JP4619450B2 - 真空薄膜形成加工装置 - Google Patents
真空薄膜形成加工装置 Download PDFInfo
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- JP4619450B2 JP4619450B2 JP2009535932A JP2009535932A JP4619450B2 JP 4619450 B2 JP4619450 B2 JP 4619450B2 JP 2009535932 A JP2009535932 A JP 2009535932A JP 2009535932 A JP2009535932 A JP 2009535932A JP 4619450 B2 JP4619450 B2 JP 4619450B2
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- 239000010409 thin film Substances 0.000 title claims description 32
- 239000000758 substrate Substances 0.000 claims description 125
- 238000004544 sputter deposition Methods 0.000 claims description 68
- 230000007246 mechanism Effects 0.000 claims description 27
- 238000012545 processing Methods 0.000 claims description 20
- 238000012546 transfer Methods 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 15
- 238000001514 detection method Methods 0.000 claims description 11
- 238000005229 chemical vapour deposition Methods 0.000 claims description 6
- 238000005240 physical vapour deposition Methods 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 4
- 230000003647 oxidation Effects 0.000 claims description 4
- 238000007254 oxidation reaction Methods 0.000 claims description 4
- 238000004380 ashing Methods 0.000 claims description 3
- 238000003486 chemical etching Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 230000009467 reduction Effects 0.000 claims description 3
- 239000010408 film Substances 0.000 description 76
- 239000010410 layer Substances 0.000 description 20
- 230000005291 magnetic effect Effects 0.000 description 11
- 230000004888 barrier function Effects 0.000 description 10
- 229910019236 CoFeB Inorganic materials 0.000 description 8
- 239000003990 capacitor Substances 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 230000008859 change Effects 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 229910003321 CoFe Inorganic materials 0.000 description 3
- 230000005290 antiferromagnetic effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 230000005415 magnetization Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000012528 membrane Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000000137 annealing Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/225—Oblique incidence of vaporised material on substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3435—Applying energy to the substrate during sputtering
- C23C14/345—Applying energy to the substrate during sputtering using substrate bias
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32697—Electrostatic control
- H01J37/32706—Polarising the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/01—Manufacture or treatment
Description
