KR101081477B1 - 태양 전지의 제조를 위한 반도체 제조물 - Google Patents

태양 전지의 제조를 위한 반도체 제조물 Download PDF

Info

Publication number
KR101081477B1
KR101081477B1 KR1020087001917A KR20087001917A KR101081477B1 KR 101081477 B1 KR101081477 B1 KR 101081477B1 KR 1020087001917 A KR1020087001917 A KR 1020087001917A KR 20087001917 A KR20087001917 A KR 20087001917A KR 101081477 B1 KR101081477 B1 KR 101081477B1
Authority
KR
South Korea
Prior art keywords
wafer
strips
silicon
semiconductor
strip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020087001917A
Other languages
English (en)
Korean (ko)
Other versions
KR20080022218A (ko
Inventor
클라우스 요하네스 웨버
앤드류 윌리암 블랙커즈
Original Assignee
트랜스폼 솔라 피티와이 리미티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 트랜스폼 솔라 피티와이 리미티드 filed Critical 트랜스폼 솔라 피티와이 리미티드
Publication of KR20080022218A publication Critical patent/KR20080022218A/ko
Application granted granted Critical
Publication of KR101081477B1 publication Critical patent/KR101081477B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/121—The active layers comprising only Group IV materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00—Individual photovoltaic cells, e.g. solar cells
    • H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/14—Photovoltaic cells having only PN homojunction potential barriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • H10F19/90—Structures for connecting between photovoltaic cells, e.g. interconnections or insulating spacers
    • H10F19/902—Structures for connecting between photovoltaic cells, e.g. interconnections or insulating spacers for series or parallel connection of photovoltaic cells
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/137—Batch treatment of the devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/10—Semiconductor bodies
    • H10F77/14—Shape of semiconductor bodies; Shapes, relative sizes or dispositions of semiconductor regions within semiconductor bodies
    • H10F77/147—Shapes of bodies
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/40—Optical elements or arrangements
    • H10F77/42—Optical elements or arrangements directly associated or integrated with photovoltaic cells, e.g. light-reflecting means or light-concentrating means
    • H10F77/488—Reflecting light-concentrating means, e.g. parabolic mirrors or concentrators using total internal reflection
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/52—PV systems with concentrators
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Photovoltaic Devices (AREA)
  • Weting (AREA)
  • Structure Of Printed Boards (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Sustainable Development (AREA)
KR1020087001917A 2000-11-29 2001-11-29 태양 전지의 제조를 위한 반도체 제조물 Expired - Fee Related KR101081477B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AUPR1748 2000-11-29
AUPR1748A AUPR174800A0 (en) 2000-11-29 2000-11-29 Semiconductor processing

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020037007263A Division KR100883997B1 (ko) 2000-11-29 2001-11-29 사용가능한 평면을 증가시키는 반도체 웨이퍼 제조방법

Publications (2)

Publication Number Publication Date
KR20080022218A KR20080022218A (ko) 2008-03-10
KR101081477B1 true KR101081477B1 (ko) 2011-11-09

Family

ID=3825785

Family Applications (3)

Application Number Title Priority Date Filing Date
KR1020037007263A Expired - Fee Related KR100883997B1 (ko) 2000-11-29 2001-11-29 사용가능한 평면을 증가시키는 반도체 웨이퍼 제조방법
KR1020087001912A Expired - Fee Related KR101081478B1 (ko) 2000-11-29 2001-11-29 실리콘 태양전지 제조방법, 양면 태양전지, 양면 태양전지 제조방법 및 태양전지 구조
KR1020087001917A Expired - Fee Related KR101081477B1 (ko) 2000-11-29 2001-11-29 태양 전지의 제조를 위한 반도체 제조물

Family Applications Before (2)

