JP2003133559A5 - - Google Patents
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- Publication number
- JP2003133559A5 JP2003133559A5 JP2001330276A JP2001330276A JP2003133559A5 JP 2003133559 A5 JP2003133559 A5 JP 2003133559A5 JP 2001330276 A JP2001330276 A JP 2001330276A JP 2001330276 A JP2001330276 A JP 2001330276A JP 2003133559 A5 JP2003133559 A5 JP 2003133559A5
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- wiring layer
- region
- impurity diffusion
- diffusion region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009792 diffusion process Methods 0.000 claims 29
- 239000012535 impurity Substances 0.000 claims 28
- 239000004065 semiconductor Substances 0.000 claims 16
- 239000000758 substrate Substances 0.000 claims 15
- 238000000034 method Methods 0.000 claims 9
- 238000003780 insertion Methods 0.000 claims 6
- 230000037431 insertion Effects 0.000 claims 6
- 239000003990 capacitor Substances 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001330276A JP4176342B2 (ja) | 2001-10-29 | 2001-10-29 | 半導体装置およびそのレイアウト方法 |
| US10/280,022 US6815771B2 (en) | 2001-10-29 | 2002-10-25 | Silicon on insulator device and layout method of the same |
| US10/956,094 US7160786B2 (en) | 2001-10-29 | 2004-10-04 | Silicon on insulator device and layout method of the same |
| US10/956,049 US20050059202A1 (en) | 2001-10-29 | 2004-10-04 | Silicon on insulator device and layout method of the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001330276A JP4176342B2 (ja) | 2001-10-29 | 2001-10-29 | 半導体装置およびそのレイアウト方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008189806A Division JP2008294463A (ja) | 2008-07-23 | 2008-07-23 | 半導体装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003133559A JP2003133559A (ja) | 2003-05-09 |
| JP2003133559A5 true JP2003133559A5 (enExample) | 2005-06-30 |
| JP4176342B2 JP4176342B2 (ja) | 2008-11-05 |
Family
ID=19146023
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001330276A Expired - Fee Related JP4176342B2 (ja) | 2001-10-29 | 2001-10-29 | 半導体装置およびそのレイアウト方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (3) | US6815771B2 (enExample) |
| JP (1) | JP4176342B2 (enExample) |
Families Citing this family (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100487950B1 (ko) * | 2003-02-03 | 2005-05-06 | 삼성전자주식회사 | 활성영역과 중첩되는 게이트 전극 상에 배치된 콘택홀을갖는 반도체 소자 |
| JP2005116623A (ja) * | 2003-10-03 | 2005-04-28 | Nec Electronics Corp | 半導体装置およびその製造方法 |
| US20050242439A1 (en) * | 2004-04-28 | 2005-11-03 | International Business Machines Corporation | Method and structure for connecting ground/power networks to prevent charge damage in silicon on insulator |
| US7439152B2 (en) * | 2004-08-27 | 2008-10-21 | Micron Technology, Inc. | Methods of forming a plurality of capacitors |
| JP4726462B2 (ja) * | 2004-10-29 | 2011-07-20 | ルネサスエレクトロニクス株式会社 | 半導体集積装置、その設計方法、設計装置、プログラム、製造方法、および製造装置 |
| US7651897B2 (en) * | 2004-12-07 | 2010-01-26 | National Semiconductor Corporation | Integrated circuit with metal heat flow path coupled to transistor and method for manufacturing such circuit |
| JP4507091B2 (ja) * | 2004-12-13 | 2010-07-21 | エルピーダメモリ株式会社 | 半導体装置の製造方法及び半導体装置 |
| CN101111938B (zh) * | 2005-01-28 | 2010-08-11 | 株式会社半导体能源研究所 | 半导体器件和制造它的方法 |
| US8112326B2 (en) * | 2005-02-03 | 2012-02-07 | TimeSight Systems, Inc. | Inventory management tracking control system |
| JP2006294719A (ja) * | 2005-04-07 | 2006-10-26 | Oki Electric Ind Co Ltd | 半導体装置 |
| US7688272B2 (en) * | 2005-05-30 | 2010-03-30 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| JP2007103809A (ja) * | 2005-10-07 | 2007-04-19 | Oki Electric Ind Co Ltd | 半導体装置及び半導体装置の製造方法 |
