TWI786440B - 多層基板、及多層基板之製造方法 - Google Patents
多層基板、及多層基板之製造方法 Download PDFInfo
- Publication number
- TWI786440B TWI786440B TW109134185A TW109134185A TWI786440B TW I786440 B TWI786440 B TW I786440B TW 109134185 A TW109134185 A TW 109134185A TW 109134185 A TW109134185 A TW 109134185A TW I786440 B TWI786440 B TW I786440B
- Authority
- TW
- Taiwan
- Prior art keywords
- semiconductor substrate
- electrodes
- conductive particles
- substrate
- electrode
- Prior art date
Links
Images
Classifications
-
- H10W72/851—
-
- H10W72/012—
-
- H10W72/20—
-
- H10W72/30—
-
- H10W90/00—
-
- H10W46/00—
-
- H10W46/301—
-
- H10W72/01204—
-
- H10W72/01212—
-
- H10W72/013—
-
- H10W72/01304—
-
- H10W72/01361—
-
- H10W72/072—
-
- H10W72/07223—
-
- H10W72/07232—
-
- H10W72/07253—
-
- H10W72/07254—
-
- H10W72/073—
-
- H10W72/07323—
-
- H10W72/07332—
-
- H10W72/07338—
-
- H10W72/07354—
-
- H10W72/074—
-
- H10W72/223—
-
- H10W72/224—
-
- H10W72/225—
-
- H10W72/234—
-
- H10W72/244—
-
- H10W72/247—
-
- H10W72/252—
-
- H10W72/253—
-
- H10W72/255—
-
- H10W72/261—
-
- H10W72/325—
-
- H10W72/347—
-
- H10W72/353—
-
- H10W72/354—
-
- H10W72/823—
-
- H10W74/15—
-
- H10W90/26—
-
- H10W90/288—
-
- H10W90/291—
-
- H10W90/297—
-
- H10W90/722—
-
- H10W90/724—
-
- H10W90/732—
-
- H10W90/734—
-
- H10W99/00—
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Non-Insulated Conductors (AREA)
- Wire Bonding (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Laminated Bodies (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Adhesive Tapes (AREA)
- Combinations Of Printed Boards (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP2015-004595 | 2015-01-13 | ||
| JP2015004595 | 2015-01-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW202107672A TW202107672A (zh) | 2021-02-16 |
| TWI786440B true TWI786440B (zh) | 2022-12-11 |
Family
ID=56405859
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW109134185A TWI786440B (zh) | 2015-01-13 | 2016-01-13 | 多層基板、及多層基板之製造方法 |
| TW111142394A TWI838943B (zh) | 2015-01-13 | 2016-01-13 | 各向異性導電膜、連接構造體、以及連接構造體的製造方法 |
| TW105101041A TWI709221B (zh) | 2015-01-13 | 2016-01-13 | 多層基板及其製造方法、及各向異性導電膜 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW111142394A TWI838943B (zh) | 2015-01-13 | 2016-01-13 | 各向異性導電膜、連接構造體、以及連接構造體的製造方法 |
| TW105101041A TWI709221B (zh) | 2015-01-13 | 2016-01-13 | 多層基板及其製造方法、及各向異性導電膜 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US10199358B2 (enExample) |
| JP (2) | JP2016131245A (enExample) |
| KR (1) | KR101974763B1 (enExample) |
| CN (2) | CN113690209B (enExample) |
| TW (3) | TWI786440B (enExample) |
