JPH05251705A - Thin-film transistor - Google Patents
Thin-film transistorInfo
- Publication number
- JPH05251705A JPH05251705A JP4081483A JP8148392A JPH05251705A JP H05251705 A JPH05251705 A JP H05251705A JP 4081483 A JP4081483 A JP 4081483A JP 8148392 A JP8148392 A JP 8148392A JP H05251705 A JPH05251705 A JP H05251705A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- film
- film transistor
- thin film
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、光電変換素子及び発光
素子を駆動する薄膜トランジスタに係り、特に光に影響
されず、素子特性を向上できる薄膜トランジスタに関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin film transistor for driving a photoelectric conversion element and a light emitting element, and more particularly to a thin film transistor capable of improving element characteristics without being affected by light.
【0002】[0002]
【従来の技術】従来の薄膜トランジスタ(TFT)は、
ガラス等の基板上にゲ−ト電極、ゲ−ト絶縁層、水素化
アモルファスシリコン(a−Si:H)等の半導体層、
ソ−ス及びドレイン電極を積層した逆スタガ構造のもの
があり、イメ−ジセンサを始め、大面積デバイスの分野
においてアクティブマトリスク型の液晶ディスプレイに
代表されるフラットパネルディスプレイ等の駆動素子と
して用いられている。2. Description of the Related Art A conventional thin film transistor (TFT) is
A gate electrode, a gate insulating layer, a semiconductor layer such as hydrogenated amorphous silicon (a-Si: H) on a substrate such as glass,
There is an inverted staggered structure in which source and drain electrodes are laminated, and it is used as a drive element for flat panel displays such as image sensors and active area matrix type liquid crystal displays, in the field of large area devices. ing.
【0003】次に、従来の逆スタガ型の薄膜トランジス
タの構成について図5を使って説明する。図5は、従来
の薄膜トランジスタの断面説明図である。図5に示すよ
うに、逆スタガ型の薄膜トランジスタ(TFT)は、ガ
ラス等の基板20上にゲ−ト電極21としてのクロム
(Cr1 )層、ゲ−ト絶縁層22としてのシリコン窒化
膜(SiNx )、半導体活性層23としての水素化アモ
ルファスシリコン(a−Si:H)層、ゲ−ト電極21
に対向するよう設けられたチャネル保護層24としての
シリコン窒化膜(SiNx )、オ−ミックコンタクト層
25としてのn+ 型水素化アモルファスシリコン(n+
a−Si:H)層、ソ−ス電極26及びドレイン電極2
7としてのクロム (Cr2 )層、その上に層間絶縁層
29としてのポリイミド層、更に、その上に配線層30
又はチャネル保護層24の上部においてはa−Si:H
層の遮光用としてのアルミニウム(Al)の遮光層28
とを順次積層した構造となっている(特開昭63−93
58号公報参照)。Next, the structure of a conventional inverted staggered thin film transistor will be described with reference to FIG. FIG. 5 is a cross-sectional explanatory view of a conventional thin film transistor. As shown in FIG. 5, the inverted staggered thin film transistor (TFT) is a chromium (Cr1) layer as a gate electrode 21 and a silicon nitride film (SiNx) as a gate insulating layer 22 on a substrate 20 such as glass. ), A hydrogenated amorphous silicon (a-Si: H) layer as the semiconductor active layer 23, and a gate electrode 21.
A silicon nitride film (SiNx) as a channel protection layer 24 and an n + type hydrogenated amorphous silicon (n +) as an ohmic contact layer 25 provided so as to face each other.
a-Si: H) layer, source electrode 26 and drain electrode 2
7. A chromium (Cr2) layer as 7, a polyimide layer as an interlayer insulating layer 29, and a wiring layer 30 thereon.
Alternatively, in the upper part of the channel protection layer 24, a-Si: H
Aluminum (Al) shading layer 28 for shading the layers
And a structure in which and are sequentially laminated (Japanese Patent Laid-Open No. 63-93).
58).
【0004】[0004]
【発明が解決しようとする課題】しかしながら、上記従
来の薄膜トランジスタにおいては、半導体活性層にアモ
ルファスシリコンを用いていることから、半導体活性層
に光が当たると導電性を持ってスイッチング素子の特性
が劣化するという問題点があった。However, in the above-mentioned conventional thin film transistor, since the semiconductor active layer is made of amorphous silicon, when the semiconductor active layer is exposed to light, it has conductivity and the characteristics of the switching element deteriorate. There was a problem to do.
【0005】そのために、半導体活性層に光が当たらな
いように遮光層を設ける方法があり、例えば、遮光層と
しては金属薄膜が用いられていた。しかしながら、遮光
層を設けると工程が増えるだけでなく浮遊電位を持つこ
ととなるので、遮光層をグランドレベルにする必要があ
り、その場合にも、寄生容量が発生するという問題点が
あった。Therefore, there is a method of providing a light shielding layer so that the semiconductor active layer is not exposed to light. For example, a metal thin film has been used as the light shielding layer. However, the provision of the light-shielding layer not only increases the number of steps but also causes a floating potential. Therefore, the light-shielding layer needs to be at the ground level, and even in that case, there is a problem that parasitic capacitance occurs.
【0006】また、薄膜トランジスタを光電変換素子又
は発光素子との積層構造にする場合には、図6の光電変
換素子の上に薄膜トランジスタを積層した積層型光電変
換装置の平面説明図に示すように、従来の積層型のもの
であれば、ソ−ス電極26及びドレイン電極27が金属
電極であり、単位画素内でTFTが占める割合が増大
し、当然ながら開口率(単位画素内における光電変換素
子の受光エリアが占める割合)の低下を招き、感度が低
下するという問題点もあった。When the thin film transistor has a laminated structure with a photoelectric conversion element or a light emitting element, as shown in the plan view of the laminated photoelectric conversion device in which the thin film transistor is laminated on the photoelectric conversion element of FIG. In the case of the conventional stacked type, since the source electrode 26 and the drain electrode 27 are metal electrodes, the ratio of TFTs in the unit pixel increases, and the aperture ratio (of the photoelectric conversion element in the unit pixel is naturally increased. There is also a problem in that the sensitivity decreases due to the decrease in the ratio occupied by the light receiving area).
【0007】本発明は上記実情に鑑みて為されたもの
で、半導体層としてアモルファスシリコンよりバンドギ
ャップの大きい透明材質の半導体を使うことで光に影響
されず、更に開口率を増大させることができる薄膜トラ
ンジスタを提供することを目的とする。The present invention has been made in view of the above circumstances, and by using a transparent semiconductor having a band gap larger than that of amorphous silicon as a semiconductor layer, it is not affected by light and the aperture ratio can be further increased. An object is to provide a thin film transistor.
【0008】[0008]
【課題を解決するための手段】上記従来例の問題点を解
決するための請求項1記載の発明は、ゲ−ト電極とゲー
ト絶縁膜とソ−ス電極とドレイン電極と半導体層とを有
する薄膜トランジスタにおいて、前記半導体層の伝導帯
と価電子帯とのエネルギバンドギャップが3eV以上
で、前記半導体層を透光性膜としたことを特徴としてい
る。The invention according to claim 1 for solving the above-mentioned problems of the prior art has a gate electrode, a gate insulating film, a source electrode, a drain electrode and a semiconductor layer. In the thin film transistor, the energy band gap between the conduction band and the valence band of the semiconductor layer is 3 eV or more, and the semiconductor layer is a translucent film.
【0009】上記従来例の問題点を解決するための請求
項2記載の発明は、ゲ−ト電極とゲート絶縁膜とソ−ス
電極とドレイン電極と半導体層とを有する薄膜トランジ
スタにおいて、前記半導体層のキャリア濃度が1018個
・cm-3以下で、かつ前記半導体層を透光性膜としたこ
とを特徴としている。A second aspect of the present invention for solving the above-mentioned problems of the prior art is a thin film transistor having a gate electrode, a gate insulating film, a source electrode, a drain electrode and a semiconductor layer. And has a carrier concentration of 10 18 · cm −3 or less and the semiconductor layer is a translucent film.
【0010】[0010]
【作用】請求項1記載の発明によれば、半導体層の伝導
帯と価電子帯とのエネルギバンドギャップが3eV以上
で、半導体層を透光性膜とした薄膜トランジスタとして
いるので、光が透過した場合でも導電性が変化しにくく
なる。According to the invention described in claim 1, since the energy band gap between the conduction band and the valence band of the semiconductor layer is 3 eV or more, and the semiconductor layer is a thin film transistor having a light-transmitting film, light is transmitted. Even in this case, the conductivity is unlikely to change.
【0011】請求項2記載の発明によれば、半導体層の
キャリア濃度が1018個・cm-3以下で、かつ半導体層
を透光性膜としているので、抵抗率が高くなり、光が透
過した場合でも導電性が変化しにくい薄膜トランジスタ
とすることができる。According to the second aspect of the present invention, since the carrier concentration of the semiconductor layer is 10 18 · cm -3 or less and the semiconductor layer is a light-transmitting film, the resistivity is high and the light is transmitted. Even in such a case, a thin film transistor whose conductivity hardly changes can be obtained.
【0012】[0012]
【実施例】本発明の一実施例について図面を参照しなが
ら説明する。図1は、本発明の一実施例に係る薄膜トラ
ンジスタの断面説明図である。尚、本実施例(実施例
1)では、例として逆スタガ型の薄膜トランジスタにつ
いて説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a cross-sectional explanatory diagram of a thin film transistor according to an embodiment of the present invention. In this example (Example 1), an inverted stagger type thin film transistor will be described as an example.
【0013】図1に示すように、実施例1の薄膜トラン
ジスタは、ガラス等の透明絶縁性の基板1と、基板1上
に形成されたCr等のゲ−ト電極2と、ゲ−ト電極2を
覆うように形成された窒化シリコン(SiNx )等のゲ
−ト絶縁層3と、ゲ−ト絶縁層3上に酸素濃度を調製し
て形成された酸化インジィウム・スズ(ITO)等の半
導体活性層8とが積層され、更に半導体活性層8上には
窒化シリコン等のチャネル保護層5が形成され、Cr等
のソ−ス電極7及びドレイン電極6とがチャネル保護層
5の一部を覆うよう形成される構成となっている。As shown in FIG. 1, the thin film transistor of Example 1 has a transparent insulating substrate 1 made of glass or the like, a gate electrode 2 made of Cr or the like formed on the substrate 1, and a gate electrode 2. A gate insulating layer 3 made of silicon nitride (SiNx) or the like formed so as to cover the semiconductor, and a semiconductor active material such as indium tin oxide (ITO) formed by adjusting the oxygen concentration on the gate insulating layer 3. A layer 8 is laminated, and a channel protection layer 5 made of silicon nitride or the like is further formed on the semiconductor active layer 8. A source electrode 7 and a drain electrode 6 made of Cr or the like cover a part of the channel protection layer 5. It is configured as described above.
【0014】次に、実施例1の薄膜トランジスタの製造
方法について図1を使って説明する。まず、基板1上に
ゲ−ト電極2となるCrを500オングストロ−ム程度
スパッタリングにより着膜し、フォトリソエッチングを
用いて所定の形状にパタ−ニングする。Next, a method of manufacturing the thin film transistor of the first embodiment will be described with reference to FIG. First, Cr, which will be the gate electrode 2, is deposited on the substrate 1 by sputtering for about 500 angstroms, and patterned into a predetermined shape by photolithographic etching.
【0015】次に、ゲ−ト絶縁層3として窒化シリコン
をプラズマCVD法で2500オングストロ−ム程度着
膜する。そして、膜中の酸素濃度を調整し、半導体活性
層8となるITO膜をスパッタリングにより500オン
グストロ−ム程度着膜する。Next, silicon nitride is deposited as the gate insulating layer 3 by plasma CVD to a thickness of about 2500 angstroms. Then, the oxygen concentration in the film is adjusted, and the ITO film to be the semiconductor active layer 8 is deposited by sputtering to about 500 angstroms.
【0016】具体的には、着膜時の酸素ガス濃度を1%
以上にしてスパッタリングを行うことで実現することが
できる。このとき、ITO膜のキャリア濃度が1018個
・cm-3以下となれば、縮退が解け半導体としてのIT
O膜(半導体活性層8)が実現される。Specifically, the oxygen gas concentration during film deposition is set to 1%.
It can be realized by performing sputtering as described above. At this time, if the carrier concentration of the ITO film is 10 18 · cm -3 or less, degeneration is resolved and IT as a semiconductor is released.
An O film (semiconductor active layer 8) is realized.
【0017】そして、半導体活性層8上に、チャネル保
護層5として窒化シリコンをプラズマCVD法により2
500オングストロ−ム程度着膜し、フォトリソエッチ
ングを用いて所定の形状にパタ−ニングする。Then, on the semiconductor active layer 8, silicon nitride is used as a channel protection layer 5 by plasma CVD.
The film is deposited to a thickness of about 500 Å and patterned into a predetermined shape by photolithographic etching.
【0018】更に、ソ−ス電極7及びドレイン電極6と
なるCrを1500オングストロ−ム程度スパッタリン
グにより着膜し、フォトリソエッチングを用いてパタ−
ニングすることにより実施例1の薄膜トランジスタが作
製される。Further, Cr to be the source electrode 7 and the drain electrode 6 is deposited by sputtering to a thickness of about 1500 Å and patterned by photolithography etching.
Then, the thin film transistor of Example 1 is manufactured.
【0019】一般にITOなどの酸化物の透明導電膜
は、膜中の酸素量を変化させることにより膜の導電率を
変化させることができるものである。これは、化学量論
的組成からのずれ(酸素欠損)によりキャリアが発生し
ていることによる。Generally, a transparent conductive film of an oxide such as ITO can change the conductivity of the film by changing the amount of oxygen in the film. This is because carriers are generated due to deviation from the stoichiometric composition (oxygen deficiency).
【0020】ITO(Indium Tin Oxide)膜の電気抵抗
率のスパッタ時での酸素濃度依存性は、図2に示すよう
な特性をもっているので、Arガスと酸素ガスとを用い
た反応性スパッタリングにおいて、酸素ガスの割合(O
2 /Ar+O2 )を1%以上にすれば、ITO膜におけ
る電気抵抗率(ρ[Ω・cm])を増加させることがで
き、ITO膜の導電性を低下するように制御できるもの
である。Since the oxygen concentration dependence of the electrical resistivity of the ITO (Indium Tin Oxide) film during sputtering has the characteristics shown in FIG. 2, in reactive sputtering using Ar gas and oxygen gas, Ratio of oxygen gas (O
By setting 2 / Ar + O 2 ) to 1% or more, the electrical resistivity (ρ [Ω · cm]) of the ITO film can be increased, and the conductivity of the ITO film can be controlled to be lowered.
【0021】また、光が当っても導電性が変化しないエ
ネルギバンドギャップの大きい半導体を半導体活性層8
として用いる必要があるので、半導体活性層の伝導帯と
価電子帯とのエネルギバンドギャップが3eV以上であ
ることが望ましい。従来のa−Siの半導体層ではエネ
ルギバンドギャップが1.7〜1.8eV程度であった
が、本実施例で製造されるITO膜の半導体層ではエネ
ルギバンドギャップが3eV以上とすることができる。Further, a semiconductor having a large energy band gap, whose conductivity does not change even when exposed to light, is formed of a semiconductor active layer 8.
Therefore, the energy band gap between the conduction band and the valence band of the semiconductor active layer is preferably 3 eV or more. The energy band gap of the conventional a-Si semiconductor layer was about 1.7 to 1.8 eV, but the energy band gap of the semiconductor layer of the ITO film manufactured in this example can be 3 eV or more. ..
【0022】実施例1の薄膜トランジスタによれば、従
来透明電極として用いられていたITO膜の膜中の酸素
量を増加させることにより、膜中のキャリア濃度を10
18個・cm-3以下に制御して導電性を低下させ、半導体
活性層8にITO膜を使用することで、光に影響され
ず、素子特性を向上できる効果がある。According to the thin film transistor of Example 1, the carrier concentration in the film was increased to 10 by increasing the amount of oxygen in the ITO film which was conventionally used as a transparent electrode.
By controlling the conductivity to 18 pieces · cm −3 or less and using the ITO film for the semiconductor active layer 8, there is an effect that the device characteristics can be improved without being affected by light.
【0023】次に、別の実施例(実施例2)として図3
の断面説明図に示す透明薄膜トランジスタについて簡単
に説明すると、実施例2の透明薄膜トランジスタは、実
施例1の薄膜トランジスタと略同様の構成となってお
り、相違点はソ−ス電極11及びドレイン電極10、更
にゲ−ト電極9にITO膜を使用している点である。こ
の場合のITO膜は、一般的な透明導電膜である。Next, as another embodiment (second embodiment), FIG.
Briefly explaining the transparent thin film transistor shown in the cross-sectional explanatory view of Example 2, the transparent thin film transistor of Example 2 has substantially the same configuration as the thin film transistor of Example 1, except for the source electrode 11 and the drain electrode 10, Further, an ITO film is used for the gate electrode 9. The ITO film in this case is a general transparent conductive film.
【0024】次に、実施例2の透明薄膜トランジスタの
製造方法について図3を使って説明する。尚、実施例2
の透明薄膜トランジスタの製造方法は、実施例1の薄膜
トランジスタの製造方法と略同様であるので相違点につ
いて説明することにする。Next, a method of manufacturing the transparent thin film transistor of the second embodiment will be described with reference to FIG. Example 2
Since the method of manufacturing the transparent thin film transistor of (1) is substantially the same as the method of manufacturing the thin film transistor of Example 1, only the differences will be described.
【0025】先ず、基板1上にITO膜を500オング
ストロ−ム程度スパッタリングにより着膜し、ゲ−ト電
極9となるようフォトリソエッチングを用いてパタ−ニ
ングする。そして、実施例1の場合と同様の方法によ
り、窒化シリコンから成るゲ−ト絶縁層3、導電性の低
いITO膜から成る半導体活性層8、窒化シリコンから
成るチャネル保護層5を順次積層して所定形状にパタ−
ニングする。First, an ITO film is deposited on the substrate 1 by sputtering to have a thickness of about 500 Å, and is patterned by photolithography to form the gate electrode 9. Then, the gate insulating layer 3 made of silicon nitride, the semiconductor active layer 8 made of an ITO film having low conductivity, and the channel protective layer 5 made of silicon nitride are sequentially laminated in the same manner as in the first embodiment. Pattern in a predetermined shape
To learn.
【0026】その後、透明電極であるソ−ス電極11及
びドレイン電極10として用いられるITO膜を150
0オングストロ−ム程度にスパッタリング法により着膜
し、フォトリソエッチングを用いて所定の形状にパタ−
ニングし、実施例2の透明薄膜トランジスタが作製され
る。After that, an ITO film used as the source electrode 11 and the drain electrode 10 which are transparent electrodes is formed by 150.
A film is deposited to a thickness of about 0 Å by a sputtering method and patterned into a predetermined shape by photolithography etching.
The transparent thin film transistor of Example 2 is manufactured.
【0027】実施例2の透明薄膜トランジスタによれ
ば、ソ−ス電極11及びドレイン電極10は透明電極で
あるので、図3に示す透明薄膜トランジスタを光電変換
素子又は発光素子上部に一体的に形成するようにすれ
ば、光電変換素子への入射光量を増大させ又は発光素子
からの発光量を増大させ、開口率を上げることができる
効果がある。According to the transparent thin film transistor of the second embodiment, since the source electrode 11 and the drain electrode 10 are transparent electrodes, the transparent thin film transistor shown in FIG. 3 may be integrally formed on the photoelectric conversion element or the light emitting element. In this case, the amount of light incident on the photoelectric conversion element or the amount of light emitted from the light emitting element can be increased, and the aperture ratio can be increased.
【0028】次に、実施例3として透明薄膜トランジス
タを光電変換素子上部に一体的に積層した積層型光電変
換装置について図4を使って説明する。図4は、積層型
光電変換装置の断面説明図である。Next, as a third embodiment, a laminated type photoelectric conversion device in which a transparent thin film transistor is integrally laminated on the photoelectric conversion element will be described with reference to FIG. FIG. 4 is a cross-sectional explanatory diagram of the stacked photoelectric conversion device.
【0029】実施例3の積層型光電変換装置における光
電変換素子部分は、ガラス等の透明絶縁性の基板1上に
積層されたCr等の共通電極12と、共通電極12上に
形成された水素化アモルファスシリコン(a−Si:
H)等の光電変換層13と、光電変換層13上部に形成
されたITO等の上部透明電極14とが順次積層され、
更に、上部透明電極14上部には、ポリイミド等の層間
絶縁膜15が全体を覆うよう形成され、ドレイン電極1
1が接続するためのコンタクトホ−ルが設けられてい
る。The photoelectric conversion element portion in the laminated photoelectric conversion device of Example 3 has a common electrode 12 made of Cr or the like laminated on a transparent insulating substrate 1 made of glass or the like, and hydrogen formed on the common electrode 12. Amorphous silicon (a-Si:
H) or the like and a photoelectric conversion layer 13 and the upper transparent electrode 14 such as ITO formed on the photoelectric conversion layer 13 are sequentially laminated,
Further, an interlayer insulating film 15 made of polyimide or the like is formed on the upper transparent electrode 14 so as to entirely cover the drain electrode 1.
1 is provided with a contact hole for connection.
【0030】そして、実施例3の積層型光電変換装置に
おける透明薄膜トランジスタ(TFT)部分は、ITO
等の透明電極であるドレイン電極10及びソ−ス電極1
1が層間絶縁膜15上部に形成されており、ドレイン電
極10は上記コンタクトホ−ルを介して上部透明電極1
4に接続するようになっている。そして、ドレイン電極
10及びソ−ス電極11上部にはTFT部分の半導体活
性層8となるITO膜が形成され、更にゲ−ト絶縁層3
が半導体活性層8を覆い、ゲ−ト絶縁層3上にITO等
の透明電極であるゲ−ト電極9が所定の形状で形成され
ている。尚、実施例3の積層型光電変換装置では、光は
TFT部分のゲ−ト電極9側から入射するようになって
いる。The transparent thin film transistor (TFT) portion in the stacked photoelectric conversion device of Example 3 is made of ITO.
Drain electrode 10 and source electrode 1 which are transparent electrodes such as
1 is formed on the interlayer insulating film 15, and the drain electrode 10 is formed on the upper transparent electrode 1 through the contact hole.
It is designed to be connected to 4. Then, an ITO film to be the semiconductor active layer 8 of the TFT portion is formed on the drain electrode 10 and the source electrode 11, and further, the gate insulating layer 3 is formed.
Covers the semiconductor active layer 8 and a gate electrode 9 which is a transparent electrode such as ITO is formed in a predetermined shape on the gate insulating layer 3. In the stacked photoelectric conversion device of Example 3, light is incident from the gate electrode 9 side of the TFT portion.
【0031】次に、実施例3の積層型光電変換装置の製
造方法について図4を使って説明する。ガラス基板1上
に光電変換素子の共通電極12として、Crを1500
オングストロ−ム程度スパッタリングにより着膜し、フ
ォトリソエッチングを用いてパタ−ニングする。次に、
光電変換層13として、a−Si:HをプラズマCVD
で1.3μm着膜する。そして、上部透明電極14とし
てITO膜をスパッタリングにより、600オングスト
ロ−ム程度着膜し、上部透明電極14と光電変換層13
をパタ−ニングして光電変換素子部分を作成する。Next, a method of manufacturing the stacked photoelectric conversion device of the third embodiment will be described with reference to FIG. 1,500 Cr is used as the common electrode 12 of the photoelectric conversion element on the glass substrate 1.
A film is formed by sputtering with a thickness of about angstrom and patterned by using photolithography etching. next,
Plasma CVD of a-Si: H is used as the photoelectric conversion layer 13.
To deposit 1.3 μm. Then, an ITO film is deposited as the upper transparent electrode 14 by sputtering to a thickness of about 600 Å, and the upper transparent electrode 14 and the photoelectric conversion layer 13 are deposited.
To produce a photoelectric conversion element portion.
【0032】そして、ポリイミドを層間絶縁膜15とし
て所定の形状に形成し、フォトリソエッチングによりコ
ンタクトホ−ルを開ける。そして、ITO膜を1500
オングストロ−ム程度スパッタリングにより着膜し、フ
ォトリソエッチングを用いて所定の形状にパタ−ニング
して透明電極であるドレイン電極10及びソ−ス電極1
1を作成する。Then, polyimide is formed into a predetermined shape as the interlayer insulating film 15, and the contact hole is opened by photolithography. Then, the ITO film is 1500
A film is formed by sputtering to a thickness of about angstrom, and is patterned into a predetermined shape using photolithography etching. The drain electrode 10 and the source electrode 1 are transparent electrodes.
Create 1.
【0033】更に、半導体活性層8となるITO膜中の
酸素濃度を実施例1で説明したように調整し、スパッタ
リングにより500オングストロ−ム程度着膜する。Further, the oxygen concentration in the ITO film which becomes the semiconductor active layer 8 is adjusted as described in Example 1, and the film is deposited by sputtering to about 500 angstroms.
【0034】次に、ゲ−ト絶縁層3となる窒化シリコン
をプラズマCVD法で2500オングストロ−ム程度着
膜する。透明電極であるゲ−ト電極9となるITO膜を
1500オングストロ−ム程度スパッタリングにより着
膜し、フォトリソエッチングを用いてパタ−ニングする
ことで実施例3の積層型光電変換装置が作製される。Next, silicon nitride to be the gate insulating layer 3 is deposited by plasma CVD to a thickness of about 2500 angstroms. An ITO film to be the gate electrode 9 which is a transparent electrode is deposited by sputtering with a thickness of about 1500 angstrom, and patterning is performed using photolithographic etching, whereby the laminated photoelectric conversion device of Example 3 is manufactured.
【0035】実施例3の積層型光電変換装置によれば、
ゲ−ト電極9とソ−ス電極11及びドレイン電極10が
従来の金属電極からTFTの透明電極に代えられてお
り、また半導体活性層8も導電性の低いITO膜で作成
されているので、光電変換素子上部にTFTが形成され
ても光電変換素子の受光領域が制限されることがなく、
積層型光電変換装置の微細化による開口率の低下を防ぐ
ことができ、入射光を効率よく利用できる効果がある。According to the stacked photoelectric conversion device of Example 3,
Since the gate electrode 9, the source electrode 11 and the drain electrode 10 are replaced with the transparent electrodes of the TFT from the conventional metal electrodes, and the semiconductor active layer 8 is also made of an ITO film having low conductivity, Even if the TFT is formed on the photoelectric conversion element, the light receiving area of the photoelectric conversion element is not limited,
It is possible to prevent a decrease in aperture ratio due to miniaturization of the stacked photoelectric conversion device and to effectively use incident light.
【0036】[0036]
【発明の効果】請求項1記載の発明によれば、半導体層
の伝導帯と価電子帯とのエネルギバンドギャップが3e
V以上で、半導体層を透光性膜とした薄膜トランジスタ
としているので、光が透過した場合でも導電性が変化し
にくくなり、素子特性を向上できる効果がある。According to the invention described in claim 1, the energy band gap between the conduction band and the valence band of the semiconductor layer is 3e.
Since it is a thin film transistor in which the semiconductor layer has a light-transmissive film at a voltage of V or more, the conductivity is unlikely to change even when light is transmitted, and there is an effect that device characteristics can be improved.
【0037】請求項2記載の発明によれば、半導体層の
キャリア濃度が1018個・cm-3以下で、かつ半導体層
を透光性膜としているので、抵抗率が高くなり、光が透
過した場合でも導電性が変化しにくい薄膜トランジスタ
とすることができ、素子特性を向上できる効果がある。According to the invention described in claim 2, since the carrier concentration of the semiconductor layer is 10 18 · cm −3 or less and the semiconductor layer is a light-transmitting film, the resistivity is high and the light is transmitted. Even in such a case, it is possible to obtain a thin film transistor whose conductivity does not easily change, and it is possible to improve the device characteristics.
【図1】 本発明の一実施例に係る薄膜トランジスタの
断面説明図である。FIG. 1 is a cross-sectional explanatory diagram of a thin film transistor according to an embodiment of the present invention.
【図2】 ITO膜の抵抗率のスパッタ時の酸素濃度依
存度を示す図である。FIG. 2 is a diagram showing the oxygen concentration dependence of the resistivity of an ITO film during sputtering.
【図3】 別の実施例(実施例2)に係る透明薄膜トラ
ンジスタの断面説明図である。FIG. 3 is a cross-sectional explanatory diagram of a transparent thin film transistor according to another example (Example 2).
【図4】 別の実施例(実施例3)に係る積層型光電変
換装置の断面説明図である。FIG. 4 is a cross-sectional explanatory view of a stacked photoelectric conversion device according to another example (Example 3).
【図5】 従来の薄膜トランジスタの断面説明図であ
る。FIG. 5 is a cross-sectional explanatory diagram of a conventional thin film transistor.
【図6】 従来の積層型光電変換装置の平面説明図であ
る。FIG. 6 is a plan view of a conventional stacked photoelectric conversion device.
1,20…基板、 2,21…ゲ−ト電極、 3,22
…ゲ−ト絶縁層、 5,24…チャネル保護層、 6,
27…ドレイン電極、 7,26…ソ−ス電極、 8…
半導体活性層(ITO)、 9…ゲ−ト電極(IT
O)、 10…ドレイン電極(ITO)、 11…ソ−
ス電極(ITO)、 12…共通電極、 13…光電変
換層、 14…上部透明電極、 15…層間絶縁膜、
23…半導体活性層(a−Si)、 25…オ−ミック
コンタクト層、 28…遮光層、 29…層間絶縁層、
30…配線層1, 20 ... Substrate, 2, 21 ... Gate electrode, 3, 22
... Gate insulating layer, 5, 24 ... Channel protective layer, 6,
27 ... Drain electrode, 7, 26 ... Source electrode, 8 ...
Semiconductor active layer (ITO), 9 ... Gate electrode (IT
O), 10 ... Drain electrode (ITO), 11 ...
Electrode (ITO), 12 ... common electrode, 13 ... photoelectric conversion layer, 14 ... upper transparent electrode, 15 ... interlayer insulating film,
23 ... Semiconductor active layer (a-Si), 25 ... Ohmic contact layer, 28 ... Light-shielding layer, 29 ... Interlayer insulating layer,
30 ... Wiring layer
Claims (2)
とドレイン電極と半導体層とを有する薄膜トランジスタ
において、前記半導体層の伝導帯と価電子帯とのエネル
ギバンドギャップが3eV以上で、前記半導体層を透光
性膜としたことを特徴とする薄膜トランジスタ。1. A thin film transistor having a gate electrode, a gate insulating film, a source electrode, a drain electrode, and a semiconductor layer, wherein the energy band gap between the conduction band and the valence band of the semiconductor layer is 3 eV or more, A thin film transistor, wherein the semiconductor layer is a translucent film.
とドレイン電極と半導体層とを有する薄膜トランジスタ
において、前記半導体層のキャリア濃度が1018個・c
m-3以下で、かつ前記半導体層を透光性膜としたことを
特徴とする薄膜トランジスタ。2. A thin film transistor having a gate electrode, a gate insulating film, a source electrode, a drain electrode and a semiconductor layer, wherein the semiconductor layer has a carrier concentration of 10 18 .c.
A thin film transistor having a thickness of m −3 or less and the semiconductor layer being a transparent film.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4081483A JPH05251705A (en) | 1992-03-04 | 1992-03-04 | Thin-film transistor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4081483A JPH05251705A (en) | 1992-03-04 | 1992-03-04 | Thin-film transistor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH05251705A true JPH05251705A (en) | 1993-09-28 |
Family
ID=13747652
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4081483A Pending JPH05251705A (en) | 1992-03-04 | 1992-03-04 | Thin-film transistor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH05251705A (en) |
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US8860485B2 (en) | 2009-11-20 | 2014-10-14 | Semiconductor Energy Laboratory Co., Ltd. | Nonvolatile latch circuit and logic circuit, and semiconductor device using the same |
US8860023B2 (en) | 2012-05-01 | 2014-10-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8861288B2 (en) | 2011-12-23 | 2014-10-14 | Semiconductor Energy Laboratory Co., Ltd. | Level-shift circuit and semiconductor integrated circuit |
US8866233B2 (en) | 2010-01-15 | 2014-10-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8866984B2 (en) | 2010-01-24 | 2014-10-21 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
US8866138B2 (en) | 2009-12-04 | 2014-10-21 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device including the same |
US8865534B2 (en) | 2010-04-23 | 2014-10-21 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8866510B2 (en) | 2012-05-02 | 2014-10-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8865555B2 (en) | 2011-01-26 | 2014-10-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8872174B2 (en) | 2012-06-01 | 2014-10-28 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device |
US8871565B2 (en) | 2010-09-13 | 2014-10-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8873308B2 (en) | 2012-06-29 | 2014-10-28 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing circuit |
US8872179B2 (en) | 2011-11-30 | 2014-10-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8872171B2 (en) | 2009-05-29 | 2014-10-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8872120B2 (en) | 2012-08-23 | 2014-10-28 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and method for driving the same |
US8871304B2 (en) | 2010-11-02 | 2014-10-28 | Ube Industries, Ltd. | (Amide amino alkane) metal compound, method of manufacturing metal-containing thin film using said metal compound |
US8872175B2 (en) | 2009-03-06 | 2014-10-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8878270B2 (en) | 2011-04-15 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US8879011B2 (en) | 2009-08-27 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
US8878177B2 (en) | 2011-11-11 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US8878174B2 (en) | 2011-04-15 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor element, memory circuit, integrated circuit, and driving method of the integrated circuit |
US8878172B2 (en) | 2008-10-24 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor, thin film transistor, and display device |
US8878173B2 (en) | 2010-07-02 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor and metal oxide |
US8879010B2 (en) | 2010-01-24 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US8878178B2 (en) | 2008-10-24 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8878288B2 (en) | 2011-04-22 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8878574B2 (en) | 2012-08-10 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving semiconductor device |
US8878180B2 (en) | 2010-02-05 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8878175B2 (en) | 2008-12-25 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8877569B2 (en) | 2009-02-06 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing thin film transistor with oxide semiconductor using sputtering method |
US8884282B2 (en) | 2010-04-02 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8884651B2 (en) | 2009-10-16 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit and semiconductor device |
US8883556B2 (en) | 2010-12-28 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8885437B2 (en) | 2011-12-02 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Storage device and driving method thereof |
US8884283B2 (en) | 2010-06-04 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd | Memory semiconductor device having aligned side surfaces |
US8884284B2 (en) | 2011-12-23 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8884302B2 (en) | 2010-09-15 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US8884294B2 (en) | 2010-06-11 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8883554B2 (en) | 2008-12-19 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device using an oxide semiconductor |
US8885115B2 (en) | 2009-08-07 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device wherein each of a first oxide semiconductor layer and a second oxide semiconductor layer includes a portion that is in an oxygen-excess state and is in contact with an insulating layer |
US8883555B2 (en) | 2010-08-25 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Electronic device, manufacturing method of electronic device, and sputtering target |
US8884470B2 (en) | 2010-09-13 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8884287B2 (en) | 2009-01-16 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8890166B2 (en) | 2009-09-04 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device and method for manufacturing the same |
US8891281B2 (en) | 2011-02-17 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Programmable LSI |
US8890146B2 (en) | 2009-12-11 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US8889496B2 (en) | 2009-09-04 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US8890159B2 (en) | 2012-08-03 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor stacked film and semiconductor device |
US8892158B2 (en) | 2009-11-20 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8890150B2 (en) | 2011-01-27 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8890139B2 (en) | 2011-10-19 | 2014-11-18 | Samsung Display Co., Ltd. | Solution composition for passivation layer, thin film transistor array panel, and manufacturing method for thin film transistor array panel |
US8890555B2 (en) | 2010-04-28 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Method for measuring transistor |
US8891285B2 (en) | 2011-06-10 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US8890158B2 (en) | 2009-12-04 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8891286B2 (en) | 2010-12-03 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Integrated circuit, method for driving the same, and semiconductor device |
US8890152B2 (en) | 2011-06-17 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8890781B2 (en) | 2009-10-21 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device including display device |
US8889477B2 (en) | 2011-06-08 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming thin film utilizing sputtering target |
US8896042B2 (en) | 2009-10-30 | 2014-11-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor |
US8895377B2 (en) | 2010-04-23 | 2014-11-25 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8897049B2 (en) | 2011-05-13 | 2014-11-25 | Semiconductor Energy Laboratories Co., Ltd. | Semiconductor device and memory device including semiconductor device |
US8895375B2 (en) | 2010-06-01 | 2014-11-25 | Semiconductor Energy Laboratory Co., Ltd. | Field effect transistor and method for manufacturing the same |
US8895976B2 (en) | 2010-06-25 | 2014-11-25 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and semiconductor device |
US8894825B2 (en) | 2010-12-17 | 2014-11-25 | Semiconductor Energy Laboratory Co., Ltd. | Sputtering target, method for manufacturing the same, manufacturing semiconductor device |
US8896046B2 (en) | 2010-11-05 | 2014-11-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8896345B2 (en) | 2012-04-30 | 2014-11-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8901558B2 (en) | 2012-11-15 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor having multiple gates |
US8901556B2 (en) | 2012-04-06 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Insulating film, method for manufacturing semiconductor device, and semiconductor device |
US8900917B2 (en) | 2008-08-08 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8900362B2 (en) | 2010-03-12 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of gallium oxide single crystal |
US8901552B2 (en) | 2010-09-13 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Top gate thin film transistor with multiple oxide semiconductor layers |
US8902640B2 (en) | 2010-08-06 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US8901559B2 (en) | 2009-12-11 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having inverter circuit with terminal electrically connected to transistor that includes oxide semiconductor material |
US8901557B2 (en) | 2012-06-15 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8902209B2 (en) | 2010-09-10 | 2014-12-02 | Semiconductor Energy Laboatory Co., Ltd. | Display device |
US8902637B2 (en) | 2010-11-08 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device comprising inverting amplifier circuit and driving method thereof |
US8901554B2 (en) | 2011-06-17 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including channel formation region including oxide semiconductor |
US8900916B2 (en) | 2009-07-10 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device including oxide semiconductor film |
US8906756B2 (en) | 2010-05-21 | 2014-12-09 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8906737B2 (en) | 2010-06-18 | 2014-12-09 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8907348B2 (en) | 2008-11-21 | 2014-12-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8907392B2 (en) | 2011-12-22 | 2014-12-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device including stacked sub memory cells |
US8907335B2 (en) | 2008-10-03 | 2014-12-09 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
US8912016B2 (en) | 2010-06-25 | 2014-12-16 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method and test method of semiconductor device |
US8912541B2 (en) | 2009-08-07 | 2014-12-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8912080B2 (en) | 2011-01-12 | 2014-12-16 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of the semiconductor device |
US8912985B2 (en) | 2011-05-12 | 2014-12-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving display device |
US8912040B2 (en) | 2008-10-22 | 2014-12-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8912596B2 (en) | 2011-07-15 | 2014-12-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8913050B2 (en) | 2007-07-25 | 2014-12-16 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device and electronic device having the same |
US8912027B2 (en) | 2012-07-24 | 2014-12-16 | Samsung Display Co., Ltd | Display device and method of manufacturing the same |
US8912544B2 (en) | 2010-09-13 | 2014-12-16 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting display device and method for manufacturing the same |
US8916865B2 (en) | 2010-06-18 | 2014-12-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8916868B2 (en) | 2011-04-22 | 2014-12-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US8916867B2 (en) | 2011-01-20 | 2014-12-23 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor element and semiconductor device |
US8916866B2 (en) | 2010-11-03 | 2014-12-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8916424B2 (en) | 2012-02-07 | 2014-12-23 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8916869B2 (en) | 2009-11-06 | 2014-12-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including an oxide semiconductor layer |
US8921853B2 (en) | 2012-11-16 | 2014-12-30 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor having oxide semiconductor layer |
US8923076B2 (en) | 2011-03-31 | 2014-12-30 | Semiconductor Energy Laboratory Co., Ltd. | Memory circuit, memory unit, and signal processing circuit |
US8923471B2 (en) | 2010-03-02 | 2014-12-30 | Semiconductor Energy Laboratory Co., Ltd. | Pulse signal output circuit and shift register |
US8921849B2 (en) | 2011-09-15 | 2014-12-30 | Semiconductor Energy Laboratory Co., Ltd. | Insulated-gate field-effect transistor |
US8922182B2 (en) | 2009-12-04 | 2014-12-30 | Semiconductor Energy Laboratory Co., Ltd. | DC converter circuit and power supply circuit |
US8922537B2 (en) | 2009-12-18 | 2014-12-30 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving liquid crystal display device |
US8921948B2 (en) | 2011-01-12 | 2014-12-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8929128B2 (en) | 2012-05-17 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Storage device and writing method of the same |
US8929161B2 (en) | 2011-04-21 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing circuit |
US8928053B2 (en) | 2010-08-27 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Input/output device |
US8927985B2 (en) | 2012-09-20 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8927982B2 (en) | 2011-03-18 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film, semiconductor device, and manufacturing method of semiconductor device |
US8928466B2 (en) | 2010-08-04 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8928644B2 (en) | 2010-02-19 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for driving display device |
US8927329B2 (en) | 2011-03-30 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing oxide semiconductor device with improved electronic properties |
US8927990B2 (en) | 2011-10-21 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8927349B2 (en) | 2009-12-04 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8928645B2 (en) | 2010-05-21 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US8927981B2 (en) | 2009-03-30 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8927351B2 (en) | 2009-11-06 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8932903B2 (en) | 2012-05-10 | 2015-01-13 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming wiring, semiconductor device, and method for manufacturing semiconductor device |
US8932913B2 (en) | 2011-04-22 | 2015-01-13 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US8937306B2 (en) | 2009-07-31 | 2015-01-20 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor |
US8937304B2 (en) | 2011-01-28 | 2015-01-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US8936963B2 (en) | 2009-03-13 | 2015-01-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the semiconductor device |
US8937020B2 (en) | 2009-11-13 | 2015-01-20 | Semiconductor Energy Laboratory Co., Ltd. | Sputtering target and manufacturing method thereof, and transistor |
US8937307B2 (en) | 2012-08-10 | 2015-01-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8937305B2 (en) | 2011-10-24 | 2015-01-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8936965B2 (en) | 2010-11-26 | 2015-01-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8941107B2 (en) | 2009-10-30 | 2015-01-27 | Semiconductor Energy Laboratory Co., Ltd. | Power diode, rectifier, and semiconductor device including the same |
US8941127B2 (en) | 2010-03-31 | 2015-01-27 | Semiconductor Energy Laboratory Co., Ltd. | Field-sequential display device |
US8941958B2 (en) | 2011-04-22 | 2015-01-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8941790B2 (en) | 2010-05-21 | 2015-01-27 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US8941112B2 (en) | 2010-12-28 | 2015-01-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8941113B2 (en) | 2012-03-30 | 2015-01-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor element, semiconductor device, and manufacturing method of semiconductor element |
US8941114B2 (en) | 2008-09-12 | 2015-01-27 | Semiconductor Energy Laboratory Co., Ltd. | Display device including protective circuit |
US8946812B2 (en) | 2011-07-21 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8945981B2 (en) | 2008-07-31 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8946709B2 (en) | 2010-03-19 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8946066B2 (en) | 2011-05-11 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device |
US8946097B2 (en) | 2009-12-08 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8946703B2 (en) | 2008-08-08 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8947910B2 (en) | 2011-05-11 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising inverters and capacitor, and driving method thereof |
US8945982B2 (en) | 2010-04-23 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US8947337B2 (en) | 2010-02-11 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US8947153B2 (en) | 2009-11-13 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Electronic circuit comprising thin-film transistors |
US8946702B2 (en) | 2012-04-13 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8947155B2 (en) | 2012-04-06 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Solid-state relay |
US8947406B2 (en) | 2010-01-20 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Display method of display device |
US8946704B2 (en) | 2012-02-02 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8946790B2 (en) | 2011-06-10 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing the same |
US8946700B2 (en) | 2009-10-21 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method for the same |
US8947158B2 (en) | 2012-09-03 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US8947121B2 (en) | 2013-03-12 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
US8952380B2 (en) | 2011-10-27 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US8952723B2 (en) | 2013-02-13 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device and semiconductor device |
US8952379B2 (en) | 2011-09-16 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8952378B2 (en) | 2009-07-17 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device |
US8952995B2 (en) | 2009-09-16 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Driving method of display device and display device |
US8953112B2 (en) | 2010-09-15 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US8952381B2 (en) | 2012-06-29 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8952722B2 (en) | 2012-10-17 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device and method for driving programmable logic device |
US8952490B2 (en) | 2009-09-30 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Redox capacitor and manufacturing method thereof |
US8951899B2 (en) | 2011-11-25 | 2015-02-10 | Semiconductor Energy Laboratory | Method for manufacturing semiconductor device |
US8952728B2 (en) | 2010-08-27 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of driving semiconductor device |
US8952377B2 (en) | 2011-07-08 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8957881B2 (en) | 2010-01-20 | 2015-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US8956912B2 (en) | 2012-01-26 | 2015-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8958252B2 (en) | 2011-03-24 | 2015-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing circuit |
US8957411B2 (en) | 2009-09-04 | 2015-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device and method for manufacturing the same |
US8957462B2 (en) | 2010-12-09 | 2015-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising an N-type transistor with an N-type semiconductor containing nitrogen as a gate |
US8958231B2 (en) | 2011-06-09 | 2015-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Memory device including first to seventh transistors |
US8956929B2 (en) | 2011-11-30 | 2015-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8957468B2 (en) | 2010-11-05 | 2015-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Variable capacitor and liquid crystal display device |
US8958263B2 (en) | 2011-06-10 | 2015-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8957415B2 (en) | 2012-05-21 | 2015-02-17 | Samsung Display Co., Ltd. | Thin film transistor and thin film transistor array panel including the same |
US8956944B2 (en) | 2011-03-25 | 2015-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8963149B2 (en) | 2009-11-20 | 2015-02-24 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor |
US8963517B2 (en) | 2009-10-21 | 2015-02-24 | Semiconductor Energy Laboratory Co., Ltd. | Voltage regulator circuit comprising transistor which includes an oixide semiconductor |
US8964450B2 (en) | 2011-05-20 | 2015-02-24 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and signal processing circuit |
US8963148B2 (en) | 2012-11-15 | 2015-02-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8962386B2 (en) | 2011-11-25 | 2015-02-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8964085B2 (en) | 2010-03-08 | 2015-02-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8969867B2 (en) | 2012-01-18 | 2015-03-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8970251B2 (en) | 2012-05-02 | 2015-03-03 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
US8969144B2 (en) | 2010-09-13 | 2015-03-03 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8970999B2 (en) | 2011-06-29 | 2015-03-03 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, method of manufacturing the driver circuit, and display device including the driver circuit |
US8969182B2 (en) | 2011-04-27 | 2015-03-03 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US8969130B2 (en) | 2011-11-18 | 2015-03-03 | Semiconductor Energy Laboratory Co., Ltd. | Insulating film, formation method thereof, semiconductor device, and manufacturing method thereof |
US8975115B2 (en) | 2010-07-26 | 2015-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8975695B2 (en) | 2013-04-19 | 2015-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US8976207B2 (en) | 2010-02-19 | 2015-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device |
US8975680B2 (en) | 2011-02-17 | 2015-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device and method manufacturing semiconductor memory device |
US8975634B2 (en) | 2011-10-07 | 2015-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor film |
US8975930B2 (en) | 2012-08-10 | 2015-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving semiconductor device |
US8975917B2 (en) | 2012-03-01 | 2015-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
US8976155B2 (en) | 2010-03-08 | 2015-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US8980685B2 (en) | 2008-10-24 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing thin film transistor using multi-tone mask |
US8980665B2 (en) | 2008-11-07 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8981518B2 (en) | 2010-01-29 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8981372B2 (en) | 2012-09-13 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic appliance |
US8981376B2 (en) | 2012-08-02 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8981443B2 (en) | 2005-06-30 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device, and electronic appliance |
US8982607B2 (en) | 2011-09-30 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Memory element and signal processing circuit |
US8981367B2 (en) | 2011-12-01 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8981374B2 (en) | 2013-01-30 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8981370B2 (en) | 2012-03-08 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8982589B2 (en) | 2010-03-02 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Boosting circuit and RFID tag including boosting circuit |
US8987731B2 (en) | 2012-05-31 | 2015-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8987728B2 (en) | 2011-03-25 | 2015-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing semiconductor device |
US8988116B2 (en) | 2011-12-23 | 2015-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving semiconductor device |
US8987727B2 (en) | 2011-01-28 | 2015-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device and semiconductor device |
US8987730B2 (en) | 2012-02-03 | 2015-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8988152B2 (en) | 2012-02-29 | 2015-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8988623B2 (en) | 2009-10-30 | 2015-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8988625B2 (en) | 2011-11-11 | 2015-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
US8987822B2 (en) | 2009-02-20 | 2015-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor, method for manufacturing the same, and semiconductor device |
US8994019B2 (en) | 2011-08-05 | 2015-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8995174B2 (en) | 2010-08-06 | 2015-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor integrated circuit |
US8995218B2 (en) | 2012-03-07 | 2015-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8994891B2 (en) | 2012-05-16 | 2015-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and touch panel |
US8994400B2 (en) | 2009-12-11 | 2015-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Nonvolatile latch circuit and logic circuit, and semiconductor device using the same |
US8994003B2 (en) | 2010-09-22 | 2015-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Power-insulated-gate field-effect transistor |
US8994021B2 (en) | 2010-12-03 | 2015-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
US8994024B2 (en) | 2009-07-18 | 2015-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8993386B2 (en) | 2009-03-12 | 2015-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8995607B2 (en) | 2012-05-31 | 2015-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Pulse signal output circuit and shift register |
US9000816B2 (en) | 2011-05-20 | 2015-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Phase locked loop and semiconductor device using the same |
US9001563B2 (en) | 2011-04-29 | 2015-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US8999811B2 (en) | 2010-05-21 | 2015-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9000438B2 (en) | 2010-02-26 | 2015-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8999773B2 (en) | 2012-04-05 | 2015-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Processing method of stacked-layer film and manufacturing method of semiconductor device |
US8999750B2 (en) | 2008-12-05 | 2015-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9001566B2 (en) | 2009-11-06 | 2015-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving semiconductor device |
US9001959B2 (en) | 2011-08-29 | 2015-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8999751B2 (en) | 2009-10-09 | 2015-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Method for making oxide semiconductor device |
US9000431B2 (en) | 2008-10-24 | 2015-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9006733B2 (en) | 2012-01-26 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing thereof |
US9006635B2 (en) | 2012-09-12 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Photodetector circuit and semiconductor device |
US9007812B2 (en) | 2010-09-14 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Memory device comprising a cell array overlapping a driver circuit |
US9006729B2 (en) | 2009-11-13 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9007090B2 (en) | 2012-05-01 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Method of driving semiconductor device |
US9006965B2 (en) | 2008-07-10 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device and electronic device using the same |
US9007351B2 (en) | 2010-02-05 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9006736B2 (en) | 2013-07-12 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9006732B2 (en) | 2010-04-09 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9007092B2 (en) | 2013-03-22 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9006024B2 (en) | 2012-04-25 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9006025B2 (en) | 2009-12-25 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9007816B2 (en) | 2011-11-25 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Memory circuit and memory device |
US9006803B2 (en) | 2011-04-22 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing thereof |
US9006735B2 (en) | 2011-07-22 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Method for processing oxide semiconductor film and method for manufacturing semiconductor device |
US9007093B2 (en) | 2012-05-30 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
US9006046B2 (en) | 2010-04-16 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Deposition method and method for manufacturing semiconductor device |
US9007813B2 (en) | 2010-05-14 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9012993B2 (en) | 2011-07-22 | 2015-04-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9012904B2 (en) | 2011-03-25 | 2015-04-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9012918B2 (en) | 2009-03-27 | 2015-04-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor |
US9012913B2 (en) | 2012-01-10 | 2015-04-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9012908B2 (en) | 2010-03-26 | 2015-04-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with metal oxide film |
US9012905B2 (en) | 2011-04-08 | 2015-04-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including transistor comprising oxide semiconductor and method for manufacturing the same |
US9018624B2 (en) | 2012-09-13 | 2015-04-28 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic appliance |
US9019320B2 (en) | 2010-04-28 | 2015-04-28 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic appliance |
US9018629B2 (en) | 2011-10-13 | 2015-04-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9024313B2 (en) | 2009-07-31 | 2015-05-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9023684B2 (en) | 2011-03-04 | 2015-05-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9024317B2 (en) | 2010-12-24 | 2015-05-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor circuit, method for driving the same, storage device, register circuit, display device, and electronic device |
US9024248B2 (en) | 2010-02-12 | 2015-05-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device to include a first transistor with a silicon channel formation region and a second transistor with an oxide semiconductor channel formation region |
US9024669B2 (en) | 2011-01-05 | 2015-05-05 | Semiconductor Energy Laboratory Co., Ltd. | Storage element, storage device, and signal processing circuit |
US9030105B2 (en) | 2011-04-01 | 2015-05-12 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device |
US9029937B2 (en) | 2010-11-30 | 2015-05-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9029851B2 (en) | 2008-10-24 | 2015-05-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising an oxide semiconductor layer |
US9029852B2 (en) | 2011-09-29 | 2015-05-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9030232B2 (en) | 2012-04-13 | 2015-05-12 | Semiconductor Energy Laboratory Co., Ltd. | Isolator circuit and semiconductor device |
US9029191B2 (en) | 2009-09-24 | 2015-05-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9029863B2 (en) | 2012-04-20 | 2015-05-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9029929B2 (en) | 2011-05-19 | 2015-05-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device and manufacturing method thereof |
US9035304B2 (en) | 2011-09-13 | 2015-05-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9035301B2 (en) | 2013-06-19 | 2015-05-19 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device |
US9042161B2 (en) | 2010-09-13 | 2015-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Memory device |
US9040985B2 (en) | 2009-01-23 | 2015-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9040995B2 (en) | 2011-05-05 | 2015-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9040984B2 (en) | 2012-11-15 | 2015-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Transistor with ZrO or HfO gate insulator sandwiched between two SiO or AIO gate insulators over an oxide semiconductor film |
US9041202B2 (en) | 2008-05-16 | 2015-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
US9041442B2 (en) | 2012-05-09 | 2015-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving the same |
US9040989B2 (en) | 2009-12-08 | 2015-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9041449B2 (en) | 2011-04-29 | 2015-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor storage device |
US9040396B2 (en) | 2010-09-13 | 2015-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9040981B2 (en) | 2012-01-20 | 2015-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9040980B2 (en) | 2010-03-26 | 2015-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Transistor with an oxide semiconductor layer |
US9047836B2 (en) | 2009-12-24 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9048142B2 (en) | 2010-12-28 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9048265B2 (en) | 2012-05-31 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device comprising oxide semiconductor layer |
US9048094B2 (en) | 2009-09-24 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device comprising forming oxide semiconductor by sputtering |
US9048320B2 (en) | 2008-09-19 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Display device including oxide semiconductor layer |
US9048324B2 (en) | 2012-05-10 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9048105B2 (en) | 2011-05-20 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor integrated circuit |
US9048144B2 (en) | 2008-10-03 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9048788B2 (en) | 2011-05-13 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising a photoelectric conversion portion |
US9048130B2 (en) | 2011-01-26 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9047947B2 (en) | 2011-05-13 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including register components |
US9048325B2 (en) | 2010-02-26 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Display device having an oxide semiconductor transistor |
US9048825B2 (en) | 2011-05-20 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9048323B2 (en) | 2012-04-30 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9048321B2 (en) | 2011-12-02 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9048832B2 (en) | 2013-02-13 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device and semiconductor device |
US9046482B2 (en) | 2010-06-11 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Gas sensor and method for manufacturing the gas sensor |
US9054137B2 (en) | 2009-06-30 | 2015-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9054201B2 (en) | 2009-12-25 | 2015-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9053675B2 (en) | 2011-11-11 | 2015-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Signal line driver circuit and liquid crystal display device |
US9054203B2 (en) | 2008-11-13 | 2015-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9054200B2 (en) | 2012-04-13 | 2015-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9054205B2 (en) | 2010-11-05 | 2015-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9053983B2 (en) | 2011-09-29 | 2015-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9053969B2 (en) | 2009-12-28 | 2015-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9054678B2 (en) | 2012-07-06 | 2015-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9055245B2 (en) | 2011-09-22 | 2015-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Photodetector including difference data generation circuit and data input selection circuit |
US9054134B2 (en) | 2009-12-28 | 2015-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9058892B2 (en) | 2012-03-14 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and shift register |
US9059295B2 (en) | 2010-04-02 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor having an oxide semiconductor and metal oxide films |
US9059689B2 (en) | 2013-01-24 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including flip-flop and logic circuit |
US9057126B2 (en) | 2011-11-29 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing sputtering target and method for manufacturing semiconductor device |
US9059694B2 (en) | 2009-12-23 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9058047B2 (en) | 2010-08-26 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9059297B2 (en) | 2011-10-24 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9059219B2 (en) | 2012-06-27 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9059029B2 (en) | 2012-03-05 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US9057758B2 (en) | 2009-12-18 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for measuring current, method for inspecting semiconductor device, semiconductor device, and test element group |
US9059704B2 (en) | 2011-05-31 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
US9059047B2 (en) | 2010-04-09 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9064596B2 (en) | 2013-02-12 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9064898B2 (en) | 2010-03-26 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9064899B2 (en) | 2009-02-27 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9065438B2 (en) | 2013-06-18 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
US9064853B2 (en) | 2011-08-19 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9064907B2 (en) | 2011-12-20 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9064599B2 (en) | 2011-02-10 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Memory circuit |
US9064574B2 (en) | 2012-11-06 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9064967B2 (en) | 2009-12-04 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor element, semiconductor device, and method for manufacturing the same |
US9064966B2 (en) | 2012-12-28 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with oxide semiconductor |
US9064884B2 (en) | 2010-06-04 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having aligned side surfaces |
US9064473B2 (en) | 2010-05-12 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical display device and display method thereof |
US9064906B2 (en) | 2011-10-13 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9066035B2 (en) | 2010-03-12 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including photosensor and transistor having oxide semiconductor active layer |
US9070776B2 (en) | 2011-04-15 | 2015-06-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9070329B2 (en) | 2010-11-05 | 2015-06-30 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving the gate lines of a display device to eliminate deterioration |
US9070596B2 (en) | 2009-12-04 | 2015-06-30 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9070778B2 (en) | 2011-12-20 | 2015-06-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9077333B2 (en) | 2011-05-31 | 2015-07-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9076876B2 (en) | 2010-06-18 | 2015-07-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9076505B2 (en) | 2011-12-09 | 2015-07-07 | Semiconductor Energy Laboratory Co., Ltd. | Memory device |
US9076825B2 (en) | 2013-01-30 | 2015-07-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the semiconductor device |
US9076874B2 (en) | 2011-06-17 | 2015-07-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9076871B2 (en) | 2011-11-30 | 2015-07-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9076877B2 (en) | 2010-04-09 | 2015-07-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9076520B2 (en) | 2011-03-30 | 2015-07-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9082663B2 (en) | 2011-09-16 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9082670B2 (en) | 2011-09-09 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9082863B2 (en) | 2012-08-10 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9082861B2 (en) | 2011-11-11 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Transistor with oxide semiconductor channel having protective layer |
US9083335B2 (en) | 2011-08-24 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with switch and logic circuit |
US9083327B2 (en) | 2012-07-06 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of driving semiconductor device |
US9083334B2 (en) | 2008-10-31 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit |
US9082857B2 (en) | 2008-09-01 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising an oxide semiconductor layer |
US9082860B2 (en) | 2011-03-31 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9082858B2 (en) | 2010-02-19 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Transistor including an oxide semiconductor and display device using the same |
US9082688B2 (en) | 2008-10-03 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9082676B2 (en) | 2012-03-09 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving semiconductor device |
US9088245B2 (en) | 2010-02-19 | 2015-07-21 | Semiconductor Energy Laboratory Co., Ltd. | Demodulation circuit and RFID tag including the demodulation circuit |
US9087726B2 (en) | 2012-11-16 | 2015-07-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9087744B2 (en) | 2010-11-05 | 2015-07-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving transistor |
US9087745B2 (en) | 2008-07-31 | 2015-07-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9088269B2 (en) | 2013-03-14 | 2015-07-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9087908B2 (en) | 2011-10-14 | 2015-07-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9087489B2 (en) | 2009-12-18 | 2015-07-21 | Semiconductor Energy Laboratory Co., Ltd. | Display device including optical sensor and driving method thereof |
US9087700B2 (en) | 2012-03-14 | 2015-07-21 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film, transistor, and semiconductor device |
US9093538B2 (en) | 2011-04-08 | 2015-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9093262B2 (en) | 2009-11-20 | 2015-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9093328B2 (en) | 2009-11-06 | 2015-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having an oxide semiconductor with a crystalline region and manufacturing method thereof |
US9093539B2 (en) | 2011-05-13 | 2015-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9093988B2 (en) | 2012-08-10 | 2015-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving semiconductor device |
US9093544B2 (en) | 2009-11-06 | 2015-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9094007B2 (en) | 2013-05-14 | 2015-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing device |
US9093136B2 (en) | 2010-12-28 | 2015-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing circuit comprising memory cell |
US9099562B2 (en) | 2005-09-29 | 2015-08-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9099498B2 (en) | 2010-12-28 | 2015-08-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9099303B2 (en) | 2011-12-22 | 2015-08-04 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9099560B2 (en) | 2012-01-20 | 2015-08-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9097925B2 (en) | 2012-07-20 | 2015-08-04 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9099885B2 (en) | 2011-06-17 | 2015-08-04 | Semiconductor Energy Laboratory Co., Ltd. | Wireless power feeding system |
US9099437B2 (en) | 2011-03-08 | 2015-08-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9105735B2 (en) | 2009-09-04 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and display device |
