TWI634632B - 嵌入式半導體裝置封裝及其製造方法 - Google Patents

嵌入式半導體裝置封裝及其製造方法 Download PDF

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Publication number
TWI634632B
TWI634632B TW103131743A TW103131743A TWI634632B TW I634632 B TWI634632 B TW I634632B TW 103131743 A TW103131743 A TW 103131743A TW 103131743 A TW103131743 A TW 103131743A TW I634632 B TWI634632 B TW I634632B
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Taiwan
Prior art keywords
semiconductor device
dielectric
layer
dielectric layer
package structure
Prior art date
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TW103131743A
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English (en)
Chinese (zh)
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TW201523821A (zh
Inventor
Shakti Singh Chauhan
夏可堤 喬漢
Paul Alan Mcconnelee
保羅 麥可隆尼
Arun Virupaksha Gowda
艾倫 格達
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General Electric Company
通用電機股份有限公司
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Publication of TW201523821A publication Critical patent/TW201523821A/zh
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Publication of TWI634632B publication Critical patent/TWI634632B/zh

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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/611Insulating or insulated package substrates; Interposers; Redistribution layers for connecting multiple chips together
    • H10W70/614Insulating or insulated package substrates; Interposers; Redistribution layers for connecting multiple chips together the multiple chips being integrally enclosed
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    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/18Printed circuits structurally associated with non-printed electric components
    • H05K1/182Printed circuits structurally associated with non-printed electric components associated with components mounted in printed circuit boards [PCB], e.g. insert-mounted components [IMC]
    • H05K1/185Printed circuits structurally associated with non-printed electric components associated with components mounted in printed circuit boards [PCB], e.g. insert-mounted components [IMC] associated with components encapsulated in the insulating substrate of the PCBs; associated with components incorporated in internal layers of multilayer circuit boards
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    • H10W20/41Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/42Vias, e.g. via plugs
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    • H10W20/41Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
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    • H10W20/41Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/44Conductive materials thereof
    • H10W20/4403Conductive materials thereof based on metals, e.g. alloys, metal silicides
    • H10W20/4421Conductive materials thereof based on metals, e.g. alloys, metal silicides the principal metal being copper
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    • H10W20/45Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their insulating parts
    • H10W20/47Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their insulating parts comprising two or more dielectric layers having different properties, e.g. different dielectric constants
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    • H10W42/276Arrangements for protection of devices protecting against electromagnetic or particle radiation, e.g. light, X-rays, gamma-rays or electrons characterised by their shapes or dispositions the arrangements being on an external surface of the package, e.g. on the outer surface of an encapsulation
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    • H05K2201/01Dielectrics
    • H05K2201/0183Dielectric layers
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    • H05K2203/02Details related to mechanical or acoustic processing, e.g. drilling, punching, cutting, using ultrasound
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    • H05K3/30Assembling printed circuits with electric components, e.g. with resistors
    • H05K3/303Assembling printed circuits with electric components, e.g. with resistors with surface mounted components
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  • Engineering & Computer Science (AREA)
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  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Physics & Mathematics (AREA)
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TW103131743A 2013-09-26 2014-09-15 嵌入式半導體裝置封裝及其製造方法 TWI634632B (zh)

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