| US7612399B2 (en) * | 2005-11-08 | 2009-11-03 | Samsung Electronics Co., Ltd. | Semiconductor integrated circuit devices |
| JP4947964B2 (ja) * | 2005-12-05 | 2012-06-06 | ラピスセミコンダクタ株式会社 | 半導体装置及びその製造方法 |
| JP2007299898A (ja) * | 2006-04-28 | 2007-11-15 | Matsushita Electric Ind Co Ltd | 半導体装置および半導体装置のレイアウト設計方法 |
| US20070271540A1 (en) * | 2006-05-16 | 2007-11-22 | International Business Machines Corporation | Structure and method for reducing susceptibility to charging damage in soi designs |
| JP4996166B2 (ja) * | 2006-08-09 | 2012-08-08 | ラピスセミコンダクタ株式会社 | 半導体装置及び半導体装置の製造方法 |
| US7880267B2 (en) | 2006-08-28 | 2011-02-01 | Micron Technology, Inc. | Buried decoupling capacitors, devices and systems including same, and methods of fabrication |
| KR100817094B1 (ko) | 2007-03-27 | 2008-03-26 | 삼성전자주식회사 | 패턴 반복성을 고려하여 플라즈마로 인한 손상을 방지하는정션 다이오드의 배치 방법 |
| JP2008251812A (ja) | 2007-03-30 | 2008-10-16 | Toshiba Corp | 半導体装置およびその製造方法 |
| JP2010016164A (ja) * | 2008-07-03 | 2010-01-21 | Nec Electronics Corp | 半導体集積回路の設計方法、製造方法、回路設計プログラム、及び半導体集積回路 |
| JP2011175455A (ja) * | 2010-02-24 | 2011-09-08 | Renesas Electronics Corp | 半導体集積回路装置、設計方法、設計装置、およびプログラム |
| TWI605549B (zh) * | 2010-08-06 | 2017-11-11 | 半導體能源研究所股份有限公司 | 半導體裝置 |
| JP5766462B2 (ja) * | 2011-02-24 | 2015-08-19 | ローム株式会社 | 半導体装置およびその製造方法 |
| JP6355460B2 (ja) | 2014-07-08 | 2018-07-11 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
| WO2016079918A1 (ja) * | 2014-11-19 | 2016-05-26 | 株式会社ソシオネクスト | 半導体集積回路のレイアウト構造 |
| CN106898857A (zh) * | 2016-12-20 | 2017-06-27 | 西安科锐盛创新科技有限公司 | Ge基频率可重构套筒偶极子天线的制备方法 |
| CN106876872A (zh) * | 2016-12-20 | 2017-06-20 | 西安科锐盛创新科技有限公司 | 基于AlAs/Ge/AlAs结构的Ge基可重构偶极子天线的制备方法 |
| CN106785335A (zh) * | 2016-12-20 | 2017-05-31 | 西安科锐盛创新科技有限公司 | 频率可重构偶极子天线的Ge基等离子pin二极管的制备工艺 |
| CN106785332A (zh) * | 2016-12-20 | 2017-05-31 | 西安科锐盛创新科技有限公司 | 应用于可重构环形天线的Ge基异质SPiN二极管的制备方法 |
| CN106816685A (zh) * | 2016-12-20 | 2017-06-09 | 西安科锐盛创新科技有限公司 | 频率可重构偶极子天线的spin二极管器件的制造工艺 |
| CN106785333A (zh) * | 2016-12-20 | 2017-05-31 | 西安科锐盛创新科技有限公司 | 用于多层全息天线的GaAs‑Ge‑GaAs异质结构的pin二极管制备方法 |
| CN106847680B (zh) * | 2016-12-20 | 2021-03-05 | 西安科锐盛创新科技有限公司 | 基于GaAs的频率可重构套筒偶极子天线的制备方法 |
| CN106876873A (zh) * | 2016-12-20 | 2017-06-20 | 西安科锐盛创新科技有限公司 | 频率可重构偶极子天线的GaAs基等离子pin二极管的制备方法 |
| JP7071252B2 (ja) * | 2018-09-28 | 2022-05-18 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
| KR102496371B1 (ko) | 2018-10-30 | 2023-02-07 | 삼성전자주식회사 | 반도체 장치 |
Family Cites Families (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4149176A (en) * | 1975-07-18 | 1979-04-10 | Tokyo Shibaura Electric Co., Ltd. | Complementary MOSFET device |
| JP2812388B2 (ja) | 1988-01-18 | 1998-10-22 | 富士通株式会社 | Soi半導体装置の製造方法 |
| US4965872A (en) * | 1988-09-26 | 1990-10-23 | Vasudev Prahalad K | MOS-enhanced, self-aligned lateral bipolar transistor made of a semiconductor on an insulator |
| JP3108447B2 (ja) | 1991-03-08 | 2000-11-13 | 富士通株式会社 | 半導体装置及びその製造方法 |
| JPH06204467A (ja) | 1992-12-28 | 1994-07-22 | Matsushita Electric Ind Co Ltd | 半導体集積回路装置及びその製造方法 |
| EP0622850B1 (en) | 1993-04-30 | 1999-04-21 | International Business Machines Corporation | Process for making an electrostatic discharge protect diode for silicon-on-insulator technology |
| JPH07106579A (ja) | 1993-10-08 | 1995-04-21 | Hitachi Ltd | 半導体装置とその製造方法 |
| JP3450909B2 (ja) | 1994-09-27 | 2003-09-29 | 三菱電機株式会社 | 半導体装置 |
| WO1996015553A1 (en) | 1994-11-15 | 1996-05-23 | Advanced Micro Devices, Inc. | Transistor structure with specific gate and pad areas |