US9105734B2 (en) | 2011-10-27 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9105659B2 (en) | 2008-08-08 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9105251B2 (en) | 2010-01-20 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving display device |
US9105609B2 (en) | 2009-10-30 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Oxide-based semiconductor non-linear element having gate electrode electrically connected to source or drain electrode |
US9105608B2 (en) | 2011-10-07 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9105256B2 (en) | 2009-12-18 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and driving method thereof |
US9105658B2 (en) | 2013-01-30 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Method for processing oxide semiconductor layer |
US9104395B2 (en) | 2012-05-02 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Processor and driving method thereof |
US9105749B2 (en) | 2011-05-13 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9105353B2 (en) | 2011-05-20 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and semiconductor device including the memory device |
US9103724B2 (en) | 2010-11-30 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising photosensor comprising oxide semiconductor, method for driving the semiconductor device, method for driving the photosensor, and electronic device |
US9112043B2 (en) | 2008-12-25 | 2015-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
US9112038B2 (en) | 2008-11-13 | 2015-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9112037B2 (en) | 2012-02-09 | 2015-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9112036B2 (en) | 2011-06-10 | 2015-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9112460B2 (en) | 2013-04-05 | 2015-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing device |
US9111795B2 (en) | 2011-04-29 | 2015-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with capacitor connected to memory element through oxide semiconductor film |
US9112041B2 (en) | 2009-10-30 | 2015-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Transistor having an oxide semiconductor film |
US9117916B2 (en) | 2011-10-13 | 2015-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor film |
US9117920B2 (en) | 2011-05-19 | 2015-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device using oxide semiconductor |
US9117409B2 (en) | 2012-03-14 | 2015-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting display device with transistor and capacitor discharging gate of driving electrode and oxide semiconductor layer |
US9117713B2 (en) | 2009-11-06 | 2015-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising a gate of an amplifier transistor under an insulating layer and a transfer transistor channel over the insulating layer the amplifier transistor and transfer transistor overlapping |
US9117701B2 (en) | 2011-05-06 | 2015-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9123432B2 (en) | 2010-08-06 | 2015-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving semiconductor device |
US9123632B2 (en) | 2011-09-30 | 2015-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9123574B2 (en) | 2009-12-18 | 2015-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9123751B2 (en) | 2008-10-24 | 2015-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9123692B2 (en) | 2011-11-10 | 2015-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing semiconductor device |
US9122896B2 (en) | 2011-05-20 | 2015-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Adder |
US9130047B2 (en) | 2013-07-31 | 2015-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9130044B2 (en) | 2011-07-01 | 2015-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9129997B2 (en) | 2010-12-28 | 2015-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9130048B2 (en) | 2011-12-01 | 2015-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a thin film semiconductor device |
US9131171B2 (en) | 2012-02-29 | 2015-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Image sensor, camera, surveillance system, and method for driving the image sensor |
US9130041B2 (en) | 2009-09-04 | 2015-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9129667B2 (en) | 2012-05-25 | 2015-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9130067B2 (en) | 2008-10-08 | 2015-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9130367B2 (en) | 2012-11-28 | 2015-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9130046B2 (en) | 2009-07-03 | 2015-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Display device including transistor and manufacturing method thereof |
US9130043B2 (en) | 2009-10-01 | 2015-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9129703B2 (en) | 2010-08-16 | 2015-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving semiconductor memory device |
US9135880B2 (en) | 2010-08-16 | 2015-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Control circuit of liquid crystal display device, liquid crystal display device, and electronic device including liquid crystal display device |
US9136389B2 (en) | 2008-10-24 | 2015-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor, thin film transistor, and display device |
US9136390B2 (en) | 2008-12-26 | 2015-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9136297B2 (en) | 2011-08-19 | 2015-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving semiconductor device |
US9136391B2 (en) | 2010-01-22 | 2015-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9135958B2 (en) | 2009-11-20 | 2015-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9136280B2 (en) | 2010-01-15 | 2015-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9135182B2 (en) | 2012-06-01 | 2015-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Central processing unit and driving method thereof |
US9136388B2 (en) | 2011-07-22 | 2015-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9135877B2 (en) | 2010-04-09 | 2015-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for driving the same |
US9142652B2 (en) | 2012-10-12 | 2015-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device and manufacturing apparatus of semiconductor device |
US9142681B2 (en) | 2011-09-26 | 2015-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9142549B2 (en) | 2010-03-19 | 2015-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US9142593B2 (en) | 2013-08-30 | 2015-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9142569B2 (en) | 2010-06-18 | 2015-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Photosensor, semiconductor device including photosensor, and light measurement method using photosensor |
US9142320B2 (en) | 2011-04-08 | 2015-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Memory element and signal processing circuit |
US9142568B2 (en) | 2010-09-10 | 2015-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing light-emitting display device |
US9142570B2 (en) | 2009-07-31 | 2015-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9142679B2 (en) | 2011-12-02 | 2015-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device using oxide semiconductor |
US9142648B2 (en) | 2010-05-21 | 2015-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9147706B2 (en) | 2012-05-29 | 2015-09-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having sensor circuit having amplifier circuit |
US9147768B2 (en) | 2010-04-02 | 2015-09-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having an oxide semiconductor and a metal oxide film |
US9147462B2 (en) | 2010-01-20 | 2015-09-29 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing circuit and method for driving the same |
US9153436B2 (en) | 2012-10-17 | 2015-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9153699B2 (en) | 2012-06-15 | 2015-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor with multiple oxide semiconductor layers |
US9153649B2 (en) | 2012-11-30 | 2015-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for evaluating semiconductor device |
US9154136B2 (en) | 2013-03-25 | 2015-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device and semiconductor device |
US9153338B2 (en) | 2009-12-04 | 2015-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US9153650B2 (en) | 2013-03-19 | 2015-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor |
US9153702B2 (en) | 2009-09-24 | 2015-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, power circuit, and manufacturing method of semiconductor device |
US9153313B2 (en) | 2013-03-26 | 2015-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Normally-off, power-gated memory circuit with two data retention stages for reducing overhead power |
US9153589B2 (en) | 2009-12-28 | 2015-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9159840B2 (en) | 2011-09-22 | 2015-10-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9159838B2 (en) | 2012-11-16 | 2015-10-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9160291B2 (en) | 2011-04-28 | 2015-10-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor circuit having switching element, capacitor and operational amplifier circuit |
US9159837B2 (en) | 2012-05-10 | 2015-10-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9159806B2 (en) | 2011-09-29 | 2015-10-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9166061B2 (en) | 2011-12-23 | 2015-10-20 | Semiconcductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9165632B2 (en) | 2013-01-24 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and semiconductor device |
US9165951B2 (en) | 2013-02-28 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9166019B2 (en) | 2011-10-13 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing the same |
US9166026B2 (en) | 2011-01-12 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9166021B2 (en) | 2012-10-17 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9167234B2 (en) | 2011-02-14 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9166060B2 (en) | 2013-06-05 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9166192B2 (en) | 2012-08-28 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Display device having plural sealants at periphery of pixel portion |
US9165942B2 (en) | 2011-04-29 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
US9166055B2 (en) | 2011-06-17 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9171840B2 (en) | 2011-05-26 | 2015-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9171938B2 (en) | 2009-09-24 | 2015-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor element and method for manufacturing the same |
US9171957B2 (en) | 2012-01-26 | 2015-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9172370B2 (en) | 2012-12-06 | 2015-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9171630B2 (en) | 2013-03-14 | 2015-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving semiconductor device and semiconductor device |
US9171640B2 (en) | 2009-10-09 | 2015-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Shift register and display device |
US9172237B2 (en) | 2011-05-19 | 2015-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor integrated circuit |
US9171867B2 (en) | 2009-08-07 | 2015-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9172369B2 (en) | 2013-05-17 | 2015-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device and semiconductor device |
US9176571B2 (en) | 2012-03-02 | 2015-11-03 | Semiconductor Energy Laboratories Co., Ltd. | Microprocessor and method for driving microprocessor |
US9177855B2 (en) | 2009-10-09 | 2015-11-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9178419B2 (en) | 2010-04-16 | 2015-11-03 | Semiconductor Energy Laboratory Co., Ltd. | Power source circuit including transistor with oxide semiconductor |
US9184297B2 (en) | 2012-07-20 | 2015-11-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising a void portion in an insulation film and method for manufacturing a semiconductor device comprising a void portion in an insulating film |
US9184210B2 (en) | 2012-05-31 | 2015-11-10 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device with selection circuit for image signal polarity inversion |
US9184189B2 (en) | 2009-03-27 | 2015-11-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device, and electronic appliance |
US9184296B2 (en) | 2011-03-11 | 2015-11-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having c-axis aligned portions and doped portions |
US9184245B2 (en) | 2012-08-10 | 2015-11-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for fabricating the same |
US9184299B2 (en) | 2009-11-27 | 2015-11-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9183894B2 (en) | 2012-02-24 | 2015-11-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9184160B2 (en) | 2012-01-26 | 2015-11-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9190413B2 (en) | 2010-02-05 | 2015-11-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9190527B2 (en) | 2013-02-13 | 2015-11-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of semiconductor device |
US9190522B2 (en) | 2010-04-02 | 2015-11-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having an oxide semiconductor |
US9190523B2 (en) | 2011-09-22 | 2015-11-17 | Samsung Display Co., Ltd. | Oxide semiconductor, thin film transistor including the same, and thin film transistor array panel including the same |
US9190525B2 (en) | 2012-07-06 | 2015-11-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor layer |
US9190172B2 (en) | 2013-01-24 | 2015-11-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9190448B2 (en) | 2013-08-02 | 2015-11-17 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and operation method thereof |
US9196743B2 (en) | 2012-04-17 | 2015-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Field effect device with oxide semiconductor layer |
US9196639B2 (en) | 2012-12-28 | 2015-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
US9196739B2 (en) | 2010-04-02 | 2015-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor film and metal oxide film |
US9196593B2 (en) | 2008-10-01 | 2015-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9196713B2 (en) | 2008-09-01 | 2015-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device having oxide semiconductor layer |
US9196616B2 (en) | 2011-03-31 | 2015-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Memory device |
US9196738B2 (en) | 2009-12-11 | 2015-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9196741B2 (en) | 2012-02-03 | 2015-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9196648B2 (en) | 2010-02-19 | 2015-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9196744B2 (en) | 2011-11-11 | 2015-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9196633B2 (en) | 2008-09-19 | 2015-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9202546B2 (en) | 2009-10-29 | 2015-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9202567B2 (en) | 2011-01-27 | 2015-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Memory circuit |
US9202925B2 (en) | 2013-05-20 | 2015-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9202851B2 (en) | 2009-08-07 | 2015-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9202927B2 (en) | 2010-11-30 | 2015-12-01 | Seminconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9200952B2 (en) | 2011-07-15 | 2015-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising a photodetector and an analog arithmetic circuit |
US9203478B2 (en) | 2010-03-31 | 2015-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Power supply device and driving method thereof |
US9202827B2 (en) | 2008-12-24 | 2015-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit and semiconductor device |
US9202814B2 (en) | 2011-05-20 | 2015-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and signal processing circuit |
US9202877B2 (en) | 2010-04-23 | 2015-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9202822B2 (en) | 2010-12-17 | 2015-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9209307B2 (en) | 2013-05-20 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9208723B2 (en) | 2005-04-19 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including transistor with oxide semiconductor |
US9209310B2 (en) | 2009-10-09 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the semiconductor device |
US9208849B2 (en) | 2012-04-12 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving semiconductor device, and electronic device |
US9209206B2 (en) | 2010-05-21 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Pulse converter circuit |
US9209092B2 (en) | 2011-01-26 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with a wide-gap semiconductor layer on inner wall of trench |
US9209314B2 (en) | 2010-06-16 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Field effect transistor |
US9207504B2 (en) | 2006-04-06 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device, semiconductor device, and electronic appliance |
US9204849B2 (en) | 2012-08-24 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Radiation detection panel, radiation imaging device, and diagnostic imaging device |
US9207751B2 (en) | 2012-03-01 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9209267B2 (en) | 2011-11-30 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming oxide semiconductor film and method for manufacturing semiconductor device |
US9207511B2 (en) | 2009-10-30 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device, driving method of the same, and electronic appliance including the same |
US9209256B2 (en) | 2012-08-02 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9209795B2 (en) | 2013-05-17 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing device and measuring method |
US9214520B2 (en) | 2009-11-28 | 2015-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9214563B2 (en) | 2009-09-24 | 2015-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
US9214121B2 (en) | 2010-01-20 | 2015-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Driving method of liquid crystal display device |
US9214474B2 (en) | 2011-07-08 | 2015-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9219161B2 (en) | 2012-10-24 | 2015-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9219162B2 (en) | 2009-11-13 | 2015-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9219159B2 (en) | 2011-03-25 | 2015-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming oxide semiconductor film and method for manufacturing semiconductor device |
US9218081B2 (en) | 2010-04-28 | 2015-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor display device and driving method the same |
US9217903B2 (en) | 2009-12-24 | 2015-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9218966B2 (en) | 2011-10-14 | 2015-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing semiconductor device |
US9219160B2 (en) | 2011-09-29 | 2015-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9219164B2 (en) | 2012-04-20 | 2015-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with oxide semiconductor channel |
US9225329B2 (en) | 2014-03-07 | 2015-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, driving method thereof, and electronic appliance |
US9224839B2 (en) | 2008-09-01 | 2015-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9224339B2 (en) | 2010-07-02 | 2015-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US9224609B2 (en) | 2009-12-04 | 2015-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device using oxide semiconductor |
US9224758B2 (en) | 2012-05-31 | 2015-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9224870B2 (en) | 2009-07-31 | 2015-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor device |
US9224757B2 (en) | 2010-12-03 | 2015-12-29 | Semiconductor Energy Laboratory Co., Ltd. | DC-DC converter and manufacturing method thereof |
US9224838B2 (en) | 2009-09-24 | 2015-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing oxide semiconductor film and method for manufacturing semiconductor device |
US9231111B2 (en) | 2013-02-13 | 2016-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9230683B2 (en) | 2012-04-25 | 2016-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9230996B2 (en) | 2013-12-27 | 2016-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device |
US9231002B2 (en) | 2013-05-03 | 2016-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9236402B2 (en) | 2009-10-30 | 2016-01-12 | Semiconductor Energy Laboratory Co., Ltd. | Voltage regulator circuit |
US9235515B2 (en) | 2012-03-29 | 2016-01-12 | Semiconductor Energy Laboratory Co., Ltd. | Array controller and storage system |
US9236490B2 (en) | 2012-04-27 | 2016-01-12 | Semiconductor Energy Laboratory Co., Ltd. | Transistor including oxide semiconductor film having regions of different thickness |
US9236408B2 (en) | 2012-04-25 | 2016-01-12 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor device including photodiode |
US9236385B2 (en) | 2009-10-21 | 2016-01-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9240492B2 (en) | 2012-08-10 | 2016-01-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for fabricating the same |
US9240488B2 (en) | 2009-12-18 | 2016-01-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9240244B2 (en) | 2013-03-14 | 2016-01-19 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving semiconductor device and semiconductor device |
US9245958B2 (en) | 2012-08-10 | 2016-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9245589B2 (en) | 2013-03-25 | 2016-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having Schmitt trigger NAND circuit and Schmitt trigger inverter |
US9245593B2 (en) | 2013-10-16 | 2016-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving arithmetic processing unit |
US9246011B2 (en) | 2012-11-30 | 2016-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9246476B2 (en) | 2013-05-10 | 2016-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit |
US9245959B2 (en) | 2010-08-25 | 2016-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9246047B2 (en) | 2012-08-10 | 2016-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9244323B2 (en) | 2009-12-18 | 2016-01-26 | Semiconductor Energy Laboratory Co., Ltd | Liquid crystal display device and electronic device |
US9245484B2 (en) | 2009-10-21 | 2016-01-26 | Semiconductor Energy Laboratory Co., Ltd. | E-book reader |
US9245891B2 (en) | 2006-09-29 | 2016-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Display device including at least six transistors |
US9245650B2 (en) | 2013-03-15 | 2016-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9252283B2 (en) | 2012-11-30 | 2016-02-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor film |
US9252286B2 (en) | 2011-12-23 | 2016-02-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9252288B2 (en) | 2008-11-20 | 2016-02-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9252279B2 (en) | 2011-08-31 | 2016-02-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9257452B2 (en) | 2010-12-28 | 2016-02-09 | Semiconductor Energy Laboratory Co., Ltd. | Portable semiconductor device including transistor with oxide semiconductor layer |
US9257422B2 (en) | 2011-12-06 | 2016-02-09 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing circuit and method for driving signal processing circuit |
US9257082B2 (en) | 2009-09-04 | 2016-02-09 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9257085B2 (en) | 2009-05-21 | 2016-02-09 | Semiconductor Energy Laboratory Co., Ltd. | Electronic circuit, display device, electronic device, and method for driving electronic circuit |
US9257594B2 (en) | 2008-09-12 | 2016-02-09 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor with an oxide semiconductor layer |
US9257449B2 (en) | 2009-11-13 | 2016-02-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9257173B2 (en) | 2013-10-18 | 2016-02-09 | Semiconductor Energy Laboratory Co., Ltd. | Arithmetic processing unit and driving method thereof |
US9257569B2 (en) | 2012-10-23 | 2016-02-09 | Semiconductor Energy Laboratory Co. Ltd. | Semiconductor device |
US9264693B2 (en) | 2011-12-26 | 2016-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Motion recognition device |
US9263531B2 (en) | 2012-11-28 | 2016-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film, film formation method thereof, and semiconductor device |
US9261943B2 (en) | 2012-05-02 | 2016-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9263473B2 (en) | 2010-08-06 | 2016-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor memory device |
US9263589B2 (en) | 2010-05-21 | 2016-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9263451B2 (en) | 2010-10-29 | 2016-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Storage device including memory cell using transistor having oxide semiconductor and amplifier circuit |
US9263471B2 (en) | 2010-12-28 | 2016-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and semiconductor memory device |
US9261998B2 (en) | 2010-03-08 | 2016-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Electronic device and electronic system |
US9263472B2 (en) | 2009-07-18 | 2016-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9263259B2 (en) | 2012-10-17 | 2016-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising an oxide semiconductor |
US9269821B2 (en) | 2012-09-24 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9267199B2 (en) | 2013-02-28 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing sputtering target, method for forming oxide film, and transistor |
US9269725B2 (en) | 2010-01-24 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9269823B2 (en) | 2010-02-05 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9269915B2 (en) | 2013-09-18 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9269315B2 (en) | 2013-03-08 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Driving method of semiconductor device |
US9269794B2 (en) | 2009-07-10 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method the same |
US9269571B2 (en) | 2010-02-26 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9269825B2 (en) | 2011-09-07 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9269822B2 (en) | 2013-09-12 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9275987B2 (en) | 2013-03-14 | 2016-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9276124B2 (en) | 2010-10-14 | 2016-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device with sidewall |
US9275858B2 (en) | 2010-07-02 | 2016-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9276121B2 (en) | 2012-04-12 | 2016-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9276125B2 (en) | 2013-03-01 | 2016-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9276128B2 (en) | 2013-10-22 | 2016-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing the same, and etchant used for the same |
US9276577B2 (en) | 2013-07-05 | 2016-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9281408B2 (en) | 2013-05-20 | 2016-03-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9281237B2 (en) | 2011-10-13 | 2016-03-08 | Semiconductor Energy Laboratory Co., Ltd. | Transistor having reduced channel length |
US9281409B2 (en) | 2013-07-16 | 2016-03-08 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor for integrated circuit |
US9281358B2 (en) | 2010-11-30 | 2016-03-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9281405B2 (en) | 2011-12-23 | 2016-03-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9281410B2 (en) | 2012-03-14 | 2016-03-08 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9287370B2 (en) | 2012-03-02 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Memory device comprising a transistor including an oxide semiconductor and semiconductor device including the same |
US9285848B2 (en) | 2012-04-27 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Power reception control device, power reception device, power transmission and reception system, and electronic device |
US9287258B2 (en) | 2010-02-19 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9287411B2 (en) | 2012-10-24 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9287352B2 (en) | 2013-06-19 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and formation method thereof |
US9287878B2 (en) | 2014-04-25 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9287405B2 (en) | 2011-10-13 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor |
US9287118B2 (en) | 2014-05-16 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor substrate and semiconductor device |
US9287410B2 (en) | 2013-12-18 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9287390B2 (en) | 2010-08-16 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9287408B2 (en) | 2011-03-25 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Field-effect transistor, and memory and semiconductor circuit including the same |
US9287117B2 (en) | 2012-10-17 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising an oxide semiconductor |
US9287266B2 (en) | 2011-04-22 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9287294B2 (en) | 2010-12-28 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Capacitor and semiconductor device having oxide semiconductor |
US9287407B2 (en) | 2011-06-10 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9293480B2 (en) | 2013-07-10 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
US9293592B2 (en) | 2013-10-11 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9293602B2 (en) | 2012-08-10 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9294075B2 (en) | 2013-03-14 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9293599B2 (en) | 2013-05-20 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9293589B2 (en) | 2012-01-25 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9293566B2 (en) | 2009-06-30 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9293186B2 (en) | 2013-03-14 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and semiconductor device |
US9294096B2 (en) | 2014-02-28 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9293544B2 (en) | 2013-02-26 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having buried channel structure |
US9293598B2 (en) | 2012-12-28 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having an oxide semiconductor layer |
US9293427B2 (en) | 2011-03-04 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9293540B2 (en) | 2012-12-03 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9293545B2 (en) | 2008-11-07 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9293104B2 (en) | 2010-07-02 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US9299432B2 (en) | 2012-05-11 | 2016-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method of semiconductor device |
US9298057B2 (en) | 2012-07-20 | 2016-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device including the display device |
US9299852B2 (en) | 2011-06-16 | 2016-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9300292B2 (en) | 2014-01-10 | 2016-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Circuit including transistor |
US9299848B2 (en) | 2014-03-14 | 2016-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, RF tag, and electronic device |
US9299474B2 (en) | 2010-07-30 | 2016-03-29 | Samsung Display Co., Ltd. | Oxide for semiconductor layer of thin-film transistor, sputtering target, and thin-film transistor |
US9299855B2 (en) | 2013-08-09 | 2016-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having dual gate insulating layers |
US9299851B2 (en) | 2010-11-05 | 2016-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9299708B2 (en) | 2011-04-15 | 2016-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US9299723B2 (en) | 2010-05-21 | 2016-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with light-blocking layers |
US9305774B2 (en) | 2013-03-22 | 2016-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Method for processing thin film and method for manufacturing semiconductor device |
US9305630B2 (en) | 2013-07-17 | 2016-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving the same |
US9306074B2 (en) | 2013-06-05 | 2016-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9305944B2 (en) | 2010-09-13 | 2016-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for manufacturing the same |
US9306073B2 (en) | 2010-03-08 | 2016-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9306079B2 (en) | 2012-10-17 | 2016-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9304523B2 (en) | 2012-01-30 | 2016-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Power supply circuit and method for driving the same |
US9305481B2 (en) | 2009-09-24 | 2016-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9306072B2 (en) | 2009-10-08 | 2016-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor layer and semiconductor device |
US9312280B2 (en) | 2014-07-25 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9312349B2 (en) | 2013-07-08 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9312257B2 (en) | 2012-02-29 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9311876B2 (en) | 2008-06-17 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, display device, and electronic device |
US9312392B2 (en) | 2013-05-16 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9310866B2 (en) | 2012-06-01 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and alarm device |
US9312278B2 (en) | 2012-10-30 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9311982B2 (en) | 2014-04-25 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US9312269B2 (en) | 2013-05-16 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9318484B2 (en) | 2013-02-20 | 2016-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9318374B2 (en) | 2011-09-21 | 2016-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor storage device comprising peripheral circuit, Shielding layer, and memory cell array |
US9318654B2 (en) | 2009-10-09 | 2016-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting display device and electronic device including the same |
US9318613B2 (en) | 2010-04-02 | 2016-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Transistor having two metal oxide films and an oxide semiconductor film |
US9318506B2 (en) | 2011-07-08 | 2016-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9316695B2 (en) | 2012-12-28 | 2016-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9318053B2 (en) | 2005-07-04 | 2016-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9318618B2 (en) | 2013-12-27 | 2016-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9324449B2 (en) | 2012-03-28 | 2016-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, signal processing unit having the driver circuit, method for manufacturing the signal processing unit, and display device |
US9324810B2 (en) | 2012-11-30 | 2016-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor film |
US9324747B2 (en) | 2014-03-13 | 2016-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device |
US9324875B2 (en) | 2012-10-17 | 2016-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9324737B2 (en) | 2012-11-28 | 2016-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9324876B2 (en) | 2013-09-06 | 2016-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9324874B2 (en) | 2008-10-03 | 2016-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Display device comprising an oxide semiconductor |
US9331210B2 (en) | 2010-09-03 | 2016-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Field effect transistor and method for manufacturing semiconductor device |
US9331156B2 (en) | 2011-12-15 | 2016-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9331206B2 (en) | 2011-04-22 | 2016-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Oxide material and semiconductor device |
US9331510B2 (en) | 2012-03-28 | 2016-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Protective circuit, battery charger, and power storage device |
US9331100B2 (en) | 2012-09-24 | 2016-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9331207B2 (en) | 2012-07-17 | 2016-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor device and manufacturing method therof |
US9331689B2 (en) | 2012-04-27 | 2016-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Power supply circuit and semiconductor device including the same |
US9330909B2 (en) | 2012-10-17 | 2016-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9337345B2 (en) | 2011-01-14 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including multilayer wiring layer |
US9337843B2 (en) | 2012-05-25 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device and semiconductor device |
US9336845B2 (en) | 2011-05-20 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Register circuit including a volatile memory and a nonvolatile memory |
US9336739B2 (en) | 2010-07-02 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US9337214B2 (en) | 2013-09-13 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9336858B2 (en) | 2010-01-22 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device and driving method thereof |
US9337344B2 (en) | 2013-05-09 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9337191B2 (en) | 2010-02-18 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9337343B2 (en) | 2013-02-27 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, driver circuit, and display device |
US9337342B2 (en) | 2012-04-13 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9336853B2 (en) | 2014-05-29 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Memory device, electronic component, and electronic device |
US9337826B2 (en) | 2012-05-11 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9337836B2 (en) | 2012-05-25 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving semiconductor device |
US9343288B2 (en) | 2013-07-31 | 2016-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9341908B2 (en) | 2007-05-17 | 2016-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US9343578B2 (en) | 2012-12-28 | 2016-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and measurement device |
US9344090B2 (en) | 2011-05-16 | 2016-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
US9343120B2 (en) | 2012-06-01 | 2016-05-17 | Semiconductor Energy Laboratory Co., Ltd. | High speed processing unit with non-volatile register |
US9343517B2 (en) | 2008-09-19 | 2016-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9343579B2 (en) | 2013-05-20 | 2016-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9341722B2 (en) | 2013-02-27 | 2016-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device |
US9343480B2 (en) | 2010-08-16 | 2016-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9344037B2 (en) | 2014-07-25 | 2016-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Oscillator circuit and semiconductor device including the same |
US9349593B2 (en) | 2012-12-03 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9349735B2 (en) | 2009-12-25 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9349750B2 (en) | 2012-11-16 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device |
US9349752B2 (en) | 2011-01-12 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9349874B2 (en) | 2008-10-31 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9349325B2 (en) | 2010-04-28 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device |
US9348189B2 (en) | 2008-12-03 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US9349418B2 (en) | 2013-12-27 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving the same |
US9350295B2 (en) | 2009-11-20 | 2016-05-24 | Semiconductor Energy Laboratoty Co., Ltd. | Modulation circuit and semiconductor device including the same |
US9350358B2 (en) | 2014-03-06 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9349869B2 (en) | 2012-10-24 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9349849B2 (en) | 2012-03-28 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device including the semiconductor device |
US9349454B2 (en) | 2014-03-07 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9349722B2 (en) | 2012-03-29 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device including a memory cell comprising a D/A converter |
US9349875B2 (en) | 2014-06-13 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device including the semiconductor device |
US9349751B2 (en) | 2013-12-12 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9355844B2 (en) | 2010-09-03 | 2016-05-31 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9356152B2 (en) | 2005-01-28 | 2016-05-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic device, and method of manufacturing semiconductor device |
US9356098B2 (en) | 2013-12-27 | 2016-05-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with oxide semiconductor film |
US9356054B2 (en) | 2013-12-27 | 2016-05-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9355687B2 (en) | 2011-03-11 | 2016-05-31 | Semiconductor Energy Laboratory Co., Ltd. | Storage circuit |
US9362136B2 (en) | 2011-03-11 | 2016-06-07 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device |
US9360722B2 (en) | 2007-05-18 | 2016-06-07 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US9362412B2 (en) | 2009-03-27 | 2016-06-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9362417B2 (en) | 2012-02-03 | 2016-06-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9360564B2 (en) | 2013-08-30 | 2016-06-07 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device |
US9362411B2 (en) | 2012-04-16 | 2016-06-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9368640B2 (en) | 2009-11-28 | 2016-06-14 | Semiconductor Energy Laboratory Co., Ltd. | Transistor with stacked oxide semiconductor films |
US9366896B2 (en) | 2012-10-12 | 2016-06-14 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and touch panel |
US9368053B2 (en) | 2010-09-15 | 2016-06-14 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9368541B2 (en) | 2009-11-06 | 2016-06-14 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9368636B2 (en) | 2013-04-01 | 2016-06-14 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device comprising a plurality of oxide semiconductor layers |
US9373711B2 (en) | 2013-02-27 | 2016-06-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9374048B2 (en) | 2013-08-20 | 2016-06-21 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing device, and driving method and program thereof |
US9373368B2 (en) | 2014-05-30 | 2016-06-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9379138B2 (en) | 2013-07-19 | 2016-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device with drive voltage dependent on external light intensity |
US9378776B2 (en) | 2014-02-21 | 2016-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US9379136B2 (en) | 2010-07-16 | 2016-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9379192B2 (en) | 2013-12-20 | 2016-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9379113B2 (en) | 2012-02-09 | 2016-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device and method for manufacturing semiconductor device |
US9379713B2 (en) | 2014-01-17 | 2016-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Data processing device and driving method thereof |
US9378777B2 (en) | 2014-03-12 | 2016-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Back gate bias voltage control of oxide semiconductor transistor |
US9385128B2 (en) | 2011-03-18 | 2016-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and electronic device |
US9385713B2 (en) | 2014-10-10 | 2016-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit, processing unit, electronic component, and electronic device |
US9385592B2 (en) | 2013-08-21 | 2016-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Charge pump circuit and semiconductor device including the same |
US9385720B2 (en) | 2014-03-13 | 2016-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9385054B2 (en) | 2013-11-08 | 2016-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Data processing device and manufacturing method thereof |
US9385114B2 (en) | 2009-10-30 | 2016-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Non-linear element, display device including non-linear element, and electronic device including display device |
US9385238B2 (en) | 2011-07-08 | 2016-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Transistor using oxide semiconductor |
US9391096B2 (en) | 2013-01-18 | 2016-07-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9391095B2 (en) | 2009-12-18 | 2016-07-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9390664B2 (en) | 2012-07-26 | 2016-07-12 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US9391209B2 (en) | 2010-02-05 | 2016-07-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9390665B2 (en) | 2012-11-30 | 2016-07-12 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9391620B2 (en) | 2012-12-24 | 2016-07-12 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device and semiconductor device |
US9391157B2 (en) | 2013-09-06 | 2016-07-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor transistor device |
US9390667B2 (en) | 2010-06-16 | 2016-07-12 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving input-output device, and input-output device |
US9397664B2 (en) | 2011-05-19 | 2016-07-19 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic circuit |
US9397149B2 (en) | 2013-12-27 | 2016-07-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9395070B2 (en) | 2013-07-19 | 2016-07-19 | Semiconductor Energy Laboratory Co., Ltd. | Support of flexible component and light-emitting device |
US9397637B2 (en) | 2014-03-06 | 2016-07-19 | Semiconductor Energy Laboratory Co., Ltd. | Voltage controlled oscillator, semiconductor device, and electronic device |
US9397153B2 (en) | 2013-09-23 | 2016-07-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9397224B2 (en) | 2010-10-20 | 2016-07-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9397222B2 (en) | 2011-05-13 | 2016-07-19 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9401714B2 (en) | 2012-10-17 | 2016-07-26 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
US9401407B2 (en) | 2010-04-07 | 2016-07-26 | Semiconductor Energy Laboratory Co., Ltd. | Transistor |
US9401364B2 (en) | 2014-09-19 | 2016-07-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US9401432B2 (en) | 2014-01-16 | 2016-07-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9407269B2 (en) | 2009-12-25 | 2016-08-02 | Semiconductor Energy Laboratory Co., Ltd. | Memory device, semiconductor device, and electronic device |
US9406698B2 (en) | 2012-08-28 | 2016-08-02 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
US9406808B2 (en) | 2009-10-08 | 2016-08-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device, and electronic appliance |
US9406761B2 (en) | 2013-09-13 | 2016-08-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9406760B2 (en) | 2014-02-21 | 2016-08-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor film, transistor, semiconductor device, display device, and electronic appliance |
US9406370B2 (en) | 2014-05-29 | 2016-08-02 | Semiconductor Energy Laboratory Co., Ltd. | Memory device, and semiconductor device and electronic appliance including the same |
US9406810B2 (en) | 2012-12-03 | 2016-08-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9412762B2 (en) | 2013-07-31 | 2016-08-09 | Semiconductor Energy Laboratory Co., Ltd. | DC-DC converter and semiconductor device |
US9412877B2 (en) | 2013-02-12 | 2016-08-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9412876B2 (en) | 2014-02-07 | 2016-08-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9412739B2 (en) | 2014-04-11 | 2016-08-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9412764B2 (en) | 2012-11-28 | 2016-08-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device, and electronic device |
US9419622B2 (en) | 2014-03-07 | 2016-08-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9419146B2 (en) | 2012-01-26 | 2016-08-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9419020B2 (en) | 2009-10-21 | 2016-08-16 | Semiconductor Energy Laboratory Co., Ltd. | Analog circuit and semiconductor device |
US9419113B2 (en) | 2009-05-29 | 2016-08-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9419143B2 (en) | 2013-11-07 | 2016-08-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9419018B2 (en) | 2014-05-30 | 2016-08-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9425107B2 (en) | 2011-03-10 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and method for manufacturing the same |
US9424923B2 (en) | 2010-12-17 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor storage device |
US9424950B2 (en) | 2013-07-10 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9425220B2 (en) | 2012-08-28 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9424921B2 (en) | 2010-08-26 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing circuit and method for driving the same |
US9425045B2 (en) | 2010-05-21 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor and manufacturing method thereof |
US9425322B2 (en) | 2011-03-28 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device including exposure of oxide semiconductor to reducing atmosphere |
US9425217B2 (en) | 2013-09-23 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9423860B2 (en) | 2012-09-03 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Microcontroller capable of being in three modes |
US9425226B2 (en) | 2014-03-13 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device |
US9431400B2 (en) | 2011-02-08 | 2016-08-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device and method for manufacturing the same |
US9431545B2 (en) | 2011-09-23 | 2016-08-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9431541B2 (en) | 2013-08-22 | 2016-08-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9431435B2 (en) | 2013-10-22 | 2016-08-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
US9437831B2 (en) | 2013-12-02 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
US9437743B2 (en) | 2010-10-07 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Thin film element, semiconductor device, and method for manufacturing the same |
US9437273B2 (en) | 2012-12-26 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9437454B2 (en) | 2010-06-29 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Wiring board, semiconductor device, and manufacturing methods thereof |
US9438234B2 (en) | 2014-11-21 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit and semiconductor device including logic circuit |
US9437594B2 (en) | 2012-07-27 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9437741B2 (en) | 2013-05-16 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9438207B2 (en) | 2014-10-17 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US9437744B2 (en) | 2013-03-14 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9437428B2 (en) | 2013-11-29 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a semiconductor device having an oxide semiconductor layer with increased hydrogen concentration |
US9438206B2 (en) | 2013-08-30 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Storage circuit and semiconductor device |
US9435696B2 (en) | 2012-05-02 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Temperature sensor circuit and semiconductor device including temperature sensor circuit |
US9443987B2 (en) | 2013-08-23 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9444337B2 (en) | 2013-07-26 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | DCDC converter including clock generation circuit, error amplifier and comparator |
US9443844B2 (en) | 2011-05-10 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Gain cell semiconductor memory device and driving method thereof |
US9443874B2 (en) | 2009-10-09 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9443455B2 (en) | 2011-02-25 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Display device having a plurality of pixels |
US9443592B2 (en) | 2013-07-18 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9443564B2 (en) | 2015-01-26 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US9443880B2 (en) | 2010-08-06 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9443876B2 (en) | 2014-02-05 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including the semiconductor device, display module including the display device, and electronic device including the semiconductor device, the display device, and the display module |
US9444459B2 (en) | 2011-05-06 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit and semiconductor device |
US9443984B2 (en) | 2010-12-28 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9443934B2 (en) | 2013-09-19 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9443872B2 (en) | 2014-03-07 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9449706B2 (en) | 2010-08-27 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Driving method for a semiconductor device with an oxide semiconductor layer between two gate electrodes |
US9449996B2 (en) | 2012-08-03 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9450133B2 (en) | 2008-11-28 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Photosensor and display device |
US9449569B2 (en) | 2012-07-13 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for driving liquid crystal display device |
US9449852B2 (en) | 2010-04-28 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9450080B2 (en) | 2013-12-20 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9448433B2 (en) | 2009-12-28 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the semiconductor device |
US9449853B2 (en) | 2013-09-04 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device comprising electron trap layer |
US9450581B2 (en) | 2014-09-30 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit, semiconductor device, electronic component, and electronic device |
US9450102B2 (en) | 2013-04-26 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9449574B2 (en) | 2012-10-12 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | LCD overdriving using difference between average values of groups of pixels between two frames |
US9455349B2 (en) | 2013-10-22 | 2016-09-27 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor thin film transistor with reduced impurity diffusion |
US9455287B2 (en) | 2014-06-25 | 2016-09-27 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device, monitoring device, and electronic appliance |
US9455280B2 (en) | 2012-09-13 | 2016-09-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9455709B2 (en) | 2014-03-05 | 2016-09-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9454923B2 (en) | 2013-05-17 | 2016-09-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9461179B2 (en) | 2014-07-11 | 2016-10-04 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor device (TFT) comprising stacked oxide semiconductor layers and having a surrounded channel structure |
US9461126B2 (en) | 2013-09-13 | 2016-10-04 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, clocked inverter circuit, sequential circuit, and semiconductor device including sequential circuit |
US9460772B2 (en) | 2010-11-12 | 2016-10-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9462260B2 (en) | 2010-09-13 | 2016-10-04 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9466618B2 (en) | 2011-05-13 | 2016-10-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including two thin film transistors and method of manufacturing the same |
US9466725B2 (en) | 2013-01-24 | 2016-10-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9467047B2 (en) | 2011-05-31 | 2016-10-11 | Semiconductor Energy Laboratory Co., Ltd. | DC-DC converter, power source circuit, and semiconductor device |
US9466615B2 (en) | 2013-12-26 | 2016-10-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9466756B2 (en) | 2009-08-07 | 2016-10-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9467139B2 (en) | 2014-03-13 | 2016-10-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9472559B2 (en) | 2009-12-28 | 2016-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and semiconductor device |
US9472678B2 (en) | 2013-12-27 | 2016-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9473714B2 (en) | 2010-07-01 | 2016-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Solid-state imaging device and semiconductor display device |
US9472682B2 (en) | 2012-06-29 | 2016-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9472676B2 (en) | 2011-03-25 | 2016-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9479152B2 (en) | 2012-05-25 | 2016-10-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving semiconductor device |
US9478276B2 (en) | 2014-04-10 | 2016-10-25 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and semiconductor device |
US9477294B2 (en) | 2012-10-17 | 2016-10-25 | Semiconductor Energy Laboratory Co., Ltd. | Microcontroller and method for manufacturing the same |
US9478597B2 (en) | 2008-09-19 | 2016-10-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9478185B2 (en) | 2010-05-12 | 2016-10-25 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical display device and display method thereof |
US9478704B2 (en) | 2011-11-30 | 2016-10-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor display device |
US9478668B2 (en) | 2011-04-13 | 2016-10-25 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
US9478535B2 (en) | 2012-08-31 | 2016-10-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor film |
US9479175B2 (en) | 2014-02-07 | 2016-10-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9478664B2 (en) | 2013-12-25 | 2016-10-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9484365B2 (en) | 2010-01-15 | 2016-11-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including switch electrically connected to signal line |
US9482919B2 (en) | 2013-02-25 | 2016-11-01 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device with improved driver circuit |
US9490241B2 (en) | 2011-07-08 | 2016-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising a first inverter and a second inverter |
US9490350B2 (en) | 2010-09-10 | 2016-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, liquid crystal display device, and manufacturing method thereof |
US9489088B2 (en) | 2010-06-16 | 2016-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Input-output device and method for driving input-output device |
US9490368B2 (en) | 2010-05-20 | 2016-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
US9489988B2 (en) | 2015-02-20 | 2016-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Memory device |
US9489830B2 (en) | 2011-06-08 | 2016-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Communication method and communication system |
US9496406B2 (en) | 2008-07-31 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9496409B2 (en) | 2013-03-26 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9496412B2 (en) | 2014-07-15 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, and display device including the semiconductor device |
US9496138B2 (en) | 2011-07-08 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing oxide semiconductor film, method for manufacturing semiconductor device, and semiconductor device |
US9494829B2 (en) | 2011-01-28 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and liquid crystal display device containing the same |
US9496022B2 (en) | 2014-05-29 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including power management unit for refresh operation |
US9496404B2 (en) | 2010-03-05 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9496408B2 (en) | 2012-05-31 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor stack with different ratio of indium and gallium |
US9494644B2 (en) | 2013-11-22 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including memory circuit and logic array |
US9496411B2 (en) | 2014-05-23 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9496405B2 (en) | 2010-05-20 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device including step of adding cation to oxide semiconductor layer |
US9496285B2 (en) | 2014-12-10 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9496743B2 (en) | 2010-09-13 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Power receiving device and wireless power feed system |
US9496330B2 (en) | 2013-08-02 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
US9496376B2 (en) | 2014-09-19 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9494830B2 (en) | 2013-06-05 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Sequential circuit and semiconductor device |
US9502434B2 (en) | 2014-04-18 | 2016-11-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9502572B2 (en) | 2011-12-27 | 2016-11-22 | Semiconductor Energy Laboratory Co., Ltd. | Bottom-gate transistor including an oxide semiconductor layer contacting an oxygen-rich insulating layer |
US9502094B2 (en) | 2012-05-25 | 2016-11-22 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving memory element |
US9500916B2 (en) | 2013-07-25 | 2016-11-22 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device |
US9508276B2 (en) | 2012-06-29 | 2016-11-29 | Semiconductor Energy Laboratory Co., Ltd. | Method of driving display device including comparator circuit, and display device including comparator circuit |
US9508861B2 (en) | 2013-05-16 | 2016-11-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9508709B2 (en) | 2011-09-16 | 2016-11-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, light-emitting device, and electronic device |
US9509314B2 (en) | 2014-03-13 | 2016-11-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for operating programmable logic device |
US9508448B2 (en) | 2011-03-08 | 2016-11-29 | Semiconductor Energy Laboratory Co., Ltd. | Memory element and signal processing circuit |
US9507366B2 (en) | 2012-03-29 | 2016-11-29 | Semiconductor Energy Laboratory Co., Ltd. | Power supply control device |
US9508759B2 (en) | 2011-06-30 | 2016-11-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9508864B2 (en) | 2014-02-19 | 2016-11-29 | Semiconductor Energy Laboratory Co., Ltd. | Oxide, semiconductor device, module, and electronic device |
US9515094B2 (en) | 2013-06-26 | 2016-12-06 | Semiconductor Energy Laboratory Co., Ltd. | Storage device and semiconductor device |
US9520287B2 (en) | 2009-11-28 | 2016-12-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having stacked oxide semiconductor layers |
US9520411B2 (en) | 2009-11-13 | 2016-12-13 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device including the same |
US9520873B2 (en) | 2014-08-08 | 2016-12-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9524993B2 (en) | 2010-02-12 | 2016-12-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having a transistor with an oxide semiconductor layer between a first gate electrode and a second gate electrode |
US9525073B2 (en) | 2014-05-30 | 2016-12-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor |
US9530856B2 (en) | 2013-12-26 | 2016-12-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9530892B2 (en) | 2012-10-24 | 2016-12-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9530804B2 (en) | 2013-10-22 | 2016-12-27 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9537014B2 (en) | 2014-05-29 | 2017-01-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing semiconductor device, and electronic device |
US9537478B2 (en) | 2014-03-06 | 2017-01-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9537043B2 (en) | 2010-04-23 | 2017-01-03 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device and manufacturing method thereof |
US9543835B2 (en) | 2010-06-10 | 2017-01-10 | Semiconductor Energy Laboratory Co., Ltd. | DC/DC converter, power supply circuit, and semiconductor device |
US9542977B2 (en) | 2014-04-11 | 2017-01-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9543295B2 (en) | 2014-09-04 | 2017-01-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9541386B2 (en) | 2012-03-21 | 2017-01-10 | Semiconductor Energy Laboratory Co., Ltd. | Distance measurement device and distance measurement system |
US9546416B2 (en) | 2010-09-13 | 2017-01-17 | Semiconductor Energy Laboratory Co., Ltd. | Method of forming crystalline oxide semiconductor film |
US9548133B2 (en) | 2011-09-28 | 2017-01-17 | Semiconductor Energy Laboratory Co., Ltd. | Shift register circuit |
US9548327B2 (en) | 2014-11-10 | 2017-01-17 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device having a selenium containing photoelectric conversion layer |
US9553200B2 (en) | 2012-02-29 | 2017-01-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9553204B2 (en) | 2014-03-31 | 2017-01-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US9553114B2 (en) | 2013-10-18 | 2017-01-24 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device with a color filter |
US9552767B2 (en) | 2013-08-30 | 2017-01-24 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device |
US9553201B2 (en) | 2012-04-02 | 2017-01-24 | Samsung Display Co., Ltd. | Thin film transistor, thin film transistor array panel, and manufacturing method of thin film transistor |
US9553202B2 (en) | 2014-05-30 | 2017-01-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, and electronic device |
US9559208B2 (en) | 2009-10-21 | 2017-01-31 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device including the same |
US9559105B2 (en) | 2011-05-20 | 2017-01-31 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing circuit |
US9559211B2 (en) | 2010-07-30 | 2017-01-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9564535B2 (en) | 2014-02-28 | 2017-02-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including the semiconductor device, display module including the display device, and electronic appliance including the semiconductor device, the display device, and the display module |
US9570116B2 (en) | 2014-12-11 | 2017-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, memory device, and electronic device |
US9570622B2 (en) | 2013-09-05 | 2017-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9570445B2 (en) | 2011-05-20 | 2017-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9570310B2 (en) | 2013-04-04 | 2017-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9570141B2 (en) | 2011-01-14 | 2017-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Memory device having a transistor including a semiconductor oxide |
US9569713B2 (en) | 2014-10-24 | 2017-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, wireless sensor, and electronic device |
US9576982B2 (en) | 2011-11-11 | 2017-02-21 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device, EL display device, and manufacturing method thereof |
US9577110B2 (en) | 2013-12-27 | 2017-02-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including an oxide semiconductor and the display device including the semiconductor device |
US9576995B2 (en) | 2014-09-02 | 2017-02-21 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and electronic device |
US9577446B2 (en) | 2012-12-13 | 2017-02-21 | Semiconductor Energy Laboratory Co., Ltd. | Power storage system and power storage device storing data for the identifying power storage device |
US9576994B2 (en) | 2014-08-29 | 2017-02-21 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and electronic device |
US9577107B2 (en) | 2013-03-19 | 2017-02-21 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and method for forming oxide semiconductor film |
US9577108B2 (en) | 2010-05-21 | 2017-02-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9575381B2 (en) | 2010-01-15 | 2017-02-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving the same |
US9581874B2 (en) | 2013-02-28 | 2017-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9583632B2 (en) | 2013-07-19 | 2017-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film, method for forming oxide semiconductor film, and semiconductor device |
US9584707B2 (en) | 2014-11-10 | 2017-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and electronic device |
US9583576B2 (en) | 2010-06-25 | 2017-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving the same |
US9583516B2 (en) | 2013-10-25 | 2017-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9590109B2 (en) | 2013-08-30 | 2017-03-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9590594B2 (en) | 2014-03-05 | 2017-03-07 | Semiconductor Energy Laboratory Co., Ltd. | Level shifter circuit |
US9588172B2 (en) | 2014-02-07 | 2017-03-07 | Semiconductor Energy Laboratory Co., Ltd. | Device including test circuit |
US9590115B2 (en) | 2014-11-21 | 2017-03-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9590111B2 (en) | 2013-11-06 | 2017-03-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
US9590110B2 (en) | 2013-09-10 | 2017-03-07 | Semiconductor Energy Laboratory Co., Ltd. | Ultraviolet light sensor circuit |
US9595964B2 (en) | 2011-05-19 | 2017-03-14 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
US9595955B2 (en) | 2014-08-08 | 2017-03-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including power storage elements and switches |
US9594115B2 (en) | 2014-01-09 | 2017-03-14 | Semiconductor Energy Laboratory Co., Ltd. | Device for generating test pattern |
US9594281B2 (en) | 2012-11-30 | 2017-03-14 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US9595435B2 (en) | 2012-10-19 | 2017-03-14 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming multilayer film including oxide semiconductor film and method for manufacturing semiconductor device |
