver circuits; 4004. 5302, 5402, 5404 a scan line driver circuit; 4005. 4505 a sealing material; 4006. 4506 a substrate; 4008 a liquid crystal layer; 4010. 4011, 4509, 4510 thin film transistors; 4013 a liquid crystal element; 4015. 4515 connecting terminal electrodes; 4016. 4516 terminal electrodes; 4018 FPC; 4019. 4519 anisotropic conductive film; 4020. 4021 an insulating layer; 4030 pixel electrode layer; 4031 a counter electrode layer; 4032 an insulating layer; 4301. 4302 display unit; 4304 an operation unit; 4307 display unit; 4308 a binding part; 4309 display buttons; 4310 a display unit; 4311. 4312, 4313 display panel; 4323 a signal line driver circuit; 4507 a filler material; 4511 a light-emitting element; 4512 an electroluminescent layer; 4513. 4517 an electrode layer; 4520A partition wall; 5501-5506 wiring; 5543. 5544 a node; 5571-5578 thin film transistor; 5601 driver IC; 5602 a switch group; 5611. 5612, 5613, 5621, 5712 and 5717 wiring; 5701 trigger; 5721. 5821 a signal; 590a black area; 590b a white region; 6400 pixels; 6401 a switching transistor; 6402 a drive transistor; 6403 a capacitive element; 6404 a light-emitting element; 6405 a signal line; 6406 scanning lines; 6407 a power supply line; 6408 a common electrode; 7001 TFTs; 7002 a light-emitting element; 7003 a cathode; 7004 a light-emitting layer; 7005 an anode; 7011 drive TFTs; 7012 a light emitting element; 7013 a cathode; 7014 a light-emitting layer; 7015 an anode; 7016 a shielding film; 7017 a conductive film; 7021 drive TFTs; 7022 a light emitting element; 7023 a cathode; 7024 a light-emitting layer; 7025 an anode; 7027 a conductive film; 9400 a communication device; 9401 frame body; 9402 scan button; 9403 external input terminals; 9404 microphone; 9405 speaker; 9406 a light-emitting part; 9410 a display device; 9411 a frame body; 9412 a display portion; 9413 operating buttons; 9600 a television device; 9601 a frame body; 9603 a display portion; 9605 a bracket; 9607 a display section; 9609 operation keys; 9610 a remote control operator; 9700A digital photo frame; 9701 a frame body; 9703 a display section; 9881 a frame body; 9882. 9883 a display unit; 9884 speaker part; 9885 operating keys; 9886 a recording medium insertion part; 9887 connecting terminal; 9888 a sensor; 9889 a microphone; 9890 LED lights; 9891 a frame body; 9893 a connecting portion; 9900 a slot machine; 9901 frame body; 9903 a display section; 4321a, 4322a, 4504a scan line driver circuit; 4503a signal line driver circuit; 4518a FPC; 5603a, 5603b, 5603c thin film transistor; 5703a, 5703b, 5703c, 5803a, 5803b, 5803 c.

Claims (24)

1. A semiconductor device, comprising:
a substrate;
a gate electrode on the substrate and in a pixel portion of the semiconductor device;
a first insulating film on the gate electrode, the first insulating film including silicon, oxygen, and nitrogen;
an oxide semiconductor layer on and in direct contact with the first insulating film;
a second insulating film on and in direct contact with the oxide semiconductor layer, the second insulating film including silicon and at least one of oxygen and nitrogen;
a source electrode and a drain electrode on the second insulating film and in direct contact with the oxide semiconductor layer through a first contact hole and a second contact hole in the second insulating film, respectively;
a third insulating film formed continuously from a top surface of the source electrode to a top surface of the drain electrode, the third insulating film including silicon or aluminum and at least one of oxygen and nitrogen;
an organic insulating layer on the third insulating film;
a pixel electrode layer over the organic insulating layer and electrically connected to the oxide semiconductor layer through an opening in the organic insulating layer;
a liquid crystal element over the organic insulating layer, the liquid crystal element including the pixel electrode layer, a liquid crystal layer, and a counter electrode layer;
a terminal electrode formed of the same conductive layer as the pixel electrode layer; and
an FPC electrically connected to the terminal electrodes,
wherein the oxide semiconductor layer includes indium, gallium, and zinc,
wherein the pixel electrode layer is in electrical contact with the oxide semiconductor layer through one of the source electrode and the drain electrode via a side end surface and a top surface of the oxide semiconductor layer, and
wherein a channel formation region of the oxide semiconductor layer is sandwiched between the first insulating film and the second insulating film.
