WO2001074916A1 - Fluoropolymere renfermant un groupe qui reagit aux acides et composition photoresist a amplification chimique contenant ledit fluoropolymere - Google Patents

Fluoropolymere renfermant un groupe qui reagit aux acides et composition photoresist a amplification chimique contenant ledit fluoropolymere Download PDF

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Publication number
WO2001074916A1
WO2001074916A1 PCT/JP2001/002897 JP0102897W WO0174916A1 WO 2001074916 A1 WO2001074916 A1 WO 2001074916A1 JP 0102897 W JP0102897 W JP 0102897W WO 0174916 A1 WO0174916 A1 WO 0174916A1
Authority
WO
WIPO (PCT)
Prior art keywords
fluoropolymer
acid
structural unit
composition containing
same
Prior art date
Application number
PCT/JP2001/002897
Other languages
English (en)
French (fr)
Inventor
Takayuki Araki
Meiten Koh
Yoshito Tanaka
Takuji Ishikawa
Hirokazu Aoyama
Tetsuo Shimizu
Original Assignee
Daikin Industries, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daikin Industries, Ltd. filed Critical Daikin Industries, Ltd.
Priority to AU2001244719A priority Critical patent/AU2001244719A1/en
Priority to JP2001572603A priority patent/JP4923376B2/ja
Priority to EP01917810A priority patent/EP1275666A4/en
Publication of WO2001074916A1 publication Critical patent/WO2001074916A1/ja
Priority to US10/262,893 priority patent/US6908724B2/en
Priority to US11/033,954 priority patent/US20050287471A1/en

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F20/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride, ester, amide, imide or nitrile thereof
    • C08F20/02—Monocarboxylic acids having less than ten carbon atoms, Derivatives thereof
    • C08F20/10—Esters
    • C08F20/22—Esters containing halogen
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
    • G03F7/0395—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having a backbone with alicyclic moieties
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
    • G03F7/0397—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having an alicyclic moiety in a side chain
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • G03F7/0758—Macromolecular compounds containing Si-O, Si-C or Si-N bonds with silicon- containing groups in the side chains
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing
    • Y10S430/108—Polyolefin or halogen containing

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Materials For Photolithography (AREA)
PCT/JP2001/002897 2000-04-04 2001-04-03 Fluoropolymere renfermant un groupe qui reagit aux acides et composition photoresist a amplification chimique contenant ledit fluoropolymere WO2001074916A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
AU2001244719A AU2001244719A1 (en) 2000-04-04 2001-04-03 Novel fluoropolymer having acid-reactive group and chemical amplification type photoresist composition containing the same
JP2001572603A JP4923376B2 (ja) 2000-04-04 2001-04-03 酸反応性基を有する新規なフッ素ポリマーおよびそれを用いた化学増幅型フォトレジスト組成物
EP01917810A EP1275666A4 (en) 2000-04-04 2001-04-03 FLUOROPOLYMER COMPRISING A GROUP THAT REACTS TO ACIDS AND PHOTORESIST COMPOSITION WITH CHEMICAL AMPLIFICATION CONTAINING SAID FLUOROPOLYMER
US10/262,893 US6908724B2 (en) 2000-04-04 2002-10-03 Fluorine-containing polymer having acid-reactive group and chemically amplifying type photoresist composition prepared from same
US11/033,954 US20050287471A1 (en) 2000-04-04 2005-01-13 Novel fluorine-containing polymer having acid-reactive group and chemically amplifying type photoresist composition prepared from same

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2000102799 2000-04-04
JP2000-102799 2000-04-04
JP2000-177494 2000-06-13
JP2000177494 2000-06-13
JP2001-61896 2001-03-06
JP2001061896 2001-03-06

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US10/262,893 Continuation-In-Part US6908724B2 (en) 2000-04-04 2002-10-03 Fluorine-containing polymer having acid-reactive group and chemically amplifying type photoresist composition prepared from same

Publications (1)

Publication Number Publication Date
WO2001074916A1 true WO2001074916A1 (fr) 2001-10-11