US9601178B2 (en) | 2011-01-26 | 2017-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and semiconductor device |
US9601215B2 (en) | 2014-04-11 | 2017-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Holding circuit, driving method of the holding circuit, and semiconductor device including the holding circuit |
US9601591B2 (en) | 2013-08-09 | 2017-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9601633B2 (en) | 2010-03-19 | 2017-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9601634B2 (en) | 2013-12-02 | 2017-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9601631B2 (en) | 2011-11-30 | 2017-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9601601B2 (en) | 2008-12-19 | 2017-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing transistor |
US9601632B2 (en) | 2012-09-14 | 2017-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for fabricating the same |
US9608005B2 (en) | 2013-08-19 | 2017-03-28 | Semiconductor Energy Laboratory Co., Ltd. | Memory circuit including oxide semiconductor devices |
US9608122B2 (en) | 2013-03-27 | 2017-03-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9607991B2 (en) | 2013-09-05 | 2017-03-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9614095B2 (en) | 2011-08-18 | 2017-04-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9614094B2 (en) | 2011-04-29 | 2017-04-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor layer and method for driving the same |
US9614022B2 (en) | 2014-02-11 | 2017-04-04 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device comprised of multiple display panels |
US9612499B2 (en) | 2015-03-19 | 2017-04-04 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device using liquid crystal display device |
US9613964B2 (en) | 2010-02-26 | 2017-04-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including a memory cell |
US9614097B2 (en) | 2010-01-20 | 2017-04-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9613568B2 (en) | 2005-07-14 | 2017-04-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9612496B2 (en) | 2012-07-11 | 2017-04-04 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for driving the same |
US9620623B2 (en) | 2011-10-19 | 2017-04-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9627418B2 (en) | 2013-12-26 | 2017-04-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9627010B2 (en) | 2014-03-20 | 2017-04-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US9627413B2 (en) | 2013-12-12 | 2017-04-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device |
US9627545B2 (en) | 2013-04-12 | 2017-04-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9625764B2 (en) | 2012-08-28 | 2017-04-18 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9627198B2 (en) | 2009-10-05 | 2017-04-18 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing thin film semiconductor device |
US9627034B2 (en) | 2015-05-15 | 2017-04-18 | Semiconductor Energy Laboratory Co., Ltd. | Electronic device |
US9634150B2 (en) | 2014-03-07 | 2017-04-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device, input/output device, and electronic device |
US9633709B2 (en) | 2014-05-23 | 2017-04-25 | Semiconductor Energy Laboratory Co., Ltd. | Storage device including transistor comprising oxide semiconductor |
US9634031B2 (en) | 2014-06-20 | 2017-04-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor |
US9634048B2 (en) | 2015-03-24 | 2017-04-25 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and electronic device |
US9634149B2 (en) | 2013-08-07 | 2017-04-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing thereof |
US9640104B2 (en) | 2013-03-28 | 2017-05-02 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9640555B2 (en) | 2014-06-20 | 2017-05-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor |
US9640669B2 (en) | 2014-03-13 | 2017-05-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including the semiconductor device, display module including the display device, and electronic appliance including the semiconductor device, the display device, and the display module |
US9640226B2 (en) | 2014-12-10 | 2017-05-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device with data voltages read accurately without the influence of threshold voltage variation |
US9647125B2 (en) | 2013-05-20 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9647132B2 (en) | 2015-01-30 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and memory device |
US9647129B2 (en) | 2014-07-04 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9647665B2 (en) | 2014-12-16 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9647128B2 (en) | 2013-10-10 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9647010B2 (en) | 2012-12-28 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9646521B2 (en) | 2010-03-31 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Driving method of liquid crystal display device |
US9647152B2 (en) | 2013-03-01 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Sensor circuit and semiconductor device including sensor circuit |
US9646829B2 (en) | 2011-03-04 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9653611B2 (en) | 2014-03-07 | 2017-05-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9653487B2 (en) | 2014-02-05 | 2017-05-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, module, and electronic device |
US9653613B2 (en) | 2015-02-27 | 2017-05-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9653486B2 (en) | 2013-09-27 | 2017-05-16 | Semiconductor Energy Laboratory Co., Ltd. | Analog/digital circuit including back gate transistor structure |
US9653614B2 (en) | 2012-01-23 | 2017-05-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9653479B2 (en) | 2015-03-19 | 2017-05-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9660092B2 (en) | 2011-08-31 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor thin film transistor including oxygen release layer |
US9660518B2 (en) | 2012-05-02 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Switching converter |
US9660093B2 (en) | 2012-10-17 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Transistor with multilayer film including oxide semiconductor layer and oxide layer |
US9660095B2 (en) | 2011-04-22 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9660087B2 (en) | 2014-02-28 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including the semiconductor device, display module including the display device, and electronic appliance including the semiconductor device, the display device, or the display module |
US9659968B2 (en) | 2013-04-11 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Display device comprising a metal oxide semiconductor channel and a specified insulating layer arrangement |
US9659653B2 (en) | 2010-02-05 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9660100B2 (en) | 2015-02-06 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9666720B2 (en) | 2010-07-27 | 2017-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing the same |
US9666698B2 (en) | 2015-03-24 | 2017-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9666722B2 (en) | 2014-01-28 | 2017-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9666606B2 (en) | 2015-08-21 | 2017-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9666271B2 (en) | 2013-03-22 | 2017-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including a transistor with an oxide semiconductor film channel coupled to a capacitor |
US9666820B2 (en) | 2009-09-16 | 2017-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device and manufacturing method thereof |
US9666678B2 (en) | 2009-10-16 | 2017-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9666697B2 (en) | 2013-07-08 | 2017-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device including an electron trap layer |
US9666719B2 (en) | 2008-07-31 | 2017-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9673336B2 (en) | 2011-01-12 | 2017-06-06 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9673823B2 (en) | 2011-05-18 | 2017-06-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of driving semiconductor device |
US9673305B2 (en) | 2010-11-11 | 2017-06-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9673224B2 (en) | 2013-10-22 | 2017-06-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9673335B2 (en) | 2010-03-05 | 2017-06-06 | Semiconductor Energy Laboratory Co., Ltd. | Rectifier circuit including transistor whose channel formation region includes oxide semiconductor |
US9673337B2 (en) | 2009-10-30 | 2017-06-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9674470B2 (en) | 2014-04-11 | 2017-06-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for driving semiconductor device, and method for driving electronic device |
US9679768B2 (en) | 2009-10-21 | 2017-06-13 | Semiconductor Energy Laboratory Co., Ltd. | Method for removing hydrogen from oxide semiconductor layer having insulating layer containing halogen element formed thereover |
US9680029B2 (en) | 2010-10-29 | 2017-06-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US9685500B2 (en) | 2014-03-14 | 2017-06-20 | Semiconductor Energy Laboratory Co., Ltd. | Circuit system |
US9685560B2 (en) | 2015-03-02 | 2017-06-20 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, method for manufacturing transistor, semiconductor device, and electronic device |
US9692421B2 (en) | 2009-12-18 | 2017-06-27 | Semiconductor Energy Laboratory Co., Ltd. | Non-volatile latch circuit and logic circuit, and semiconductor device using the same |
US9691772B2 (en) | 2011-03-03 | 2017-06-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device including memory cell which includes transistor and capacitor |
US9691905B2 (en) | 2015-06-19 | 2017-06-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, and electronic device |
US9697788B2 (en) | 2010-04-28 | 2017-07-04 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US9697878B2 (en) | 2011-05-20 | 2017-07-04 | Semiconductor Energy Laboratory Co., Ltd. | Word line divider and storage device |
US9698170B2 (en) | 2014-10-07 | 2017-07-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display module, and electronic device |
US9698277B2 (en) | 2014-12-10 | 2017-07-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9698276B2 (en) | 2014-11-28 | 2017-07-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, module, and electronic device |
US9698274B2 (en) | 2014-10-20 | 2017-07-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising an oxide semiconductor, module, and electronic device |
US9704704B2 (en) | 2014-10-28 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the same |
US9705398B2 (en) | 2012-05-02 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Control circuit having signal processing circuit and method for driving the control circuit |
US9704562B2 (en) | 2014-10-10 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with stacked structure of memory cells over sensing amplifiers, circuit board, and electronic device |
US9703423B2 (en) | 2010-01-20 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Electronic device and electronic system |
US9705001B2 (en) | 2013-03-13 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9704976B2 (en) | 2009-04-02 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9704707B2 (en) | 2015-02-02 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Oxide and manufacturing method thereof |
US9705002B2 (en) | 2014-02-05 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, module, and electronic device |
US9704446B2 (en) | 2010-02-12 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device and driving method |
US9703704B2 (en) | 2012-05-01 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9705004B2 (en) | 2014-08-01 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9704894B2 (en) | 2013-05-10 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device including pixel electrode including oxide |
US9711536B2 (en) | 2014-03-07 | 2017-07-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US9711110B2 (en) | 2012-04-06 | 2017-07-18 | Semiconductor Energy Laboratory Co., Ltd. | Display device comprising grayscale conversion portion and display portion |
US9716852B2 (en) | 2015-04-03 | 2017-07-25 | Semiconductor Energy Laboratory Co., Ltd. | Broadcast system |
US9715906B2 (en) | 2013-10-02 | 2017-07-25 | Semiconductor Energy Laboratory Co., Ltd. | Bootstrap circuit and semiconductor device having bootstrap circuit |
US9716003B2 (en) | 2013-09-13 | 2017-07-25 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device |
US9715845B2 (en) | 2009-09-16 | 2017-07-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor display device |
US9722090B2 (en) | 2014-06-23 | 2017-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including first gate oxide semiconductor film, and second gate |
US9721968B2 (en) | 2014-02-06 | 2017-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic appliance |
US9722092B2 (en) | 2015-02-25 | 2017-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having a stacked metal oxide |
US9722091B2 (en) | 2014-09-12 | 2017-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9722088B2 (en) | 2013-05-20 | 2017-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9721959B2 (en) | 2013-06-13 | 2017-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9722054B2 (en) | 2008-11-28 | 2017-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9722086B2 (en) | 2009-10-30 | 2017-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit and semiconductor device |
US9729149B2 (en) | 2013-04-19 | 2017-08-08 | Semiconductor Energy Laboratory Co., Ltd. | Low power storage device in which operation speed is maintained |
US9728559B2 (en) | 2015-02-06 | 2017-08-08 | Semiconductor Energy Laboratory Co., Ltd. | Device, manufacturing method thereof, and electronic device |
US9729809B2 (en) | 2014-07-11 | 2017-08-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method of semiconductor device or electronic device |
US9735282B2 (en) | 2014-12-29 | 2017-08-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device having semiconductor device |
US9734914B2 (en) | 2010-05-20 | 2017-08-15 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving a semiconductor device having a reading transistor coupled to an oxide semiconductor writing transistor |
US9735280B2 (en) | 2012-03-02 | 2017-08-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing semiconductor device, and method for forming oxide film |
US9734780B2 (en) | 2010-07-01 | 2017-08-15 | Semiconductor Energy Laboratory Co., Ltd. | Driving method of liquid crystal display device |
US9741794B2 (en) | 2013-08-05 | 2017-08-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9740241B2 (en) | 2010-01-20 | 2017-08-22 | Semiconductor Energy Laboratory Co., Ltd. | Portable electronic device having transistor comprising oxide semiconductor |
US9742356B2 (en) | 2012-04-11 | 2017-08-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device outputting reference voltages |
US9741400B2 (en) | 2015-11-05 | 2017-08-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, memory device, electronic device, and method for operating the semiconductor device |
US9742378B2 (en) | 2012-06-29 | 2017-08-22 | Semiconductor Energy Laboratory Co., Ltd. | Pulse output circuit and semiconductor device |
US9748400B2 (en) | 2011-05-20 | 2017-08-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9748291B2 (en) | 2014-09-26 | 2017-08-29 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device having a third circuit with a region overlapping with a fourth circuit |
US9748355B2 (en) | 2012-07-26 | 2017-08-29 | Semicoductor Energy Laboratory Co., Ltd. | Method for manufacturing oxide semiconductor transistor with low-nitrogen, low-defect insulating film |
US9748399B2 (en) | 2013-04-11 | 2017-08-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device comprising an oxide semiconductor channel region having a different crystal orientation than source/drain regions |
US9748403B2 (en) | 2015-05-22 | 2017-08-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
US9748436B2 (en) | 2009-11-27 | 2017-08-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9748274B2 (en) | 2015-05-26 | 2017-08-29 | Semiconductor Energy Laboratory Co., Ltd. | Memory device comprising stacked memory cells and electronic device including the same |
US9755084B2 (en) | 2012-02-09 | 2017-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Multi-level stacked transistor device including capacitor and different semiconductor materials |
US9754971B2 (en) | 2013-05-18 | 2017-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9754657B2 (en) | 2015-05-14 | 2017-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, memory device, electronic device, and method for driving semiconductor device |
US9755082B2 (en) | 2010-06-11 | 2017-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor with an insulating film including galliium and oxygen |
US9755648B2 (en) | 2013-11-22 | 2017-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9755643B2 (en) | 2014-12-16 | 2017-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including buffer circuit and level shifter circuit, and electronic device including the same |
US9761598B2 (en) | 2013-06-21 | 2017-09-12 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device (PLD) |
US9761733B2 (en) | 2014-12-01 | 2017-09-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing the same |
US9761737B2 (en) | 2013-05-01 | 2017-09-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9761736B2 (en) | 2013-07-25 | 2017-09-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9768315B2 (en) | 2014-04-18 | 2017-09-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device having the same |
US9768317B2 (en) | 2014-12-08 | 2017-09-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method of semiconductor device, and electronic device |
US9766517B2 (en) | 2014-09-05 | 2017-09-19 | Semiconductor Energy Laboratory Co., Ltd. | Display device and display module |
US9768318B2 (en) | 2015-02-12 | 2017-09-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9768279B2 (en) | 2013-04-29 | 2017-09-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9768314B2 (en) | 2013-01-21 | 2017-09-19 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9773787B2 (en) | 2015-11-03 | 2017-09-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, memory device, electronic device, or method for driving the semiconductor device |
US9772702B2 (en) | 2010-03-12 | 2017-09-26 | Semiconductor Energy Laboratory Co., Ltd. | Driving method of display device |
US9773919B2 (en) | 2015-08-26 | 2017-09-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9773832B2 (en) | 2014-12-10 | 2017-09-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9773915B2 (en) | 2013-06-11 | 2017-09-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9780226B2 (en) | 2014-04-25 | 2017-10-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9780121B2 (en) | 2014-03-07 | 2017-10-03 | Semiconductor Energy Laboratory Co., Ltd. | Touch sensor, touch panel, and manufacturing method of touch panel |
US9779782B2 (en) | 2014-12-08 | 2017-10-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9779679B2 (en) | 2009-07-24 | 2017-10-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9780093B2 (en) | 2010-07-02 | 2017-10-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9785566B2 (en) | 2015-11-18 | 2017-10-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, computer, and electronic device |
US9786495B2 (en) | 2014-09-19 | 2017-10-10 | Semiconductor Energy Laboratory Co., Ltd. | Method for evaluating semiconductor film and method for manufacturing semiconductor device |
US9786793B2 (en) | 2012-03-29 | 2017-10-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor layer including regions with different concentrations of resistance-reducing elements |
US9786350B2 (en) | 2013-03-18 | 2017-10-10 | Semiconductor Energy Laboratory Co., Ltd. | Memory device |
US9793905B2 (en) | 2014-10-31 | 2017-10-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9793444B2 (en) | 2012-04-06 | 2017-10-17 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9793801B2 (en) | 2010-05-21 | 2017-10-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device |
US9799773B2 (en) | 2011-02-02 | 2017-10-24 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and semiconductor device |
US9799298B2 (en) | 2010-04-23 | 2017-10-24 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and driving method thereof |
US9799774B2 (en) | 2013-09-26 | 2017-10-24 | Semiconductor Energy Laboratory Co., Ltd. | Switch circuit, semiconductor device, and system |
US9806198B2 (en) | 2013-06-05 | 2017-10-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9806201B2 (en) | 2014-03-07 | 2017-10-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9806200B2 (en) | 2015-03-27 | 2017-10-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9805676B2 (en) | 2012-11-28 | 2017-10-31 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9804645B2 (en) | 2012-01-23 | 2017-10-31 | Semiconductor Energy Laboratory Co., Ltd. | Systems and methods for individually controlling power supply voltage to circuits in a semiconductor device |
US9804462B2 (en) | 2013-12-27 | 2017-10-31 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device comprising transistor using oxide semiconductor |
US9805952B2 (en) | 2013-09-13 | 2017-10-31 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9805641B2 (en) | 2009-09-04 | 2017-10-31 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device including the same |
US9812466B2 (en) | 2014-08-08 | 2017-11-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9812586B2 (en) | 2013-10-22 | 2017-11-07 | Semiconductor Energy Laboratory Co., Ltd. | Transistor with curved active layer |
US9812585B2 (en) | 2013-10-04 | 2017-11-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9812587B2 (en) | 2015-01-26 | 2017-11-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9816173B2 (en) | 2011-10-28 | 2017-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9818880B2 (en) | 2015-02-12 | 2017-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
US9817032B2 (en) | 2012-05-23 | 2017-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Measurement device |
US9819261B2 (en) | 2012-10-25 | 2017-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Central control system |
US9817040B2 (en) | 2014-02-21 | 2017-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Measuring method of low off-state current of transistor |
US9818763B2 (en) | 2013-07-12 | 2017-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing display device |
US9818473B2 (en) | 2014-03-14 | 2017-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including stacked circuits |
US9825179B2 (en) | 2015-08-28 | 2017-11-21 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor, transistor, and semiconductor device |
US9825057B2 (en) | 2013-12-02 | 2017-11-21 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9824888B2 (en) | 2013-05-21 | 2017-11-21 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and formation method thereof |
US9825177B2 (en) | 2015-07-30 | 2017-11-21 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of a semiconductor device using multiple etching mask |
US9825181B2 (en) | 2015-12-11 | 2017-11-21 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, circuit, semiconductor device, display device, and electronic device |
US9831309B2 (en) | 2015-02-11 | 2017-11-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9831274B2 (en) | 2012-11-08 | 2017-11-28 | Semiconductor Energy Laboratory Co., Ltd. | Metal oxide film and method for forming metal oxide film |
US9829533B2 (en) | 2013-03-06 | 2017-11-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor film and semiconductor device |
US9831238B2 (en) | 2014-05-30 | 2017-11-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including insulating film having opening portion and conductive film in the opening portion |
US9831275B2 (en) | 2015-02-04 | 2017-11-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device at low temperature |
US9831353B2 (en) | 2014-12-26 | 2017-11-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device, display module, electronic device, oxide, and manufacturing method of oxide |
US9837546B2 (en) | 2015-03-27 | 2017-12-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9837547B2 (en) | 2015-05-22 | 2017-12-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide conductor and display device including the semiconductor device |
US9837551B2 (en) | 2013-05-02 | 2017-12-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9837157B2 (en) | 2014-05-22 | 2017-12-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and healthcare system |
US9842859B2 (en) | 2008-10-31 | 2017-12-12 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit and display device |
US9842842B2 (en) | 2014-03-19 | 2017-12-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device and semiconductor device and electronic device having the same |
US9841843B2 (en) | 2010-12-15 | 2017-12-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9842938B2 (en) | 2015-03-24 | 2017-12-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including semiconductor device |
US9846515B2 (en) | 2010-05-28 | 2017-12-19 | Semiconductor Energy Laboratory Co., Ltd. | Photodetector and display device with light guide configured to face photodetector circuit and reflect light from a source |
US9847431B2 (en) | 2014-05-30 | 2017-12-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, module, and electronic device |
US9848144B2 (en) | 2014-07-18 | 2017-12-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, imaging device, and electronic device |
US9852703B2 (en) | 2009-12-25 | 2017-12-26 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving liquid crystal display device |
US9852926B2 (en) | 2015-10-20 | 2017-12-26 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method for semiconductor device |
US9852906B2 (en) | 2009-06-30 | 2017-12-26 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9853165B2 (en) | 2014-09-19 | 2017-12-26 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9851776B2 (en) | 2014-05-02 | 2017-12-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9860465B2 (en) | 2015-06-23 | 2018-01-02 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and electronic device |
US9859268B2 (en) | 2011-05-17 | 2018-01-02 | Semiconductor Energy Laboratory Co., Ltd. | Content addressable memory |
US9859114B2 (en) | 2012-02-08 | 2018-01-02 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor device with an oxygen-controlling insulating layer |
US9859905B2 (en) | 2014-09-26 | 2018-01-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, wireless sensor, and electronic device |
US9859117B2 (en) | 2014-10-28 | 2018-01-02 | Semiconductor Energy Laboratory Co., Ltd. | Oxide and method for forming the same |
US9857860B2 (en) | 2012-07-20 | 2018-01-02 | Semiconductor Energy Laboratory Co., Ltd. | Power supply control circuit and signal processing circuit |
US9859439B2 (en) | 2013-09-18 | 2018-01-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9865712B2 (en) | 2015-03-03 | 2018-01-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9865588B2 (en) | 2014-05-30 | 2018-01-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9865743B2 (en) | 2012-10-24 | 2018-01-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide layer surrounding oxide semiconductor layer |
US9869716B2 (en) | 2014-02-07 | 2018-01-16 | Semiconductor Energy Laboratory Co., Ltd. | Device comprising programmable logic element |
US9871143B2 (en) | 2014-03-18 | 2018-01-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9870816B2 (en) | 2013-10-31 | 2018-01-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving semiconductor device |
US9876946B2 (en) | 2015-08-03 | 2018-01-23 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and electronic device |
US9874775B2 (en) | 2014-05-28 | 2018-01-23 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device |
US9876119B2 (en) | 2011-10-05 | 2018-01-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9882014B2 (en) | 2013-11-29 | 2018-01-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9882064B2 (en) | 2016-03-10 | 2018-01-30 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and electronic device |
US9882059B2 (en) | 2013-12-19 | 2018-01-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9882061B2 (en) | 2015-03-17 | 2018-01-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9883129B2 (en) | 2015-09-25 | 2018-01-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9880437B2 (en) | 2013-11-27 | 2018-01-30 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9882058B2 (en) | 2013-05-03 | 2018-01-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9887212B2 (en) | 2014-03-14 | 2018-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9885108B2 (en) | 2012-08-07 | 2018-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming sputtering target |
US9887450B2 (en) | 2010-01-29 | 2018-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device including the same |
US9887297B2 (en) | 2013-09-17 | 2018-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor layer in which thickness of the oxide semiconductor layer is greater than or equal to width of the oxide semiconductor layer |
US9887276B2 (en) | 2009-07-03 | 2018-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device having oxide semiconductor |
US9886150B2 (en) | 2014-09-05 | 2018-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9887291B2 (en) | 2014-03-19 | 2018-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including the semiconductor device, display module including the display device, and electronic device including the semiconductor device, the display device, or the display module |
US9887300B2 (en) | 2014-06-18 | 2018-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and semiconductor device |
US9887010B2 (en) | 2016-01-21 | 2018-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, memory device, and driving method thereof |
US9893194B2 (en) | 2013-09-12 | 2018-02-13 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9893202B2 (en) | 2015-08-19 | 2018-02-13 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9893192B2 (en) | 2013-04-24 | 2018-02-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9898194B2 (en) | 2013-04-12 | 2018-02-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with volatile and non-volatile memories to retain data during power interruption |
US9900006B2 (en) | 2015-12-29 | 2018-02-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, computer, and electronic device |
US9899420B2 (en) | 2013-06-05 | 2018-02-20 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9905598B2 (en) | 2014-04-23 | 2018-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device |
US9905700B2 (en) | 2015-03-13 | 2018-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device or memory device and driving method thereof |
US9905435B2 (en) | 2014-09-12 | 2018-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device comprising oxide semiconductor film |
US9905657B2 (en) | 2016-01-20 | 2018-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9905557B2 (en) | 2011-03-04 | 2018-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9905585B2 (en) | 2012-12-25 | 2018-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising capacitor |
US9905586B2 (en) | 2013-09-25 | 2018-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Capacitor comprising metal oxide film having high alignment |
US9911856B2 (en) | 2009-10-09 | 2018-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9911756B2 (en) | 2015-08-31 | 2018-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including transistor and electronic device surrounded by layer having assigned band gap to prevent electrostatic discharge damage |
US9911755B2 (en) | 2012-12-25 | 2018-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including transistor and capacitor |
US9911757B2 (en) | 2015-12-28 | 2018-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
US9911861B2 (en) | 2015-08-03 | 2018-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method of the same, and electronic device |
US9911858B2 (en) | 2010-12-28 | 2018-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9911625B2 (en) | 2010-02-26 | 2018-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9917109B2 (en) | 2010-03-12 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9915848B2 (en) | 2013-04-19 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9916793B2 (en) | 2012-06-01 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of driving the same |
US9916791B2 (en) | 2015-04-16 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Display device, electronic device, and method for driving display device |
US9918012B2 (en) | 2014-07-18 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Display system, imaging device, monitoring device, display device, and electronic device |
US9917209B2 (en) | 2015-07-03 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device including step of forming trench over semiconductor |
US9923097B2 (en) | 2013-12-06 | 2018-03-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9922692B2 (en) | 2014-03-13 | 2018-03-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including refresh circuit for memory cell |
US9922685B2 (en) | 2009-11-13 | 2018-03-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9922994B2 (en) | 2015-10-29 | 2018-03-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the semiconductor device |
US9929044B2 (en) | 2014-01-30 | 2018-03-27 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device |
US9929279B2 (en) | 2014-02-05 | 2018-03-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9929276B2 (en) | 2012-08-10 | 2018-03-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9935202B2 (en) | 2009-09-16 | 2018-04-03 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and display device comprising oxide semiconductor layer |
US9935617B2 (en) | 2013-12-26 | 2018-04-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9935143B2 (en) | 2015-09-30 | 2018-04-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9935633B2 (en) | 2015-06-30 | 2018-04-03 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit, semiconductor device, electronic component, and electronic device |
US9934740B2 (en) | 2015-05-07 | 2018-04-03 | Semiconductor Energy Laboratory Co., Ltd. | Display system and electronic device |
US9935622B2 (en) | 2011-04-28 | 2018-04-03 | Semiconductor Energy Laboratory Co., Ltd. | Comparator and semiconductor device including comparator |
US9941393B2 (en) | 2009-03-05 | 2018-04-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9947801B2 (en) | 2014-03-28 | 2018-04-17 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and semiconductor device |
US9954111B2 (en) | 2014-03-18 | 2018-04-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9954110B2 (en) | 2011-05-13 | 2018-04-24 | Semiconductor Energy Laboratory Co., Ltd. | EL display device and electronic device |
US9954112B2 (en) | 2015-01-26 | 2018-04-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9954113B2 (en) | 2015-02-09 | 2018-04-24 | Semiconductor Energy Laboratory Co., Ltd. | Transistor including oxide semiconductor, semiconductor device including the transistor, and electronic device including the transistor |
US9952724B2 (en) | 2014-04-18 | 2018-04-24 | Semiconductor Energy Laboratory Co., Ltd. | Display device and operation method thereof |
US9960280B2 (en) | 2013-12-26 | 2018-05-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9960213B2 (en) | 2014-04-25 | 2018-05-01 | Semiconductor Energy Laboratory Co., Ltd. | Input and output device having touch sensor element as input device and display device |
US9960278B2 (en) | 2011-04-06 | 2018-05-01 | Yuhei Sato | Manufacturing method of semiconductor device |
US9966473B2 (en) | 2015-05-11 | 2018-05-08 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9964799B2 (en) | 2015-03-17 | 2018-05-08 | Semiconductor Energy Laboratory Co., Ltd. | Display device, display module, and electronic device |
US9971440B2 (en) | 2010-03-12 | 2018-05-15 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving circuit and method for driving display device |
US9971680B2 (en) | 2014-06-13 | 2018-05-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9979386B2 (en) | 2014-02-28 | 2018-05-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for driving the same, and electronic appliance |
US9984617B2 (en) | 2010-01-20 | 2018-05-29 | Semiconductor Energy Laboratory Co., Ltd. | Display device including light emitting element |
US9989796B2 (en) | 2013-08-28 | 2018-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Display device comprising first and second transistors electrically connected to first and second pixel electrodes |
US9991293B2 (en) | 2011-11-25 | 2018-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9991394B2 (en) | 2015-02-20 | 2018-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and fabrication method thereof |
US9991392B2 (en) | 2013-12-03 | 2018-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9990965B2 (en) | 2011-12-15 | 2018-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Storage device |
US9990207B2 (en) | 2014-02-07 | 2018-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, device, and electronic device |
US9991393B2 (en) | 2014-10-16 | 2018-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, module, and electronic device |
US9998104B2 (en) | 2014-11-21 | 2018-06-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10002971B2 (en) | 2014-07-03 | 2018-06-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
US10002970B2 (en) | 2015-04-30 | 2018-06-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method of the same, or display device including the same |
US10002968B2 (en) | 2011-12-14 | 2018-06-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the same |
US10008513B2 (en) | 2013-09-05 | 2018-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10008609B2 (en) | 2015-03-17 | 2018-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing the same, or display device including the same |
US10008587B2 (en) | 2011-01-26 | 2018-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10007161B2 (en) | 2015-10-26 | 2018-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US10008608B2 (en) | 2008-11-28 | 2018-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US10008149B2 (en) | 2011-07-22 | 2018-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device including pixels suppressing variation in luminance |
US10007133B2 (en) | 2012-10-12 | 2018-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and touch panel |
US10014068B2 (en) | 2011-10-07 | 2018-07-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10014334B2 (en) | 2016-03-08 | 2018-07-03 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device, module, and electronic device |
US10014414B2 (en) | 2013-02-28 | 2018-07-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10020322B2 (en) | 2015-12-29 | 2018-07-10 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and semiconductor device |
US10020330B2 (en) | 2010-08-06 | 2018-07-10 | Semiconductor Energy Laboratory Co., Ltd. | Solid-state image sensing device and semiconductor display device |
US10021329B2 (en) | 2014-07-31 | 2018-07-10 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device, monitoring device, and electronic device |
US10020403B2 (en) | 2014-05-27 | 2018-07-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10019025B2 (en) | 2015-07-30 | 2018-07-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10019348B2 (en) | 2014-12-18 | 2018-07-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including circuit configured to be in resting state |
US10026847B2 (en) | 2011-11-18 | 2018-07-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor element, method for manufacturing semiconductor element, and semiconductor device including semiconductor element |
US10031392B2 (en) | 2015-10-12 | 2018-07-24 | Semiconductor Energy Laboratory Co., Ltd. | Display panel, input/output device, data processor, and method for manufacturing display panel |
US10032925B2 (en) | 2014-05-29 | 2018-07-24 | Semiconductor Energy Laboratory Co., Ltd. | Imaging element, electronic appliance, method for driving imaging device, and method for driving electronic appliance |
US10032872B2 (en) | 2013-05-17 | 2018-07-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing the same, and apparatus for manufacturing semiconductor device |
US10032888B2 (en) | 2014-08-22 | 2018-07-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing semiconductor device, and electronic appliance having semiconductor device |
US10035386B2 (en) | 2015-05-11 | 2018-07-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing semiconductor device, tire, and moving object |
US10038100B2 (en) | 2016-02-12 | 2018-07-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10043913B2 (en) | 2014-04-30 | 2018-08-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor film, semiconductor device, display device, module, and electronic device |
US10050152B2 (en) | 2015-12-16 | 2018-08-14 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, semiconductor device, and electronic device |
US10056497B2 (en) | 2015-04-15 | 2018-08-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10055232B2 (en) | 2014-02-07 | 2018-08-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising memory circuit |
US10061172B2 (en) | 2009-10-16 | 2018-08-28 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic apparatus having the same |
US10068927B2 (en) | 2014-10-23 | 2018-09-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display module, and electronic device |
US10074646B2 (en) | 2008-09-12 | 2018-09-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US10074576B2 (en) | 2014-02-28 | 2018-09-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US10071904B2 (en) | 2014-09-25 | 2018-09-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display module, and electronic device |
US10079053B2 (en) | 2011-04-22 | 2018-09-18 | Semiconductor Energy Laboratory Co., Ltd. | Memory element and memory device |
US10080302B2 (en) | 2013-04-24 | 2018-09-18 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US10084048B2 (en) | 2014-05-07 | 2018-09-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device including the semiconductor device |
US10090333B2 (en) | 2011-05-19 | 2018-10-02 | Semiconductor Energy Laboratory Co., Ltd. | Arithmetic circuit and method of driving the same |
US10088886B2 (en) | 2013-01-24 | 2018-10-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising power gating device |
US10090023B2 (en) | 2013-09-11 | 2018-10-02 | Semiconductor Energy Laboratory Co., Ltd. | Memory device including memory circuit and selection circuit |
US10090031B2 (en) | 2015-02-09 | 2018-10-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising memory circuit and selection circuit |
US10096684B2 (en) | 2015-12-29 | 2018-10-09 | Semiconductor Energy Laboratory Co., Ltd. | Metal oxide film and semiconductor device |
US10096720B2 (en) | 2016-03-25 | 2018-10-09 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, semiconductor device, and electronic device |
US10096628B2 (en) | 2016-03-04 | 2018-10-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10096489B2 (en) | 2014-03-06 | 2018-10-09 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10096715B2 (en) | 2015-03-26 | 2018-10-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing the same, and electronic device |
US10095584B2 (en) | 2013-04-26 | 2018-10-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10115830B2 (en) | 2014-07-29 | 2018-10-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, and electronic device |
US10115741B2 (en) | 2016-02-05 | 2018-10-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10115742B2 (en) | 2016-02-12 | 2018-10-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
US10121905B2 (en) | 2013-09-04 | 2018-11-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10134852B2 (en) | 2012-06-29 | 2018-11-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10134781B2 (en) | 2013-08-23 | 2018-11-20 | Semiconductor Energy Laboratory Co., Ltd. | Capacitor and semiconductor device |
US10134332B2 (en) | 2015-03-18 | 2018-11-20 | Semiconductor Energy Laboratory Co., Ltd. | Display device, electronic device, and driving method of display device |
US10141342B2 (en) | 2014-09-26 | 2018-11-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device |
US10141054B2 (en) | 2015-08-21 | 2018-11-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US10139663B2 (en) | 2015-05-29 | 2018-11-27 | Semiconductor Energy Laboratory Co., Ltd. | Input/output device and electronic device |
US10147747B2 (en) | 2014-08-21 | 2018-12-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, and electronic device |
US10147823B2 (en) | 2015-03-19 | 2018-12-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10158005B2 (en) | 2008-11-07 | 2018-12-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10158008B2 (en) | 2015-10-12 | 2018-12-18 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10159135B2 (en) | 2014-07-31 | 2018-12-18 | Semiconductor Energy Laboratory Co., Ltd. | Flexible display device having first and second display panels overlapping each other and light transmitting layer therebetween |
US10163967B2 (en) | 2015-06-12 | 2018-12-25 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device, method for operating the same, and electronic device |
US10170055B2 (en) | 2014-09-26 | 2019-01-01 | Semiconductor Energy Laboratory Co., Ltd. | Display device and driving method thereof |
US10168809B2 (en) | 2015-03-17 | 2019-01-01 | Semiconductor Energy Laboratory Co., Ltd. | Touch panel |
US10177142B2 (en) | 2015-12-25 | 2019-01-08 | Semiconductor Energy Laboratory Co., Ltd. | Circuit, logic circuit, processor, electronic component, and electronic device |
US10181531B2 (en) | 2015-07-08 | 2019-01-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including transistor having low parasitic capacitance |
US10192995B2 (en) | 2015-04-28 | 2019-01-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10199394B2 (en) | 2013-10-22 | 2019-02-05 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US10197627B2 (en) | 2013-11-07 | 2019-02-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10204925B2 (en) | 2014-10-06 | 2019-02-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10211344B2 (en) | 2009-10-16 | 2019-02-19 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit and semiconductor device |
US10217736B2 (en) | 2013-09-23 | 2019-02-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including transistor and capacitor |
US10229934B2 (en) | 2012-12-25 | 2019-03-12 | Semiconductor Energy Laboratory Co., Ltd. | Resistor, display device, and electronic device |
US10236287B2 (en) | 2013-09-23 | 2019-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including semiconductor electrically surrounded by electric field of conductive film |
US10234983B2 (en) | 2015-09-11 | 2019-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Input/output panel, input/output device, and data processor |
US10236387B2 (en) | 2015-09-18 | 2019-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10235289B2 (en) | 2015-02-26 | 2019-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Storage system and storage control circuit |
US10236875B2 (en) | 2016-04-15 | 2019-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for operating the semiconductor device |
US10249644B2 (en) | 2015-02-13 | 2019-04-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
US10249765B2 (en) | 2014-11-21 | 2019-04-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10249764B2 (en) | 2012-02-09 | 2019-04-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including semiconductor device, electronic device including semiconductor device, and method for manufacturing semiconductor device |
US10249347B2 (en) | 2013-11-13 | 2019-04-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving semiconductor device |
US10250247B2 (en) | 2016-02-10 | 2019-04-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US10263114B2 (en) | 2016-03-04 | 2019-04-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing the same, or display device including the same |
US10263117B2 (en) | 2014-01-24 | 2019-04-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10276724B2 (en) | 2015-07-14 | 2019-04-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10283627B2 (en) | 2009-05-29 | 2019-05-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10290573B2 (en) | 2015-07-02 | 2019-05-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10290693B2 (en) | 2015-08-07 | 2019-05-14 | Semiconductor Energy Laboratory Co., Ltd. | Display panel and method for driving the same |
US10304859B2 (en) | 2013-04-12 | 2019-05-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having an oxide film on an oxide semiconductor film |
US10316404B2 (en) | 2014-12-26 | 2019-06-11 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing sputtering target |
US10347769B2 (en) | 2013-03-25 | 2019-07-09 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor with multi-layer source/drain electrodes |
US10347197B2 (en) | 2009-12-28 | 2019-07-09 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device |
US10345661B2 (en) | 2014-04-22 | 2019-07-09 | Semiconductor Energy Laboratory Co., Ltd. | Display device, display module, and electronic device |
US10361290B2 (en) | 2014-03-14 | 2019-07-23 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device comprising adding oxygen to buffer film and insulating film |
US10367014B2 (en) | 2014-10-28 | 2019-07-30 | Semiconductor Energy Laboratory Co., Ltd. | Display device, manufacturing method of display device, and electronic device |
US10367095B2 (en) | 2015-03-03 | 2019-07-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing the same, or display device including the same |
US10372274B2 (en) | 2015-04-13 | 2019-08-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and touch panel |
US10381486B2 (en) | 2015-07-30 | 2019-08-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
US10389961B2 (en) | 2015-04-09 | 2019-08-20 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and electronic device |
US10396210B2 (en) | 2014-12-26 | 2019-08-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with stacked metal oxide and oxide semiconductor layers and display device including the semiconductor device |
US10403646B2 (en) | 2015-02-20 | 2019-09-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10403760B2 (en) | 2015-03-03 | 2019-09-03 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film, semiconductor device including the oxide semiconductor film, and display device including the semiconductor device |
US10411013B2 (en) | 2016-01-22 | 2019-09-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and memory device |
US10416517B2 (en) | 2008-11-14 | 2019-09-17 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US10416504B2 (en) | 2013-05-21 | 2019-09-17 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US10424671B2 (en) | 2015-07-29 | 2019-09-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, circuit board, and electronic device |
US10430093B2 (en) | 2016-04-15 | 2019-10-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US10429704B2 (en) | 2015-03-26 | 2019-10-01 | Semiconductor Energy Laboratory Co., Ltd. | Display device, display module including the display device, and electronic device including the display device or the display module |
US10438982B2 (en) | 2015-03-30 | 2019-10-08 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device including step of simultaneous formation of plurality of contact openings |
US10439068B2 (en) | 2015-02-12 | 2019-10-08 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
US10453846B2 (en) | 2010-09-13 | 2019-10-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10460984B2 (en) | 2015-04-15 | 2019-10-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for fabricating electrode and semiconductor device |
US10483365B2 (en) | 2015-08-31 | 2019-11-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10490553B2 (en) | 2009-10-29 | 2019-11-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10505051B2 (en) | 2015-05-04 | 2019-12-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing the same, and electronic device |
US10501003B2 (en) | 2015-07-17 | 2019-12-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, lighting device, and vehicle |
US10503018B2 (en) | 2013-06-05 | 2019-12-10 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US10522693B2 (en) | 2015-01-16 | 2019-12-31 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and electronic device |
US10529286B2 (en) | 2014-05-09 | 2020-01-07 | Semiconductor Energy Laboratory Co., Ltd. | Display correction circuit, display correction system, and display device |
US10529740B2 (en) | 2013-07-25 | 2020-01-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including semiconductor layer and conductive layer |
US10557192B2 (en) | 2012-08-07 | 2020-02-11 | Semiconductor Energy Laboratory Co., Ltd. | Method for using sputtering target and method for forming oxide film |
US10559667B2 (en) | 2014-08-25 | 2020-02-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for measuring current of semiconductor device |
US10566355B2 (en) | 2015-12-18 | 2020-02-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the same |
US10566459B2 (en) | 2009-10-30 | 2020-02-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having a first region comprising silicon, oxygen and at least one metal element formed between an oxide semiconductor layer and an insulating layer |
US10580798B2 (en) | 2016-01-15 | 2020-03-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10585506B2 (en) | 2015-07-30 | 2020-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Display device with high visibility regardless of illuminance of external light |
US10593172B2 (en) | 2014-05-16 | 2020-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device, monitoring device, and electronic appliance |
US10629627B2 (en) | 2009-09-04 | 2020-04-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10651203B2 (en) | 2014-06-13 | 2020-05-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising a sensing unit |
US10656799B2 (en) | 2014-05-02 | 2020-05-19 | Semiconductor Energy Laboratory Co., Ltd. | Display device and operation method thereof |
US10665611B2 (en) | 2016-06-03 | 2020-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Metal oxide and field-effect transistor |
US10672913B2 (en) | 2012-12-25 | 2020-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10671204B2 (en) | 2015-05-04 | 2020-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Touch panel and data processor |
US10674168B2 (en) | 2015-10-23 | 2020-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10680017B2 (en) | 2014-11-07 | 2020-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting element including EL layer, electrode which has high reflectance and a high work function, display device, electronic device, and lighting device |
US10693013B2 (en) | 2015-04-13 | 2020-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
US10693012B2 (en) | 2015-03-27 | 2020-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10700212B2 (en) | 2016-01-28 | 2020-06-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, semiconductor wafer, module, electronic device, and manufacturing method thereof |
US10749033B2 (en) | 2010-03-08 | 2020-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US10804272B2 (en) | 2016-06-22 | 2020-10-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10847116B2 (en) | 2009-11-30 | 2020-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Reducing pixel refresh rate for still images using oxide transistors |
US10861980B2 (en) | 2014-03-20 | 2020-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including semiconductor device, display module including display device, and electronic device including semiconductor device, display device, and display module |
US10868045B2 (en) | 2015-12-11 | 2020-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, semiconductor device, and electronic device |
US10865470B2 (en) | 2016-01-18 | 2020-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Metal oxide film, semiconductor device, and display device |
US10872982B2 (en) | 2012-02-28 | 2020-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10879360B2 (en) | 2016-05-19 | 2020-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Composite oxide semiconductor and transistor |
US10922605B2 (en) | 2015-10-23 | 2021-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10978489B2 (en) | 2015-07-24 | 2021-04-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display panel, method for manufacturing semiconductor device, method for manufacturing display panel, and information processing device |
US10985278B2 (en) | 2015-07-21 | 2021-04-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10998448B2 (en) | 2014-05-15 | 2021-05-04 | Semiconductor Energy Laboratory Co., Ltd. | Thin film semiconductor device including back gate comprising oxide semiconductor material |
US11013087B2 (en) | 2012-03-13 | 2021-05-18 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device having circuits and method for driving the same |
US11024725B2 (en) | 2015-07-24 | 2021-06-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including metal oxide film |
US11183597B2 (en) | 2009-09-16 | 2021-11-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US11189642B2 (en) | 2010-09-10 | 2021-11-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and light-emitting device |
US11189736B2 (en) | 2015-07-24 | 2021-11-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US11222906B2 (en) | 2010-02-23 | 2022-01-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device, semiconductor device, and driving method thereof |
US11233132B2 (en) | 2009-03-05 | 2022-01-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11296120B2 (en) | 2009-10-09 | 2022-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Shift register and display device and driving method thereof |
US11404585B2 (en) | 2013-07-08 | 2022-08-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US11430817B2 (en) | 2013-11-29 | 2022-08-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11437524B2 (en) | 2016-03-04 | 2022-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, and display device including the semiconductor device |
US11489077B2 (en) | 2011-05-25 | 2022-11-01 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming oxide semiconductor film, semiconductor device, and method for manufacturing semiconductor device |
US11581439B2 (en) | 2013-06-27 | 2023-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11705523B2 (en) | 2005-10-20 | 2023-07-18 | Canon Kabushiki Kaisha | Field-effect transistor including transparent oxide and light-shielding member, and display utilizing the transistor |
US11728356B2 (en) | 2015-05-14 | 2023-08-15 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion element and imaging device |
US11848341B2 (en) | 2015-01-30 | 2023-12-19 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and electronic device |
US11963360B2 (en) | 2015-05-26 | 2024-04-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
-
1992
- 1992-03-04 JP JP4081483A patent/JPH05251705A/en active Pending
Cited By (3062)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1746659A3 (en) * | 1998-11-17 | 2008-07-23 | Japan Science and Technology Agency | Transistor and semiconductor device |
EP1746659A2 (en) * | 1998-11-17 | 2007-01-24 | Japan Science and Technology Agency | Transistor and semiconductor device |
US6563174B2 (en) | 2001-09-10 | 2003-05-13 | Sharp Kabushiki Kaisha | Thin film transistor and matrix display device |
US7888207B2 (en) | 2002-05-21 | 2011-02-15 | State of Oregon Acting by and through the Oregon State Board of Higher Eduacation on behalf of Oregon State University | Transistor structures and methods for making the same |
US7339187B2 (en) | 2002-05-21 | 2008-03-04 | State Of Oregon Acting By And Through The Oregon State Board Of Higher Education On Behalf Of Oregon State University | Transistor structures |
US7189992B2 (en) | 2002-05-21 | 2007-03-13 | State Of Oregon Acting By And Through The Oregon State Board Of Higher Education On Behalf Of Oregon State University | Transistor structures having a transparent channel |
JP2004014982A (en) * | 2002-06-11 | 2004-01-15 | Konica Minolta Holdings Inc | Semiconductor circuit and image display device |
JP2004103957A (en) | 2002-09-11 | 2004-04-02 | Japan Science & Technology Corp | Transparent thin film field effect type transistor using homologous thin film as active layer |
JP2005011571A (en) * | 2003-06-17 | 2005-01-13 | Seiko Epson Corp | Electroluminescent display device, wiring board for electroluminescent display device, manufacturing method of electroluminescent display device, and electronic apparatus |
JP4572510B2 (en) * | 2003-06-17 | 2010-11-04 | セイコーエプソン株式会社 | ELECTROLUMINESCENT DISPLAY DEVICE AND ELECTRONIC DEVICE |
US10032930B2 (en) | 2004-03-12 | 2018-07-24 | Japan Science And Technology Agency | Amorphous oxide and thin film transistor |
US20110101352A1 (en) * | 2004-03-12 | 2011-05-05 | Japan Science And Technology Agency | Amorphous oxide and thin film transistor |
US8314420B2 (en) * | 2004-03-12 | 2012-11-20 | Hewlett-Packard Development Company, L.P. | Semiconductor device with multiple component oxide channel |
US9947803B2 (en) | 2004-03-12 | 2018-04-17 | Japan Science And Technology Agency | Amorphous oxide and thin film transistor |
US9269826B2 (en) | 2004-03-12 | 2016-02-23 | Japan Science And Technology Agency | Amorphous oxide and thin film transistor |
JP2010219538A (en) | 2004-03-12 | 2010-09-30 | Japan Science & Technology Agency | Amorphous oxide thin film |
US10032931B2 (en) | 2004-03-12 | 2018-07-24 | Japan Science And Technology Agency | Switching element |
JP2012248853A (en) * | 2004-11-10 | 2012-12-13 | Canon Inc | Amorphous oxide and field effect transistor |
US10615287B2 (en) | 2004-11-10 | 2020-04-07 | Canon Kabushiki Kaisha | Amorphous oxide and field effect transistor |
JP2006165532A (en) * | 2004-11-10 | 2006-06-22 | Canon Inc | Semiconductor device utilizing amorphous oxide |
US7453065B2 (en) | 2004-11-10 | 2008-11-18 | Canon Kabushiki Kaisha | Sensor and image pickup device |
JP2012231153A (en) * | 2004-11-10 | 2012-11-22 | Canon Inc | Semiconductor device with amorphous oxide utilized therein |
JP2006165528A (en) * | 2004-11-10 | 2006-06-22 | Canon Inc | Image display |
US7601984B2 (en) | 2004-11-10 | 2009-10-13 | Canon Kabushiki Kaisha | Field effect transistor with amorphous oxide active layer containing microcrystals and gate electrode opposed to active layer through gate insulator |
JP2006165527A (en) * | 2004-11-10 | 2006-06-22 | Canon Inc | Field effect transistor |
JP2006165531A (en) * | 2004-11-10 | 2006-06-22 | Canon Inc | Method of manufacturing field effect transistor |
JP2006173580A (en) * | 2004-11-10 | 2006-06-29 | Canon Inc | Field effect transistor |
JP2012164986A (en) * | 2004-11-10 | 2012-08-30 | Canon Inc | Field effect transistor manufacturing method |
JP2012160740A (en) * | 2004-11-10 | 2012-08-23 | Canon Inc | Method of manufacturing field effect transistor |
US7791072B2 (en) | 2004-11-10 | 2010-09-07 | Canon Kabushiki Kaisha | Display |
US9130049B2 (en) | 2004-11-10 | 2015-09-08 | Canon Kabushiki Kaisha | Amorphous oxide and field effect transistor |
JP2012151485A (en) * | 2004-11-10 | 2012-08-09 | Canon Inc | Image display |
US7829444B2 (en) | 2004-11-10 | 2010-11-09 | Canon Kabushiki Kaisha | Field effect transistor manufacturing method |
US7863611B2 (en) | 2004-11-10 | 2011-01-04 | Canon Kabushiki Kaisha | Integrated circuits utilizing amorphous oxides |
US7868326B2 (en) | 2004-11-10 | 2011-01-11 | Canon Kabushiki Kaisha | Field effect transistor |
US7872259B2 (en) | 2004-11-10 | 2011-01-18 | Canon Kabushiki Kaisha | Light-emitting device |
US8237166B2 (en) | 2004-11-10 | 2012-08-07 | Canon Kabushiki Kaisha | Display |
US8212252B2 (en) | 2004-11-10 | 2012-07-03 | Canon Kabushiki Kaisha | Light-emitting device |
JP2012124532A (en) * | 2004-11-10 | 2012-06-28 | Canon Inc | Method for manufacturing field-effect transistor |
US8203146B2 (en) | 2004-11-10 | 2012-06-19 | Canon Kabushiki Kaisha | Integrated circuits utilizing amorphous oxides |
JP2006186319A (en) * | 2004-11-10 | 2006-07-13 | Canon Inc | Light emitting device and indicating device |
US8168974B2 (en) | 2004-11-10 | 2012-05-01 | Canon Kabushiki Kaisha | Field effect transistor |
US9583637B2 (en) | 2004-11-10 | 2017-02-28 | Canon Kabushiki Kaisha | Amorphous oxide and field effect transistor |
JP2006165529A (en) * | 2004-11-10 | 2006-06-22 | Canon Inc | Amorphous oxide and field effect transistor |
JP2011249823A (en) * | 2004-11-10 | 2011-12-08 | Canon Inc | Amorphous oxide and electric field effect transistor |
JP2011256108A (en) * | 2004-11-10 | 2011-12-22 | Canon Inc | Amorphous oxide and field effect transistor |
US9356152B2 (en) | 2005-01-28 | 2016-05-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic device, and method of manufacturing semiconductor device |
JP2006242987A (en) * | 2005-02-28 | 2006-09-14 | Casio Comput Co Ltd | Thin film transistor panel |
US9208723B2 (en) | 2005-04-19 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including transistor with oxide semiconductor |
US10224347B2 (en) | 2005-06-30 | 2019-03-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device, and electronic appliance |
US11444106B2 (en) | 2005-06-30 | 2022-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device, and electronic appliance |
US9640558B2 (en) | 2005-06-30 | 2017-05-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device, and electronic appliance |
US10903244B2 (en) | 2005-06-30 | 2021-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device, and electronic appliance |
US8981443B2 (en) | 2005-06-30 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device, and electronic appliance |
US9318053B2 (en) | 2005-07-04 | 2016-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9613568B2 (en) | 2005-07-14 | 2017-04-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
JP2014160830A (en) * | 2005-09-06 | 2014-09-04 | Canon Inc | Liquid crystal display device |
JP2010183108A (en) * | 2005-09-06 | 2010-08-19 | Canon Inc | Field effect transistor using amorphous oxide film as channel layer, method for manufacturing field effect transistor using amorphous oxide film as channel layer, and method for manufacturing amorphous oxide film |
JP2013128127A (en) * | 2005-09-06 | 2013-06-27 | Canon Inc | Display unit |
US8743030B2 (en) | 2005-09-16 | 2014-06-03 | Semiconductor Energy Laboratory Co., Ltd. | Display device and driving method of display device |
US9294126B2 (en) | 2005-09-21 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Cyclic redundancy check circuit and semiconductor device having the cyclic redundancy check circuit |
US8627170B2 (en) | 2005-09-21 | 2014-01-07 | Semiconductor Energy Laboratory Co., Ltd. | Cyclic redundancy check circuit and semiconductor device having the cyclic redundancy check circuit |
US9009563B2 (en) | 2005-09-21 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Cyclic redundancy check circuit and semiconductor device having the cyclic redundancy check circuit |
US9099562B2 (en) | 2005-09-29 | 2015-08-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10304962B2 (en) | 2005-09-29 | 2019-05-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9312393B2 (en) | 2005-10-14 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Transistor having tapered gate electrode |
US8785990B2 (en) | 2005-10-14 | 2014-07-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including first and second or drain electrodes and manufacturing method thereof |
US11705523B2 (en) | 2005-10-20 | 2023-07-18 | Canon Kabushiki Kaisha | Field-effect transistor including transparent oxide and light-shielding member, and display utilizing the transistor |
JP2007142196A (en) * | 2005-11-18 | 2007-06-07 | Idemitsu Kosan Co Ltd | Semiconductor thin film, manufacturing method thereof, and thin-film transistor |
US9703140B2 (en) | 2005-12-28 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
US10739637B2 (en) | 2005-12-28 | 2020-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
US11269214B2 (en) | 2005-12-28 | 2022-03-08 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
US8634044B2 (en) | 2005-12-28 | 2014-01-21 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
US10444564B1 (en) | 2005-12-28 | 2019-10-15 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
US7906780B2 (en) | 2006-01-30 | 2011-03-15 | Canon Kabushiki Kaisha | Field effect transistor |
US8854191B2 (en) | 2006-03-10 | 2014-10-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for operating the same |