また、本発明は、高周波スパッタリング装置であって、チャンバと、前記チャンバ内にガスを供給するガス導入手段と、前記チャンバ内に前記ガスのプラズマを発生させるプラズマ発生手段と、前記チャンバ内に設けられた基板ホルダと、前記基板ホルダ内部に設けられた電極と、前記電極と電気的に接続されており前記基板ホルダ上の基板の電位を調整する可変インピーダンス機構と、前記電極上に設けられており、前記プラズマからの流入電子を検出するための流入電子検出手段と、前記流入電子検出手段によって検出した電流を、グラウンドと前記基板ホルダに載置される基板との電位差に換算する演算回路と、前記演算回路にて換算された電位差に基づいて、該電位差が一定となるように前記可変インピーダンス機構を制御する制御回路とを備えることを特徴とする。
3 基板ホルダ
4 可変インピーダンス機構
8 Vdc演算回路
9 インピーダンス制御部
10 入力検出器
11 高周波電源
Claims (4)
- チャンバと、
前記チャンバ内部を排気する排気手段と、
前記チャンバ内にガスを供給するガス導入手段と、
前記チャンバ内に設けられた基板ホルダと、
前記基板ホルダの基板載置台に対して非平行に設置されたターゲット載置台と、
前記基板ホルダ内部に設けられた電極を有する高周波スパッタリング装置、並びに、
少なくとも1つの真空処理室であって、前記真空処理室が、物理的気相蒸着(PVD)室、化学的気相蒸着(CVD)室、物理的エッチング室、化学的エッチング室、基板加熱室、基板冷却室、酸化処理室、還元処理室及びアッシング室からなるグループから選択可能である真空処理室を含む、
真空薄膜形成加工装置であって、
前記高周波スパッタリング装置が、
前記電極と電気的に接続されており前記基板ホルダ上の基板の電位を調整する可変インピーダンス機構と、
前記電極上に設けられており流入電子を検出するための流入電子検出手段と、
前記流入電子検出手段によって検出した電流を基板電位に換算する演算回路と、
前記演算回路からの基板電位信号を演算処理し、グラウンドと基板との電位差が一定となるように前記可変インピーダンス機構を制御する制御回路と、
を備えていることを特徴とする真空薄膜形成加工装置。 - 前記高周波スパッタリング装置と、前記少なくとも1つの真空処理室とは、真空搬送室を介して連結されていることを特徴とする請求項1に記載の真空薄膜形成加工装置。
- 請求項1記載の真空薄膜形成加工装置を用いた真空薄膜形成方法であって、
前記高周波スパッタリング装置を用いたマッチング工程と、
前記少なくとも1つの真空処理装置において、基板を真空処理する真空処理工程と、
を有することを特徴とする真空薄膜形成方法。 - チャンバと、
前記チャンバ内にガスを供給するガス導入手段と、
前記チャンバ内に前記ガスのプラズマを発生させるプラズマ発生手段と、
前記チャンバ内に設けられた基板ホルダと、
前記基板ホルダ内部に設けられた電極と、
前記電極と電気的に接続されており前記基板ホルダ上の基板の電位を調整する可変インピーダンス機構と、
前記電極上に設けられており、前記プラズマからの流入電子を検出するための流入電子検出手段と、
前記流入電子検出手段によって検出した電流を、グラウンドと前記基板ホルダに載置される基板との電位差に換算する演算回路と、
前記演算回路にて換算された電位差に基づいて、該電位差が一定となるように前記可変インピーダンス機構を制御する制御回路と
を備えることを特徴とする高周波スパッタリング装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2007/069461 WO2009044474A1 (ja) | 2007-10-04 | 2007-10-04 | 真空薄膜形成加工装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP4619450B2 true JP4619450B2 (ja) | 2011-01-26 |
JPWO2009044474A1 JPWO2009044474A1 (ja) | 2011-02-03 |
Family
ID=40525907
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009535932A Active JP4619450B2 (ja) | 2007-10-04 | 2007-10-04 | 真空薄膜形成加工装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20100200394A1 (ja) |
JP (1) | JP4619450B2 (ja) |
KR (1) | KR20100049686A (ja) |
CN (1) | CN101821423A (ja) |
WO (1) | WO2009044474A1 (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7911832B2 (en) * | 2003-08-19 | 2011-03-22 | New York University | High speed low power magnetic devices based on current induced spin-momentum transfer |
WO2009044473A1 (ja) * | 2007-10-04 | 2009-04-09 | Canon Anelva Corporation | 高周波スパッタリング装置 |
JP5209717B2 (ja) | 2008-06-25 | 2013-06-12 | キヤノンアネルバ株式会社 | スパッタリング装置及びその制御用プログラムを記録した記録媒体 |
CN102239276A (zh) * | 2008-12-03 | 2011-11-09 | 佳能安内华股份有限公司 | 等离子体处理装置、磁电阻元件的制造装置、磁性薄膜的成膜方法以及成膜控制程序 |
JP5650760B2 (ja) * | 2010-12-28 | 2015-01-07 | キヤノンアネルバ株式会社 | 製造装置 |
