JP2014528899A5 - - Google Patents

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JP2014528899A5
JP2014528899A5 JP2014534826A JP2014534826A JP2014528899A5 JP 2014528899 A5 JP2014528899 A5 JP 2014528899A5 JP 2014534826 A JP2014534826 A JP 2014534826A JP 2014534826 A JP2014534826 A JP 2014534826A JP 2014528899 A5 JP2014528899 A5 JP 2014528899A5
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Japan
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boron
reaction
zone
gas
unreacted
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JP2014534826A
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Japanese (ja)
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JP2014528899A (ja
JP6133877B2 (ja
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Priority claimed from PCT/US2012/059357 external-priority patent/WO2013055688A1/en
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Publication of JP2014528899A5 publication Critical patent/JP2014528899A5/ja
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JP2014534826A 2011-10-10 2012-10-09 Ｂ２ｆ４製造プロセス Active JP6133877B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161545546P 2011-10-10 2011-10-10
US61/545,546 2011-10-10
PCT/US2012/059357 WO2013055688A1 (en) 2011-10-10 2012-10-09 B2f4 manufacturing process

Publications (3)

Publication Number Publication Date
JP2014528899A JP2014528899A (ja) 2014-10-30
JP2014528899A5 true JP2014528899A5 (enExample) 2015-11-12
JP6133877B2 JP6133877B2 (ja) 2017-05-24

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Family Applications (1)

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JP2014534826A Active JP6133877B2 (ja) 2011-10-10 2012-10-09 Ｂ２ｆ４製造プロセス

Country Status (8)

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US (2) US9938156B2 (enExample)
EP (1) EP2776368A4 (enExample)
JP (1) JP6133877B2 (enExample)
KR (1) KR102012056B1 (enExample)
CN (2) CN104105662B (enExample)
SG (2) SG11201401337QA (enExample)
TW (1) TWI583442B (enExample)
WO (1) WO2013055688A1 (enExample)

Families Citing this family (6)

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TWI583442B (zh) 2011-10-10 2017-05-21 恩特葛瑞斯股份有限公司 Ｂ２ｆ４之製造程序
KR20170004381A (ko) * 2015-07-02 2017-01-11 삼성전자주식회사 불순물 영역을 포함하는 반도체 장치의 제조 방법
JP7093736B2 (ja) * 2019-02-28 2022-06-30 株式会社神鋼環境ソリューション 蓋構造体及び蓋付タンク
JP7506085B2 (ja) * 2019-10-03 2024-06-25 パナソニック インテレクチュアル プロパティ コーポレーション オブ アメリカ 三次元データ符号化方法、三次元データ復号方法、三次元データ符号化装置、及び三次元データ復号装置

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