JP4833512B2 - 被処理体処理装置、被処理体処理方法及び被処理体搬送方法 - Google Patents

被処理体処理装置、被処理体処理方法及び被処理体搬送方法 Download PDF

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JP4833512B2
JP4833512B2 JP2003422821A JP2003422821A JP4833512B2 JP 4833512 B2 JP4833512 B2 JP 4833512B2 JP 2003422821 A JP2003422821 A JP 2003422821A JP 2003422821 A JP2003422821 A JP 2003422821A JP 4833512 B2 JP4833512 B2 JP 4833512B2
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Prior art keywords
chamber
processing
processed
load lock
cor
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Expired - Fee Related
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JP2003422821A
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English (en)
Japanese (ja)
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JP2005039185A (ja
JP2005039185A5 (enExample
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潤 小澤
岳 高橋
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Priority to JP2003422821A priority Critical patent/JP4833512B2/ja
Priority to DE102004010688A priority patent/DE102004010688B4/de
Priority to US10/801,012 priority patent/US20040262254A1/en
Priority to CNB2004100310536A priority patent/CN100342518C/zh
Priority to CNB2007101419116A priority patent/CN100521083C/zh
Priority to KR1020040032933A priority patent/KR100736959B1/ko
Priority to TW093118155A priority patent/TWI361723B/zh
Publication of JP2005039185A publication Critical patent/JP2005039185A/ja
Priority to KR1020060112076A priority patent/KR100809126B1/ko
Publication of JP2005039185A5 publication Critical patent/JP2005039185A5/ja
Priority to US12/542,063 priority patent/US8623765B2/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67201—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the load-lock chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67069—Apparatus for fluid treatment for etching for drying etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
JP2003422821A 2003-06-24 2003-12-19 被処理体処理装置、被処理体処理方法及び被処理体搬送方法 Expired - Fee Related JP4833512B2 (ja)

Priority Applications (9)

Application Number Priority Date Filing Date Title
JP2003422821A JP4833512B2 (ja) 2003-06-24 2003-12-19 被処理体処理装置、被処理体処理方法及び被処理体搬送方法
DE102004010688A DE102004010688B4 (de) 2003-06-24 2004-03-04 Bearbeitungseinrichtung, Bearbeitungsverfahren, Drucksteuerverfahren, Transportverfahren, und Transporteinrichtung
US10/801,012 US20040262254A1 (en) 2003-06-24 2004-03-16 Processed object processing apparatus, processed object processing method, pressure control method, processed object transfer method, and transfer apparatus
CNB2004100310536A CN100342518C (zh) 2003-06-24 2004-04-12 处理设备、处理方法、压力控制方法、传送方法以及传送设备
CNB2007101419116A CN100521083C (zh) 2003-06-24 2004-04-12 处理方法、压力控制方法、传送方法及传送设备
KR1020040032933A KR100736959B1 (ko) 2003-06-24 2004-05-11 피처리체 처리 장치, 그의 피처리체 처리 방법, 압력 제어방법, 피처리체 반송 방법, 및 반송 장치
TW093118155A TWI361723B (en) 2003-06-24 2004-06-23 Processed object processing apparatus, processed object processing method, pressure control method, processed object transfer method, and transfer apparatus
KR1020060112076A KR100809126B1 (ko) 2003-06-24 2006-11-14 피처리체 처리 장치
US12/542,063 US8623765B2 (en) 2003-06-24 2009-08-17 Processed object processing apparatus, processed object processing method, pressure control method, processed object transfer method, and transfer apparatus

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003179435 2003-06-24
JP2003179435 2003-06-24
JP2003422821A JP4833512B2 (ja) 2003-06-24 2003-12-19 被処理体処理装置、被処理体処理方法及び被処理体搬送方法

Related Child Applications (1)

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JP2010048974A Division JP5001388B2 (ja) 2003-06-24 2010-03-05 被処理体処理装置の圧力制御方法

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JP2005039185A JP2005039185A (ja) 2005-02-10
JP2005039185A5 JP2005039185A5 (enExample) 2007-02-01
JP4833512B2 true JP4833512B2 (ja) 2011-12-07

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JP2003422821A Expired - Fee Related JP4833512B2 (ja) 2003-06-24 2003-12-19 被処理体処理装置、被処理体処理方法及び被処理体搬送方法

Country Status (6)

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US (2) US20040262254A1 (enExample)
JP (1) JP4833512B2 (enExample)
KR (2) KR100736959B1 (enExample)
CN (2) CN100521083C (enExample)
DE (1) DE102004010688B4 (enExample)
TW (1) TWI361723B (enExample)

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US8623765B2 (en) 2014-01-07
CN1574270A (zh) 2005-02-02
KR20050001299A (ko) 2005-01-06
CN100342518C (zh) 2007-10-10
US20090301525A1 (en) 2009-12-10
TWI361723B (en) 2012-04-11
TW200515952A (en) 2005-05-16
DE102004010688B4 (de) 2010-07-22
KR100809126B1 (ko) 2008-03-03
KR100736959B1 (ko) 2007-07-09
DE102004010688A1 (de) 2005-02-17
KR20060125661A (ko) 2006-12-06
JP2005039185A (ja) 2005-02-10
CN101101866A (zh) 2008-01-09

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