Application Number Title Priority Date Filing Date
KR1020037007263A Expired - Fee Related KR100883997B1 (ko) 2000-11-29 2001-11-29 사용가능한 평면을 증가시키는 반도체 웨이퍼 제조방법
KR1020087001912A Expired - Fee Related KR101081478B1 (ko) 2000-11-29 2001-11-29 실리콘 태양전지 제조방법, 양면 태양전지, 양면 태양전지 제조방법 및 태양전지 구조

Country Status (11)

Country Link
US (5) US7875794B2 (enExample)
EP (5) EP2273556A3 (enExample)
JP (1) JP4416399B2 (enExample)
KR (3) KR100883997B1 (enExample)
CN (4) CN101286449B (enExample)
AU (4) AUPR174800A0 (enExample)
CA (4) CA2727658A1 (enExample)
IL (2) IL156166A0 (enExample)
MY (1) MY142148A (enExample)
WO (1) WO2002045143A1 (enExample)
ZA (1) ZA200304155B (enExample)

Families Citing this family (129)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AUPR174800A0 (en) * 2000-11-29 2000-12-21 Australian National University, The Semiconductor processing
CA2467112C (en) * 2001-11-29 2010-07-27 Origin Energy Solar Pty Ltd Semiconductor texturing process
US8294025B2 (en) 2002-06-08 2012-10-23 Solarity, Llc Lateral collection photovoltaics
US7535019B1 (en) 2003-02-18 2009-05-19 Nanosolar, Inc. Optoelectronic fiber
DE10320868B4 (de) * 2003-05-09 2008-09-04 Bayerisches Zentrum für angewandte Energieforschung e.V. (ZAE Bayern) Photovoltaikeinrichtung und Verfahren zu deren Herstellung
AU2003902270A0 (en) 2003-05-09 2003-05-29 Origin Energy Solar Pty Ltd Separating and assembling semiconductor strips
CA2576868A1 (en) * 2004-08-09 2006-02-16 The Australian National University Solar cell (sliver) sub-module formation
US20080223429A1 (en) * 2004-08-09 2008-09-18 The Australian National University Solar Cell (Sliver) Sub-Module Formation
JP2006128211A (ja) * 2004-10-26 2006-05-18 Disco Abrasive Syst Ltd ウエーハの分割装置
WO2006079174A1 (en) * 2005-01-27 2006-08-03 Origin Energy Solar Pty Ltd Modular sub-assembly of semiconductor strips
WO2006079865A1 (en) * 2005-01-27 2006-08-03 Infineon Technologies Ag Semiconductor package and method of assembling the same
AU2012200641B2 (en) * 2005-01-27 2012-11-29 Transform Solar Pty Ltd Modular sub-assembly of semiconductor strips
US20060235717A1 (en) * 2005-04-18 2006-10-19 Solaria Corporation Method and system for manufacturing solar panels using an integrated solar cell using a plurality of photovoltaic regions
DE102005018731A1 (de) * 2005-04-22 2006-10-26 Stiftung Caesar"(Center Of Advanced European Studies And Research) Verfahren zur Herstellung freitragender Schichten aus Titan und Nickel
US20070095386A1 (en) * 2005-06-06 2007-05-03 Solaria Corporation Method and system for integrated solar cell using a plurality of photovoltaic regions
JP2008544502A (ja) * 2005-06-17 2008-12-04 ジ・オーストラリアン・ナショナル・ユニバーシティー 太陽電池の相互接続プロセス
US8344238B2 (en) 2005-07-19 2013-01-01 Solyndra Llc Self-cleaning protective coatings for use with photovoltaic cells
US20080178922A1 (en) * 2005-07-26 2008-07-31 Solaria Corporation Method and system for manufacturing solar panels using an integrated solar cell using a plurality of photovoltaic regions
