KR840000985A - 반도체 집적회로 및 그 제조방법 - Google Patents

반도체 집적회로 및 그 제조방법 Download PDF

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Publication number
KR840000985A
KR840000985A KR1019820002670A KR820002670A KR840000985A KR 840000985 A KR840000985 A KR 840000985A KR 1019820002670 A KR1019820002670 A KR 1019820002670A KR 820002670 A KR820002670 A KR 820002670A KR 840000985 A KR840000985 A KR 840000985A
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South Korea
Prior art keywords
unit cell
circuit
pattern
semiconductor integrated
bonding pads
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KR1019820002670A
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English (en)
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KR910000155B1 (ko
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요시가쯔(외 2) 다가하시
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미쓰다 가쓰시게
가부시기가이샤 히다찌 세이사꾸쇼
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Publication of KR840000985A publication Critical patent/KR840000985A/ko
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    • GPHYSICS
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    • H01L2924/11Device type
    • H01L2924/13Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304Transistor
    • H01L2924/1306Field-effect transistor [FET]
    • H01L2924/13091Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/1901Structure
    • H01L2924/1904Component type
    • H01L2924/19043Component type being a resistor

Abstract

내용 없음

Description

반도체 집적회로 및 그 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 첫번째 엠보디먼트에 따른 CMOS형태의 논리적인 의레이아우트(layout)를 도식적으로 보여주는 평면도. 제2A도는 논리적인 IC를 위한 유니트 셀을 나타내는 평면도. 제3A도는셀을 나타내는 평면도. 제3B도는 제3A도에 나타난셀의 레이아우트에 첫째층을 이루는 알루미늄 배선이 적용된 경우의 평면도.

Claims (7)

  1. 반도체 서브스트레이트 위에는 다수의 유니트 셀이 형성되며 각 유니트 셀은 입력회로, 출력회로, 입력/출력회로중 적어도 하나의 회로기능을 제공할 수 있도록 미리 결정된 회로 소자들이 내부 연결될 수 있게 구성되어져 있고, 이때 각 유니트 셀과 관련되어 다수의 본딩패드가 구성되며, 입력, 출력 그리고 입력/출력회로중 최소한 두가지 선택된 기능을 각 유니트 셀에 제공하기 위한 배선 패턴은 각 유니트 셀로부터 선택된 두 회로기능을 추출해 내기 위해 최소한 두개의 본딩패드를 각 유니트 셀과 전기적으로 연결하기 위한 내부 결선을 포함하여서된 반도체 집적회로 장치.
  2. 각 유니트 셀에 제공되어진 두개의 본딩 패드중 하나는 유니트 셀의 입력회로에 신호를 공급하기 위해 채택되며, 다른 하나의 본딩 패드는 유니트 셀의 출력회로 부터 신호를 드라이브(drive)하기 위해 채택된 청구범위 1항 기재의 반도체 집적회로 장치.
  3. 각 본딩패드는 이전의 패드와의 접촉 상부와 내부에 도금되어진 상, 하의 도체막으로 구성된 청구범위 1항 기재의 반도체 집적회로 장치.
  4. 미리 결정된 소자 패턴 안에서 각 유니트 회로의 소자를 반도체 소브스트레이트 위에 구성하는 단계와, 미리 결정된 회로기능을 제공하기 위해 패턴 내의 각 유니트 셀의 최소한 회로소자를 내부 연결시키는 단계와, 미리 결정된 다양한 본딩패드 중에서 선택된 하나의 패턴에 따라 각 유니트를 위해 본딩패드를 구성하는 단계, 여기서 미리 결정된 다양한 본딩 패드는 앞에서 말한 최소한 두가지 회로기능을 각 유니트 셀에 제공할 수 있도록 적어도 두개의 분리된 본딩패드를 규정지을 수 있는 첫번째 패턴을 포함한 반도체 집적회로 장치를 제조하는 방법.
  5. 각 유니트 셀은 선택된 본딩패드 패턴에 따라 두개의 분리된 본딩패드와 연결되어지며, 각 유니트 셀은 입력, 출력의 두 회로기능을 제공하는 청구범위 4항 기재의 반도체 집적회로 장치를 제조하는 방법.
  6. 미리 결정된 본딩 패드 패턴은 첫번째 패턴에 의해서 규정된 두개의 본딩 패드가 형성돼 있는 반도체 서브 스트레이트 위의 두 영역 사이를 확장할 수 있도록 하나의 본딩패드를 제공하기 위한 두번째 패턴을 포함하는 청구범위 4항 기재의 반도체 집적회로 장치를 제조하는 방법.
  7. 각 유니트 셀의 각 회로소자는 폴리크리스탈린 실리콘막으로 형성된 게이트 전극을 가진 MOS장치이며, 각 유니트 셀의 선택되어진 회로소자들을 알루미늄 배선에 의해 내부 연결되어 있고, 각 본딩패드는 알루미늄으로 만들어진 청구범위 4항 기재의 반도체 집적회로 장치의 제조방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR8202670A 1981-06-22 1982-06-15 반도체 집적회로장치 및 그 제조방법 KR910000155B1 (ko)

