TWI263617B - Ozone generator and ozone generation method - Google Patents
Ozone generator and ozone generation methodInfo
- Publication number
- TWI263617B TWI263617B TW093139287A TW93139287A TWI263617B TW I263617 B TWI263617 B TW I263617B TW 093139287 A TW093139287 A TW 093139287A TW 93139287 A TW93139287 A TW 93139287A TW I263617 B TWI263617 B TW I263617B
- Authority
- TW
- Taiwan
- Prior art keywords
- ozone
- generation method
- mpa
- photo
- nitrogen
- Prior art date
Links
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 title abstract 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 4
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 abstract 2
- 229910001882 dioxygen Inorganic materials 0.000 abstract 2
- 239000007789 gas Substances 0.000 abstract 2
- 229910052757 nitrogen Inorganic materials 0.000 abstract 2
- 239000011941 photocatalyst Substances 0.000 abstract 2
- 239000002994 raw material Substances 0.000 abstract 2
- 239000006227 byproduct Substances 0.000 abstract 1
- 239000003792 electrolyte Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
- C01B13/11—Preparation of ozone by electric discharge
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J35/00—Catalysts, in general, characterised by their form or physical properties
- B01J35/30—Catalysts, in general, characterised by their form or physical properties characterised by their physical properties
- B01J35/39—Photocatalytic properties
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/10—Dischargers used for production of ozone
- C01B2201/12—Plate-type dischargers
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/30—Dielectrics used in the electrical dischargers
- C01B2201/32—Constructional details of the dielectrics
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/30—Dielectrics used in the electrical dischargers
- C01B2201/34—Composition of the dielectrics
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/60—Feed streams for electrical dischargers
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/60—Feed streams for electrical dischargers
- C01B2201/64—Oxygen
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/70—Cooling of the discharger; Means for making cooling unnecessary
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/80—Additional processes occurring alongside the electrical discharges, e.g. catalytic processes
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/80—Additional processes occurring alongside the electrical discharges, e.g. catalytic processes
- C01B2201/82—Treatment with ultraviolet light
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/90—Control of the process
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Catalysts (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004050009 | 2004-02-25 | ||
| PCT/JP2004/009277 WO2005080264A1 (ja) | 2004-02-25 | 2004-06-24 | オゾン発生装置およびオゾン発生方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200530120A TW200530120A (en) | 2005-09-16 |
| TWI263617B true TWI263617B (en) | 2006-10-11 |
Family
ID=34879570
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW093117883A TW200528390A (en) | 2004-02-25 | 2004-06-21 | Apparatus and method of producing ozone gas |
