JP5064747B2 - Semiconductor device, electrophoretic display device, display module, electronic device, and method for manufacturing semiconductor device - Google Patents

Semiconductor device, electrophoretic display device, display module, electronic device, and method for manufacturing semiconductor device Download PDF

Info

Publication number
JP5064747B2
JP5064747B2 JP2006262991A JP2006262991A JP5064747B2 JP 5064747 B2 JP5064747 B2 JP 5064747B2 JP 2006262991 A JP2006262991 A JP 2006262991A JP 2006262991 A JP2006262991 A JP 2006262991A JP 5064747 B2 JP5064747 B2 JP 5064747B2
Authority
JP
Japan
Prior art keywords
film
gate electrode
oxide semiconductor
substrate
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2006262991A
Other languages
Japanese (ja)
Other versions
JP2007123861A (en
JP2007123861A5 (en
Inventor
寛人 曽根
達也 本田
健吾 秋元
Original Assignee
株式会社半導体エネルギー研究所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2005283782 priority Critical
Priority to JP2005283782 priority
Application filed by 株式会社半導体エネルギー研究所 filed Critical 株式会社半導体エネルギー研究所
Priority to JP2006262991A priority patent/JP5064747B2/en
Publication of JP2007123861A publication Critical patent/JP2007123861A/en
Publication of JP2007123861A5 publication Critical patent/JP2007123861A5/ja
Application granted granted Critical
Publication of JP5064747B2 publication Critical patent/JP5064747B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links