| WO (1) | WO2016114318A1 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12066458B2 (en) | 2016-11-30 | 2024-08-20 | Dexerials Corporation | Conductive particle-disposed film having conductive particles disposed within an elastomer film, method for producing the same, test probe unit, and continuity test method |
| JP7042037B2 (ja) * | 2017-04-24 | 2022-03-25 | デクセリアルズ株式会社 | 検査冶具の製造方法 |
| WO2019078291A1 (ja) * | 2017-10-20 | 2019-04-25 | ソニーセミコンダクタソリューションズ株式会社 | 撮像装置 |
| JP7185252B2 (ja) | 2018-01-31 | 2022-12-07 | 三国電子有限会社 | 接続構造体の作製方法 |
| JP7046351B2 (ja) | 2018-01-31 | 2022-04-04 | 三国電子有限会社 | 接続構造体の作製方法 |
| JP7160302B2 (ja) * | 2018-01-31 | 2022-10-25 | 三国電子有限会社 | 接続構造体および接続構造体の作製方法 |
| TWI826476B (zh) * | 2018-06-26 | 2023-12-21 | 日商力森諾科股份有限公司 | 各向異性導電膜及其製造方法以及連接結構體的製造方法 |
| US12172240B2 (en) | 2018-06-26 | 2024-12-24 | Resonac Corporation | Solder particles |
| JP7125547B2 (ja) * | 2018-12-29 | 2022-08-24 | 深南電路股▲ふん▼有限公司 | 多様に組み立て可能なプリント基板及びその製造方法 |
| KR20220112922A (ko) * | 2021-02-05 | 2022-08-12 | 엘지이노텍 주식회사 | 회로기판 및 이를 포함하는 패키지 기판 |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200421960A (en) * | 2003-01-31 | 2004-10-16 | Toshiba Kk | Semiconductor device, and the manufacturing method of the same |
| TW200735307A (en) * | 2005-11-22 | 2007-09-16 | Sony Corp | Semiconductor device and method for manufacturing semiconductor device |
| KR20090011568A (ko) * | 2007-07-26 | 2009-02-02 | 주식회사 하이닉스반도체 | 반도체 패키지 및 그의 제조 방법 |
| TW201003889A (en) * | 2008-03-28 | 2010-01-16 | Nec Corp | Semiconductor apparatus and manufacturing method thereof, printed circuit board and electronic apparatus |
| TW201027697A (en) * | 2008-11-19 | 2010-07-16 | Sony Corp | Mount board and semiconductor module |
| TW201127233A (en) * | 2009-08-07 | 2011-08-01 | Namics Corp | Multilayered wiring board, and method for manufacturing multilayered wiring board |
| TW201133669A (en) * | 2009-12-08 | 2011-10-01 | Renesas Electronics Corp | Semiconductor device and method of manufacturing the same |
| TW201138023A (en) * | 2010-04-02 | 2011-11-01 | Denso Corp | Semiconductor chip embedded with wiring substrate and manufacturing method thereof |
| TW201225196A (en) * | 2010-12-01 | 2012-06-16 | Panasonic Corp | Electronic-component mounted body, electronic component, and circuit board |
| TW201445655A (zh) * | 2007-11-09 | 2014-12-01 | 瑞薩電子股份有限公司 | 半導體裝置 |
Family Cites Families (52)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6234773A (ja) | 1985-08-02 | 1987-02-14 | Honda Motor Co Ltd | 研削盤における砥石ストツク装置 |
| JPH0334064Y2 (enExample) * | 1985-08-21 | 1991-07-18 | ||
| US5502889A (en) * | 1988-06-10 | 1996-04-02 | Sheldahl, Inc. | Method for electrically and mechanically connecting at least two conductive layers |
| JPH0362411A (ja) * | 1989-07-31 | 1991-03-18 | Canon Inc | 異方性導電フィルムの製造方法 |