DE102005041877A1 (de) * 2005-09-02 2007-03-08 Koynov, Svetoslav, Dr. Verfahren zur Herstellung siliziumhaltiger Oberflächen und optoelektronische Bauelemente
US20070056626A1 (en) * 2005-09-12 2007-03-15 Solaria Corporation Method and system for assembling a solar cell using a plurality of photovoltaic regions
CA2623382A1 (en) * 2005-09-23 2007-04-05 Tom Rust Systems and methods for manufacturing photovoltaic devices
US7910822B1 (en) 2005-10-17 2011-03-22 Solaria Corporation Fabrication process for photovoltaic cell
US8227688B1 (en) * 2005-10-17 2012-07-24 Solaria Corporation Method and resulting structure for assembling photovoltaic regions onto lead frame members for integration on concentrating elements for solar cells
USD555083S1 (en) 2005-11-08 2007-11-13 Solaria Corporation Solar cell package design
USD558139S1 (en) 2005-11-18 2007-12-25 Solaria Corporation Triangular solar cell design
USD555084S1 (en) 2005-11-18 2007-11-13 Solaria Corporation Circular solar cell package design
USD568238S1 (en) 2005-11-18 2008-05-06 Solaria Corporation Rectangular solar cell package design
USD559174S1 (en) 2005-11-18 2008-01-08 Solaria Corporation Shaped solar cell package design
US20070128875A1 (en) * 2005-12-02 2007-06-07 Jessing Jeffrey R Dry etch release method for micro-electro-mechanical systems (MEMS)
TWM292164U (en) * 2005-12-23 2006-06-11 Inpaq Technology Co Ltd Miniature electronic circuit protection element
US7259322B2 (en) 2006-01-09 2007-08-21 Solyndra, Inc. Interconnects for solar cell devices
CN100576578C (zh) * 2006-04-20 2009-12-30 无锡尚德太阳能电力有限公司 制备太阳电池电极的方法及其电化学沉积装置
AU2007202184A1 (en) * 2006-08-09 2008-02-28 Ian Robert Edmonds Photovoltaic window panel with high viewing transparency
US8084684B2 (en) 2006-10-09 2011-12-27 Solexel, Inc. Three-dimensional thin-film solar cells
US8193076B2 (en) 2006-10-09 2012-06-05 Solexel, Inc. Method for releasing a thin semiconductor substrate from a reusable template
US8035028B2 (en) 2006-10-09 2011-10-11 Solexel, Inc. Pyramidal three-dimensional thin-film solar cells
US8124499B2 (en) * 2006-11-06 2012-02-28 Silicon Genesis Corporation Method and structure for thick layer transfer using a linear accelerator
DE102006057454A1 (de) * 2006-12-06 2008-06-26 Schott Solar Gmbh Photovoltaisches Modul
AU2007346896A1 (en) * 2007-02-15 2008-08-21 Transform Solar Pty Ltd A substrate assembly, an assembly process, and an assembly apparatus
WO2008098278A1 (en) * 2007-02-15 2008-08-21 The Australian National University A method for processing elongate substrates and a substrate securing apparatus
US20080223436A1 (en) * 2007-03-15 2008-09-18 Guardian Industries Corp. Back reflector for use in photovoltaic device
US20100282316A1 (en) * 2007-04-02 2010-11-11 Solaria Corporation Solar Cell Concentrator Structure Including A Plurality of Glass Concentrator Elements With A Notch Design
US7910392B2 (en) * 2007-04-02 2011-03-22 Solaria Corporation Method and system for assembling a solar cell package