2. A semiconductor device, comprising:
a substrate;
a gate electrode on the substrate and in a pixel portion of the semiconductor device;
a first insulating film on the gate electrode, the first insulating film including silicon, oxygen, and nitrogen;
an oxide semiconductor layer on and in direct contact with the first insulating film;
a second insulating film on and in direct contact with the oxide semiconductor layer, the second insulating film including silicon and at least one of oxygen and nitrogen;
a source electrode and a drain electrode on and in direct contact with the second insulating film and in direct contact with the oxide semiconductor layer through a first contact hole and a second contact hole in the second insulating film, respectively;
a third insulating film formed continuously from a top surface of the source electrode to a top surface of the drain electrode and in direct contact with the source electrode, the drain electrode, and the second insulating film, the third insulating film including silicon or aluminum and at least one of oxygen and nitrogen;
an organic insulating layer on the third insulating film;
a pixel electrode layer over the organic insulating layer and electrically connected to the oxide semiconductor layer through an opening in the organic insulating layer;
a liquid crystal element over the organic insulating layer, the liquid crystal element including the pixel electrode layer, a liquid crystal layer, and a counter electrode layer;
a terminal electrode formed of the same conductive layer as the pixel electrode layer; and
an FPC electrically connected to the terminal electrodes,
wherein the oxide semiconductor layer includes indium, gallium, and zinc,
wherein the pixel electrode layer is in electrical contact with the oxide semiconductor layer through one of the source electrode and the drain electrode via a side end surface and a top surface of the oxide semiconductor layer, and
wherein a channel formation region of the oxide semiconductor layer is sandwiched between the first insulating film and the second insulating film.
3. The semiconductor device according to claim 1 or claim 2, wherein the side end surface of the oxide semiconductor layer and a side end surface of the second insulating film overlap.
4. A semiconductor device, comprising:
a substrate;
a gate electrode on the substrate and in a pixel portion of the semiconductor device;
a silicon nitride insulating film on the gate electrode;
a first silicon oxide insulating film on the silicon nitride insulating film;
an oxide semiconductor layer over and in direct contact with the first silicon oxide insulating film;
a second silicon oxide insulating film on and in direct contact with the oxide semiconductor layer;
a source electrode and a drain electrode on the second silicon oxide insulating film and electrically contacting the oxide semiconductor layer through a first contact hole and a second contact hole in the second silicon oxide insulating film, respectively;
a third silicon oxide insulating film formed continuously from a top surface of the source electrode to a top surface of the drain electrode;
an organic insulating layer on the third silicon oxide insulating film;
a pixel electrode layer over the organic insulating layer and electrically connected to the oxide semiconductor layer through an opening in the organic insulating layer;
a liquid crystal element over the organic insulating layer, the liquid crystal element including the pixel electrode layer, a liquid crystal layer, and a counter electrode layer;
a terminal electrode formed of the same conductive layer as the pixel electrode layer; and
an FPC electrically connected to the terminal electrodes,
wherein the oxide semiconductor layer includes indium, gallium, and zinc,
wherein the pixel electrode layer is in electrical contact with the oxide semiconductor layer through one of the source electrode and the drain electrode via a side end surface and a top surface of the oxide semiconductor layer, and
wherein a channel formation region of the oxide semiconductor layer is sandwiched between the first silicon oxide insulating film and the second silicon oxide insulating film.