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Application Number Priority Date Filing Date Title
JP9535781A JPS57211248A (en) 1981-06-22 1981-06-22 Semiconductor integrated circuit device
JP56-95357 1981-06-22
JP56-095357 1981-06-22

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KR840000985A true KR840000985A (ko) 1984-03-26
KR910000155B1 KR910000155B1 (ko) 1991-01-21

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US (1) US4893168A (ko)
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KR (1) KR910000155B1 (ko)
DE (1) DE3223276A1 (ko)
FR (1) FR2508255B1 (ko)
GB (1) GB2104284B (ko)
HK (1) HK54686A (ko)
IT (1) IT1152980B (ko)
MY (1) MY8600554A (ko)
SG (1) SG20786G (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100359591B1 (ko) * 1999-02-10 2002-11-07 가부시끼가이샤 도시바 반도체 장치

Families Citing this family (59)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5864047A (ja) * 1981-10-13 1983-04-16 Nec Corp マスタ−スライス半導体集積回路装置
JPS5897847A (ja) * 1981-12-08 1983-06-10 Nec Corp 集積回路装置
JPS58124263A (ja) * 1982-01-20 1983-07-23 Toshiba Corp 半導体装置
JPS58213448A (ja) * 1982-06-07 1983-12-12 Hitachi Ltd 負荷駆動方式
US4409499A (en) * 1982-06-14 1983-10-11 Standard Microsystems Corporation High-speed merged plane logic function array
JPS5941852A (ja) * 1982-06-24 1984-03-08 ストレイジ・テクノロジ−・パ−トナ−ズ 集積回路チツプ
US4870471A (en) * 1982-09-30 1989-09-26 Mitsubishi Denki Kabushiki Kaisha Complementary metal-oxide semiconductor integrated circuit device with isolation
US5281545A (en) * 1982-12-10 1994-01-25 Ricoh Company, Ltd. Processes for manufacturing a semiconductor device
JPS59139646A (ja) * 1983-01-31 1984-08-10 Hitachi Micro Comput Eng Ltd 半導体集積回路装置
KR910008521B1 (ko) * 1983-01-31 1991-10-18 가부시기가이샤 히다찌세이사꾸쇼 반도체집적회로
JPS59167122A (ja) * 1983-03-11 1984-09-20 Nec Corp 入出力バツフア−
US4568961A (en) * 1983-03-11 1986-02-04 Rca Corporation Variable geometry automated universal array
JPS607147A (ja) * 1983-06-24 1985-01-14 Mitsubishi Electric Corp 半導体装置
WO1985000468A1 (en) * 1983-07-14 1985-01-31 Advanced Micro Devices, Inc. A semiconductor die having undedicated input/output cells
JPS6027145A (ja) * 1983-07-25 1985-02-12 Hitachi Ltd 半導体集積回路装置
US5610089A (en) * 1983-12-26 1997-03-11 Hitachi, Ltd. Method of fabrication of semiconductor integrated circuit device
US5276346A (en) * 1983-12-26 1994-01-04 Hitachi, Ltd. Semiconductor integrated circuit device having protective/output elements and internal circuits
JPS61111576A (ja) * 1984-10-13 1986-05-29 Fujitsu Ltd 半導体装置
JPS61218143A (ja) * 1985-03-25 1986-09-27 Hitachi Ltd 半導体集積回路装置
JPS6289341A (ja) * 1985-10-15 1987-04-23 Mitsubishi Electric Corp マスタスライス方式大規模半導体集積回路装置の製造方法
JPH0638453B2 (ja) * 1986-05-12 1994-05-18 日本電気株式会社 半導体装置
US4862197A (en) * 1986-08-28 1989-08-29 Hewlett-Packard Co. Process for manufacturing thermal ink jet printhead and integrated circuit (IC) structures produced thereby
JPS63108733A (ja) * 1986-10-24 1988-05-13 Nec Corp 半導体集積回路
JPH0758734B2 (ja) * 1987-02-23 1995-06-21 株式会社東芝 絶縁ゲ−ト型セミカスタム集積回路
US5243208A (en) * 1987-05-27 1993-09-07 Hitachi, Ltd. Semiconductor integrated circuit device having a gate array with a ram and by-pass signal lines which interconnect a logic section and I/O unit circuit of the gate array