| US5852317A (en) | 1995-03-31 | 1998-12-22 | National Semiconductor Corporation | Method to reduce gate oxide damage due to non-uniform plasmas in read only memory arrays |
| JP3527034B2 (ja) * | 1996-09-20 | 2004-05-17 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| JP3105815B2 (ja) * | 1997-03-28 | 2000-11-06 | 日本電気株式会社 | 半導体集積回路装置 |
| US6432726B2 (en) | 1997-03-31 | 2002-08-13 | Artisan Components, Inc. | Method and apparatus for reducing process-induced charge buildup |
| JP3331304B2 (ja) | 1997-05-27 | 2002-10-07 | シャープ株式会社 | 半導体装置の製造方法 |
| JP3111947B2 (ja) * | 1997-10-28 | 2000-11-27 | 日本電気株式会社 | 半導体装置、その製造方法 |
| US6392277B1 (en) * | 1997-11-21 | 2002-05-21 | Hitachi, Ltd. | Semiconductor device |
| JP4063936B2 (ja) | 1997-12-19 | 2008-03-19 | 松下電器産業株式会社 | 半導体集積回路の製造方法 |
| DE69839780D1 (de) * | 1997-12-19 | 2008-09-04 | Advanced Micro Devices Inc | Silizium auf eine isolator-konfiguration welche mit der massen-cmos-architektur kompatibel ist |
| JPH11204767A (ja) | 1998-01-16 | 1999-07-30 | Mitsubishi Electric Corp | 半導体装置 |
| JP3461443B2 (ja) | 1998-04-07 | 2003-10-27 | 松下電器産業株式会社 | 半導体装置、半導体装置の設計方法、記録媒体および半導体装置の設計支援装置 |
| US6191020B1 (en) | 1998-05-21 | 2001-02-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Conductive interconnection for semiconductor integrated circuit and method of forming the same |
| JP3414656B2 (ja) * | 1998-11-16 | 2003-06-09 | シャープ株式会社 | 半導体装置及びその製造方法 |
| US6292927B1 (en) | 1998-12-07 | 2001-09-18 | Artisan Components, Inc. | Reduction of process antenna effects in integrated circuits |
| JP3298528B2 (ja) | 1998-12-10 | 2002-07-02 | 日本電気株式会社 | 回路設計方法および装置、情報記憶媒体、集積回路装置 |
| US6188122B1 (en) * | 1999-01-14 | 2001-02-13 | International Business Machines Corporation | Buried capacitor for silicon-on-insulator structure |
| US6150261A (en) | 1999-05-25 | 2000-11-21 | United Microelectronics Corp. | Method of fabricating semiconductor device for preventing antenna effect |
| US6358791B1 (en) * | 1999-06-04 | 2002-03-19 | International Business Machines Corporation | Method for increasing a very-large-scale-integrated (VLSI) capacitor size on bulk silicon and silicon-on-insulator (SOI) wafers and structure formed thereby |
| JP3885860B2 (ja) * | 2000-01-14 | 2007-02-28 | セイコーエプソン株式会社 | 半導体記憶装置およびその製造方法 |
| US6475838B1 (en) * | 2000-03-14 | 2002-11-05 | International Business Machines Corporation | Methods for forming decoupling capacitors |
| JP4776752B2 (ja) * | 2000-04-19 | 2011-09-21 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| JP2002026311A (ja) * | 2000-07-04 | 2002-01-25 | Miyazaki Oki Electric Co Ltd | Soi型mos素子およびその製造方法 |
| US6303414B1 (en) | 2000-07-12 | 2001-10-16 | Chartered Semiconductor Manufacturing Ltd. | Method of forming PID protection diode for SOI wafer |
| US6498372B2 (en) * | 2001-02-16 | 2002-12-24 | International Business Machines Corporation | Conductive coupling of electrical structures to a semiconductor device located under a buried oxide layer |
| US6979868B2 (en) * | 2001-04-18 | 2005-12-27 | United Microelectronics Corp. | Bypass circuits for reducing plasma damage |
| JP2003100899A (ja) * | 2001-09-27 | 2003-04-04 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
-
2001
- 2001-10-29 JP JP2001330276A patent/JP4176342B2/ja not_active Expired - Fee Related
-
2002
- 2002-10-25 US US10/280,022 patent/US6815771B2/en not_active Expired - Lifetime
-
2004
- 2004-10-04 US US10/956,094 patent/US7160786B2/en not_active Expired - Lifetime
- 2004-10-04 US US10/956,049 patent/US20050059202A1/en not_active Abandoned
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