CN102751329B - 半导体装置 - Google Patents

半导体装置 Download PDF

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Publication number
CN102751329B
CN102751329B CN201210129980.6A CN201210129980A CN102751329B CN 102751329 B CN102751329 B CN 102751329B CN 201210129980 A CN201210129980 A CN 201210129980A CN 102751329 B CN102751329 B CN 102751329B
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CN
China
Prior art keywords
region
main surface
stabilizing plate
trench
emitter
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Active
Application number
CN201210129980.6A
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English (en)
Chinese (zh)
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CN102751329A (zh
Inventor
大宅大介
中村胜光
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Publication of CN102751329A publication Critical patent/CN102751329A/zh
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/411Insulated-gate bipolar transistors [IGBT]
    • H10D12/441Vertical IGBTs
    • H10D12/461Vertical IGBTs having non-planar surfaces, e.g. having trenches, recesses or pillars in the surfaces of the emitter, base or collector regions
    • H10D12/481Vertical IGBTs having non-planar surfaces, e.g. having trenches, recesses or pillars in the surfaces of the emitter, base or collector regions having gate structures on slanted surfaces, on vertical surfaces, or in grooves, e.g. trench gate IGBTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/102Constructional design considerations for preventing surface leakage or controlling electric field concentration
    • H10D62/103Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
    • H10D62/105Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE] 
    • H10D62/106Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE]  having supplementary regions doped oppositely to or in rectifying contact with regions of the semiconductor bodies, e.g. guard rings with PN or Schottky junctions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/124Shapes, relative sizes or dispositions of the regions of semiconductor bodies or of junctions between the regions
    • H10D62/126Top-view geometrical layouts of the regions or the junctions
    • H10D62/127Top-view geometrical layouts of the regions or the junctions of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/111Field plates
    • H10D64/112Field plates comprising multiple field plate segments
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/20Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311Gate electrodes for field-effect devices
    • H10D64/411Gate electrodes for field-effect devices for FETs
    • H10D64/511Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/512Disposition of the gate electrodes, e.g. buried gates
    • H10D64/513Disposition of the gate electrodes, e.g. buried gates within recesses in the substrate, e.g. trench gates, groove gates or buried gates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/06Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
    • H01L2224/0601Structure
    • H01L2224/0603Bonding areas having different sizes, e.g. different heights or widths

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  • Electrodes Of Semiconductors (AREA)
CN201210129980.6A 2011-04-19 2012-04-19 半导体装置 Active CN102751329B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-093121 2011-04-19
JP2011093121A JP5634318B2 (ja) 2011-04-19 2011-04-19 半導体装置

Publications (2)

Publication Number Publication Date
CN102751329A CN102751329A (zh) 2012-10-24
CN102751329B true CN102751329B (zh) 2015-04-08

Family

ID=46967530

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210129980.6A Active CN102751329B (zh) 2011-04-19 2012-04-19 半导体装置

Country Status (5)

Country Link
US (1) US8698195B2 (enExample)
JP (1) JP5634318B2 (enExample)
KR (1) KR101440397B1 (enExample)
CN (1) CN102751329B (enExample)
DE (1) DE102012204420B4 (enExample)

