JPWO2021187573A1 - - Google Patents

Info

Publication number
JPWO2021187573A1
JPWO2021187573A1 JP2021545721A JP2021545721A JPWO2021187573A1 JP WO2021187573 A1 JPWO2021187573 A1 JP WO2021187573A1 JP 2021545721 A JP2021545721 A JP 2021545721A JP 2021545721 A JP2021545721 A JP 2021545721A JP WO2021187573 A1 JPWO2021187573 A1 JP WO2021187573A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021545721A
Other versions
JP7308960B2 (ja
JPWO2021187573A5 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021187573A1 publication Critical patent/JPWO2021187573A1/ja
Publication of JPWO2021187573A5 publication Critical patent/JPWO2021187573A5/ja
Priority to JP2022093446A priority Critical patent/JP2022133292A/ja
Application granted granted Critical
Publication of JP7308960B2 publication Critical patent/JP7308960B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/06—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances
    • H01B1/08—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances oxides
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04—Coating
    • C08J7/044—Forming conductive coatings; Forming coatings having anti-static properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/02—Physical, chemical or physicochemical properties
    • B32B7/022—Mechanical properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/02—Physical, chemical or physicochemical properties
    • B32B7/023—Optical properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/02—Physical, chemical or physicochemical properties
    • B32B7/025—Electric or magnetic properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/02—Physical, chemical or physicochemical properties
    • B32B7/027—Thermal properties
    • B32B7/028—Heat-shrinkability
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B32B9/04—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18—Manufacture of films or sheets
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04—Coating
    • C08J7/042—Coating with two or more layers, where at least one layer of a composition contains a polymer binder
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04—Coating
    • C08J7/046—Forming abrasion-resistant coatings; Forming surface-hardening coatings
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/20—Conductive material dispersed in non-conductive organic material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q1/00—Details of, or arrangements associated with, antennas
    • H01Q1/36—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
    • H01Q1/38—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith formed by a conductive layer on an insulating support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q1/00—Details of, or arrangements associated with, antennas
    • H01Q1/52—Means for reducing coupling between antennas; Means for reducing coupling between an antenna and another structure
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K9/00—Screening of apparatus or components against electric or magnetic fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Polymers & Plastics (AREA)
  • Medicinal Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Human Computer Interaction (AREA)
  • Dispersion Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Ceramic Engineering (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Laminated Bodies (AREA)
  • Non-Insulated Conductors (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Electric Cables (AREA)
JP2021545721A 2020-03-19 2021-03-18 透明導電性フィルム、および透明導電性フィルムの製造方法 Active JP7308960B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2022093446A JP2022133292A (ja) 2020-03-19 2022-06-09 透明導電性フィルム、および透明導電性フィルムの製造方法

Applications Claiming Priority (27)

Application Number Priority Date Filing Date Title
JP2020049864 2020-03-19
JP2020049864 2020-03-19
JP2020074854 2020-04-20
JP2020074854 2020-04-20
JP2020074853 2020-04-20
JP2020074853 2020-04-20
JP2020134833 2020-08-07
JP2020134832 2020-08-07
JP2020134833 2020-08-07
JP2020134832 2020-08-07
JP2020140238 2020-08-21
JP2020140238 2020-08-21
JP2020140240 2020-08-21
JP2020140240 2020-08-21
JP2020140241 2020-08-21
JP2020140239 2020-08-21
JP2020140239 2020-08-21
JP2020140241 2020-08-21
JP2020149474 2020-09-04
JP2020149474 2020-09-04
JP2020181349 2020-10-29
JP2020181349 2020-10-29
JP2020200421 2020-12-02
JP2020200422 2020-12-02
JP2020200422 2020-12-02
JP2020200421 2020-12-02
PCT/JP2021/011148 WO2021187573A1 (ja) 2020-03-19 2021-03-18 透明導電性フィルム、および透明導電性フィルムの製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2022093446A Division JP2022133292A (ja) 2020-03-19 2022-06-09 透明導電性フィルム、および透明導電性フィルムの製造方法

Publications (3)

Publication Number Publication Date
JPWO2021187573A1 true JPWO2021187573A1 (ja) 2021-09-23
JPWO2021187573A5 JPWO2021187573A5 (ja) 2022-03-08
JP7308960B2 JP7308960B2 (ja) 2023-07-14

Family

ID=77770986

Family Applications (15)

