JP4665197B2 - 炭化珪素炉発熱体 - Google Patents
炭化珪素炉発熱体 Download PDFInfo
- Publication number
- JP4665197B2 JP4665197B2 JP2006520015A JP2006520015A JP4665197B2 JP 4665197 B2 JP4665197 B2 JP 4665197B2 JP 2006520015 A JP2006520015 A JP 2006520015A JP 2006520015 A JP2006520015 A JP 2006520015A JP 4665197 B2 JP4665197 B2 JP 4665197B2
- Authority
- JP
- Japan
- Prior art keywords
- silicon carbide
- heating element
- furnace heating
- carbide furnace
- strip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 79
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 57
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 57
- 239000000463 material Substances 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 11
- 238000001125 extrusion Methods 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 238000005266 casting Methods 0.000 description 7
- 238000005452 bending Methods 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- NLYAJNPCOHFWQQ-UHFFFAOYSA-N kaolin Chemical group O.O.O=[Al]O[Si](=O)O[Si](=O)O[Al]=O NLYAJNPCOHFWQQ-UHFFFAOYSA-N 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/40—Heating elements having the shape of rods or tubes
- H05B3/54—Heating elements having the shape of rods or tubes flexible
- H05B3/56—Heating cables
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
- H05B3/148—Silicon, e.g. silicon carbide, magnesium silicide, heating transistors or diodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/40—Heating elements having the shape of rods or tubes
- H05B3/54—Heating elements having the shape of rods or tubes flexible
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/40—Heating elements having the shape of rods or tubes
- H05B3/54—Heating elements having the shape of rods or tubes flexible
- H05B3/56—Heating cables
- H05B3/565—Heating cables flat cables
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/40—Heating elements having the shape of rods or tubes
- H05B3/54—Heating elements having the shape of rods or tubes flexible
- H05B3/58—Heating hoses; Heating collars
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/62—Heating elements specially adapted for furnaces
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/62—Heating elements specially adapted for furnaces
- H05B3/64—Heating elements specially adapted for furnaces using ribbon, rod, or wire heater
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
Landscapes
- Resistance Heating (AREA)
- Ceramic Products (AREA)
- Furnace Details (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Light Receiving Elements (AREA)
Description
Claims (16)
- 非管状のストリップの形態の押し出し成形された炭化珪素炉発熱体であって、
前記ストリップは、前記ストリップの長さ方向に沿う全体において3:1よりも大きい断面のアスペクト比を有するとともに、3mm以上の厚さを有し、炭化珪素を含む材料が押し出されることにより成形されている炭化珪素炉発熱体。 - 非中空形状である、請求項1に記載の炭化珪素炉発熱体。
- 前記アスペクト比が5:1よりも大きい、請求項2に記載の炭化珪素炉発熱体。
- 前記アスペクト比が10:1よりも大きい、請求項3に記載の炭化珪素炉発熱体。
- 非ストリップの形態の冷端部を備える、請求項1〜4のいずれか一項に記載の炭化珪素炉発熱体。
- 前記ストリップの一部は、低い抵抗率を有すると共に冷端部を形成する、請求項1〜4のいずれか一項に記載の炭化珪素炉発熱体。
- 前記ストリップは、該ストリップの平面外に曲げられる、請求項1に記載の炭化珪素炉発熱体。
- ほぼU字形状である、請求項7に記載の炭化珪素炉発熱体。
- 前記ストリップは、該ストリップの長さの少なくとも一部の断面が湾曲される、請求項1に記載の炭化珪素炉発熱体。
- 再結晶された自己結合炭化珪素材料から成る、請求項1〜9のいずれか一項に記載の炭化珪素炉発熱体。
- 反応結合炭化珪素又は反応焼結炭化珪素から成る、請求項1〜9のいずれか一項に記載の炭化珪素炉発熱体。
- ストリップの予備成形体が、押し出し成形により作製され、
押し出し成形後に、前記予備成形体が曲げ成形される、請求項7又は9に記載の炭化珪素炉発熱体を作製する方法。 - 冷端部は、前記炭化珪素炉発熱体とは別個に作製され、
その後、前記炭化珪素炉発熱体に接合される、請求項12に記載の方法。 - 冷端部は、前記炭化珪素炉発熱体と一体形成される、請求項12に記載の方法。