EP0338817B1 (en) * 1988-04-22 1999-09-08 Fujitsu Limited Master slice semiconductor integrated circuit device
JPH01289138A (ja) * 1988-05-16 1989-11-21 Toshiba Corp マスタースライス型半導体集積回路
US5162893A (en) * 1988-05-23 1992-11-10 Fujitsu Limited Semiconductor integrated circuit device with an enlarged internal logic circuit area
JPH01293647A (ja) * 1988-05-23 1989-11-27 Fujitsu Ltd 半導体装置
US5019889A (en) * 1988-06-29 1991-05-28 Hitachi, Ltd. Semiconductor integrated circuit device
US5300796A (en) * 1988-06-29 1994-04-05 Hitachi, Ltd. Semiconductor device having an internal cell array region and a peripheral region surrounding the internal cell array for providing input/output basic cells
EP0360164A3 (en) * 1988-09-20 1990-07-04 National Semiconductor Corporation Standard cell output driver connection system
US4987578A (en) * 1988-10-07 1991-01-22 Advanced Micro Devices, Inc. Mask programmable bus control gate array
JPH07111971B2 (ja) * 1989-10-11 1995-11-29 三菱電機株式会社 集積回路装置の製造方法
US5216280A (en) * 1989-12-02 1993-06-01 Kabushiki Kaisha Toshiba Semiconductor integrated circuit device having pads at periphery of semiconductor chip
JPH06105709B2 (ja) * 1989-12-02 1994-12-21 東芝マイクロエレクトロニクス株式会社 半導体集積回路装置
US4988636A (en) * 1990-01-29 1991-01-29 International Business Machines Corporation Method of making bit stack compatible input/output circuits
JPH02223220A (ja) * 1990-01-29 1990-09-05 Hitachi Ltd 半導体集積回路装置
US5153507A (en) * 1990-11-16 1992-10-06 Vlsi Technology, Inc. Multi-purpose bond pad test die
JP2707871B2 (ja) * 1991-05-31 1998-02-04 富士ゼロックス株式会社 電子デバイス及びその製造方法
US5134094A (en) * 1991-07-22 1992-07-28 Silicon Power Corporation Single inline packaged solid state relay with high current density capability
US5220197A (en) * 1991-07-22 1993-06-15 Silicon Power Corporation Single inline packaged solid state relay with high current density capability
US6487682B2 (en) 1991-09-18 2002-11-26 Fujitsu Limited Semiconductor integrated circuit
US5341018A (en) * 1991-09-18 1994-08-23 Nec Corporation Semiconductor integrated circuit device having a plurality of input circuits each including differently sized transistors
JPH06140607A (ja) * 1992-10-28 1994-05-20 Mitsubishi Electric Corp 半導体集積回路
US5404041A (en) * 1993-03-31 1995-04-04 Texas Instruments Incorporated Source contact placement for efficient ESD/EOS protection in grounded substrate MOS integrated circuit
US5691218A (en) * 1993-07-01 1997-11-25 Lsi Logic Corporation Method of fabricating a programmable polysilicon gate array base cell structure
US5436578A (en) * 1993-07-14 1995-07-25 Hewlett-Packard Corporation CMOS output pad driver with variable drive currents ESD protection and improved leakage current behavior
US5796129A (en) * 1993-08-03 1998-08-18 Seiko Epson Corp. Master slice type integrated circuit system having block areas optimized based on function
US5552333A (en) * 1994-09-16 1996-09-03 Lsi Logic Corporation Method for designing low profile variable width input/output cells
