KR101440397B1 - 반도체장치 - Google Patents

반도체장치 Download PDF

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Publication number
KR101440397B1
KR101440397B1 KR1020120034266A KR20120034266A KR101440397B1 KR 101440397 B1 KR101440397 B1 KR 101440397B1 KR 1020120034266 A KR1020120034266 A KR 1020120034266A KR 20120034266 A KR20120034266 A KR 20120034266A KR 101440397 B1 KR101440397 B1 KR 101440397B1
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South Korea
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region
main surface
field effect
effect transistor
stabilizing plate
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Korean (ko)
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KR20120123192A (ko
Inventor
다이스케 오야
카쓰미 나카무라
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미쓰비시덴키 가부시키가이샤
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00—Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/411—Insulated-gate bipolar transistors [IGBT]
    • H10D12/441—Vertical IGBTs
    • H10D12/461—Vertical IGBTs having non-planar surfaces, e.g. having trenches, recesses or pillars in the surfaces of the emitter, base or collector regions
    • H10D12/481—Vertical IGBTs having non-planar surfaces, e.g. having trenches, recesses or pillars in the surfaces of the emitter, base or collector regions having gate structures on slanted surfaces, on vertical surfaces, or in grooves, e.g. trench gate IGBTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00—Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
    • H10D62/103—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
    • H10D62/105—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE] 
    • H10D62/106—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE]  having supplementary regions doped oppositely to or in rectifying contact with regions of the semiconductor bodies, e.g. guard rings with PN or Schottky junctions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/124—Shapes, relative sizes or dispositions of the regions of semiconductor bodies or of junctions between the regions
    • H10D62/126—Top-view geometrical layouts of the regions or the junctions
    • H10D62/127—Top-view geometrical layouts of the regions or the junctions of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/111—Field plates
    • H10D64/112—Field plates comprising multiple field plate segments
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311—Gate electrodes for field-effect devices
    • H10D64/411—Gate electrodes for field-effect devices for FETs
    • H10D64/511—Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/512—Disposition of the gate electrodes, e.g. buried gates
    • H10D64/513—Disposition of the gate electrodes, e.g. buried gates within recesses in the substrate, e.g. trench gates, groove gates or buried gates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/921—Structures or relative sizes of bond pads
    • H10W72/926—Multiple bond pads having different sizes

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  • Electrodes Of Semiconductors (AREA)
KR1020120034266A 2011-04-19 2012-04-03 반도체장치 Active KR101440397B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2011-093121 2011-04-19
JP2011093121A JP5634318B2 (ja) 2011-04-19 2011-04-19 半導体装置

Publications (2)

Publication Number Publication Date
KR20120123192A KR20120123192A (ko) 2012-11-08
KR101440397B1 true KR101440397B1 (ko) 2014-09-15

Family

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Family Applications (1)

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KR1020120034266A Active KR101440397B1 (ko) 2011-04-19 2012-04-03 반도체장치

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US (1) US8698195B2 (enExample)
JP (1) JP5634318B2 (enExample)
KR (1) KR101440397B1 (enExample)
CN (1) CN102751329B (enExample)
DE (1) DE102012204420B4 (enExample)

