CN102751329B - 半导体装置 - Google Patents
半导体装置 Download PDFInfo
- Publication number
- CN102751329B CN102751329B CN201210129980.6A CN201210129980A CN102751329B CN 102751329 B CN102751329 B CN 102751329B CN 201210129980 A CN201210129980 A CN 201210129980A CN 102751329 B CN102751329 B CN 102751329B
- Authority
- CN
- China
- Prior art keywords
- region
- main surface
- stabilizing plate
- trench
- emitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D12/00—Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
- H10D12/411—Insulated-gate bipolar transistors [IGBT]
- H10D12/441—Vertical IGBTs
- H10D12/461—Vertical IGBTs having non-planar surfaces, e.g. having trenches, recesses or pillars in the surfaces of the emitter, base or collector regions
- H10D12/481—Vertical IGBTs having non-planar surfaces, e.g. having trenches, recesses or pillars in the surfaces of the emitter, base or collector regions having gate structures on slanted surfaces, on vertical surfaces, or in grooves, e.g. trench gate IGBTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D12/00—Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
- H10D12/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
- H10D62/103—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
- H10D62/105—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE]
- H10D62/106—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE] having supplementary regions doped oppositely to or in rectifying contact with regions of the semiconductor bodies, e.g. guard rings with PN or Schottky junctions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/124—Shapes, relative sizes or dispositions of the regions of semiconductor bodies or of junctions between the regions
- H10D62/126—Top-view geometrical layouts of the regions or the junctions
- H10D62/127—Top-view geometrical layouts of the regions or the junctions of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/111—Field plates
- H10D64/112—Field plates comprising multiple field plate segments
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions
- H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
- H10D64/311—Gate electrodes for field-effect devices
- H10D64/411—Gate electrodes for field-effect devices for FETs
- H10D64/511—Gate electrodes for field-effect devices for FETs for IGFETs
- H10D64/512—Disposition of the gate electrodes, e.g. buried gates
- H10D64/513—Disposition of the gate electrodes, e.g. buried gates within recesses in the substrate, e.g. trench gates, groove gates or buried gates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/0601—Structure
- H01L2224/0603—Bonding areas having different sizes, e.g. different heights or widths
Landscapes
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-093121 | 2011-04-19 | ||
| JP2011093121A JP5634318B2 (ja) | 2011-04-19 | 2011-04-19 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102751329A CN102751329A (zh) | 2012-10-24 |
| CN102751329B true CN102751329B (zh) | 2015-04-08 |
Family
ID=46967530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210129980.6A Active CN102751329B (zh) | 2011-04-19 | 2012-04-19 | 半导体装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8698195B2 (enExample) |