Family

ID=27342993

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2001/002897 WO2001074916A1 (fr) 2000-04-04 2001-04-03 Fluoropolymere renfermant un groupe qui reagit aux acides et composition photoresist a amplification chimique contenant ledit fluoropolymere

Country Status (8)

Country Link
US (2) US6908724B2 (ja)
EP (1) EP1275666A4 (ja)
JP (1) JP4923376B2 (ja)
KR (1) KR20030005177A (ja)
CN (1) CN1225486C (ja)
AU (1) AU2001244719A1 (ja)
TW (1) TW588220B (ja)
WO (1) WO2001074916A1 (ja)

Cited By (20)

* Cited by examiner, † Cited by third party
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JP2002012623A (ja) * 2000-04-27 2002-01-15 Shin Etsu Chem Co Ltd 高分子化合物、化学増幅レジスト材料及びパターン形成方法
WO2002077709A2 (en) * 2001-03-22 2002-10-03 Shipley Company, L.L.C. Photoresist composition
WO2003007080A1 (en) * 2001-07-12 2003-01-23 Semiconductor Leading Edge Technologies, Inc. Method for forming fine pattern
JP2003084439A (ja) * 2001-09-13 2003-03-19 Matsushita Electric Ind Co Ltd パターン形成材料及びパターン形成方法
EP1324133A1 (en) * 2001-12-31 2003-07-02 Shipley Co. L.L.C. Photoresist compositions for short wavelength imaging
JP2003186198A (ja) * 2001-12-19 2003-07-03 Sony Corp レジスト材料及び露光方法
JP2003186197A (ja) * 2001-12-19 2003-07-03 Sony Corp レジスト材料及び露光方法
EP1319981A3 (en) * 2001-12-13 2003-07-23 Fuji Photo Film Co., Ltd. Positive resist composition
JP2003330196A (ja) * 2002-03-05 2003-11-19 Jsr Corp 感放射線性樹脂組成物
EP1343047A3 (en) * 2002-03-04 2004-01-02 Asahi Glass Company Ltd. Resist composition
WO2004024787A1 (ja) * 2002-09-13 2004-03-25 Daikin Industries, Ltd. レジスト用含フッ素重合体の製造方法
WO2004035641A1 (ja) * 2002-10-18 2004-04-29 Daikin Industries, Ltd. 含フッ素重合体の製造方法およびフォトレジスト組成物
JP2005112850A (ja) * 2003-09-18 2005-04-28 Chisso Corp α−フルオロアクリレート化合物、組成物およびその重合体
US7125640B2 (en) * 2002-01-31 2006-10-24 Infineon Technologies Ag Resist for photolithography having reactive groups for subsequent modification of the resist structures
JP2006328296A (ja) * 2005-05-30 2006-12-07 Fujifilm Holdings Corp 非晶質コポリマー、光学部材およびプラスチック光ファイバー
US7160666B2 (en) 2002-03-06 2007-01-09 Fuji Photo Film Co., Ltd. Photosensitive resin composition
US7358027B2 (en) 2002-03-04 2008-04-15 International Business Machines Corporation Copolymer for use in chemical amplification resists
JP4983605B2 (ja) * 2005-12-05 2012-07-25 ダイキン工業株式会社 α，β−不飽和エステル基を含有する含フッ素ノルボルネン誘導体または含フッ素ノルボルナン誘導体を含む硬化性含フッ素ポリマー組成物
JP2019131658A (ja) * 2018-01-30 2019-08-08 三井化学株式会社 フッ素含有環状オレフィン系共重合体および成形体
JPWO2020241099A1 (ja) * 2019-05-29 2020-12-03

