JP5258811B2 - スリットノズル洗浄装置及び塗布装置 - Google Patents

スリットノズル洗浄装置及び塗布装置 Download PDF

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Publication number
JP5258811B2
JP5258811B2 JP2010032446A JP2010032446A JP5258811B2 JP 5258811 B2 JP5258811 B2 JP 5258811B2 JP 2010032446 A JP2010032446 A JP 2010032446A JP 2010032446 A JP2010032446 A JP 2010032446A JP 5258811 B2 JP5258811 B2 JP 5258811B2
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JP
Japan
Prior art keywords
slit nozzle
cleaning
wiper
nozzle
discharge port
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Application number
JP2010032446A
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English (en)
Japanese (ja)
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JP2011167607A (ja
Inventor
幸雄 小笠原
文宏 宮崎
公男 元田
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP2010032446A priority Critical patent/JP5258811B2/ja
Priority to KR1020110003747A priority patent/KR101737124B1/ko
Priority to TW100104890A priority patent/TWI499457B/zh
Priority to CN2011100412633A priority patent/CN102161028A/zh
Publication of JP2011167607A publication Critical patent/JP2011167607A/ja
Application granted granted Critical
Publication of JP5258811B2 publication Critical patent/JP5258811B2/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • B05B1/04—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
    • B05B1/044—Slits, i.e. narrow openings defined by two straight and parallel lips; Elongated outlets for producing very wide discharges, e.g. fluid curtains
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C21/00—Accessories or implements for use in connection with applying liquids or other fluent materials to surfaces, not provided for in groups B05C1/00 - B05C19/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid

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JP2010032446A 2010-02-17 2010-02-17 スリットノズル洗浄装置及び塗布装置 Active JP5258811B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2010032446A JP5258811B2 (ja) 2010-02-17 2010-02-17 スリットノズル洗浄装置及び塗布装置
KR1020110003747A KR101737124B1 (ko) 2010-02-17 2011-01-14 슬릿 노즐 세정 장치 및 도포 장치
TW100104890A TWI499457B (zh) 2010-02-17 2011-02-15 狹縫噴嘴洗淨裝置及塗佈裝置
CN2011100412633A CN102161028A (zh) 2010-02-17 2011-02-17 狭缝喷嘴清洗装置和涂覆装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010032446A JP5258811B2 (ja) 2010-02-17 2010-02-17 スリットノズル洗浄装置及び塗布装置

Publications (2)

Publication Number Publication Date
JP2011167607A JP2011167607A (ja) 2011-09-01
JP5258811B2 true JP5258811B2 (ja) 2013-08-07

Family

ID=44462639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010032446A Active JP5258811B2 (ja) 2010-02-17 2010-02-17 スリットノズル洗浄装置及び塗布装置

Country Status (4)

Country Link
JP (1) JP5258811B2 (ko)
KR (1) KR101737124B1 (ko)
CN (1) CN102161028A (ko)
TW (1) TWI499457B (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106140567A (zh) * 2015-05-13 2016-11-23 东京应化工业株式会社 涂布装置、涂布系统及涂布方法

