JP6987646B2 - 原子層堆積による多層耐プラズマ性コーティング - Google Patents

原子層堆積による多層耐プラズマ性コーティング Download PDF

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JP6987646B2
JP6987646B2 JP2018000888A JP2018000888A JP6987646B2 JP 6987646 B2 JP6987646 B2 JP 6987646B2 JP 2018000888 A JP2018000888 A JP 2018000888A JP 2018000888 A JP2018000888 A JP 2018000888A JP 6987646 B2 JP6987646 B2 JP 6987646B2
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layer
mol
oxide
rare earth
earth metal
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JP2018150617A (ja
JP2018150617A5 (https=
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ウー シャオウェイ
フェンウィック デイビッド
ワイ サン ジェニファー
ツァン グオドン
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Applied Materials Inc
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Applied Materials Inc
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    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
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    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
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    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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