| JP (1) | JP5634318B2 (enExample) |
| KR (1) | KR101440397B1 (enExample) |
| CN (1) | CN102751329B (enExample) |
| DE (1) | DE102012204420B4 (enExample) |
Families Citing this family (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5488691B2 (ja) * | 2010-03-09 | 2014-05-14 | 富士電機株式会社 | 半導体装置 |
| JP5884557B2 (ja) * | 2012-03-02 | 2016-03-15 | トヨタ自動車株式会社 | 半導体装置 |
| JP5932623B2 (ja) * | 2012-12-05 | 2016-06-08 | 株式会社 日立パワーデバイス | 半導体装置およびそれを用いた電力変換装置 |
| CN104078497B (zh) * | 2013-03-28 | 2019-03-15 | 南京励盛半导体科技有限公司 | 一种功率场效应晶体管器件的结构 |
| GB201313126D0 (en) * | 2013-07-23 | 2013-09-04 | Eco Semiconductors Ltd | MOS-Bipolar Device |
| DE112014006158T5 (de) * | 2014-01-14 | 2016-11-03 | Mitsubishi Electric Corporation | Leistungshalbleitervorrichtung |
| JP6194812B2 (ja) * | 2014-02-18 | 2017-09-13 | トヨタ自動車株式会社 | 半導体モジュール |
| JP6566512B2 (ja) * | 2014-04-15 | 2019-08-28 | ローム株式会社 | 半導体装置および半導体装置の製造方法 |
| JP2016039170A (ja) * | 2014-08-05 | 2016-03-22 | 株式会社東芝 | 半導体装置 |
| JP6304445B2 (ja) * | 2015-03-16 | 2018-04-04 | 富士電機株式会社 | 半導体装置の製造方法 |
| JP6495751B2 (ja) * | 2015-06-10 | 2019-04-03 | ルネサスエレクトロニクス株式会社 | 半導体装置および半導体装置の製造方法 |
| CN107210322B (zh) * | 2015-07-07 | 2020-11-06 | 富士电机株式会社 | 半导体装置 |
| JP6668798B2 (ja) * | 2015-07-15 | 2020-03-18 | 富士電機株式会社 | 半導体装置 |
| US10332990B2 (en) | 2015-07-15 | 2019-06-25 | Fuji Electric Co., Ltd. | Semiconductor device |
| DE112016000210T5 (de) * | 2015-07-16 | 2017-09-07 | Fuji Electric Co., Ltd. | Halbleitervorrichtung und Verfahren zum Herstellen der Halbleitervorrichtung |
| WO2017033315A1 (ja) * | 2015-08-26 | 2017-03-02 | 三菱電機株式会社 | 半導体素子 |
| EP3192080B1 (en) * | 2015-09-30 | 2018-04-18 | Koninklijke Philips N.V. | Focussing of gratings for differential phase contrast imaging by means of electro-mechanic transducer foils |
| CN105226090B (zh) * | 2015-11-10 | 2018-07-13 | 株洲中车时代电气股份有限公司 | 一种绝缘栅双极晶体管及其制作方法 |
| JP6634860B2 (ja) * | 2016-02-10 | 2020-01-22 | 株式会社デンソー | 半導体装置 |
| CN107851666B (zh) | 2016-02-15 | 2021-11-23 | 富士电机株式会社 | 半导体装置 |
| CN109075211B (zh) * | 2016-04-25 | 2023-04-18 | 三菱电机株式会社 | 半导体装置 |
| JP6574744B2 (ja) * | 2016-09-16 | 2019-09-11 | 株式会社東芝 | 半導体装置 |
| CN109314141B (zh) * | 2016-12-08 | 2021-09-14 | 富士电机株式会社 | 半导体装置 |
| JP6820738B2 (ja) | 2016-12-27 | 2021-01-27 | 三菱電機株式会社 | 半導体装置、電力変換装置および半導体装置の製造方法 |
| JP7325931B2 (ja) * | 2017-05-16 | 2023-08-15 | 富士電機株式会社 | 半導体装置 |
| US10396189B2 (en) * | 2017-05-30 | 2019-08-27 | Fuji Electric Co., Ltd. | Semiconductor device |
| JP6964566B2 (ja) | 2018-08-17 | 2021-11-10 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
| CN109473475A (zh) * | 2018-12-26 | 2019-03-15 | 江苏中科君芯科技有限公司 | 能提高加工良率的igbt器件 |
| JP7272004B2 (ja) * | 2019-02-25 | 2023-05-12 | 富士電機株式会社 | 絶縁ゲート型半導体装置及びその製造方法 |
| US11545543B2 (en) * | 2020-10-27 | 2023-01-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Trench pattern for trench capacitor yield improvement |
| JP7580245B2 (ja) | 2020-11-02 | 2024-11-11 | 三菱電機株式会社 | 半導体装置および半導体装置の製造方法 |
| JP7515428B2 (ja) | 2021-02-16 | 2024-07-12 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
| JP7630398B2 (ja) * | 2021-09-17 | 2025-02-17 | 株式会社東芝 | 半導体装置 |
| JP2024046362A (ja) * | 2022-09-22 | 2024-04-03 | 株式会社 日立パワーデバイス | 半導体装置 |