US20090056806A1 (en) * 2007-09-05 2009-03-05 Solaria Corporation Solar cell structure including a plurality of concentrator elements with a notch design and predetermined radii and method
US8119902B2 (en) * 2007-05-21 2012-02-21 Solaria Corporation Concentrating module and method of manufacture for photovoltaic strips
WO2009002943A2 (en) 2007-06-22 2008-12-31 Ultradots, Inc. Solar modules with enhanced efficiencies via use of spectral concentrators
USD588534S1 (en) 2007-07-26 2009-03-17 Solaria Corporation Shaped solar cell package
US8707736B2 (en) 2007-08-06 2014-04-29 Solaria Corporation Method and apparatus for manufacturing solar concentrators using glass process
US20090056989A1 (en) * 2007-08-27 2009-03-05 Intel Corporation Printed circuit board and method for preparation thereof
US8513095B1 (en) 2007-09-04 2013-08-20 Solaria Corporation Method and system for separating photovoltaic strips
US8049098B2 (en) * 2007-09-05 2011-11-01 Solaria Corporation Notch structure for concentrating module and method of manufacture using photovoltaic strips
US20110017263A1 (en) * 2007-09-05 2011-01-27 Solaria Corporation Method and device for fabricating a solar cell using an interface pattern for a packaged design
US20090090409A1 (en) * 2007-10-05 2009-04-09 Marlow Industries, Inc. System and Method for Assembling a Microthermoelectric Device
US8664513B2 (en) * 2007-10-12 2014-03-04 OmniPV, Inc. Solar modules with enhanced efficiencies via use of spectral concentrators
GB2453746A (en) * 2007-10-16 2009-04-22 Renewable Energy Corp Asa Parallel interconnection of solar cell units
NL2000999C2 (nl) * 2007-11-13 2009-05-14 Stichting Energie Werkwijze voor het fabriceren van kristallijn silicium zonnecellen met gebruikmaking van co-diffusie van boor en fosfor.
US7910035B2 (en) 2007-12-12 2011-03-22 Solaria Corporation Method and system for manufacturing integrated molded concentrator photovoltaic device
US8674212B2 (en) * 2008-01-15 2014-03-18 General Electric Company Solar cell and magnetically self-assembled solar cell assembly
USD591229S1 (en) 2008-01-24 2009-04-28 Solaria Corporation Shaped solar cell package
TW200949930A (en) * 2008-02-07 2009-12-01 Ibm Method of manufacturing a thin silicon slice
JP2012501550A (ja) 2008-08-27 2012-01-19 アプライド マテリアルズ インコーポレイテッド 印刷誘電体障壁を使用するバックコンタクト太陽電池
JP2012501551A (ja) * 2008-08-27 2012-01-19 アプライド マテリアルズ インコーポレイテッド バックコンタクト式太陽電池モジュール
WO2010036807A1 (en) 2008-09-24 2010-04-01 The Board Of Trustees Of The University Of Illinois Arrays of ultrathin silicon solar microcells
CN102257636A (zh) * 2008-10-23 2011-11-23 奥塔装置公司 具有背侧接点的光伏器件
EP2345088A2 (en) * 2008-10-23 2011-07-20 Alta Devices, Inc. Integration of a photovoltaic device
TWI382551B (zh) * 2008-11-06 2013-01-11 Ind Tech Res Inst 太陽能集光模組
WO2010057060A2 (en) 2008-11-13 2010-05-20 Solexel, Inc. Methods and systems for manufacturing thin-film solar cells
US8288195B2 (en) 2008-11-13 2012-10-16 Solexel, Inc. Method for fabricating a three-dimensional thin-film semiconductor substrate from a template
JP4706759B2 (ja) * 2009-01-23 2011-06-22 トヨタ自動車株式会社 太陽電池
