JP2016512792A5 - - Google Patents

Download PDF

Info

Publication number
JP2016512792A5
JP2016512792A5 JP2016502393A JP2016502393A JP2016512792A5 JP 2016512792 A5 JP2016512792 A5 JP 2016512792A5 JP 2016502393 A JP2016502393 A JP 2016502393A JP 2016502393 A JP2016502393 A JP 2016502393A JP 2016512792 A5 JP2016512792 A5 JP 2016512792A5
Authority
JP
Japan
Prior art keywords
time
laser
route sequence
turning
beam position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2016502393A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016512792A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2014/027275 external-priority patent/WO2014152380A1/en
Publication of JP2016512792A publication Critical patent/JP2016512792A/ja
Publication of JP2016512792A5 publication Critical patent/JP2016512792A5/ja
Pending legal-status Critical Current

Links

JP2016502393A 2013-03-15 2014-03-14 Aodラウト加工用レーザシステム及び方法 Pending JP2016512792A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361791361P 2013-03-15 2013-03-15
US61/791,361 2013-03-15
PCT/US2014/027275 WO2014152380A1 (en) 2013-03-15 2014-03-14 Laser systems and methods for aod rout processing

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2019010116A Division JP6773822B2 (ja) 2013-03-15 2019-01-24 Aodラウト加工用レーザシステム及び方法

Publications (2)

Publication Number Publication Date
JP2016512792A JP2016512792A (ja) 2016-05-09
JP2016512792A5 true JP2016512792A5 (https=) 2017-04-20

Family

ID=51522871

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2016502393A Pending JP2016512792A (ja) 2013-03-15 2014-03-14 Aodラウト加工用レーザシステム及び方法
JP2019010116A Active JP6773822B2 (ja) 2013-03-15 2019-01-24 Aodラウト加工用レーザシステム及び方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2019010116A Active JP6773822B2 (ja) 2013-03-15 2019-01-24 Aodラウト加工用レーザシステム及び方法

Country Status (6)

Country Link
US (1) US9931713B2 (https=)
JP (2) JP2016512792A (https=)
KR (1) KR102245810B1 (https=)
CN (1) CN105102169B (https=)
TW (1) TWI632013B (https=)
WO (1) WO2014152380A1 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6217624B2 (ja) * 2014-12-26 2017-10-25 ブラザー工業株式会社 レーザ加工装置及びレーザ加工方法
KR20250037607A (ko) * 2015-09-09 2025-03-17 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 작업물들을 레이저 가공하기 위한 레이저 가공 장치, 방법들 및 관련된 배열들
KR102401037B1 (ko) 2016-12-30 2022-05-24 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 레이저 가공 장치에서 광학계의 수명을 연장하는 방법 및 시스템
CN116275467A (zh) * 2018-06-05 2023-06-23 伊雷克托科学工业股份有限公司 激光加工设备、其操作方法以及使用其加工工件的方法
TWI892641B (zh) 2019-01-31 2025-08-01 美商伊雷克托科學工業股份有限公司 光學系統
US20220168847A1 (en) 2019-06-10 2022-06-02 Electro Scientific Industries, Inc. Laser processing apparatus, methods of operating the same, and methods of processing workpieces using the same
JP7484112B2 (ja) * 2019-09-20 2024-05-16 カシオ計算機株式会社 印刷装置、印刷方法及びプログラム
WO2022271483A1 (en) * 2021-06-21 2022-12-29 Electro Scientific Industries, Inc. Laser processing apparatus including beam analysis system and methods of measurement and control of beam characteristics