| TW093139287A TWI263617B (en) | 2004-02-25 | 2004-12-17 | Ozone generator and ozone generation method |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW093117883A TW200528390A (en) | 2004-02-25 | 2004-06-21 | Apparatus and method of producing ozone gas |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7382087B2 (zh) |
| EP (2) | EP1719735B1 (zh) |
| JP (5) | JP4953814B2 (zh) |
| KR (1) | KR100756797B1 (zh) |
| CN (1) | CN100364882C (zh) |
| TW (2) | TW200528390A (zh) |
| WO (2) | WO2005080264A1 (zh) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI449660B (zh) * | 2011-04-13 | 2014-08-21 | Toshiba Mitsubishi Elec Inc | 無添加氮之臭氧產生單元及臭氧氣體供給系統 |
| TWI455870B (zh) * | 2011-03-24 | 2014-10-11 | Toshiba Mitsubishi Elec Inc | 臭氧氣體供給系統 |
| TWI615351B (zh) * | 2015-12-08 | 2018-02-21 | 東芝三菱電機產業系統股份有限公司 | 臭氧產生方法 |
Families Citing this family (59)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3642572B2 (ja) * | 2003-05-09 | 2005-04-27 | 東芝三菱電機産業システム株式会社 | オゾン発生装置およびオゾン発生方法 |
| WO2007010594A1 (ja) * | 2005-07-15 | 2007-01-25 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | 光触媒物質生成方法および光触媒物質生成装置 |
| JP4948007B2 (ja) * | 2006-03-22 | 2012-06-06 | 住友精密工業株式会社 | オゾン発生装置用放電セル |
| US7691342B2 (en) * | 2006-04-28 | 2010-04-06 | The United States Of America As Represented By The U.S. Environmental Protection Agency | Process using compact embedded electron induced ozonation and activation of nanostructured titanium dioxide photocatalyst for photocatalytic oxidation |
| CN100411974C (zh) * | 2006-08-10 | 2008-08-20 | 中国科学技术大学 | 一种臭氧产生方法和臭氧发生装置 |
| US20080128269A1 (en) * | 2006-11-30 | 2008-06-05 | Sumitomo Precision Products Co., Ltd. | Discharge cell for ozonizer |
| JP5210596B2 (ja) * | 2007-11-02 | 2013-06-12 | メタウォーター株式会社 | オゾン発生装置 |
| JP5283400B2 (ja) * | 2008-03-05 | 2013-09-04 | 住友精密工業株式会社 | オゾン発生装置用放電セル |
| JP2009233590A (ja) * | 2008-03-27 | 2009-10-15 | National Institute Of Advanced Industrial & Technology | 有害物質処理方法とその装置 |
| ITRM20090003A1 (it) * | 2009-01-07 | 2010-07-08 | Alessio Benedetti | Produttore di ozono da ossigeno puro prelevato da bombole o dewar con immissione in atmosfera per disinfestazioni e disinfezioni ambientali |
| US8337674B2 (en) * | 2009-01-23 | 2012-12-25 | Air Products And Chemicals, Inc. | Ozone production by pressure swing adsorption using a noble gas additive |
| US9193591B2 (en) * | 2009-10-02 | 2015-11-24 | Sumitomo Precision Products Co., Ltd. | Ozone gas generator and method for manufacturing the same |
| JP2011121805A (ja) * | 2009-12-09 | 2011-06-23 | Iwatani Internatl Corp | オゾンガスに含まれる窒素酸化物および水分の除去方法 |
| JP5438818B2 (ja) * | 2010-03-02 | 2014-03-12 | 三菱電機株式会社 | オゾン発生装置およびオゾン発生方法 |
| US20110220148A1 (en) * | 2010-03-12 | 2011-09-15 | Tokyo Electron Limited | Method for performing preventative maintenance in a substrate processing system |
| CZ2010448A3 (cs) * | 2010-06-07 | 2011-05-04 | Ceské vysoké ucení technické v Praze Fakulta elektrotechnická | Generátor aktivních kyslíkových cástic |
| CN102000503A (zh) * | 2010-12-10 | 2011-04-06 | 武汉慧邦环境工程技术有限公司 | 燃煤电厂光催化氧化烟气脱硫脱硝系统 |
| US20120234392A1 (en) * | 2011-03-17 | 2012-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device |
| US9039985B2 (en) | 2011-06-06 | 2015-05-26 | Mks Instruments, Inc. | Ozone generator |
| KR101596178B1 (ko) * | 2011-10-04 | 2016-02-19 | 도시바 미쓰비시덴키 산교시스템 가부시키가이샤 | 질소 첨가리스·오존 발생 유닛 |
| JP5676532B2 (ja) * | 2012-08-07 | 2015-02-25 | 東芝三菱電機産業システム株式会社 | 光触媒物質生成方法および光触媒物質生成装置 |