KR20140063781A (ko) * | 2011-09-09 | 2014-05-27 | 어플라이드 머티어리얼스, 인코포레이티드 | 유전체 재료들의 증착 레이트 및 성장 운동의 향상을 위한 다중 주파수 스퍼터링 |
KR101333104B1 (ko) * | 2012-09-04 | 2013-11-26 | 이도형 | 반도체 박막 증착 장비용 히터 모니터링 시스템 |
JP2014116059A (ja) * | 2012-11-16 | 2014-06-26 | Iza Corp | トンネルバリア層又はゲート絶縁膜の製造方法及びトンネルバリア層又はゲート絶縁膜の製造装置 |
CN104812933B (zh) | 2012-11-30 | 2017-03-08 | 佳能安内华股份有限公司 | 溅镀装置及基板处理装置 |
FR3027453B1 (fr) * | 2014-10-20 | 2017-11-24 | Commissariat Energie Atomique | Dispositif resistif pour circuit memoire ou logique et procede de fabrication d'un tel dispositif |
JP6591568B2 (ja) | 2016-02-01 | 2019-10-16 | キヤノンアネルバ株式会社 | 磁気抵抗効果素子の製造方法 |
WO2018042732A1 (ja) * | 2016-08-29 | 2018-03-08 | 国立大学法人東北大学 | 磁気トンネル接合素子およびその製造方法 |
KR20210006725A (ko) | 2019-07-09 | 2021-01-19 | 삼성전자주식회사 | 스퍼터링 장치 및 이를 이용한 반도체 장치의 제조 방법 |
CN110819959A (zh) * | 2019-12-02 | 2020-02-21 | 深圳市晶相技术有限公司 | 一种物理气相沉积设备 |
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JPH0756070B2 (ja) * | 1987-09-22 | 1995-06-14 | ティーディーケイ株式会社 | スパッタ成膜方法 |
JPH07118844A (ja) * | 1993-10-18 | 1995-05-09 | Riide Raito S M I Kk | 酸化膜の形成方法 |
JP2000017436A (ja) * | 1998-07-02 | 2000-01-18 | Hitachi Metals Ltd | 成膜装置 |
JP2005187860A (ja) * | 2003-12-25 | 2005-07-14 | Nec Compound Semiconductor Devices Ltd | スパッタ装置 |
JP4292128B2 (ja) * | 2004-09-07 | 2009-07-08 | キヤノンアネルバ株式会社 | 磁気抵抗効果素子の製造方法 |
JP4593601B2 (ja) * | 2007-08-03 | 2010-12-08 | キヤノンアネルバ株式会社 | 汚染物質除去方法、半導体製造方法、及び薄膜形成加工装置 |
WO2009031232A1 (ja) * | 2007-09-07 | 2009-03-12 | Canon Anelva Corporation | スパッタリング方法および装置 |
JP4682367B2 (ja) * | 2007-09-28 | 2011-05-11 | キヤノンアネルバ株式会社 | 磁気抵抗効果を用いた負性抵抗素子 |
JP5584409B2 (ja) * | 2008-02-21 | 2014-09-03 | キヤノンアネルバ株式会社 | スパッタリング装置およびその制御方法 |
JP5341082B2 (ja) * | 2008-06-25 | 2013-11-13 | キヤノンアネルバ株式会社 | トンネル磁気抵抗素子の製造方法および製造装置 |
JP2010080806A (ja) * | 2008-09-29 | 2010-04-08 | Canon Anelva Corp | 磁気抵抗素子の製造法及びその記憶媒体 |
JP2010109319A (ja) * | 2008-09-30 | 2010-05-13 | Canon Anelva Corp | 磁気抵抗素子の製造法および記憶媒体 |
-
2007
- 2007-10-04 KR KR1020107007271A patent/KR20100049686A/ko not_active Application Discontinuation
- 2007-10-04 JP JP2009535932A patent/JP4619450B2/ja active Active
- 2007-10-04 WO PCT/JP2007/069461 patent/WO2009044474A1/ja active Search and Examination
- 2007-10-04 CN CN200780100963A patent/CN101821423A/zh active Pending
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2010
- 2010-03-09 US US12/719,920 patent/US20100200394A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
KR20100049686A (ko) | 2010-05-12 |
WO2009044474A1 (ja) | 2009-04-09 |
JPWO2009044474A1 (ja) | 2011-02-03 |
CN101821423A (zh) | 2010-09-01 |
US20100200394A1 (en) | 2010-08-12 |
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