| JP2748713B2 (ja) * | 1991-03-29 | 1998-05-13 | 日立化成工業株式会社 | 接続部材 |
| JPH08330736A (ja) | 1995-06-01 | 1996-12-13 | Toray Ind Inc | 多層基板およびその製造方法 |
| JPH1056099A (ja) * | 1996-08-12 | 1998-02-24 | Shinko Electric Ind Co Ltd | 多層回路基板およびその製造方法 |
| KR100539060B1 (ko) * | 1997-10-28 | 2007-04-25 | 소니 케미카루 가부시키가이샤 | 이방도전성접착제및접착용막 |
| JP3624818B2 (ja) * | 1999-10-12 | 2005-03-02 | ソニーケミカル株式会社 | 異方性導電接続材料、接続体、およびその製造方法 |
| JP2001237365A (ja) | 2000-02-23 | 2001-08-31 | Seiko Epson Corp | 接続用端子の接合方法、半導体装置の製造方法および半導体装置 |
| JP2002110897A (ja) | 2000-09-28 | 2002-04-12 | Toshiba Corp | 半導体装置およびその製造方法 |
| JPWO2003003798A1 (ja) | 2001-06-29 | 2004-10-21 | 東レエンジニアリング株式会社 | 異方導電性接着剤を用いた接合方法 |
| JP2003204135A (ja) * | 2002-09-20 | 2003-07-18 | Canon Inc | マルチチップモジュール、及びディスプレイパネル |
| JP4340517B2 (ja) | 2003-10-30 | 2009-10-07 | Okiセミコンダクタ株式会社 | 半導体装置及びその製造方法 |
| JP4351939B2 (ja) * | 2004-03-25 | 2009-10-28 | ソニーケミカル&インフォメーションデバイス株式会社 | 多層配線基板及びその製造方法 |
| JP4688526B2 (ja) * | 2005-03-03 | 2011-05-25 | Okiセミコンダクタ株式会社 | 半導体装置及びその製造方法 |
| JP2006310082A (ja) | 2005-04-28 | 2006-11-09 | Tokai Rubber Ind Ltd | 異方性導電膜およびその製造方法 |
| WO2007036994A1 (ja) * | 2005-09-28 | 2007-04-05 | Spansion Llc | 半導体装置およびその製造方法並びにフィルムの製造方法 |
| KR100987688B1 (ko) * | 2005-10-14 | 2010-10-13 | 가부시키가이샤후지쿠라 | 프린트 배선 기판 및 프린트 배선 기판의 제조 방법 |
| KR100777255B1 (ko) | 2006-04-18 | 2007-11-20 | 중앙대학교 산학협력단 | 이방성 도전 필름 및 이를 이용한 전자부품의 실장방법 |
| JP2006339160A (ja) | 2006-06-02 | 2006-12-14 | Hitachi Chem Co Ltd | 熱硬化性回路接続部材及びそれを用いた電極の接続構造、電極の接続方法 |
| US8834170B2 (en) * | 2006-11-06 | 2014-09-16 | University Of Florida Research Foundation, Inc. | Devices and methods for utilizing mechanical surgical devices in a virtual environment |
| JP4872663B2 (ja) * | 2006-12-28 | 2012-02-08 | 株式会社日立製作所 | 接合用材料及び接合方法 |
| KR100842921B1 (ko) * | 2007-06-18 | 2008-07-02 | 주식회사 하이닉스반도체 | 반도체 패키지의 제조 방법 |
| US8334170B2 (en) * | 2008-06-27 | 2012-12-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for stacking devices |
| US8097953B2 (en) * | 2008-10-28 | 2012-01-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Three-dimensional integrated circuit stacking-joint interface structure |
| US8674482B2 (en) * | 2008-11-18 | 2014-03-18 | Hong Kong Applied Science And Technology Research Institute Co. Ltd. | Semiconductor chip with through-silicon-via and sidewall pad |
| KR20100079183A (ko) * | 2008-12-30 | 2010-07-08 | 주식회사 동부하이텍 | 반도체 패키지 장치와 그 제조 방법 |
| US8647923B2 (en) * | 2009-04-06 | 2014-02-11 | Canon Kabushiki Kaisha | Method of manufacturing semiconductor device |
| JP2010251547A (ja) * | 2009-04-16 | 2010-11-04 | Elpida Memory Inc | 半導体装置及びその製造方法 |
| JP2010272737A (ja) | 2009-05-22 | 2010-12-02 | Elpida Memory Inc | 半導体装置の製造方法 |
