JP2008522446A5 - - Google Patents

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Publication number
JP2008522446A5
JP2008522446A5 JP2007544574A JP2007544574A JP2008522446A5 JP 2008522446 A5 JP2008522446 A5 JP 2008522446A5 JP 2007544574 A JP2007544574 A JP 2007544574A JP 2007544574 A JP2007544574 A JP 2007544574A JP 2008522446 A5 JP2008522446 A5 JP 2008522446A5
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JP
Japan
Prior art keywords
temperature
chuck
workpiece
flat support
heating
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Pending
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JP2007544574A
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English (en)
Japanese (ja)
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JP2008522446A (ja
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Priority claimed from US11/004,179 external-priority patent/US20050211385A1/en
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Publication of JP2008522446A publication Critical patent/JP2008522446A/ja
Publication of JP2008522446A5 publication Critical patent/JP2008522446A5/ja
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JP2007544574A 2004-12-02 2005-12-01 空間温度分布の制御方法及び装置 Pending JP2008522446A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/004,179 US20050211385A1 (en) 2001-04-30 2004-12-02 Method and apparatus for controlling spatial temperature distribution
PCT/US2005/043801 WO2006068805A1 (en) 2004-12-02 2005-12-01 Method and apparatus for controlling spatial temperature distribution

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011176261A Division JP2011244011A (ja) 2004-12-02 2011-08-11 空間温度分布の制御方法及び装置

Publications (2)

Publication Number Publication Date
JP2008522446A JP2008522446A (ja) 2008-06-26
JP2008522446A5 true JP2008522446A5 (enExample) 2012-08-09

Family

ID=36295018

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2007544574A Pending JP2008522446A (ja) 2004-12-02 2005-12-01 空間温度分布の制御方法及び装置
JP2011176261A Pending JP2011244011A (ja) 2004-12-02 2011-08-11 空間温度分布の制御方法及び装置
JP2014055288A Pending JP2014146822A (ja) 2004-12-02 2014-03-18 空間温度分布の制御方法及び装置

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2011176261A Pending JP2011244011A (ja) 2004-12-02 2011-08-11 空間温度分布の制御方法及び装置
JP2014055288A Pending JP2014146822A (ja) 2004-12-02 2014-03-18 空間温度分布の制御方法及び装置

Country Status (7)

Country Link
US (3) US20050211385A1 (enExample)
JP (3) JP2008522446A (enExample)
KR (1) KR101109440B1 (enExample)
CN (2) CN102122607B (enExample)
SG (3) SG158101A1 (enExample)
TW (1) TWI481297B (enExample)
WO (1) WO2006068805A1 (enExample)

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