US8774573B2 (en) * 2009-02-20 2014-07-08 OmniPV, Inc. Optical devices including resonant cavity structures
US20100236625A1 (en) * 2009-02-20 2010-09-23 John Kenney Solar Modules Including Spectral Concentrators and Related Manufacturing Methods
US20100224248A1 (en) * 2009-02-20 2010-09-09 John Kenney Solar Modules Including Spectral Concentrators and Related Manufacturing Methods
TW201032339A (en) * 2009-02-20 2010-09-01 Aussmak Optoelectronic Corp Solar cell
US8409911B2 (en) * 2009-02-24 2013-04-02 Sunpower Corporation Methods for metallization of solar cells
US9070804B2 (en) 2009-02-24 2015-06-30 Sunpower Corporation Back contact sliver cells
CN101820015A (zh) * 2009-02-27 2010-09-01 宇威光电股份有限公司 太阳能电池
MY159267A (en) * 2009-03-24 2016-12-30 Solexel Inc Method for fabricating a three-dimensional thin-film semiconductor substrate from a template
US8742545B2 (en) * 2009-04-15 2014-06-03 Sunovel Suzhou Technologies Ltd. Substrate strip plate structure for semiconductor device and method of manufacturing the same
JP2012524386A (ja) * 2009-04-17 2012-10-11 トランスフォーム ソーラー ピーティワイ リミテッド 細長太陽電池及びエッジ接触部
AU2010201980A1 (en) * 2009-05-21 2010-12-09 Suntech Power Co., Ltd. Thin film solar module
JP2010272738A (ja) * 2009-05-22 2010-12-02 Sanyo Electric Co Ltd 太陽電池モジュールの製造方法
JP2011003834A (ja) * 2009-06-22 2011-01-06 Toyota Motor Corp 太陽電池モジュール
CN102473782A (zh) * 2009-06-30 2012-05-23 皮尔金顿集团有限公司 具有反射元件的双面光伏模块及其制作方法
US20110014726A1 (en) 2009-07-20 2011-01-20 Taiwan Semiconductor Manufacturing Company, Ltd. Method of forming shallow trench isolation structure
CN101997026B (zh) * 2009-08-19 2013-06-19 聚日（苏州）科技有限公司 利用衬底进行加工的基板结构及其制造方法
WO2011050367A2 (en) * 2009-10-24 2011-04-28 Photon Energy Systems Manufacturing photovoltaic devices and devices formed
FR2954000B1 (fr) * 2009-12-14 2012-01-06 Commissariat Energie Atomique Dispositif reflecteur pour module photovoltaique a cellules bifaciales
US8148239B2 (en) * 2009-12-23 2012-04-03 Intel Corporation Offset field grid for efficient wafer layout
NL2004065C2 (en) 2010-01-06 2011-07-07 Stichting Energie Solar panel module and method for manufacturing such a solar panel module.
TWI523088B (zh) * 2010-02-11 2016-02-21 校際微電子中心 用於單側粗糙化之方法
US20110253193A1 (en) 2010-04-16 2011-10-20 General Electric Company Deployable solar panel system
WO2011143222A2 (en) * 2010-05-11 2011-11-17 Bakersun Bifacial thin film solar panel and methods for producing the same
US8338210B2 (en) 2010-06-14 2012-12-25 Asm International N.V. Method for processing solar cell substrates
TWI434427B (zh) * 2011-04-08 2014-04-11 Gintech Energy Corp 光伏面板及形成光伏面板之導電通道的方法
JP2014523633A (ja) 2011-05-27 2014-09-11 エムシー１０ インコーポレイテッド 電子的、光学的、且つ／又は機械的装置及びシステム並びにこれらの装置及びシステムを製造する方法
USD699176S1 (en) 2011-06-02 2014-02-11 Solaria Corporation Fastener for solar modules
US20130112274A1 (en) * 2011-11-06 2013-05-09 Qxwave Inc Technique for fabrication of thin solar cells
JP2013143404A (ja) * 2012-01-06 2013-07-22 Mitsubishi Electric Corp シリコン基板のエッチング方法
JP5909671B2 (ja) * 2012-03-27 2016-04-27 パナソニックＩｐマネジメント株式会社 太陽電池の製造方法及び半導体材料からなる基板の製造方法
