JP5533878B2 - 太陽電池、太陽電池モジュールおよび太陽電池システム - Google Patents
太陽電池、太陽電池モジュールおよび太陽電池システム Download PDFInfo
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- JP5533878B2 JP5533878B2 JP2011531966A JP2011531966A JP5533878B2 JP 5533878 B2 JP5533878 B2 JP 5533878B2 JP 2011531966 A JP2011531966 A JP 2011531966A JP 2011531966 A JP2011531966 A JP 2011531966A JP 5533878 B2 JP5533878 B2 JP 5533878B2
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- solar cell
- transparent conductive
- conductive film
- atoms
- hydrogen
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- 239000001257 hydrogen Substances 0.000 claims description 66
- 229910052739 hydrogen Inorganic materials 0.000 claims description 66
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 44
- 229910003437 indium oxide Inorganic materials 0.000 claims description 43
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 claims description 40
- 229910052684 Cerium Inorganic materials 0.000 claims description 37
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 30
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 25
- 239000000758 substrate Substances 0.000 claims description 22
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 17
- 239000010937 tungsten Substances 0.000 claims description 17
- 229910052721 tungsten Inorganic materials 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 12
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 6
- 125000004429 atom Chemical group 0.000 description 77
- 238000002441 X-ray diffraction Methods 0.000 description 49
- 150000002431 hydrogen Chemical class 0.000 description 36
- 230000000052 comparative effect Effects 0.000 description 26
- 239000012535 impurity Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 239000000843 powder Substances 0.000 description 7
- 229910000420 cerium oxide Inorganic materials 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000000945 filler Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 238000000137 annealing Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 229910052738 indium Inorganic materials 0.000 description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- 229920001187 thermosetting polymer Polymers 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 3
- -1 polyethylene terephthalate Polymers 0.000 description 3
- 238000010248 power generation Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000001678 elastic recoil detection analysis Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 238000005001 rutherford backscattering spectroscopy Methods 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 229910001930 tungsten oxide Inorganic materials 0.000 description 2
- 229910017944 Ag—Cu Inorganic materials 0.000 description 1
- 229910052774 Proactinium Inorganic materials 0.000 description 1
- 229910020816 Sn Pb Inorganic materials 0.000 description 1
- 229910020922 Sn-Pb Inorganic materials 0.000 description 1
- 229910008783 Sn—Pb Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000001887 electron backscatter diffraction Methods 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000005038 ethylene vinyl acetate Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000005341 toughened glass Substances 0.000 description 1
- ZNOKGRXACCSDPY-UHFFFAOYSA-N tungsten trioxide Chemical compound O=[W](=O)=O ZNOKGRXACCSDPY-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022466—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
- H01L31/022475—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers composed of indium tin oxide [ITO]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
- H01L31/0684—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells double emitter cells, e.g. bifacial solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
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- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Electromagnetism (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Crystallography & Structural Chemistry (AREA)