Family Cites Families (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01197084A (ja) * 1988-01-29 1989-08-08 Fanuc Ltd Cncレーザ加工機のパワー制御方式
JPH0230388A (ja) * 1988-07-20 1990-01-31 Komatsu Ltd レーザ切断方法
EP0488402B1 (en) * 1990-11-30 1996-02-21 Ebara Corporation Method of cutting grooves in hydrodynamic bearing made of ceramic material
US5841099A (en) 1994-07-18 1998-11-24 Electro Scientific Industries, Inc. Method employing UV laser pulses of varied energy density to form depthwise self-limiting blind vias in multilayered targets
US6555781B2 (en) * 1999-05-10 2003-04-29 Nanyang Technological University Ultrashort pulsed laser micromachining/submicromachining using an acoustooptic scanning device with dispersion compensation
TW482705B (en) 1999-05-28 2002-04-11 Electro Scient Ind Inc Beam shaping and projection imaging with solid state UV Gaussian beam to form blind vias
JP3768730B2 (ja) * 1999-06-14 2006-04-19 松下電器産業株式会社 レーザ加工機およびその数値制御装置ならびにレーザ加工機の制御方法
US6676878B2 (en) 2001-01-31 2004-01-13 Electro Scientific Industries, Inc. Laser segmented cutting
JP2003136270A (ja) 2001-11-02 2003-05-14 Hitachi Via Mechanics Ltd レーザ加工装置
US6706999B1 (en) 2003-02-24 2004-03-16 Electro Scientific Industries, Inc. Laser beam tertiary positioner apparatus and method
JP4443208B2 (ja) 2003-12-12 2010-03-31 日立ビアメカニクス株式会社 スキャナ装置
US7133186B2 (en) 2004-06-07 2006-11-07 Electro Scientific Industries, Inc. AOM modulation techniques employing transducers to modulate different axes
US7425471B2 (en) 2004-06-18 2008-09-16 Electro Scientific Industries, Inc. Semiconductor structure processing using multiple laser beam spots spaced on-axis with cross-axis offset
US7259354B2 (en) 2004-08-04 2007-08-21 Electro Scientific Industries, Inc. Methods for processing holes by moving precisely timed laser pulses in circular and spiral trajectories
KR100462359B1 (ko) * 2004-08-18 2004-12-17 주식회사 이오테크닉스 폴리곤 미러를 이용한 레이저 가공장치 및 방법
JP2006143996A (ja) 2004-10-19 2006-06-08 Nitto Denko Corp 耐熱性樹脂
US7244906B2 (en) 2005-08-30 2007-07-17 Electro Scientific Industries, Inc. Energy monitoring or control of individual vias formed during laser micromachining
US8084706B2 (en) * 2006-07-20 2011-12-27 Gsi Group Corporation System and method for laser processing at non-constant velocities
WO2008091380A2 (en) * 2006-08-22 2008-07-31 Gsi Group Corporation System and method for employing a resonant scanner in an x-y high speed drilling system
JP2008049383A (ja) 2006-08-28 2008-03-06 Sumitomo Heavy Ind Ltd ビーム照射方法及びビーム照射装置
JP2008168297A (ja) * 2007-01-05 2008-07-24 Sumitomo Heavy Ind Ltd レーザ加工装置及びレーザ加工方法
CN200998940Y (zh) * 2007-01-08 2008-01-02 李毅 太阳能电池激光标刻装置
US7599048B2 (en) * 2007-02-09 2009-10-06 Wafermasters, Inc. Optical emission spectroscopy process monitoring and material characterization
US7718554B2 (en) * 2007-02-09 2010-05-18 Wafermasters, Inc. Focused laser beam processing
DE102007012815B4 (de) * 2007-03-16 2024-06-06 Dmg Mori Ultrasonic Lasertec Gmbh Verfahren und Vorrichtung zur Bildung eines Gesenks
US8026158B2 (en) 2007-06-01 2011-09-27 Electro Scientific Industries, Inc. Systems and methods for processing semiconductor structures using laser pulses laterally distributed in a scanning window
GB0800333D0 (en) 2008-01-09 2008-02-20 Ucl Business Plc Beam deflection apparatus and methods
US8426768B2 (en) * 2008-02-20 2013-04-23 Aerotech, Inc. Position-based laser triggering for scanner
EP2163339B1 (de) * 2008-09-11 2016-11-02 Bystronic Laser AG Laserschneidanlage zum Schneiden eines Werkstücks mit einem Laserstrahl mit einer variablen Schneidgeschwindigkeit
US8680430B2 (en) * 2008-12-08 2014-03-25 Electro Scientific Industries, Inc. Controlling dynamic and thermal loads on laser beam positioning system to achieve high-throughput laser processing of workpiece features
US20100252959A1 (en) 2009-03-27 2010-10-07 Electro Scientific Industries, Inc. Method for improved brittle materials processing
TWI594828B (zh) * 2009-05-28 2017-08-11 伊雷克托科學工業股份有限公司 應用於雷射處理工件中的特徵的聲光偏轉器及相關雷射處理方法
JP4961468B2 (ja) * 2009-10-29 2012-06-27 三星ダイヤモンド工業株式会社 レーザー加工方法、被加工物の分割方法およびレーザー加工装置
GB201006679D0 (en) * 2010-04-21 2010-06-09 Ucl Business Plc Methods and apparatus to control acousto-optic deflectors
CN110039173B (zh) 2010-10-22 2021-03-23 伊雷克托科学工业股份有限公司 用于光束抖动和刮削的镭射加工系统和方法
JP2012187620A (ja) * 2011-03-11 2012-10-04 Sumitomo Heavy Ind Ltd レーザ加工方法及びレーザ加工計画方法
JP2012245539A (ja) * 2011-05-27 2012-12-13 Panasonic Industrial Devices Sunx Co Ltd レーザマーキング装置
CN102679948A (zh) * 2012-03-28 2012-09-19 中国科学院上海技术物理研究所 一种消除高重频激光测距脉冲混叠的方法
WO2014085479A1 (en) * 2012-11-30 2014-06-05 Applied Materials, Inc Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing