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US6893792B2 (en) * 2002-02-19 2005-05-17 Sumitomo Chemical Company, Limited Positive resist composition
AU2003254841A1 (en) * 2002-08-13 2004-03-03 Daikin Industries, Ltd. Optical material containing photocurable fluoropolymer and photocurable fluororesin composition
US20040091813A1 (en) * 2002-11-05 2004-05-13 Honeywell International Inc. Fluorinated polymers
CN100367113C (zh) * 2002-12-11 2008-02-06 三星电子株式会社 用于形成共轭聚合物图案的组合物和使用该组合物形成共轭聚合物图案的方法
EP1597627A4 (en) * 2003-02-20 2008-01-09 Promerus Llc RESOLUTION SPEED MODULATORS FOR PHOTORESISTAL COMPOSITIONS
US20040166434A1 (en) 2003-02-21 2004-08-26 Dammel Ralph R. Photoresist composition for deep ultraviolet lithography
KR20050098955A (ko) * 2003-02-21 2005-10-12 에이제트 일렉트로닉 머트리얼즈 유에스에이 코프. 원자외선 리소그래피용 포토레지스트 조성물
US7781602B2 (en) * 2003-04-25 2010-08-24 Central Glass Company, Limited Fluorinated cyclic compound, polymerizable fluoromonomer, fluoropolymer, resist material comprising the same, and method of forming pattern with the same
US7150957B2 (en) * 2003-04-25 2006-12-19 International Business Machines Corporation Fluorinated vinyl ethers, copolymers thereof, and use in lithographic photoresist compositions
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US20060008730A1 (en) * 2004-07-09 2006-01-12 Puy Michael V D Monomers for photoresists bearing acid-labile groups of reduced optical density
US20060008731A1 (en) * 2004-07-09 2006-01-12 Michael Van Der Puy Novel photoresist monomers and polymers
JP4697406B2 (ja) * 2004-08-05 2011-06-08 信越化学工業株式会社 高分子化合物，レジスト保護膜材料及びパターン形成方法
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US20070092829A1 (en) * 2005-10-21 2007-04-26 Christoph Noelscher Photosensitive coating for enhancing a contrast of a photolithographic exposure
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JP5345379B2 (ja) * 2008-12-22 2013-11-20 富士フイルム株式会社 光学材料用樹脂組成物とその成形体、光学部品およびレンズ
JP5795481B2 (ja) * 2010-03-05 2015-10-14 ローム アンド ハース エレクトロニック マテリアルズ エルエルシーＲｏｈｍ ａｎｄ Ｈａａｓ Ｅｌｅｃｔｒｏｎｉｃ Ｍａｔｅｒｉａｌｓ ＬＬＣ フォトリソグラフィパターンを形成する方法
US8541523B2 (en) * 2010-04-05 2013-09-24 Promerus, Llc Norbornene-type polymers, compositions thereof and lithographic process using such compositions
US20120122031A1 (en) * 2010-11-15 2012-05-17 International Business Machines Corporation Photoresist composition for negative development and pattern forming method using thereof
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US11635688B2 (en) * 2012-03-08 2023-04-25 Kayaku Advanced Materials, Inc. Photoimageable compositions and processes for fabrication of relief patterns on low surface energy substrates
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US20210364916A1 (en) * 2020-05-21 2021-11-25 Taiwan Semiconductor Manufacturing Co., Ltd. Photoresist composition and method of forming photoresist pattern