- Sustainable Energy (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Photovoltaic Devices (AREA)
Description
を備えた太陽電池モジュールおよび太陽電池システムを提供できる。
商品用のものでも勿論よい。
2 n型単結晶シリコン基板
3 i型非晶質シリコン層
4 p型非晶質シリコン層
5 透明導電膜
7 i型非晶質シリコン層
8 n型非晶質シリコン層
9 透明導電膜
20 太陽電池モジュール
Claims (6)
- p型又はn型の結晶系半導体基板と、該基板の主面上に形成されたp型半導体層と、前記基板の他の主面上に形成されたn型半導体層とを備える太陽電池であって、前記p型半導体層上に水素及びセリウムを含有する酸化インジウムを含む第1の透明導電膜を備え、前記n型半導体層上にセリウムを含有しない酸化インジウムを含む第2の透明導電膜を備えることを特徴とする太陽電池。
- 前記第2の透明導電膜は、水素及びタングステンを含むことを特徴とする請求項1記載の太陽電池。
- 前記第1、第2の透明導電膜の水素含有量は、1021atoms/cm3オーダーであることを特徴とする請求項1記載の太陽電池。
- 前記結晶系半導体基板は、単結晶シリコン基板であり、前記主面及び前記他の主面がテクスチャー構造を有する面であり、前記p型半導体層はp型非晶質シリコン層であり、前記n型半導体層はn型非晶質シリコン層であることを特徴とする請求項1記載の太陽電池。
- 請求項1乃至4のいずれかに記載の太陽電池を備えたことを特徴とする太陽電池モジュール。
- 請求項5に記載の太陽電池モジュールを含むことを特徴とする太陽電池システム。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011531966A JP5533878B2 (ja) | 2009-09-18 | 2010-09-16 | 太陽電池、太陽電池モジュールおよび太陽電池システム |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009216298 | 2009-09-18 | ||
JP2009216298 | 2009-09-18 | ||
JP2011531966A JP5533878B2 (ja) | 2009-09-18 | 2010-09-16 | 太陽電池、太陽電池モジュールおよび太陽電池システム |
PCT/JP2010/066072 WO2011034141A1 (ja) | 2009-09-18 | 2010-09-16 | 太陽電池、太陽電池モジュールおよび太陽電池システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2011034141A1 JPWO2011034141A1 (ja) | 2013-02-14 |
JP5533878B2 true JP5533878B2 (ja) | 2014-06-25 |
Family
ID=43758742
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2011531966A Expired - Fee Related JP5533878B2 (ja) | 2009-09-18 | 2010-09-16 | 太陽電池、太陽電池モジュールおよび太陽電池システム |
Country Status (7)
Country | Link |
---|---|
US (1) | US20120167982A1 (ja) |
EP (1) | EP2479796B1 (ja) |
JP (1) | JP5533878B2 (ja) |
KR (1) | KR101656118B1 (ja) |
CN (1) | CN102473760A (ja) |
TW (1) | TW201130148A (ja) |
WO (1) | WO2011034141A1 (ja) |
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US9773928B2 (en) | 2010-09-10 | 2017-09-26 | Tesla, Inc. | Solar cell with electroplated metal grid |
US9800053B2 (en) | 2010-10-08 | 2017-10-24 | Tesla, Inc. | Solar panels with integrated cell-level MPPT devices |
US9054256B2 (en) | 2011-06-02 | 2015-06-09 | Solarcity Corporation | Tunneling-junction solar cell with copper grid for concentrated photovoltaic application |
WO2012165289A1 (ja) * | 2011-06-03 | 2012-12-06 | 三洋電機株式会社 | 太陽電池の製造方法 |
JP5289625B1 (ja) * | 2011-09-13 | 2013-09-11 | 京セラ株式会社 | 太陽電池モジュール |
CN103035784B (zh) * | 2011-10-07 | 2016-06-08 | 清华大学 | 发光二极管的制备方法 |
CN103035785B (zh) * | 2011-10-07 | 2015-11-25 | 清华大学 | 发光二极管的制备方法 |
CN103035786B (zh) * | 2011-10-07 | 2015-07-01 | 清华大学 | 发光二极管的制备方法 |
CN103094401B (zh) * | 2011-10-27 | 2015-07-29 | 清华大学 | 太阳能电池的制备方法 |
CN102723373A (zh) * | 2012-06-29 | 2012-10-10 | 苏州嘉言能源设备有限公司 | 薄膜太阳能电池光吸收透明薄膜 |
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DE102013203061A1 (de) * | 2013-02-25 | 2014-08-28 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Halbleiterbauelement, insbesondere Solarzelle und Verfahren zum Herstellen einer metallischen Kontaktierungsstruktur eines Halbleiterbauelementes |
CN105103307B (zh) * | 2013-03-19 | 2017-05-24 | 长州产业株式会社 | 光发电装置 |
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US9899546B2 (en) | 2014-12-05 | 2018-02-20 | Tesla, Inc. | Photovoltaic cells with electrodes adapted to house conductive paste |
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US9496429B1 (en) | 2015-12-30 | 2016-11-15 | Solarcity Corporation | System and method for tin plating metal electrodes |
KR101821394B1 (ko) * | 2016-01-14 | 2018-01-23 | 엘지전자 주식회사 | 태양전지 |
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EP2479796B1 (en) | 2014-08-27 |
CN102473760A (zh) | 2012-05-23 |
WO2011034141A1 (ja) | 2011-03-24 |
US20120167982A1 (en) | 2012-07-05 |
KR20120082392A (ko) | 2012-07-23 |
KR101656118B1 (ko) | 2016-09-08 |
EP2479796A4 (en) | 2013-08-07 |
TW201130148A (en) | 2011-09-01 |
EP2479796A1 (en) | 2012-07-25 |
JPWO2011034141A1 (ja) | 2013-02-14 |
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