| CN104105659B (zh) * | 2012-08-30 | 2016-09-07 | 东芝三菱电机产业系统株式会社 | 臭氧生成系统 |
| KR20140043609A (ko) * | 2012-10-02 | 2014-04-10 | 엘지전자 주식회사 | 이온 발생기 |
| US9153427B2 (en) * | 2012-12-18 | 2015-10-06 | Agilent Technologies, Inc. | Vacuum ultraviolet photon source, ionization apparatus, and related methods |
| US9768016B2 (en) * | 2013-07-02 | 2017-09-19 | Ultratech, Inc. | Formation of heteroepitaxial layers with rapid thermal processing to remove lattice dislocations |
| JP6734621B2 (ja) | 2014-02-20 | 2020-08-05 | オルガノ株式会社 | オゾン水供給方法及びオゾン水供給装置 |
| GB2576262A (en) * | 2014-06-25 | 2020-02-12 | Ultratech Inc | Formation of heteroepitaxial layers with rapid thermal processing to remove lattice dislocations |
| US9318319B2 (en) | 2014-08-27 | 2016-04-19 | Ultratech, Inc. | Radical-enhanced atomic layer deposition using CF4 to enhance oxygen radical generation |
| US10544045B2 (en) * | 2014-09-22 | 2020-01-28 | Mitsubishi Electric Corporation | Ozone generation system and method for operating same |
| US10384939B2 (en) | 2014-10-29 | 2019-08-20 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | Ozone generation apparatus |
| CN104451600B (zh) * | 2014-12-04 | 2017-01-18 | 华东师范大学 | 一种氧化铋薄膜材料的制备方法 |
| US10035718B2 (en) * | 2015-01-20 | 2018-07-31 | Mitsubishi Electric Corporation | Water treatment apparatus and water treatment method |
| JP6534544B2 (ja) * | 2015-03-18 | 2019-06-26 | 住友精密工業株式会社 | オゾンガス発生装置およびオゾンガス発生装置の製造方法 |
| TWI548588B (zh) * | 2015-03-23 | 2016-09-11 | 財團法人工業技術研究院 | 臭氧產生裝置 |
| DE112016002204T5 (de) * | 2015-06-08 | 2018-02-22 | Murata Manufacturing Co., Ltd. | Ozonerzeugungsvorrichtung |
| US10869502B2 (en) * | 2015-07-31 | 2020-12-22 | 14Th Round Inc. | Disposable assembly for vaporizing e-liquid and a method of using the same |
| CN205143486U (zh) * | 2015-09-02 | 2016-04-13 | 深圳市合元科技有限公司 | 雾化头、雾化器及电子烟 |
| CN105271129B (zh) * | 2015-09-30 | 2017-09-29 | 南京华伯新材料有限公司 | 一种高浓度臭氧发生装置 |
| JP6589666B2 (ja) * | 2016-02-01 | 2019-10-16 | 株式会社デンソー | オゾン発生装置 |
| JP6374902B2 (ja) * | 2016-03-25 | 2018-08-15 | 住友精密工業株式会社 | オゾンガス発生装置およびオゾンガス発生装置の製造方法 |
| JP6584995B2 (ja) * | 2016-04-14 | 2019-10-02 | 東芝三菱電機産業システム株式会社 | オゾン発生器及びオゾン発生方法 |
| WO2018012242A1 (ja) * | 2016-07-14 | 2018-01-18 | 株式会社村田製作所 | オゾン発生装置 |
| GB2554099A (en) * | 2016-09-20 | 2018-03-28 | Anacail Ltd | Use of gas mixtures comprising oxygen for the production of ozone |
| US10143763B2 (en) | 2016-10-06 | 2018-12-04 | Alfonso Campalans | Neutral atmosphere and sanitization storage apparatus, method and system |
| JP6723661B2 (ja) * | 2017-05-16 | 2020-07-15 | 東芝三菱電機産業システム株式会社 | オゾンガス発生装置 |
| EP3422124A1 (en) | 2017-06-30 | 2019-01-02 | SUEZ Groupe | Method for controlling an ozone generating machine |
| KR102387225B1 (ko) | 2017-08-09 | 2022-04-18 | 도시바 미쓰비시덴키 산교시스템 가부시키가이샤 | 오존 가스 이용 시스템 |
| JP2019182677A (ja) * | 2018-04-03 | 2019-10-24 | 株式会社豊田中央研究所 | オゾン発生器 |
| WO2019225033A1 (ja) * | 2018-05-21 | 2019-11-28 | 東芝三菱電機産業システム株式会社 | オゾンガス発生システム及びオゾンガス発生方法 |
| US10928265B2 (en) * | 2018-05-29 | 2021-02-23 | Mks Instruments, Inc. | Gas analysis with an inverted magnetron source |
| JP7154708B2 (ja) * | 2018-12-20 | 2022-10-18 | 東芝三菱電機産業システム株式会社 | オゾンガス利用システム |
| CN110407177A (zh) * | 2019-08-12 | 2019-11-05 | 中国科学院城市环境研究所 | 一种促进臭氧生成的方法 |
| CN115427348B (zh) * | 2020-04-09 | 2024-03-01 | 三菱电机株式会社 | 氧自由基产生装置及氧自由基产生方法 |