US7696513B2 (en) | 2006-03-17 | 2010-04-13 | Canon Kabushiki Kaisha | Light-emitting device using oxide semiconductor thin-film transistor and image display apparatus using the same |
US11442317B2 (en) | 2006-04-06 | 2022-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device, semiconductor device, and electronic appliance |
US9213206B2 (en) | 2006-04-06 | 2015-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device, semiconductor device, and electronic appliance |
US11073729B2 (en) | 2006-04-06 | 2021-07-27 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device, semiconductor device, and electronic appliance |
US9958736B2 (en) | 2006-04-06 | 2018-05-01 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device, semiconductor device, and electronic appliance |
US11921382B2 (en) | 2006-04-06 | 2024-03-05 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device, semiconductor device, and electronic appliance |
US11644720B2 (en) | 2006-04-06 | 2023-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device, semiconductor device, and electronic appliance |
US9207504B2 (en) | 2006-04-06 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device, semiconductor device, and electronic appliance |
US10684517B2 (en) | 2006-04-06 | 2020-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device, semiconductor device, and electronic appliance |
TWI449179B (en) * | 2006-04-13 | 2014-08-11 | Idemitsu Kosan Co | Photovoltaic device, TFT substrate for current control, and method of manufacturing the same |
WO2007119727A1 (en) * | 2006-04-13 | 2007-10-25 | Idemitsu Kosan Co., Ltd. | Electro-optic device, and tft substrate for current control and method for manufacturing the same |
JP2007286150A (en) * | 2006-04-13 | 2007-11-01 | Idemitsu Kosan Co Ltd | Electrooptical device, and tft substrate for controlling electric current and method of manufacturing the same |
JP2008072011A (en) * | 2006-09-15 | 2008-03-27 | Toppan Printing Co Ltd | Method of manufacturing thin-film transistor |
US7791082B2 (en) | 2006-09-27 | 2010-09-07 | Canon Kabushiki Kaisha | Semiconductor apparatus and method of manufacturing the same |
US10978497B2 (en) | 2006-09-29 | 2021-04-13 | Seminconductor Energy Laboratory Co., Ltd. | Display device |
US10134775B2 (en) | 2006-09-29 | 2018-11-20 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US10685987B2 (en) | 2006-09-29 | 2020-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US10062716B2 (en) | 2006-09-29 | 2018-08-28 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9245891B2 (en) | 2006-09-29 | 2016-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Display device including at least six transistors |
US9583513B2 (en) | 2006-09-29 | 2017-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US10553618B2 (en) | 2006-09-29 | 2020-02-04 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US10281788B2 (en) | 2007-05-17 | 2019-05-07 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US10989974B2 (en) | 2007-05-17 | 2021-04-27 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US11803092B2 (en) | 2007-05-17 | 2023-10-31 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US10948794B2 (en) | 2007-05-17 | 2021-03-16 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US11493816B2 (en) | 2007-05-17 | 2022-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US9341908B2 (en) | 2007-05-17 | 2016-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US9645461B2 (en) | 2007-05-18 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US11300841B2 (en) | 2007-05-18 | 2022-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US10012880B2 (en) | 2007-05-18 | 2018-07-03 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US9360722B2 (en) | 2007-05-18 | 2016-06-07 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US11940697B2 (en) | 2007-05-18 | 2024-03-26 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
WO2009011224A1 (en) * | 2007-07-18 | 2009-01-22 | Konica Minolta Holdings, Inc. | Method for producing metal oxide semiconductor, and thin film transistor obtained from the metal oxide semiconductor |
US8913050B2 (en) | 2007-07-25 | 2014-12-16 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device and electronic device having the same |
WO2009031381A1 (en) * | 2007-09-07 | 2009-03-12 | Konica Minolta Holdings, Inc. | Metal oxide semiconductor manufacturing method and thin film transistor obtained by the method |
US11646322B2 (en) | 2008-05-16 | 2023-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having conductive oxide electrode layers in direct contact with oxide semiconductor layer |
US10580797B2 (en) | 2008-05-16 | 2020-03-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
US9041202B2 (en) | 2008-05-16 | 2015-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
US9397255B2 (en) | 2008-05-16 | 2016-07-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
US11133332B2 (en) | 2008-05-16 | 2021-09-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
US10665195B2 (en) | 2008-06-17 | 2020-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, display device, and electronic device |
US11837189B2 (en) | 2008-06-17 | 2023-12-05 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, display device, and electronic device |
US11455968B2 (en) | 2008-06-17 | 2022-09-27 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, display device, and electronic device |
US11620962B2 (en) | 2008-06-17 | 2023-04-04 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, display device, and electronic device |
US10971103B2 (en) | 2008-06-17 | 2021-04-06 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, display device, and electronic device |
US9311876B2 (en) | 2008-06-17 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, display device, and electronic device |
US10121435B2 (en) | 2008-06-17 | 2018-11-06 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, display device, and electronic device |
US10529741B2 (en) | 2008-07-10 | 2020-01-07 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device and electronic device using the same |
US10483288B2 (en) | 2008-07-10 | 2019-11-19 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device and electronic device using the same |
US10916567B2 (en) | 2008-07-10 | 2021-02-09 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device and electronic device using the same |
US11631702B2 (en) | 2008-07-10 | 2023-04-18 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device and electronic device using the same |
US9006965B2 (en) | 2008-07-10 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device and electronic device using the same |
US8945981B2 (en) | 2008-07-31 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8841710B2 (en) | 2008-07-31 | 2014-09-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9412798B2 (en) | 2008-07-31 | 2016-08-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9087745B2 (en) | 2008-07-31 | 2015-07-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10937897B2 (en) | 2008-07-31 | 2021-03-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9496406B2 (en) | 2008-07-31 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9859441B2 (en) | 2008-07-31 | 2018-01-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US11296121B2 (en) | 2008-07-31 | 2022-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10326025B2 (en) | 2008-07-31 | 2019-06-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10930792B2 (en) | 2008-07-31 | 2021-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9666719B2 (en) | 2008-07-31 | 2017-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10559695B2 (en) | 2008-07-31 | 2020-02-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9111804B2 (en) | 2008-07-31 | 2015-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9437748B2 (en) | 2008-08-08 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9105659B2 (en) | 2008-08-08 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9236456B2 (en) | 2008-08-08 | 2016-01-12 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9166058B2 (en) | 2008-08-08 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10205030B2 (en) | 2008-08-08 | 2019-02-12 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8900917B2 (en) | 2008-08-08 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9793416B2 (en) | 2008-08-08 | 2017-10-17 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8946703B2 (en) | 2008-08-08 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9196713B2 (en) | 2008-09-01 | 2015-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device having oxide semiconductor layer |
US10128381B2 (en) | 2008-09-01 | 2018-11-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with oxygen rich gate insulating layer |
US11824124B2 (en) | 2008-09-01 | 2023-11-21 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device including transistor comprising oxide semiconductor |
US9397194B2 (en) | 2008-09-01 | 2016-07-19 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device with oxide semiconductor ohmic conatct layers |
US10734530B2 (en) | 2008-09-01 | 2020-08-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor |
US9911865B2 (en) | 2008-09-01 | 2018-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the semiconductor device |
US9224839B2 (en) | 2008-09-01 | 2015-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9082857B2 (en) | 2008-09-01 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising an oxide semiconductor layer |
US11201249B2 (en) | 2008-09-01 | 2021-12-14 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device comprising an oxide semiconductor |
US10256349B2 (en) | 2008-09-01 | 2019-04-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the semiconductor device |
US10074646B2 (en) | 2008-09-12 | 2018-09-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9257594B2 (en) | 2008-09-12 | 2016-02-09 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor with an oxide semiconductor layer |
US10236303B2 (en) | 2008-09-12 | 2019-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having oxide semiconductor layer |
US8941114B2 (en) | 2008-09-12 | 2015-01-27 | Semiconductor Energy Laboratory Co., Ltd. | Display device including protective circuit |
US11024763B2 (en) | 2008-09-12 | 2021-06-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10181545B2 (en) | 2008-09-12 | 2019-01-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10229904B2 (en) | 2008-09-19 | 2019-03-12 | Semiconductor Energy Laboratory Co., Ltd. | Display device including oxide semiconductor layer |
US10032796B2 (en) | 2008-09-19 | 2018-07-24 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US11610918B2 (en) | 2008-09-19 | 2023-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US10756080B2 (en) | 2008-09-19 | 2020-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including protection circuit |
US9196633B2 (en) | 2008-09-19 | 2015-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US10559599B2 (en) | 2008-09-19 | 2020-02-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US11139359B2 (en) | 2008-09-19 | 2021-10-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9478597B2 (en) | 2008-09-19 | 2016-10-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9048320B2 (en) | 2008-09-19 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Display device including oxide semiconductor layer |
US11152397B2 (en) | 2008-09-19 | 2021-10-19 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US11646321B2 (en) | 2008-09-19 | 2023-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US10559598B2 (en) | 2008-09-19 | 2020-02-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9343517B2 (en) | 2008-09-19 | 2016-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9196593B2 (en) | 2008-10-01 | 2015-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9324874B2 (en) | 2008-10-03 | 2016-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Display device comprising an oxide semiconductor |
US9082688B2 (en) | 2008-10-03 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9978776B2 (en) | 2008-10-03 | 2018-05-22 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US10367006B2 (en) | 2008-10-03 | 2019-07-30 | Semiconductor Energy Laboratory Co., Ltd. | Display Device |
US8907335B2 (en) | 2008-10-03 | 2014-12-09 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
US9659969B2 (en) | 2008-10-03 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US11574932B2 (en) | 2008-10-03 | 2023-02-07 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9048144B2 (en) | 2008-10-03 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US10573665B2 (en) | 2008-10-03 | 2020-02-25 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9570470B2 (en) | 2008-10-03 | 2017-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9589988B2 (en) | 2008-10-03 | 2017-03-07 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
US10685985B2 (en) | 2008-10-03 | 2020-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US10910408B2 (en) | 2008-10-03 | 2021-02-02 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9915843B2 (en) | 2008-10-08 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Display device with pixel including capacitor |
US9130067B2 (en) | 2008-10-08 | 2015-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9703157B2 (en) | 2008-10-08 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US10254607B2 (en) | 2008-10-08 | 2019-04-09 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US10211240B2 (en) | 2008-10-22 | 2019-02-19 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9853069B2 (en) | 2008-10-22 | 2017-12-26 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9373525B2 (en) | 2008-10-22 | 2016-06-21 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8912040B2 (en) | 2008-10-22 | 2014-12-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9691789B2 (en) | 2008-10-22 | 2017-06-27 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10141343B2 (en) | 2008-10-24 | 2018-11-27 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor, thin film transistor, and display device |
US9318512B2 (en) | 2008-10-24 | 2016-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9647137B2 (en) | 2008-10-24 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor, thin film transistor, and display device |
US10763372B2 (en) | 2008-10-24 | 2020-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with dual and single gate structure transistors |
US11594555B2 (en) | 2008-10-24 | 2023-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor, thin film transistor, and display device |
US10170632B2 (en) | 2008-10-24 | 2019-01-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor layer |
US9123751B2 (en) | 2008-10-24 | 2015-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10978490B2 (en) | 2008-10-24 | 2021-04-13 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor, thin film transistor, and display device |
US9000431B2 (en) | 2008-10-24 | 2015-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9029851B2 (en) | 2008-10-24 | 2015-05-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising an oxide semiconductor layer |
US9111806B2 (en) | 2008-10-24 | 2015-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor, thin film transistor, and display device |
US8878172B2 (en) | 2008-10-24 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor, thin film transistor, and display device |
US9136389B2 (en) | 2008-10-24 | 2015-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor, thin film transistor, and display device |
US8980685B2 (en) | 2008-10-24 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing thin film transistor using multi-tone mask |
US9219158B2 (en) | 2008-10-24 | 2015-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10153380B2 (en) | 2008-10-24 | 2018-12-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9601603B2 (en) | 2008-10-24 | 2017-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8878178B2 (en) | 2008-10-24 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10692894B2 (en) | 2008-10-24 | 2020-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor, thin film transistor, and display device |
US11563124B2 (en) | 2008-10-24 | 2023-01-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including flip-flop circuit which includes transistors |
US9911860B2 (en) | 2008-10-31 | 2018-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US11594643B2 (en) | 2008-10-31 | 2023-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9842942B2 (en) | 2008-10-31 | 2017-12-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US11107928B2 (en) | 2008-10-31 | 2021-08-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10269978B2 (en) | 2008-10-31 | 2019-04-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9083334B2 (en) | 2008-10-31 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit |
US9842859B2 (en) | 2008-10-31 | 2017-12-12 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit and display device |
US9349874B2 (en) | 2008-10-31 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8980665B2 (en) | 2008-11-07 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US11239332B2 (en) | 2008-11-07 | 2022-02-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9293545B2 (en) | 2008-11-07 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10665684B2 (en) | 2008-11-07 | 2020-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9847396B2 (en) | 2008-11-07 | 2017-12-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9231110B2 (en) | 2008-11-07 | 2016-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10158005B2 (en) | 2008-11-07 | 2018-12-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10411102B2 (en) | 2008-11-07 | 2019-09-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9112038B2 (en) | 2008-11-13 | 2015-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9054203B2 (en) | 2008-11-13 | 2015-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9559212B2 (en) | 2008-11-13 | 2017-01-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10416517B2 (en) | 2008-11-14 | 2019-09-17 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US10901283B2 (en) | 2008-11-14 | 2021-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US11604391B2 (en) | 2008-11-14 | 2023-03-14 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US10403763B2 (en) | 2008-11-20 | 2019-09-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9893200B2 (en) | 2008-11-20 | 2018-02-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9252288B2 (en) | 2008-11-20 | 2016-02-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9893089B2 (en) | 2008-11-21 | 2018-02-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9570619B2 (en) | 2008-11-21 | 2017-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10622381B2 (en) | 2008-11-21 | 2020-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US11374028B2 (en) | 2008-11-21 | 2022-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10243006B2 (en) | 2008-11-21 | 2019-03-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US11776967B2 (en) | 2008-11-21 | 2023-10-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8907348B2 (en) | 2008-11-21 | 2014-12-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9450133B2 (en) | 2008-11-28 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Photosensor and display device |
US10008608B2 (en) | 2008-11-28 | 2018-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US10424674B2 (en) | 2008-11-28 | 2019-09-24 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US10985282B2 (en) | 2008-11-28 | 2021-04-20 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US11869978B2 (en) | 2008-11-28 | 2024-01-09 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US9722054B2 (en) | 2008-11-28 | 2017-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US11175542B2 (en) | 2008-12-03 | 2021-11-16 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US10095071B2 (en) | 2008-12-03 | 2018-10-09 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device including transistor which includes oxide semiconductor |
US9348189B2 (en) | 2008-12-03 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US10838264B2 (en) | 2008-12-03 | 2020-11-17 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US8999750B2 (en) | 2008-12-05 | 2015-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9201280B2 (en) | 2008-12-05 | 2015-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP2010141140A (en) * | 2008-12-11 | 2010-06-24 | Nippon Hoso Kyokai <Nhk> | Color image sensor |
US10439050B2 (en) | 2008-12-19 | 2019-10-08 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing transistor |
US8883554B2 (en) | 2008-12-19 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device using an oxide semiconductor |
US9601601B2 (en) | 2008-12-19 | 2017-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing transistor |
US9941310B2 (en) | 2008-12-24 | 2018-04-10 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit with oxide semiconductor layers having varying hydrogen concentrations |
US9443888B2 (en) | 2008-12-24 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device including transistor and resistor incorporating hydrogen in oxide semiconductor |
US9202827B2 (en) | 2008-12-24 | 2015-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit and semiconductor device |
US10720451B2 (en) | 2008-12-25 | 2020-07-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8878175B2 (en) | 2008-12-25 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9112043B2 (en) | 2008-12-25 | 2015-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
US9768280B2 (en) | 2008-12-25 | 2017-09-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US11158654B2 (en) | 2008-12-25 | 2021-10-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10483290B2 (en) | 2008-12-25 | 2019-11-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9711651B2 (en) | 2008-12-26 | 2017-07-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US11817506B2 (en) | 2008-12-26 | 2023-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9136390B2 (en) | 2008-12-26 | 2015-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
JP2010165922A (en) * | 2009-01-16 | 2010-07-29 | Idemitsu Kosan Co Ltd | Field effect transistor, method for manufacturing field effect transistor and method for manufacturing semiconductor element |
US8884287B2 (en) | 2009-01-16 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9040985B2 (en) | 2009-01-23 | 2015-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8877569B2 (en) | 2009-02-06 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing thin film transistor with oxide semiconductor using sputtering method |
US9431427B2 (en) | 2009-02-06 | 2016-08-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor layer |
US11011549B2 (en) | 2009-02-20 | 2021-05-18 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor, method for manufacturing the same, and semiconductor device |
US9209283B2 (en) | 2009-02-20 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor, method for manufacturing the same, and semiconductor device |
US9859306B2 (en) | 2009-02-20 | 2018-01-02 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor, method for manufacturing the same, and semiconductor device |
US9443981B2 (en) | 2009-02-20 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor, method for manufacturing the same, and semiconductor device |
US11824062B2 (en) | 2009-02-20 | 2023-11-21 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor, method for manufacturing the same, and semiconductor device |
US10586811B2 (en) | 2009-02-20 | 2020-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor, method for manufacturing the same, and semiconductor device |
US10096623B2 (en) | 2009-02-20 | 2018-10-09 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor, method for manufacturing the same, and semiconductor device |
US8987822B2 (en) | 2009-02-20 | 2015-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor, method for manufacturing the same, and semiconductor device |
US8841661B2 (en) | 2009-02-25 | 2014-09-23 | Semiconductor Energy Laboratory Co., Ltd. | Staggered oxide semiconductor TFT semiconductor device and manufacturing method thereof |
US9997638B2 (en) | 2009-02-27 | 2018-06-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9660102B2 (en) | 2009-02-27 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9064899B2 (en) | 2009-02-27 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US11233132B2 (en) | 2009-03-05 | 2022-01-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11955537B2 (en) | 2009-03-05 | 2024-04-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9941393B2 (en) | 2009-03-05 | 2018-04-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10686061B2 (en) | 2009-03-05 | 2020-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US11961894B2 (en) | 2009-03-05 | 2024-04-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10326008B2 (en) | 2009-03-05 | 2019-06-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8872175B2 (en) | 2009-03-06 | 2014-10-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US11715801B2 (en) | 2009-03-06 | 2023-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9991396B2 (en) | 2009-03-06 | 2018-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8916870B2 (en) | 2009-03-06 | 2014-12-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10236391B2 (en) | 2009-03-06 | 2019-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9324878B2 (en) | 2009-03-06 | 2016-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10700213B2 (en) | 2009-03-06 | 2020-06-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US11309430B2 (en) | 2009-03-06 | 2022-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9496414B2 (en) | 2009-03-06 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9768281B2 (en) | 2009-03-12 | 2017-09-19 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8993386B2 (en) | 2009-03-12 | 2015-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8936963B2 (en) | 2009-03-13 | 2015-01-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the semiconductor device |
US9705003B2 (en) | 2009-03-27 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including first and second gate electrodes and stack of insulating layers |
US11575049B2 (en) | 2009-03-27 | 2023-02-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10714630B2 (en) | 2009-03-27 | 2020-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10181530B2 (en) | 2009-03-27 | 2019-01-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11916150B2 (en) | 2009-03-27 | 2024-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11127858B2 (en) | 2009-03-27 | 2021-09-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10297693B1 (en) | 2009-03-27 | 2019-05-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10026848B2 (en) | 2009-03-27 | 2018-07-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9184189B2 (en) | 2009-03-27 | 2015-11-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device, and electronic appliance |
US9012918B2 (en) | 2009-03-27 | 2015-04-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor |
US9362412B2 (en) | 2009-03-27 | 2016-06-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8927981B2 (en) | 2009-03-30 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9704976B2 (en) | 2009-04-02 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8797142B2 (en) | 2009-04-06 | 2014-08-05 | Semiconductor Energy Laboratory Co., Ltd. | Data processing device, IC card and communication system |
US9190528B2 (en) | 2009-04-16 | 2015-11-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8853690B2 (en) | 2009-04-16 | 2014-10-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with oxide semiconductor layer |
US9257085B2 (en) | 2009-05-21 | 2016-02-09 | Semiconductor Energy Laboratory Co., Ltd. | Electronic circuit, display device, electronic device, and method for driving electronic circuit |
US9207798B2 (en) | 2009-05-28 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Touch panel |
US8730186B2 (en) | 2009-05-28 | 2014-05-20 | Semiconductor Energy Laboratory Co., Ltd. | Touch panel |
US9419113B2 (en) | 2009-05-29 | 2016-08-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8872171B2 (en) | 2009-05-29 | 2014-10-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9947797B2 (en) | 2009-05-29 | 2018-04-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10283627B2 (en) | 2009-05-29 | 2019-05-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9054137B2 (en) | 2009-06-30 | 2015-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US20180233589A1 (en) | 2009-06-30 | 2018-08-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10796908B2 (en) | 2009-06-30 | 2020-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9136115B2 (en) | 2009-06-30 | 2015-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9412768B2 (en) | 2009-06-30 | 2016-08-09 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9852906B2 (en) | 2009-06-30 | 2017-12-26 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US11417754B2 (en) | 2009-06-30 | 2022-08-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8846460B2 (en) | 2009-06-30 | 2014-09-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9293566B2 (en) | 2009-06-30 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10332743B2 (en) | 2009-06-30 | 2019-06-25 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9985118B2 (en) | 2009-06-30 | 2018-05-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10090171B2 (en) | 2009-06-30 | 2018-10-02 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9299807B2 (en) | 2009-06-30 | 2016-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10418467B2 (en) | 2009-06-30 | 2019-09-17 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10790383B2 (en) | 2009-06-30 | 2020-09-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9576795B2 (en) | 2009-06-30 | 2017-02-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10062570B2 (en) | 2009-06-30 | 2018-08-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9831101B2 (en) | 2009-06-30 | 2017-11-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9887276B2 (en) | 2009-07-03 | 2018-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device having oxide semiconductor |
US10714503B2 (en) | 2009-07-03 | 2020-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Display device including transistor and manufacturing method thereof |
US9130046B2 (en) | 2009-07-03 | 2015-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Display device including transistor and manufacturing method thereof |
US11257847B2 (en) | 2009-07-03 | 2022-02-22 | Semiconductor Energy Laboratory Co., Ltd. | Display device including transistor and manufacturing method thereof |
US10297679B2 (en) | 2009-07-03 | 2019-05-21 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10211231B2 (en) | 2009-07-03 | 2019-02-19 | Semiconductor Energy Laboratory Co., Ltd. | Display device including transistor and manufacturing method thereof |
US9812465B2 (en) | 2009-07-03 | 2017-11-07 | Semiconductor Energy Laboratory Co., Ltd. | Display device including transistor and manufacturing method thereof |
US11637130B2 (en) | 2009-07-03 | 2023-04-25 | Semiconductor Energy Laboratory Co., Ltd. | Display device including transistor and manufacturing method thereof |
US9837441B2 (en) | 2009-07-03 | 2017-12-05 | Semiconductor Energy Laboratory Co., Ltd. | Display device including transistor and manufacturing method thereof |
US8900916B2 (en) | 2009-07-10 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device including oxide semiconductor film |
US9054138B2 (en) | 2009-07-10 | 2015-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8835920B2 (en) | 2009-07-10 | 2014-09-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US11855194B2 (en) | 2009-07-10 | 2023-12-26 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9754974B2 (en) | 2009-07-10 | 2017-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9490277B2 (en) | 2009-07-10 | 2016-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9379141B2 (en) | 2009-07-10 | 2016-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method the same |
US9269794B2 (en) | 2009-07-10 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method the same |
US11374029B2 (en) | 2009-07-10 | 2022-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US11152493B2 (en) | 2009-07-10 | 2021-10-19 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10157936B2 (en) | 2009-07-10 | 2018-12-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10522568B2 (en) | 2009-07-10 | 2019-12-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10916566B2 (en) | 2009-07-10 | 2021-02-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10256291B2 (en) | 2009-07-17 | 2019-04-09 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device |
US8952378B2 (en) | 2009-07-17 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device |
WO2011007677A1 (en) * | 2009-07-17 | 2011-01-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8994024B2 (en) | 2009-07-18 | 2015-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9190424B2 (en) | 2009-07-18 | 2015-11-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10461098B2 (en) | 2009-07-18 | 2019-10-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US11177289B2 (en) | 2009-07-18 | 2021-11-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US11715741B2 (en) | 2009-07-18 | 2023-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US8987048B2 (en) | 2009-07-18 | 2015-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9263472B2 (en) | 2009-07-18 | 2016-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
WO2011010544A1 (en) * | 2009-07-18 | 2011-01-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
CN102473733A (en) * | 2009-07-18 | 2012-05-23 | 株式会社半导体能源研究所 | Semiconductor device and method for manufacturing semiconductor device |
US9184185B2 (en) | 2009-07-18 | 2015-11-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US10810961B2 (en) | 2009-07-24 | 2020-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11663989B2 (en) | 2009-07-24 | 2023-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9779679B2 (en) | 2009-07-24 | 2017-10-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9875713B2 (en) | 2009-07-24 | 2018-01-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11373615B2 (en) | 2009-07-24 | 2022-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US20180138211A1 (en) | 2009-07-31 | 2018-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing oxide semiconductor device |
US10854638B2 (en) | 2009-07-31 | 2020-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing display device |
US9741779B2 (en) | 2009-07-31 | 2017-08-22 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor device |
US11348949B2 (en) | 2009-07-31 | 2022-05-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10079306B2 (en) | 2009-07-31 | 2018-09-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11106101B2 (en) | 2009-07-31 | 2021-08-31 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9142570B2 (en) | 2009-07-31 | 2015-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11728350B2 (en) | 2009-07-31 | 2023-08-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including transistor |
US9293601B2 (en) | 2009-07-31 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US11947228B2 (en) | 2009-07-31 | 2024-04-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9362416B2 (en) | 2009-07-31 | 2016-06-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor wearable device |
US8937306B2 (en) | 2009-07-31 | 2015-01-20 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor |
US10396097B2 (en) | 2009-07-31 | 2019-08-27 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing oxide semiconductor device |
US10680111B2 (en) | 2009-07-31 | 2020-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor device |
US9786689B2 (en) | 2009-07-31 | 2017-10-10 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9024313B2 (en) | 2009-07-31 | 2015-05-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9515192B2 (en) | 2009-07-31 | 2016-12-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9224870B2 (en) | 2009-07-31 | 2015-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor device |
US9202851B2 (en) | 2009-08-07 | 2015-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9466756B2 (en) | 2009-08-07 | 2016-10-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8885115B2 (en) | 2009-08-07 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device wherein each of a first oxide semiconductor layer and a second oxide semiconductor layer includes a portion that is in an oxygen-excess state and is in contact with an insulating layer |
US9837442B2 (en) | 2009-08-07 | 2017-12-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising a plurality of N-channel transistors wherein the oxide semiconductor layer comprises a portion being in an oxygen-excess state |
US9954005B2 (en) | 2009-08-07 | 2018-04-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor layer |
US9171867B2 (en) | 2009-08-07 | 2015-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9583509B2 (en) | 2009-08-07 | 2017-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device wherein an oxide semiconductor layer has a degree of crystallization of 80% or more |
US8912541B2 (en) | 2009-08-07 | 2014-12-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10243005B2 (en) | 2009-08-07 | 2019-03-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9153602B2 (en) | 2009-08-07 | 2015-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device wherein an oxide semiconductor layer comprises a crystal and has a degree of crystallization of 80% or more |
US8879011B2 (en) | 2009-08-27 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
US11024516B2 (en) | 2009-08-27 | 2021-06-01 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
US8994889B2 (en) | 2009-08-27 | 2015-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
US11532488B2 (en) | 2009-08-27 | 2022-12-20 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
US10373843B2 (en) | 2009-08-27 | 2019-08-06 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
US11923206B2 (en) | 2009-08-27 | 2024-03-05 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
US9368641B2 (en) | 2009-09-04 | 2016-06-14 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and display device |
US9805641B2 (en) | 2009-09-04 | 2017-10-31 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device including the same |
US11094717B2 (en) | 2009-09-04 | 2021-08-17 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and display device |
US9640670B2 (en) | 2009-09-04 | 2017-05-02 | Semiconductor Energy Laboratory Co., Ltd. | Transistors in display device |
US11626521B2 (en) | 2009-09-04 | 2023-04-11 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device and method for manufacturing the same |
US9130041B2 (en) | 2009-09-04 | 2015-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US11430899B2 (en) | 2009-09-04 | 2022-08-30 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9768207B2 (en) | 2009-09-04 | 2017-09-19 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US10854640B2 (en) | 2009-09-04 | 2020-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9431465B2 (en) | 2009-09-04 | 2016-08-30 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device and method for manufacturing the same |
US11069817B2 (en) | 2009-09-04 | 2021-07-20 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US10418384B2 (en) | 2009-09-04 | 2019-09-17 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and display device |
US11024747B2 (en) | 2009-09-04 | 2021-06-01 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device and method for manufacturing the same |
US8890166B2 (en) | 2009-09-04 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device and method for manufacturing the same |
US10700215B2 (en) | 2009-09-04 | 2020-06-30 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9530806B2 (en) | 2009-09-04 | 2016-12-27 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9257082B2 (en) | 2009-09-04 | 2016-02-09 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9537012B2 (en) | 2009-09-04 | 2017-01-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with oxide semiconductor layer |
US11695019B2 (en) | 2009-09-04 | 2023-07-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US11862643B2 (en) | 2009-09-04 | 2024-01-02 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and display device |
US8957411B2 (en) | 2009-09-04 | 2015-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device and method for manufacturing the same |
US8889496B2 (en) | 2009-09-04 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US10672915B2 (en) | 2009-09-04 | 2020-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device and method for manufacturing the same |
US9954007B2 (en) | 2009-09-04 | 2018-04-24 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and display device |
US10665615B2 (en) | 2009-09-04 | 2020-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and display device |
US9105735B2 (en) | 2009-09-04 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and display device |
US10629627B2 (en) | 2009-09-04 | 2020-04-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10134912B2 (en) | 2009-09-04 | 2018-11-20 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US11652174B2 (en) | 2009-09-04 | 2023-05-16 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US11211499B2 (en) | 2009-09-16 | 2021-12-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10360831B2 (en) | 2009-09-16 | 2019-07-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor display device |
US10977977B2 (en) | 2009-09-16 | 2021-04-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor display device |
US10374184B2 (en) | 2009-09-16 | 2019-08-06 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device and manufacturing method thereof |
US8952995B2 (en) | 2009-09-16 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Driving method of display device and display device |
US11469387B2 (en) | 2009-09-16 | 2022-10-11 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device and manufacturing method thereof |
US9715845B2 (en) | 2009-09-16 | 2017-07-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor display device |
US11791417B2 (en) | 2009-09-16 | 2023-10-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9935202B2 (en) | 2009-09-16 | 2018-04-03 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and display device comprising oxide semiconductor layer |
US11171298B2 (en) | 2009-09-16 | 2021-11-09 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device and manufacturing method thereof |
US10019924B2 (en) | 2009-09-16 | 2018-07-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor display device |
US11183597B2 (en) | 2009-09-16 | 2021-11-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9666820B2 (en) | 2009-09-16 | 2017-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device and manufacturing method thereof |
US9029191B2 (en) | 2009-09-24 | 2015-05-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9991890B2 (en) | 2009-09-24 | 2018-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, display device including the driver circuit, and electronic appliance including the display device |
US9595600B2 (en) | 2009-09-24 | 2017-03-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9853167B2 (en) | 2009-09-24 | 2017-12-26 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
US9318617B2 (en) | 2009-09-24 | 2016-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device |
US10418491B2 (en) | 2009-09-24 | 2019-09-17 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
US11393917B2 (en) | 2009-09-24 | 2022-07-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9153702B2 (en) | 2009-09-24 | 2015-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, power circuit, and manufacturing method of semiconductor device |
US10418466B2 (en) | 2009-09-24 | 2019-09-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8582716B2 (en) | 2009-09-24 | 2013-11-12 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, display device including the driver circuit, and electronic appliance including the display device |
US9224838B2 (en) | 2009-09-24 | 2015-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing oxide semiconductor film and method for manufacturing semiconductor device |
US9406398B2 (en) | 2009-09-24 | 2016-08-02 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, display device including the driver circuit, and electronic appliance including the display device |
US9520288B2 (en) | 2009-09-24 | 2016-12-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including IGZO layer and manufacturing method thereof |
US9171938B2 (en) | 2009-09-24 | 2015-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor element and method for manufacturing the same |
US9530872B2 (en) | 2009-09-24 | 2016-12-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor element and method for manufacturing the same |
US8243873B2 (en) | 2009-09-24 | 2012-08-14 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, display device including the driver circuit, and electronic appliance including the display device |
US9305481B2 (en) | 2009-09-24 | 2016-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US8363778B2 (en) | 2009-09-24 | 2013-01-29 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, display device including the driver circuit, and electronic appliance including the display device |
US9048094B2 (en) | 2009-09-24 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device comprising forming oxide semiconductor by sputtering |
US9647131B2 (en) | 2009-09-24 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, power circuit, and manufacturing method of semiconductor device |
US9214563B2 (en) | 2009-09-24 | 2015-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
US10181481B2 (en) | 2009-09-24 | 2019-01-15 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US8952490B2 (en) | 2009-09-30 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Redox capacitor and manufacturing method thereof |
US9130043B2 (en) | 2009-10-01 | 2015-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9627198B2 (en) | 2009-10-05 | 2017-04-18 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing thin film semiconductor device |
US9754784B2 (en) | 2009-10-05 | 2017-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing oxide semiconductor device |
US9306072B2 (en) | 2009-10-08 | 2016-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor layer and semiconductor device |
US10115831B2 (en) | 2009-10-08 | 2018-10-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having an oxide semiconductor layer comprising a nanocrystal |
US9406808B2 (en) | 2009-10-08 | 2016-08-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device, and electronic appliance |
US9177855B2 (en) | 2009-10-09 | 2015-11-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10043915B2 (en) | 2009-10-09 | 2018-08-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9941413B2 (en) | 2009-10-09 | 2018-04-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having different types of thin film transistors |
US11695080B2 (en) | 2009-10-09 | 2023-07-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US11355669B2 (en) | 2009-10-09 | 2022-06-07 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting display device and electronic device including an oxide semiconductor layer |
US10566497B2 (en) | 2009-10-09 | 2020-02-18 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting display device including a first pixel and a second pixel |
US10141450B2 (en) | 2009-10-09 | 2018-11-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8999751B2 (en) | 2009-10-09 | 2015-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Method for making oxide semiconductor device |
US8344374B2 (en) | 2009-10-09 | 2013-01-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor layer |
US11367793B2 (en) | 2009-10-09 | 2022-06-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US11296120B2 (en) | 2009-10-09 | 2022-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Shift register and display device and driving method thereof |
US10411158B2 (en) | 2009-10-09 | 2019-09-10 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting display device having oxide semiconductor layer overlapping with adjacent pixel electrode |
US9601635B2 (en) | 2009-10-09 | 2017-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9006728B2 (en) | 2009-10-09 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having oxide semiconductor transistor |
US9209310B2 (en) | 2009-10-09 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the semiconductor device |
US10770596B2 (en) | 2009-10-09 | 2020-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9349791B2 (en) | 2009-10-09 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having oxide semiconductor channel |
US10446693B2 (en) | 2009-10-09 | 2019-10-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9911856B2 (en) | 2009-10-09 | 2018-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9443874B2 (en) | 2009-10-09 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US11901485B2 (en) | 2009-10-09 | 2024-02-13 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting display device having a first pixel and a second pixel and an oxide semiconductor layer having a region overlapping a light-emitting region of the second pixel |
US9171640B2 (en) | 2009-10-09 | 2015-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Shift register and display device |
US9865742B2 (en) | 2009-10-09 | 2018-01-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9318654B2 (en) | 2009-10-09 | 2016-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting display device and electronic device including the same |
US10290742B2 (en) | 2009-10-09 | 2019-05-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor layer |
US10181359B2 (en) | 2009-10-09 | 2019-01-15 | Semiconductor Energy Laboratory Co., Ltd. | Shift register and display device |
US10490671B2 (en) | 2009-10-16 | 2019-11-26 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit and semiconductor device |
US10770597B2 (en) | 2009-10-16 | 2020-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit and semiconductor device |
US9947695B2 (en) | 2009-10-16 | 2018-04-17 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit comprising semiconductor device |
US10310348B2 (en) | 2009-10-16 | 2019-06-04 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic apparatus having the same |
US11742432B2 (en) | 2009-10-16 | 2023-08-29 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit and semiconductor device |
US10002891B2 (en) | 2009-10-16 | 2018-06-19 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit and semiconductor device |
US10565946B2 (en) | 2009-10-16 | 2020-02-18 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device including the liquid crystal display device |
US10074747B2 (en) | 2009-10-16 | 2018-09-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10061172B2 (en) | 2009-10-16 | 2018-08-28 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic apparatus having the same |
US8884651B2 (en) | 2009-10-16 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit and semiconductor device |
US8854286B2 (en) | 2009-10-16 | 2014-10-07 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device including the liquid crystal display device |
US10593810B2 (en) | 2009-10-16 | 2020-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit and semiconductor device |
US11302824B2 (en) | 2009-10-16 | 2022-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit and semiconductor device |
US9959822B2 (en) | 2009-10-16 | 2018-05-01 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device including the liquid crystal display device |
US9666678B2 (en) | 2009-10-16 | 2017-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9368082B2 (en) | 2009-10-16 | 2016-06-14 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device including the liquid crystal display device |
US11756966B2 (en) | 2009-10-16 | 2023-09-12 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit and semiconductor device |
US11837461B2 (en) | 2009-10-16 | 2023-12-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US11056515B2 (en) | 2009-10-16 | 2021-07-06 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit and semiconductor device |
US8952726B2 (en) | 2009-10-16 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit and semiconductor device |
US10777682B2 (en) | 2009-10-16 | 2020-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9553583B2 (en) | 2009-10-16 | 2017-01-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with a small off current and oxide semiconductor layer having a function of a channel formation layer |
US10211344B2 (en) | 2009-10-16 | 2019-02-19 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit and semiconductor device |
US10593710B2 (en) | 2009-10-16 | 2020-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit and semiconductor device |
US10083651B2 (en) | 2009-10-21 | 2018-09-25 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device including display device |
US10319744B2 (en) | 2009-10-21 | 2019-06-11 | Semiconductor Energy Laboratory Co., Ltd. | Analog circuit and semiconductor device |
US10115743B2 (en) | 2009-10-21 | 2018-10-30 | Semiconductor Energy Laboratory Co., Ltd. | Analog circuit and semiconductor device |
US9716109B2 (en) | 2009-10-21 | 2017-07-25 | Semiconductor Energy Laboratory Co., Ltd. | Analog circuit and semiconductor device |
US10957714B2 (en) | 2009-10-21 | 2021-03-23 | Semiconductor Energy Laboratory Co., Ltd. | Analog circuit and semiconductor device |
US11004983B2 (en) | 2009-10-21 | 2021-05-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10657882B2 (en) | 2009-10-21 | 2020-05-19 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device including display device |
US9165502B2 (en) | 2009-10-21 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device including display device |
US9735285B2 (en) | 2009-10-21 | 2017-08-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9559208B2 (en) | 2009-10-21 | 2017-01-31 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device including the same |
US10553726B2 (en) | 2009-10-21 | 2020-02-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11107396B2 (en) | 2009-10-21 | 2021-08-31 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device including thin film transistor including top-gate |
US20190012960A1 (en) | 2009-10-21 | 2019-01-10 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device including display device |
US8890781B2 (en) | 2009-10-21 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device including display device |
US10714622B2 (en) | 2009-10-21 | 2020-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device including the same |
US9679768B2 (en) | 2009-10-21 | 2017-06-13 | Semiconductor Energy Laboratory Co., Ltd. | Method for removing hydrogen from oxide semiconductor layer having insulating layer containing halogen element formed thereover |
US10079307B2 (en) | 2009-10-21 | 2018-09-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method for the same |
US9236385B2 (en) | 2009-10-21 | 2016-01-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9929281B2 (en) | 2009-10-21 | 2018-03-27 | Semiconductor Energy Laboratory Co., Ltd. | Transisitor comprising oxide semiconductor |
US9431546B2 (en) | 2009-10-21 | 2016-08-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor material transistor having reduced off current |
US9245484B2 (en) | 2009-10-21 | 2016-01-26 | Semiconductor Energy Laboratory Co., Ltd. | E-book reader |
US9419020B2 (en) | 2009-10-21 | 2016-08-16 | Semiconductor Energy Laboratory Co., Ltd. | Analog circuit and semiconductor device |
US9478564B2 (en) | 2009-10-21 | 2016-10-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8946700B2 (en) | 2009-10-21 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method for the same |
US8963517B2 (en) | 2009-10-21 | 2015-02-24 | Semiconductor Energy Laboratory Co., Ltd. | Voltage regulator circuit comprising transistor which includes an oixide semiconductor |
US9202546B2 (en) | 2009-10-29 | 2015-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10490553B2 (en) | 2009-10-29 | 2019-11-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9806079B2 (en) | 2009-10-29 | 2017-10-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10720433B2 (en) | 2009-10-29 | 2020-07-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9488890B2 (en) | 2009-10-30 | 2016-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9673337B2 (en) | 2009-10-30 | 2017-06-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8988623B2 (en) | 2009-10-30 | 2015-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9236402B2 (en) | 2009-10-30 | 2016-01-12 | Semiconductor Energy Laboratory Co., Ltd. | Voltage regulator circuit |
US9105511B2 (en) | 2009-10-30 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor |
US11668988B2 (en) | 2009-10-30 | 2023-06-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9373640B2 (en) | 2009-10-30 | 2016-06-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10510757B2 (en) | 2009-10-30 | 2019-12-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including storage element |
US11322498B2 (en) | 2009-10-30 | 2022-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9112041B2 (en) | 2009-10-30 | 2015-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Transistor having an oxide semiconductor film |
US10103275B2 (en) | 2009-10-30 | 2018-10-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9722086B2 (en) | 2009-10-30 | 2017-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit and semiconductor device |
US11963374B2 (en) | 2009-10-30 | 2024-04-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8896042B2 (en) | 2009-10-30 | 2014-11-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor |
US9105609B2 (en) | 2009-10-30 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Oxide-based semiconductor non-linear element having gate electrode electrically connected to source or drain electrode |
US8941107B2 (en) | 2009-10-30 | 2015-01-27 | Semiconductor Energy Laboratory Co., Ltd. | Power diode, rectifier, and semiconductor device including the same |
US9207511B2 (en) | 2009-10-30 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device, driving method of the same, and electronic appliance including the same |
US10566459B2 (en) | 2009-10-30 | 2020-02-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having a first region comprising silicon, oxygen and at least one metal element formed between an oxide semiconductor layer and an insulating layer |
US9685447B2 (en) | 2009-10-30 | 2017-06-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising transistor including oxide semiconductor |
US10811417B2 (en) | 2009-10-30 | 2020-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9385114B2 (en) | 2009-10-30 | 2016-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Non-linear element, display device including non-linear element, and electronic device including display device |
US8860108B2 (en) | 2009-10-30 | 2014-10-14 | Semiconductor Energy Laboratory Co., Ltd. | Oxide-based thin-film transistor (TFT) semiconductor memory device having source/drain electrode of one transistor connected to gate electrode of the other |
US11107838B2 (en) | 2009-11-06 | 2021-08-31 | Semiconductor Energy Laboratory Co., Ltd. | Transistor comprising an oxide semiconductor |
US8916869B2 (en) | 2009-11-06 | 2014-12-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including an oxide semiconductor layer |
US10868046B2 (en) | 2009-11-06 | 2020-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device applying an oxide semiconductor |
US10002949B2 (en) | 2009-11-06 | 2018-06-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9384976B2 (en) | 2009-11-06 | 2016-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8841662B2 (en) | 2009-11-06 | 2014-09-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US20210288079A1 (en) | 2009-11-06 | 2021-09-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US11107840B2 (en) | 2009-11-06 | 2021-08-31 | Semiconductor Energy Laboratory Co., Ltd. | Method for fabricating a semiconductor device comprising an oxide semiconductor |
US11710745B2 (en) | 2009-11-06 | 2023-07-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9853066B2 (en) | 2009-11-06 | 2017-12-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9331112B2 (en) | 2009-11-06 | 2016-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including an oxide semiconductor layer |
US9773814B2 (en) | 2009-11-06 | 2017-09-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9905596B2 (en) | 2009-11-06 | 2018-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising a channel region of a transistor with a crystalline oxide semiconductor and a specific off-state current for the transistor |
US9368541B2 (en) | 2009-11-06 | 2016-06-14 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US11961842B2 (en) | 2009-11-06 | 2024-04-16 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device |
US10249647B2 (en) | 2009-11-06 | 2019-04-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device comprising oxide semiconductor layer |
US9117713B2 (en) | 2009-11-06 | 2015-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising a gate of an amplifier transistor under an insulating layer and a transfer transistor channel over the insulating layer the amplifier transistor and transfer transistor overlapping |
US9639211B2 (en) | 2009-11-06 | 2017-05-02 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9589961B2 (en) | 2009-11-06 | 2017-03-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including write access transistor having channel region including oxide semiconductor |
US10079251B2 (en) | 2009-11-06 | 2018-09-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US11315954B2 (en) | 2009-11-06 | 2022-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9093544B2 (en) | 2009-11-06 | 2015-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9001566B2 (en) | 2009-11-06 | 2015-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving semiconductor device |
US11776968B2 (en) | 2009-11-06 | 2023-10-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor layer |
US10056385B2 (en) | 2009-11-06 | 2018-08-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including write access transistor whose oxide semiconductor layer including channel formation region |
US8927351B2 (en) | 2009-11-06 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9093328B2 (en) | 2009-11-06 | 2015-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having an oxide semiconductor with a crystalline region and manufacturing method thereof |
US9219162B2 (en) | 2009-11-13 | 2015-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10516055B2 (en) | 2009-11-13 | 2019-12-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10056494B2 (en) | 2009-11-13 | 2018-08-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10332912B2 (en) | 2009-11-13 | 2019-06-25 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device including the same |
US9520411B2 (en) | 2009-11-13 | 2016-12-13 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device including the same |
US10944010B2 (en) | 2009-11-13 | 2021-03-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11955557B2 (en) | 2009-11-13 | 2024-04-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9922685B2 (en) | 2009-11-13 | 2018-03-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US11456385B2 (en) | 2009-11-13 | 2022-09-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10083823B2 (en) | 2009-11-13 | 2018-09-25 | Semiconductor Energy Laboratory Co., Ltd. | Sputtering target and manufacturing method thereof, and transistor |
US9006729B2 (en) | 2009-11-13 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8937020B2 (en) | 2009-11-13 | 2015-01-20 | Semiconductor Energy Laboratory Co., Ltd. | Sputtering target and manufacturing method thereof, and transistor |
US8947153B2 (en) | 2009-11-13 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Electronic circuit comprising thin-film transistors |
US9257449B2 (en) | 2009-11-13 | 2016-02-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9705005B2 (en) | 2009-11-20 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9741867B2 (en) | 2009-11-20 | 2017-08-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10505520B2 (en) | 2009-11-20 | 2019-12-10 | Semiconductor Energy Laboratory Co., Ltd. | Nonvolatile latch circuit and logic circuit, and semiconductor device using the same |
US8892158B2 (en) | 2009-11-20 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9135958B2 (en) | 2009-11-20 | 2015-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9373643B2 (en) | 2009-11-20 | 2016-06-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10186619B2 (en) | 2009-11-20 | 2019-01-22 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10121904B2 (en) | 2009-11-20 | 2018-11-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8963149B2 (en) | 2009-11-20 | 2015-02-24 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor |
US8686972B2 (en) | 2009-11-20 | 2014-04-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device |
US9768319B2 (en) | 2009-11-20 | 2017-09-19 | Semiconductor Energy Laboratory Co., Ltd. | Modulation circuit and semiconductor device including the same |
US9350334B2 (en) | 2009-11-20 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Nonvolatile latch circuit and logic circuit, and semiconductor device using the same |
US9461181B2 (en) | 2009-11-20 | 2016-10-04 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8860485B2 (en) | 2009-11-20 | 2014-10-14 | Semiconductor Energy Laboratory Co., Ltd. | Nonvolatile latch circuit and logic circuit, and semiconductor device using the same |
US9350295B2 (en) | 2009-11-20 | 2016-05-24 | Semiconductor Energy Laboratoty Co., Ltd. | Modulation circuit and semiconductor device including the same |
US9093262B2 (en) | 2009-11-20 | 2015-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9306075B2 (en) | 2009-11-20 | 2016-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor |
US11894486B2 (en) | 2009-11-27 | 2024-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9184299B2 (en) | 2009-11-27 | 2015-11-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9570628B2 (en) | 2009-11-27 | 2017-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10396236B2 (en) | 2009-11-27 | 2019-08-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device |
US9748436B2 (en) | 2009-11-27 | 2017-08-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US20190109259A1 (en) | 2009-11-27 | 2019-04-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10079310B2 (en) | 2009-11-28 | 2018-09-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including stacked oxide semiconductor material |
US10608118B2 (en) | 2009-11-28 | 2020-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9368640B2 (en) | 2009-11-28 | 2016-06-14 | Semiconductor Energy Laboratory Co., Ltd. | Transistor with stacked oxide semiconductor films |
US10347771B2 (en) | 2009-11-28 | 2019-07-09 | Semiconductor Energy Laboratory Co., Ltd. | Stacked oxide material, semiconductor device, and method for manufacturing the semiconductor device |
US10263120B2 (en) | 2009-11-28 | 2019-04-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device and method for manufacturing liquid crystal display panel |
US9214520B2 (en) | 2009-11-28 | 2015-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11133419B2 (en) | 2009-11-28 | 2021-09-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11710795B2 (en) | 2009-11-28 | 2023-07-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor with c-axis-aligned crystals |
US9520287B2 (en) | 2009-11-28 | 2016-12-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having stacked oxide semiconductor layers |
US9887298B2 (en) | 2009-11-28 | 2018-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10847116B2 (en) | 2009-11-30 | 2020-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Reducing pixel refresh rate for still images using oxide transistors |
US11636825B2 (en) | 2009-11-30 | 2023-04-25 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device, method for driving the same, and electronic device including the same |
US11282477B2 (en) | 2009-11-30 | 2022-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device, method for driving the same, and electronic device including the same |
US9735284B2 (en) | 2009-12-04 | 2017-08-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor |
US8866138B2 (en) | 2009-12-04 | 2014-10-21 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device including the same |
US10109500B2 (en) | 2009-12-04 | 2018-10-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9721971B2 (en) | 2009-12-04 | 2017-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device including the same |