CN103378199B (zh) * 2012-04-26 2018-11-16 常州亚玛顿股份有限公司 太阳能光热系统
US9171794B2 (en) 2012-10-09 2015-10-27 Mc10, Inc. Embedding thin chips in polymer
US9515217B2 (en) 2012-11-05 2016-12-06 Solexel, Inc. Monolithically isled back contact back junction solar cells
US8679947B1 (en) 2012-11-07 2014-03-25 International Business Machines Corporation Self-formation of high-density defect-free and aligned nanostructures
USD933584S1 (en) 2012-11-08 2021-10-19 Sunpower Corporation Solar panel
USD1009775S1 (en) 2014-10-15 2024-01-02 Maxeon Solar Pte. Ltd. Solar panel
US11538949B2 (en) 2013-02-03 2022-12-27 Mark R. Schroeder Sensor comprising a photovoltaic device
US10872988B1 (en) 2013-02-03 2020-12-22 Mark R. Schroeder Photovoltaic device
JP6323689B2 (ja) * 2013-02-28 2018-05-16 パナソニックＩｐマネジメント株式会社 太陽電池モジュールの製造方法
US9059013B2 (en) 2013-03-21 2015-06-16 International Business Machines Corporation Self-formation of high-density arrays of nanostructures
USD708127S1 (en) * 2014-01-17 2014-07-01 Joe Secard Floating solar heating device
USD933585S1 (en) 2014-10-15 2021-10-19 Sunpower Corporation Solar panel
USD999723S1 (en) 2014-10-15 2023-09-26 Sunpower Corporation Solar panel
USD896747S1 (en) 2014-10-15 2020-09-22 Sunpower Corporation Solar panel
USD913210S1 (en) 2014-10-15 2021-03-16 Sunpower Corporation Solar panel
US10609489B2 (en) 2015-09-10 2020-03-31 Bose Corporation Fabricating an integrated loudspeaker piston and suspension
FR3042346B1 (fr) * 2015-10-08 2018-03-16 Athelios Dispositif optique photovoltaique a filtration plasmonique bifaciale et multirefringence varialble a miroir dichroique concave local
FR3042343B1 (fr) * 2015-10-08 2018-03-16 Athelios Dispositif optique photovoltaique a filtration plasmonique frontale et multirefringence variable arriere et convexe local
FR3042337B1 (fr) * 2015-10-08 2018-03-16 Athelios Dispositif optique photovoltaique a filtration dichroique varialble avec miroir dichroique convexe local
FR3042338B1 (fr) * 2015-10-08 2017-12-08 Athelios Dispositif optique photovoltaique a filtration dichroique variable avec miroir dichroique concave local
FR3042345B1 (fr) * 2015-10-08 2018-02-16 Athelios Dispositif optique photovoltaique a filtration plasmonique bifaciale et multirefringence variable a miroir dichroique convexe local
USD877060S1 (en) * 2016-05-20 2020-03-03 Solaria Corporation Solar module
IT201600118604A1 (it) * 2016-11-23 2018-05-23 Martino Falsini Modulo fotovoltaico
CN109841700A (zh) * 2017-11-28 2019-06-04 苏州赛伍应用技术股份有限公司 一种功能板及具有该功能板的光伏电池组件
CN110034201B (zh) * 2019-03-20 2023-12-01 隆基绿能科技股份有限公司 光伏组件
CN110534616B (zh) * 2019-08-29 2021-12-07 常州时创能源股份有限公司 晶硅电池分片的制备工艺
EP3905341A1 (en) * 2020-04-29 2021-11-03 Meyer Burger AG Improved solar cell string for use in a photovoltaic module
CN111599896B (zh) * 2020-06-08 2022-04-15 东方日升新能源股份有限公司 一种光伏电池片的制备方法、光伏电池片及组件
CN115491650A (zh) * 2021-06-17 2022-12-20 腾讯科技（深圳）有限公司 镀膜方法、芯片基板及芯片
CN118390060A (zh) * 2024-06-27 2024-07-26 艾庞半导体科技(四川)有限公司 一种用于半导体晶片研磨工艺的载体的表面处理方法