Citations (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5518673A (en) * 1978-07-28 1980-02-08 Chiyou Lsi Gijutsu Kenkyu Kumiai Ionized radiation sensitive negative type resist
JPS5558211A (en) * 1978-10-25 1980-04-30 Chiyou Lsi Gijutsu Kenkyu Kumiai Positive type radiation-sensitive composition and its solution
JPS6443512A (en) * 1987-08-10 1989-02-15 Daikin Ind Ltd Phenyl alpha-trifluoromethylacrylate copolymer and its preparation
JPH033238A (ja) * 1989-05-30 1991-01-09 Asahi Glass Co Ltd 半導体キャリアー
JPH10111569A (ja) * 1996-02-09 1998-04-28 Japan Synthetic Rubber Co Ltd 感放射線性樹脂組成物
JPH10158337A (ja) * 1996-11-29 1998-06-16 Nippon Zeon Co Ltd ノルボルネン系付加型共重合体、エポキシ基含有ノルボルネン系付加型共重合体、及び架橋性重合体組成物
JPH1184663A (ja) * 1996-12-24 1999-03-26 Toshiba Corp 感光性組成物、およびこれを用いたパターン形成方法ならびに電子部品の製造方法
JPH11133593A (ja) * 1997-08-29 1999-05-21 Fuji Photo Film Co Ltd 感光性組成物
JPH11174677A (ja) * 1997-12-12 1999-07-02 Nec Corp ネガ型レジスト材料、それを用いたパターン形成方法及び半導体装置の製造方法
JPH11242337A (ja) * 1997-11-19 1999-09-07 Wako Pure Chem Ind Ltd レジスト組成物及びこれを用いたパターン形成方法
JPH11327147A (ja) * 1998-03-20 1999-11-26 Fuji Photo Film Co Ltd 遠紫外線露光用ポジ型フォトレジスト組成物
WO2000017712A1 (en) * 1998-09-23 2000-03-30 E.I. Du Pont De Nemours And Company Photoresists, polymers and processes for microlithography
JP2000292926A (ja) * 1999-04-01 2000-10-20 Fuji Photo Film Co Ltd 遠紫外線露光用ポジ型フォトレジスト組成物
JP2000298345A (ja) * 1999-04-14 2000-10-24 Toray Ind Inc ポジ型感放射線性組成物
WO2000067072A1 (en) * 1999-05-04 2000-11-09 E.I. Du Pont De Nemours And Company Fluorinated polymers, photoresists and processes for microlithography
JP2000321774A (ja) * 1999-03-09 2000-11-24 Matsushita Electric Ind Co Ltd パターン形成方法
JP2001022076A (ja) * 1999-07-12 2001-01-26 Mitsubishi Rayon Co Ltd レジスト用樹脂、化学増幅型レジスト組成物およびレジストパターン形成方法
JP2001133979A (ja) * 1999-08-25 2001-05-18 Shin Etsu Chem Co Ltd 高分子化合物、化学増幅レジスト材料及びパターン形成方法
JP2001154362A (ja) * 1999-11-29 2001-06-08 Central Glass Co Ltd ポジ型レジスト組成物およびパターン形成方法