US5760428A (en) * 1996-01-25 1998-06-02 Lsi Logic Corporation Variable width low profile gate array input/output architecture
US5698873A (en) * 1996-03-08 1997-12-16 Lsi Logic Corporation High density gate array base cell architecture
US5796638A (en) * 1996-06-24 1998-08-18 The Board Of Trustees Of The University Of Illinois Methods, apparatus and computer program products for synthesizing integrated circuits with electrostatic discharge capability and connecting ground rules faults therein
US5767565A (en) * 1996-07-22 1998-06-16 Alliance Semiconductor Corporation Semiconductor devices having cooperative mode option at assembly stage and method thereof
US5969390A (en) * 1997-07-22 1999-10-19 Zilog, Inc. Layout solution for electromagnetic interference reduction
US6114731A (en) * 1998-03-27 2000-09-05 Adaptec, Inc. Low capacitance ESD structure having a source inside a well and the bottom portion of the drain inside a substrate
US6078068A (en) * 1998-07-15 2000-06-20 Adaptec, Inc. Electrostatic discharge protection bus/die edge seal
JP3530450B2 (ja) * 2000-02-18 2004-05-24 Necエレクトロニクス株式会社 マクロ回路の配線方法、マクロ回路配線装置、及びマクロ回路
JP4146290B2 (ja) * 2003-06-06 2008-09-10 株式会社ルネサステクノロジ 半導体装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3771217A (en) * 1971-04-16 1973-11-13 Texas Instruments Inc Integrated circuit arrays utilizing discretionary wiring and method of fabricating same
US3936812A (en) * 1974-12-30 1976-02-03 Ibm Corporation Segmented parallel rail paths for input/output signals
JPS5851425B2 (ja) * 1975-08-22 1983-11-16 株式会社日立製作所 ハンドウタイソウチ
US4161662A (en) * 1976-01-22 1979-07-17 Motorola, Inc. Standardized digital logic chip
US4207556A (en) * 1976-12-14 1980-06-10 Nippon Telegraph And Telephone Public Corporation Programmable logic array arrangement
JPS5925381B2 (ja) * 1977-12-30 1984-06-16 富士通株式会社 半導体集積回路装置
JPS60953B2 (ja) * 1977-12-30 1985-01-11 富士通株式会社 半導体集積回路装置
US4249193A (en) * 1978-05-25 1981-02-03 International Business Machines Corporation LSI Semiconductor device and fabrication thereof
JPS55163859A (en) * 1979-06-07 1980-12-20 Fujitsu Ltd Manufacture of semiconductor device
JPS561545A (en) * 1979-06-15 1981-01-09 Mitsubishi Electric Corp Input/output buffer cell for semiconductor integrated circuit
JPS5631730U (ko) * 1979-07-19 1981-03-27
JPS5619639A (en) * 1979-07-27 1981-02-24 Hitachi Ltd Semiconductor device
JPS5690548A (en) * 1979-11-20 1981-07-22 Fujitsu Ltd Manufacture of semiconductor device by master slice system
JPS57181152A (en) * 1981-04-30 1982-11-08 Toshiba Corp Semiconductor integrated circuit device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100359591B1 (ko) * 1999-02-10 2002-11-07 가부시끼가이샤 도시바 반도체 장치

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GB2104284B (en) 1985-06-19
DE3223276A1 (de) 1983-01-05
US4893168A (en) 1990-01-09
GB2104284A (en) 1983-03-02
JPS57211248A (en) 1982-12-25
FR2508255B1 (fr) 1987-12-24
IT8221971A0 (it) 1982-06-21
FR2508255A1 (fr) 1982-12-24
KR910000155B1 (ko) 1991-01-21
HK54686A (en) 1986-08-01
SG20786G (en) 1987-03-27
IT1152980B (it) 1987-01-14
JPH0440866B2 (ko) 1992-07-06

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