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5138058B2 (ja) * 2011-03-07 2013-02-06 東レ株式会社 清掃部材と塗布器の清掃方法及び清掃装置並びにディスプレイ用部材の製造方法
JP2013071033A (ja) * 2011-09-27 2013-04-22 Dainippon Screen Mfg Co Ltd ノズル洗浄装置および該ノズル洗浄装置を備えた塗布装置
JP5841449B2 (ja) * 2012-02-10 2016-01-13 東京エレクトロン株式会社 拭き取りパッド及びこのパッドを用いたノズルメンテナンス装置並びに塗布処理装置
CN102767222B (zh) * 2012-06-29 2014-07-23 松下家电研究开发（杭州）有限公司 温水便座装置喷嘴组件及其清洁方法及温水便座装置
JP5809114B2 (ja) * 2012-07-10 2015-11-10 東京エレクトロン株式会社 塗布処理装置及び塗布処理方法
JP2014176812A (ja) * 2013-03-15 2014-09-25 Dainippon Screen Mfg Co Ltd ノズル洗浄装置、塗布装置、ノズル洗浄方法、および塗布方法
CN103286030B (zh) * 2013-06-28 2016-08-31 深圳市华星光电技术有限公司 一种狭缝喷嘴清洁装置
CN103331276B (zh) * 2013-07-12 2016-05-18 深圳市华星光电技术有限公司 超声波清洗装置和具有该超声波清洗装置的涂布机
CN103406230B (zh) * 2013-08-08 2015-11-25 厦门精恒新自动化科技有限公司 一种点胶清洗切换装置
CN103846183A (zh) * 2013-12-20 2014-06-11 深圳市华星光电技术有限公司 一种涂布机喷嘴清洁装置
KR102232667B1 (ko) * 2014-06-12 2021-03-30 세메스 주식회사 기판 처리 장치
KR102292660B1 (ko) * 2014-07-24 2021-08-25 세메스 주식회사 세정 유닛, 이를 가지는 기판 처리 장치
KR101578368B1 (ko) * 2014-12-04 2015-12-18 주식회사 디엠에스 노즐립 클리너 및 이를 이용한 슬릿 코터
JP6664952B2 (ja) * 2015-12-17 2020-03-13 東レエンジニアリング株式会社 塗布器洗浄装置及び塗布装置
CN105710056B (zh) 2016-03-21 2019-01-25 京东方科技集团股份有限公司 液刀清洁装置及液刀
JP6697324B2 (ja) * 2016-05-26 2020-05-20 株式会社Ｓｃｒｅｅｎホールディングス ノズル清掃装置、塗布装置およびノズル清掃方法
CN105855133B (zh) * 2016-06-02 2018-06-08 京东方科技集团股份有限公司 喷嘴自动清洁装置及喷嘴自动清洁方法
JP6500244B2 (ja) * 2016-06-09 2019-04-17 パナソニックＩｐマネジメント株式会社 部品装着装置
JP6824673B2 (ja) * 2016-09-13 2021-02-03 株式会社Ｓｃｒｅｅｎホールディングス ノズル清掃部材、ノズル清掃装置、塗布装置
CN206425274U (zh) * 2017-01-05 2017-08-22 惠科股份有限公司 一种喷嘴的清洁装置
CN106733358B (zh) * 2017-02-06 2019-10-01 京东方科技集团股份有限公司 喷嘴清洁装置及涂布液涂布设备
CN108580133B (zh) * 2018-06-01 2019-09-24 深圳市华星光电半导体显示技术有限公司 涂布设备口金擦拭机构
JP6430056B1 (ja) 2018-07-17 2018-11-28 中外炉工業株式会社 塗布用ノズルの清掃装置
CN108672214A (zh) * 2018-07-25 2018-10-19 朱浩东 光学胶涂布设备
CN108873610A (zh) * 2018-07-25 2018-11-23 朱浩东 光阻涂布装置
CN108906472A (zh) * 2018-07-25 2018-11-30 朱浩东 光学胶涂布装置
CN108873609A (zh) * 2018-07-25 2018-11-23 朱浩东 光阻涂布设备
CN108983561A (zh) * 2018-08-03 2018-12-11 深圳市华星光电技术有限公司 涂布口金组件及涂布口金系统
CN108816660A (zh) * 2018-08-04 2018-11-16 伍先春 光学胶涂布装置
CN108889536A (zh) * 2018-08-04 2018-11-27 伍先春 光学胶涂布装置
JP7111565B2 (ja) * 2018-09-06 2022-08-02 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
CN110237971A (zh) * 2019-05-31 2019-09-17 溧阳嘉拓智能设备有限公司 锂电池狭缝挤压式涂布模头在线全自动清洁装置及方法
JP7197525B2 (ja) * 2020-01-22 2022-12-27 株式会社Ｓｃｒｅｅｎホールディングス ノズル清掃装置、塗布装置、ノズル清掃方法、および、スクレーパー
CN112439592B (zh) * 2020-11-21 2021-10-08 颍上县龙裕扬工贸有限公司 一种带有除静电装置的塑料制品加工用喷涂装置
CN113231619A (zh) * 2021-05-08 2021-08-10 吴薇娜 一种发动机悬挂支架铝合金压铸件浇排结构
CN114160343A (zh) * 2021-12-19 2022-03-11 苏州康辉电子科技有限公司 一种基于塑料制品加工的静电去除装置
CN114558732A (zh) * 2022-03-09 2022-05-31 宿迁恒信工艺品有限公司 一种木制品玩具加工用喷漆装置
KR102656532B1 (ko) * 2022-08-29 2024-04-11 한국기술교육대학교 산학협력단 자동화된 슬롯다이코팅장치 및 그 제어방법

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4521505B2 (ja) * 1999-10-19 2010-08-11 東レ株式会社 塗布ヘッドの清掃方法および清掃装置並びにプラズマディスプレイ用部材の製造方法および装置
JP2002177848A (ja) * 2000-12-15 2002-06-25 Toray Ind Inc 塗布用ダイの清掃装置および清掃方法並びにこれを用いたカラーフィルターの製造装置および製造方法
JP4779234B2 (ja) * 2001-06-05 2011-09-28 東レ株式会社 塗布用ダイの清掃方法および清掃装置並びにカラーフィルターの製造方法および製造装置
KR100923022B1 (ko) * 2002-06-14 2009-10-22 삼성전자주식회사 감광물질 코팅 방법 및 장치
KR100700180B1 (ko) * 2004-12-31 2007-03-27 엘지.필립스 엘시디 주식회사 예비토출부를 구비한 슬릿코터 및 이를 이용한 코팅방법
JP4884038B2 (ja) * 2006-03-10 2012-02-22 東京応化工業株式会社 スリットノズル洗浄装置
JP4850680B2 (ja) * 2006-12-15 2012-01-11 中外炉工業株式会社 吐出ノズルの清掃装置
JP5071167B2 (ja) * 2007-03-27 2012-11-14 東レ株式会社 清掃部材と塗布器の清掃方法および清掃装置並びにディスプレイ用部材の製造方法
JP4857193B2 (ja) * 2007-05-28 2012-01-18 大日本スクリーン製造株式会社 ノズル洗浄装置
KR100975129B1 (ko) * 2008-06-27 2010-08-11 주식회사 디엠에스 노즐 립 클리너를 구비한 슬릿 코터

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106140567A (zh) * 2015-05-13 2016-11-23 东京应化工业株式会社 涂布装置、涂布系统及涂布方法
CN106140567B (zh) * 2015-05-13 2020-07-07 东京应化工业株式会社 涂布装置、涂布系统及涂布方法

Also Published As

Publication number Publication date
KR101737124B1 (ko) 2017-05-17
CN102161028A (zh) 2011-08-24
TWI499457B (zh) 2015-09-11
KR20110095133A (ko) 2011-08-24
JP2011167607A (ja) 2011-09-01
TW201200243A (en) 2012-01-01

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