- 前記炭化珪素炉発熱体は、自己結合炭化珪素材料を形成するために再結晶される、請求項12〜14のいずれか一項に記載の方法。
- 押し出し成形された前記予備成形体の材料は、押し出し成形の工程を経て反応結合炭化珪素又は反応焼結炭化珪素に成る材料である、請求項12〜14のいずれか一項に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0316658A GB2404128B (en) | 2003-07-16 | 2003-07-16 | Silicon carbide furnace heating elements |
PCT/GB2004/003106 WO2005009081A1 (en) | 2003-07-16 | 2004-07-16 | Silicon carbide heating elements |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007535782A JP2007535782A (ja) | 2007-12-06 |
JP4665197B2 true JP4665197B2 (ja) | 2011-04-06 |
Family
ID=27763932
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006520015A Expired - Fee Related JP4665197B2 (ja) | 2003-07-16 | 2004-07-16 | 炭化珪素炉発熱体 |
Country Status (11)
Country | Link |
---|---|
US (1) | US7759618B2 (ja) |
EP (1) | EP1645168B1 (ja) |
JP (1) | JP4665197B2 (ja) |
KR (1) | KR101105158B1 (ja) |
CN (1) | CN1833467B (ja) |
AT (1) | ATE354928T1 (ja) |
DE (1) | DE602004004899T2 (ja) |
ES (1) | ES2280979T3 (ja) |
GB (1) | GB2404128B (ja) |
RU (1) | RU2344575C2 (ja) |
WO (1) | WO2005009081A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0810406D0 (en) * | 2008-06-06 | 2008-07-09 | Kanthal Ltd | Electrical resistance heating elements |
US9891000B2 (en) * | 2013-08-15 | 2018-02-13 | Ipsen, Inc. | Center heating element for a vacuum heat treating furnace |
JP5986136B2 (ja) * | 2014-04-30 | 2016-09-06 | Jx金属株式会社 | MoSi2製発熱体の製造方法 |
US9951952B2 (en) * | 2014-10-15 | 2018-04-24 | Specialized Component Parts Limited, Inc. | Hot surface igniters and methods of making same |
WO2019213561A1 (en) * | 2018-05-03 | 2019-11-07 | I Squared R Element Company, Inc. | Heating element system, method for assembly and use |
KR102301312B1 (ko) * | 2019-11-21 | 2021-09-10 | 한국세라믹기술원 | 급속 발열장치 |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50102892A (ja) * | 1974-01-21 | 1975-08-14 | ||
JPS62117288A (ja) * | 1985-11-18 | 1987-05-28 | 東芝セラミツクス株式会社 | 半導体熱処理炉用ヒ−タ |
JPH0234562A (ja) * | 1988-07-25 | 1990-02-05 | Teijin Ltd | 導電性炭化珪素シートの製造方法 |
JPH0641090U (ja) * | 1992-11-02 | 1994-05-31 | 日本ピラー工業株式会社 | セラミック板状ヒータの電極構造 |
JPH08219648A (ja) * | 1995-02-07 | 1996-08-30 | Murata Mfg Co Ltd | 熱処理炉 |
JPH09213462A (ja) * | 1996-02-06 | 1997-08-15 | Tokai Konetsu Kogyo Co Ltd | 炭化珪素質発熱体 |
JPH11228293A (ja) * | 1998-02-06 | 1999-08-24 | Sony Corp | 単結晶育成方法と育成装置 |
JP2001077183A (ja) * | 1999-06-09 | 2001-03-23 | Ibiden Co Ltd | 半導体製造・検査装置用セラミック基板およびその製造方法 |
JP2001181047A (ja) * | 1999-12-22 | 2001-07-03 | Tokai Konetsu Kogyo Co Ltd | 炭化けい素発熱体 |
JP2001257056A (ja) * | 2000-03-09 | 2001-09-21 | Tokai Konetsu Kogyo Co Ltd | 三相型炭化珪素発熱体 |
JP2002203662A (ja) * | 2000-10-31 | 2002-07-19 | Sumitomo Osaka Cement Co Ltd | ヒータエレメント及び加熱装置並びに基板加熱装置 |
Family Cites Families (43)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE301457C (ja) | ||||
US650234A (en) | 1899-08-07 | 1900-05-22 | Francis A J Fitzgerald | Process of making carborundum articles. |
GB513728A (en) | 1938-04-11 | 1939-10-20 | Carborundum Co | Improvements in or relating to articles comprising silicon carbide |
US2431326A (en) | 1942-10-29 | 1947-11-25 | Carborundum Co | Silicon carbide articles and method of making same |
US2546142A (en) | 1950-03-30 | 1951-03-27 | Norton Co | Electrical heating rod and method of making same |
