JP5077400B2 - 露光装置、露光方法、及びデバイス製造方法 - Google Patents
露光装置、露光方法、及びデバイス製造方法 Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/70866—Environment aspects, e.g. pressure of beam-path gas, temperature of mask or workpiece
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
- G03F7/70725—Stages control
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B27/00—Photographic printing apparatus
- G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
- G03B27/52—Details
- G03B27/522—Projection optics
- G03B27/525—Projection optics for slit exposure
- G03B27/528—Projection optics for slit exposure in which the projection optics remain stationary
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
Description
δ=±k2・λ/NA2 … (2)
ここで、λは露光波長、NAは投影光学系の開口数、k1、k2はプロセス係数である。(1)式、(2)式より、解像度Rを高めるために、露光波長λを短くして、開口数NAを大きくすると、焦点深度δが狭くなることが分かる。
り、液体LQの流出を防止するとともに、液浸領域AR2の液体LQの不足を補い、常に液浸領域AR2を液体LQで満たすことができる。そして、予備液浸領域AR3が形成される領域、すなわち壁部131に囲まれた領域は、全領域が完全に液体LQで満たされないので、液浸領域AR2から予備液浸領域AR3に回収された液体LQが壁部131の外側に漏れだすことなく、壁部131に囲まれた領域内に留まることができる。
Claims (28)
- 投影光学系と液体とを介して基板上に露光光を照射して、前記基板を露光する露光装置において、
前記液体を供給するための液体供給機構と、
前記投影光学系の像面側の気体を排出する排気手段と、を備え、
前記排気手段の排気口は、前記液体供給機構の液体供給口よりも前記投影光学系による投影領域の近くに配置され、
前記液体供給機構による液体供給は、前記排気手段による気体の排出を行いながら開始されることを特徴とする露光装置。 - 前記液体供給機構の液体供給口は前記投影光学系の投影領域の両側に配置され、前記投影領域の両側から液体供給が可能であることを特徴とする請求項1記載の露光装置。
- 前記投影光学系の投影領域に対して前記液体供給機構の液体供給口の外側に第1液体回収口を有する第1液体回収機構を備えたことを特徴とする請求項1又は2記載の露光装置。
- 前記第1液体回収機構とは別の駆動源を有し、前記投影光学系の投影領域に対して前記第1液体回収機構の第1液体回収口の外側に第2液体回収口を有する第2液体回収機構を備えたことを特徴とする請求項1〜3のいずれか一項記載の露光装置。
- 前記駆動源は無停電電源を含むことを特徴とする請求項4記載の露光装置。
- 前記第1液体回収口からの液体回収動作が停止する異常が発生した場合にも、前記第2液体回収口は、対向する物体上の液体を回収可能である請求項4又は5記載の露光装置。
- 前記排気口、前記液体供給口、前記第1液体回収口、及び前記第2液体回収口は流路形成部材に設けられ、
前記流路形成部材は、前記投影光学系の終端部の光学素子を配置可能な開口部と、前記物体の表面が対向する下面と、を有し、
前記液体供給口、前記第1液体回収口、及び前記第2液体回収口は、前記下面に設けられている請求項4〜6のいずれか一項記載の露光装置。 - 前記下面において、前記第1液体回収口は、前記液体供給口を囲むように配置されている請求項7記載の露光装置。
- 前記第1液体回収口は、気体とともに液体を回収する請求項7又は8記載の露光装置。
- 前記下面において、前記第2液体回収口は、前記第1液体回収口を囲むように設けられている請求項7〜9のいずれか一項記載の露光装置。
- 前記第2液体回収口は、気体とともに液体を回収する請求項7〜10のいずれか一項記載の露光装置。
- 前記下面に設けられた凹部を有し、
前記第1液体回収口は、前記下面において、前記凹部の周囲に配置されている請求項7〜11のいずれか一項記載の露光装置。 - 前記液体供給口は、前記下面において、前記凹部と前記第1液体回収口の間に配置されている請求項12記載の露光装置。
- 前記下面は、親液性である請求項7〜13のいずれか一項記載の露光装置。
- 前記光学素子と対向する内側面を有し、
前記内側面は、撥液性である請求項7〜14のいずれか一項記載の露光装置。 - 前記内側面は、撥液性材料を塗布する、あるいは撥液性材料の薄膜を添付する撥液化処理によって撥液性を有している請求項15記載の露光装置。
- 前記第2液体回収口は、多孔体を含む請求項7〜16のいずれか一項記載の露光装置。
- 前記流路形成部材の内側面と対向する、前記光学素子の対向面は、撥液性である請求項7〜17のいずれか一項記載の露光装置。
- 前記対向面は、撥液性材料を塗布する撥液化処理によって撥液性を有している請求項18記載の露光装置。
- 前記対向面は、撥液性材料の薄膜を添付する撥液化処理によって撥液性を有している請求項18記載の露光装置。
- 前記第1液体回収口から回収された液体と気体とを分離する気液分離器をさらに備える請求項7〜20のいずれか一項記載の露光装置。
- 前記基板を基板ホルダに保持する基板ステージを備え、
前記基板ステージは、前記基板ホルダに保持された前記基板を囲むように設けられた平坦面を有する請求項1〜21のいずれか一項記載の露光装置。 - 前記平坦面は、撥液性の領域を含む請求項22記載の露光装置。
- 前記基板ステージの前記撥液性の領域は、撥液性材料を塗布する、あるいは撥液性材料の薄膜を貼付する撥液化処理によって形成される請求項23記載の露光装置。
- 前記平坦面は、前記基板ホルダに保持された前記基板の表面とほぼ面一である請求項22〜24のいずれか一項記載の露光装置。
- 請求項1〜25のいずれか一項記載の露光装置を用いることを特徴とするデバイス製造方法。
- 投影光学系と液体とを介して基板に露光光を照射して前記基板を露光する露光方法であって、
液体供給口から前記基板に液体を供給することと、
前記液体供給口よりも前記投影光学系による投影領域の近くに配置された排気口から前記投影光学系の像面側の気体を排出することと、
前記液体を介して前記基板に露光光を照射して前記基板を露光することと、を含み、
前記液体の供給は、前記気体の排出を行いながら開始される露光方法。 - 請求項27に記載の露光方法を用いるデバイス製造方法。
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