| CN117352554B (zh) * | 2023-12-04 | 2024-02-27 | 赛晶亚太半导体科技(北京)有限公司 | 一种具有栅极沟槽的半导体功率器件 |
| CN117476756A (zh) * | 2023-12-28 | 2024-01-30 | 深圳天狼芯半导体有限公司 | 一种具备沟槽发射极的碳化硅igbt及制备方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1418377A (zh) * | 2001-01-19 | 2003-05-14 | 三菱电机株式会社 | 半导体装置 |
| JP2008283112A (ja) * | 2007-05-14 | 2008-11-20 | Denso Corp | 半導体装置 |
| CN101499473A (zh) * | 2008-01-28 | 2009-08-05 | 株式会社电装 | 具有绝缘栅半导体元件的半导体器件和绝缘栅双极晶体管 |
| CN101933141A (zh) * | 2008-01-29 | 2010-12-29 | 富士电机系统株式会社 | 半导体装置 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3307785B2 (ja) | 1994-12-13 | 2002-07-24 | 三菱電機株式会社 | 絶縁ゲート型半導体装置 |
| JPH09331063A (ja) | 1996-04-11 | 1997-12-22 | Mitsubishi Electric Corp | 高耐圧半導体装置およびその製造方法 |
| JP3400348B2 (ja) | 1998-05-19 | 2003-04-28 | 株式会社東芝 | 絶縁ゲート型半導体装置 |
| JP2001102579A (ja) * | 1999-09-30 | 2001-04-13 | Toshiba Corp | トレンチゲート付き半導体装置 |
| JP4200626B2 (ja) | 2000-02-28 | 2008-12-24 | 株式会社デンソー | 絶縁ゲート型パワー素子の製造方法 |
| JP4904612B2 (ja) * | 2000-05-22 | 2012-03-28 | 富士電機株式会社 | Igbt |
| JP2002016252A (ja) * | 2000-06-27 | 2002-01-18 | Toshiba Corp | 絶縁ゲート型半導体素子 |
| JP5025071B2 (ja) * | 2001-02-01 | 2012-09-12 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
| DE10203164B4 (de) * | 2002-01-28 | 2005-06-16 | Infineon Technologies Ag | Leistungshalbleiterbauelement und Verfahren zu dessen Herstellung |
| JP3971327B2 (ja) * | 2003-03-11 | 2007-09-05 | 株式会社東芝 | 絶縁ゲート型半導体装置 |
| DE102009005914B4 (de) * | 2008-01-28 | 2014-02-13 | Denso Corporation | Halbleitervorrichtung mit Halbleiterelement mit isoliertem Gate und bipolarer Transistor mit isoliertem Gate |
| JP4688901B2 (ja) * | 2008-05-13 | 2011-05-25 | 三菱電機株式会社 | 半導体装置 |
| JP5422930B2 (ja) | 2008-06-30 | 2014-02-19 | 株式会社デンソー | 半導体装置 |
| JP5239621B2 (ja) * | 2008-08-20 | 2013-07-17 | 株式会社デンソー | 半導体装置の製造方法 |
| JP5470826B2 (ja) | 2008-12-08 | 2014-04-16 | 株式会社デンソー | 半導体装置 |
| JP2010232335A (ja) * | 2009-03-26 | 2010-10-14 | Sanyo Electric Co Ltd | 絶縁ゲートバイポーラトランジスタ |
| JP5488691B2 (ja) | 2010-03-09 | 2014-05-14 | 富士電機株式会社 | 半導体装置 |
-
2011
- 2011-04-19 JP JP2011093121A patent/JP5634318B2/ja active Active
- 2011-12-19 US US13/329,727 patent/US8698195B2/en active Active
-
2012
- 2012-03-20 DE DE102012204420.5A patent/DE102012204420B4/de active Active
- 2012-04-03 KR KR1020120034266A patent/KR101440397B1/ko active Active
- 2012-04-19 CN CN201210129980.6A patent/CN102751329B/zh active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1418377A (zh) * | 2001-01-19 | 2003-05-14 | 三菱电机株式会社 | 半导体装置 |
| JP2008283112A (ja) * | 2007-05-14 | 2008-11-20 | Denso Corp | 半導体装置 |
| CN101499473A (zh) * | 2008-01-28 | 2009-08-05 | 株式会社电装 | 具有绝缘栅半导体元件的半导体器件和绝缘栅双极晶体管 |
| CN101933141A (zh) * | 2008-01-29 | 2010-12-29 | 富士电机系统株式会社 | 半导体装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE102012204420B4 (de) | 2020-01-30 |
| KR101440397B1 (ko) | 2014-09-15 |
| JP5634318B2 (ja) | 2014-12-03 |
| DE102012204420A1 (de) | 2012-10-25 |
| US20120267680A1 (en) | 2012-10-25 |
| CN102751329A (zh) | 2012-10-24 |
| US8698195B2 (en) | 2014-04-15 |
| KR20120123192A (ko) | 2012-11-08 |
| JP2012227335A (ja) | 2012-11-15 |
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