AU2710099A - Vacuum strip coating installation - Google Patents

Vacuum strip coating installation

Info

Publication number
AU2710099A
AU2710099A AU27100/99A AU2710099A AU2710099A AU 2710099 A AU2710099 A AU 2710099A AU 27100/99 A AU27100/99 A AU 27100/99A AU 2710099 A AU2710099 A AU 2710099A AU 2710099 A AU2710099 A AU 2710099A
Authority
AU
Australia
Prior art keywords
coating installation
airlock
strip coating
reaction chamber
vacuum strip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU27100/99A
Inventor
Christoph Feusi
Eva Maria Moser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eidgenoessische Materialprufungs und Forschungsanstalt EMPA
Original Assignee
Eidgenoessische Materialprufungs und Forschungsanstalt EMPA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=4194064&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=AU2710099(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Eidgenoessische Materialprufungs und Forschungsanstalt EMPA filed Critical Eidgenoessische Materialprufungs und Forschungsanstalt EMPA
Publication of AU2710099A publication Critical patent/AU2710099A/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
    • B29C37/0089—Sealing devices placed between articles and treatment installations during moulding or shaping, e.g. sealing off the entrance or exit of ovens or irradiation rooms, connections between rooms at different pressures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0866—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using particle radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Road Signs Or Road Markings (AREA)
  • Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Thermal Insulation (AREA)
  • Coating Apparatus (AREA)

Abstract

The invention relates to a device for cleaning, activating, coating, processing, surface-finishing and/or treating two- or three-dimensional substrates, especially elongated substrates such as substrate strips or strip-shaped materials. Said device comprises at least one reaction chamber (25) in which a vacuum can be generated. One airlock chamber (51, 55) each is positioned upstream and/or downstream of the reaction chamber. A cylinder airlock (11, 13) through which the substrate (1) can be fed is positioned between the airlock chamber and the reaction chamber.
AU27100/99A 1998-03-27 1999-03-25 Vacuum strip coating installation Abandoned AU2710099A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH73898 1998-03-27
CH738/98 1998-03-27
PCT/CH1999/000127 WO1999050472A1 (en) 1998-03-27 1999-03-25 Vacuum strip coating installation

Publications (1)

Publication Number Publication Date
AU2710099A true AU2710099A (en) 1999-10-18

Family

ID=4194064

Family Applications (1)

Application Number Title Priority Date Filing Date
AU27100/99A Abandoned AU2710099A (en) 1998-03-27 1999-03-25 Vacuum strip coating installation

Country Status (5)

Country Link
EP (1) EP1084283B1 (en)
AT (1) ATE262052T1 (en)
AU (1) AU2710099A (en)
DE (1) DE59908893D1 (en)
WO (1) WO1999050472A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4833512B2 (en) * 2003-06-24 2011-12-07 東京エレクトロン株式会社 To-be-processed object processing apparatus, to-be-processed object processing method, and to-be-processed object conveyance method
DE102004006131B4 (en) * 2004-02-07 2005-12-15 Applied Films Gmbh & Co. Kg Strip coater with a vacuum chamber and a coating roll
US8499784B2 (en) 2004-05-25 2013-08-06 Applied Materials Gmbh & Co. Kg Lock valve in particular for a strip processing unit
JP2007509237A (en) * 2004-05-25 2007-04-12 アプライド マテリアルズ ゲーエムベーハー ウント ツェーオー カーゲー Band processing plant
DE102007009615A1 (en) 2007-02-26 2008-08-28 Leybold Optics Gmbh Vacuum coating apparatus for front surface of strip material has two process chambers containing process roller, connected by transfer chamber containing strip feed and strip winding rollers, rear surface of strip contacting all rollers
RU2606750C2 (en) * 2015-04-30 2017-01-10 Общество с ограниченной ответственностью "Нанокомпозитные трековые мембраны" Method of ion-plasma sputtering of metal cathode on polymer film and device therefor
DE102019007935B4 (en) 2019-11-14 2023-06-29 Elfolion Gmbh Process for processing flexible substrates and vacuum processing system for implementing the process

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3351348A (en) * 1965-01-29 1967-11-07 Continental Can Co Vacuum chamber seal
DE3466414D1 (en) * 1983-06-17 1987-10-29 Hitachi Ltd Continuous vacuum treating apparatus
EP0155643B1 (en) * 1984-03-19 1990-06-27 Mitsubishi Jukogyo Kabushiki Kaisha Vacuum evaporation equipment
DE3851087T2 (en) * 1987-05-20 1994-12-01 Kawasaki Steel Co Differential pressure sealing apparatus and method.
DE9112225U1 (en) * 1991-10-01 1991-12-05 Otto Junker GmbH, 52152 Simmerath Locking device for the introduction and/or removal of strip-shaped material into/from steam or gas-filled containers

Also Published As

Publication number Publication date
EP1084283B1 (en) 2004-03-17
DE59908893D1 (en) 2004-04-22
WO1999050472A1 (en) 1999-10-07
ATE262052T1 (en) 2004-04-15
EP1084283A1 (en) 2001-03-21

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase