JP2005175457A - Rramメモリセル電極 - Google Patents
Rramメモリセル電極 Download PDFInfo
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- JP2005175457A JP2005175457A JP2004332503A JP2004332503A JP2005175457A JP 2005175457 A JP2005175457 A JP 2005175457A JP 2004332503 A JP2004332503 A JP 2004332503A JP 2004332503 A JP2004332503 A JP 2004332503A JP 2005175457 A JP2005175457 A JP 2005175457A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0007—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements comprising metal oxide memory material, e.g. perovskites
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/061—Patterning of the switching material
- H10N70/063—Patterning of the switching material by etching of pre-deposited switching material layers, e.g. lithography
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/841—Electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/883—Oxides or nitrides
- H10N70/8836—Complex metal oxides, e.g. perovskites, spinels
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
- G11C2213/30—Resistive cell, memory material aspects
- G11C2213/31—Material having complex metal oxide, e.g. perovskite structure
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
- G11C2213/70—Resistive array aspects
- G11C2213/77—Array wherein the memory element being directly connected to the bit lines and word lines without any access device being used
Abstract
【解決手段】本発明のRRAMメモリセルは、第1の酸化耐性層20と、第1の耐熱性金属層22と、CMR層24と、第2の耐熱性金属層26と、第2の酸化耐性層28とを備える、シリコン基板中に動作可能な接合および該シリコン基板上に形成される金属プラグ16を有する該シリコン基板上に形成される。例えば、酸化耐性層は、TiN、TaN、TiAlNx、TaAlNx、TaSiN、TiSiN、およびRuTiNから構成される材料の群から得られる材料から形成される。
【選択図】図2
Description
本発明は、不揮発性メモリアレイ用の薄膜抵抗メモリデバイスに関し、詳細には、RRAMメモリセル用の多層電極に関する。
現在利用可能な市販のRRAMデバイスはないが、Pt、Au、Ag、Al、Ti、およびTiN電極を用いる試験的なデバイスが開発された。Pt、Au、およびAg電極デバイスは、良好な耐久性を示すが、これらの材料から作成される電極は、従来の集積回路のエッチングプロセスを用いてエッチングされ得ない。試験的なデバイスは、サブミクロンの費用効果、大規模のメモリデバイス製造のいずれにも適さないシャローマスクまたは化学機械研磨(CMP)プロセスを用いて製造される。試験的なデバイスに使用された他の電極材料では、信頼性が低く、耐久性が低くなる。本発明は、信頼性のある電極構造を提供し、製造費用の低減と同時にデバイスの信頼性、耐久性を改良する。
Liuらによる、「Electrical−pulse−induced reversible resistance change effect in magnetoresistive films」(Applied Physics Letters.Vol.76,#19,p.2749−2751;2000年5月)
シリコン基板中に動作可能な接合および該シリコン基板上に形成される金属プラグを有する該シリコン基板上に形成されるRRAMメモリセルは、第1の酸化耐性層と、第1の耐熱性金属層と、CMR層と、第2の耐熱性金属層と、第2の酸化耐性層とを備える。
VEFF=VC−IR−QDS/COD
によって得られる。
12 基板
16 金属プラグ
18 多層電極RRAMメモリセル
20 酸化耐性金属層
22 耐熱性金属層
24 巨大磁気抵抗金属層
26 耐熱性金属層
28 酸化耐性金属層
Claims (14)
- 第1の酸化耐性層と、
第1の耐熱性金属層と、
CMR層と、
第2の耐熱性金属層と、
第2の酸化耐性層と
を備える、シリコン基板中に動作可能な接合および該シリコン基板上に形成される金属プラグを有する該シリコン基板上に形成されるRRAMメモリセル。 - 前記酸化耐性層は、TiN、TaN、TiAlNx、TaAlNx、TaSiN、TiSiN、およびRuTiNから構成される材料の群から得られる材料から形成される、請求項1に記載のRRAMメモリセル。
- 前記酸化耐性層は約50nm〜300nmの厚さを有する、請求項2に記載のRRAMメモリセル。
- 前記耐熱性金属層は、Pt、Ir、IrO2、Ru、RuO2、Au、Ag、Rh、Pd、Ni、およびCoから構成される材料の群から得られる材料から形成される、請求項1に記載のRRAMメモリセル。
- 前記耐熱性金属層は約3nm〜50nmの厚さを有する、請求項4に記載のRRAMメモリセル。
- 前記CMR層は、CMR材料および高温超電導体から構成される群から得られる材料から形成される、請求項1に記載のRRAMメモリセル。
- 前記CMR層は約50nm〜300nmの厚さを有する、請求項6に記載のRRAMメモリセル。
- シリコン基板を準備するステップと、
N+接合およびP+接合から構成される接合の群から得られる基板で接合を形成するステップと、
該接合上に金属プラグを堆積するステップと、
該金属プラグ上に第1の酸化耐性層を堆積するステップと、
該第1の酸化耐性層上に第1の耐熱性金属層を堆積するステップと、
該第1の耐熱性金属層上にCMR層を堆積するステップと、
該CMR層上に第2の耐熱性金属層を堆積するステップと、
該第2の耐熱性金属層上に第2の酸化耐性層を堆積するステップと、
RRAMメモリセルを完成するステップと
を包含する多層電極RRAMメモリセルを製造する方法。 - 前記酸化耐性層を堆積するステップは、TiN、TaN、TiAlNx、TaAlNx、TaSiN、TiSiN、およびRuTiNから構成される材料の群から得られる材料を堆積するステップを含む、請求項8に記載の方法。
- 前記酸化耐性層を堆積するステップは約50nm〜300nmの厚さに該酸化耐性層を堆積するステップを含む、請求項9に記載の方法。
- 前記耐熱性金属層を堆積するステップは、Pt、Ir、IrO2、Ru、RuO2、Au、Ag、Rh、Pd、Ni、およびCoから構成される材料の群から得られる材料を堆積するステップを含む、請求項8に記載の方法。
- 前記耐熱性金属層を堆積するステップは約3nm〜50nmの厚さに該耐熱金属を堆積するステップを含む、請求項11に記載の方法。
- 前記CMR層を堆積するステップは、PCMO、LPCMO、および高温超電導体から構成される材料の群から得られるCMR材料の層を堆積するステップを含む、請求項8に記載の方法。
- 前記CMR層を堆積するステップは約50nm〜300nmの厚さを有するCMR材料の層を堆積するステップを含む、請求項13に記載の方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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US10/730,584 US6849891B1 (en) | 2003-12-08 | 2003-12-08 | RRAM memory cell electrodes |
Publications (1)
Publication Number | Publication Date |
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JP2005175457A true JP2005175457A (ja) | 2005-06-30 |
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JP2004332503A Pending JP2005175457A (ja) | 2003-12-08 | 2004-11-16 | Rramメモリセル電極 |
Country Status (6)
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US (1) | US6849891B1 (ja) |
EP (1) | EP1542277A3 (ja) |
JP (1) | JP2005175457A (ja) |
KR (1) | KR100672274B1 (ja) |
CN (1) | CN100350614C (ja) |
TW (1) | TWI289884B (ja) |
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KR20050055582A (ko) | 2005-06-13 |
CN100350614C (zh) | 2007-11-21 |
CN1641881A (zh) | 2005-07-20 |
KR100672274B1 (ko) | 2007-01-24 |
EP1542277A2 (en) | 2005-06-15 |
TWI289884B (en) | 2007-11-11 |
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TW200529303A (en) | 2005-09-01 |
US6849891B1 (en) | 2005-02-01 |
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