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JP5488691B2 (ja) * 2010-03-09 2014-05-14 富士電機株式会社 半導体装置
JP5884557B2 (ja) * 2012-03-02 2016-03-15 トヨタ自動車株式会社 半導体装置
JP5932623B2 (ja) * 2012-12-05 2016-06-08 株式会社 日立パワーデバイス 半導体装置およびそれを用いた電力変換装置
CN104078497B (zh) * 2013-03-28 2019-03-15 南京励盛半导体科技有限公司 一种功率场效应晶体管器件的结构
GB201313126D0 (en) * 2013-07-23 2013-09-04 Eco Semiconductors Ltd MOS-Bipolar Device
DE112014006158T5 (de) * 2014-01-14 2016-11-03 Mitsubishi Electric Corporation Leistungshalbleitervorrichtung
JP6194812B2 (ja) * 2014-02-18 2017-09-13 トヨタ自動車株式会社 半導体モジュール
JP6566512B2 (ja) * 2014-04-15 2019-08-28 ローム株式会社 半導体装置および半導体装置の製造方法
JP2016039170A (ja) * 2014-08-05 2016-03-22 株式会社東芝 半導体装置
JP6304445B2 (ja) * 2015-03-16 2018-04-04 富士電機株式会社 半導体装置の製造方法
JP6495751B2 (ja) * 2015-06-10 2019-04-03 ルネサスエレクトロニクス株式会社 半導体装置および半導体装置の製造方法
CN107210322B (zh) * 2015-07-07 2020-11-06 富士电机株式会社 半导体装置
JP6668798B2 (ja) * 2015-07-15 2020-03-18 富士電機株式会社 半導体装置
US10332990B2 (en) 2015-07-15 2019-06-25 Fuji Electric Co., Ltd. Semiconductor device
DE112016000210T5 (de) * 2015-07-16 2017-09-07 Fuji Electric Co., Ltd. Halbleitervorrichtung und Verfahren zum Herstellen der Halbleitervorrichtung
WO2017033315A1 (ja) * 2015-08-26 2017-03-02 三菱電機株式会社 半導体素子
EP3192080B1 (en) * 2015-09-30 2018-04-18 Koninklijke Philips N.V. Focussing of gratings for differential phase contrast imaging by means of electro-mechanic transducer foils
CN105226090B (zh) * 2015-11-10 2018-07-13 株洲中车时代电气股份有限公司 一种绝缘栅双极晶体管及其制作方法
JP6634860B2 (ja) * 2016-02-10 2020-01-22 株式会社デンソー 半導体装置
CN107851666B (zh) 2016-02-15 2021-11-23 富士电机株式会社 半导体装置
CN109075211B (zh) * 2016-04-25 2023-04-18 三菱电机株式会社 半导体装置
JP6574744B2 (ja) * 2016-09-16 2019-09-11 株式会社東芝 半導体装置
CN109314141B (zh) * 2016-12-08 2021-09-14 富士电机株式会社 半导体装置
JP6820738B2 (ja) 2016-12-27 2021-01-27 三菱電機株式会社 半導体装置、電力変換装置および半導体装置の製造方法
JP7325931B2 (ja) * 2017-05-16 2023-08-15 富士電機株式会社 半導体装置
US10396189B2 (en) * 2017-05-30 2019-08-27 Fuji Electric Co., Ltd. Semiconductor device
JP6964566B2 (ja) 2018-08-17 2021-11-10 三菱電機株式会社 半導体装置およびその製造方法
CN109473475A (zh) * 2018-12-26 2019-03-15 江苏中科君芯科技有限公司 能提高加工良率的igbt器件
JP7272004B2 (ja) * 2019-02-25 2023-05-12 富士電機株式会社 絶縁ゲート型半導体装置及びその製造方法
US11545543B2 (en) * 2020-10-27 2023-01-03 Taiwan Semiconductor Manufacturing Company, Ltd. Trench pattern for trench capacitor yield improvement
JP7580245B2 (ja) 2020-11-02 2024-11-11 三菱電機株式会社 半導体装置および半導体装置の製造方法
JP7515428B2 (ja) 2021-02-16 2024-07-12 三菱電機株式会社 半導体装置およびその製造方法
JP7630398B2 (ja) * 2021-09-17 2025-02-17 株式会社東芝 半導体装置
JP2024046362A (ja) * 2022-09-22 2024-04-03 株式会社 日立パワーデバイス 半導体装置
CN117352554B (zh) * 2023-12-04 2024-02-27 赛晶亚太半导体科技(北京)有限公司 一种具有栅极沟槽的半导体功率器件
CN117476756A (zh) * 2023-12-28 2024-01-30 深圳天狼芯半导体有限公司 一种具备沟槽发射极的碳化硅igbt及制备方法

Citations (4)

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CN1418377A (zh) * 2001-01-19 2003-05-14 三菱电机株式会社 半导体装置
JP2008283112A (ja) * 2007-05-14 2008-11-20 Denso Corp 半導体装置
CN101499473A (zh) * 2008-01-28 2009-08-05 株式会社电装 具有绝缘栅半导体元件的半导体器件和绝缘栅双极晶体管
CN101933141A (zh) * 2008-01-29 2010-12-29 富士电机系统株式会社 半导体装置

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JPH09331063A (ja) 1996-04-11 1997-12-22 Mitsubishi Electric Corp 高耐圧半導体装置およびその製造方法
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JP2008283112A (ja) * 2007-05-14 2008-11-20 Denso Corp 半導体装置
CN101499473A (zh) * 2008-01-28 2009-08-05 株式会社电装 具有绝缘栅半导体元件的半导体器件和绝缘栅双极晶体管
CN101933141A (zh) * 2008-01-29 2010-12-29 富士电机系统株式会社 半导体装置

Also Published As

Publication number Publication date
DE102012204420B4 (de) 2020-01-30
KR101440397B1 (ko) 2014-09-15
JP5634318B2 (ja) 2014-12-03
DE102012204420A1 (de) 2012-10-25
US20120267680A1 (en) 2012-10-25
CN102751329A (zh) 2012-10-24
US8698195B2 (en) 2014-04-15
KR20120123192A (ko) 2012-11-08
JP2012227335A (ja) 2012-11-15

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