SG159379A1 - Contactor - Google Patents
ContactorInfo
- Publication number
- SG159379A1 SG159379A1 SG200503560-5A SG2005035605A SG159379A1 SG 159379 A1 SG159379 A1 SG 159379A1 SG 2005035605 A SG2005035605 A SG 2005035605A SG 159379 A1 SG159379 A1 SG 159379A1
- Authority
- SG
- Singapore
- Prior art keywords
- wafer
- contactor
- storage section
- totally
- wafer storage
- Prior art date
Links
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000005259 measurement Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2862—Chambers or ovens; Tanks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0433—Sockets for IC's or transistors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0491—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets for testing integrated circuits on wafers, e.g. wafer-level test cartridge
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
- G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
- G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2868—Complete testing stations; systems; procedures; software aspects
- G01R31/287—Procedures; Software aspects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
- Measuring Leads Or Probes (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001367268A JP4173306B2 (ja) | 2001-11-30 | 2001-11-30 | 信頼性評価試験装置、信頼性評価試験システム及び信頼性評価試験方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
SG159379A1 true SG159379A1 (en) | 2010-03-30 |
Family
ID=19177043
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200503560-5A SG159379A1 (en) | 2001-11-30 | 2002-11-27 | Contactor |
SG200503524A SG127775A1 (en) | 2001-11-30 | 2002-11-27 | Reliability evaluation test apparatus, reliabilityevaluation test system, contactor, and reliabilit y evaluation test method |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200503524A SG127775A1 (en) | 2001-11-30 | 2002-11-27 | Reliability evaluation test apparatus, reliabilityevaluation test system, contactor, and reliabilit y evaluation test method |
Country Status (9)
Country | Link |
---|---|
US (3) | US7091733B2 (ja) |
EP (2) | EP1696479A1 (ja) |
JP (1) | JP4173306B2 (ja) |
KR (2) | KR100682194B1 (ja) |
CN (2) | CN100521134C (ja) |
DE (1) | DE60226484D1 (ja) |
SG (2) | SG159379A1 (ja) |
TW (1) | TWI298917B (ja) |
WO (1) | WO2003046976A1 (ja) |
Families Citing this family (65)
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US7487064B2 (en) * | 2003-07-18 | 2009-02-03 | Chartered Semiconductor Manufacturing, Ltd. | Method for detecting and monitoring defects |
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US7605581B2 (en) | 2005-06-16 | 2009-10-20 | Delta Design, Inc. | Apparatus and method for controlling die force in a semiconductor device testing assembly |
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CN113053774A (zh) * | 2019-12-27 | 2021-06-29 | 迪科特测试科技(苏州)有限公司 | 探测装置 |
FR3106661B1 (fr) | 2020-01-28 | 2022-01-21 | Ateq | Dispositif de détection de fuites |
CN116840646A (zh) * | 2023-07-05 | 2023-10-03 | 苏州联讯仪器股份有限公司 | 一种可靠性测试夹具 |
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- 2002-11-27 EP EP06009917A patent/EP1696479A1/en not_active Withdrawn
- 2002-11-27 SG SG200503560-5A patent/SG159379A1/en unknown
- 2002-11-27 KR KR1020067002745A patent/KR100682194B1/ko not_active IP Right Cessation
- 2002-11-27 CN CNB028211103A patent/CN100521134C/zh not_active Expired - Fee Related
- 2002-11-27 KR KR1020047005962A patent/KR100600154B1/ko not_active IP Right Cessation
- 2002-11-27 DE DE60226484T patent/DE60226484D1/de not_active Expired - Fee Related
- 2002-11-27 WO PCT/JP2002/012348 patent/WO2003046976A1/ja active IP Right Grant
- 2002-11-27 EP EP02788667A patent/EP1455388B1/en not_active Expired - Lifetime
- 2002-11-27 CN CN2006101318303A patent/CN101126768B/zh not_active Expired - Fee Related
- 2002-11-27 SG SG200503524A patent/SG127775A1/en unknown
- 2002-11-29 TW TW091134873A patent/TWI298917B/zh not_active IP Right Cessation
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2004
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2005
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2007
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Also Published As
Publication number | Publication date |
---|---|
US8456186B2 (en) | 2013-06-04 |
US20040183561A1 (en) | 2004-09-23 |
KR20060024461A (ko) | 2006-03-16 |
KR20040047948A (ko) | 2004-06-05 |
JP2003168709A (ja) | 2003-06-13 |
JP4173306B2 (ja) | 2008-10-29 |
US20080018355A1 (en) | 2008-01-24 |
CN100521134C (zh) | 2009-07-29 |
TW200304191A (en) | 2003-09-16 |
TWI298917B (en) | 2008-07-11 |
EP1696479A1 (en) | 2006-08-30 |
KR100682194B1 (ko) | 2007-02-12 |
DE60226484D1 (de) | 2008-06-19 |
SG127775A1 (en) | 2006-12-29 |
CN101126768B (zh) | 2010-05-12 |
EP1455388A4 (en) | 2005-10-19 |
CN1575514A (zh) | 2005-02-02 |
WO2003046976A1 (fr) | 2003-06-05 |
US7091733B2 (en) | 2006-08-15 |
US7242206B2 (en) | 2007-07-10 |
KR100600154B1 (ko) | 2006-07-12 |
CN101126768A (zh) | 2008-02-20 |
US20050253575A1 (en) | 2005-11-17 |
EP1455388B1 (en) | 2008-05-07 |
EP1455388A1 (en) | 2004-09-08 |
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