US9368638B2 (en) | 2009-12-04 | 2016-06-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10505049B2 (en) | 2009-12-04 | 2019-12-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device has an oxide semiconductor layer containing a c-axis aligned crystal |
US11923204B2 (en) | 2009-12-04 | 2024-03-05 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device comprising oxide semiconductor |
US11456187B2 (en) | 2009-12-04 | 2022-09-27 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor-device |
US9270173B2 (en) | 2009-12-04 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | DC converter circuit and power supply circuit |
US8922182B2 (en) | 2009-12-04 | 2014-12-30 | Semiconductor Energy Laboratory Co., Ltd. | DC converter circuit and power supply circuit |
US9064967B2 (en) | 2009-12-04 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor element, semiconductor device, and method for manufacturing the same |
US10014415B2 (en) | 2009-12-04 | 2018-07-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device has an oxide semiconductor layer containing a C-axis aligned crystal |
US8957414B2 (en) | 2009-12-04 | 2015-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising both amorphous and crystalline semiconductor oxide |
US11728349B2 (en) | 2009-12-04 | 2023-08-15 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device including the same |
US9153338B2 (en) | 2009-12-04 | 2015-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US11342464B2 (en) | 2009-12-04 | 2022-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising first and second insulating layer each has a tapered shape |
US9411208B2 (en) | 2009-12-04 | 2016-08-09 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9721811B2 (en) | 2009-12-04 | 2017-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device having an oxide semiconductor layer |
US8927349B2 (en) | 2009-12-04 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8890158B2 (en) | 2009-12-04 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9070596B2 (en) | 2009-12-04 | 2015-06-30 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US11728437B2 (en) | 2009-12-04 | 2023-08-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor layer containing a c-axis aligned crystal |
US10490420B2 (en) | 2009-12-04 | 2019-11-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9224609B2 (en) | 2009-12-04 | 2015-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device using oxide semiconductor |
US9991286B2 (en) | 2009-12-04 | 2018-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device including the same |
US9324881B2 (en) | 2009-12-04 | 2016-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10840268B2 (en) | 2009-12-04 | 2020-11-17 | Semiconductor Energy Laboratories Co., Ltd. | Display device and electronic device including the same |
US8841163B2 (en) | 2009-12-04 | 2014-09-23 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device comprising oxide semiconductor |
US10861983B2 (en) | 2009-12-04 | 2020-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor layer containing a c-axis aligned crystal |
US10332996B2 (en) | 2009-12-04 | 2019-06-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9240467B2 (en) | 2009-12-04 | 2016-01-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10714358B2 (en) | 2009-12-04 | 2020-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8946097B2 (en) | 2009-12-08 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9040989B2 (en) | 2009-12-08 | 2015-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10382016B2 (en) | 2009-12-11 | 2019-08-13 | Semiconductor Energy Laboratory Co., Ltd. | Nonvolatile latch circuit and logic circuit, and semiconductor device using the same |
US10804409B2 (en) | 2009-12-11 | 2020-10-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10103272B2 (en) | 2009-12-11 | 2018-10-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9196738B2 (en) | 2009-12-11 | 2015-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9893204B2 (en) | 2009-12-11 | 2018-02-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having transistor including two oxide semiconductor layers having different lattice constants |
US10600818B2 (en) | 2009-12-11 | 2020-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US8901559B2 (en) | 2009-12-11 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having inverter circuit with terminal electrically connected to transistor that includes oxide semiconductor material |
US8994400B2 (en) | 2009-12-11 | 2015-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Nonvolatile latch circuit and logic circuit, and semiconductor device using the same |
US9171868B2 (en) | 2009-12-11 | 2015-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9349757B2 (en) | 2009-12-11 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US8890146B2 (en) | 2009-12-11 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US8889499B2 (en) | 2009-12-11 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
JP2011142316A (en) * | 2009-12-11 | 2011-07-21 | Semiconductor Energy Lab Co Ltd | Semiconductor device and method for manufacturing the same |
US11545579B2 (en) | 2009-12-11 | 2023-01-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10854641B2 (en) | 2009-12-11 | 2020-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9508742B2 (en) | 2009-12-11 | 2016-11-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having switching transistor that includes oxide semiconductor material |
US10002888B2 (en) | 2009-12-11 | 2018-06-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9209251B2 (en) | 2009-12-11 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having switching transistor that includes oxide semiconductor material |
US10312267B2 (en) | 2009-12-11 | 2019-06-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US11961843B2 (en) | 2009-12-11 | 2024-04-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9142683B2 (en) | 2009-12-11 | 2015-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9735180B2 (en) | 2009-12-11 | 2017-08-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US8853683B2 (en) | 2009-12-17 | 2014-10-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, measurement apparatus, and measurement method of relative permittivity |
US9530893B2 (en) | 2009-12-17 | 2016-12-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, measurement apparatus, and measurement method of relative permittivity |
US10360858B2 (en) | 2009-12-18 | 2019-07-23 | Semiconductor Energy Laboratory Co., Ltd. | Display device including optical sensor and driving method thereof |
US8922537B2 (en) | 2009-12-18 | 2014-12-30 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving liquid crystal display device |
US9244323B2 (en) | 2009-12-18 | 2016-01-26 | Semiconductor Energy Laboratory Co., Ltd | Liquid crystal display device and electronic device |
US9057758B2 (en) | 2009-12-18 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for measuring current, method for inspecting semiconductor device, semiconductor device, and test element group |
US11170726B2 (en) | 2009-12-18 | 2021-11-09 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving liquid crystal display device |
US10453964B2 (en) | 2009-12-18 | 2019-10-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US11798952B2 (en) | 2009-12-18 | 2023-10-24 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device |
US9378980B2 (en) | 2009-12-18 | 2016-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9692421B2 (en) | 2009-12-18 | 2017-06-27 | Semiconductor Energy Laboratory Co., Ltd. | Non-volatile latch circuit and logic circuit, and semiconductor device using the same |
US9240488B2 (en) | 2009-12-18 | 2016-01-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9898979B2 (en) | 2009-12-18 | 2018-02-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving liquid crystal display device |
US9087489B2 (en) | 2009-12-18 | 2015-07-21 | Semiconductor Energy Laboratory Co., Ltd. | Display device including optical sensor and driving method thereof |
US9105256B2 (en) | 2009-12-18 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and driving method thereof |
US10796647B2 (en) | 2009-12-18 | 2020-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Display device including optical sensor and driving method thereof |
US10256254B2 (en) | 2009-12-18 | 2019-04-09 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device |
US9978757B2 (en) | 2009-12-18 | 2018-05-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9251748B2 (en) | 2009-12-18 | 2016-02-02 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving liquid crystal display device |
US9391095B2 (en) | 2009-12-18 | 2016-07-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9620525B2 (en) | 2009-12-18 | 2017-04-11 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device |
US9728651B2 (en) | 2009-12-18 | 2017-08-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9123574B2 (en) | 2009-12-18 | 2015-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11282864B2 (en) | 2009-12-18 | 2022-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device |
US9059694B2 (en) | 2009-12-23 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9047836B2 (en) | 2009-12-24 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9217903B2 (en) | 2009-12-24 | 2015-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9006025B2 (en) | 2009-12-25 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9543445B2 (en) | 2009-12-25 | 2017-01-10 | Semiconductor Energy Laborartory Co., Ltd. | Semiconductor device with oxide semiconductor layer |
US11676975B2 (en) | 2009-12-25 | 2023-06-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10255868B2 (en) | 2009-12-25 | 2019-04-09 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving liquid crystal display device |
US11456296B2 (en) | 2009-12-25 | 2022-09-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10553589B2 (en) | 2009-12-25 | 2020-02-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9054201B2 (en) | 2009-12-25 | 2015-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9349735B2 (en) | 2009-12-25 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9407269B2 (en) | 2009-12-25 | 2016-08-02 | Semiconductor Energy Laboratory Co., Ltd. | Memory device, semiconductor device, and electronic device |
US9852703B2 (en) | 2009-12-25 | 2017-12-26 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving liquid crystal display device |
US9991265B2 (en) | 2009-12-25 | 2018-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10083996B2 (en) | 2009-12-25 | 2018-09-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11825665B2 (en) | 2009-12-25 | 2023-11-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9941304B2 (en) | 2009-12-25 | 2018-04-10 | Semiconductor Energy Laboratory Co., Ltd. | Memory device, semiconductor device, and electronic device |
US9472559B2 (en) | 2009-12-28 | 2016-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and semiconductor device |
US9859401B2 (en) | 2009-12-28 | 2018-01-02 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9054134B2 (en) | 2009-12-28 | 2015-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10242629B2 (en) | 2009-12-28 | 2019-03-26 | Semiconductor Energy Laboratory Co., Ltd. | Display device with a transistor having an oxide semiconductor |
US9153589B2 (en) | 2009-12-28 | 2015-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9448433B2 (en) | 2009-12-28 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the semiconductor device |
US9053969B2 (en) | 2009-12-28 | 2015-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10141425B2 (en) | 2009-12-28 | 2018-11-27 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10797054B2 (en) | 2009-12-28 | 2020-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and semiconductor device |
US11424246B2 (en) | 2009-12-28 | 2022-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and semiconductor device |
US9490370B2 (en) | 2009-12-28 | 2016-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10347197B2 (en) | 2009-12-28 | 2019-07-09 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device |
US10861401B2 (en) | 2009-12-28 | 2020-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device configured to operate at two different refresh ratees |
US10600372B2 (en) | 2009-12-28 | 2020-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Transreflective liquid crystal display device |
US9136280B2 (en) | 2010-01-15 | 2015-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9575381B2 (en) | 2010-01-15 | 2017-02-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving the same |
US8866233B2 (en) | 2010-01-15 | 2014-10-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9484365B2 (en) | 2010-01-15 | 2016-11-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including switch electrically connected to signal line |
US10095076B2 (en) | 2010-01-15 | 2018-10-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having a backlight and light-receiving element |
US9767748B2 (en) | 2010-01-20 | 2017-09-19 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving display device |
US10454475B2 (en) | 2010-01-20 | 2019-10-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9105251B2 (en) | 2010-01-20 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving display device |
US9703423B2 (en) | 2010-01-20 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Electronic device and electronic system |
US10845846B2 (en) | 2010-01-20 | 2020-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Portable electronic device being capable of contactless charge |
US8957881B2 (en) | 2010-01-20 | 2015-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US11462186B2 (en) | 2010-01-20 | 2022-10-04 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9147462B2 (en) | 2010-01-20 | 2015-09-29 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing circuit and method for driving the same |
US9740241B2 (en) | 2010-01-20 | 2017-08-22 | Semiconductor Energy Laboratory Co., Ltd. | Portable electronic device having transistor comprising oxide semiconductor |
US9454941B2 (en) | 2010-01-20 | 2016-09-27 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving display device |
US11081072B2 (en) | 2010-01-20 | 2021-08-03 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US11790866B1 (en) | 2010-01-20 | 2023-10-17 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US8947406B2 (en) | 2010-01-20 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Display method of display device |
US11573601B2 (en) | 2010-01-20 | 2023-02-07 | Semiconductor Energy Laboratory Co., Ltd. | Portable electronic device |
US9448451B2 (en) | 2010-01-20 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Driving method of liquid crystal display device |
US9984617B2 (en) | 2010-01-20 | 2018-05-29 | Semiconductor Energy Laboratory Co., Ltd. | Display device including light emitting element |
US9214121B2 (en) | 2010-01-20 | 2015-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Driving method of liquid crystal display device |
US10324564B2 (en) | 2010-01-20 | 2019-06-18 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9614097B2 (en) | 2010-01-20 | 2017-04-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10580373B2 (en) | 2010-01-20 | 2020-03-03 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9443482B2 (en) | 2010-01-20 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US10089946B2 (en) | 2010-01-20 | 2018-10-02 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9865744B2 (en) | 2010-01-22 | 2018-01-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9336858B2 (en) | 2010-01-22 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device and driving method thereof |
US9136391B2 (en) | 2010-01-22 | 2015-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11362112B2 (en) | 2010-01-24 | 2022-06-14 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
US10510309B2 (en) | 2010-01-24 | 2019-12-17 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US10211230B2 (en) | 2010-01-24 | 2019-02-19 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US11276359B2 (en) | 2010-01-24 | 2022-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9599860B2 (en) | 2010-01-24 | 2017-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US8879010B2 (en) | 2010-01-24 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9117732B2 (en) | 2010-01-24 | 2015-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
US8866984B2 (en) | 2010-01-24 | 2014-10-21 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
US11887553B2 (en) | 2010-01-24 | 2024-01-30 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9269725B2 (en) | 2010-01-24 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US11935896B2 (en) | 2010-01-24 | 2024-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
US11557263B2 (en) | 2010-01-24 | 2023-01-17 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US8981518B2 (en) | 2010-01-29 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9887450B2 (en) | 2010-01-29 | 2018-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device including the same |
US9819256B2 (en) | 2010-01-29 | 2017-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10468748B2 (en) | 2010-01-29 | 2019-11-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device including the same |
US10862193B2 (en) | 2010-01-29 | 2020-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device including the same |
US9728555B2 (en) | 2010-02-05 | 2017-08-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US11749686B2 (en) | 2010-02-05 | 2023-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9991288B2 (en) | 2010-02-05 | 2018-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US11101295B2 (en) | 2010-02-05 | 2021-08-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9190413B2 (en) | 2010-02-05 | 2015-11-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9659653B2 (en) | 2010-02-05 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9391209B2 (en) | 2010-02-05 | 2016-07-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9202923B2 (en) | 2010-02-05 | 2015-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor |
US9793276B2 (en) | 2010-02-05 | 2017-10-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having transistor and capacitor |
US9269823B2 (en) | 2010-02-05 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US11469255B2 (en) | 2010-02-05 | 2022-10-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10615179B2 (en) | 2010-02-05 | 2020-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8878180B2 (en) | 2010-02-05 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9007351B2 (en) | 2010-02-05 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US8947337B2 (en) | 2010-02-11 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US10007160B2 (en) | 2010-02-11 | 2018-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US11500254B2 (en) | 2010-02-11 | 2022-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US11143925B2 (en) | 2010-02-11 | 2021-10-12 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9798211B2 (en) | 2010-02-11 | 2017-10-24 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9465271B2 (en) | 2010-02-11 | 2016-10-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US10718986B2 (en) | 2010-02-11 | 2020-07-21 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9524993B2 (en) | 2010-02-12 | 2016-12-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having a transistor with an oxide semiconductor layer between a first gate electrode and a second gate electrode |
US10916573B2 (en) | 2010-02-12 | 2021-02-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9024248B2 (en) | 2010-02-12 | 2015-05-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device to include a first transistor with a silicon channel formation region and a second transistor with an oxide semiconductor channel formation region |
US10032422B2 (en) | 2010-02-12 | 2018-07-24 | Semiconductor Energy Laboratory Co., Ltd. | Display device and driving method |
US10157584B2 (en) | 2010-02-12 | 2018-12-18 | Semiconductor Energy Laboratory Co., Ltd. | Display device and driving method |
US9704446B2 (en) | 2010-02-12 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device and driving method |
US10535689B2 (en) | 2010-02-12 | 2020-01-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US11170728B2 (en) | 2010-02-18 | 2021-11-09 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US10586505B2 (en) | 2010-02-18 | 2020-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US11455969B2 (en) | 2010-02-18 | 2022-09-27 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9337191B2 (en) | 2010-02-18 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US10153303B2 (en) | 2010-02-18 | 2018-12-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US11769462B2 (en) | 2010-02-18 | 2023-09-26 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9082858B2 (en) | 2010-02-19 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Transistor including an oxide semiconductor and display device using the same |
US10424582B2 (en) | 2010-02-19 | 2019-09-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9287258B2 (en) | 2010-02-19 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9484381B2 (en) | 2010-02-19 | 2016-11-01 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for driving display device |
US9088245B2 (en) | 2010-02-19 | 2015-07-21 | Semiconductor Energy Laboratory Co., Ltd. | Demodulation circuit and RFID tag including the demodulation circuit |
US10020309B2 (en) | 2010-02-19 | 2018-07-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9196648B2 (en) | 2010-02-19 | 2015-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9564534B2 (en) | 2010-02-19 | 2017-02-07 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and display device using the same |
US8928644B2 (en) | 2010-02-19 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for driving display device |
US8976207B2 (en) | 2010-02-19 | 2015-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device |
US9799666B2 (en) | 2010-02-19 | 2017-10-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11749685B2 (en) | 2010-02-23 | 2023-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Display device, semiconductor device, and driving method thereof |
US11222906B2 (en) | 2010-02-23 | 2022-01-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device, semiconductor device, and driving method thereof |
US9658506B2 (en) | 2010-02-26 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Display device having an oxide semiconductor transistor |
US9613964B2 (en) | 2010-02-26 | 2017-04-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including a memory cell |
US9000438B2 (en) | 2010-02-26 | 2015-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10539845B2 (en) | 2010-02-26 | 2020-01-21 | Semiconductor Energy Laboratory Co., Ltd. | Display device having an oxide semiconductor transistor |
US11049733B2 (en) | 2010-02-26 | 2021-06-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9269571B2 (en) | 2010-02-26 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9927654B2 (en) | 2010-02-26 | 2018-03-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10304696B2 (en) | 2010-02-26 | 2019-05-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10983407B2 (en) | 2010-02-26 | 2021-04-20 | Semiconductor Energy Laboratory Co., Ltd. | Display device having an oxide semiconductor transistor |
US11682562B2 (en) | 2010-02-26 | 2023-06-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10128247B2 (en) | 2010-02-26 | 2018-11-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having memory cell utilizing oxide semiconductor material |
US9048325B2 (en) | 2010-02-26 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Display device having an oxide semiconductor transistor |
US11927862B2 (en) | 2010-02-26 | 2024-03-12 | Semiconductor Energy Laboratory Co., Ltd. | Display device having an oxide semiconductor transistor |
US9911625B2 (en) | 2010-02-26 | 2018-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8923471B2 (en) | 2010-03-02 | 2014-12-30 | Semiconductor Energy Laboratory Co., Ltd. | Pulse signal output circuit and shift register |
US10340021B2 (en) | 2010-03-02 | 2019-07-02 | Semiconductor Energy Laboratory Co., Ltd. | Pulse signal output circuit and shift register |
US8982589B2 (en) | 2010-03-02 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Boosting circuit and RFID tag including boosting circuit |
US11348653B2 (en) | 2010-03-02 | 2022-05-31 | Semiconductor Energy Laboratory Co., Ltd. | Pulse signal output circuit and shift register |
US11942170B2 (en) | 2010-03-02 | 2024-03-26 | Semiconductor Energy Laboratory Co., Ltd. | Pulse signal output circuit and shift register |
US9154035B2 (en) | 2010-03-02 | 2015-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Boosting circuit and RFID tag including boosting circuit |
US9396812B2 (en) | 2010-03-02 | 2016-07-19 | Semiconductor Energy Laboratory Co., Ltd. | Pulse signal output circuit and shift register |
US8693617B2 (en) | 2010-03-02 | 2014-04-08 | Semiconductor Energy Laboratory Co., Ltd. | Pulse signal output circuit and shift register |
US20170040181A1 (en) | 2010-03-05 | 2017-02-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10388538B2 (en) | 2010-03-05 | 2019-08-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9673335B2 (en) | 2010-03-05 | 2017-06-06 | Semiconductor Energy Laboratory Co., Ltd. | Rectifier circuit including transistor whose channel formation region includes oxide semiconductor |
US9496404B2 (en) | 2010-03-05 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9515107B2 (en) | 2010-03-08 | 2016-12-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9306073B2 (en) | 2010-03-08 | 2016-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US8964085B2 (en) | 2010-03-08 | 2015-02-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8976155B2 (en) | 2010-03-08 | 2015-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US10535691B2 (en) | 2010-03-08 | 2020-01-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US11139327B2 (en) | 2010-03-08 | 2021-10-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9852108B2 (en) | 2010-03-08 | 2017-12-26 | Semiconductor Energy Laboratory Co., Ltd. | Processor including first transistor and second transistor |
US9153619B2 (en) | 2010-03-08 | 2015-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9261998B2 (en) | 2010-03-08 | 2016-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Electronic device and electronic system |
US9257567B2 (en) | 2010-03-08 | 2016-02-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US11710751B2 (en) | 2010-03-08 | 2023-07-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9111836B2 (en) | 2010-03-08 | 2015-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US10749033B2 (en) | 2010-03-08 | 2020-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9985069B2 (en) | 2010-03-12 | 2018-05-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8900362B2 (en) | 2010-03-12 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of gallium oxide single crystal |
US9772702B2 (en) | 2010-03-12 | 2017-09-26 | Semiconductor Energy Laboratory Co., Ltd. | Driving method of display device |
US9917109B2 (en) | 2010-03-12 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9066035B2 (en) | 2010-03-12 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including photosensor and transistor having oxide semiconductor active layer |
US9971440B2 (en) | 2010-03-12 | 2018-05-15 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving circuit and method for driving display device |
US8946709B2 (en) | 2010-03-19 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
WO2011115283A1 (en) * | 2010-03-19 | 2011-09-22 | Fujifilm Corporation | Photoelectric conversion layer stack-type solid-state imaging device and imaging apparatus |
US9601633B2 (en) | 2010-03-19 | 2017-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9142549B2 (en) | 2010-03-19 | 2015-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US9230970B2 (en) | 2010-03-19 | 2016-01-05 | Semiconductor Energy Laboratory Co., Ltd | Semiconductor device |
JP2011243945A (en) * | 2010-03-19 | 2011-12-01 | Fujifilm Corp | Photoelectric conversion layer laminate type solid-state imaging element and imaging device |
US9941414B2 (en) | 2010-03-26 | 2018-04-10 | Semiconductor Energy Laboratory Co., Ltd. | Metal oxide semiconductor device |
US9012908B2 (en) | 2010-03-26 | 2015-04-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with metal oxide film |
US9064898B2 (en) | 2010-03-26 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9406786B2 (en) | 2010-03-26 | 2016-08-02 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9425295B2 (en) | 2010-03-26 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9040980B2 (en) | 2010-03-26 | 2015-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Transistor with an oxide semiconductor layer |
US9954084B2 (en) | 2010-03-26 | 2018-04-24 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8941127B2 (en) | 2010-03-31 | 2015-01-27 | Semiconductor Energy Laboratory Co., Ltd. | Field-sequential display device |
US10043424B2 (en) | 2010-03-31 | 2018-08-07 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a display device having an oxide semiconductor switching transistor |
US9203478B2 (en) | 2010-03-31 | 2015-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Power supply device and driving method thereof |
US9646521B2 (en) | 2010-03-31 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Driving method of liquid crystal display device |
US9318613B2 (en) | 2010-04-02 | 2016-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Transistor having two metal oxide films and an oxide semiconductor film |
US9190522B2 (en) | 2010-04-02 | 2015-11-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having an oxide semiconductor |
US8884282B2 (en) | 2010-04-02 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11380800B2 (en) | 2010-04-02 | 2022-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9842937B2 (en) | 2010-04-02 | 2017-12-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having an oxide semiconductor film and a metal oxide film |
US10608116B2 (en) | 2010-04-02 | 2020-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11411121B2 (en) | 2010-04-02 | 2022-08-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9059295B2 (en) | 2010-04-02 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor having an oxide semiconductor and metal oxide films |
US10714626B2 (en) | 2010-04-02 | 2020-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9196739B2 (en) | 2010-04-02 | 2015-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor film and metal oxide film |
US9793412B2 (en) | 2010-04-02 | 2017-10-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9147768B2 (en) | 2010-04-02 | 2015-09-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having an oxide semiconductor and a metal oxide film |
US9401407B2 (en) | 2010-04-07 | 2016-07-26 | Semiconductor Energy Laboratory Co., Ltd. | Transistor |
US9006732B2 (en) | 2010-04-09 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US10879274B2 (en) | 2010-04-09 | 2020-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9496416B2 (en) | 2010-04-09 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9059047B2 (en) | 2010-04-09 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9076877B2 (en) | 2010-04-09 | 2015-07-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10510777B2 (en) | 2010-04-09 | 2019-12-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9431429B2 (en) | 2010-04-09 | 2016-08-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10008515B2 (en) | 2010-04-09 | 2018-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9368090B2 (en) | 2010-04-09 | 2016-06-14 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for driving the same |
US9135877B2 (en) | 2010-04-09 | 2015-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for driving the same |
US8854583B2 (en) | 2010-04-12 | 2014-10-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and liquid crystal display device |
US10529556B2 (en) | 2010-04-16 | 2020-01-07 | Semiconductor Energy Laboratory Co., Ltd. | Deposition method and method for manufacturing semiconductor device |
US9178419B2 (en) | 2010-04-16 | 2015-11-03 | Semiconductor Energy Laboratory Co., Ltd. | Power source circuit including transistor with oxide semiconductor |
US9698008B2 (en) | 2010-04-16 | 2017-07-04 | Semiconductor Energy Laboratory Co., Ltd. | Deposition method and method for manufacturing semiconductor device |
US9006046B2 (en) | 2010-04-16 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Deposition method and method for manufacturing semiconductor device |
US8692243B2 (en) | 2010-04-20 | 2014-04-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8945982B2 (en) | 2010-04-23 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9799298B2 (en) | 2010-04-23 | 2017-10-24 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and driving method thereof |
US9537043B2 (en) | 2010-04-23 | 2017-01-03 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device and manufacturing method thereof |
US9099499B2 (en) | 2010-04-23 | 2015-08-04 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8865534B2 (en) | 2010-04-23 | 2014-10-21 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9147754B2 (en) | 2010-04-23 | 2015-09-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8895377B2 (en) | 2010-04-23 | 2014-11-25 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9390918B2 (en) | 2010-04-23 | 2016-07-12 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9812533B2 (en) | 2010-04-23 | 2017-11-07 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9202877B2 (en) | 2010-04-23 | 2015-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9245983B2 (en) | 2010-04-23 | 2016-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9978878B2 (en) | 2010-04-23 | 2018-05-22 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US10871841B2 (en) | 2010-04-28 | 2020-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor display device and driving method the same |
US10013087B2 (en) | 2010-04-28 | 2018-07-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor display device and driving method the same |
US9349325B2 (en) | 2010-04-28 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device |
US9697788B2 (en) | 2010-04-28 | 2017-07-04 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US9218081B2 (en) | 2010-04-28 | 2015-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor display device and driving method the same |
US9449852B2 (en) | 2010-04-28 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8890555B2 (en) | 2010-04-28 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Method for measuring transistor |
US10068533B2 (en) | 2010-04-28 | 2018-09-04 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device |
US9019320B2 (en) | 2010-04-28 | 2015-04-28 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic appliance |
US11392232B2 (en) | 2010-04-28 | 2022-07-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor display device and driving method the same |
US9064473B2 (en) | 2010-05-12 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical display device and display method thereof |
US9478185B2 (en) | 2010-05-12 | 2016-10-25 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical display device and display method thereof |
US9007813B2 (en) | 2010-05-14 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9490368B2 (en) | 2010-05-20 | 2016-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
US9496405B2 (en) | 2010-05-20 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device including step of adding cation to oxide semiconductor layer |
US9734914B2 (en) | 2010-05-20 | 2017-08-15 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving a semiconductor device having a reading transistor coupled to an oxide semiconductor writing transistor |
US10037808B2 (en) | 2010-05-20 | 2018-07-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving semiconductor device |
US10468531B2 (en) | 2010-05-20 | 2019-11-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
US9780229B2 (en) | 2010-05-20 | 2017-10-03 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8853684B2 (en) | 2010-05-21 | 2014-10-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9443988B2 (en) | 2010-05-21 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9209206B2 (en) | 2010-05-21 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Pulse converter circuit |
US9601602B2 (en) | 2010-05-21 | 2017-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9142648B2 (en) | 2010-05-21 | 2015-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9396939B2 (en) | 2010-05-21 | 2016-07-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9842939B2 (en) | 2010-05-21 | 2017-12-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8999811B2 (en) | 2010-05-21 | 2015-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9793801B2 (en) | 2010-05-21 | 2017-10-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device |
US8941790B2 (en) | 2010-05-21 | 2015-01-27 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US9577108B2 (en) | 2010-05-21 | 2017-02-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8906756B2 (en) | 2010-05-21 | 2014-12-09 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9787294B2 (en) | 2010-05-21 | 2017-10-10 | Semiconductor Energy Laboratory Co., Ltd. | Pulse converter circuit |
US10186603B2 (en) | 2010-05-21 | 2019-01-22 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device including oxygen doping treatment |
US9263589B2 (en) | 2010-05-21 | 2016-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8928645B2 (en) | 2010-05-21 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US9425045B2 (en) | 2010-05-21 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor and manufacturing method thereof |
US9299723B2 (en) | 2010-05-21 | 2016-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with light-blocking layers |
US9275875B2 (en) | 2010-05-21 | 2016-03-01 | Semiconductor Energy Laboratory Co., Ltd | Method for manufacturing semiconductor device |
US9846515B2 (en) | 2010-05-28 | 2017-12-19 | Semiconductor Energy Laboratory Co., Ltd. | Photodetector and display device with light guide configured to face photodetector circuit and reflect light from a source |
US8895375B2 (en) | 2010-06-01 | 2014-11-25 | Semiconductor Energy Laboratory Co., Ltd. | Field effect transistor and method for manufacturing the same |
US9812560B2 (en) | 2010-06-01 | 2017-11-07 | Semiconductor Energy Laboratory Co., Ltd. | Field effect transistor and method for manufacturing the same |
US9064884B2 (en) | 2010-06-04 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having aligned side surfaces |
US10074663B2 (en) | 2010-06-04 | 2018-09-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8884283B2 (en) | 2010-06-04 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd | Memory semiconductor device having aligned side surfaces |
US9461067B2 (en) | 2010-06-04 | 2016-10-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9543835B2 (en) | 2010-06-10 | 2017-01-10 | Semiconductor Energy Laboratory Co., Ltd. | DC/DC converter, power supply circuit, and semiconductor device |
US8884294B2 (en) | 2010-06-11 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9046482B2 (en) | 2010-06-11 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Gas sensor and method for manufacturing the gas sensor |
US9276129B2 (en) | 2010-06-11 | 2016-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device in which oxygen deficiency in semiconductor is reduced and method for manufacturing the same |
US9755082B2 (en) | 2010-06-11 | 2017-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor with an insulating film including galliium and oxygen |
US9281412B2 (en) | 2010-06-16 | 2016-03-08 | Semiconductor Energy Laboratory Co., Ltd. | Field effect transistor |
US9209314B2 (en) | 2010-06-16 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Field effect transistor |
US9489088B2 (en) | 2010-06-16 | 2016-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Input-output device and method for driving input-output device |
US9911866B2 (en) | 2010-06-16 | 2018-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Field effect transistor |
US9390667B2 (en) | 2010-06-16 | 2016-07-12 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving input-output device, and input-output device |
US9472683B2 (en) | 2010-06-16 | 2016-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Field effect transistor |
US9947799B2 (en) | 2010-06-18 | 2018-04-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9076876B2 (en) | 2010-06-18 | 2015-07-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9252103B2 (en) | 2010-06-18 | 2016-02-02 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9142569B2 (en) | 2010-06-18 | 2015-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Photosensor, semiconductor device including photosensor, and light measurement method using photosensor |
US9349820B2 (en) | 2010-06-18 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9685561B2 (en) | 2010-06-18 | 2017-06-20 | Semiconductor Energy Laboratories Co., Ltd. | Method for manufacturing a semiconductor device |
US8906737B2 (en) | 2010-06-18 | 2014-12-09 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8916865B2 (en) | 2010-06-18 | 2014-12-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9590112B2 (en) | 2010-06-18 | 2017-03-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8912016B2 (en) | 2010-06-25 | 2014-12-16 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method and test method of semiconductor device |
US8895976B2 (en) | 2010-06-25 | 2014-11-25 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and semiconductor device |
US9748401B2 (en) | 2010-06-25 | 2017-08-29 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and semiconductor device |
US9136188B2 (en) | 2010-06-25 | 2015-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method and test method of semiconductor device |
US9583576B2 (en) | 2010-06-25 | 2017-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving the same |
US9633722B2 (en) | 2010-06-25 | 2017-04-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving the same |
US11551751B2 (en) | 2010-06-25 | 2023-01-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving the same |
US10726913B2 (en) | 2010-06-25 | 2020-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving the same |
US9437454B2 (en) | 2010-06-29 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Wiring board, semiconductor device, and manufacturing methods thereof |
US9875910B2 (en) | 2010-06-29 | 2018-01-23 | Semiconductor Energy Laboratory Co., Ltd. | Wiring board, semiconductor device, and manufacturing methods thereof |
US9473714B2 (en) | 2010-07-01 | 2016-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Solid-state imaging device and semiconductor display device |
US9734780B2 (en) | 2010-07-01 | 2017-08-15 | Semiconductor Energy Laboratory Co., Ltd. | Driving method of liquid crystal display device |
US10008169B2 (en) | 2010-07-01 | 2018-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Driving method of liquid crystal display device |
US9780093B2 (en) | 2010-07-02 | 2017-10-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9449991B2 (en) | 2010-07-02 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having circular light-blocking layer |
US9224339B2 (en) | 2010-07-02 | 2015-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US11289031B2 (en) | 2010-07-02 | 2022-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US9336739B2 (en) | 2010-07-02 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US10943547B2 (en) | 2010-07-02 | 2021-03-09 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US9293104B2 (en) | 2010-07-02 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US11233055B2 (en) | 2010-07-02 | 2022-01-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9837544B2 (en) | 2010-07-02 | 2017-12-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having an oxide semiconductor layer |
US8878173B2 (en) | 2010-07-02 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor and metal oxide |
US9275858B2 (en) | 2010-07-02 | 2016-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10319723B2 (en) | 2010-07-02 | 2019-06-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9837513B2 (en) | 2010-07-16 | 2017-12-05 | Semicinductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9640642B2 (en) | 2010-07-16 | 2017-05-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9379136B2 (en) | 2010-07-16 | 2016-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8847326B2 (en) | 2010-07-16 | 2014-09-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8975115B2 (en) | 2010-07-26 | 2015-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9666720B2 (en) | 2010-07-27 | 2017-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing the same |
US10522689B2 (en) | 2010-07-27 | 2019-12-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing the same |
US9299474B2 (en) | 2010-07-30 | 2016-03-29 | Samsung Display Co., Ltd. | Oxide for semiconductor layer of thin-film transistor, sputtering target, and thin-film transistor |
US9559211B2 (en) | 2010-07-30 | 2017-01-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8928466B2 (en) | 2010-08-04 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9525051B2 (en) | 2010-08-06 | 2016-12-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9443880B2 (en) | 2010-08-06 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10020330B2 (en) | 2010-08-06 | 2018-07-10 | Semiconductor Energy Laboratory Co., Ltd. | Solid-state image sensing device and semiconductor display device |
US9825037B2 (en) | 2010-08-06 | 2017-11-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US11177792B2 (en) | 2010-08-06 | 2021-11-16 | Semiconductor Energy Laboratory Co., Ltd. | Power supply semiconductor integrated memory control circuit |
US8692823B2 (en) | 2010-08-06 | 2014-04-08 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and driving method of the same |
US9123432B2 (en) | 2010-08-06 | 2015-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving semiconductor device |
US8837232B2 (en) | 2010-08-06 | 2014-09-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9263473B2 (en) | 2010-08-06 | 2016-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor memory device |
US8902640B2 (en) | 2010-08-06 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US11677384B2 (en) | 2010-08-06 | 2023-06-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor integrated circuit with semiconductor layer having indium, zinc, and oxygen |
US8890859B2 (en) | 2010-08-06 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and driving method of the same |
US9299813B2 (en) | 2010-08-06 | 2016-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US8995174B2 (en) | 2010-08-06 | 2015-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor integrated circuit |
US9129703B2 (en) | 2010-08-16 | 2015-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving semiconductor memory device |
US9286966B2 (en) | 2010-08-16 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving semiconductor memory device |
US9287390B2 (en) | 2010-08-16 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9793383B2 (en) | 2010-08-16 | 2017-10-17 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9135880B2 (en) | 2010-08-16 | 2015-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Control circuit of liquid crystal display device, liquid crystal display device, and electronic device including liquid crystal display device |
US9343480B2 (en) | 2010-08-16 | 2016-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9640668B2 (en) | 2010-08-25 | 2017-05-02 | Semiconductor Energy Laboratory Co., Ltd. | Electronic device, manufacturing method of electronic device, and sputtering target |
US8883555B2 (en) | 2010-08-25 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Electronic device, manufacturing method of electronic device, and sputtering target |
US9779937B2 (en) | 2010-08-25 | 2017-10-03 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9245959B2 (en) | 2010-08-25 | 2016-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9424921B2 (en) | 2010-08-26 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing circuit and method for driving the same |
US9058047B2 (en) | 2010-08-26 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10297322B2 (en) | 2010-08-27 | 2019-05-21 | Semiconductor Energy Laboratory Co., Ltd. | Memory device with a driving circuit comprising transistors each having two gate electrodes and an oxide semiconductor layer |
US8952728B2 (en) | 2010-08-27 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of driving semiconductor device |
US8928053B2 (en) | 2010-08-27 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Input/output device |
US9449706B2 (en) | 2010-08-27 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Driving method for a semiconductor device with an oxide semiconductor layer between two gate electrodes |
US8835214B2 (en) | 2010-09-03 | 2014-09-16 | Semiconductor Energy Laboratory Co., Ltd. | Sputtering target and method for manufacturing semiconductor device |
US9331210B2 (en) | 2010-09-03 | 2016-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Field effect transistor and method for manufacturing semiconductor device |
US10269563B2 (en) | 2010-09-03 | 2019-04-23 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9425199B2 (en) | 2010-09-03 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Field effect transistor and method for manufacturing semiconductor device |
US9704960B2 (en) | 2010-09-03 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Field effect transistor and method for manufacturing semiconductor device |
US9355844B2 (en) | 2010-09-03 | 2016-05-31 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8980686B2 (en) | 2010-09-03 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Sputtering target and method for manufacturing semiconductor device |
US9410239B2 (en) | 2010-09-03 | 2016-08-09 | Semiconductor Energy Laboratory Co., Ltd. | Sputtering target and method for manufacturing semiconductor device |
US9490350B2 (en) | 2010-09-10 | 2016-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, liquid crystal display device, and manufacturing method thereof |
US10170500B2 (en) | 2010-09-10 | 2019-01-01 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, liquid crystal display device, and manufacturing method thereof |
US8902209B2 (en) | 2010-09-10 | 2014-12-02 | Semiconductor Energy Laboatory Co., Ltd. | Display device |
US9142568B2 (en) | 2010-09-10 | 2015-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing light-emitting display device |
US11043509B2 (en) | 2010-09-10 | 2021-06-22 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, liquid crystal display device, and manufacturing method thereof |
US9240425B2 (en) | 2010-09-10 | 2016-01-19 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing light-emitting display device |
US11189642B2 (en) | 2010-09-10 | 2021-11-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and light-emitting device |
US9263116B2 (en) | 2010-09-13 | 2016-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Memory device |
US11024655B2 (en) | 2010-09-13 | 2021-06-01 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for manufacturing the same |
US9496743B2 (en) | 2010-09-13 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Power receiving device and wireless power feed system |
US8871565B2 (en) | 2010-09-13 | 2014-10-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9685562B2 (en) | 2010-09-13 | 2017-06-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, power diode, and rectifier |
US10453846B2 (en) | 2010-09-13 | 2019-10-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8969144B2 (en) | 2010-09-13 | 2015-03-03 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10910499B2 (en) | 2010-09-13 | 2021-02-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, power diode, and rectifier |
US9117919B2 (en) | 2010-09-13 | 2015-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10586869B2 (en) | 2010-09-13 | 2020-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9042161B2 (en) | 2010-09-13 | 2015-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Memory device |
US9546416B2 (en) | 2010-09-13 | 2017-01-17 | Semiconductor Energy Laboratory Co., Ltd. | Method of forming crystalline oxide semiconductor film |
US9040396B2 (en) | 2010-09-13 | 2015-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US8912544B2 (en) | 2010-09-13 | 2014-12-16 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting display device and method for manufacturing the same |
US8884470B2 (en) | 2010-09-13 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9324877B2 (en) | 2010-09-13 | 2016-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, power diode, and rectifier |
US10522572B2 (en) | 2010-09-13 | 2019-12-31 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for manufacturing the same |
US8835917B2 (en) | 2010-09-13 | 2014-09-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, power diode, and rectifier |
US8901552B2 (en) | 2010-09-13 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Top gate thin film transistor with multiple oxide semiconductor layers |
US9252248B2 (en) | 2010-09-13 | 2016-02-02 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device comprising oxide semiconductor layer |
US10615283B2 (en) | 2010-09-13 | 2020-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, power diode, and rectifier |
US11682678B2 (en) | 2010-09-13 | 2023-06-20 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for manufacturing the same |
US9917112B2 (en) | 2010-09-13 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for manufacturing the same |
US9343584B2 (en) | 2010-09-13 | 2016-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US11715800B2 (en) | 2010-09-13 | 2023-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, power diode, and rectifier |
US9305944B2 (en) | 2010-09-13 | 2016-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for manufacturing the same |
US11417688B2 (en) | 2010-09-13 | 2022-08-16 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for manufacturing the same |
US9462260B2 (en) | 2010-09-13 | 2016-10-04 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9105668B2 (en) | 2010-09-13 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9007812B2 (en) | 2010-09-14 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Memory device comprising a cell array overlapping a driver circuit |
US10236033B2 (en) | 2010-09-14 | 2019-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and semiconductor device |
US10665270B2 (en) | 2010-09-14 | 2020-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Memory device comprising stacked memory cell |
US11568902B2 (en) | 2010-09-14 | 2023-01-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including transistors with different channel-formation materials |
US9299393B2 (en) | 2010-09-14 | 2016-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and semiconductor device |
US8884302B2 (en) | 2010-09-15 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US8953112B2 (en) | 2010-09-15 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US9368053B2 (en) | 2010-09-15 | 2016-06-14 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9230994B2 (en) | 2010-09-15 | 2016-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US8994003B2 (en) | 2010-09-22 | 2015-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Power-insulated-gate field-effect transistor |
US9825042B2 (en) | 2010-09-29 | 2017-11-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device and method for driving the same |
US9384816B2 (en) | 2010-09-29 | 2016-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device and method for driving the same |
US8837202B2 (en) | 2010-09-29 | 2014-09-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device and method for driving the same |
US9917197B2 (en) | 2010-10-07 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Thin film element, semiconductor device, and method for manufacturing the same |
US9437743B2 (en) | 2010-10-07 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Thin film element, semiconductor device, and method for manufacturing the same |
US9276124B2 (en) | 2010-10-14 | 2016-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device with sidewall |
US9397224B2 (en) | 2010-10-20 | 2016-07-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10038099B2 (en) | 2010-10-29 | 2018-07-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US9263451B2 (en) | 2010-10-29 | 2016-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Storage device including memory cell using transistor having oxide semiconductor and amplifier circuit |
US9680029B2 (en) | 2010-10-29 | 2017-06-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US8871304B2 (en) | 2010-11-02 | 2014-10-28 | Ube Industries, Ltd. | (Amide amino alkane) metal compound, method of manufacturing metal-containing thin film using said metal compound |
US8916866B2 (en) | 2010-11-03 | 2014-12-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8896046B2 (en) | 2010-11-05 | 2014-11-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10170598B2 (en) | 2010-11-05 | 2019-01-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9299851B2 (en) | 2010-11-05 | 2016-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8957468B2 (en) | 2010-11-05 | 2015-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Variable capacitor and liquid crystal display device |
US9054205B2 (en) | 2010-11-05 | 2015-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9087744B2 (en) | 2010-11-05 | 2015-07-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving transistor |
US9461047B2 (en) | 2010-11-05 | 2016-10-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9070329B2 (en) | 2010-11-05 | 2015-06-30 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving the gate lines of a display device to eliminate deterioration |
US8902637B2 (en) | 2010-11-08 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device comprising inverting amplifier circuit and driving method thereof |
US11631756B2 (en) | 2010-11-11 | 2023-04-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10153360B2 (en) | 2010-11-11 | 2018-12-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10811522B2 (en) | 2010-11-11 | 2020-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9673305B2 (en) | 2010-11-11 | 2017-06-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9460772B2 (en) | 2010-11-12 | 2016-10-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9218870B2 (en) | 2010-11-24 | 2015-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US8854865B2 (en) | 2010-11-24 | 2014-10-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US9786670B2 (en) | 2010-11-24 | 2017-10-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US8936965B2 (en) | 2010-11-26 | 2015-01-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9634082B2 (en) | 2010-11-30 | 2017-04-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9202927B2 (en) | 2010-11-30 | 2015-12-01 | Seminconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9281358B2 (en) | 2010-11-30 | 2016-03-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9848149B2 (en) | 2010-11-30 | 2017-12-19 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving photosensor, method for driving semiconductor device, semiconductor device, and electronic device |
US9103724B2 (en) | 2010-11-30 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising photosensor comprising oxide semiconductor, method for driving the semiconductor device, method for driving the photosensor, and electronic device |
US9029937B2 (en) | 2010-11-30 | 2015-05-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9331208B2 (en) | 2010-12-03 | 2016-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
US8891286B2 (en) | 2010-12-03 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Integrated circuit, method for driving the same, and semiconductor device |
US8994021B2 (en) | 2010-12-03 | 2015-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
US9257971B2 (en) | 2010-12-03 | 2016-02-09 | Semiconductor Energy Laboratory Co., Ltd. | Integrated circuit, method for driving the same, and semiconductor device |
US9711655B2 (en) | 2010-12-03 | 2017-07-18 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
US9224757B2 (en) | 2010-12-03 | 2015-12-29 | Semiconductor Energy Laboratory Co., Ltd. | DC-DC converter and manufacturing method thereof |
US10103277B2 (en) | 2010-12-03 | 2018-10-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing oxide semiconductor film |
US10916663B2 (en) | 2010-12-03 | 2021-02-09 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
US8957462B2 (en) | 2010-12-09 | 2015-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising an N-type transistor with an N-type semiconductor containing nitrogen as a gate |
US9841843B2 (en) | 2010-12-15 | 2017-12-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9812544B2 (en) | 2010-12-17 | 2017-11-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9865696B2 (en) | 2010-12-17 | 2018-01-09 | Semiconductor Energy Laboratory Co., Ltd. | Sputtering target, method for manufacturing the same, and method for manufacturing semiconductor device |
US9424923B2 (en) | 2010-12-17 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor storage device |
US8894825B2 (en) | 2010-12-17 | 2014-11-25 | Semiconductor Energy Laboratory Co., Ltd. | Sputtering target, method for manufacturing the same, manufacturing semiconductor device |
US9620186B2 (en) | 2010-12-17 | 2017-04-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor storage device |
US9202822B2 (en) | 2010-12-17 | 2015-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9024317B2 (en) | 2010-12-24 | 2015-05-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor circuit, method for driving the same, storage device, register circuit, display device, and electronic device |
US9735179B2 (en) | 2010-12-24 | 2017-08-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor circuit, method for driving the same, storage device, register circuit, display device, and electronic device |
US10886414B2 (en) | 2010-12-28 | 2021-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9698169B2 (en) | 2010-12-28 | 2017-07-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and semiconductor memory device |
US9306076B2 (en) | 2010-12-28 | 2016-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9520503B2 (en) | 2010-12-28 | 2016-12-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9263471B2 (en) | 2010-12-28 | 2016-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and semiconductor memory device |
US9287294B2 (en) | 2010-12-28 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Capacitor and semiconductor device having oxide semiconductor |
US8883556B2 (en) | 2010-12-28 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9099498B2 (en) | 2010-12-28 | 2015-08-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10714625B2 (en) | 2010-12-28 | 2020-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9954004B2 (en) | 2010-12-28 | 2018-04-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11923249B2 (en) | 2010-12-28 | 2024-03-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9780225B2 (en) | 2010-12-28 | 2017-10-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9337321B2 (en) | 2010-12-28 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9129997B2 (en) | 2010-12-28 | 2015-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9093136B2 (en) | 2010-12-28 | 2015-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing circuit comprising memory cell |
US10522692B2 (en) | 2010-12-28 | 2019-12-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9257452B2 (en) | 2010-12-28 | 2016-02-09 | Semiconductor Energy Laboratory Co., Ltd. | Portable semiconductor device including transistor with oxide semiconductor layer |
US9911858B2 (en) | 2010-12-28 | 2018-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9443984B2 (en) | 2010-12-28 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US11430896B2 (en) | 2010-12-28 | 2022-08-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9048142B2 (en) | 2010-12-28 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8941112B2 (en) | 2010-12-28 | 2015-01-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US11670721B2 (en) | 2010-12-28 | 2023-06-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9024669B2 (en) | 2011-01-05 | 2015-05-05 | Semiconductor Energy Laboratory Co., Ltd. | Storage element, storage device, and signal processing circuit |
US9330759B2 (en) | 2011-01-05 | 2016-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Storage element, storage device, and signal processing circuit |
US9818749B2 (en) | 2011-01-05 | 2017-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Storage element, storage device, and signal processing circuit |
US9349752B2 (en) | 2011-01-12 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10170633B2 (en) | 2011-01-12 | 2019-01-01 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8921948B2 (en) | 2011-01-12 | 2014-12-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9882062B2 (en) | 2011-01-12 | 2018-01-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9570484B2 (en) | 2011-01-12 | 2017-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8912080B2 (en) | 2011-01-12 | 2014-12-16 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of the semiconductor device |
US9166026B2 (en) | 2011-01-12 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9673336B2 (en) | 2011-01-12 | 2017-06-06 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9818850B2 (en) | 2011-01-12 | 2017-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of the semiconductor device |
US9299814B2 (en) | 2011-01-12 | 2016-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of the semiconductor device |
US10593786B2 (en) | 2011-01-12 | 2020-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of the semiconductor device |
US11805637B2 (en) | 2011-01-14 | 2023-10-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising first and second conductors |
US11139301B2 (en) | 2011-01-14 | 2021-10-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including side surface conductor contact |
US9337345B2 (en) | 2011-01-14 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including multilayer wiring layer |
US9570141B2 (en) | 2011-01-14 | 2017-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Memory device having a transistor including a semiconductor oxide |
US10763261B2 (en) | 2011-01-14 | 2020-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device comprising memory cell over driver |
US10249626B2 (en) | 2011-01-14 | 2019-04-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device including multilayer wiring layer |
US9786668B2 (en) | 2011-01-14 | 2017-10-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including multilayer wiring layer |
US9337347B2 (en) | 2011-01-20 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor element and semiconductor device |
US9917206B2 (en) | 2011-01-20 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor element and semiconductor device |
US8916867B2 (en) | 2011-01-20 | 2014-12-23 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor element and semiconductor device |
US9761588B2 (en) | 2011-01-26 | 2017-09-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having a wide-gap semiconductor layer in an insulating trench |
US9601178B2 (en) | 2011-01-26 | 2017-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and semiconductor device |
US9209092B2 (en) | 2011-01-26 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with a wide-gap semiconductor layer on inner wall of trench |
US10069014B2 (en) | 2011-01-26 | 2018-09-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10008587B2 (en) | 2011-01-26 | 2018-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8865555B2 (en) | 2011-01-26 | 2014-10-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9048130B2 (en) | 2011-01-26 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9082864B2 (en) | 2011-01-27 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8890150B2 (en) | 2011-01-27 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9202567B2 (en) | 2011-01-27 | 2015-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Memory circuit |
US10134766B2 (en) | 2011-01-28 | 2018-11-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8987727B2 (en) | 2011-01-28 | 2015-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device and semiconductor device |
US9494829B2 (en) | 2011-01-28 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and liquid crystal display device containing the same |
US9299815B2 (en) | 2011-01-28 | 2016-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device and semiconductor device |