Application Number Title Priority Date Filing Date
JP2021517066A Active JP7237150B2 (ja) 2020-03-19 2021-03-18 透明導電性フィルム
JP2021545488A Active JP7073589B2 (ja) 2020-03-19 2021-03-18 透明導電層および透明導電性フィルム
JP2021517065A Active JP6970861B1 (ja) 2020-03-19 2021-03-18 透明導電性フィルム、および透明導電性フィルムの製造方法
JP2021517067A Active JP7278372B2 (ja) 2020-03-19 2021-03-18 透明導電性フィルム
JP2021545721A Active JP7308960B2 (ja) 2020-03-19 2021-03-18 透明導電性フィルム、および透明導電性フィルムの製造方法
JP2021545862A Active JP6974656B1 (ja) 2020-03-19 2021-03-18 透明導電層および透明導電性シート
JP2021545482A Active JP6987321B1 (ja) 2020-03-19 2021-03-18 透明導電性フィルム
JP2021545483A Active JP6971433B1 (ja) 2020-03-19 2021-03-18 透明導電層および透明導電性シート
JP2021545487A Active JP7073588B2 (ja) 2020-03-19 2021-03-18 透明導電層および透明導電性フィルム
JP2021545486A Active JP7240514B2 (ja) 2020-03-19 2021-03-18 透明導電性フィルム
JP2021180164A Active JP7273930B2 (ja) 2020-03-19 2021-11-04 透明導電性シート
JP2021193794A Active JP7213941B2 (ja) 2020-03-19 2021-11-30 透明導電層および透明導電性フィルム
JP2022078435A Pending JP2022105579A (ja) 2020-03-19 2022-05-11 透明導電性フィルム
JP2022084908A Pending JP2022118005A (ja) 2020-03-19 2022-05-25 透明導電性フィルム
JP2022093446A Pending JP2022133292A (ja) 2020-03-19 2022-06-09 透明導電性フィルム、および透明導電性フィルムの製造方法

Family Applications Before (4)

Application Number Title Priority Date Filing Date
JP2021517066A Active JP7237150B2 (ja) 2020-03-19 2021-03-18 透明導電性フィルム
JP2021545488A Active JP7073589B2 (ja) 2020-03-19 2021-03-18 透明導電層および透明導電性フィルム
JP2021517065A Active JP6970861B1 (ja) 2020-03-19 2021-03-18 透明導電性フィルム、および透明導電性フィルムの製造方法
JP2021517067A Active JP7278372B2 (ja) 2020-03-19 2021-03-18 透明導電性フィルム

Family Applications After (10)

Application Number Title Priority Date Filing Date
JP2021545862A Active JP6974656B1 (ja) 2020-03-19 2021-03-18 透明導電層および透明導電性シート
JP2021545482A Active JP6987321B1 (ja) 2020-03-19 2021-03-18 透明導電性フィルム
JP2021545483A Active JP6971433B1 (ja) 2020-03-19 2021-03-18 透明導電層および透明導電性シート
JP2021545487A Active JP7073588B2 (ja) 2020-03-19 2021-03-18 透明導電層および透明導電性フィルム
JP2021545486A Active JP7240514B2 (ja) 2020-03-19 2021-03-18 透明導電性フィルム
JP2021180164A Active JP7273930B2 (ja) 2020-03-19 2021-11-04 透明導電性シート
JP2021193794A Active JP7213941B2 (ja) 2020-03-19 2021-11-30 透明導電層および透明導電性フィルム
JP2022078435A Pending JP2022105579A (ja) 2020-03-19 2022-05-11 透明導電性フィルム
JP2022084908A Pending JP2022118005A (ja) 2020-03-19 2022-05-25 透明導電性フィルム
JP2022093446A Pending JP2022133292A (ja) 2020-03-19 2022-06-09 透明導電性フィルム、および透明導電性フィルムの製造方法

Country Status (6)

Country Link
US (2) US20230131985A1 (ja)
JP (15) JP7237150B2 (ja)
KR (11) KR20220156824A (ja)
CN (10) CN115298763A (ja)
TW (10) TW202143252A (ja)
WO (10) WO2021187589A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240167976A1 (en) * 2021-03-23 2024-05-23 Nitto Denko Corporation Electrode
WO2023013734A1 (ja) * 2021-08-06 2023-02-09 日東電工株式会社 積層体
JP7377382B2 (ja) * 2021-08-06 2023-11-09 日東電工株式会社 積層体