5. A semiconductor device, comprising:
a substrate;
a gate electrode on the substrate and in a pixel portion of the semiconductor device;
a silicon nitride insulating film on the gate electrode;
a first silicon oxide insulating film on and in direct contact with the silicon nitride insulating film;
an oxide semiconductor layer over and in direct contact with the first silicon oxide insulating film;
a second silicon oxide insulating film on and in direct contact with the oxide semiconductor layer;
a source electrode and a drain electrode on and in direct contact with the second silicon oxide insulating film and in direct contact with the oxide semiconductor layer through a first contact hole and a second contact hole in the second silicon oxide insulating film, respectively;
a third silicon oxide insulating film formed continuously from a top surface of the source electrode to a top surface of the drain electrode, in direct contact with the source electrode, the drain electrode, and the second silicon oxide insulating film;
an organic insulating layer on the third silicon oxide insulating film;
a pixel electrode layer over the organic insulating layer and electrically connected to the oxide semiconductor layer through an opening in the organic insulating layer;
a liquid crystal element over the organic insulating layer, the liquid crystal element including the pixel electrode layer, a liquid crystal layer, and a counter electrode layer;
a terminal electrode formed of the same conductive layer as the pixel electrode layer; and
an FPC electrically connected to the terminal electrodes,
wherein the oxide semiconductor layer includes indium, gallium, and zinc,
wherein the pixel electrode layer is in electrical contact with the oxide semiconductor layer through one of the source electrode and the drain electrode via a side end surface and a top surface of the oxide semiconductor layer, and
wherein a channel formation region of the oxide semiconductor layer is sandwiched between the first silicon oxide insulating film and the second silicon oxide insulating film.
6. The semiconductor device according to claim 4 or claim 5, wherein the side end surface of the oxide semiconductor layer and a side end surface of the second silicon oxide insulating film overlap.
7. The semiconductor device according to any one of claims 1, 2, 4, and 5, wherein the first contact hole and the second contact hole overlap with the gate electrode when seen in a cross-sectional view taken in a channel length direction of the channel formation region.
8. The semiconductor device according to any one of claims 1, 2, 4, and 5, wherein the first contact hole and the second contact hole completely overlap with the gate electrode when seen in a cross-sectional view taken in a channel length direction of the channel formation region.
9. A semiconductor device, comprising:
a substrate;
a gate electrode on the substrate and in a pixel portion of the semiconductor device;
a first insulating film on the gate electrode, the first insulating film including silicon, oxygen, and nitrogen;
an oxide semiconductor layer on and in direct contact with the first insulating film;
a second insulating film on and in direct contact with the oxide semiconductor layer, the second insulating film including silicon and at least one of oxygen and nitrogen;
a source electrode and a drain electrode on the second insulating film and in direct contact with the oxide semiconductor layer through a first contact hole and a second contact hole in the second insulating film, respectively;
a third insulating film formed continuously from a top surface of the source electrode to a top surface of the drain electrode, the third insulating film including silicon or aluminum and at least one of oxygen and nitrogen;
an organic insulating layer on the third insulating film;
a pixel electrode layer over the organic insulating layer and electrically connected to the oxide semiconductor layer through an opening in the organic insulating layer;
a liquid crystal element over the organic insulating layer, the liquid crystal element including the pixel electrode layer, a liquid crystal layer, and a counter electrode layer;
a terminal electrode formed of the same conductive layer as the pixel electrode layer; and
an FPC electrically connected to the terminal electrodes,
wherein the oxide semiconductor layer includes indium, gallium, and zinc,
wherein the pixel electrode layer is in electrical contact with the oxide semiconductor layer through a top surface of the oxide semiconductor layer by one of the source electrode and the drain electrode,
wherein a channel formation region of the oxide semiconductor layer is sandwiched between the first insulating film and the second insulating film, and
wherein the first contact hole and the second contact hole completely overlap with the gate electrode when seen in a sectional view taken in a channel length direction of the channel formation region.
