CA2264317C - Susceptor for semiconductor manufacturing equipment and process for producing the same - Google Patents

Susceptor for semiconductor manufacturing equipment and process for producing the same Download PDF

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Publication number
CA2264317C
CA2264317C CA002264317A CA2264317A CA2264317C CA 2264317 C CA2264317 C CA 2264317C CA 002264317 A CA002264317 A CA 002264317A CA 2264317 A CA2264317 A CA 2264317A CA 2264317 C CA2264317 C CA 2264317C
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Canada
Prior art keywords
susceptor
melting point
semiconductor manufacturing
manufacturing equipment
substrate
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Expired - Fee Related
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CA002264317A
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English (en)
French (fr)
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CA2264317A1 (en
Inventor
Yasuhisa Yushio
Hirohiko Nakata
Masuhiro Natsuhara
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Sumitomo Electric Industries Ltd
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Sumitomo Electric Industries Ltd
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Publication of CA2264317A1 publication Critical patent/CA2264317A1/en
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Publication of CA2264317C publication Critical patent/CA2264317C/en
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    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
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    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
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    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

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CA002264317A 1998-03-02 1999-03-02 Susceptor for semiconductor manufacturing equipment and process for producing the same Expired - Fee Related CA2264317C (en)

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CN1227968A (zh) 1999-09-08
US6423400B1 (en) 2002-07-23
KR100554044B1 (ko) 2006-02-22
EP0940845A3 (en) 2000-12-13
US6770379B2 (en) 2004-08-03
CN1163955C (zh) 2004-08-25
EP0940845A2 (en) 1999-09-08
KR19990077529A (ko) 1999-10-25
JP4013386B2 (ja) 2007-11-28
JP2000058631A (ja) 2000-02-25
TW412823B (en) 2000-11-21
CA2264317A1 (en) 1999-09-02
US20030066587A1 (en) 2003-04-10

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