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05334924A (ja) * 1992-05-29 1993-12-17 Tonen Corp 透明導電薄膜の製造法
JP2018063917A (ja) * 2016-10-14 2018-04-19 株式会社カネカ 透明導電性フィルムおよびその製造方法

Family Cites Families (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61279003A (ja) * 1985-06-05 1986-12-09 コニカ株式会社 透明導電性フイルム
JPH0658476B2 (ja) * 1985-06-19 1994-08-03 株式会社日立製作所 液晶表示素子用基板の製造方法
JPH07258827A (ja) * 1994-03-25 1995-10-09 Mitsubishi Electric Corp 金属薄膜，その形成方法，半導体装置およびその製造方法
JPH07262829A (ja) * 1994-03-25 1995-10-13 Hitachi Ltd 透明導電膜及びその形成方法
JP4010587B2 (ja) * 1995-12-20 2007-11-21 三井化学株式会社 透明導電性積層体及びそれを用いたエレクトロルミネッセンス発光素子
JP2000038654A (ja) * 1998-07-21 2000-02-08 Nippon Sheet Glass Co Ltd 透明導電膜付き基板の製造方法、透明導電膜付き基板およびそれを用いた液晶表示素子
JP3549089B2 (ja) * 1998-07-28 2004-08-04 セントラル硝子株式会社 透明導電膜付きガラス基板とその製法
JP2000238178A (ja) * 1999-02-24 2000-09-05 Teijin Ltd 透明導電積層体
JP2000282225A (ja) * 1999-04-01 2000-10-10 Nippon Sheet Glass Co Ltd 透明導電膜形成方法及び該方法より形成された透明導電膜
JP4132458B2 (ja) * 1999-08-23 2008-08-13 Ｔｄｋ株式会社 有機ｅｌ素子
JP2002371355A (ja) * 2001-06-14 2002-12-26 Nitto Denko Corp 透明薄膜の製造方法
JP2002371350A (ja) * 2001-06-14 2002-12-26 Nitto Denko Corp 透明積層体の製造方法
JP4177709B2 (ja) * 2002-05-20 2008-11-05 株式会社日本触媒 繊維状の金属酸化物微粒子
JP4538410B2 (ja) * 2003-05-26 2010-09-08 日本曹達株式会社 透明導電膜付透光性基板の製造方法
JP4618707B2 (ja) * 2004-03-19 2011-01-26 日東電工株式会社 電解質膜および固体高分子型燃料電池
CN101027941A (zh) * 2004-09-24 2007-08-29 大见忠弘 有机el发光元件及其制造方法以及显示装置
JP4882262B2 (ja) * 2005-03-31 2012-02-22 凸版印刷株式会社 透明導電膜積層体の製造方法
JP4899443B2 (ja) * 2005-11-22 2012-03-21 大日本印刷株式会社 導電性基板
US7867636B2 (en) * 2006-01-11 2011-01-11 Murata Manufacturing Co., Ltd. Transparent conductive film and method for manufacturing the same
US9035721B2 (en) 2008-07-30 2015-05-19 Kyocera Corporation Duplexer, communication module component, and communication device
JP2010080358A (ja) * 2008-09-29 2010-04-08 Hitachi Ltd 透明導電膜付基板、及びそれを用いた表示素子及び太陽電池
JP5533878B2 (ja) * 2009-09-18 2014-06-25 三洋電機株式会社 太陽電池、太陽電池モジュールおよび太陽電池システム