Family Cites Families (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3624053A (en) 1963-06-24 1971-11-30 Du Pont Trifluorovinyl sulfonic acid polymers
US3282875A (en) 1964-07-22 1966-11-01 Du Pont Fluorocarbon vinyl ether polymers
US4632881A (en) 1984-10-12 1986-12-30 Olin Corporation Pyrithione-containing bioactive polymers and their use in paint and wood perservative products
US4596864A (en) 1984-10-12 1986-06-24 Olin Corporation Pyrithione-containing bioactive polymers and their use in paint and wood preservative products
JP2623309B2 (ja) 1988-02-22 1997-06-25 ユーシービー ソシエテ アノニム レジストパターンを得る方法
US4985337A (en) 1988-11-15 1991-01-15 Konica Corporation Image forming method and element, in which the element contains a release layer and a photosensitive o-quinone diaziode layer
US5391465A (en) 1989-06-20 1995-02-21 Rohm And Haas Company Method of using selected photoactive compounds in high resolution, acid hardening photoresists with near ultraviolet radiation wherein the photoresist comprise conventional deep UV photoacid generators
US5229473A (en) 1989-07-07 1993-07-20 Daikin Industries Ltd. Fluorine-containing copolymer and method of preparing the same
US5212046A (en) 1989-10-17 1993-05-18 Shipley Company Inc. Near UV photoresist
US5362606A (en) 1989-10-18 1994-11-08 Massachusetts Institute Of Technology Positive resist pattern formation through focused ion beam exposure and surface barrier silylation
US5292614A (en) 1991-08-02 1994-03-08 Mitsubishi Kasei Corporation Negative photosensitive composition and method for forming a resist pattern
US5302490A (en) 1991-10-21 1994-04-12 Shipley Company Inc. Radiation sensitive compositions comprising blends of an aliphatic novolak resin and an aromatic novolak resin
DE4207261C2 (de) 1992-03-07 2000-03-16 Clariant Gmbh Styrol-Monomere mit 2,2-Bis-trifluormethyl-oxaethano-Brückengliedern, Polymere und deren Verwendung
DE4319178C2 (de) 1992-06-10 1997-07-17 Fujitsu Ltd Resist-Zusammensetzung enthaltend ein Polymermaterial und einen Säuregenerator
JP3078153B2 (ja) 1993-07-08 2000-08-21 富士写真フイルム株式会社 感光性組成物
JP2715881B2 (ja) 1993-12-28 1998-02-18 日本電気株式会社 感光性樹脂組成物およびパターン形成方法
JP3461377B2 (ja) 1994-04-18 2003-10-27 富士写真フイルム株式会社 画像記録材料
EP0709410A3 (en) 1994-10-26 1997-03-26 Ocg Microelectronic Materials Polymers
JP3277114B2 (ja) * 1995-02-17 2002-04-22 インターナショナル・ビジネス・マシーンズ・コーポレーション 陰画調レジスト像の作製方法
US5658708A (en) 1995-02-17 1997-08-19 Fuji Photo Film Co., Ltd. Image recording material
US5900346A (en) 1995-04-06 1999-05-04 Shipley Company, L.L.C. Compositions comprising photoactivator, acid, generator and chain extender
JPH0950129A (ja) 1995-05-30 1997-02-18 Shin Etsu Chem Co Ltd 反射防止膜材料及びパターン形成方法
JP3382081B2 (ja) 1995-06-01 2003-03-04 株式会社東芝 レジストおよびこれを用いたパターン形成方法
US5952150A (en) 1995-06-08 1999-09-14 Jsr Corporation Radiation sensitive resin composition
JPH0990622A (ja) 1995-09-22 1997-04-04 Fuji Photo Film Co Ltd ポジ型フォトレジスト組成物
JP3589365B2 (ja) 1996-02-02 2004-11-17 富士写真フイルム株式会社 ポジ画像形成組成物
JP3587325B2 (ja) 1996-03-08 2004-11-10 富士写真フイルム株式会社 ポジ型感光性組成物
US5935733A (en) 1996-04-05 1999-08-10 Intel Corporation Photolithography mask and method of fabrication
US5876899A (en) 1996-09-18 1999-03-02 Shipley Company, L.L.C. Photoresist compositions
US6042991A (en) 1997-02-18 2000-03-28 Fuji Photo Film Co., Ltd. Positive working photosensitive composition
EP0875789A1 (en) 1997-04-30 1998-11-04 Wako Pure Chemical Industries Ltd Resist composition and its use for forming pattern
JP3650985B2 (ja) 1997-05-22 2005-05-25 Ｊｓｒ株式会社 ネガ型感放射線性樹脂組成物およびパターン製造法
US6143472A (en) * 1998-11-18 2000-11-07 Wako Pure Chemical Industries, Ltd. Resist composition and a method for formation of a pattern using the composition
US6673523B2 (en) 1999-03-09 2004-01-06 Matsushita Electric Industrial Co., Ltd. Pattern formation method
KR100535149B1 (ko) * 1999-08-17 2005-12-07 주식회사 하이닉스반도체 신규의 포토레지스트용 공중합체 및 이를 이용한 포토레지스트조성물
EP1141782A4 (en) * 1999-10-26 2007-02-21 Cornell Res Foundation Inc USE OF BLOCK COPOLYMERS AS PHOTOACKS DEVELOPABLE WITH SUPERCRITICAL LIQUIDS
EP1240554A2 (en) 1999-11-17 2002-09-18 E.I. Du Pont De Nemours And Company Nitrile/fluoroalcohol polymer-containing photoresists and associated processes for microlithography
JP2001183833A (ja) 1999-12-27 2001-07-06 Sumitomo Chem Co Ltd レジスト組成物
US6579658B2 (en) 2000-02-17 2003-06-17 Shin-Etsu Chemical Co., Ltd. Polymers, resist compositions and patterning process
US6468712B1 (en) * 2000-02-25 2002-10-22 Massachusetts Institute Of Technology Resist materials for 157-nm lithography
JP2001296662A (ja) 2000-04-13 2001-10-26 Asahi Glass Co Ltd レジスト組成物
JP2001328964A (ja) 2000-05-19 2001-11-27 Tokyo Ohka Kogyo Co Ltd 新規多環式不飽和炭化水素誘導体及びその製造方法
JP4838437B2 (ja) 2000-06-16 2011-12-14 Ｊｓｒ株式会社 感放射線性樹脂組成物
WO2002036533A1 (fr) 2000-10-31 2002-05-10 Daicel Chemical Industries, Ltd. Monomeres possedant des groupes suppresseurs d"electrons et leurs procedes de preparation
KR20040021586A (ko) * 2001-03-09 2004-03-10 가부시끼가이샤 한도따이 센단 테크놀로지스 미세 패턴 형성 방법