Family Cites Families (188)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3278811A (en) * 1960-10-04 1966-10-11 Hayakawa Denki Kogyo Kabushiki Radiation energy transducing device
US3104188A (en) * 1961-01-09 1963-09-17 Giannini Controls Corp Solid state solar generator
US3422527A (en) * 1965-06-21 1969-01-21 Int Rectifier Corp Method of manufacture of high voltage solar cell
GB1186340A (en) * 1968-07-11 1970-04-02 Standard Telephones Cables Ltd Manufacture of Semiconductor Devices
US3690953A (en) * 1970-09-10 1972-09-12 Us Air Force Vertical junction hardened solar cell
JPS495265A (enExample) * 1972-04-28 1974-01-17
US4332973A (en) 1974-11-08 1982-06-01 Sater Bernard L High intensity solar cell
US4409422A (en) 1974-11-08 1983-10-11 Sater Bernard L High intensity solar cell
US4516314A (en) 1974-11-08 1985-05-14 Sater Bernard L Method of making a high intensity solar cell
US3985579A (en) * 1975-11-26 1976-10-12 The United States Of America As Represented By The Secretary Of The Air Force Rib and channel vertical multijunction solar cell
US4082570A (en) * 1976-02-09 1978-04-04 Semicon, Inc. High intensity solar energy converter
US4110122A (en) * 1976-05-26 1978-08-29 Massachusetts Institute Of Technology High-intensity, solid-state-solar cell device
US4038104A (en) * 1976-06-07 1977-07-26 Kabushiki Kaisha Suwa Seikosha Solar battery
DE2639841C3 (de) * 1976-09-03 1980-10-23 Siemens Ag, 1000 Berlin Und 8000 Muenchen Solarzelle und Verfahren zu ihrer Herstellung
JPS5373075U (enExample) 1976-11-18 1978-06-19
US4133698A (en) * 1977-12-27 1979-01-09 Texas Instruments Incorporated Tandem junction solar cell
JPS5810873Y2 (ja) 1978-01-13 1983-02-28 新日軽住宅建材株式会社 雨戸枠一体外付サッシ
US4153476A (en) * 1978-03-29 1979-05-08 Nasa Double-sided solar cell package
US4283589A (en) * 1978-05-01 1981-08-11 Massachusetts Institute Of Technology High-intensity, solid-state solar cell
US4278473A (en) 1979-08-24 1981-07-14 Varian Associates, Inc. Monolithic series-connected solar cell
US4352948A (en) * 1979-09-07 1982-10-05 Massachusetts Institute Of Technology High-intensity solid-state solar-cell device
US4444992A (en) * 1980-11-12 1984-04-24 Massachusetts Institute Of Technology Photovoltaic-thermal collectors
DE3047383A1 (de) * 1980-12-16 1982-07-15 Siemens AG, 1000 Berlin und 8000 München Solarzelle mit erhoehtem wirkungsgrad
US4527183A (en) 1981-07-10 1985-07-02 General Electric Company Drilled, diffused radiation detector
JPS5810873A (ja) * 1981-07-14 1983-01-21 Nec Corp 受光ダイオ−ド
US4407695A (en) 1981-12-31 1983-10-04 Exxon Research And Engineering Co. Natural lithographic fabrication of microstructures over large areas
JPS58150613A (ja) 1982-03-03 1983-09-07 Kensetsu Kikaku Consultant:Kk 地盤の現場直接せん断試験方法とその装置
US4409423A (en) * 1982-03-09 1983-10-11 The United States Of America As Represented By The Secretary Of The Air Force Hole matrix vertical junction solar cell
US4554727A (en) 1982-08-04 1985-11-26 Exxon Research & Engineering Company Method for making optically enhanced thin film photovoltaic device using lithography defined random surfaces
