KR20080059538A - 몰드, 임프린트 장치, 임프린트방법 및 구조체의 제조방법 - Google Patents
몰드, 임프린트 장치, 임프린트방법 및 구조체의 제조방법 Download PDFInfo
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- KR20080059538A KR20080059538A KR1020080053161A KR20080053161A KR20080059538A KR 20080059538 A KR20080059538 A KR 20080059538A KR 1020080053161 A KR1020080053161 A KR 1020080053161A KR 20080053161 A KR20080053161 A KR 20080053161A KR 20080059538 A KR20080059538 A KR 20080059538A
- Authority
- KR
- South Korea
- Prior art keywords
- mold
- resin material
- imprint
- substrate
- photocurable resin
- Prior art date
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0888—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using transparant moulds
- B29C35/0894—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using transparant moulds provided with masks or diaphragms
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2012—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image using liquid photohardening compositions, e.g. for the production of reliefs such as flexographic plates or stamps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
- B29C2035/0827—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using UV radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
- B29C2059/023—Microembossing
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
Abstract
Description
Claims (5)
- 몰드와, 제1경화성 수지재료가 도포된 기판을 대향시켜 배치하는 공정과;기판상에서 제1가공영역을 결정하는 공정과;몰드에 형성된 임프린트배선이 반전되는 형상으로 제1가공영역의 제1광경화성 수지재료를 변형시키는 공정과;제1가공영역의 제1광경화성 수지재료를 노광에 의해 경화시키는 공정과;경화된 수지재료와 몰드를 서로 분리시키는 공정과;제1가공영역과 중첩되지 않는 제2가공영역을 결정하는 공정과;몰드와, 기판 상에 도포된 제2광경화성수지를 대향시켜 배치하는 공정과;몰드에 형성된 임프린트배선이 반전되는 형상으로 제2가공영역의 제2광경화성수지재료를 변형시키는 공정과;제1가공영역의 경화된 수지재료가 제2가공영역에서 다시 노광되지 않는 상태에서 제2가공영역의 제2광경화성 수지재료를 노광에 의해 경화시키는 공정과;제2가공영역에서 경화된 수지와 몰드를 서로 분리시키는 공정을 포함하는 것을 특징으로 하는 임프린트 방법.
- 제 1항에 있어서, 제1가공영역으로부터 제1가공영역의 외부로 흐르는 제1광경화성 수지의 일부가 노광되지 않는 상태에서 제1가공영역의 제1광경화성수지재료가 노광에 의해 경화되는 것을 특징으로 하는 임프린트 방법.
- 제 2항에 있어서, 제1가공영역으로부터 제1가공영역의 외부로 흐르는 제1광경화성 수지재료의 일부인 미경화된 광경화성 수지재료가 제거된 후에 제2가공영역의 제2광경화성 수지재료가 경화되는 것을 특징으로 하는 임프린트 방법.
- 제 1항 내지 제 3항 중 어느 한 항에 있어서, 제1 및 제2 광경화성 수지재료는 제1및 제2가공영역에 대하여 각각 기판 상에 별도로 도포되는 것을 특징으로 하는 임프린트 방법.
- 제 1항 내지 제 3항 중 어느 한 항에 있어서, 제1 및 제2 광경화성 수지재료는 제1 및 제2가공영역을 포함하는 기판 표면에 공동으로 도포되는 것을 특징으로 하는 임프린트 방법.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JPJP-P-2005-00257431 | 2005-09-06 | ||
JP2005257431 | 2005-09-06 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
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KR1020060085408A Division KR100907573B1 (ko) | 2005-09-06 | 2006-09-06 | 몰드, 임프린트 장치 및 구조체의 제조방법 |
Publications (2)
Publication Number | Publication Date |
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KR20080059538A true KR20080059538A (ko) | 2008-06-30 |
KR100886038B1 KR100886038B1 (ko) | 2009-02-26 |
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KR1020060085408A KR100907573B1 (ko) | 2005-09-06 | 2006-09-06 | 몰드, 임프린트 장치 및 구조체의 제조방법 |
KR1020080053161A KR100886038B1 (ko) | 2005-09-06 | 2008-06-05 | 몰드, 임프린트 장치, 임프린트방법 및 구조체의 제조방법 |
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KR1020060085408A KR100907573B1 (ko) | 2005-09-06 | 2006-09-06 | 몰드, 임프린트 장치 및 구조체의 제조방법 |
Country Status (6)
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US (2) | US8011916B2 (ko) |
EP (2) | EP1942374B1 (ko) |
JP (2) | JP4262271B2 (ko) |
KR (2) | KR100907573B1 (ko) |
CN (2) | CN1928712B (ko) |
AT (1) | ATE551631T1 (ko) |
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2006
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JP4869263B2 (ja) | 2012-02-08 |
CN101666974B (zh) | 2012-09-26 |
JP2008168641A (ja) | 2008-07-24 |
US20070054097A1 (en) | 2007-03-08 |
JP4262271B2 (ja) | 2009-05-13 |
JP2007103924A (ja) | 2007-04-19 |
KR20070027467A (ko) | 2007-03-09 |
CN1928712B (zh) | 2011-02-16 |
EP1942374A1 (en) | 2008-07-09 |
CN101666974A (zh) | 2010-03-10 |
EP1762893B1 (en) | 2012-11-14 |
KR100907573B1 (ko) | 2009-07-14 |
US20110284499A1 (en) | 2011-11-24 |
ATE551631T1 (de) | 2012-04-15 |
EP1762893A1 (en) | 2007-03-14 |
CN1928712A (zh) | 2007-03-14 |
KR100886038B1 (ko) | 2009-02-26 |
US8011916B2 (en) | 2011-09-06 |
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