CN1163955C - 硅片保持体及其制造方法 - Google Patents

硅片保持体及其制造方法 Download PDF

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Publication number
CN1163955C
CN1163955C CNB991024710A CN99102471A CN1163955C CN 1163955 C CN1163955 C CN 1163955C CN B991024710 A CNB991024710 A CN B991024710A CN 99102471 A CN99102471 A CN 99102471A CN 1163955 C CN1163955 C CN 1163955C
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substrate
maintenance body
layer
described maintenance
metal layer
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CNB991024710A
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Chinese (zh)
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CN1227968A (zh
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汤盐泰久
彦
仲田博彦
宏
夏原益宏
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Sumitomo Electric Industries Ltd
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Sumitomo Electric Industries Ltd
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • Y10T428/252—Glass or ceramic [i.e., fired or glazed clay, cement, etc.] [porcelain, quartz, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

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CNB991024710A 1998-03-02 1999-03-02 硅片保持体及其制造方法 Expired - Lifetime CN1163955C (zh)

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US20030066587A1 (en) 2003-04-10
US6770379B2 (en) 2004-08-03
CA2264317C (en) 2003-04-08
KR19990077529A (ko) 1999-10-25
US6423400B1 (en) 2002-07-23
JP2000058631A (ja) 2000-02-25
CN1227968A (zh) 1999-09-08
JP4013386B2 (ja) 2007-11-28
KR100554044B1 (ko) 2006-02-22
CA2264317A1 (en) 1999-09-02
EP0940845A3 (en) 2000-12-13
TW412823B (en) 2000-11-21

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