| US11875974B2 (en) * | 2020-05-30 | 2024-01-16 | Preservation Tech, LLC | Multi-channel plasma reaction cell |
| CN114763321A (zh) * | 2021-01-12 | 2022-07-19 | 万华化学集团股份有限公司 | 一种臭氧组合物及其制备方法，及一种反应精馏制备乙醛酸的方法 |
| CN115594152A (zh) * | 2021-07-09 | 2023-01-13 | 财团法人工业技术研究院（Tw） | 臭氧产生装置以及臭氧产生方法 |
| JP7383087B1 (ja) | 2022-07-15 | 2023-11-17 | 日本特殊陶業株式会社 | オゾン発生器 |
| CN115253672B (zh) * | 2022-08-17 | 2024-05-10 | 中国科学院生态环境研究中心 | 一种用于气固相反应的光电催化器件和用途 |
| CN116553482A (zh) * | 2023-05-23 | 2023-08-08 | 苏州晶拓半导体科技有限公司 | 无氮添加高浓度臭氧发生装置及其制备方法 |
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| JP2004217512A (ja) * | 2002-12-27 | 2004-08-05 | Sumitomo Precision Prod Co Ltd | オゾン発生方法 |
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| JP3995665B2 (ja) * | 2004-05-14 | 2007-10-24 | 住友精密工業株式会社 | オゾン発生装置用誘電体 |
-
2004
- 2004-06-21 TW TW093117883A patent/TW200528390A/zh unknown
- 2004-06-24 WO PCT/JP2004/009277 patent/WO2005080264A1/ja active Application Filing
- 2004-12-14 JP JP2006519306A patent/JP4953814B2/ja active Active
- 2004-12-14 EP EP04807008.0A patent/EP1719735B1/en active Active
- 2004-12-14 KR KR1020057013744A patent/KR100756797B1/ko active IP Right Grant
- 2004-12-14 CN CNB2004800098362A patent/CN100364882C/zh active Active
- 2004-12-14 EP EP10187763A patent/EP2287114B1/en active Active
- 2004-12-14 US US10/538,780 patent/US7382087B2/en active Active
- 2004-12-14 WO PCT/JP2004/018647 patent/WO2005080263A1/ja active Application Filing
- 2004-12-17 TW TW093139287A patent/TWI263617B/zh active
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2011
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI455870B (zh) * | 2011-03-24 | 2014-10-11 | Toshiba Mitsubishi Elec Inc | 臭氧氣體供給系統 |
| US8980189B2 (en) | 2011-03-24 | 2015-03-17 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | Ozone gas supply system |
| TWI449660B (zh) * | 2011-04-13 | 2014-08-21 | Toshiba Mitsubishi Elec Inc | 無添加氮之臭氧產生單元及臭氧氣體供給系統 |
| US9067789B2 (en) | 2011-04-13 | 2015-06-30 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | Nitrogen-free ozone generation unit and ozone gas supply system |
| TWI615351B (zh) * | 2015-12-08 | 2018-02-21 | 東芝三菱電機產業系統股份有限公司 | 臭氧產生方法 |
| US10745277B2 (en) | 2015-12-08 | 2020-08-18 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | Ozone generating method |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20060012568A (ko) | 2006-02-08 |
| JP4953814B2 (ja) | 2012-06-13 |
| JPWO2005080263A1 (ja) | 2008-01-10 |
| EP2287114A2 (en) | 2011-02-23 |
| WO2005080263A1 (ja) | 2005-09-01 |
| TW200530120A (en) | 2005-09-16 |
| JP4825314B2 (ja) | 2011-11-30 |
| EP2287114A3 (en) | 2011-03-02 |
| TW200528390A (en) | 2005-09-01 |
| JP4932037B2 (ja) | 2012-05-16 |
| EP2287114B1 (en) | 2012-08-29 |
| EP1719735A4 (en) | 2009-11-11 |
| JP5121944B2 (ja) | 2013-01-16 |
| CN1774394A (zh) | 2006-05-17 |
| JP2011088821A (ja) | 2011-05-06 |
| US7382087B2 (en) | 2008-06-03 |
| EP1719735A1 (en) | 2006-11-08 |
| CN100364882C (zh) | 2008-01-30 |
| KR100756797B1 (ko) | 2007-09-07 |
| JP2011063512A (ja) | 2011-03-31 |
| US20060049738A1 (en) | 2006-03-09 |
| JP5069800B2 (ja) | 2012-11-07 |
| JP2011098886A (ja) | 2011-05-19 |
| JP2011063511A (ja) | 2011-03-31 |
| EP1719735B1 (en) | 2015-09-02 |
| WO2005080264A1 (ja) | 2005-09-01 |
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