JP2006080116A5 - - Google Patents

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Publication number
JP2006080116A5
JP2006080116A5 JP2004259280A JP2004259280A JP2006080116A5 JP 2006080116 A5 JP2006080116 A5 JP 2006080116A5 JP 2004259280 A JP2004259280 A JP 2004259280A JP 2004259280 A JP2004259280 A JP 2004259280A JP 2006080116 A5 JP2006080116 A5 JP 2006080116A5
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JP
Japan
Prior art keywords
layer
ferromagnetic layer
ferromagnetic
polycrystalline
magnesium oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004259280A
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English (en)
Japanese (ja)
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JP2006080116A (ja
JP4292128B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2004259280A external-priority patent/JP4292128B2/ja
Priority to JP2004259280A priority Critical patent/JP4292128B2/ja
Priority to EP05077020A priority patent/EP1633007B1/en
Priority to AT05077020T priority patent/ATE431969T1/de
Priority to EP08159511A priority patent/EP1973178B1/en
Priority to TW104101069A priority patent/TWI536624B/zh
Priority to TW101135284A priority patent/TWI504032B/zh
Priority to EP10150310A priority patent/EP2166581A3/en
Priority to DE602005014526T priority patent/DE602005014526D1/de
Priority to TW094130390A priority patent/TWI390780B/zh
Priority to KR1020050082694A priority patent/KR20060051048A/ko
Priority to CNA2009101180744A priority patent/CN101572184A/zh
Priority to CN2005100987654A priority patent/CN1755963B/zh
Priority to US11/219,866 priority patent/US20060056115A1/en
Publication of JP2006080116A publication Critical patent/JP2006080116A/ja
Priority to US11/876,916 priority patent/US20080055793A1/en
Priority to US11/969,049 priority patent/US8394649B2/en
Priority to US12/058,147 priority patent/US20080180862A1/en
Publication of JP2006080116A5 publication Critical patent/JP2006080116A5/ja
Priority to KR1020090048073A priority patent/KR20090071521A/ko
Publication of JP4292128B2 publication Critical patent/JP4292128B2/ja
Application granted granted Critical
Priority to KR1020100016839A priority patent/KR20100036294A/ko
Priority to KR1020100016838A priority patent/KR20100039310A/ko
Priority to US12/983,514 priority patent/US20110094875A1/en
Priority to KR1020120037829A priority patent/KR101234441B1/ko
Priority to KR1020120073272A priority patent/KR101196511B1/ko
Priority to US14/032,815 priority patent/US8934290B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2004259280A 2004-09-07 2004-09-07 磁気抵抗効果素子の製造方法 Expired - Lifetime JP4292128B2 (ja)

Priority Applications (23)

Application Number Priority Date Filing Date Title
JP2004259280A JP4292128B2 (ja) 2004-09-07 2004-09-07 磁気抵抗効果素子の製造方法
EP05077020A EP1633007B1 (en) 2004-09-07 2005-09-05 Magnetoresistance effect device and method of production of the same
AT05077020T ATE431969T1 (de) 2004-09-07 2005-09-05 Magnetoresistives bauelement und dessen herstellungsverfahren
EP08159511A EP1973178B1 (en) 2004-09-07 2005-09-05 Magnetoresistance effect device and method of production of the same
TW104101069A TWI536624B (zh) 2004-09-07 2005-09-05 Magnetoresistive element
TW101135284A TWI504032B (zh) 2004-09-07 2005-09-05 Method for manufacturing magnetoresistance effect elements
EP10150310A EP2166581A3 (en) 2004-09-07 2005-09-05 Magnetoresistance effect device and method of production of the same
DE602005014526T DE602005014526D1 (de) 2004-09-07 2005-09-05 Magnetoresistives Bauelement und dessen Herstellungsverfahren
TW094130390A TWI390780B (zh) 2004-09-07 2005-09-05 磁阻效應元件
KR1020050082694A KR20060051048A (ko) 2004-09-07 2005-09-06 자기저항 효과를 가지는 소자 및 그 제조 방법
CN2005100987654A CN1755963B (zh) 2004-09-07 2005-09-07 磁电阻效应元件及其制造方法
US11/219,866 US20060056115A1 (en) 2004-09-07 2005-09-07 Magnetoresistance effect device and method of production of the same
CNA2009101180744A CN101572184A (zh) 2004-09-07 2005-09-07 磁性多层膜制作装置
US11/876,916 US20080055793A1 (en) 2004-09-07 2007-10-23 Magnetoresistance effect device
US11/969,049 US8394649B2 (en) 2004-09-07 2008-01-03 Method of production of a magnetoresistance effect device
US12/058,147 US20080180862A1 (en) 2004-09-07 2008-03-28 Method of production of a magnetoresistance effect device
KR1020090048073A KR20090071521A (ko) 2004-09-07 2009-06-01 자기저항 효과를 가지는 소자의 제조 방법
KR1020100016839A KR20100036294A (ko) 2004-09-07 2010-02-24 자기저항 효과 소자의 제조 방법
KR1020100016838A KR20100039310A (ko) 2004-09-07 2010-02-24 자기저항 효과 소자의 제조 방법
US12/983,514 US20110094875A1 (en) 2004-09-07 2011-01-03 Magnetoresistance effect device and method of production of the same
KR1020120037829A KR101234441B1 (ko) 2004-09-07 2012-04-12 자기저항 효과 소자 및 ｍｒａｍ
KR1020120073272A KR101196511B1 (ko) 2004-09-07 2012-07-05 자기저항 효과 소자 및 ｍｒａｍ
US14/032,815 US8934290B2 (en) 2004-09-07 2013-09-20 Magnetoresistance effect device and method of production of the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004259280A JP4292128B2 (ja) 2004-09-07 2004-09-07 磁気抵抗効果素子の製造方法

Related Child Applications (3)

Application Number Title Priority Date Filing Date
JP2008163571A Division JP4774082B2 (ja) 2008-06-23 2008-06-23 磁気抵抗効果素子の製造方法
JP2008259594A Division JP2009044173A (ja) 2008-10-06 2008-10-06 磁性多層膜形成装置
JP2008259611A Division JP4774092B2 (ja) 2008-10-06 2008-10-06 磁気抵抗効果素子およびそれを用いたｍｒａｍ

Publications (3)

Publication Number Publication Date
JP2006080116A JP2006080116A (ja) 2006-03-23
JP2006080116A5 true JP2006080116A5 (enExample) 2008-08-14
JP4292128B2 JP4292128B2 (ja) 2009-07-08

Family

ID=35326492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004259280A Expired - Lifetime JP4292128B2 (ja) 2004-09-07 2004-09-07 磁気抵抗効果素子の製造方法

Country Status (8)

Country Link
US (6) US20060056115A1 (enExample)
EP (3) EP1633007B1 (enExample)
JP (1) JP4292128B2 (enExample)
KR (6) KR20060051048A (enExample)
CN (2) CN1755963B (enExample)
AT (1) ATE431969T1 (enExample)
DE (1) DE602005014526D1 (enExample)
TW (3) TWI390780B (enExample)

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