10. A semiconductor device, comprising:
a substrate;
a gate electrode on the substrate and in a pixel portion of the semiconductor device;
a first insulating film on the gate electrode, the first insulating film including silicon, oxygen, and nitrogen;
an oxide semiconductor layer on and in direct contact with the first insulating film;
a second insulating film on and in direct contact with the oxide semiconductor layer, the second insulating film including silicon and at least one of oxygen and nitrogen;
a source electrode and a drain electrode on and in direct contact with the second insulating film and in direct contact with the oxide semiconductor layer through a first contact hole and a second contact hole in the second insulating film, respectively;
a third insulating film formed continuously from a top surface of the source electrode to a top surface of the drain electrode and in direct contact with the source electrode, the drain electrode, and the second insulating film, the third insulating film including silicon or aluminum and at least one of oxygen and nitrogen;
an organic insulating layer on the third insulating film;
a pixel electrode layer over the organic insulating layer and electrically connected to the oxide semiconductor layer through an opening in the organic insulating layer;
a liquid crystal element over the organic insulating layer, the liquid crystal element including the pixel electrode layer, a liquid crystal layer, and a counter electrode layer;
a terminal electrode formed of the same conductive layer as the pixel electrode layer; and
an FPC electrically connected to the terminal electrodes,
wherein the oxide semiconductor layer includes indium, gallium, and zinc,
wherein the pixel electrode layer is in electrical contact with the oxide semiconductor layer through a top surface of the oxide semiconductor layer by one of the source electrode and the drain electrode,
wherein a channel formation region of the oxide semiconductor layer is sandwiched between the first insulating film and the second insulating film, and
wherein the first contact hole and the second contact hole completely overlap with the gate electrode when seen in a sectional view taken in a channel length direction of the channel formation region.
11. The semiconductor device according to claim 9 or claim 10, wherein a side end surface of the oxide semiconductor layer and a side end surface of the second insulating film overlap.
12. A semiconductor device, comprising:
a substrate;
a gate electrode on the substrate and in a pixel portion of the semiconductor device;
a silicon nitride insulating film on the gate electrode;
a first silicon oxide insulating film on the silicon nitride insulating film;
an oxide semiconductor layer over and in direct contact with the first silicon oxide insulating film;
a second silicon oxide insulating film on and in direct contact with the oxide semiconductor layer;
a source electrode and a drain electrode on the second silicon oxide insulating film and electrically contacting the oxide semiconductor layer through a first contact hole and a second contact hole in the second silicon oxide insulating film, respectively;
a third silicon oxide insulating film formed continuously from a top surface of the source electrode to a top surface of the drain electrode;
an organic insulating layer on the third silicon oxide insulating film;
a pixel electrode layer over the organic insulating layer and electrically connected to the oxide semiconductor layer through an opening in the organic insulating layer;
a liquid crystal element over the organic insulating layer, the liquid crystal element including the pixel electrode layer, a liquid crystal layer, and a counter electrode layer;
a terminal electrode formed of the same conductive layer as the pixel electrode layer; and
an FPC electrically connected to the terminal electrodes,
wherein the oxide semiconductor layer includes indium, gallium, and zinc,
wherein the pixel electrode layer is in electrical contact with the oxide semiconductor layer through a top surface of the oxide semiconductor layer by one of the source electrode and the drain electrode,
wherein a channel formation region of the oxide semiconductor layer is sandwiched between the first silicon oxide insulating film and the second silicon oxide insulating film, and
wherein the first contact hole and the second contact hole completely overlap with the gate electrode when seen in a sectional view taken in a channel length direction of the channel formation region.
13. A semiconductor device, comprising:
a substrate;
a gate electrode on the substrate and in a pixel portion of the semiconductor device;
a silicon nitride insulating film on the gate electrode;
a first silicon oxide insulating film on and in direct contact with the silicon nitride insulating film;
an oxide semiconductor layer over and in direct contact with the first silicon oxide insulating film;
a second silicon oxide insulating film on and in direct contact with the oxide semiconductor layer;
a source electrode and a drain electrode on and in direct contact with the second silicon oxide insulating film and in direct contact with the oxide semiconductor layer through a first contact hole and a second contact hole in the second silicon oxide insulating film, respectively;
a third silicon oxide insulating film formed continuously from a top surface of the source electrode to a top surface of the drain electrode, in direct contact with the source electrode, the drain electrode, and the second silicon oxide insulating film;
an organic insulating layer on the third silicon oxide insulating film;
a pixel electrode layer over the organic insulating layer and electrically connected to the oxide semiconductor layer through an opening in the organic insulating layer;
a liquid crystal element over the organic insulating layer, the liquid crystal element including the pixel electrode layer, a liquid crystal layer, and a counter electrode layer;
a terminal electrode formed of the same conductive layer as the pixel electrode layer; and
an FPC electrically connected to the terminal electrodes,
wherein the oxide semiconductor layer includes indium, gallium, and zinc,
wherein the pixel electrode layer is in electrical contact with the oxide semiconductor layer through a top surface of the oxide semiconductor layer by one of the source electrode and the drain electrode,
wherein a channel formation region of the oxide semiconductor layer is sandwiched between the first silicon oxide insulating film and the second silicon oxide insulating film, and
wherein the first contact hole and the second contact hole completely overlap with the gate electrode when seen in a sectional view taken in a channel length direction of the channel formation region.
