SG79979A1 - Semiconductor integrated circuit testing apparatus - Google Patents

Semiconductor integrated circuit testing apparatus

Info

Publication number
SG79979A1
SG79979A1 SG9801376A SG1998001376A SG79979A1 SG 79979 A1 SG79979 A1 SG 79979A1 SG 9801376 A SG9801376 A SG 9801376A SG 1998001376 A SG1998001376 A SG 1998001376A SG 79979 A1 SG79979 A1 SG 79979A1
Authority
SG
Singapore
Prior art keywords
integrated circuit
semiconductor integrated
testing apparatus
circuit testing
semiconductor
Prior art date
Application number
SG9801376A
Inventor
Hayama Hisao
Goto Toshio
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Publication of SG79979A1 publication Critical patent/SG79979A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/01—Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3177—Testing of logic operation, e.g. by logic analysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67333—Trays for chips
SG9801376A 1997-06-13 1998-06-09 Semiconductor integrated circuit testing apparatus SG79979A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9156925A JPH112657A (en) 1997-06-13 1997-06-13 Complex ic tester

Publications (1)

Publication Number Publication Date
SG79979A1 true SG79979A1 (en) 2001-04-17

Family

ID=15638376

Family Applications (1)

Application Number Title Priority Date Filing Date
SG9801376A SG79979A1 (en) 1997-06-13 1998-06-09 Semiconductor integrated circuit testing apparatus

Country Status (6)

Country Link
JP (1) JPH112657A (en)
KR (1) KR19990006956A (en)
CN (1) CN1218183A (en)
DE (1) DE19826314A1 (en)
SG (1) SG79979A1 (en)
TW (1) TW376456B (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW490564B (en) * 1999-02-01 2002-06-11 Mirae Corp A carrier handling apparatus for module IC handler, and method thereof
DE19916346C2 (en) * 1999-04-12 2003-12-18 Helmuth Heigl Device for feeding electronic components
DE19921246C2 (en) * 1999-05-07 2003-06-12 Infineon Technologies Ag Plant for the production of semiconductor products
DE19922936B4 (en) * 1999-05-19 2004-04-29 Infineon Technologies Ag Plant for processing wafers
DE10060438B4 (en) 2000-12-05 2004-09-09 Infineon Technologies Ag Test arrangement for parallel testing of a plurality of integrated circuits and test methods
WO2004108366A1 (en) * 2003-06-06 2004-12-16 Advantest Corporation Transport device, electronic component handling device, and transporting method for electronic component handling device
CN1328590C (en) * 2003-07-01 2007-07-25 台北歆科科技有限公司 Testing arrangement for universal type semiconductor detector
JP4694983B2 (en) * 2006-02-10 2011-06-08 ヤマハ発動機株式会社 Surface mount machine
WO2008050442A1 (en) * 2006-10-27 2008-05-02 Advantest Corporation Electronic component testing apparatus
CN101290330B (en) * 2007-04-16 2010-06-23 普诚科技股份有限公司 Circuit testing device
CN101452010B (en) * 2007-11-30 2011-12-14 上海华虹Nec电子有限公司 Probe card for testing chip and test method thereof
CN102636739B (en) * 2012-03-20 2014-08-13 杭州长川科技有限公司 Multi-station positioning device for testing integrated circuits
CN103616611B (en) * 2013-11-07 2016-08-17 珠海市运泰利自动化设备有限公司 A kind of loop test equipment
CN109085444B (en) * 2018-08-08 2020-11-03 广东电网有限责任公司广州供电局 Transfer box and lightning arrester detection device thereof
CN110723523B (en) * 2019-10-23 2021-10-22 珠海格力智能装备有限公司 Control method, device and system of board collecting machine

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0410464A2 (en) * 1989-07-27 1991-01-30 Nec Corporation Semiconductor memory device having diagnostic circuit for memory cells
EP0631149A1 (en) * 1993-06-11 1994-12-28 International Business Machines Corporation Method and apparatus for testing of integrated circuit chips
JPH10340937A (en) * 1997-06-10 1998-12-22 Advantest Corp Composite ic test system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0410464A2 (en) * 1989-07-27 1991-01-30 Nec Corporation Semiconductor memory device having diagnostic circuit for memory cells
EP0631149A1 (en) * 1993-06-11 1994-12-28 International Business Machines Corporation Method and apparatus for testing of integrated circuit chips
JPH10340937A (en) * 1997-06-10 1998-12-22 Advantest Corp Composite ic test system

Also Published As

Publication number Publication date
CN1218183A (en) 1999-06-02
DE19826314A1 (en) 1998-12-24
KR19990006956A (en) 1999-01-25
TW376456B (en) 1999-12-11
JPH112657A (en) 1999-01-06

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