Patent Citations (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5518673A (en) * 1978-07-28 1980-02-08 Chiyou Lsi Gijutsu Kenkyu Kumiai Ionized radiation sensitive negative type resist
JPS5558211A (en) * 1978-10-25 1980-04-30 Chiyou Lsi Gijutsu Kenkyu Kumiai Positive type radiation-sensitive composition and its solution
JPS6443512A (en) * 1987-08-10 1989-02-15 Daikin Ind Ltd Phenyl alpha-trifluoromethylacrylate copolymer and its preparation
JPH033238A (ja) * 1989-05-30 1991-01-09 Asahi Glass Co Ltd 半導体キャリアー
JPH10111569A (ja) * 1996-02-09 1998-04-28 Japan Synthetic Rubber Co Ltd 感放射線性樹脂組成物
JPH10158337A (ja) * 1996-11-29 1998-06-16 Nippon Zeon Co Ltd ノルボルネン系付加型共重合体、エポキシ基含有ノルボルネン系付加型共重合体、及び架橋性重合体組成物
JPH1184663A (ja) * 1996-12-24 1999-03-26 Toshiba Corp 感光性組成物、およびこれを用いたパターン形成方法ならびに電子部品の製造方法
JPH11133593A (ja) * 1997-08-29 1999-05-21 Fuji Photo Film Co Ltd 感光性組成物
JPH11242337A (ja) * 1997-11-19 1999-09-07 Wako Pure Chem Ind Ltd レジスト組成物及びこれを用いたパターン形成方法
JPH11174677A (ja) * 1997-12-12 1999-07-02 Nec Corp ネガ型レジスト材料、それを用いたパターン形成方法及び半導体装置の製造方法
JPH11327147A (ja) * 1998-03-20 1999-11-26 Fuji Photo Film Co Ltd 遠紫外線露光用ポジ型フォトレジスト組成物
WO2000017712A1 (en) * 1998-09-23 2000-03-30 E.I. Du Pont De Nemours And Company Photoresists, polymers and processes for microlithography
JP2000321774A (ja) * 1999-03-09 2000-11-24 Matsushita Electric Ind Co Ltd パターン形成方法
JP2000292926A (ja) * 1999-04-01 2000-10-20 Fuji Photo Film Co Ltd 遠紫外線露光用ポジ型フォトレジスト組成物
JP2000298345A (ja) * 1999-04-14 2000-10-24 Toray Ind Inc ポジ型感放射線性組成物
WO2000067072A1 (en) * 1999-05-04 2000-11-09 E.I. Du Pont De Nemours And Company Fluorinated polymers, photoresists and processes for microlithography
JP2001022076A (ja) * 1999-07-12 2001-01-26 Mitsubishi Rayon Co Ltd レジスト用樹脂、化学増幅型レジスト組成物およびレジストパターン形成方法
JP2001133979A (ja) * 1999-08-25 2001-05-18 Shin Etsu Chem Co Ltd 高分子化合物、化学増幅レジスト材料及びパターン形成方法
JP2001154362A (ja) * 1999-11-29 2001-06-08 Central Glass Co Ltd ポジ型レジスト組成物およびパターン形成方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1275666A4 *