US9490267B2 (en) | 2011-01-28 | 2016-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8937304B2 (en) | 2011-01-28 | 2015-01-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9799773B2 (en) | 2011-02-02 | 2017-10-24 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and semiconductor device |
US9431400B2 (en) | 2011-02-08 | 2016-08-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device and method for manufacturing the same |
US9064599B2 (en) | 2011-02-10 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Memory circuit |
US9743071B2 (en) | 2011-02-14 | 2017-08-22 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9167234B2 (en) | 2011-02-14 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US8975680B2 (en) | 2011-02-17 | 2015-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device and method manufacturing semiconductor memory device |
US9305612B2 (en) | 2011-02-17 | 2016-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Programmable LSI with multiple transistors in a memory element |
US8891281B2 (en) | 2011-02-17 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Programmable LSI |
US9257432B2 (en) | 2011-02-17 | 2016-02-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device and method of manufacturing semiconductor memory device |
US9443455B2 (en) | 2011-02-25 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Display device having a plurality of pixels |
US9691772B2 (en) | 2011-03-03 | 2017-06-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device including memory cell which includes transistor and capacitor |
US9905557B2 (en) | 2011-03-04 | 2018-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9023684B2 (en) | 2011-03-04 | 2015-05-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9293427B2 (en) | 2011-03-04 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8841664B2 (en) | 2011-03-04 | 2014-09-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9646829B2 (en) | 2011-03-04 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US10032768B2 (en) | 2011-03-04 | 2018-07-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9508448B2 (en) | 2011-03-08 | 2016-11-29 | Semiconductor Energy Laboratory Co., Ltd. | Memory element and signal processing circuit |
US9099437B2 (en) | 2011-03-08 | 2015-08-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9767862B2 (en) | 2011-03-08 | 2017-09-19 | Semiconductor Energy Laboratory Co., Ltd. | Memory element and signal processing circuit |
US9425107B2 (en) | 2011-03-10 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and method for manufacturing the same |
US10079238B2 (en) | 2011-03-10 | 2018-09-18 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and method for manufacturing the same |
US9812458B2 (en) | 2011-03-10 | 2017-11-07 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and method for manufacturing the same |
US8841165B2 (en) | 2011-03-10 | 2014-09-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9355687B2 (en) | 2011-03-11 | 2016-05-31 | Semiconductor Energy Laboratory Co., Ltd. | Storage circuit |
US9450104B2 (en) | 2011-03-11 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10615052B2 (en) | 2011-03-11 | 2020-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device |
US9362136B2 (en) | 2011-03-11 | 2016-06-07 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device |
US11387116B2 (en) | 2011-03-11 | 2022-07-12 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device |
US9184296B2 (en) | 2011-03-11 | 2015-11-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having c-axis aligned portions and doped portions |
US10002775B2 (en) | 2011-03-11 | 2018-06-19 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device |
US10109743B2 (en) | 2011-03-18 | 2018-10-23 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film, semiconductor device, and manufacturing method of semiconductor device |
US8927982B2 (en) | 2011-03-18 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film, semiconductor device, and manufacturing method of semiconductor device |
US9627386B2 (en) | 2011-03-18 | 2017-04-18 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and electronic device |
US9379223B2 (en) | 2011-03-18 | 2016-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film, semiconductor device, and manufacturing method of semiconductor device |
US9385128B2 (en) | 2011-03-18 | 2016-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and electronic device |
US8859330B2 (en) | 2011-03-23 | 2014-10-14 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8958252B2 (en) | 2011-03-24 | 2015-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing circuit |
US9472676B2 (en) | 2011-03-25 | 2016-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8987728B2 (en) | 2011-03-25 | 2015-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing semiconductor device |
US8956944B2 (en) | 2011-03-25 | 2015-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9196690B2 (en) | 2011-03-25 | 2015-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
US8835921B2 (en) | 2011-03-25 | 2014-09-16 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
US9490351B2 (en) | 2011-03-25 | 2016-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing semiconductor device |
US9397225B2 (en) | 2011-03-25 | 2016-07-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9548395B2 (en) | 2011-03-25 | 2017-01-17 | Semiconductor Energy Laboratory Co., Ltd. | Field-effect transistor including oxide semiconductor, and memory and semiconductor circuit including the same |
US9287408B2 (en) | 2011-03-25 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Field-effect transistor, and memory and semiconductor circuit including the same |
US9219159B2 (en) | 2011-03-25 | 2015-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming oxide semiconductor film and method for manufacturing semiconductor device |
US9012904B2 (en) | 2011-03-25 | 2015-04-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9859443B2 (en) | 2011-03-25 | 2018-01-02 | Semiconductor Energy Laboratory Co., Ltd. | Field-effect transistor, and memory and semiconductor circuit including the same |
US9929280B2 (en) | 2011-03-28 | 2018-03-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor film containing indium |
US10192997B2 (en) | 2011-03-28 | 2019-01-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor |
US9425322B2 (en) | 2011-03-28 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device including exposure of oxide semiconductor to reducing atmosphere |
US9076520B2 (en) | 2011-03-30 | 2015-07-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US10008588B2 (en) | 2011-03-30 | 2018-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing oxide semiconductor device |
US8927329B2 (en) | 2011-03-30 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing oxide semiconductor device with improved electronic properties |
US9917204B2 (en) | 2011-03-31 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9082860B2 (en) | 2011-03-31 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9196616B2 (en) | 2011-03-31 | 2015-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Memory device |
US8923076B2 (en) | 2011-03-31 | 2014-12-30 | Semiconductor Energy Laboratory Co., Ltd. | Memory circuit, memory unit, and signal processing circuit |
US9293590B2 (en) | 2011-03-31 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9030105B2 (en) | 2011-04-01 | 2015-05-12 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device |
US9960278B2 (en) | 2011-04-06 | 2018-05-01 | Yuhei Sato | Manufacturing method of semiconductor device |
US9093538B2 (en) | 2011-04-08 | 2015-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9142320B2 (en) | 2011-04-08 | 2015-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Memory element and signal processing circuit |
US9893196B2 (en) | 2011-04-08 | 2018-02-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor film |
US9012905B2 (en) | 2011-04-08 | 2015-04-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including transistor comprising oxide semiconductor and method for manufacturing the same |
US10998449B2 (en) | 2011-04-13 | 2021-05-04 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
US9478668B2 (en) | 2011-04-13 | 2016-10-25 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
US9893201B2 (en) | 2011-04-13 | 2018-02-13 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
US9224472B2 (en) | 2011-04-13 | 2015-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and driving method of the memory device |
US10644164B2 (en) | 2011-04-13 | 2020-05-05 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
US8854867B2 (en) | 2011-04-13 | 2014-10-07 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and driving method of the memory device |
US11799033B2 (en) | 2011-04-13 | 2023-10-24 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
US9070776B2 (en) | 2011-04-15 | 2015-06-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9299708B2 (en) | 2011-04-15 | 2016-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US8878270B2 (en) | 2011-04-15 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US8878174B2 (en) | 2011-04-15 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor element, memory circuit, integrated circuit, and driving method of the integrated circuit |
US9231566B2 (en) | 2011-04-15 | 2016-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US8929161B2 (en) | 2011-04-21 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing circuit |
US8941958B2 (en) | 2011-04-22 | 2015-01-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10079053B2 (en) | 2011-04-22 | 2018-09-18 | Semiconductor Energy Laboratory Co., Ltd. | Memory element and memory device |
US9287266B2 (en) | 2011-04-22 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8916868B2 (en) | 2011-04-22 | 2014-12-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9559193B2 (en) | 2011-04-22 | 2017-01-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9818820B2 (en) | 2011-04-22 | 2017-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Oxide material and semiconductor device |
US8878288B2 (en) | 2011-04-22 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10388799B2 (en) | 2011-04-22 | 2019-08-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor Device |
US8932913B2 (en) | 2011-04-22 | 2015-01-13 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9548308B2 (en) | 2011-04-22 | 2017-01-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9660095B2 (en) | 2011-04-22 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10079295B2 (en) | 2011-04-22 | 2018-09-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing thereof |
US9006803B2 (en) | 2011-04-22 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing thereof |
US9331206B2 (en) | 2011-04-22 | 2016-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Oxide material and semiconductor device |
US10249651B2 (en) | 2011-04-27 | 2019-04-02 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9269797B2 (en) | 2011-04-27 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US8969182B2 (en) | 2011-04-27 | 2015-03-03 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9911767B2 (en) | 2011-04-27 | 2018-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device comprising oxide semiconductor |
US9543145B2 (en) | 2011-04-27 | 2017-01-10 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9160291B2 (en) | 2011-04-28 | 2015-10-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor circuit having switching element, capacitor and operational amplifier circuit |
US9935622B2 (en) | 2011-04-28 | 2018-04-03 | Semiconductor Energy Laboratory Co., Ltd. | Comparator and semiconductor device including comparator |
US9773810B2 (en) | 2011-04-29 | 2017-09-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9111795B2 (en) | 2011-04-29 | 2015-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with capacitor connected to memory element through oxide semiconductor film |
US9614094B2 (en) | 2011-04-29 | 2017-04-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor layer and method for driving the same |
US9443563B2 (en) | 2011-04-29 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US10910404B2 (en) | 2011-04-29 | 2021-02-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9001563B2 (en) | 2011-04-29 | 2015-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US8848464B2 (en) | 2011-04-29 | 2014-09-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of driving semiconductor device |
US9041449B2 (en) | 2011-04-29 | 2015-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor storage device |
US10388670B2 (en) | 2011-04-29 | 2019-08-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9165942B2 (en) | 2011-04-29 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
US9040995B2 (en) | 2011-05-05 | 2015-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9508862B2 (en) | 2011-05-05 | 2016-11-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US11942483B2 (en) | 2011-05-05 | 2024-03-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10283530B2 (en) | 2011-05-05 | 2019-05-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10068926B2 (en) | 2011-05-05 | 2018-09-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9444459B2 (en) | 2011-05-06 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit and semiconductor device |
US9117701B2 (en) | 2011-05-06 | 2015-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9443844B2 (en) | 2011-05-10 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Gain cell semiconductor memory device and driving method thereof |
US9893195B2 (en) | 2011-05-11 | 2018-02-13 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device |
US8946066B2 (en) | 2011-05-11 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device |
US8947910B2 (en) | 2011-05-11 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising inverters and capacitor, and driving method thereof |
US8847233B2 (en) | 2011-05-12 | 2014-09-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having a trenched insulating layer coated with an oxide semiconductor film |
US8912985B2 (en) | 2011-05-12 | 2014-12-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving display device |
US9087855B2 (en) | 2011-05-12 | 2015-07-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9530852B2 (en) | 2011-05-12 | 2016-12-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9397222B2 (en) | 2011-05-13 | 2016-07-19 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9742362B2 (en) | 2011-05-13 | 2017-08-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and operation method thereof |
US9048788B2 (en) | 2011-05-13 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising a photoelectric conversion portion |
US9373708B2 (en) | 2011-05-13 | 2016-06-21 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9954110B2 (en) | 2011-05-13 | 2018-04-24 | Semiconductor Energy Laboratory Co., Ltd. | EL display device and electronic device |
US8897049B2 (en) | 2011-05-13 | 2014-11-25 | Semiconductor Energy Laboratories Co., Ltd. | Semiconductor device and memory device including semiconductor device |
US9093539B2 (en) | 2011-05-13 | 2015-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9466618B2 (en) | 2011-05-13 | 2016-10-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including two thin film transistors and method of manufacturing the same |
US9047947B2 (en) | 2011-05-13 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including register components |
US9105749B2 (en) | 2011-05-13 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9344090B2 (en) | 2011-05-16 | 2016-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
US9859268B2 (en) | 2011-05-17 | 2018-01-02 | Semiconductor Energy Laboratory Co., Ltd. | Content addressable memory |
US9673823B2 (en) | 2011-05-18 | 2017-06-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of driving semiconductor device |
US11356097B2 (en) | 2011-05-18 | 2022-06-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of driving semiconductor device |
US10135446B2 (en) | 2011-05-18 | 2018-11-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of driving semiconductor device |
US9444457B2 (en) | 2011-05-19 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Circuit and method of driving the same |
US9397664B2 (en) | 2011-05-19 | 2016-07-19 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic circuit |
US9595964B2 (en) | 2011-05-19 | 2017-03-14 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
US9172237B2 (en) | 2011-05-19 | 2015-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor integrated circuit |
US8837203B2 (en) | 2011-05-19 | 2014-09-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10090333B2 (en) | 2011-05-19 | 2018-10-02 | Semiconductor Energy Laboratory Co., Ltd. | Arithmetic circuit and method of driving the same |
US9117920B2 (en) | 2011-05-19 | 2015-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device using oxide semiconductor |
US9900007B2 (en) | 2011-05-19 | 2018-02-20 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
US9336850B2 (en) | 2011-05-19 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9130558B2 (en) | 2011-05-19 | 2015-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Circuit and method of driving the same |
US8692579B2 (en) | 2011-05-19 | 2014-04-08 | Semiconductor Energy Laboratory Co., Ltd. | Circuit and method of driving the same |
US9029929B2 (en) | 2011-05-19 | 2015-05-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device and manufacturing method thereof |
US9536574B2 (en) | 2011-05-20 | 2017-01-03 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and signal processing circuit |
US9122896B2 (en) | 2011-05-20 | 2015-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Adder |
US9105353B2 (en) | 2011-05-20 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and semiconductor device including the memory device |
US9048825B2 (en) | 2011-05-20 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8848449B2 (en) | 2011-05-20 | 2014-09-30 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and method for driving memory device |
US9048105B2 (en) | 2011-05-20 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor integrated circuit |
US9697878B2 (en) | 2011-05-20 | 2017-07-04 | Semiconductor Energy Laboratory Co., Ltd. | Word line divider and storage device |
US8964450B2 (en) | 2011-05-20 | 2015-02-24 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and signal processing circuit |
US9000816B2 (en) | 2011-05-20 | 2015-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Phase locked loop and semiconductor device using the same |
US9336845B2 (en) | 2011-05-20 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Register circuit including a volatile memory and a nonvolatile memory |
US9748400B2 (en) | 2011-05-20 | 2017-08-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9559105B2 (en) | 2011-05-20 | 2017-01-31 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing circuit |
US8847627B2 (en) | 2011-05-20 | 2014-09-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9570445B2 (en) | 2011-05-20 | 2017-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9202814B2 (en) | 2011-05-20 | 2015-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and signal processing circuit |
US11489077B2 (en) | 2011-05-25 | 2022-11-01 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming oxide semiconductor film, semiconductor device, and method for manufacturing semiconductor device |
US11967648B2 (en) | 2011-05-25 | 2024-04-23 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming oxide semiconductor film, semiconductor device, and method for manufacturing semiconductor device |
US9171840B2 (en) | 2011-05-26 | 2015-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9490806B2 (en) | 2011-05-31 | 2016-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9059704B2 (en) | 2011-05-31 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
US9467047B2 (en) | 2011-05-31 | 2016-10-11 | Semiconductor Energy Laboratory Co., Ltd. | DC-DC converter, power source circuit, and semiconductor device |
US9077333B2 (en) | 2011-05-31 | 2015-07-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP2013016772A (en) * | 2011-06-07 | 2013-01-24 | Sony Corp | Radiation imaging apparatus, radiation imaging display system, and transistor |
US11959165B2 (en) | 2011-06-08 | 2024-04-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor film |
US11066739B2 (en) | 2011-06-08 | 2021-07-20 | Semiconductor Energy Laboratory Co., Ltd. | Sputtering target, method for manufacturing sputtering target, and method for forming thin film |
US9489830B2 (en) | 2011-06-08 | 2016-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Communication method and communication system |
US10889888B2 (en) | 2011-06-08 | 2021-01-12 | Semiconductor Energy Laboratory Co., Ltd. | Sputtering target, method for manufacturing sputtering target, and method for forming thin film |
US9875381B2 (en) | 2011-06-08 | 2018-01-23 | Semiconductor Energy Laboratory Co., Ltd. | Communication method and communication system |
US9382611B2 (en) | 2011-06-08 | 2016-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Sputtering target, method for manufacturing sputtering target, and method for forming thin film |
US8889477B2 (en) | 2011-06-08 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming thin film utilizing sputtering target |
US9105313B2 (en) | 2011-06-09 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Memory device |
US8958231B2 (en) | 2011-06-09 | 2015-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Memory device including first to seventh transistors |
US9287407B2 (en) | 2011-06-10 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9472263B2 (en) | 2011-06-10 | 2016-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US8946790B2 (en) | 2011-06-10 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing the same |
US10833202B2 (en) | 2011-06-10 | 2020-11-10 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9595313B2 (en) | 2011-06-10 | 2017-03-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9112036B2 (en) | 2011-06-10 | 2015-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US8958263B2 (en) | 2011-06-10 | 2015-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8891285B2 (en) | 2011-06-10 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US10192990B2 (en) | 2011-06-10 | 2019-01-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing the same |
US9837545B2 (en) | 2011-06-10 | 2017-12-05 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9299852B2 (en) | 2011-06-16 | 2016-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9548397B2 (en) | 2011-06-17 | 2017-01-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9601636B2 (en) | 2011-06-17 | 2017-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9076874B2 (en) | 2011-06-17 | 2015-07-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9768307B2 (en) | 2011-06-17 | 2017-09-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9818849B2 (en) | 2011-06-17 | 2017-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device with conductive film in opening through multiple insulating films |
US9166055B2 (en) | 2011-06-17 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8901554B2 (en) | 2011-06-17 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including channel formation region including oxide semiconductor |
US9099885B2 (en) | 2011-06-17 | 2015-08-04 | Semiconductor Energy Laboratory Co., Ltd. | Wireless power feeding system |
US9923417B2 (en) | 2011-06-17 | 2018-03-20 | Semiconductor Energy Laboratory Co., Ltd. | Wireless power feeding system |
US9287409B2 (en) | 2011-06-17 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8890152B2 (en) | 2011-06-17 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9515065B2 (en) | 2011-06-29 | 2016-12-06 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, method of manufacturing the driver circuit, and display device including the driver circuit |
US9997514B2 (en) | 2011-06-29 | 2018-06-12 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, method of manufacturing the driver circuit, and display device including the driver circuit |
US8970999B2 (en) | 2011-06-29 | 2015-03-03 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, method of manufacturing the driver circuit, and display device including the driver circuit |
US9508759B2 (en) | 2011-06-30 | 2016-11-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
USRE48576E1 (en) | 2011-06-30 | 2021-06-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9130044B2 (en) | 2011-07-01 | 2015-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9698275B2 (en) | 2011-07-08 | 2017-07-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US11011652B2 (en) | 2011-07-08 | 2021-05-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10658522B2 (en) | 2011-07-08 | 2020-05-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9214474B2 (en) | 2011-07-08 | 2015-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9385238B2 (en) | 2011-07-08 | 2016-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Transistor using oxide semiconductor |
US8952377B2 (en) | 2011-07-08 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9496138B2 (en) | 2011-07-08 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing oxide semiconductor film, method for manufacturing semiconductor device, and semiconductor device |
US9837548B2 (en) | 2011-07-08 | 2017-12-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11588058B2 (en) | 2011-07-08 | 2023-02-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9318506B2 (en) | 2011-07-08 | 2016-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9196745B2 (en) | 2011-07-08 | 2015-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10439072B2 (en) | 2011-07-08 | 2019-10-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9490241B2 (en) | 2011-07-08 | 2016-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising a first inverter and a second inverter |
US10043918B2 (en) | 2011-07-08 | 2018-08-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9530897B2 (en) | 2011-07-08 | 2016-12-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9472677B2 (en) | 2011-07-15 | 2016-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8847220B2 (en) | 2011-07-15 | 2014-09-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9659983B2 (en) | 2011-07-15 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving the same |
US9200952B2 (en) | 2011-07-15 | 2015-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising a photodetector and an analog arithmetic circuit |
US8912596B2 (en) | 2011-07-15 | 2014-12-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8836626B2 (en) | 2011-07-15 | 2014-09-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving the same |
US9111824B2 (en) | 2011-07-15 | 2015-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving the same |
US10304878B2 (en) | 2011-07-15 | 2019-05-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving the same |
US9805954B2 (en) | 2011-07-21 | 2017-10-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8946812B2 (en) | 2011-07-21 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10157939B2 (en) | 2011-07-22 | 2018-12-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including memory cell which includes transistor and capacitor |
US11741895B2 (en) | 2011-07-22 | 2023-08-29 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device |
US9666723B2 (en) | 2011-07-22 | 2017-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9006735B2 (en) | 2011-07-22 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Method for processing oxide semiconductor film and method for manufacturing semiconductor device |
US10991829B2 (en) | 2011-07-22 | 2021-04-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor |
US10153378B2 (en) | 2011-07-22 | 2018-12-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor |
US10629122B2 (en) | 2011-07-22 | 2020-04-21 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device |
US11081050B2 (en) | 2011-07-22 | 2021-08-03 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device |
US9136388B2 (en) | 2011-07-22 | 2015-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10008149B2 (en) | 2011-07-22 | 2018-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device including pixels suppressing variation in luminance |
US9012993B2 (en) | 2011-07-22 | 2015-04-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8994019B2 (en) | 2011-08-05 | 2015-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9614095B2 (en) | 2011-08-18 | 2017-04-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9136297B2 (en) | 2011-08-19 | 2015-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving semiconductor device |
US9064853B2 (en) | 2011-08-19 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9083335B2 (en) | 2011-08-24 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with switch and logic circuit |
US9001959B2 (en) | 2011-08-29 | 2015-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9660092B2 (en) | 2011-08-31 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor thin film transistor including oxygen release layer |
US9252279B2 (en) | 2011-08-31 | 2016-02-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9269825B2 (en) | 2011-09-07 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9082670B2 (en) | 2011-09-09 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9035304B2 (en) | 2011-09-13 | 2015-05-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8921849B2 (en) | 2011-09-15 | 2014-12-30 | Semiconductor Energy Laboratory Co., Ltd. | Insulated-gate field-effect transistor |
US9105732B2 (en) | 2011-09-16 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9082663B2 (en) | 2011-09-16 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8835918B2 (en) | 2011-09-16 | 2014-09-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10032798B2 (en) | 2011-09-16 | 2018-07-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, light-emitting device, and electronic device |
US10622380B2 (en) | 2011-09-16 | 2020-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, light-emitting device, and electronic device |
US10950633B2 (en) | 2011-09-16 | 2021-03-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, light-emitting device, and electronic device |
US8952379B2 (en) | 2011-09-16 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11637129B2 (en) | 2011-09-16 | 2023-04-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, light-emitting device, and electronic device |
US9508709B2 (en) | 2011-09-16 | 2016-11-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, light-emitting device, and electronic device |
US9318374B2 (en) | 2011-09-21 | 2016-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor storage device comprising peripheral circuit, Shielding layer, and memory cell array |
US10170486B2 (en) | 2011-09-21 | 2019-01-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor storage device comprising peripheral circuit, shielding layer, and memory cell array |
US9159840B2 (en) | 2011-09-22 | 2015-10-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9055245B2 (en) | 2011-09-22 | 2015-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Photodetector including difference data generation circuit and data input selection circuit |
US9609244B2 (en) | 2011-09-22 | 2017-03-28 | Semiconductor Energy Laboratory Co., Ltd. | Photodetector having a first transistor with a channel formed in an oxide semiconductor layer and method for driving photodetector |
US9190523B2 (en) | 2011-09-22 | 2015-11-17 | Samsung Display Co., Ltd. | Oxide semiconductor, thin film transistor including the same, and thin film transistor array panel including the same |
US8841675B2 (en) | 2011-09-23 | 2014-09-23 | Semiconductor Energy Laboratory Co., Ltd. | Minute transistor |
US9431545B2 (en) | 2011-09-23 | 2016-08-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9536994B2 (en) | 2011-09-23 | 2017-01-03 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device and semiconductor device |
US9905516B2 (en) | 2011-09-26 | 2018-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9142681B2 (en) | 2011-09-26 | 2015-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9548133B2 (en) | 2011-09-28 | 2017-01-17 | Semiconductor Energy Laboratory Co., Ltd. | Shift register circuit |
US9219160B2 (en) | 2011-09-29 | 2015-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9343585B2 (en) | 2011-09-29 | 2016-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9029852B2 (en) | 2011-09-29 | 2015-05-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9905702B2 (en) | 2011-09-29 | 2018-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10622485B2 (en) | 2011-09-29 | 2020-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11791415B2 (en) | 2011-09-29 | 2023-10-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11217701B2 (en) | 2011-09-29 | 2022-01-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9466726B2 (en) | 2011-09-29 | 2016-10-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9159806B2 (en) | 2011-09-29 | 2015-10-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10290744B2 (en) | 2011-09-29 | 2019-05-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9741860B2 (en) | 2011-09-29 | 2017-08-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9053983B2 (en) | 2011-09-29 | 2015-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8982607B2 (en) | 2011-09-30 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Memory element and signal processing circuit |
US9123632B2 (en) | 2011-09-30 | 2015-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9876119B2 (en) | 2011-10-05 | 2018-01-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US11133078B2 (en) | 2011-10-07 | 2021-09-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9105608B2 (en) | 2011-10-07 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US11749365B2 (en) | 2011-10-07 | 2023-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10580508B2 (en) | 2011-10-07 | 2020-03-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8975634B2 (en) | 2011-10-07 | 2015-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor film |
US10014068B2 (en) | 2011-10-07 | 2018-07-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10431318B2 (en) | 2011-10-07 | 2019-10-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9064906B2 (en) | 2011-10-13 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9166019B2 (en) | 2011-10-13 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing the same |
US9281237B2 (en) | 2011-10-13 | 2016-03-08 | Semiconductor Energy Laboratory Co., Ltd. | Transistor having reduced channel length |
US9728648B2 (en) | 2011-10-13 | 2017-08-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9287405B2 (en) | 2011-10-13 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor |
US9018629B2 (en) | 2011-10-13 | 2015-04-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9117916B2 (en) | 2011-10-13 | 2015-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor film |
US10153375B2 (en) | 2011-10-13 | 2018-12-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9136361B2 (en) | 2011-10-13 | 2015-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9570594B2 (en) | 2011-10-13 | 2017-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9269798B2 (en) | 2011-10-13 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9087908B2 (en) | 2011-10-14 | 2015-07-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9218966B2 (en) | 2011-10-14 | 2015-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing semiconductor device |
US9680028B2 (en) | 2011-10-14 | 2017-06-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9470978B2 (en) | 2011-10-19 | 2016-10-18 | Samsung Display Co., Ltd. | Solution composition for passivation layer, thin film transistor array panel, and manufacturing method for thin film transistor array panel |
US9620623B2 (en) | 2011-10-19 | 2017-04-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US11271115B2 (en) | 2011-10-19 | 2022-03-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10535776B2 (en) | 2011-10-19 | 2020-01-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9188867B2 (en) | 2011-10-19 | 2015-11-17 | Samsung Display Co., Ltd. | Solution composition for passivation layer, thin film transistor array panel, and manufacturing method for thin film transistor array panel |
US8890139B2 (en) | 2011-10-19 | 2014-11-18 | Samsung Display Co., Ltd. | Solution composition for passivation layer, thin film transistor array panel, and manufacturing method for thin film transistor array panel |
US11817505B2 (en) | 2011-10-19 | 2023-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8927990B2 (en) | 2011-10-21 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9960279B2 (en) | 2011-10-21 | 2018-05-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9741866B2 (en) | 2011-10-24 | 2017-08-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9059297B2 (en) | 2011-10-24 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9147773B2 (en) | 2011-10-24 | 2015-09-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9515175B2 (en) | 2011-10-24 | 2016-12-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8937305B2 (en) | 2011-10-24 | 2015-01-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8846459B2 (en) | 2011-10-24 | 2014-09-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9105734B2 (en) | 2011-10-27 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8952380B2 (en) | 2011-10-27 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9530895B2 (en) | 2011-10-27 | 2016-12-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9816173B2 (en) | 2011-10-28 | 2017-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US8743307B2 (en) | 2011-11-04 | 2014-06-03 | Samsung Display Co, Ltd. | Display device |
US9123692B2 (en) | 2011-11-10 | 2015-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing semiconductor device |
US9219163B2 (en) | 2011-11-11 | 2015-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
US9082861B2 (en) | 2011-11-11 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Transistor with oxide semiconductor channel having protective layer |
US9053675B2 (en) | 2011-11-11 | 2015-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Signal line driver circuit and liquid crystal display device |
US8988625B2 (en) | 2011-11-11 | 2015-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
US9214565B2 (en) | 2011-11-11 | 2015-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US8878177B2 (en) | 2011-11-11 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9576982B2 (en) | 2011-11-11 | 2017-02-21 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device, EL display device, and manufacturing method thereof |
US9196744B2 (en) | 2011-11-11 | 2015-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8969130B2 (en) | 2011-11-18 | 2015-03-03 | Semiconductor Energy Laboratory Co., Ltd. | Insulating film, formation method thereof, semiconductor device, and manufacturing method thereof |
US10026847B2 (en) | 2011-11-18 | 2018-07-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor element, method for manufacturing semiconductor element, and semiconductor device including semiconductor element |
US8951899B2 (en) | 2011-11-25 | 2015-02-10 | Semiconductor Energy Laboratory | Method for manufacturing semiconductor device |
US8962386B2 (en) | 2011-11-25 | 2015-02-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9171943B2 (en) | 2011-11-25 | 2015-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9007816B2 (en) | 2011-11-25 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Memory circuit and memory device |
US9293193B2 (en) | 2011-11-25 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Memory circuit and memory device |
US9991293B2 (en) | 2011-11-25 | 2018-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9057126B2 (en) | 2011-11-29 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing sputtering target and method for manufacturing semiconductor device |
US9093543B2 (en) | 2011-11-30 | 2015-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10084072B2 (en) | 2011-11-30 | 2018-09-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9209267B2 (en) | 2011-11-30 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming oxide semiconductor film and method for manufacturing semiconductor device |
US8956929B2 (en) | 2011-11-30 | 2015-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9478704B2 (en) | 2011-11-30 | 2016-10-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor display device |
US9076871B2 (en) | 2011-11-30 | 2015-07-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9601631B2 (en) | 2011-11-30 | 2017-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10224433B2 (en) | 2011-11-30 | 2019-03-05 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8872179B2 (en) | 2011-11-30 | 2014-10-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10002580B2 (en) | 2011-11-30 | 2018-06-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor display device |
US9608123B2 (en) | 2011-11-30 | 2017-03-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10043833B2 (en) | 2011-12-01 | 2018-08-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10269979B2 (en) | 2011-12-01 | 2019-04-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10658517B2 (en) | 2011-12-01 | 2020-05-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9130048B2 (en) | 2011-12-01 | 2015-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a thin film semiconductor device |
US8981367B2 (en) | 2011-12-01 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9472680B2 (en) | 2011-12-01 | 2016-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9466728B2 (en) | 2011-12-01 | 2016-10-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9954115B2 (en) | 2011-12-01 | 2018-04-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9142679B2 (en) | 2011-12-02 | 2015-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device using oxide semiconductor |
US8885437B2 (en) | 2011-12-02 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Storage device and driving method thereof |
US9472656B2 (en) | 2011-12-02 | 2016-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9048321B2 (en) | 2011-12-02 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9171959B2 (en) | 2011-12-02 | 2015-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9257422B2 (en) | 2011-12-06 | 2016-02-09 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing circuit and method for driving signal processing circuit |
US9076505B2 (en) | 2011-12-09 | 2015-07-07 | Semiconductor Energy Laboratory Co., Ltd. | Memory device |
US10680110B2 (en) | 2011-12-14 | 2020-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the same |
US11302819B2 (en) | 2011-12-14 | 2022-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the same |
US10002968B2 (en) | 2011-12-14 | 2018-06-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the same |
US9990965B2 (en) | 2011-12-15 | 2018-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Storage device |
US9331156B2 (en) | 2011-12-15 | 2016-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10153346B2 (en) | 2011-12-15 | 2018-12-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9064907B2 (en) | 2011-12-20 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9070778B2 (en) | 2011-12-20 | 2015-06-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9368501B2 (en) | 2011-12-22 | 2016-06-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device including stacked sub memory cells |
US8907392B2 (en) | 2011-12-22 | 2014-12-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device including stacked sub memory cells |
US9099303B2 (en) | 2011-12-22 | 2015-08-04 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8884284B2 (en) | 2011-12-23 | 2014-11-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9252286B2 (en) | 2011-12-23 | 2016-02-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9166061B2 (en) | 2011-12-23 | 2015-10-20 | Semiconcductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9559213B2 (en) | 2011-12-23 | 2017-01-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8860021B2 (en) | 2011-12-23 | 2014-10-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor element, method for manufacturing the semiconductor element, and semiconductor device including the semiconductor element |
US9281405B2 (en) | 2011-12-23 | 2016-03-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8988116B2 (en) | 2011-12-23 | 2015-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving semiconductor device |
US8861288B2 (en) | 2011-12-23 | 2014-10-14 | Semiconductor Energy Laboratory Co., Ltd. | Level-shift circuit and semiconductor integrated circuit |
US9923000B2 (en) | 2011-12-23 | 2018-03-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9871059B2 (en) | 2011-12-23 | 2018-01-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9236428B2 (en) | 2011-12-23 | 2016-01-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor element, method for manufacturing the semiconductor element, and semiconductor device including the semiconductor element |
US9264693B2 (en) | 2011-12-26 | 2016-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Motion recognition device |
US9502572B2 (en) | 2011-12-27 | 2016-11-22 | Semiconductor Energy Laboratory Co., Ltd. | Bottom-gate transistor including an oxide semiconductor layer contacting an oxygen-rich insulating layer |
US9012913B2 (en) | 2012-01-10 | 2015-04-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US10483402B2 (en) | 2012-01-18 | 2019-11-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8969867B2 (en) | 2012-01-18 | 2015-03-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8836555B2 (en) | 2012-01-18 | 2014-09-16 | Semiconductor Energy Laboratory Co., Ltd. | Circuit, sensor circuit, and semiconductor device using the sensor circuit |
US9614100B2 (en) | 2012-01-18 | 2017-04-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9040981B2 (en) | 2012-01-20 | 2015-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9099560B2 (en) | 2012-01-20 | 2015-08-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10326026B2 (en) | 2012-01-20 | 2019-06-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9608124B2 (en) | 2012-01-20 | 2017-03-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9653614B2 (en) | 2012-01-23 | 2017-05-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10079312B2 (en) | 2012-01-23 | 2018-09-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US11934243B2 (en) | 2012-01-23 | 2024-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11209880B2 (en) | 2012-01-23 | 2021-12-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9804645B2 (en) | 2012-01-23 | 2017-10-31 | Semiconductor Energy Laboratory Co., Ltd. | Systems and methods for individually controlling power supply voltage to circuits in a semiconductor device |
US9293589B2 (en) | 2012-01-25 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US10243081B2 (en) | 2012-01-25 | 2019-03-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US11682677B2 (en) | 2012-01-26 | 2023-06-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10243064B2 (en) | 2012-01-26 | 2019-03-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9614062B2 (en) | 2012-01-26 | 2017-04-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing thereof |
US9184160B2 (en) | 2012-01-26 | 2015-11-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9431430B2 (en) | 2012-01-26 | 2016-08-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9006733B2 (en) | 2012-01-26 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing thereof |
US9171957B2 (en) | 2012-01-26 | 2015-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8956912B2 (en) | 2012-01-26 | 2015-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9997545B2 (en) | 2012-01-26 | 2018-06-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing thereof |
US11081502B2 (en) | 2012-01-26 | 2021-08-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9419146B2 (en) | 2012-01-26 | 2016-08-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9564457B2 (en) | 2012-01-26 | 2017-02-07 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9304523B2 (en) | 2012-01-30 | 2016-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Power supply circuit and method for driving the same |
US8946704B2 (en) | 2012-02-02 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9812582B2 (en) | 2012-02-02 | 2017-11-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9214566B2 (en) | 2012-02-02 | 2015-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9484467B2 (en) | 2012-02-03 | 2016-11-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8987730B2 (en) | 2012-02-03 | 2015-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9362417B2 (en) | 2012-02-03 | 2016-06-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9196741B2 (en) | 2012-02-03 | 2015-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9773916B2 (en) | 2012-02-03 | 2017-09-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8916424B2 (en) | 2012-02-07 | 2014-12-23 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9496375B2 (en) | 2012-02-07 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9117662B2 (en) | 2012-02-07 | 2015-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9859114B2 (en) | 2012-02-08 | 2018-01-02 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor device with an oxygen-controlling insulating layer |
US9112037B2 (en) | 2012-02-09 | 2015-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9899533B2 (en) | 2012-02-09 | 2018-02-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9755084B2 (en) | 2012-02-09 | 2017-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Multi-level stacked transistor device including capacitor and different semiconductor materials |
US10600792B2 (en) | 2012-02-09 | 2020-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device and method for manufacturing semiconductor device |
US9379113B2 (en) | 2012-02-09 | 2016-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device and method for manufacturing semiconductor device |
US10249764B2 (en) | 2012-02-09 | 2019-04-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including semiconductor device, electronic device including semiconductor device, and method for manufacturing semiconductor device |
US9183894B2 (en) | 2012-02-24 | 2015-11-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10872982B2 (en) | 2012-02-28 | 2020-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9553200B2 (en) | 2012-02-29 | 2017-01-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10418381B2 (en) | 2012-02-29 | 2019-09-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11133330B2 (en) | 2012-02-29 | 2021-09-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9131171B2 (en) | 2012-02-29 | 2015-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Image sensor, camera, surveillance system, and method for driving the image sensor |
US9312257B2 (en) | 2012-02-29 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9748273B2 (en) | 2012-02-29 | 2017-08-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10685984B2 (en) | 2012-02-29 | 2020-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8988152B2 (en) | 2012-02-29 | 2015-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11923372B2 (en) | 2012-02-29 | 2024-03-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10038011B2 (en) | 2012-02-29 | 2018-07-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8975917B2 (en) | 2012-03-01 | 2015-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
US8853697B2 (en) | 2012-03-01 | 2014-10-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9207751B2 (en) | 2012-03-01 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9735280B2 (en) | 2012-03-02 | 2017-08-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing semiconductor device, and method for forming oxide film |
US9287370B2 (en) | 2012-03-02 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Memory device comprising a transistor including an oxide semiconductor and semiconductor device including the same |
US9176571B2 (en) | 2012-03-02 | 2015-11-03 | Semiconductor Energy Laboratories Co., Ltd. | Microprocessor and method for driving microprocessor |
US9978855B2 (en) | 2012-03-02 | 2018-05-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing semiconductor device, and method for forming oxide film |
US10170630B2 (en) | 2012-03-05 | 2019-01-01 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor memory device |
US9059029B2 (en) | 2012-03-05 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US9293174B2 (en) | 2012-03-07 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8995218B2 (en) | 2012-03-07 | 2015-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9812178B2 (en) | 2012-03-07 | 2017-11-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8981370B2 (en) | 2012-03-08 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9082676B2 (en) | 2012-03-09 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving semiconductor device |
US11013087B2 (en) | 2012-03-13 | 2021-05-18 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device having circuits and method for driving the same |
US9117409B2 (en) | 2012-03-14 | 2015-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting display device with transistor and capacitor discharging gate of driving electrode and oxide semiconductor layer |
US9087700B2 (en) | 2012-03-14 | 2015-07-21 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film, transistor, and semiconductor device |
US9478603B2 (en) | 2012-03-14 | 2016-10-25 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film, transistor, and semiconductor device |
US9281410B2 (en) | 2012-03-14 | 2016-03-08 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9058892B2 (en) | 2012-03-14 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and shift register |
US9541386B2 (en) | 2012-03-21 | 2017-01-10 | Semiconductor Energy Laboratory Co., Ltd. | Distance measurement device and distance measurement system |
US9812217B2 (en) | 2012-03-28 | 2017-11-07 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, signal processing unit having the driver circuit, method for manufacturing the signal processing unit, and display device |
US9349849B2 (en) | 2012-03-28 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device including the semiconductor device |
US9331510B2 (en) | 2012-03-28 | 2016-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Protective circuit, battery charger, and power storage device |
US9324449B2 (en) | 2012-03-28 | 2016-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, signal processing unit having the driver circuit, method for manufacturing the signal processing unit, and display device |
US10249766B2 (en) | 2012-03-28 | 2019-04-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including a transistor, a wiring and a barrier film |
US9235515B2 (en) | 2012-03-29 | 2016-01-12 | Semiconductor Energy Laboratory Co., Ltd. | Array controller and storage system |
US9507366B2 (en) | 2012-03-29 | 2016-11-29 | Semiconductor Energy Laboratory Co., Ltd. | Power supply control device |
US9786793B2 (en) | 2012-03-29 | 2017-10-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor layer including regions with different concentrations of resistance-reducing elements |
US9349722B2 (en) | 2012-03-29 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device including a memory cell comprising a D/A converter |
US8941113B2 (en) | 2012-03-30 | 2015-01-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor element, semiconductor device, and manufacturing method of semiconductor element |
US8686426B2 (en) | 2012-04-02 | 2014-04-01 | Samsung Display Co., Ltd. | Thin film transistor having plural semiconductive oxides, thin film transistor array panel and display device including the same, and manufacturing method of thin film transistor |
US9553201B2 (en) | 2012-04-02 | 2017-01-24 | Samsung Display Co., Ltd. | Thin film transistor, thin film transistor array panel, and manufacturing method of thin film transistor |
US9711349B2 (en) | 2012-04-05 | 2017-07-18 | Semiconductor Energy Laboratory Co., Ltd. | Processing method of stacked-layer film and manufacturing method of semiconductor device |
US8999773B2 (en) | 2012-04-05 | 2015-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Processing method of stacked-layer film and manufacturing method of semiconductor device |
US9711110B2 (en) | 2012-04-06 | 2017-07-18 | Semiconductor Energy Laboratory Co., Ltd. | Display device comprising grayscale conversion portion and display portion |
US8901556B2 (en) | 2012-04-06 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Insulating film, method for manufacturing semiconductor device, and semiconductor device |
US10096719B2 (en) | 2012-04-06 | 2018-10-09 | Semiconductor Energy Laboratory Co., Ltd. | Insulating film, method for manufacturing semiconductor device, and semiconductor device |
US9318317B2 (en) | 2012-04-06 | 2016-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Insulating film, method for manufacturing semiconductor device, and semiconductor device |
US9793444B2 (en) | 2012-04-06 | 2017-10-17 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9570626B2 (en) | 2012-04-06 | 2017-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Insulating film, method for manufacturing semiconductor device, and semiconductor device |
US11437523B2 (en) | 2012-04-06 | 2022-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Insulating film, method for manufacturing semiconductor device, and semiconductor device |
US8947155B2 (en) | 2012-04-06 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Solid-state relay |
US10741694B2 (en) | 2012-04-06 | 2020-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Insulating film, method for manufacturing semiconductor device, and semiconductor device |
US11316478B2 (en) | 2012-04-11 | 2022-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device outputting reference voltage |
US9742356B2 (en) | 2012-04-11 | 2017-08-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device outputting reference voltages |
US10560056B2 (en) | 2012-04-11 | 2020-02-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9276121B2 (en) | 2012-04-12 | 2016-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9640639B2 (en) | 2012-04-12 | 2017-05-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9208849B2 (en) | 2012-04-12 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving semiconductor device, and electronic device |
US11929437B2 (en) | 2012-04-13 | 2024-03-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising various thin-film transistors |
US10170599B2 (en) | 2012-04-13 | 2019-01-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including insulating films with different thicknesses and method for manufacturing the semiconductor device |
US8946702B2 (en) | 2012-04-13 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9030232B2 (en) | 2012-04-13 | 2015-05-12 | Semiconductor Energy Laboratory Co., Ltd. | Isolator circuit and semiconductor device |
US10158026B2 (en) | 2012-04-13 | 2018-12-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor stacked layers |
US10559699B2 (en) | 2012-04-13 | 2020-02-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9054200B2 (en) | 2012-04-13 | 2015-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9472679B2 (en) | 2012-04-13 | 2016-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9337342B2 (en) | 2012-04-13 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US11355645B2 (en) | 2012-04-13 | 2022-06-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising stacked oxide semiconductor layers |
US10872981B2 (en) | 2012-04-13 | 2020-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising an oxide semiconductor |
US9362411B2 (en) | 2012-04-16 | 2016-06-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9196743B2 (en) | 2012-04-17 | 2015-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Field effect device with oxide semiconductor layer |
US9219164B2 (en) | 2012-04-20 | 2015-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with oxide semiconductor channel |
US9029863B2 (en) | 2012-04-20 | 2015-05-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9570593B2 (en) | 2012-04-20 | 2017-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9006024B2 (en) | 2012-04-25 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9230683B2 (en) | 2012-04-25 | 2016-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9443893B2 (en) | 2012-04-25 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing the same |
US9778976B2 (en) | 2012-04-25 | 2017-10-03 | Semiconducgtor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9748292B2 (en) | 2012-04-25 | 2017-08-29 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor device including photodiode |
US9236408B2 (en) | 2012-04-25 | 2016-01-12 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor device including photodiode |
US8860022B2 (en) | 2012-04-27 | 2014-10-14 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
US9331689B2 (en) | 2012-04-27 | 2016-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Power supply circuit and semiconductor device including the same |
US9285848B2 (en) | 2012-04-27 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Power reception control device, power reception device, power transmission and reception system, and electronic device |
US9236490B2 (en) | 2012-04-27 | 2016-01-12 | Semiconductor Energy Laboratory Co., Ltd. | Transistor including oxide semiconductor film having regions of different thickness |
US9829946B2 (en) | 2012-04-27 | 2017-11-28 | Semiconductor Energy Laboratory Co., Ltd. | Power reception control device, power reception device, power transmission and reception system, and electronic device |
US9660097B2 (en) | 2012-04-30 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8896345B2 (en) | 2012-04-30 | 2014-11-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9048323B2 (en) | 2012-04-30 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10403762B2 (en) | 2012-04-30 | 2019-09-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11217699B2 (en) | 2012-04-30 | 2022-01-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US20170323974A1 (en) | 2012-04-30 | 2017-11-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11837666B2 (en) | 2012-04-30 | 2023-12-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9007090B2 (en) | 2012-05-01 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Method of driving semiconductor device |
US9703704B2 (en) | 2012-05-01 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9281407B2 (en) | 2012-05-01 | 2016-03-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9035305B2 (en) | 2012-05-01 | 2015-05-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9496413B2 (en) | 2012-05-01 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8860023B2 (en) | 2012-05-01 | 2014-10-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9503087B2 (en) | 2012-05-01 | 2016-11-22 | Semiconductor Energy Laboratory Co., Ltd. | Method of driving semiconductor device |
US8866510B2 (en) | 2012-05-02 | 2014-10-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10001414B2 (en) | 2012-05-02 | 2018-06-19 | Semiconductor Energy Laboratory Co., Ltd. | Temperature sensor circuit and semiconductor device including temperature sensor circuit |
US9261943B2 (en) | 2012-05-02 | 2016-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9435696B2 (en) | 2012-05-02 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Temperature sensor circuit and semiconductor device including temperature sensor circuit |
US9104395B2 (en) | 2012-05-02 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Processor and driving method thereof |
US9660518B2 (en) | 2012-05-02 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Switching converter |
US9705398B2 (en) | 2012-05-02 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Control circuit having signal processing circuit and method for driving the control circuit |
US9379706B2 (en) | 2012-05-02 | 2016-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
US8970251B2 (en) | 2012-05-02 | 2015-03-03 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
US9294058B2 (en) | 2012-05-09 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving the same |
US9041442B2 (en) | 2012-05-09 | 2015-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving the same |
US8932903B2 (en) | 2012-05-10 | 2015-01-13 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming wiring, semiconductor device, and method for manufacturing semiconductor device |
US9412874B2 (en) | 2012-05-10 | 2016-08-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9159837B2 (en) | 2012-05-10 | 2015-10-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9711652B2 (en) | 2012-05-10 | 2017-07-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9831325B2 (en) | 2012-05-10 | 2017-11-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9966475B2 (en) | 2012-05-10 | 2018-05-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9048324B2 (en) | 2012-05-10 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9991887B2 (en) | 2012-05-11 | 2018-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9299432B2 (en) | 2012-05-11 | 2016-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method of semiconductor device |
US9337826B2 (en) | 2012-05-11 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9640255B2 (en) | 2012-05-11 | 2017-05-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method of semiconductor device |
US8994891B2 (en) | 2012-05-16 | 2015-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and touch panel |
US9608006B2 (en) | 2012-05-16 | 2017-03-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and touch panel |
US8929128B2 (en) | 2012-05-17 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Storage device and writing method of the same |
US8957415B2 (en) | 2012-05-21 | 2015-02-17 | Samsung Display Co., Ltd. | Thin film transistor and thin film transistor array panel including the same |
US9817032B2 (en) | 2012-05-23 | 2017-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Measurement device |
US9479152B2 (en) | 2012-05-25 | 2016-10-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving semiconductor device |
US9337843B2 (en) | 2012-05-25 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device and semiconductor device |
US9337836B2 (en) | 2012-05-25 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving semiconductor device |
US9129667B2 (en) | 2012-05-25 | 2015-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US10122364B2 (en) | 2012-05-25 | 2018-11-06 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device and semiconductor device |
US9502094B2 (en) | 2012-05-25 | 2016-11-22 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving memory element |
US9571099B2 (en) | 2012-05-25 | 2017-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Electronic device comprising multiplexer and driving method thereof |
US9471182B2 (en) | 2012-05-29 | 2016-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having sensor circuits with amplifier circuits and light-receiving elements |
US9147706B2 (en) | 2012-05-29 | 2015-09-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having sensor circuit having amplifier circuit |
US9356601B2 (en) | 2012-05-30 | 2016-05-31 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
US9007093B2 (en) | 2012-05-30 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
US9680476B2 (en) | 2012-05-30 | 2017-06-13 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
US9899536B2 (en) | 2012-05-31 | 2018-02-20 | Semiconductor Energy Laboratory Co., Ltd. | Method of forming semiconductor device with different energy gap oxide semiconductor stacked layers |
US10134909B2 (en) | 2012-05-31 | 2018-11-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9799290B2 (en) | 2012-05-31 | 2017-10-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9048265B2 (en) | 2012-05-31 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device comprising oxide semiconductor layer |
US9741865B2 (en) | 2012-05-31 | 2017-08-22 | Semiconductor Energy Laboratory Co., Ltd. | Method of forming semiconductor device including oxide semiconductor stack with different ratio of indium and gallium |
US9276091B2 (en) | 2012-05-31 | 2016-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8995607B2 (en) | 2012-05-31 | 2015-03-31 | Semiconductor Energy Laboratory Co., Ltd. | Pulse signal output circuit and shift register |
US8987731B2 (en) | 2012-05-31 | 2015-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9184210B2 (en) | 2012-05-31 | 2015-11-10 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device with selection circuit for image signal polarity inversion |
US9224758B2 (en) | 2012-05-31 | 2015-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9496408B2 (en) | 2012-05-31 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor stack with different ratio of indium and gallium |