DE1124166B (de) * | 1955-03-08 | 1962-02-22 | Siemens Planiawerke Ag | Heizelement fuer elektrische Widerstandsoefen mit einer in den zu beheizenden Ofen ragenden Gluehschleife |
US3094679A (en) | 1960-01-13 | 1963-06-18 | Carborundum Co | Silicon carbide resistance body and method of making the same |
DE1144418B (de) | 1961-07-20 | 1963-02-28 | Siemens Planiawerke A G Fuer K | Verfahren zur Herstellung einer Kontaktschicht auf einem silizium-haltigen Werkstoff |
NL6703548A (ja) * | 1967-03-07 | 1968-09-09 | ||
US3518351A (en) | 1968-12-16 | 1970-06-30 | Carborundum Co | Heating element |
GB1423136A (en) | 1972-02-17 | 1976-01-28 | Power Dev Ltd | Heating element |
DE2310148C3 (de) | 1973-03-01 | 1980-01-10 | Danfoss A/S, Nordborg (Daenemark) | Verfahren zur Herstellung eines elektrischen Widerstandselementes |
US3859501A (en) | 1973-09-17 | 1975-01-07 | Squared R Element Company Inc | Three-phase heating element |
US3964943A (en) * | 1974-02-12 | 1976-06-22 | Danfoss A/S | Method of producing electrical resistor |
US3875477A (en) * | 1974-04-23 | 1975-04-01 | Norton Co | Silicon carbide resistance igniter |
JPS548795A (en) | 1977-06-17 | 1979-01-23 | Tax Adm Agency | Recovery of alcohol from aclohol-containing wet solids, and simultanious drying of the solids |
JPS5487950A (en) * | 1977-12-24 | 1979-07-12 | Tokai Konetsu Kogyo Kk | Linear or banddshaped carbonized silicon heater |
US4272639A (en) | 1979-08-01 | 1981-06-09 | Btu Engineering Corporation | Helically wound heater |
SU1043007A1 (ru) | 1981-07-27 | 1983-09-23 | Днепропетровский Ордена Трудового Красного Знамени Металлургический Институт | Устройство дл непрерывного прессовани керамических изделий |
JPS58209084A (ja) | 1982-05-28 | 1983-12-05 | 株式会社日立製作所 | 直熱形ヒ−タ材 |
JPH01100888A (ja) | 1987-10-13 | 1989-04-19 | Mitsubishi Heavy Ind Ltd | セラミックスヒータ |
DD301457A7 (de) * | 1988-01-11 | 1993-02-04 | Elektrokohle Lichtenberg Ag | Verfahren zur herstellung von kohlerohrwiderstandsheizern fuer den sic - reaktionssinterprozess |
JPH0481934A (ja) | 1990-07-24 | 1992-03-16 | Omron Corp | 情報処理装置 |
JPH04230985A (ja) | 1991-06-06 | 1992-08-19 | Tokai Konetsu Kogyo Co Ltd | 炭化珪素発熱体の製造方法 |
JP3131914B2 (ja) | 1992-05-12 | 2001-02-05 | 東海高熱工業株式会社 | 炭化けい素発熱体およびその製造方法 |
US5705261A (en) | 1993-10-28 | 1998-01-06 | Saint-Gobain/Norton Industrial Ceramics Corporation | Active metal metallization of mini-igniters by silk screening |
JP3230793B2 (ja) * | 1995-01-24 | 2001-11-19 | 富士電機株式会社 | セラミックス発熱体 |
CN1144787A (zh) * | 1995-02-16 | 1997-03-12 | 薛天瑞 | 一种硅碳棒冷挤压成型带端部一次烧成的方法 |
JP3150606B2 (ja) | 1996-03-19 | 2001-03-26 | 住友大阪セメント株式会社 | 炭化珪素焼結体の比抵抗制御方法 |
JP3834780B2 (ja) | 1997-04-24 | 2006-10-18 | 東海高熱工業株式会社 | 炭化珪素発熱体の端子構造 |
US6090733A (en) | 1997-08-27 | 2000-07-18 | Bridgestone Corporation | Sintered silicon carbide and method for producing the same |
JP2000048936A (ja) | 1998-07-28 | 2000-02-18 | Tokai Konetsu Kogyo Co Ltd | 炭化けい素発熱体 |
JP3548451B2 (ja) | 1999-02-22 | 2004-07-28 | 本田技研工業株式会社 | ピストンのピン孔構造 |
CN1296724A (zh) | 1999-06-09 | 2001-05-23 | 揖斐电株式会社 | 陶瓷加热器、其制造方法及用于加热体的导电膏 |
US6250127B1 (en) * | 1999-10-11 | 2001-06-26 | Polese Company, Inc. | Heat-dissipating aluminum silicon carbide composite manufacturing method |
SG126745A1 (en) * | 1999-11-30 | 2006-11-29 | Matsushita Electric Ind Co Ltd | Infrared ray lamp, heating apparatus and method ofproducing the infrared ray lamp |