Similar Documents

Publication Publication Date Title
JP2016512792A5 (https=)
PH12013501380A1 (en) Beam processor
MX394232B (es) Método y sistema para explorar un objeto.
WO2015168218A3 (en) Light control systems and methods
JP2012528011A5 (https=)
TW201613710A (en) Method and device for laser-based machining of planar, crystalline substrates, in particular of semiconductor substrates
EP3888203A4 (en) LASER SYSTEM FOR LIDAR
EP3908222A4 (en) COMPREHENSIVE MESSAGING SYSTEM FOR ROBOTIC SURGICAL SYSTEMS
WO2017021778A3 (en) Methods and systems for generating and using localisation reference data
WO2019121145A3 (de) Verfahren und vorrichtung zur erfassung einer fokuslage eines laserstrahls
MX385506B (es) Metodo y sistema para el endurecimiento por laser de una superficie de una pieza de trabajo.
IL253303B (en) A method of laser processing of a metallic material with high dynamic control of the movement axes of the laser beam along a predetermined processing path, as well as a machine and a computer program for the implementation of said method
HUE059800T2 (hu) Eljárás anyagmegmunkáló gép lézernyalábjának terjedési útja mentén elhelyezett optikai elem mûködési állapotának detektálására, valamint az eljárást végrehajtó rendszerrel ellátott lézeres megmunkáló gép
JP2014089211A5 (https=)
WO2017097812A3 (de) Verfahren zur bestimmung der referenz-fokuslage eines laserstrahls
KR20180084667A (ko) 기판 프로세싱 방법
GB201312015D0 (en) Sensor location method and system
JP2018512059A5 (https=)
JP2019537140A5 (https=)
SG10201806236TA (en) Cutting apparatus and wafer processing method
WO2018007344A3 (de) Vorrichtung zum einführen einer optik in den strahlengang eines laserbearbeitungskopfes und laserbearbeitungskopf mit derselben
GB201316950D0 (en) Device and method for cutting off an end section of a can blank
EP3417515A4 (en) HIGHLY EFFICIENT LASER SYSTEM FOR GENERATING A THIRD HARMONIOUS
WO2014130610A3 (en) Apparatus and method for forming three-dimensional objects using linear solidification
JP2016081403A (ja) 無人移動体とその経路生成方法