JP6023402B2 (ja) * 2010-12-27 2016-11-09 日東電工株式会社 透明導電性フィルムおよびその製造方法
JP4960511B1 (ja) * 2011-01-26 2012-06-27 株式会社東芝 半導体発光素子及びその製造方法
JP5729595B2 (ja) 2011-03-11 2015-06-03 三菱マテリアル株式会社 太陽電池用透明導電膜およびその製造方法
JP5244950B2 (ja) * 2011-10-06 2013-07-24 日東電工株式会社 透明導電性フィルム
KR101814375B1 (ko) * 2012-06-07 2018-01-04 닛토덴코 가부시키가이샤 투명 도전성 필름
JP5620967B2 (ja) 2012-11-22 2014-11-05 日東電工株式会社 透明導電性フィルム
JP6261987B2 (ja) 2013-01-16 2018-01-17 日東電工株式会社 透明導電フィルムおよびその製造方法
JP6227321B2 (ja) * 2013-08-05 2017-11-08 リンテック株式会社 プロテクトフィルム付き透明導電性フィルム
KR20170008196A (ko) * 2014-05-20 2017-01-23 닛토덴코 가부시키가이샤 투명 도전성 필름 및 그 제조 방법
JP6066154B2 (ja) 2014-05-20 2017-01-25 日東電工株式会社 透明導電性フィルムの製造方法
KR102030892B1 (ko) 2014-11-07 2019-10-10 제이엑스금속주식회사 Ito 스퍼터링 타겟 및 그 제조 방법 그리고 ito 투명 도전막 및 ito 투명 도전막의 제조 방법
WO2016088378A1 (ja) * 2014-12-03 2016-06-09 株式会社Ｊｏｌｅｄ 有機発光デバイス
JP6553451B2 (ja) * 2015-08-25 2019-07-31 日東電工株式会社 透明樹脂フィルム、透明導電性フィルムおよびそれを用いたタッチパネル
WO2017057556A1 (ja) * 2015-09-30 2017-04-06 積水化学工業株式会社 光透過性導電フィルム、及び、アニール処理された光透過性導電フィルムの製造方法
JP6412539B2 (ja) * 2015-11-09 2018-10-24 日東電工株式会社 光透過性導電フィルムおよび調光フィルム
JP6654865B2 (ja) * 2015-11-12 2020-02-26 日東電工株式会社 非晶質透明導電性フィルム、ならびに、結晶質透明導電性フィルムおよびその製造方法
JP7046497B2 (ja) 2016-09-02 2022-04-04 日東電工株式会社 液晶調光部材、光透過性導電フィルム、および液晶調光素子
CN109073940B (zh) * 2016-04-01 2022-03-08 日东电工株式会社 液晶调光构件、透光性导电薄膜、及液晶调光元件
KR102432417B1 (ko) * 2016-06-10 2022-08-12 닛토덴코 가부시키가이샤 투명 도전성 필름 및 터치 패널
JP6490262B2 (ja) * 2017-05-09 2019-03-27 日東電工株式会社 光透過性導電層付きフィルム、調光フィルムおよび調光装置
JP2018192634A (ja) * 2017-05-12 2018-12-06 株式会社ダイセル カールが抑制されたハードコートフィルム及びその製造方法
WO2019130841A1 (ja) * 2017-12-28 2019-07-04 日東電工株式会社 光透過性導電フィルム、その製造方法、調光フィルム、および、調光部材
CN108486550B (zh) * 2018-04-27 2020-06-16 华南理工大学 一种金属氧化物透明导电薄膜的制备方法及其产品和用途
JP7054651B2 (ja) * 2018-06-19 2022-04-14 日東電工株式会社 下地層付きフィルム、透明導電性フィルム、透明導電性フィルム積層体および画像表示装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05334924A (ja) * 1992-05-29 1993-12-17 Tonen Corp 透明導電薄膜の製造法
JP2018063917A (ja) * 2016-10-14 2018-04-19 株式会社カネカ 透明導電性フィルムおよびその製造方法

