FR2780792B1 - Appareillage de test de puces electroniques - Google Patents

Appareillage de test de puces electroniques

Info

Publication number
FR2780792B1
FR2780792B1 FR9808561A FR9808561A FR2780792B1 FR 2780792 B1 FR2780792 B1 FR 2780792B1 FR 9808561 A FR9808561 A FR 9808561A FR 9808561 A FR9808561 A FR 9808561A FR 2780792 B1 FR2780792 B1 FR 2780792B1
Authority
FR
France
Prior art keywords
testing apparatus
electronic chip
chip testing
electronic
testing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9808561A
Other languages
English (en)
Other versions
FR2780792A1 (fr
Inventor
Thierry Lieutard
Bernard Faure
Rene Monnet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
Original Assignee
STMicroelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SA filed Critical STMicroelectronics SA
Priority to FR9808561A priority Critical patent/FR2780792B1/fr
Priority to US09/346,880 priority patent/US6580282B1/en
Publication of FR2780792A1 publication Critical patent/FR2780792A1/fr
Application granted granted Critical
Publication of FR2780792B1 publication Critical patent/FR2780792B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/44—Modifications of instruments for temperature compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
FR9808561A 1998-07-03 1998-07-03 Appareillage de test de puces electroniques Expired - Fee Related FR2780792B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR9808561A FR2780792B1 (fr) 1998-07-03 1998-07-03 Appareillage de test de puces electroniques
US09/346,880 US6580282B1 (en) 1998-07-03 1999-07-02 Machine for testing electronic chips

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9808561A FR2780792B1 (fr) 1998-07-03 1998-07-03 Appareillage de test de puces electroniques

Publications (2)

Publication Number Publication Date
FR2780792A1 FR2780792A1 (fr) 2000-01-07
FR2780792B1 true FR2780792B1 (fr) 2000-09-22

Family

ID=9528254

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9808561A Expired - Fee Related FR2780792B1 (fr) 1998-07-03 1998-07-03 Appareillage de test de puces electroniques

Country Status (2)

Country Link
US (1) US6580282B1 (fr)
FR (1) FR2780792B1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6972578B2 (en) 2001-11-02 2005-12-06 Formfactor, Inc. Method and system for compensating thermally induced motion of probe cards
US7071714B2 (en) 2001-11-02 2006-07-04 Formfactor, Inc. Method and system for compensating for thermally induced motion of probe cards
JP4173306B2 (ja) * 2001-11-30 2008-10-29 東京エレクトロン株式会社 信頼性評価試験装置、信頼性評価試験システム及び信頼性評価試験方法
US9577667B2 (en) 2002-04-23 2017-02-21 Ntt Docomo, Inc. System and method for arithmetic encoding and decoding
JP4252532B2 (ja) * 2002-04-23 2009-04-08 株式会社エヌ・ティ・ティ・ドコモ 算術的符号化及び復号のためのシステム及び方法
KR100790817B1 (ko) * 2006-12-06 2008-01-03 삼성전자주식회사 반도체 제조관리 시스템
JP5535492B2 (ja) * 2009-02-12 2014-07-02 ラピスセミコンダクタ株式会社 半導体集積回路の検査装置及び半導体集積回路の検査方法
JP6031238B2 (ja) * 2012-03-09 2016-11-24 東京エレクトロン株式会社 ウエハ検査用インターフェース及びウエハ検査装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3963985A (en) * 1974-12-12 1976-06-15 International Business Machines Corporation Probe device having probe heads and method of adjusting distances between probe heads
US5198752A (en) * 1987-09-02 1993-03-30 Tokyo Electron Limited Electric probing-test machine having a cooling system
US4962355A (en) * 1988-10-27 1990-10-09 The United States Of America As Represented By The Secretary Of The Army Thermal test chamber device
US5124639A (en) * 1990-11-20 1992-06-23 Motorola, Inc. Probe card apparatus having a heating element and process for using the same
US5325052A (en) * 1990-11-30 1994-06-28 Tokyo Electron Yamanashi Limited Probe apparatus
US5321352A (en) * 1991-08-01 1994-06-14 Tokyo Electron Yamanashi Limited Probe apparatus and method of alignment for the same
KR100196195B1 (ko) * 1991-11-18 1999-06-15 이노우에 쥰이치 프로우브 카드
US5479109A (en) * 1992-06-03 1995-12-26 Trw Inc. Testing device for integrated circuits on wafer
JP3066784B2 (ja) * 1992-12-14 2000-07-17 東京エレクトロン株式会社 プローブカード及びその製造方法
JPH0792479B2 (ja) * 1993-03-18 1995-10-09 東京エレクトロン株式会社 プローブ装置の平行度調整方法
US5510724A (en) * 1993-05-31 1996-04-23 Tokyo Electron Limited Probe apparatus and burn-in apparatus
US5550482A (en) * 1993-07-20 1996-08-27 Tokyo Electron Kabushiki Kaisha Probe device
JPH11145215A (ja) * 1997-11-11 1999-05-28 Mitsubishi Electric Corp 半導体検査装置およびその制御方法
US6073681A (en) * 1997-12-31 2000-06-13 Temptronic Corporation Workpiece chuck

Also Published As

Publication number Publication date
US6580282B1 (en) 2003-06-17
FR2780792A1 (fr) 2000-01-07

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20080331