| JP5595708B2 (ja) * | 2009-10-09 | 2014-09-24 | ピーエスフォー ルクスコ エスエイアールエル | 半導体装置及びその調整方法並びにデータ処理システム |
| US8232137B2 (en) * | 2009-12-10 | 2012-07-31 | Intersil Americas Inc. | Heat conduction for chip stacks and 3-D circuits |
| US8048721B2 (en) * | 2010-03-18 | 2011-11-01 | Powertech Technology Inc. | Method for filling multi-layer chip-stacked gaps |
| JP2011243725A (ja) * | 2010-05-18 | 2011-12-01 | Elpida Memory Inc | 半導体装置の製造方法 |
| US9030024B2 (en) * | 2010-06-17 | 2015-05-12 | Conversant Intellectual Property Management Inc. | Semiconductor device with through-silicon vias |
| US8445918B2 (en) * | 2010-08-13 | 2013-05-21 | International Business Machines Corporation | Thermal enhancement for multi-layer semiconductor stacks |
| KR20120032254A (ko) * | 2010-09-28 | 2012-04-05 | 삼성전자주식회사 | 반도체 적층 패키지 및 이의 제조 방법 |
| JP5167335B2 (ja) * | 2010-12-22 | 2013-03-21 | 株式会社日立製作所 | 半導体装置 |
| KR101817156B1 (ko) * | 2010-12-28 | 2018-01-10 | 삼성전자 주식회사 | 관통 전극을 갖는 적층 구조의 반도체 장치, 반도체 메모리 장치, 반도체 메모리 시스템 및 그 동작방법 |
| JP5932267B2 (ja) * | 2011-08-31 | 2016-06-08 | ピーエスフォー ルクスコ エスエイアールエルPS4 Luxco S.a.r.l. | 半導体装置及びその製造方法 |
| JP5780228B2 (ja) * | 2011-11-11 | 2015-09-16 | 住友ベークライト株式会社 | 半導体装置の製造方法 |
| KR101784507B1 (ko) | 2011-12-14 | 2017-10-12 | 에스케이하이닉스 주식회사 | 반도체 적층 패키지 및 제조 방법, 이를 포함하는 전자 시스템 |
| CN103988289A (zh) * | 2011-12-16 | 2014-08-13 | 旭化成电子材料株式会社 | 带各向异性导电薄膜的半导体芯片、带各向异性导电薄膜的半导体晶片、以及半导体装置 |
| JP2013183120A (ja) * | 2012-03-05 | 2013-09-12 | Elpida Memory Inc | 半導体装置 |
| WO2014034741A1 (ja) | 2012-08-29 | 2014-03-06 | デクセリアルズ株式会社 | 異方性導電フィルム及びその製造方法 |
| JP6058336B2 (ja) * | 2012-09-28 | 2017-01-11 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| KR20140099604A (ko) * | 2013-02-04 | 2014-08-13 | 삼성전자주식회사 | 적층 패키지 및 적층 패키지의 제조 방법 |
| KR20150005113A (ko) * | 2013-07-04 | 2015-01-14 | 에스케이하이닉스 주식회사 | 광학 신호 경로를 포함하는 반도체 패키지 |
| KR102084540B1 (ko) * | 2013-10-16 | 2020-03-04 | 삼성전자주식회사 | 반도체 패키지 및 그 제조방법 |
| JP2015177062A (ja) * | 2014-03-14 | 2015-10-05 | 株式会社東芝 | 半導体装置の製造方法および半導体装置 |
| US9349670B2 (en) * | 2014-08-04 | 2016-05-24 | Micron Technology, Inc. | Semiconductor die assemblies with heat sink and associated systems and methods |
-
2016
- 2016-01-13 CN CN202110755784.9A patent/CN113690209B/zh active Active
- 2016-01-13 CN CN201680004447.3A patent/CN107112314B/zh active Active
- 2016-01-13 TW TW109134185A patent/TWI786440B/zh active
- 2016-01-13 WO PCT/JP2016/050873 patent/WO2016114318A1/ja not_active Ceased
- 2016-01-13 TW TW111142394A patent/TWI838943B/zh active
- 2016-01-13 JP JP2016004538A patent/JP2016131245A/ja active Pending
- 2016-01-13 KR KR1020177017940A patent/KR101974763B1/ko active Active
- 2016-01-13 US US15/543,397 patent/US10199358B2/en active Active