Also Published As

Publication number Publication date
JPWO2021187588A1 (ja) 2021-09-23
JP7237150B2 (ja) 2023-03-10
TW202141537A (zh) 2021-11-01
JPWO2021187584A1 (ja) 2021-09-23
TWI819287B (zh) 2023-10-21
JP7073588B2 (ja) 2022-05-23
JP7073589B2 (ja) 2022-05-23
CN115298762A (zh) 2022-11-04
WO2021187589A1 (ja) 2021-09-23
JP2022033120A (ja) 2022-02-28
CN115315759A (zh) 2022-11-08
WO2021187582A1 (ja) 2021-09-23
CN115280429A (zh) 2022-11-01
KR20220155282A (ko) 2022-11-22
WO2021187583A1 (ja) 2021-09-23
JP7273930B2 (ja) 2023-05-15
KR20220156819A (ko) 2022-11-28
JP6970861B1 (ja) 2021-11-24
JP2022019756A (ja) 2022-01-27
JP7278372B2 (ja) 2023-05-19
CN115335924A (zh) 2022-11-11
JP2022133292A (ja) 2022-09-13
JP7240514B2 (ja) 2023-03-15
JP7308960B2 (ja) 2023-07-14
US20230131985A1 (en) 2023-04-27
CN115315760A (zh) 2022-11-08
KR20220155281A (ko) 2022-11-22
JP6987321B1 (ja) 2021-12-22
CN115298763A (zh) 2022-11-04
TW202143252A (zh) 2021-11-16
US20230127104A1 (en) 2023-04-27
JPWO2021187586A1 (ja) 2021-09-23
JPWO2021187581A1 (ja) 2021-09-23
WO2021187581A1 (ja) 2021-09-23
JP2022118005A (ja) 2022-08-12
JPWO2021187585A1 (ja) 2021-09-23
TW202145262A (zh) 2021-12-01
JPWO2021187583A1 (ja) 2021-09-23
TW202145263A (zh) 2021-12-01
JPWO2021187589A1 (ja) 2021-09-23
WO2021187586A1 (ja) 2021-09-23
TW202145258A (zh) 2021-12-01
WO2021187584A1 (ja) 2021-09-23
KR20220156825A (ko) 2022-11-28
TW202144871A (zh) 2021-12-01
JPWO2021187587A1 (ja) 2021-09-23
JP6974656B1 (ja) 2021-12-01
WO2021187588A1 (ja) 2021-09-23
WO2021187585A1 (ja) 2021-09-23
TW202141535A (zh) 2021-11-01
KR20220155288A (ko) 2022-11-22
CN115335924B (zh) 2024-03-26
KR20220156820A (ko) 2022-11-28
JP2022105579A (ja) 2022-07-14
KR20220155283A (ko) 2022-11-22
KR20220155287A (ko) 2022-11-22
KR20240011876A (ko) 2024-01-26
CN115280430A (zh) 2022-11-01
KR20220156826A (ko) 2022-11-28
JPWO2021187582A1 (ja) 2021-09-23
TW202147345A (zh) 2021-12-16
TW202139214A (zh) 2021-10-16
JP6971433B1 (ja) 2021-11-24
CN115280428A (zh) 2022-11-01
CN115298759A (zh) 2022-11-04
WO2021187573A1 (ja) 2021-09-23
CN115298764A (zh) 2022-11-04
KR20220156824A (ko) 2022-11-28
TW202141536A (zh) 2021-11-01
JP7213941B2 (ja) 2023-01-27
WO2021187587A1 (ja) 2021-09-23

Similar Documents

Publication Publication Date Title
BR112023005462A2 (ja)
BR112021014123A2 (ja)
JPWO2021187585A1 (ja)
BR112022024743A2 (ja)
BR102021018859A2 (ja)
BR102021015500A2 (ja)
BR112022009896A2 (ja)
BR112023011738A2 (ja)
BR112023004146A2 (ja)
BR112023011539A2 (ja)
BR112023011610A2 (ja)
BR112023008976A2 (ja)
BR112023009656A2 (ja)
BR112023006729A2 (ja)
BR102021020147A2 (ja)
BR102021018926A2 (ja)
BR102021018167A2 (ja)
BR102021017576A2 (ja)
BR102021016837A2 (ja)
BR102021016551A2 (ja)
BR102021016375A2 (ja)
BR102021016200A2 (ja)
BR102021016176A2 (ja)
BR102021015566A2 (ja)
BR102021015450A8 (ja)

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20211227

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20211227

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20211227

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20220201

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220303

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20220315

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220609

C60 Trial request (containing other claim documents, opposition documents)

Free format text: JAPANESE INTERMEDIATE CODE: C60

Effective date: 20220609

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20220617

C21 Notice of transfer of a case for reconsideration by examiners before appeal proceedings

Free format text: JAPANESE INTERMEDIATE CODE: C21

Effective date: 20220621

A912 Re-examination (zenchi) completed and case transferred to appeal board

Free format text: JAPANESE INTERMEDIATE CODE: A912

Effective date: 20220701

C211 Notice of termination of reconsideration by examiners before appeal proceedings

Free format text: JAPANESE INTERMEDIATE CODE: C211

Effective date: 20220705

C22 Notice of designation (change) of administrative judge

Free format text: JAPANESE INTERMEDIATE CODE: C22

Effective date: 20221220

C22 Notice of designation (change) of administrative judge

Free format text: JAPANESE INTERMEDIATE CODE: C22

Effective date: 20230131

C13 Notice of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: C13

Effective date: 20230221

C22 Notice of designation (change) of administrative judge

Free format text: JAPANESE INTERMEDIATE CODE: C22

Effective date: 20230404

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230413

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20230704

R150 Certificate of patent or registration of utility model

Ref document number: 7308960

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150