JP2002338366A (ja) | 2001-05-21 | 2002-11-27 | Tokai Konetsu Kogyo Co Ltd | 高純度炭化珪素発熱体およびその製造方法 |
JP4796716B2 (ja) | 2001-08-30 | 2011-10-19 | 東海高熱工業株式会社 | 反応焼結炭化珪素発熱体の製造方法 |
KR100460810B1 (ko) | 2002-03-05 | 2004-12-09 | (주)위너 테크 | 고효율 고온용 세라믹 발열체 및 그의 제조방법 |
JP4056774B2 (ja) | 2002-03-26 | 2008-03-05 | 住友大阪セメント株式会社 | 発熱体及びその製造方法 |
JP2003327478A (ja) | 2002-05-09 | 2003-11-19 | Tokai Konetsu Kogyo Co Ltd | 炭化珪素発熱体およびその接合方法 |
EP1523458A1 (en) | 2002-06-18 | 2005-04-20 | The Morgan Crucible Company Plc | Drying ceramic articles during manufacture |
JP2005149973A (ja) | 2003-11-18 | 2005-06-09 | Tokai Konetsu Kogyo Co Ltd | 炭化珪素発熱体及び炭化珪素発熱体の製造方法 |
-
2003
- 2003-07-16 GB GB0316658A patent/GB2404128B/en not_active Expired - Fee Related
-
2004
- 2004-07-16 US US10/564,111 patent/US7759618B2/en not_active Expired - Fee Related
- 2004-07-16 ES ES04743444T patent/ES2280979T3/es active Active
- 2004-07-16 AT AT04743444T patent/ATE354928T1/de not_active IP Right Cessation
- 2004-07-16 DE DE602004004899T patent/DE602004004899T2/de active Active
- 2004-07-16 WO PCT/GB2004/003106 patent/WO2005009081A1/en active IP Right Grant
- 2004-07-16 CN CN2004800204643A patent/CN1833467B/zh not_active Expired - Fee Related
- 2004-07-16 KR KR1020067000983A patent/KR101105158B1/ko active IP Right Grant
- 2004-07-16 JP JP2006520015A patent/JP4665197B2/ja not_active Expired - Fee Related
- 2004-07-16 EP EP04743444A patent/EP1645168B1/en not_active Not-in-force
- 2004-07-16 RU RU2006104702/09A patent/RU2344575C2/ru not_active IP Right Cessation
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50102892A (ja) * | 1974-01-21 | 1975-08-14 | ||
JPS62117288A (ja) * | 1985-11-18 | 1987-05-28 | 東芝セラミツクス株式会社 | 半導体熱処理炉用ヒ−タ |
JPH0234562A (ja) * | 1988-07-25 | 1990-02-05 | Teijin Ltd | 導電性炭化珪素シートの製造方法 |
JPH0641090U (ja) * | 1992-11-02 | 1994-05-31 | 日本ピラー工業株式会社 | セラミック板状ヒータの電極構造 |
JPH08219648A (ja) * | 1995-02-07 | 1996-08-30 | Murata Mfg Co Ltd | 熱処理炉 |
JPH09213462A (ja) * | 1996-02-06 | 1997-08-15 | Tokai Konetsu Kogyo Co Ltd | 炭化珪素質発熱体 |
JPH11228293A (ja) * | 1998-02-06 | 1999-08-24 | Sony Corp | 単結晶育成方法と育成装置 |
JP2001077183A (ja) * | 1999-06-09 | 2001-03-23 | Ibiden Co Ltd | 半導体製造・検査装置用セラミック基板およびその製造方法 |
JP2001181047A (ja) * | 1999-12-22 | 2001-07-03 | Tokai Konetsu Kogyo Co Ltd | 炭化けい素発熱体 |
JP2001257056A (ja) * | 2000-03-09 | 2001-09-21 | Tokai Konetsu Kogyo Co Ltd | 三相型炭化珪素発熱体 |
JP2002203662A (ja) * | 2000-10-31 | 2002-07-19 | Sumitomo Osaka Cement Co Ltd | ヒータエレメント及び加熱装置並びに基板加熱装置 |
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Publication number | Publication date |
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EP1645168A1 (en) | 2006-04-12 |
KR20060039905A (ko) | 2006-05-09 |
KR101105158B1 (ko) | 2012-01-17 |
RU2344575C2 (ru) | 2009-01-20 |
GB0316658D0 (en) | 2003-08-20 |
WO2005009081A1 (en) | 2005-01-27 |
EP1645168B1 (en) | 2007-02-21 |
DE602004004899T2 (de) | 2007-12-06 |
GB2404128B (en) | 2005-08-24 |
US7759618B2 (en) | 2010-07-20 |
ATE354928T1 (de) | 2007-03-15 |
US20060198420A1 (en) | 2006-09-07 |
JP2007535782A (ja) | 2007-12-06 |
DE602004004899D1 (de) | 2007-04-05 |
CN1833467B (zh) | 2011-08-17 |
CN1833467A (zh) | 2006-09-13 |
GB2404128A (en) | 2005-01-19 |
ES2280979T3 (es) | 2007-09-16 |
RU2006104702A (ru) | 2006-09-10 |
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