14. The semiconductor device according to claim 12 or claim 13, wherein a side end surface of the oxide semiconductor layer and a side end surface of the second silicon oxide insulating film overlap.
15. The semiconductor device according to any one of claims 1, 2, 9, and 10, wherein the first insulating film has a stacked-layer structure including a silicon nitride insulating film or a silicon oxide insulating film on which silicon including at least one of oxygen and nitrogen is stacked.
16. The semiconductor device according to any one of claims 1, 2, 9, and 10, wherein the third insulating film has a stacked-layer structure of a silicon oxide insulating film on which a silicon nitride film is stacked.
17. The semiconductor device according to any one of claims 4, 5, 12, and 13,
wherein the first silicon oxide insulating film is a first silicon oxynitride insulating film,
wherein the second silicon oxide insulating film is a second silicon oxide nitride insulating film, and
wherein the third silicon oxide insulating film is a third silicon nitride insulating film.
18. The semiconductor device according to any one of claims 1, 2, 4, 5, 9, 10, 12, and 13, wherein the oxide semiconductor layer assumes an amorphous state.
19. The semiconductor device according to any one of claims 1, 2, 4, 5, 9, 10, 12, and 13, wherein the pixel electrode layer comprises a transparent conductive material.
20. A display device comprising the semiconductor device according to any one of claims 1, 2, 4, 5, 9, 10, 12, and 13.
21. A semiconductor device, comprising:
a gate electrode in the pixel portion;
a first insulating film on the gate electrode;
an oxide semiconductor layer over the first insulating film;
a second insulating film over the oxide semiconductor layer;
a source electrode on the second insulating film, the source electrode being in contact with the oxide semiconductor layer through a first contact hole in the second insulating film; and
a drain electrode on the second insulating film, the drain electrode being in contact with the oxide semiconductor layer through a second contact hole in the second insulating film,
wherein the oxide semiconductor layer includes indium, gallium, and zinc,
wherein a distance between the first contact hole and the second contact hole is greater than a width of the first contact hole and greater than a width of the second contact hole, and
wherein each of the first contact hole and the second contact hole overlaps the gate electrode.
22. The semiconductor device according to claim 21, wherein each of the source electrode and the drain electrode is in contact with a side surface of the oxide semiconductor layer.
23. A semiconductor device, comprising:
a gate electrode in the pixel portion;
a first insulating film on the gate electrode;
an oxide semiconductor layer over the first insulating film;
a second insulating film over the oxide semiconductor layer;
a source electrode on the second insulating film, the source electrode being in contact with the oxide semiconductor layer through a first contact hole in the second insulating film;
a drain electrode on the second insulating film, the drain electrode being in contact with the oxide semiconductor layer through a second contact hole in the second insulating film;
a silicon oxide film over the source electrode and the drain electrode, the silicon oxide film being in contact with the second insulating film between the source electrode and the drain electrode;
an insulating film including an organic material on the silicon oxide film; and
a conductive film on the insulating film, the conductive film being in contact with one of the source electrode and the drain electrode through the contact hole of the silicon oxide film and the contact hole of the insulating film,
wherein the oxide semiconductor layer includes indium, gallium, and zinc,
wherein a distance between the first contact hole and the second contact hole is greater than a width of the first contact hole and greater than a width of the second contact hole,
wherein each of the first contact hole and the second contact hole overlaps the gate electrode, and
wherein each of the contact hole of the silicon oxide film and the contact hole of the insulating film includes a region not overlapping with the oxide semiconductor layer.
24. The semiconductor device according to claim 23, wherein each of the source electrode and the drain electrode is in contact with a side surface of the oxide semiconductor layer.
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