US9135182B2 (en) | 2012-06-01 | 2015-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Central processing unit and driving method thereof |
US9916793B2 (en) | 2012-06-01 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of driving the same |
US9343120B2 (en) | 2012-06-01 | 2016-05-17 | Semiconductor Energy Laboratory Co., Ltd. | High speed processing unit with non-volatile register |
US9310866B2 (en) | 2012-06-01 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and alarm device |
US8872174B2 (en) | 2012-06-01 | 2014-10-28 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device |
US10741695B2 (en) | 2012-06-15 | 2020-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including an oxide semiconductor |
US9490369B2 (en) | 2012-06-15 | 2016-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9847430B2 (en) | 2012-06-15 | 2017-12-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9437747B2 (en) | 2012-06-15 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor with multiple oxide semiconductor layers |
US10483406B2 (en) | 2012-06-15 | 2019-11-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including an oxide semiconductor |
US10032926B2 (en) | 2012-06-15 | 2018-07-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including an oxide semiconductor |
US9153699B2 (en) | 2012-06-15 | 2015-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor with multiple oxide semiconductor layers |
US8901557B2 (en) | 2012-06-15 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11424368B2 (en) | 2012-06-15 | 2022-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including an oxide semiconductor |
US10483404B2 (en) | 2012-06-15 | 2019-11-19 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor with multiple oxide semiconductor layers |
US9059219B2 (en) | 2012-06-27 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US10811521B2 (en) | 2012-06-29 | 2020-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US11393918B2 (en) | 2012-06-29 | 2022-07-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9666721B2 (en) | 2012-06-29 | 2017-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including pellet-like particle or flat-plate-like particle |
US8873308B2 (en) | 2012-06-29 | 2014-10-28 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing circuit |
US9472682B2 (en) | 2012-06-29 | 2016-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9508276B2 (en) | 2012-06-29 | 2016-11-29 | Semiconductor Energy Laboratory Co., Ltd. | Method of driving display device including comparator circuit, and display device including comparator circuit |
US9742378B2 (en) | 2012-06-29 | 2017-08-22 | Semiconductor Energy Laboratory Co., Ltd. | Pulse output circuit and semiconductor device |
US8952381B2 (en) | 2012-06-29 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10134852B2 (en) | 2012-06-29 | 2018-11-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10424673B2 (en) | 2012-06-29 | 2019-09-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including a stack of oxide semiconductor layers |
US10453927B2 (en) | 2012-06-29 | 2019-10-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including nitride insulating layer and method for manufacturing the same |
US9190525B2 (en) | 2012-07-06 | 2015-11-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor layer |
US9954114B2 (en) | 2012-07-06 | 2018-04-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor layer |
US9312851B2 (en) | 2012-07-06 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9054678B2 (en) | 2012-07-06 | 2015-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9083327B2 (en) | 2012-07-06 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of driving semiconductor device |
US9472681B2 (en) | 2012-07-06 | 2016-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9953595B2 (en) | 2012-07-11 | 2018-04-24 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for driving the same |
US9612496B2 (en) | 2012-07-11 | 2017-04-04 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for driving the same |
US9449569B2 (en) | 2012-07-13 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for driving liquid crystal display device |
US9331207B2 (en) | 2012-07-17 | 2016-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor device and manufacturing method therof |
US9366894B2 (en) | 2012-07-20 | 2016-06-14 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US11515426B2 (en) | 2012-07-20 | 2022-11-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising a void region insulating film |
US9184297B2 (en) | 2012-07-20 | 2015-11-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising a void portion in an insulation film and method for manufacturing a semiconductor device comprising a void portion in an insulating film |
US10437091B2 (en) | 2012-07-20 | 2019-10-08 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9780219B2 (en) | 2012-07-20 | 2017-10-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9097925B2 (en) | 2012-07-20 | 2015-08-04 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US11543718B2 (en) | 2012-07-20 | 2023-01-03 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US11841595B2 (en) | 2012-07-20 | 2023-12-12 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US10877338B2 (en) | 2012-07-20 | 2020-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US11899328B2 (en) | 2012-07-20 | 2024-02-13 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device including the display device |
US10018887B2 (en) | 2012-07-20 | 2018-07-10 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US11531243B2 (en) | 2012-07-20 | 2022-12-20 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device including the display device |
US10514580B2 (en) | 2012-07-20 | 2019-12-24 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device including the display device |
US10693010B2 (en) | 2012-07-20 | 2020-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9298057B2 (en) | 2012-07-20 | 2016-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device including the display device |
US9905696B2 (en) | 2012-07-20 | 2018-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9548393B2 (en) | 2012-07-20 | 2017-01-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising an insulating layer including a void |
US10347768B2 (en) | 2012-07-20 | 2019-07-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having insulating film including low-density region |
US10852576B2 (en) | 2012-07-20 | 2020-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9857860B2 (en) | 2012-07-20 | 2018-01-02 | Semiconductor Energy Laboratory Co., Ltd. | Power supply control circuit and signal processing circuit |
US11137651B2 (en) | 2012-07-20 | 2021-10-05 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US11935959B2 (en) | 2012-07-20 | 2024-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor film comprising nanocrystal |
US10514579B2 (en) | 2012-07-20 | 2019-12-24 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device including the display device |
US11327376B2 (en) | 2012-07-20 | 2022-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US11209710B2 (en) | 2012-07-20 | 2021-12-28 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device including the display device |
US8912027B2 (en) | 2012-07-24 | 2014-12-16 | Samsung Display Co., Ltd | Display device and method of manufacturing the same |
US9390664B2 (en) | 2012-07-26 | 2016-07-12 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US9748355B2 (en) | 2012-07-26 | 2017-08-29 | Semicoductor Energy Laboratory Co., Ltd. | Method for manufacturing oxide semiconductor transistor with low-nitrogen, low-defect insulating film |
US9793295B2 (en) | 2012-07-27 | 2017-10-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10141337B2 (en) | 2012-07-27 | 2018-11-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9437594B2 (en) | 2012-07-27 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9461178B2 (en) | 2012-08-02 | 2016-10-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having an effective use of the conductive layer formed in the same process as one electrode |
US9917115B2 (en) | 2012-08-02 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having an effective use of the conductive layer formed in the same process as one electrode |
US9209256B2 (en) | 2012-08-02 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8981376B2 (en) | 2012-08-02 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9583634B2 (en) | 2012-08-02 | 2017-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10032934B2 (en) | 2012-08-02 | 2018-07-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9761738B2 (en) | 2012-08-02 | 2017-09-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having first and second oxide semiconductors with difference energy level |
US9449996B2 (en) | 2012-08-03 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9583570B2 (en) | 2012-08-03 | 2017-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor stacked film and semiconductor device |
US9941309B2 (en) | 2012-08-03 | 2018-04-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8890159B2 (en) | 2012-08-03 | 2014-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor stacked film and semiconductor device |
US9123573B2 (en) | 2012-08-03 | 2015-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor stacked film and semiconductor device |
US10557192B2 (en) | 2012-08-07 | 2020-02-11 | Semiconductor Energy Laboratory Co., Ltd. | Method for using sputtering target and method for forming oxide film |
US9885108B2 (en) | 2012-08-07 | 2018-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming sputtering target |
US9245958B2 (en) | 2012-08-10 | 2016-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9293602B2 (en) | 2012-08-10 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9093988B2 (en) | 2012-08-10 | 2015-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving semiconductor device |
US9660104B2 (en) | 2012-08-10 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9082863B2 (en) | 2012-08-10 | 2015-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9437749B2 (en) | 2012-08-10 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for fabricating the same |
US8878574B2 (en) | 2012-08-10 | 2014-11-04 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving semiconductor device |
US10446668B2 (en) | 2012-08-10 | 2019-10-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for fabricating the same |
US9240492B2 (en) | 2012-08-10 | 2016-01-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for fabricating the same |
US9502580B2 (en) | 2012-08-10 | 2016-11-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9269728B2 (en) | 2012-08-10 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9620650B2 (en) | 2012-08-10 | 2017-04-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9929276B2 (en) | 2012-08-10 | 2018-03-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8937307B2 (en) | 2012-08-10 | 2015-01-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9184245B2 (en) | 2012-08-10 | 2015-11-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for fabricating the same |
US10439073B2 (en) | 2012-08-10 | 2019-10-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9246047B2 (en) | 2012-08-10 | 2016-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8975930B2 (en) | 2012-08-10 | 2015-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving semiconductor device |
US8872120B2 (en) | 2012-08-23 | 2014-10-28 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and method for driving the same |
US9972655B2 (en) | 2012-08-23 | 2018-05-15 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and method for driving the same |
US9204849B2 (en) | 2012-08-24 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Radiation detection panel, radiation imaging device, and diagnostic imaging device |
US9406698B2 (en) | 2012-08-28 | 2016-08-02 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
US9625764B2 (en) | 2012-08-28 | 2017-04-18 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US10170726B2 (en) | 2012-08-28 | 2019-01-01 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
US10317736B2 (en) | 2012-08-28 | 2019-06-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9166192B2 (en) | 2012-08-28 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Display device having plural sealants at periphery of pixel portion |
US9425220B2 (en) | 2012-08-28 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10217776B2 (en) | 2012-08-31 | 2019-02-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising first metal oxide film and second metal oxide film |
US9478535B2 (en) | 2012-08-31 | 2016-10-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor film |
US8947158B2 (en) | 2012-09-03 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9501119B2 (en) | 2012-09-03 | 2016-11-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9825526B2 (en) | 2012-09-03 | 2017-11-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9423860B2 (en) | 2012-09-03 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Microcontroller capable of being in three modes |
US9006635B2 (en) | 2012-09-12 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Photodetector circuit and semiconductor device |
US9887232B2 (en) | 2012-09-12 | 2018-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Photodetector circuit and semiconductor device |
US8981372B2 (en) | 2012-09-13 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic appliance |
US10700099B2 (en) | 2012-09-13 | 2020-06-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10446584B2 (en) | 2012-09-13 | 2019-10-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9018624B2 (en) | 2012-09-13 | 2015-04-28 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic appliance |
US9455280B2 (en) | 2012-09-13 | 2016-09-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9711537B2 (en) | 2012-09-13 | 2017-07-18 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic appliance |
US9368516B2 (en) | 2012-09-13 | 2016-06-14 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic appliance |
US9252287B2 (en) | 2012-09-13 | 2016-02-02 | Semiconductor Energy Laboratory Co., Ltd | Display device and electronic appliance |
US9806099B2 (en) | 2012-09-13 | 2017-10-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10236305B2 (en) | 2012-09-13 | 2019-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10468506B2 (en) | 2012-09-14 | 2019-11-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for fabricating the same |
US11935944B2 (en) | 2012-09-14 | 2024-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for fabricating the same |
US10923580B2 (en) | 2012-09-14 | 2021-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for fabricating the same |
US11437500B2 (en) | 2012-09-14 | 2022-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for fabricating the same |
US9601632B2 (en) | 2012-09-14 | 2017-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for fabricating the same |
US10134879B2 (en) | 2012-09-14 | 2018-11-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for fabricating the same |
US8927985B2 (en) | 2012-09-20 | 2015-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US20180083140A1 (en) | 2012-09-24 | 2018-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9331100B2 (en) | 2012-09-24 | 2016-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US10211345B2 (en) | 2012-09-24 | 2019-02-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9269821B2 (en) | 2012-09-24 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9831351B2 (en) | 2012-09-24 | 2017-11-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11094830B2 (en) | 2012-09-24 | 2021-08-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9793410B2 (en) | 2012-10-12 | 2017-10-17 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device and manufacturing apparatus of semiconductor device |
US10153376B2 (en) | 2012-10-12 | 2018-12-11 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device and manufacturing apparatus of semiconductor device |
US9366896B2 (en) | 2012-10-12 | 2016-06-14 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and touch panel |
US9460940B2 (en) | 2012-10-12 | 2016-10-04 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device and manufacturing apparatus of semiconductor device |
US10007133B2 (en) | 2012-10-12 | 2018-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and touch panel |
US9142652B2 (en) | 2012-10-12 | 2015-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device and manufacturing apparatus of semiconductor device |
US10401662B2 (en) | 2012-10-12 | 2019-09-03 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and touch panel |
US9449574B2 (en) | 2012-10-12 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | LCD overdriving using difference between average values of groups of pixels between two frames |
US9324875B2 (en) | 2012-10-17 | 2016-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9166021B2 (en) | 2012-10-17 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9330909B2 (en) | 2012-10-17 | 2016-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9401714B2 (en) | 2012-10-17 | 2016-07-26 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
US9477294B2 (en) | 2012-10-17 | 2016-10-25 | Semiconductor Energy Laboratory Co., Ltd. | Microcontroller and method for manufacturing the same |
US9306079B2 (en) | 2012-10-17 | 2016-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9647095B2 (en) | 2012-10-17 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9660098B2 (en) | 2012-10-17 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8952722B2 (en) | 2012-10-17 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device and method for driving programmable logic device |
US9153436B2 (en) | 2012-10-17 | 2015-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10217796B2 (en) | 2012-10-17 | 2019-02-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising an oxide layer and an oxide semiconductor layer |
US10324521B2 (en) | 2012-10-17 | 2019-06-18 | Semiconductor Energy Laboratory Co., Ltd. | Microcontroller and method for manufacturing the same |
US9812467B2 (en) | 2012-10-17 | 2017-11-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising an oxide semiconductor |
US9660093B2 (en) | 2012-10-17 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Transistor with multilayer film including oxide semiconductor layer and oxide layer |
US9852904B2 (en) | 2012-10-17 | 2017-12-26 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9263259B2 (en) | 2012-10-17 | 2016-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising an oxide semiconductor |
US9287117B2 (en) | 2012-10-17 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising an oxide semiconductor |
US9595435B2 (en) | 2012-10-19 | 2017-03-14 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming multilayer film including oxide semiconductor film and method for manufacturing semiconductor device |
US9257569B2 (en) | 2012-10-23 | 2016-02-09 | Semiconductor Energy Laboratory Co. Ltd. | Semiconductor device |
US9761611B2 (en) | 2012-10-23 | 2017-09-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9972718B2 (en) | 2012-10-24 | 2018-05-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9349869B2 (en) | 2012-10-24 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9865743B2 (en) | 2012-10-24 | 2018-01-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide layer surrounding oxide semiconductor layer |
US11355648B2 (en) | 2012-10-24 | 2022-06-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9997639B2 (en) | 2012-10-24 | 2018-06-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US11824105B2 (en) | 2012-10-24 | 2023-11-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9530892B2 (en) | 2012-10-24 | 2016-12-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10749015B2 (en) | 2012-10-24 | 2020-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10361291B2 (en) | 2012-10-24 | 2019-07-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9287411B2 (en) | 2012-10-24 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10516062B2 (en) | 2012-10-24 | 2019-12-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9219161B2 (en) | 2012-10-24 | 2015-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11152494B2 (en) | 2012-10-24 | 2021-10-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9819261B2 (en) | 2012-10-25 | 2017-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Central control system |
US10630176B2 (en) | 2012-10-25 | 2020-04-21 | Semiconductor Energy Laboratory Co., Ltd. | Central control system |
US9312278B2 (en) | 2012-10-30 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9064574B2 (en) | 2012-11-06 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9871058B2 (en) | 2012-11-08 | 2018-01-16 | Semiconductor Energy Laboratory Co., Ltd. | Metal oxide film and method for forming metal oxide film |
US10461099B2 (en) | 2012-11-08 | 2019-10-29 | Semiconductor Energy Laboratory Co., Ltd. | Metal oxide film and method for forming metal oxide film |
US9881939B2 (en) | 2012-11-08 | 2018-01-30 | Semiconductor Energy Laboratory Co., Ltd. | Metal oxide film and method for forming metal oxide film |
US9831274B2 (en) | 2012-11-08 | 2017-11-28 | Semiconductor Energy Laboratory Co., Ltd. | Metal oxide film and method for forming metal oxide film |
US11652110B2 (en) | 2012-11-08 | 2023-05-16 | Semiconductor Energy Laboratory Co., Ltd. | Metal oxide film and method for forming metal oxide film |
US10892282B2 (en) | 2012-11-08 | 2021-01-12 | Semiconductor Energy Laboratory Co., Ltd. | Metal oxide film and method for forming metal oxide film |
US9040984B2 (en) | 2012-11-15 | 2015-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Transistor with ZrO or HfO gate insulator sandwiched between two SiO or AIO gate insulators over an oxide semiconductor film |
US8963148B2 (en) | 2012-11-15 | 2015-02-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9190529B2 (en) | 2012-11-15 | 2015-11-17 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor having four different gate electrodes |
US8901558B2 (en) | 2012-11-15 | 2014-12-02 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor having multiple gates |
US8921853B2 (en) | 2012-11-16 | 2014-12-30 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor having oxide semiconductor layer |
US9812583B2 (en) | 2012-11-16 | 2017-11-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9087726B2 (en) | 2012-11-16 | 2015-07-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9159838B2 (en) | 2012-11-16 | 2015-10-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9349750B2 (en) | 2012-11-16 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device |
US9716182B2 (en) | 2012-11-16 | 2017-07-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9966474B2 (en) | 2012-11-16 | 2018-05-08 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor having oxide semiconductor layer |
US9362415B2 (en) | 2012-11-16 | 2016-06-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising a transistor comprising an oxide semiconductor layer |
US9660101B2 (en) | 2012-11-16 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising an oxide semiconductor layer |
US10886413B2 (en) | 2012-11-16 | 2021-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9449819B2 (en) | 2012-11-16 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9219165B2 (en) | 2012-11-16 | 2015-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10361318B2 (en) | 2012-11-16 | 2019-07-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11710794B2 (en) | 2012-11-16 | 2023-07-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9412764B2 (en) | 2012-11-28 | 2016-08-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device, and electronic device |
US9929010B2 (en) | 2012-11-28 | 2018-03-27 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9263531B2 (en) | 2012-11-28 | 2016-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film, film formation method thereof, and semiconductor device |
US9130367B2 (en) | 2012-11-28 | 2015-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9842863B2 (en) | 2012-11-28 | 2017-12-12 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US10032428B2 (en) | 2012-11-28 | 2018-07-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device, and electronic device |
US9324737B2 (en) | 2012-11-28 | 2016-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
JP2014107453A (en) * | 2012-11-28 | 2014-06-09 | Fujifilm Corp | Oxide semiconductor element, method for manufacturing oxide semiconductor element, display device, and image sensor |
US9805676B2 (en) | 2012-11-28 | 2017-10-31 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9594281B2 (en) | 2012-11-30 | 2017-03-14 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US10121903B2 (en) | 2012-11-30 | 2018-11-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10074748B2 (en) | 2012-11-30 | 2018-09-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor film |
US9246011B2 (en) | 2012-11-30 | 2016-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9390665B2 (en) | 2012-11-30 | 2016-07-12 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9153649B2 (en) | 2012-11-30 | 2015-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for evaluating semiconductor device |
US9324810B2 (en) | 2012-11-30 | 2016-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor film |
US9252283B2 (en) | 2012-11-30 | 2016-02-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor film |
US9583601B2 (en) | 2012-11-30 | 2017-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9865746B2 (en) | 2012-11-30 | 2018-01-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9570625B2 (en) | 2012-12-03 | 2017-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9406810B2 (en) | 2012-12-03 | 2016-08-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10269835B2 (en) | 2012-12-03 | 2019-04-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9293540B2 (en) | 2012-12-03 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9349593B2 (en) | 2012-12-03 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9905703B2 (en) | 2012-12-03 | 2018-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9172370B2 (en) | 2012-12-06 | 2015-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10742056B2 (en) | 2012-12-13 | 2020-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Power storage system and power storage device |
US11742673B2 (en) | 2012-12-13 | 2023-08-29 | Semiconductor Energy Laboratory Co., Ltd. | Power storage system and power storage device |
US9577446B2 (en) | 2012-12-13 | 2017-02-21 | Semiconductor Energy Laboratory Co., Ltd. | Power storage system and power storage device storing data for the identifying power storage device |
US9391620B2 (en) | 2012-12-24 | 2016-07-12 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device and semiconductor device |
US10978492B2 (en) | 2012-12-25 | 2021-04-13 | Semiconductor Energy Laboratory Co., Ltd. | Resistor, display device, and electronic device |
US11705522B2 (en) | 2012-12-25 | 2023-07-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10229934B2 (en) | 2012-12-25 | 2019-03-12 | Semiconductor Energy Laboratory Co., Ltd. | Resistor, display device, and electronic device |
US11049974B2 (en) | 2012-12-25 | 2021-06-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9905585B2 (en) | 2012-12-25 | 2018-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising capacitor |
US10629625B2 (en) | 2012-12-25 | 2020-04-21 | Semiconductor Energy Laboratory Co., Ltd. | Resistor, display device, and electronic device |
US10672913B2 (en) | 2012-12-25 | 2020-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9911755B2 (en) | 2012-12-25 | 2018-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including transistor and capacitor |
US9437273B2 (en) | 2012-12-26 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9316695B2 (en) | 2012-12-28 | 2016-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10374030B2 (en) | 2012-12-28 | 2019-08-06 | Semiconductor Energy Laboratory Co., Ltd. | Metal oxide semiconductor device |
US9748328B2 (en) | 2012-12-28 | 2017-08-29 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film |
US9705006B2 (en) | 2012-12-28 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
US10461101B2 (en) | 2012-12-28 | 2019-10-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10290720B2 (en) | 2012-12-28 | 2019-05-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9293598B2 (en) | 2012-12-28 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having an oxide semiconductor layer |
US9293541B2 (en) | 2012-12-28 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9064966B2 (en) | 2012-12-28 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with oxide semiconductor |
US11139322B2 (en) | 2012-12-28 | 2021-10-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9343578B2 (en) | 2012-12-28 | 2016-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and measurement device |
US9647010B2 (en) | 2012-12-28 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9711610B2 (en) | 2012-12-28 | 2017-07-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having oxide semiconductor layer |
US9196639B2 (en) | 2012-12-28 | 2015-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
US9391096B2 (en) | 2013-01-18 | 2016-07-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10964821B2 (en) | 2013-01-21 | 2021-03-30 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10050153B2 (en) | 2013-01-21 | 2018-08-14 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9768314B2 (en) | 2013-01-21 | 2017-09-19 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US11888071B2 (en) | 2013-01-21 | 2024-01-30 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US11380802B2 (en) | 2013-01-21 | 2022-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9466725B2 (en) | 2013-01-24 | 2016-10-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9165632B2 (en) | 2013-01-24 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and semiconductor device |
US9059689B2 (en) | 2013-01-24 | 2015-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including flip-flop and logic circuit |
US10088886B2 (en) | 2013-01-24 | 2018-10-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising power gating device |
US9190172B2 (en) | 2013-01-24 | 2015-11-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9917116B2 (en) | 2013-01-30 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9659977B2 (en) | 2013-01-30 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9331108B2 (en) | 2013-01-30 | 2016-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9105658B2 (en) | 2013-01-30 | 2015-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Method for processing oxide semiconductor layer |
US8981374B2 (en) | 2013-01-30 | 2015-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9076825B2 (en) | 2013-01-30 | 2015-07-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the semiconductor device |
US9177969B2 (en) | 2013-01-30 | 2015-11-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9306077B2 (en) | 2013-01-30 | 2016-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Method for processing oxide semiconductor layer |
US9412877B2 (en) | 2013-02-12 | 2016-08-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9064596B2 (en) | 2013-02-12 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9231111B2 (en) | 2013-02-13 | 2016-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10217870B2 (en) | 2013-02-13 | 2019-02-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of semiconductor device |
US9379711B2 (en) | 2013-02-13 | 2016-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device and semiconductor device |
US10230368B2 (en) | 2013-02-13 | 2019-03-12 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device and semiconductor device |
US9048832B2 (en) | 2013-02-13 | 2015-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device and semiconductor device |
US8952723B2 (en) | 2013-02-13 | 2015-02-10 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device and semiconductor device |
US9190527B2 (en) | 2013-02-13 | 2015-11-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of semiconductor device |
US9225336B2 (en) | 2013-02-13 | 2015-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device and semiconductor device |
US9318484B2 (en) | 2013-02-20 | 2016-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10068906B2 (en) | 2013-02-20 | 2018-09-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor transistors with low power consumption |
US9482919B2 (en) | 2013-02-25 | 2016-11-01 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device with improved driver circuit |
US9293544B2 (en) | 2013-02-26 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having buried channel structure |
US9553205B2 (en) | 2013-02-27 | 2017-01-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, driver circuit, and display device |
US9341722B2 (en) | 2013-02-27 | 2016-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device |
US9337343B2 (en) | 2013-02-27 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, driver circuit, and display device |
US10304555B2 (en) | 2013-02-27 | 2019-05-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, driver circuit, and display device |
US9768320B2 (en) | 2013-02-27 | 2017-09-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9373711B2 (en) | 2013-02-27 | 2016-06-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9267199B2 (en) | 2013-02-28 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing sputtering target, method for forming oxide film, and transistor |
US9165951B2 (en) | 2013-02-28 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9842860B2 (en) | 2013-02-28 | 2017-12-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10522347B2 (en) | 2013-02-28 | 2019-12-31 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing sputtering target, method for forming oxide film, and transistor |
US10133140B2 (en) | 2013-02-28 | 2018-11-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11967505B2 (en) | 2013-02-28 | 2024-04-23 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing sputtering target, method for forming oxide film, and transistor |
US11637015B2 (en) | 2013-02-28 | 2023-04-25 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing sputtering target, method for forming oxide film, and transistor |
US11139166B2 (en) | 2013-02-28 | 2021-10-05 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing sputtering target, method for forming oxide film, and transistor |
US9581874B2 (en) | 2013-02-28 | 2017-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10014414B2 (en) | 2013-02-28 | 2018-07-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9647152B2 (en) | 2013-03-01 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Sensor circuit and semiconductor device including sensor circuit |
US9276125B2 (en) | 2013-03-01 | 2016-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9829533B2 (en) | 2013-03-06 | 2017-11-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor film and semiconductor device |
US9269315B2 (en) | 2013-03-08 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Driving method of semiconductor device |
US8947121B2 (en) | 2013-03-12 | 2015-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
US10256347B2 (en) | 2013-03-13 | 2019-04-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9705001B2 (en) | 2013-03-13 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9294075B2 (en) | 2013-03-14 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9275987B2 (en) | 2013-03-14 | 2016-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9472293B2 (en) | 2013-03-14 | 2016-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving semiconductor device and semiconductor device |
US9991395B2 (en) | 2013-03-14 | 2018-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9171630B2 (en) | 2013-03-14 | 2015-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving semiconductor device and semiconductor device |
US9437744B2 (en) | 2013-03-14 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9536592B2 (en) | 2013-03-14 | 2017-01-03 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and semiconductor device |
US9088269B2 (en) | 2013-03-14 | 2015-07-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9240244B2 (en) | 2013-03-14 | 2016-01-19 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving semiconductor device and semiconductor device |
US9293186B2 (en) | 2013-03-14 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and semiconductor device |
US9391598B2 (en) | 2013-03-15 | 2016-07-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9245650B2 (en) | 2013-03-15 | 2016-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9786350B2 (en) | 2013-03-18 | 2017-10-10 | Semiconductor Energy Laboratory Co., Ltd. | Memory device |
US9391146B2 (en) | 2013-03-19 | 2016-07-12 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor |
US9153650B2 (en) | 2013-03-19 | 2015-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor |
US9771272B2 (en) | 2013-03-19 | 2017-09-26 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor |
US9577107B2 (en) | 2013-03-19 | 2017-02-21 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and method for forming oxide semiconductor film |
US9305774B2 (en) | 2013-03-22 | 2016-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Method for processing thin film and method for manufacturing semiconductor device |
US10037798B2 (en) | 2013-03-22 | 2018-07-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving semiconductor device |
US9666271B2 (en) | 2013-03-22 | 2017-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including a transistor with an oxide semiconductor film channel coupled to a capacitor |
US9007092B2 (en) | 2013-03-22 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9154136B2 (en) | 2013-03-25 | 2015-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device and semiconductor device |
US10347769B2 (en) | 2013-03-25 | 2019-07-09 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor with multi-layer source/drain electrodes |
US9245589B2 (en) | 2013-03-25 | 2016-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having Schmitt trigger NAND circuit and Schmitt trigger inverter |
US9153313B2 (en) | 2013-03-26 | 2015-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Normally-off, power-gated memory circuit with two data retention stages for reducing overhead power |
US10056475B2 (en) | 2013-03-26 | 2018-08-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9496409B2 (en) | 2013-03-26 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9608122B2 (en) | 2013-03-27 | 2017-03-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10062319B2 (en) | 2013-03-28 | 2018-08-28 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9640104B2 (en) | 2013-03-28 | 2017-05-02 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US10043914B2 (en) | 2013-04-01 | 2018-08-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising a plurality of oxide semiconductor layers |
US9368636B2 (en) | 2013-04-01 | 2016-06-14 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device comprising a plurality of oxide semiconductor layers |
US10403655B2 (en) | 2013-04-04 | 2019-09-03 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10573673B2 (en) | 2013-04-04 | 2020-02-25 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US11495626B2 (en) | 2013-04-04 | 2022-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9570310B2 (en) | 2013-04-04 | 2017-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10991731B2 (en) | 2013-04-04 | 2021-04-27 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10128282B2 (en) | 2013-04-04 | 2018-11-13 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9112460B2 (en) | 2013-04-05 | 2015-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing device |
US9748399B2 (en) | 2013-04-11 | 2017-08-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device comprising an oxide semiconductor channel region having a different crystal orientation than source/drain regions |
US9659968B2 (en) | 2013-04-11 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Display device comprising a metal oxide semiconductor channel and a specified insulating layer arrangement |
US9898194B2 (en) | 2013-04-12 | 2018-02-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with volatile and non-volatile memories to retain data during power interruption |
US11063066B2 (en) | 2013-04-12 | 2021-07-13 | Semiconductor Energy Laboratory Co., Ltd. | C-axis alignment of an oxide film over an oxide semiconductor film |
US11843004B2 (en) | 2013-04-12 | 2023-12-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having specified relative material concentration between In—Ga—Zn—O films |
US9627545B2 (en) | 2013-04-12 | 2017-04-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10304859B2 (en) | 2013-04-12 | 2019-05-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having an oxide film on an oxide semiconductor film |
US8975695B2 (en) | 2013-04-19 | 2015-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9915848B2 (en) | 2013-04-19 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9729149B2 (en) | 2013-04-19 | 2017-08-08 | Semiconductor Energy Laboratory Co., Ltd. | Low power storage device in which operation speed is maintained |
US9431428B2 (en) | 2013-04-19 | 2016-08-30 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9809449B2 (en) | 2013-04-19 | 2017-11-07 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US10448531B2 (en) | 2013-04-24 | 2019-10-15 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US10080302B2 (en) | 2013-04-24 | 2018-09-18 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9893192B2 (en) | 2013-04-24 | 2018-02-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9450102B2 (en) | 2013-04-26 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9755083B2 (en) | 2013-04-26 | 2017-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10095584B2 (en) | 2013-04-26 | 2018-10-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9768279B2 (en) | 2013-04-29 | 2017-09-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9761737B2 (en) | 2013-05-01 | 2017-09-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9837551B2 (en) | 2013-05-02 | 2017-12-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9882058B2 (en) | 2013-05-03 | 2018-01-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9231002B2 (en) | 2013-05-03 | 2016-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9337344B2 (en) | 2013-05-09 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9905695B2 (en) | 2013-05-09 | 2018-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Multi-layered oxide semiconductor transistor |
US9704894B2 (en) | 2013-05-10 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device including pixel electrode including oxide |
US10373980B2 (en) | 2013-05-10 | 2019-08-06 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device including pixel electrode containing indium, zinc, and metal element |
US9246476B2 (en) | 2013-05-10 | 2016-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit |
US9094007B2 (en) | 2013-05-14 | 2015-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing device |
US10043828B2 (en) | 2013-05-16 | 2018-08-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9437741B2 (en) | 2013-05-16 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9312392B2 (en) | 2013-05-16 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9312269B2 (en) | 2013-05-16 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10475819B2 (en) | 2013-05-16 | 2019-11-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9728556B2 (en) | 2013-05-16 | 2017-08-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9508861B2 (en) | 2013-05-16 | 2016-11-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9454923B2 (en) | 2013-05-17 | 2016-09-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10032872B2 (en) | 2013-05-17 | 2018-07-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing the same, and apparatus for manufacturing semiconductor device |
US9209795B2 (en) | 2013-05-17 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing device and measuring method |
US9172369B2 (en) | 2013-05-17 | 2015-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device and semiconductor device |
US9754971B2 (en) | 2013-05-18 | 2017-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9647125B2 (en) | 2013-05-20 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10411136B2 (en) | 2013-05-20 | 2019-09-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9281408B2 (en) | 2013-05-20 | 2016-03-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11961917B2 (en) | 2013-05-20 | 2024-04-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising stacked transistors |
US10720532B2 (en) | 2013-05-20 | 2020-07-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9680024B2 (en) | 2013-05-20 | 2017-06-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9293599B2 (en) | 2013-05-20 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US11949021B2 (en) | 2013-05-20 | 2024-04-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10128384B2 (en) | 2013-05-20 | 2018-11-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9991397B2 (en) | 2013-05-20 | 2018-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10573758B2 (en) | 2013-05-20 | 2020-02-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9343579B2 (en) | 2013-05-20 | 2016-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9837552B2 (en) | 2013-05-20 | 2017-12-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9666724B2 (en) | 2013-05-20 | 2017-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11646380B2 (en) | 2013-05-20 | 2023-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11430894B2 (en) | 2013-05-20 | 2022-08-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including a oxide semiconductor transistor |
US9722088B2 (en) | 2013-05-20 | 2017-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9209307B2 (en) | 2013-05-20 | 2015-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9755081B2 (en) | 2013-05-20 | 2017-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9431547B2 (en) | 2013-05-20 | 2016-08-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9202925B2 (en) | 2013-05-20 | 2015-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11217704B2 (en) | 2013-05-20 | 2022-01-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10014413B2 (en) | 2013-05-20 | 2018-07-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10416504B2 (en) | 2013-05-21 | 2019-09-17 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
US9824888B2 (en) | 2013-05-21 | 2017-11-21 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and formation method thereof |
US9595541B2 (en) | 2013-06-05 | 2017-03-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9494830B2 (en) | 2013-06-05 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Sequential circuit and semiconductor device |
US9306074B2 (en) | 2013-06-05 | 2016-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9876118B2 (en) | 2013-06-05 | 2018-01-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9939692B2 (en) | 2013-06-05 | 2018-04-10 | Semiconductor Energy Laboratory Co., Ltd. | Sequential circuit and semiconductor device |
US9806198B2 (en) | 2013-06-05 | 2017-10-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9166060B2 (en) | 2013-06-05 | 2015-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9711656B2 (en) | 2013-06-05 | 2017-07-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9368607B2 (en) | 2013-06-05 | 2016-06-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10503018B2 (en) | 2013-06-05 | 2019-12-10 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9899420B2 (en) | 2013-06-05 | 2018-02-20 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9773915B2 (en) | 2013-06-11 | 2017-09-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9721959B2 (en) | 2013-06-13 | 2017-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9065438B2 (en) | 2013-06-18 | 2015-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device |
US9793414B2 (en) | 2013-06-19 | 2017-10-17 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film |
US9035301B2 (en) | 2013-06-19 | 2015-05-19 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device |
US9287352B2 (en) | 2013-06-19 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and formation method thereof |
US9761598B2 (en) | 2013-06-21 | 2017-09-12 | Semiconductor Energy Laboratory Co., Ltd. | Programmable logic device (PLD) |
US9515094B2 (en) | 2013-06-26 | 2016-12-06 | Semiconductor Energy Laboratory Co., Ltd. | Storage device and semiconductor device |
US11581439B2 (en) | 2013-06-27 | 2023-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9276577B2 (en) | 2013-07-05 | 2016-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9312349B2 (en) | 2013-07-08 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US11404585B2 (en) | 2013-07-08 | 2022-08-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US10074733B2 (en) | 2013-07-08 | 2018-09-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9666697B2 (en) | 2013-07-08 | 2017-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device including an electron trap layer |
US9490268B2 (en) | 2013-07-10 | 2016-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
US10256255B2 (en) | 2013-07-10 | 2019-04-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9899423B2 (en) | 2013-07-10 | 2018-02-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
US9293480B2 (en) | 2013-07-10 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
US9424950B2 (en) | 2013-07-10 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10593703B2 (en) | 2013-07-12 | 2020-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing display device |
US10998341B2 (en) | 2013-07-12 | 2021-05-04 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing display device |
US9006736B2 (en) | 2013-07-12 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9419145B2 (en) | 2013-07-12 | 2016-08-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10199393B2 (en) | 2013-07-12 | 2019-02-05 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing display device |
US9691904B2 (en) | 2013-07-12 | 2017-06-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11502109B2 (en) | 2013-07-12 | 2022-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing display device |
US9818763B2 (en) | 2013-07-12 | 2017-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing display device |
US9847429B2 (en) | 2013-07-16 | 2017-12-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9281409B2 (en) | 2013-07-16 | 2016-03-08 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor for integrated circuit |
US9305630B2 (en) | 2013-07-17 | 2016-04-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving the same |
US9443592B2 (en) | 2013-07-18 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9379138B2 (en) | 2013-07-19 | 2016-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device with drive voltage dependent on external light intensity |
US9395070B2 (en) | 2013-07-19 | 2016-07-19 | Semiconductor Energy Laboratory Co., Ltd. | Support of flexible component and light-emitting device |
US10823374B2 (en) | 2013-07-19 | 2020-11-03 | Semiconductor Energy Laboratory Co., Ltd. | Support of flexible component and light-emitting device |
US10578284B2 (en) | 2013-07-19 | 2020-03-03 | Semiconductor Energy Laboratory Co., Ltd. | Support of flexible component and light-emitting device |
US9583632B2 (en) | 2013-07-19 | 2017-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film, method for forming oxide semiconductor film, and semiconductor device |
US9810406B2 (en) | 2013-07-19 | 2017-11-07 | Semiconductor Energy Laboratory Co., Ltd. | Support of flexible component and light-emitting device |
US9500916B2 (en) | 2013-07-25 | 2016-11-22 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device |
US10338419B2 (en) | 2013-07-25 | 2019-07-02 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device |
US10529740B2 (en) | 2013-07-25 | 2020-01-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including semiconductor layer and conductive layer |
US10872907B2 (en) | 2013-07-25 | 2020-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9761736B2 (en) | 2013-07-25 | 2017-09-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9444337B2 (en) | 2013-07-26 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | DCDC converter including clock generation circuit, error amplifier and comparator |
US9343288B2 (en) | 2013-07-31 | 2016-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9130047B2 (en) | 2013-07-31 | 2015-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9412762B2 (en) | 2013-07-31 | 2016-08-09 | Semiconductor Energy Laboratory Co., Ltd. | DC-DC converter and semiconductor device |
US10008929B2 (en) | 2013-07-31 | 2018-06-26 | Semiconductor Energy Laboratory Co., Ltd. | DC-DC converter and semiconductor device |
US9190448B2 (en) | 2013-08-02 | 2015-11-17 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and operation method thereof |
US9496330B2 (en) | 2013-08-02 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
US9741794B2 (en) | 2013-08-05 | 2017-08-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9634149B2 (en) | 2013-08-07 | 2017-04-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing thereof |
US10699904B2 (en) | 2013-08-07 | 2020-06-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing thereof |
US9299855B2 (en) | 2013-08-09 | 2016-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having dual gate insulating layers |
US10269976B2 (en) | 2013-08-09 | 2019-04-23 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9601591B2 (en) | 2013-08-09 | 2017-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9608005B2 (en) | 2013-08-19 | 2017-03-28 | Semiconductor Energy Laboratory Co., Ltd. | Memory circuit including oxide semiconductor devices |
US9374048B2 (en) | 2013-08-20 | 2016-06-21 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing device, and driving method and program thereof |
US9837963B2 (en) | 2013-08-20 | 2017-12-05 | Semiconductor Energy Laboratory Co., Ltd. | Signal processing device, and driving method and program thereof |
US9385592B2 (en) | 2013-08-21 | 2016-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Charge pump circuit and semiconductor device including the same |
US9837890B2 (en) | 2013-08-21 | 2017-12-05 | Semiconductor Energy Laboratory Co., Ltd. | Charge pump circuit and semiconductor device including the same |
US9431541B2 (en) | 2013-08-22 | 2016-08-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9911853B2 (en) | 2013-08-23 | 2018-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10134781B2 (en) | 2013-08-23 | 2018-11-20 | Semiconductor Energy Laboratory Co., Ltd. | Capacitor and semiconductor device |
US10355136B2 (en) | 2013-08-23 | 2019-07-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9443987B2 (en) | 2013-08-23 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11675236B2 (en) | 2013-08-28 | 2023-06-13 | Semiconductor Energy Laboratory Co., Ltd. | Display device comprising a scan line that overlaps an entire region of a semiconductor film having a channel formation region |
US9989796B2 (en) | 2013-08-28 | 2018-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Display device comprising first and second transistors electrically connected to first and second pixel electrodes |
US10585319B2 (en) | 2013-08-28 | 2020-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Display device comprising first and second transistors electrically connected to first and second pixel electrodes and a common electrode having stripe regions |
US11460737B2 (en) | 2013-08-28 | 2022-10-04 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device comprising a scan line that overlaps an entire region of a first semiconductor film and a second semiconductor film |
US11226517B2 (en) | 2013-08-28 | 2022-01-18 | Semiconductor Energy Laboratory Co., Ltd. | Display device comprising a common electrode having an opening with first and second regions disconnected from each other and an entire region of each of a first and a second semiconductor film overlaps with a scan line |
US10782565B2 (en) | 2013-08-28 | 2020-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Display device comprising first and second semiconductor films wherein an entire region of each of the first and second semiconductor films overlaps with a scan line |
US9947794B2 (en) | 2013-08-30 | 2018-04-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9142593B2 (en) | 2013-08-30 | 2015-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9438206B2 (en) | 2013-08-30 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Storage circuit and semiconductor device |
US9552767B2 (en) | 2013-08-30 | 2017-01-24 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device |
US9590109B2 (en) | 2013-08-30 | 2017-03-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10164612B2 (en) | 2013-08-30 | 2018-12-25 | Semiconductor Energy Laboratory Co., Ltd. | Storage circuit and semiconductor device |
US9360564B2 (en) | 2013-08-30 | 2016-06-07 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device |
US10181287B2 (en) | 2013-08-30 | 2019-01-15 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device |
US9449853B2 (en) | 2013-09-04 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device comprising electron trap layer |
US10121905B2 (en) | 2013-09-04 | 2018-11-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9824898B2 (en) | 2013-09-05 | 2017-11-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9570622B2 (en) | 2013-09-05 | 2017-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10446551B2 (en) | 2013-09-05 | 2019-10-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US20170194327A1 (en) | 2013-09-05 | 2017-07-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9607991B2 (en) | 2013-09-05 | 2017-03-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10008513B2 (en) | 2013-09-05 | 2018-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9324876B2 (en) | 2013-09-06 | 2016-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9391157B2 (en) | 2013-09-06 | 2016-07-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor transistor device |
US9590110B2 (en) | 2013-09-10 | 2017-03-07 | Semiconductor Energy Laboratory Co., Ltd. | Ultraviolet light sensor circuit |
US10090023B2 (en) | 2013-09-11 | 2018-10-02 | Semiconductor Energy Laboratory Co., Ltd. | Memory device including memory circuit and selection circuit |
US9893194B2 (en) | 2013-09-12 | 2018-02-13 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9269822B2 (en) | 2013-09-12 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US10777585B2 (en) | 2013-09-13 | 2020-09-15 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9748279B2 (en) | 2013-09-13 | 2017-08-29 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9337214B2 (en) | 2013-09-13 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9461126B2 (en) | 2013-09-13 | 2016-10-04 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, clocked inverter circuit, sequential circuit, and semiconductor device including sequential circuit |
US9716003B2 (en) | 2013-09-13 | 2017-07-25 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device |
US10559602B2 (en) | 2013-09-13 | 2020-02-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9805952B2 (en) | 2013-09-13 | 2017-10-31 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US11848331B2 (en) | 2013-09-13 | 2023-12-19 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9406761B2 (en) | 2013-09-13 | 2016-08-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9887299B2 (en) | 2013-09-13 | 2018-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, clocked inverter circuit, sequential circuit, and semiconductor device including sequential circuit |
US9842941B2 (en) | 2013-09-13 | 2017-12-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9887297B2 (en) | 2013-09-17 | 2018-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor layer in which thickness of the oxide semiconductor layer is greater than or equal to width of the oxide semiconductor layer |
US9859439B2 (en) | 2013-09-18 | 2018-01-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9269915B2 (en) | 2013-09-18 | 2016-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9443934B2 (en) | 2013-09-19 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10236287B2 (en) | 2013-09-23 | 2019-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including semiconductor electrically surrounded by electric field of conductive film |
US10600918B2 (en) | 2013-09-23 | 2020-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9425217B2 (en) | 2013-09-23 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9397153B2 (en) | 2013-09-23 | 2016-07-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10217736B2 (en) | 2013-09-23 | 2019-02-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including transistor and capacitor |
US9761734B2 (en) | 2013-09-23 | 2017-09-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9911864B2 (en) | 2013-09-23 | 2018-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9905586B2 (en) | 2013-09-25 | 2018-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Capacitor comprising metal oxide film having high alignment |
US10483295B2 (en) | 2013-09-25 | 2019-11-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising resistor comprising metal oxide |
US9799774B2 (en) | 2013-09-26 | 2017-10-24 | Semiconductor Energy Laboratory Co., Ltd. | Switch circuit, semiconductor device, and system |
US9653486B2 (en) | 2013-09-27 | 2017-05-16 | Semiconductor Energy Laboratory Co., Ltd. | Analog/digital circuit including back gate transistor structure |
US9715906B2 (en) | 2013-10-02 | 2017-07-25 | Semiconductor Energy Laboratory Co., Ltd. | Bootstrap circuit and semiconductor device having bootstrap circuit |
US9812585B2 (en) | 2013-10-04 | 2017-11-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10741414B2 (en) | 2013-10-10 | 2020-08-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11764074B2 (en) | 2013-10-10 | 2023-09-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9647128B2 (en) | 2013-10-10 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10770310B2 (en) | 2013-10-10 | 2020-09-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9293592B2 (en) | 2013-10-11 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9245593B2 (en) | 2013-10-16 | 2016-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving arithmetic processing unit |
US9553114B2 (en) | 2013-10-18 | 2017-01-24 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device with a color filter |
US9257173B2 (en) | 2013-10-18 | 2016-02-09 | Semiconductor Energy Laboratory Co., Ltd. | Arithmetic processing unit and driving method thereof |
US9455349B2 (en) | 2013-10-22 | 2016-09-27 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor thin film transistor with reduced impurity diffusion |
US10199394B2 (en) | 2013-10-22 | 2019-02-05 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9673224B2 (en) | 2013-10-22 | 2017-06-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10103271B2 (en) | 2013-10-22 | 2018-10-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9431435B2 (en) | 2013-10-22 | 2016-08-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
US9530804B2 (en) | 2013-10-22 | 2016-12-27 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9887295B2 (en) | 2013-10-22 | 2018-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor with multiple oxide semiconductor layers |
US9276128B2 (en) | 2013-10-22 | 2016-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing the same, and etchant used for the same |
US9780201B2 (en) | 2013-10-22 | 2017-10-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
US10186604B2 (en) | 2013-10-22 | 2019-01-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
US10418492B2 (en) | 2013-10-22 | 2019-09-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with curved active layer |
US9812586B2 (en) | 2013-10-22 | 2017-11-07 | Semiconductor Energy Laboratory Co., Ltd. | Transistor with curved active layer |
US10269888B2 (en) | 2013-10-25 | 2019-04-23 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9583516B2 (en) | 2013-10-25 | 2017-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9870816B2 (en) | 2013-10-31 | 2018-01-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving semiconductor device |
US9590111B2 (en) | 2013-11-06 | 2017-03-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
US9419143B2 (en) | 2013-11-07 | 2016-08-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9722055B2 (en) | 2013-11-07 | 2017-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10197627B2 (en) | 2013-11-07 | 2019-02-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9385054B2 (en) | 2013-11-08 | 2016-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Data processing device and manufacturing method thereof |
US10249347B2 (en) | 2013-11-13 | 2019-04-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving semiconductor device |
US9755648B2 (en) | 2013-11-22 | 2017-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9494644B2 (en) | 2013-11-22 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including memory circuit and logic array |
US9880437B2 (en) | 2013-11-27 | 2018-01-30 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US9882014B2 (en) | 2013-11-29 | 2018-01-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9437428B2 (en) | 2013-11-29 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a semiconductor device having an oxide semiconductor layer with increased hydrogen concentration |
US11430817B2 (en) | 2013-11-29 | 2022-08-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10763322B2 (en) | 2013-12-02 | 2020-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
US9559317B2 (en) | 2013-12-02 | 2017-01-31 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
US10103274B2 (en) | 2013-12-02 | 2018-10-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10854697B2 (en) | 2013-12-02 | 2020-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
US11004925B2 (en) | 2013-12-02 | 2021-05-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
US9601634B2 (en) | 2013-12-02 | 2017-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10872947B2 (en) | 2013-12-02 | 2020-12-22 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
US10879331B2 (en) | 2013-12-02 | 2020-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
US9825057B2 (en) | 2013-12-02 | 2017-11-21 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US11672148B2 (en) | 2013-12-02 | 2023-06-06 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
US9437831B2 (en) | 2013-12-02 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
US10355067B2 (en) | 2013-12-02 | 2019-07-16 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
US10312315B2 (en) | 2013-12-02 | 2019-06-04 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
US9559316B2 (en) | 2013-12-02 | 2017-01-31 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
US9991392B2 (en) | 2013-12-03 | 2018-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9923097B2 (en) | 2013-12-06 | 2018-03-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9349751B2 (en) | 2013-12-12 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9673234B2 (en) | 2013-12-12 | 2017-06-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10115631B2 (en) | 2013-12-12 | 2018-10-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9627413B2 (en) | 2013-12-12 | 2017-04-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device |
US9287410B2 (en) | 2013-12-18 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9842940B2 (en) | 2013-12-18 | 2017-12-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9882059B2 (en) | 2013-12-19 | 2018-01-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10374097B2 (en) | 2013-12-19 | 2019-08-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10944014B2 (en) | 2013-12-19 | 2021-03-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9379192B2 (en) | 2013-12-20 | 2016-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9450080B2 (en) | 2013-12-20 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10050132B2 (en) | 2013-12-25 | 2018-08-14 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9478664B2 (en) | 2013-12-25 | 2016-10-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9722056B2 (en) | 2013-12-25 | 2017-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9960280B2 (en) | 2013-12-26 | 2018-05-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10002886B2 (en) | 2013-12-26 | 2018-06-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9627418B2 (en) | 2013-12-26 | 2017-04-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9935617B2 (en) | 2013-12-26 | 2018-04-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9466615B2 (en) | 2013-12-26 | 2016-10-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9530856B2 (en) | 2013-12-26 | 2016-12-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9672873B2 (en) | 2013-12-27 | 2017-06-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9577110B2 (en) | 2013-12-27 | 2017-02-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including an oxide semiconductor and the display device including the semiconductor device |