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EP2546882B1 (en) 2010-03-09 2018-04-18 Fuji Electric Co., Ltd. Semiconductor device
JP5884557B2 (ja) * 2012-03-02 2016-03-15 トヨタ自動車株式会社 半導体装置
JP5932623B2 (ja) * 2012-12-05 2016-06-08 株式会社 日立パワーデバイス 半導体装置およびそれを用いた電力変換装置
CN104078497B (zh) * 2013-03-28 2019-03-15 南京励盛半导体科技有限公司 一种功率场效应晶体管器件的结构
GB201313126D0 (en) * 2013-07-23 2013-09-04 Eco Semiconductors Ltd MOS-Bipolar Device
US20160240640A1 (en) * 2014-01-14 2016-08-18 Mitsubishi Electric Corporation Power semiconductor device
JP6194812B2 (ja) * 2014-02-18 2017-09-13 トヨタ自動車株式会社 半導体モジュール
JP6566512B2 (ja) * 2014-04-15 2019-08-28 ローム株式会社 半導体装置および半導体装置の製造方法
JP2016039170A (ja) * 2014-08-05 2016-03-22 株式会社東芝 半導体装置
WO2016147529A1 (ja) * 2015-03-16 2016-09-22 富士電機株式会社 半導体装置の製造方法
JP6495751B2 (ja) * 2015-06-10 2019-04-03 ルネサスエレクトロニクス株式会社 半導体装置および半導体装置の製造方法
CN107210322B (zh) * 2015-07-07 2020-11-06 富士电机株式会社 半导体装置
JP6668798B2 (ja) * 2015-07-15 2020-03-18 富士電機株式会社 半導体装置
US10332990B2 (en) 2015-07-15 2019-06-25 Fuji Electric Co., Ltd. Semiconductor device
DE112016000210T5 (de) * 2015-07-16 2017-09-07 Fuji Electric Co., Ltd. Halbleitervorrichtung und Verfahren zum Herstellen der Halbleitervorrichtung
DE112015006832T5 (de) * 2015-08-26 2018-06-07 Mitsubishi Electric Corporation Halbleiteranordnung
EP3192080B1 (en) * 2015-09-30 2018-04-18 Koninklijke Philips N.V. Focussing of gratings for differential phase contrast imaging by means of electro-mechanic transducer foils
CN105226090B (zh) 2015-11-10 2018-07-13 株洲中车时代电气股份有限公司 一种绝缘栅双极晶体管及其制作方法
JP6634860B2 (ja) * 2016-02-10 2020-01-22 株式会社デンソー 半導体装置
JP6614326B2 (ja) 2016-02-15 2019-12-04 富士電機株式会社 半導体装置
CN109075211B (zh) * 2016-04-25 2023-04-18 三菱电机株式会社 半导体装置
JP6574744B2 (ja) * 2016-09-16 2019-09-11 株式会社東芝 半導体装置
CN109314141B (zh) * 2016-12-08 2021-09-14 富士电机株式会社 半导体装置
JP6820738B2 (ja) 2016-12-27 2021-01-27 三菱電機株式会社 半導体装置、電力変換装置および半導体装置の製造方法
JP7325931B2 (ja) * 2017-05-16 2023-08-15 富士電機株式会社 半導体装置
US10396189B2 (en) * 2017-05-30 2019-08-27 Fuji Electric Co., Ltd. Semiconductor device
JP6964566B2 (ja) 2018-08-17 2021-11-10 三菱電機株式会社 半導体装置およびその製造方法
CN109473475A (zh) * 2018-12-26 2019-03-15 江苏中科君芯科技有限公司 能提高加工良率的igbt器件
JP7272004B2 (ja) * 2019-02-25 2023-05-12 富士電機株式会社 絶縁ゲート型半導体装置及びその製造方法
US11545543B2 (en) 2020-10-27 2023-01-03 Taiwan Semiconductor Manufacturing Company, Ltd. Trench pattern for trench capacitor yield improvement
JP7580245B2 (ja) 2020-11-02 2024-11-11 三菱電機株式会社 半導体装置および半導体装置の製造方法
JP7515428B2 (ja) 2021-02-16 2024-07-12 三菱電機株式会社 半導体装置およびその製造方法
JP7630398B2 (ja) * 2021-09-17 2025-02-17 株式会社東芝 半導体装置
JP2024046362A (ja) * 2022-09-22 2024-04-03 株式会社 日立パワーデバイス 半導体装置
CN117352554B (zh) * 2023-12-04 2024-02-27 赛晶亚太半导体科技(北京)有限公司 一种具有栅极沟槽的半导体功率器件
CN117476756A (zh) * 2023-12-28 2024-01-30 深圳天狼芯半导体有限公司 一种具备沟槽发射极的碳化硅igbt及制备方法

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Publication number Publication date
JP2012227335A (ja) 2012-11-15
JP5634318B2 (ja) 2014-12-03
DE102012204420B4 (de) 2020-01-30
US8698195B2 (en) 2014-04-15
DE102012204420A1 (de) 2012-10-25
KR20120123192A (ko) 2012-11-08
CN102751329B (zh) 2015-04-08
CN102751329A (zh) 2012-10-24
US20120267680A1 (en) 2012-10-25

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