Cited By (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002012623A (ja) * 2000-04-27 2002-01-15 Shin Etsu Chem Co Ltd 高分子化合物、化学増幅レジスト材料及びパターン形成方法
US6855475B2 (en) 2001-03-22 2005-02-15 Shipley Company, L.L.C. Photoresist composition
WO2002077709A2 (en) * 2001-03-22 2002-10-03 Shipley Company, L.L.C. Photoresist composition
WO2002077709A3 (en) * 2001-03-22 2003-02-27 Shipley Co Llc Photoresist composition
JP2005509176A (ja) * 2001-03-22 2005-04-07 ローム・アンド・ハース・エレクトロニック・マテリアルズ，エル．エル．シー． フォトレジスト組成物
WO2003007080A1 (en) * 2001-07-12 2003-01-23 Semiconductor Leading Edge Technologies, Inc. Method for forming fine pattern
JP2003084439A (ja) * 2001-09-13 2003-03-19 Matsushita Electric Ind Co Ltd パターン形成材料及びパターン形成方法
JP4516250B2 (ja) * 2001-09-13 2010-08-04 パナソニック株式会社 パターン形成材料及びパターン形成方法
US7335454B2 (en) 2001-12-13 2008-02-26 Fujifilm Corporation Positive resist composition
EP1319981A3 (en) * 2001-12-13 2003-07-23 Fuji Photo Film Co., Ltd. Positive resist composition
JP2003186197A (ja) * 2001-12-19 2003-07-03 Sony Corp レジスト材料及び露光方法
JP2003186198A (ja) * 2001-12-19 2003-07-03 Sony Corp レジスト材料及び露光方法
EP1324133A1 (en) * 2001-12-31 2003-07-02 Shipley Co. L.L.C. Photoresist compositions for short wavelength imaging
US7125640B2 (en) * 2002-01-31 2006-10-24 Infineon Technologies Ag Resist for photolithography having reactive groups for subsequent modification of the resist structures
US7479364B2 (en) 2002-03-04 2009-01-20 International Business Machines Corporation Copolymer for use in chemical amplification resists
EP1343047A3 (en) * 2002-03-04 2004-01-02 Asahi Glass Company Ltd. Resist composition
US7358027B2 (en) 2002-03-04 2008-04-15 International Business Machines Corporation Copolymer for use in chemical amplification resists
JP2003330196A (ja) * 2002-03-05 2003-11-19 Jsr Corp 感放射線性樹脂組成物
US7160666B2 (en) 2002-03-06 2007-01-09 Fuji Photo Film Co., Ltd. Photosensitive resin composition
WO2004024787A1 (ja) * 2002-09-13 2004-03-25 Daikin Industries, Ltd. レジスト用含フッ素重合体の製造方法
WO2004035641A1 (ja) * 2002-10-18 2004-04-29 Daikin Industries, Ltd. 含フッ素重合体の製造方法およびフォトレジスト組成物
JP2005112850A (ja) * 2003-09-18 2005-04-28 Chisso Corp α−フルオロアクリレート化合物、組成物およびその重合体
JP4599948B2 (ja) * 2003-09-18 2010-12-15 チッソ株式会社 α−フルオロアクリレート化合物、組成物およびその重合体
JP2006328296A (ja) * 2005-05-30 2006-12-07 Fujifilm Holdings Corp 非晶質コポリマー、光学部材およびプラスチック光ファイバー
JP4520364B2 (ja) * 2005-05-30 2010-08-04 富士フイルム株式会社 非晶質コポリマー、光学部材およびプラスチック光ファイバー
JP4983605B2 (ja) * 2005-12-05 2012-07-25 ダイキン工業株式会社 α，β−不飽和エステル基を含有する含フッ素ノルボルネン誘導体または含フッ素ノルボルナン誘導体を含む硬化性含フッ素ポリマー組成物
JP2019131658A (ja) * 2018-01-30 2019-08-08 三井化学株式会社 フッ素含有環状オレフィン系共重合体および成形体
JPWO2020241099A1 (ja) * 2019-05-29 2020-12-03
JP7254917B2 (ja) 2019-05-29 2023-04-10 富士フイルム株式会社 感活性光線性又は感放射線性樹脂組成物、パターン形成方法、電子デバイスの製造方法

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US20050287471A1 (en) 2005-12-29
KR20030005177A (ko) 2003-01-17
US6908724B2 (en) 2005-06-21
CN1225486C (zh) 2005-11-02
TW588220B (en) 2004-05-21
JP4923376B2 (ja) 2012-04-25
EP1275666A1 (en) 2003-01-15

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