- 2016-01-13 TW TW105101041A patent/TWI709221B/zh active
-
2020
- 2020-09-25 JP JP2020161099A patent/JP7207382B2/ja active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200421960A (en) * | 2003-01-31 | 2004-10-16 | Toshiba Kk | Semiconductor device, and the manufacturing method of the same |
| TW200735307A (en) * | 2005-11-22 | 2007-09-16 | Sony Corp | Semiconductor device and method for manufacturing semiconductor device |
| KR20090011568A (ko) * | 2007-07-26 | 2009-02-02 | 주식회사 하이닉스반도체 | 반도체 패키지 및 그의 제조 방법 |
| TW201445655A (zh) * | 2007-11-09 | 2014-12-01 | 瑞薩電子股份有限公司 | 半導體裝置 |
| TW201003889A (en) * | 2008-03-28 | 2010-01-16 | Nec Corp | Semiconductor apparatus and manufacturing method thereof, printed circuit board and electronic apparatus |
| TW201027697A (en) * | 2008-11-19 | 2010-07-16 | Sony Corp | Mount board and semiconductor module |
| TW201127233A (en) * | 2009-08-07 | 2011-08-01 | Namics Corp | Multilayered wiring board, and method for manufacturing multilayered wiring board |
| TW201133669A (en) * | 2009-12-08 | 2011-10-01 | Renesas Electronics Corp | Semiconductor device and method of manufacturing the same |
| TW201138023A (en) * | 2010-04-02 | 2011-11-01 | Denso Corp | Semiconductor chip embedded with wiring substrate and manufacturing method thereof |
| TW201225196A (en) * | 2010-12-01 | 2012-06-16 | Panasonic Corp | Electronic-component mounted body, electronic component, and circuit board |
Also Published As
| Publication number | Publication date |
|---|---|
| JP7207382B2 (ja) | 2023-01-18 |
| CN113690209B (zh) | 2025-07-25 |
| US20180026012A1 (en) | 2018-01-25 |
| CN107112314A (zh) | 2017-08-29 |
| CN113690209A (zh) | 2021-11-23 |
| JP2016131245A (ja) | 2016-07-21 |
| KR20170093171A (ko) | 2017-08-14 |
| JP2020202409A (ja) | 2020-12-17 |
| KR101974763B1 (ko) | 2019-05-02 |
| TW202312423A (zh) | 2023-03-16 |
| US10199358B2 (en) | 2019-02-05 |
| TWI709221B (zh) | 2020-11-01 |
| WO2016114318A1 (ja) | 2016-07-21 |
| TW201639115A (zh) | 2016-11-01 |
| TW202107672A (zh) | 2021-02-16 |
| TWI838943B (zh) | 2024-04-11 |
| CN107112314B (zh) | 2021-07-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI786440B (zh) | 多層基板、及多層基板之製造方法 | |
| JP6504307B1 (ja) | 異方導電性フィルム | |
| CN106797082B (zh) | 各向异性导电膜及连接结构体 | |
| JP7207383B2 (ja) | 多層基板 | |
| KR20200029640A (ko) | 이방 도전성 필름 및 접속 구조체 | |
| JP2016131242A (ja) | バンプ形成用フィルム、半導体装置及びその製造方法、並びに接続構造体 | |
| US8963017B2 (en) | Multilayer board | |
| HK40064907A (en) | Multilayer board | |
| HK1240400A1 (en) | Multilayer board | |
| HK1240400B (zh) | 多层基板 | |
| HK1242473A1 (en) | Multilayer substrate | |
| CN121444289A (zh) | 导电膜、导电膜的制造方法以及连接结构体的制造方法 | |
| HK1242473B (zh) | 多层基板 |