US9397149B2 (en) | 2013-12-27 | 2016-07-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9536904B2 (en) | 2013-12-27 | 2017-01-03 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device |
US10216055B2 (en) | 2013-12-27 | 2019-02-26 | Semiconductor Energy Laboratory Co., Ltd. | Display device comprising two transistors and display element |
US11757041B2 (en) | 2013-12-27 | 2023-09-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10128378B2 (en) | 2013-12-27 | 2018-11-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9722095B2 (en) | 2013-12-27 | 2017-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
US9356054B2 (en) | 2013-12-27 | 2016-05-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9704868B2 (en) | 2013-12-27 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9899535B2 (en) | 2013-12-27 | 2018-02-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9356098B2 (en) | 2013-12-27 | 2016-05-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with oxide semiconductor film |
US9230996B2 (en) | 2013-12-27 | 2016-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device |
US9472678B2 (en) | 2013-12-27 | 2016-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9349418B2 (en) | 2013-12-27 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for driving the same |
US10818795B2 (en) | 2013-12-27 | 2020-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9786690B2 (en) | 2013-12-27 | 2017-10-10 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device |
US9831347B2 (en) | 2013-12-27 | 2017-11-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising a transistor and a capacitor |
US9318618B2 (en) | 2013-12-27 | 2016-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11380795B2 (en) | 2013-12-27 | 2022-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising an oxide semiconductor film |
US9804462B2 (en) | 2013-12-27 | 2017-10-31 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device comprising transistor using oxide semiconductor |
US9954117B2 (en) | 2013-12-27 | 2018-04-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
US9594115B2 (en) | 2014-01-09 | 2017-03-14 | Semiconductor Energy Laboratory Co., Ltd. | Device for generating test pattern |
US9300292B2 (en) | 2014-01-10 | 2016-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Circuit including transistor |
US9401432B2 (en) | 2014-01-16 | 2016-07-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9800247B2 (en) | 2014-01-17 | 2017-10-24 | Semiconductor Energy Laboratory Co., Ltd. | Data processing device and driving method thereof |
US9379713B2 (en) | 2014-01-17 | 2016-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Data processing device and driving method thereof |
US10263117B2 (en) | 2014-01-24 | 2019-04-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9666722B2 (en) | 2014-01-28 | 2017-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10304961B2 (en) | 2014-01-28 | 2019-05-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9929044B2 (en) | 2014-01-30 | 2018-03-27 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device |
US11011648B2 (en) | 2014-02-05 | 2021-05-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10680116B2 (en) | 2014-02-05 | 2020-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device including oxide semiconductor |
US9653487B2 (en) | 2014-02-05 | 2017-05-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, module, and electronic device |
US10249645B2 (en) | 2014-02-05 | 2019-04-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including the semiconductor device, display module including the display device, and electronic device including the semiconductor device, the display device, and the display module |
US9443876B2 (en) | 2014-02-05 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including the semiconductor device, display module including the display device, and electronic device including the semiconductor device, the display device, and the display module |
US9929279B2 (en) | 2014-02-05 | 2018-03-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10811435B2 (en) | 2014-02-05 | 2020-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including the semiconductor device, display module including the display device, and electronic device including the semiconductor device, the display device, and the display module |
US10373981B2 (en) | 2014-02-05 | 2019-08-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, module, and electronic device |
US11942555B2 (en) | 2014-02-05 | 2024-03-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US11640996B2 (en) | 2014-02-05 | 2023-05-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US11699762B2 (en) | 2014-02-05 | 2023-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including the semiconductor device, display module including the display device, and electronic device including the semiconductor device, the display device, and the display module |
US9705002B2 (en) | 2014-02-05 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, module, and electronic device |
US10096721B2 (en) | 2014-02-05 | 2018-10-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, module, and electronic device |
US11107837B2 (en) | 2014-02-05 | 2021-08-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including the semiconductor device, display module including the display device, and electronic device including the semicondutor device, the display device, and the display module |
US9721968B2 (en) | 2014-02-06 | 2017-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic appliance |
US10249768B2 (en) | 2014-02-07 | 2019-04-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9588172B2 (en) | 2014-02-07 | 2017-03-07 | Semiconductor Energy Laboratory Co., Ltd. | Device including test circuit |
US9869716B2 (en) | 2014-02-07 | 2018-01-16 | Semiconductor Energy Laboratory Co., Ltd. | Device comprising programmable logic element |
US9997637B2 (en) | 2014-02-07 | 2018-06-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9479175B2 (en) | 2014-02-07 | 2016-10-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9990207B2 (en) | 2014-02-07 | 2018-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, device, and electronic device |
US10055232B2 (en) | 2014-02-07 | 2018-08-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising memory circuit |
US9412876B2 (en) | 2014-02-07 | 2016-08-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10642314B2 (en) | 2014-02-11 | 2020-05-05 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device having multiple overlapping display panels |
US11069747B2 (en) | 2014-02-11 | 2021-07-20 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device having multiple overlapping display panels |
US11647663B2 (en) | 2014-02-11 | 2023-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Display device having at least four overlapping display panels |
US10359810B2 (en) | 2014-02-11 | 2019-07-23 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9614022B2 (en) | 2014-02-11 | 2017-04-04 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device comprised of multiple display panels |
US9508864B2 (en) | 2014-02-19 | 2016-11-29 | Semiconductor Energy Laboratory Co., Ltd. | Oxide, semiconductor device, module, and electronic device |
US9406760B2 (en) | 2014-02-21 | 2016-08-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor film, transistor, semiconductor device, display device, and electronic appliance |
US9817040B2 (en) | 2014-02-21 | 2017-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Measuring method of low off-state current of transistor |
US9378776B2 (en) | 2014-02-21 | 2016-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US10032928B2 (en) | 2014-02-21 | 2018-07-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor film, transistor, semiconductor device, display device, and electronic appliance |
US9559174B2 (en) | 2014-02-21 | 2017-01-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor film, transistor, semiconductor device, display device, and electronic appliance |
US9660087B2 (en) | 2014-02-28 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including the semiconductor device, display module including the display device, and electronic appliance including the semiconductor device, the display device, or the display module |
US9294096B2 (en) | 2014-02-28 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9564535B2 (en) | 2014-02-28 | 2017-02-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including the semiconductor device, display module including the display device, and electronic appliance including the semiconductor device, the display device, and the display module |
US10056492B2 (en) | 2014-02-28 | 2018-08-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including the semiconductor device, display module including the display device, and electronic appliance including the semiconductor device, the display device, or the display module |
US9979386B2 (en) | 2014-02-28 | 2018-05-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for driving the same, and electronic appliance |
US10074576B2 (en) | 2014-02-28 | 2018-09-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device |
US10693014B2 (en) | 2014-02-28 | 2020-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including the semiconductor device, display module including the display device, and electronic appliance including the semiconductor device, the display device, and the display module |
US9774331B2 (en) | 2014-02-28 | 2017-09-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9455709B2 (en) | 2014-03-05 | 2016-09-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9590594B2 (en) | 2014-03-05 | 2017-03-07 | Semiconductor Energy Laboratory Co., Ltd. | Level shifter circuit |
US9818882B2 (en) | 2014-03-06 | 2017-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9843308B2 (en) | 2014-03-06 | 2017-12-12 | Semiconductor Energy Laboratory Co., Ltd. | Voltage controlled oscillator, semiconductor device, and electronic device |
US9397637B2 (en) | 2014-03-06 | 2016-07-19 | Semiconductor Energy Laboratory Co., Ltd. | Voltage controlled oscillator, semiconductor device, and electronic device |
US9537478B2 (en) | 2014-03-06 | 2017-01-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10096489B2 (en) | 2014-03-06 | 2018-10-09 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9350358B2 (en) | 2014-03-06 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9653611B2 (en) | 2014-03-07 | 2017-05-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10002656B2 (en) | 2014-03-07 | 2018-06-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9935129B2 (en) | 2014-03-07 | 2018-04-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US9443872B2 (en) | 2014-03-07 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9711536B2 (en) | 2014-03-07 | 2017-07-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US10593683B2 (en) | 2014-03-07 | 2020-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Semicondutor device |
US9419622B2 (en) | 2014-03-07 | 2016-08-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9634150B2 (en) | 2014-03-07 | 2017-04-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device, input/output device, and electronic device |
US11114449B2 (en) | 2014-03-07 | 2021-09-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9859444B2 (en) | 2014-03-07 | 2018-01-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device, input/output device, and electronic device |
US9806201B2 (en) | 2014-03-07 | 2017-10-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11751409B2 (en) | 2014-03-07 | 2023-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9799685B2 (en) | 2014-03-07 | 2017-10-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9225329B2 (en) | 2014-03-07 | 2015-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, driving method thereof, and electronic appliance |
US10217752B2 (en) | 2014-03-07 | 2019-02-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9780121B2 (en) | 2014-03-07 | 2017-10-03 | Semiconductor Energy Laboratory Co., Ltd. | Touch sensor, touch panel, and manufacturing method of touch panel |
US9349454B2 (en) | 2014-03-07 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9378777B2 (en) | 2014-03-12 | 2016-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Back gate bias voltage control of oxide semiconductor transistor |
US9640669B2 (en) | 2014-03-13 | 2017-05-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including the semiconductor device, display module including the display device, and electronic appliance including the semiconductor device, the display device, and the display module |
US9509314B2 (en) | 2014-03-13 | 2016-11-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for operating programmable logic device |
US9467139B2 (en) | 2014-03-13 | 2016-10-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9773815B2 (en) | 2014-03-13 | 2017-09-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including the semiconductor device, display module including the display device, and electronic appliance including the semiconductor device, the display device, and the display module |
US9922692B2 (en) | 2014-03-13 | 2018-03-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including refresh circuit for memory cell |
US9722615B2 (en) | 2014-03-13 | 2017-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Method for operating programmable logic device |
US9425226B2 (en) | 2014-03-13 | 2016-08-23 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device |
US9385720B2 (en) | 2014-03-13 | 2016-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9324747B2 (en) | 2014-03-13 | 2016-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device |
US9711549B2 (en) | 2014-03-13 | 2017-07-18 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device |
US9876495B2 (en) | 2014-03-13 | 2018-01-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9818473B2 (en) | 2014-03-14 | 2017-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including stacked circuits |
US9887212B2 (en) | 2014-03-14 | 2018-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10361290B2 (en) | 2014-03-14 | 2019-07-23 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device comprising adding oxygen to buffer film and insulating film |
US9685500B2 (en) | 2014-03-14 | 2017-06-20 | Semiconductor Energy Laboratory Co., Ltd. | Circuit system |
US11876126B2 (en) | 2014-03-14 | 2024-01-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9299848B2 (en) | 2014-03-14 | 2016-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, RF tag, and electronic device |
US11094804B2 (en) | 2014-03-14 | 2021-08-17 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9871143B2 (en) | 2014-03-18 | 2018-01-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9954111B2 (en) | 2014-03-18 | 2018-04-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10388797B2 (en) | 2014-03-18 | 2019-08-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9887291B2 (en) | 2014-03-19 | 2018-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including the semiconductor device, display module including the display device, and electronic device including the semiconductor device, the display device, or the display module |
US9842842B2 (en) | 2014-03-19 | 2017-12-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device and semiconductor device and electronic device having the same |
US10861980B2 (en) | 2014-03-20 | 2020-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device including semiconductor device, display module including display device, and electronic device including semiconductor device, display device, and display module |
US9852787B2 (en) | 2014-03-20 | 2017-12-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US9627010B2 (en) | 2014-03-20 | 2017-04-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US10236392B2 (en) | 2014-03-28 | 2019-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and semiconductor device |
US10833203B2 (en) | 2014-03-28 | 2020-11-10 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and semiconductor device |
US9947801B2 (en) | 2014-03-28 | 2018-04-17 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and semiconductor device |
US11177392B2 (en) | 2014-03-28 | 2021-11-16 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and semiconductor device |
US11888073B2 (en) | 2014-03-28 | 2024-01-30 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and semiconductor device |
US11581440B2 (en) | 2014-03-28 | 2023-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and semiconductor device |
US10566460B2 (en) | 2014-03-28 | 2020-02-18 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and semiconductor device |
US9553204B2 (en) | 2014-03-31 | 2017-01-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US9666725B2 (en) | 2014-03-31 | 2017-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US9478276B2 (en) | 2014-04-10 | 2016-10-25 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and semiconductor device |
US9865325B2 (en) | 2014-04-10 | 2018-01-09 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and semiconductor device |
US9542977B2 (en) | 2014-04-11 | 2017-01-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9601215B2 (en) | 2014-04-11 | 2017-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Holding circuit, driving method of the holding circuit, and semiconductor device including the holding circuit |
US10187596B2 (en) | 2014-04-11 | 2019-01-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for driving semiconductor device, and method for driving electronic device |
US9412739B2 (en) | 2014-04-11 | 2016-08-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9674470B2 (en) | 2014-04-11 | 2017-06-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for driving semiconductor device, and method for driving electronic device |
US9952724B2 (en) | 2014-04-18 | 2018-04-24 | Semiconductor Energy Laboratory Co., Ltd. | Display device and operation method thereof |
US9768315B2 (en) | 2014-04-18 | 2017-09-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device having the same |
US9502434B2 (en) | 2014-04-18 | 2016-11-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10101867B2 (en) | 2014-04-18 | 2018-10-16 | Semiconductor Energy Laboratory Co., Ltd. | Display device and operation method thereof |
US10345661B2 (en) | 2014-04-22 | 2019-07-09 | Semiconductor Energy Laboratory Co., Ltd. | Display device, display module, and electronic device |
US9905598B2 (en) | 2014-04-23 | 2018-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device |
US9601429B2 (en) | 2014-04-25 | 2017-03-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device including memory cell comprising first transistor, second transistor and capacitor |
US9960213B2 (en) | 2014-04-25 | 2018-05-01 | Semiconductor Energy Laboratory Co., Ltd. | Input and output device having touch sensor element as input device and display device |
US9287878B2 (en) | 2014-04-25 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9780226B2 (en) | 2014-04-25 | 2017-10-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9311982B2 (en) | 2014-04-25 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US10043913B2 (en) | 2014-04-30 | 2018-08-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor film, semiconductor device, display device, module, and electronic device |
US11599249B2 (en) | 2014-05-02 | 2023-03-07 | Semiconductor Energy Laboratory Co., Ltd. | Display device and operation method thereof |
US9851776B2 (en) | 2014-05-02 | 2017-12-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10656799B2 (en) | 2014-05-02 | 2020-05-19 | Semiconductor Energy Laboratory Co., Ltd. | Display device and operation method thereof |
US11112947B2 (en) | 2014-05-02 | 2021-09-07 | Semiconductor Energy Laboratory Co., Ltd. | Display device and operation method thereof |
US10084048B2 (en) | 2014-05-07 | 2018-09-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device including the semiconductor device |
US10529286B2 (en) | 2014-05-09 | 2020-01-07 | Semiconductor Energy Laboratory Co., Ltd. | Display correction circuit, display correction system, and display device |
US11594642B2 (en) | 2014-05-15 | 2023-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Thin film semiconductor device including back gate comprising oxide semiconductor material |
US10998448B2 (en) | 2014-05-15 | 2021-05-04 | Semiconductor Energy Laboratory Co., Ltd. | Thin film semiconductor device including back gate comprising oxide semiconductor material |
US11430311B2 (en) | 2014-05-16 | 2022-08-30 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device, monitoring device, and electronic appliance |
US10593172B2 (en) | 2014-05-16 | 2020-03-17 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device, monitoring device, and electronic appliance |
US9287118B2 (en) | 2014-05-16 | 2016-03-15 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor substrate and semiconductor device |
US10964393B2 (en) | 2014-05-22 | 2021-03-30 | Semiconductor Energy Laboratory Co., Ltd. | Method for operating a semiconductor device having a memory circuit with an OS transistor and an arithmetic circuit |
US11488668B2 (en) | 2014-05-22 | 2022-11-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and healthcare system |
US10388380B2 (en) | 2014-05-22 | 2019-08-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and memory circuit having an OS transistor and a capacitor |
US9837157B2 (en) | 2014-05-22 | 2017-12-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and healthcare system |
US9633709B2 (en) | 2014-05-23 | 2017-04-25 | Semiconductor Energy Laboratory Co., Ltd. | Storage device including transistor comprising oxide semiconductor |
US9831326B2 (en) | 2014-05-23 | 2017-11-28 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9496411B2 (en) | 2014-05-23 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US10020403B2 (en) | 2014-05-27 | 2018-07-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9874775B2 (en) | 2014-05-28 | 2018-01-23 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device |
US9537014B2 (en) | 2014-05-29 | 2017-01-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing semiconductor device, and electronic device |
US10032925B2 (en) | 2014-05-29 | 2018-07-24 | Semiconductor Energy Laboratory Co., Ltd. | Imaging element, electronic appliance, method for driving imaging device, and method for driving electronic appliance |
US9496022B2 (en) | 2014-05-29 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including power management unit for refresh operation |
US9715920B2 (en) | 2014-05-29 | 2017-07-25 | Semiconductor Energy Laboratory Co., Ltd. | Memory device, and semiconductor device and electronic appliance including the same |
US9336853B2 (en) | 2014-05-29 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Memory device, electronic component, and electronic device |
US9406370B2 (en) | 2014-05-29 | 2016-08-02 | Semiconductor Energy Laboratory Co., Ltd. | Memory device, and semiconductor device and electronic appliance including the same |
US11239372B2 (en) | 2014-05-29 | 2022-02-01 | Semiconductor Energy Laboratory Co., Ltd. | Imaging element, electronic appliance, method for driving imaging device, and method for driving electronic appliance |
US9679629B2 (en) | 2014-05-29 | 2017-06-13 | Semiconductor Energy Laboratory Co., Ltd. | Memory device having wiring layout for electrically connecting to switch and capacitor components |
US10229906B2 (en) | 2014-05-30 | 2019-03-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including insulating film having opening portion and conductive film in the opening portion |
US11282860B2 (en) | 2014-05-30 | 2022-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, and electronic device |
US9553202B2 (en) | 2014-05-30 | 2017-01-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, and electronic device |
US9831238B2 (en) | 2014-05-30 | 2017-11-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including insulating film having opening portion and conductive film in the opening portion |
US9865588B2 (en) | 2014-05-30 | 2018-01-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9419018B2 (en) | 2014-05-30 | 2016-08-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9373368B2 (en) | 2014-05-30 | 2016-06-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10050062B2 (en) | 2014-05-30 | 2018-08-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9646677B2 (en) | 2014-05-30 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10658389B2 (en) | 2014-05-30 | 2020-05-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, and electronic device |
US9847431B2 (en) | 2014-05-30 | 2017-12-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, module, and electronic device |
US9525073B2 (en) | 2014-05-30 | 2016-12-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor |
US10651203B2 (en) | 2014-06-13 | 2020-05-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising a sensing unit |
US9685563B2 (en) | 2014-06-13 | 2017-06-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device including the semiconductor device |
US9349875B2 (en) | 2014-06-13 | 2016-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device including the semiconductor device |
US9971680B2 (en) | 2014-06-13 | 2018-05-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9887300B2 (en) | 2014-06-18 | 2018-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and semiconductor device |
US9640555B2 (en) | 2014-06-20 | 2017-05-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor |
US10490572B2 (en) | 2014-06-20 | 2019-11-26 | Semiconductor Energy Laboratory Co., Ltd. | Transistor including indium in vicinity of interface between insulating films |
US9876099B2 (en) | 2014-06-20 | 2018-01-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device, input/output device, and electronic device |
US11282865B2 (en) | 2014-06-20 | 2022-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including indium at insulating film interface |
US9634031B2 (en) | 2014-06-20 | 2017-04-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide semiconductor |
US9722090B2 (en) | 2014-06-23 | 2017-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including first gate oxide semiconductor film, and second gate |
US9455287B2 (en) | 2014-06-25 | 2016-09-27 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device, monitoring device, and electronic appliance |
US10002971B2 (en) | 2014-07-03 | 2018-06-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
US10002884B2 (en) | 2014-07-04 | 2018-06-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9647129B2 (en) | 2014-07-04 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9729809B2 (en) | 2014-07-11 | 2017-08-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method of semiconductor device or electronic device |
US9461179B2 (en) | 2014-07-11 | 2016-10-04 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor device (TFT) comprising stacked oxide semiconductor layers and having a surrounded channel structure |
US11223789B2 (en) | 2014-07-11 | 2022-01-11 | Semiconductor Energy Laboratory Co., Ltd. | Driving method of semiconductor device and electronic device |
US11882376B2 (en) | 2014-07-11 | 2024-01-23 | Semiconductor Energy Laboratory Co., Ltd. | Driving method of semiconductor device and electronic device |
US10516842B2 (en) | 2014-07-11 | 2019-12-24 | Semiconductor Energy Laboratory Co., Ltd. | Driving method of semiconductor device and electronic device |
US9799775B2 (en) | 2014-07-11 | 2017-10-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9496412B2 (en) | 2014-07-15 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, and display device including the semiconductor device |
US10164075B2 (en) | 2014-07-15 | 2018-12-25 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device including transistor |
US9837512B2 (en) | 2014-07-15 | 2017-12-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, and display device including the semiconductor device |
US9918012B2 (en) | 2014-07-18 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Display system, imaging device, monitoring device, display device, and electronic device |
US9848144B2 (en) | 2014-07-18 | 2017-12-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, imaging device, and electronic device |
US9742419B2 (en) | 2014-07-25 | 2017-08-22 | Semiconductor Energy Laboratory Co., Ltd. | Oscillator circuit and semiconductor device including the same |
US9312280B2 (en) | 2014-07-25 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9344037B2 (en) | 2014-07-25 | 2016-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Oscillator circuit and semiconductor device including the same |
US9721953B2 (en) | 2014-07-25 | 2017-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10115830B2 (en) | 2014-07-29 | 2018-10-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, and electronic device |
US10764973B2 (en) | 2014-07-31 | 2020-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US11659636B2 (en) | 2014-07-31 | 2023-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US10021329B2 (en) | 2014-07-31 | 2018-07-10 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device, monitoring device, and electronic device |
US10159135B2 (en) | 2014-07-31 | 2018-12-18 | Semiconductor Energy Laboratory Co., Ltd. | Flexible display device having first and second display panels overlapping each other and light transmitting layer therebetween |
US9705004B2 (en) | 2014-08-01 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10134911B2 (en) | 2014-08-01 | 2018-11-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10033379B2 (en) | 2014-08-08 | 2018-07-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including power storage elements, switches, and circuit including load |
US9520873B2 (en) | 2014-08-08 | 2016-12-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9812466B2 (en) | 2014-08-08 | 2017-11-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9595955B2 (en) | 2014-08-08 | 2017-03-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including power storage elements and switches |
US10084447B2 (en) | 2014-08-08 | 2018-09-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10147747B2 (en) | 2014-08-21 | 2018-12-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, and electronic device |
US11133402B2 (en) | 2014-08-22 | 2021-09-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing semiconductor device, and electronic appliance having semiconductor device |
US10032888B2 (en) | 2014-08-22 | 2018-07-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing semiconductor device, and electronic appliance having semiconductor device |
US10553704B2 (en) | 2014-08-22 | 2020-02-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing semiconductor device, and electronic appliance having semiconductor device |
US11600705B2 (en) | 2014-08-25 | 2023-03-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for measuring current of semiconductor device |
US10559667B2 (en) | 2014-08-25 | 2020-02-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for measuring current of semiconductor device |
US9576994B2 (en) | 2014-08-29 | 2017-02-21 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and electronic device |
US9576995B2 (en) | 2014-09-02 | 2017-02-21 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and electronic device |
US9543295B2 (en) | 2014-09-04 | 2017-01-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9886150B2 (en) | 2014-09-05 | 2018-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9766517B2 (en) | 2014-09-05 | 2017-09-19 | Semiconductor Energy Laboratory Co., Ltd. | Display device and display module |
US10452218B2 (en) | 2014-09-05 | 2019-10-22 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9722091B2 (en) | 2014-09-12 | 2017-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9905435B2 (en) | 2014-09-12 | 2018-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device comprising oxide semiconductor film |
US10438815B2 (en) | 2014-09-12 | 2019-10-08 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device comprising oxide semiconductor film |
US9496376B2 (en) | 2014-09-19 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9786495B2 (en) | 2014-09-19 | 2017-10-10 | Semiconductor Energy Laboratory Co., Ltd. | Method for evaluating semiconductor film and method for manufacturing semiconductor device |
US9853165B2 (en) | 2014-09-19 | 2017-12-26 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9401364B2 (en) | 2014-09-19 | 2016-07-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US10071904B2 (en) | 2014-09-25 | 2018-09-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display module, and electronic device |
US10249658B2 (en) | 2014-09-26 | 2019-04-02 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device comprising a circuit having dual regions each with a transistor electrically connected to a photoelectric conversion element |
US10193563B2 (en) | 2014-09-26 | 2019-01-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, wireless sensor, and electronic device |
US9748291B2 (en) | 2014-09-26 | 2017-08-29 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device having a third circuit with a region overlapping with a fourth circuit |
US10170055B2 (en) | 2014-09-26 | 2019-01-01 | Semiconductor Energy Laboratory Co., Ltd. | Display device and driving method thereof |
US10141342B2 (en) | 2014-09-26 | 2018-11-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device |
US9859905B2 (en) | 2014-09-26 | 2018-01-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, wireless sensor, and electronic device |
US9762239B2 (en) | 2014-09-30 | 2017-09-12 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit, semiconductor device, electronic component, and electronic device |
US10205452B2 (en) | 2014-09-30 | 2019-02-12 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit, semiconductor device, electronic component, and electronic device |
US9450581B2 (en) | 2014-09-30 | 2016-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit, semiconductor device, electronic component, and electronic device |
US10204925B2 (en) | 2014-10-06 | 2019-02-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9698170B2 (en) | 2014-10-07 | 2017-07-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display module, and electronic device |
US10153301B2 (en) | 2014-10-10 | 2018-12-11 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit, processing unit, electronic component, and electronic device |
US10453863B2 (en) | 2014-10-10 | 2019-10-22 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit, processing unit, electronic component, and electronic device |
US10825836B2 (en) | 2014-10-10 | 2020-11-03 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit, processing unit, electronic component, and electronic device |
US10490258B2 (en) | 2014-10-10 | 2019-11-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with stacked structure of memory cells over sensing amplifiers, circuit board and electronic device |
US9704562B2 (en) | 2014-10-10 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with stacked structure of memory cells over sensing amplifiers, circuit board, and electronic device |
US9385713B2 (en) | 2014-10-10 | 2016-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit, processing unit, electronic component, and electronic device |
US9704882B2 (en) | 2014-10-10 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit, processing unit, electronic component, and electronic device |
US11374023B2 (en) | 2014-10-10 | 2022-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit, processing unit, electronic component, and electronic device |
US9991393B2 (en) | 2014-10-16 | 2018-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, module, and electronic device |
US9438207B2 (en) | 2014-10-17 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US9917572B2 (en) | 2014-10-17 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US9698274B2 (en) | 2014-10-20 | 2017-07-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising an oxide semiconductor, module, and electronic device |
US10068927B2 (en) | 2014-10-23 | 2018-09-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display module, and electronic device |
US9569713B2 (en) | 2014-10-24 | 2017-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, wireless sensor, and electronic device |
US11862454B2 (en) | 2014-10-28 | 2024-01-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the same |
US11824068B2 (en) | 2014-10-28 | 2023-11-21 | Semiconductor Energy Laboratory Co., Ltd. | Display device, manufacturing method of display device, and electronic device |
US10529864B2 (en) | 2014-10-28 | 2020-01-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the same |
US9704704B2 (en) | 2014-10-28 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the same |
US11075232B2 (en) | 2014-10-28 | 2021-07-27 | Semiconductor Energy Laboratory Co., Ltd. | Display device, manufacturing method of display device, and electronic device |
US10367014B2 (en) | 2014-10-28 | 2019-07-30 | Semiconductor Energy Laboratory Co., Ltd. | Display device, manufacturing method of display device, and electronic device |
US9859117B2 (en) | 2014-10-28 | 2018-01-02 | Semiconductor Energy Laboratory Co., Ltd. | Oxide and method for forming the same |
US11158745B2 (en) | 2014-10-28 | 2021-10-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the same |
US9793905B2 (en) | 2014-10-31 | 2017-10-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10680017B2 (en) | 2014-11-07 | 2020-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting element including EL layer, electrode which has high reflectance and a high work function, display device, electronic device, and lighting device |
US9548327B2 (en) | 2014-11-10 | 2017-01-17 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device having a selenium containing photoelectric conversion layer |
US9584707B2 (en) | 2014-11-10 | 2017-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and electronic device |
US9590115B2 (en) | 2014-11-21 | 2017-03-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9998104B2 (en) | 2014-11-21 | 2018-06-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9438234B2 (en) | 2014-11-21 | 2016-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit and semiconductor device including logic circuit |
US10249765B2 (en) | 2014-11-21 | 2019-04-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10811540B2 (en) | 2014-11-21 | 2020-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9698276B2 (en) | 2014-11-28 | 2017-07-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, module, and electronic device |
US9761733B2 (en) | 2014-12-01 | 2017-09-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing the same |
US10084096B2 (en) | 2014-12-01 | 2018-09-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of manufacturing the same |
US9779782B2 (en) | 2014-12-08 | 2017-10-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9768317B2 (en) | 2014-12-08 | 2017-09-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method of semiconductor device, and electronic device |
US10600839B2 (en) | 2014-12-10 | 2020-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including oxide semiconductor |
US10290745B2 (en) | 2014-12-10 | 2019-05-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10964743B2 (en) | 2014-12-10 | 2021-03-30 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device comprising current mirror circuit |
US10074687B2 (en) | 2014-12-10 | 2018-09-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9640226B2 (en) | 2014-12-10 | 2017-05-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device with data voltages read accurately without the influence of threshold voltage variation |
US9496285B2 (en) | 2014-12-10 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
US9698277B2 (en) | 2014-12-10 | 2017-07-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9773832B2 (en) | 2014-12-10 | 2017-09-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US11676986B2 (en) | 2014-12-10 | 2023-06-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9852778B2 (en) | 2014-12-11 | 2017-12-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, memory device, and electronic device |
US9570116B2 (en) | 2014-12-11 | 2017-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, memory device, and electronic device |
US9647665B2 (en) | 2014-12-16 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9755643B2 (en) | 2014-12-16 | 2017-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including buffer circuit and level shifter circuit, and electronic device including the same |
US10019348B2 (en) | 2014-12-18 | 2018-07-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including circuit configured to be in resting state |
US10445227B2 (en) | 2014-12-18 | 2019-10-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, sensor device, and electronic device |
US10396210B2 (en) | 2014-12-26 | 2019-08-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device with stacked metal oxide and oxide semiconductor layers and display device including the semiconductor device |
US10316404B2 (en) | 2014-12-26 | 2019-06-11 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing sputtering target |
US9831353B2 (en) | 2014-12-26 | 2017-11-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device, display module, electronic device, oxide, and manufacturing method of oxide |
US9735282B2 (en) | 2014-12-29 | 2017-08-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device having semiconductor device |
US10522693B2 (en) | 2015-01-16 | 2019-12-31 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and electronic device |
US9812587B2 (en) | 2015-01-26 | 2017-11-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US11245039B2 (en) | 2015-01-26 | 2022-02-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9954112B2 (en) | 2015-01-26 | 2018-04-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9443564B2 (en) | 2015-01-26 | 2016-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US11848341B2 (en) | 2015-01-30 | 2023-12-19 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and electronic device |
US9647132B2 (en) | 2015-01-30 | 2017-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and memory device |
US10157738B2 (en) | 2015-02-02 | 2018-12-18 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing oxide |
US9704707B2 (en) | 2015-02-02 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Oxide and manufacturing method thereof |
US10431600B2 (en) | 2015-02-04 | 2019-10-01 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device including a metal oxide film |
US9831275B2 (en) | 2015-02-04 | 2017-11-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device at low temperature |
US9728559B2 (en) | 2015-02-06 | 2017-08-08 | Semiconductor Energy Laboratory Co., Ltd. | Device, manufacturing method thereof, and electronic device |
US10074672B2 (en) | 2015-02-06 | 2018-09-11 | Semiconductor Energy Laboratory Co., Ltd. | Device, manufacturing method thereof, and electronic device |
US9660100B2 (en) | 2015-02-06 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10707239B2 (en) | 2015-02-06 | 2020-07-07 | Semiconductor Energy Laboratory Co., Ltd. | Device, manufacturing method thereof, and electronic device |
US10090031B2 (en) | 2015-02-09 | 2018-10-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising memory circuit and selection circuit |
US9954113B2 (en) | 2015-02-09 | 2018-04-24 | Semiconductor Energy Laboratory Co., Ltd. | Transistor including oxide semiconductor, semiconductor device including the transistor, and electronic device including the transistor |
US9831309B2 (en) | 2015-02-11 | 2017-11-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9818880B2 (en) | 2015-02-12 | 2017-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
US10199508B2 (en) | 2015-02-12 | 2019-02-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9768318B2 (en) | 2015-02-12 | 2017-09-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US11532755B2 (en) | 2015-02-12 | 2022-12-20 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
US11380799B2 (en) | 2015-02-12 | 2022-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
US10439068B2 (en) | 2015-02-12 | 2019-10-08 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film and semiconductor device |
US10249644B2 (en) | 2015-02-13 | 2019-04-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
US9991394B2 (en) | 2015-02-20 | 2018-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and fabrication method thereof |
US11183516B2 (en) | 2015-02-20 | 2021-11-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10403646B2 (en) | 2015-02-20 | 2019-09-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US9489988B2 (en) | 2015-02-20 | 2016-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Memory device |
US9722092B2 (en) | 2015-02-25 | 2017-08-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having a stacked metal oxide |
US10235289B2 (en) | 2015-02-26 | 2019-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Storage system and storage control circuit |
US9653613B2 (en) | 2015-02-27 | 2017-05-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9685560B2 (en) | 2015-03-02 | 2017-06-20 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, method for manufacturing transistor, semiconductor device, and electronic device |
US9947800B2 (en) | 2015-03-02 | 2018-04-17 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, method for manufacturing transistor, semiconductor device, and electronic device |
US11489065B2 (en) | 2015-03-03 | 2022-11-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9865712B2 (en) | 2015-03-03 | 2018-01-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10446671B2 (en) | 2015-03-03 | 2019-10-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10403760B2 (en) | 2015-03-03 | 2019-09-03 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor film, semiconductor device including the oxide semiconductor film, and display device including the semiconductor device |
US10879381B2 (en) | 2015-03-03 | 2020-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10367095B2 (en) | 2015-03-03 | 2019-07-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing the same, or display device including the same |
US9905700B2 (en) | 2015-03-13 | 2018-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device or memory device and driving method thereof |
US10168809B2 (en) | 2015-03-17 | 2019-01-01 | Semiconductor Energy Laboratory Co., Ltd. | Touch panel |
US10008609B2 (en) | 2015-03-17 | 2018-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing the same, or display device including the same |
US9964799B2 (en) | 2015-03-17 | 2018-05-08 | Semiconductor Energy Laboratory Co., Ltd. | Display device, display module, and electronic device |
US9882061B2 (en) | 2015-03-17 | 2018-01-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10134332B2 (en) | 2015-03-18 | 2018-11-20 | Semiconductor Energy Laboratory Co., Ltd. | Display device, electronic device, and driving method of display device |
US9612499B2 (en) | 2015-03-19 | 2017-04-04 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and electronic device using liquid crystal display device |
US9653479B2 (en) | 2015-03-19 | 2017-05-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10050060B2 (en) | 2015-03-19 | 2018-08-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10147823B2 (en) | 2015-03-19 | 2018-12-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9634048B2 (en) | 2015-03-24 | 2017-04-25 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and electronic device |
US9842938B2 (en) | 2015-03-24 | 2017-12-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including semiconductor device |
US10079253B2 (en) | 2015-03-24 | 2018-09-18 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and electronic device |
US9960261B2 (en) | 2015-03-24 | 2018-05-01 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9666698B2 (en) | 2015-03-24 | 2017-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10096715B2 (en) | 2015-03-26 | 2018-10-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing the same, and electronic device |
US10429704B2 (en) | 2015-03-26 | 2019-10-01 | Semiconductor Energy Laboratory Co., Ltd. | Display device, display module including the display device, and electronic device including the display device or the display module |
US11075300B2 (en) | 2015-03-26 | 2021-07-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing the same, and electronic device |
US10996524B2 (en) | 2015-03-26 | 2021-05-04 | Semiconductor Energy Laboratory Co., Ltd. | Display device, display module including the display device, and electronic device including the display device or the display module |
US9806200B2 (en) | 2015-03-27 | 2017-10-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11538940B2 (en) | 2015-03-27 | 2022-12-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10693012B2 (en) | 2015-03-27 | 2020-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10062790B2 (en) | 2015-03-27 | 2018-08-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10522691B2 (en) | 2015-03-27 | 2019-12-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9837546B2 (en) | 2015-03-27 | 2017-12-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US11469330B2 (en) | 2015-03-27 | 2022-10-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US10438982B2 (en) | 2015-03-30 | 2019-10-08 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device including step of simultaneous formation of plurality of contact openings |
US11574944B2 (en) | 2015-03-30 | 2023-02-07 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device including step of simultaneous formation of plurality of contact openings |
US11004882B2 (en) | 2015-03-30 | 2021-05-11 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9716852B2 (en) | 2015-04-03 | 2017-07-25 | Semiconductor Energy Laboratory Co., Ltd. | Broadcast system |
US10395725B2 (en) | 2015-04-03 | 2019-08-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including memory cells |
US11232831B2 (en) | 2015-04-03 | 2022-01-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device for vector-matrix multiplication |
US10389961B2 (en) | 2015-04-09 | 2019-08-20 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and electronic device |
US11202026B2 (en) | 2015-04-09 | 2021-12-14 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and electronic device |
US10582141B2 (en) | 2015-04-09 | 2020-03-03 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and electronic device |
US11036324B2 (en) | 2015-04-13 | 2021-06-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and touch panel |
US10693013B2 (en) | 2015-04-13 | 2020-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
US11954276B2 (en) | 2015-04-13 | 2024-04-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and touch panel |
US10372274B2 (en) | 2015-04-13 | 2019-08-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and touch panel |
US11217703B2 (en) | 2015-04-13 | 2022-01-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method of the same |
US10056497B2 (en) | 2015-04-15 | 2018-08-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US11791201B2 (en) | 2015-04-15 | 2023-10-17 | Semiconductor Energy Laboratory Co., Ltd. | Method for fabricating electrode and semiconductor device |
US11646378B2 (en) | 2015-04-15 | 2023-05-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10460984B2 (en) | 2015-04-15 | 2019-10-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for fabricating electrode and semiconductor device |
US10923600B2 (en) | 2015-04-15 | 2021-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US11004727B2 (en) | 2015-04-15 | 2021-05-11 | Semiconductor Energy Laboratory Co., Ltd. | Method for fabricating electrode and semiconductor device |
US9916791B2 (en) | 2015-04-16 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Display device, electronic device, and method for driving display device |
US10192995B2 (en) | 2015-04-28 | 2019-01-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10950734B2 (en) | 2015-04-28 | 2021-03-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10002970B2 (en) | 2015-04-30 | 2018-06-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method of the same, or display device including the same |
US10797180B2 (en) | 2015-05-04 | 2020-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing the same, and electronic device |
US10505051B2 (en) | 2015-05-04 | 2019-12-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing the same, and electronic device |
US10671204B2 (en) | 2015-05-04 | 2020-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Touch panel and data processor |
US10852870B2 (en) | 2015-05-04 | 2020-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Touch panel and data processor |
US9934740B2 (en) | 2015-05-07 | 2018-04-03 | Semiconductor Energy Laboratory Co., Ltd. | Display system and electronic device |
US9966473B2 (en) | 2015-05-11 | 2018-05-08 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US10035386B2 (en) | 2015-05-11 | 2018-07-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing semiconductor device, tire, and moving object |
US10500908B2 (en) | 2015-05-11 | 2019-12-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing semiconductor device, tire, and moving object |
US10546958B2 (en) | 2015-05-11 | 2020-01-28 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US11728356B2 (en) | 2015-05-14 | 2023-08-15 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion element and imaging device |
US9754657B2 (en) | 2015-05-14 | 2017-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, memory device, electronic device, and method for driving semiconductor device |
US9627034B2 (en) | 2015-05-15 | 2017-04-18 | Semiconductor Energy Laboratory Co., Ltd. | Electronic device |
US9748403B2 (en) | 2015-05-22 | 2017-08-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
US9837547B2 (en) | 2015-05-22 | 2017-12-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide conductor and display device including the semiconductor device |
US10861981B2 (en) | 2015-05-22 | 2020-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising an oxide semiconductor |
US11695078B2 (en) | 2015-05-22 | 2023-07-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including semiconductor device |
US10319861B2 (en) | 2015-05-22 | 2019-06-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising oxide conductor |
US10032929B2 (en) | 2015-05-22 | 2018-07-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
US10903368B2 (en) | 2015-05-22 | 2021-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including semiconductor device |
US11963360B2 (en) | 2015-05-26 | 2024-04-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9748274B2 (en) | 2015-05-26 | 2017-08-29 | Semiconductor Energy Laboratory Co., Ltd. | Memory device comprising stacked memory cells and electronic device including the same |
US10139663B2 (en) | 2015-05-29 | 2018-11-27 | Semiconductor Energy Laboratory Co., Ltd. | Input/output device and electronic device |
US10163967B2 (en) | 2015-06-12 | 2018-12-25 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device, method for operating the same, and electronic device |
US9871145B2 (en) | 2015-06-19 | 2018-01-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, and electronic device |
US9691905B2 (en) | 2015-06-19 | 2017-06-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, and electronic device |
US10141452B2 (en) | 2015-06-19 | 2018-11-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, and electronic device |
US9860465B2 (en) | 2015-06-23 | 2018-01-02 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and electronic device |
US9935633B2 (en) | 2015-06-30 | 2018-04-03 | Semiconductor Energy Laboratory Co., Ltd. | Logic circuit, semiconductor device, electronic component, and electronic device |
US10290573B2 (en) | 2015-07-02 | 2019-05-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9917209B2 (en) | 2015-07-03 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device including step of forming trench over semiconductor |
US10236389B2 (en) | 2015-07-03 | 2019-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US10522397B2 (en) | 2015-07-03 | 2019-12-31 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US10181531B2 (en) | 2015-07-08 | 2019-01-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including transistor having low parasitic capacitance |
US10424676B2 (en) | 2015-07-08 | 2019-09-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10276724B2 (en) | 2015-07-14 | 2019-04-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10763373B2 (en) | 2015-07-14 | 2020-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11393930B2 (en) | 2015-07-14 | 2022-07-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10501003B2 (en) | 2015-07-17 | 2019-12-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, lighting device, and vehicle |
US10985278B2 (en) | 2015-07-21 | 2021-04-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US11538928B2 (en) | 2015-07-24 | 2022-12-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11024725B2 (en) | 2015-07-24 | 2021-06-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including metal oxide film |
US11189736B2 (en) | 2015-07-24 | 2021-11-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10978489B2 (en) | 2015-07-24 | 2021-04-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display panel, method for manufacturing semiconductor device, method for manufacturing display panel, and information processing device |
US10424671B2 (en) | 2015-07-29 | 2019-09-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, circuit board, and electronic device |
US10585506B2 (en) | 2015-07-30 | 2020-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Display device with high visibility regardless of illuminance of external light |
US10367096B2 (en) | 2015-07-30 | 2019-07-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, module, and electronic device |
US9825177B2 (en) | 2015-07-30 | 2017-11-21 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of a semiconductor device using multiple etching mask |
US10019025B2 (en) | 2015-07-30 | 2018-07-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10381486B2 (en) | 2015-07-30 | 2019-08-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
US10522690B2 (en) | 2015-08-03 | 2019-12-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method of the same, and electronic device |
US9911861B2 (en) | 2015-08-03 | 2018-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method of the same, and electronic device |
US9876946B2 (en) | 2015-08-03 | 2018-01-23 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device and electronic device |
US11024692B2 (en) | 2015-08-07 | 2021-06-01 | Semiconductor Energy Laboratory Co., Ltd. | Display panel and method for driving the same |
US10290693B2 (en) | 2015-08-07 | 2019-05-14 | Semiconductor Energy Laboratory Co., Ltd. | Display panel and method for driving the same |
US9893202B2 (en) | 2015-08-19 | 2018-02-13 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
US9899424B2 (en) | 2015-08-21 | 2018-02-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10141054B2 (en) | 2015-08-21 | 2018-11-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US9666606B2 (en) | 2015-08-21 | 2017-05-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9773919B2 (en) | 2015-08-26 | 2017-09-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9935203B2 (en) | 2015-08-26 | 2018-04-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9825179B2 (en) | 2015-08-28 | 2017-11-21 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor, transistor, and semiconductor device |
US10446583B2 (en) | 2015-08-31 | 2019-10-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10483365B2 (en) | 2015-08-31 | 2019-11-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11777005B2 (en) | 2015-08-31 | 2023-10-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US11049946B2 (en) | 2015-08-31 | 2021-06-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9911756B2 (en) | 2015-08-31 | 2018-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including transistor and electronic device surrounded by layer having assigned band gap to prevent electrostatic discharge damage |
US10234983B2 (en) | 2015-09-11 | 2019-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Input/output panel, input/output device, and data processor |
US10236387B2 (en) | 2015-09-18 | 2019-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US9883129B2 (en) | 2015-09-25 | 2018-01-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9935143B2 (en) | 2015-09-30 | 2018-04-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10158008B2 (en) | 2015-10-12 | 2018-12-18 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US10031392B2 (en) | 2015-10-12 | 2018-07-24 | Semiconductor Energy Laboratory Co., Ltd. | Display panel, input/output device, data processor, and method for manufacturing display panel |
US10345668B2 (en) | 2015-10-12 | 2019-07-09 | Semiconductor Energy Laboratory Co., Ltd. | Display panel, input/output device, data processor, and method for manufacturing display panel |
US9852926B2 (en) | 2015-10-20 | 2017-12-26 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method for semiconductor device |
US10922605B2 (en) | 2015-10-23 | 2021-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US11893474B2 (en) | 2015-10-23 | 2024-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10674168B2 (en) | 2015-10-23 | 2020-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10007161B2 (en) | 2015-10-26 | 2018-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
US11776966B2 (en) | 2015-10-29 | 2023-10-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the semiconductor device |
US9922994B2 (en) | 2015-10-29 | 2018-03-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the semiconductor device |
US11101293B2 (en) | 2015-10-29 | 2021-08-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the semiconductor device |
US10665613B2 (en) | 2015-10-29 | 2020-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the semiconductor device |
US9773787B2 (en) | 2015-11-03 | 2017-09-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, memory device, electronic device, or method for driving the semiconductor device |
US9741400B2 (en) | 2015-11-05 | 2017-08-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, memory device, electronic device, and method for operating the semiconductor device |
US9785566B2 (en) | 2015-11-18 | 2017-10-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, computer, and electronic device |
US10868045B2 (en) | 2015-12-11 | 2020-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, semiconductor device, and electronic device |
US9825181B2 (en) | 2015-12-11 | 2017-11-21 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, circuit, semiconductor device, display device, and electronic device |
US10050152B2 (en) | 2015-12-16 | 2018-08-14 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, semiconductor device, and electronic device |
US10566355B2 (en) | 2015-12-18 | 2020-02-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the same |
US10177142B2 (en) | 2015-12-25 | 2019-01-08 | Semiconductor Energy Laboratory Co., Ltd. | Circuit, logic circuit, processor, electronic component, and electronic device |
US10283532B2 (en) | 2015-12-28 | 2019-05-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
US9911757B2 (en) | 2015-12-28 | 2018-03-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
US11757007B2 (en) | 2015-12-29 | 2023-09-12 | Semiconductor Energy Laboratory Co., Ltd. | Metal oxide film and semiconductor device |
US10535742B2 (en) | 2015-12-29 | 2020-01-14 | Semiconductor Energy Laboratory Co., Ltd. | Metal oxide film and semiconductor device |
US9900006B2 (en) | 2015-12-29 | 2018-02-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, computer, and electronic device |
US10020322B2 (en) | 2015-12-29 | 2018-07-10 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and semiconductor device |
US11063125B2 (en) | 2015-12-29 | 2021-07-13 | Semiconductor Energy Laboratory Co., Ltd. | Metal oxide film and semiconductor device |
US10096684B2 (en) | 2015-12-29 | 2018-10-09 | Semiconductor Energy Laboratory Co., Ltd. | Metal oxide film and semiconductor device |
US10580798B2 (en) | 2016-01-15 | 2020-03-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10865470B2 (en) | 2016-01-18 | 2020-12-15 | Semiconductor Energy Laboratory Co., Ltd. | Metal oxide film, semiconductor device, and display device |
US11352690B2 (en) | 2016-01-18 | 2022-06-07 | Semiconductor Energy Laboratory Co., Ltd. | Metal oxide film, semiconductor device, and display device |
US9905657B2 (en) | 2016-01-20 | 2018-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US10256348B2 (en) | 2016-01-20 | 2019-04-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing semiconductor device |
US9887010B2 (en) | 2016-01-21 | 2018-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, memory device, and driving method thereof |
US10411013B2 (en) | 2016-01-22 | 2019-09-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and memory device |
US10700212B2 (en) | 2016-01-28 | 2020-06-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, semiconductor wafer, module, electronic device, and manufacturing method thereof |
US10115741B2 (en) | 2016-02-05 | 2018-10-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
US10250247B2 (en) | 2016-02-10 | 2019-04-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US10693448B2 (en) | 2016-02-10 | 2020-06-23 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US10115742B2 (en) | 2016-02-12 | 2018-10-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
US10439074B2 (en) | 2016-02-12 | 2019-10-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10038100B2 (en) | 2016-02-12 | 2018-07-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US10096628B2 (en) | 2016-03-04 | 2018-10-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US10263114B2 (en) | 2016-03-04 | 2019-04-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, method for manufacturing the same, or display device including the same |
US11437524B2 (en) | 2016-03-04 | 2022-09-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, and display device including the semiconductor device |
US11869981B2 (en) | 2016-03-04 | 2024-01-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, and display device including the semiconductor device |
US10014334B2 (en) | 2016-03-08 | 2018-07-03 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device, module, and electronic device |
US10256265B2 (en) | 2016-03-08 | 2019-04-09 | Semiconductor Energy Laboratory Co., Ltd. | Imaging device, module, and electronic device |
US9882064B2 (en) | 2016-03-10 | 2018-01-30 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and electronic device |
US10096720B2 (en) | 2016-03-25 | 2018-10-09 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, semiconductor device, and electronic device |
US10430093B2 (en) | 2016-04-15 | 2019-10-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US10236875B2 (en) | 2016-04-15 | 2019-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for operating the semiconductor device |
US11068174B2 (en) | 2016-04-15 | 2021-07-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic component, and electronic device |
US11728392B2 (en) | 2016-05-19 | 2023-08-15 | Semiconductor Energy Laboratory Co., Ltd. | Composite oxide semiconductor and transistor |
US11316016B2 (en) | 2016-05-19 | 2022-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Composite oxide semiconductor and transistor |
US10879360B2 (en) | 2016-05-19 | 2020-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Composite oxide semiconductor and transistor |
US11574933B2 (en) | 2016-06-03 | 2023-02-07 | Semiconductor Energy Laboratory Co., Ltd. | Metal oxide and field-effect transistor |
US10665611B2 (en) | 2016-06-03 | 2020-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Metal oxide and field-effect transistor |
US11069717B2 (en) | 2016-06-03 | 2021-07-20 | Semiconductor Energy Laboratory Co., Ltd. | Metal oxide and field-effect transistor |
US10804272B2 (en) | 2016-06-22 | 2020-10-13 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
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