JP2012528011A5 - - Google Patents

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JP2012528011A5
JP2012528011A5 JP2012513324A JP2012513324A JP2012528011A5 JP 2012528011 A5 JP2012528011 A5 JP 2012528011A5 JP 2012513324 A JP2012513324 A JP 2012513324A JP 2012513324 A JP2012513324 A JP 2012513324A JP 2012528011 A5 JP2012528011 A5 JP 2012528011A5
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galvo
aod
subsystem
workpiece
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JP5826744B2 (ja
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JP2012513324A 2009-05-28 2010-05-28 誘電体又は他の材料のレーザ加工における音響光学偏向器の適用 Active JP5826744B2 (ja)

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US18188909P 2009-05-28 2009-05-28
US61/181,889 2009-05-28
PCT/US2010/036702 WO2010138897A2 (en) 2009-05-28 2010-05-28 Acousto-optic deflector applications in laser processing of dielectric or other materials

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JP2015202497A Division JP6170980B2 (ja) 2009-05-28 2015-10-14 誘電体又は他の材料のレーザ加工における音響光学偏向器の適用

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JP2012528011A JP2012528011A (ja) 2012-11-12
JP2012528011A5 true JP2012528011A5 (https=) 2014-09-04
JP5826744B2 JP5826744B2 (ja) 2015-12-02

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JP2012513327A Active JP5689873B2 (ja) 2009-05-28 2010-05-28 レーザビームと対象機能部とのレンズを通した位置合わせを用いるレーザ加工システム
JP2012513324A Active JP5826744B2 (ja) 2009-05-28 2010-05-28 誘電体又は他の材料のレーザ加工における音響光学偏向器の適用
JP2015202497A Active JP6170980B2 (ja) 2009-05-28 2015-10-14 誘電体又は他の材料のレーザ加工における音響光学偏向器の適用

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US (5) US8404998B2 (https=)
JP (3) JP5689873B2 (https=)
KR (8) KR102402984B1 (https=)
CN (2) CN102449863B (https=)
TW (3) TWI594828B (https=)
WO (2) WO2010138900A2 (https=)

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