US4633031A (en) * 1982-09-24 1986-12-30 Todorof William J Multi-layer thin film, flexible silicon alloy photovoltaic cell
JPS5959883U (ja) 1982-10-15 1984-04-19 飛田　隆 昆虫捕獲網
JPS59123283U (ja) 1983-02-08 1984-08-20 株式会社吉田金属製作所 温冷蔵共用器
JPS59123279U (ja) 1983-02-09 1984-08-20 オリオン機械株式会社 気体冷却装置の除霜装置
US4550047A (en) * 1983-06-06 1985-10-29 International Business Machines Corporation Silicon source component for use in molecular beam epitaxial growth apparatus
JPS59227168A (ja) * 1983-06-08 1984-12-20 Fuji Electric Corp Res & Dev Ltd 半導体放射線検出器
US4626613A (en) 1983-12-23 1986-12-02 Unisearch Limited Laser grooved solar cell
JPS60182757A (ja) * 1984-02-29 1985-09-18 Kanegafuchi Chem Ind Co Ltd 集積型太陽電池
GB8417303D0 (en) * 1984-07-06 1984-08-08 Secr Defence Infra-red detector
JPS61108176A (ja) 1984-11-01 1986-05-26 Fuji Electric Co Ltd 粗面化方法
JPS61108176U (enExample) 1984-12-19 1986-07-09
DE3504705A1 (de) * 1985-02-12 1986-08-14 Siemens AG, 1000 Berlin und 8000 München Aperturblende mit zellenfoermiger mehrlochstruktur und austastelektroden zur erzeugung einer mehrzahl von individuell austastbaren korpuskularstrahlsonden fuer ein lithografiegeraet
JPS625671A (ja) * 1985-07-02 1987-01-12 Sanyo Electric Co Ltd 光起電力装置の製造方法
JPS6254927U (enExample) 1985-09-24 1987-04-06
JPH0753782B2 (ja) * 1985-12-23 1995-06-07 株式会社ブリヂストン 透明膜および該膜を有する積層物
US4816324A (en) * 1986-05-14 1989-03-28 Atlantic Richfield Company Flexible photovoltaic device
US4805006A (en) * 1987-03-25 1989-02-14 Matsushita Electric Works, Ltd. Light receiving element
US4892592A (en) 1987-03-26 1990-01-09 Solarex Corporation Thin film semiconductor solar cell array and method of making
JPS63295500A (ja) * 1987-05-27 1988-12-01 Shin Etsu Chem Co Ltd タンタル酸リチウム単結晶ウエ−ハの製造方法
US4773944A (en) * 1987-09-08 1988-09-27 Energy Conversion Devices, Inc. Large area, low voltage, high current photovoltaic modules and method of fabricating same
DE3803769A1 (de) 1988-02-08 1989-08-17 Siemens Ag Verfahren zum herstellen von duennen, bandfoermigen siliziumkristallen mit ebener oberflaeche, geeignet fuer die solarzellenfertigung
US4883561A (en) 1988-03-29 1989-11-28 Bell Communications Research, Inc. Lift-off and subsequent bonding of epitaxial films
JPH01257371A (ja) 1988-04-06 1989-10-13 Fujitsu Ltd 半導体装置の製造方法
US4989059A (en) 1988-05-13 1991-01-29 Mobil Solar Energy Corporation Solar cell with trench through pn junction
US5082791A (en) 1988-05-13 1992-01-21 Mobil Solar Energy Corporation Method of fabricating solar cells
US4883589A (en) * 1988-05-17 1989-11-28 New Jersey Institute Of Technology System for removing contaminants from ground water
US5081049A (en) 1988-07-18 1992-01-14 Unisearch Limited Sculpted solar cell surfaces
JPH062927B2 (ja) 1989-02-20 1994-01-12 住友金属工業株式会社 耐食、耐酸化性に優れた高強度低合金鋼
US5209118A (en) * 1989-04-07 1993-05-11 Ic Sensors Semiconductor transducer or actuator utilizing corrugated supports
US5389158A (en) * 1989-04-17 1995-02-14 The Boeing Company Low bandgap photovoltaic cell with inherent bypass diode
US5116464A (en) * 1989-06-02 1992-05-26 Massachusetts Institute Of Technology Cesium hydroxide etch of a semiconductor crystal
US5011544A (en) * 1989-09-08 1991-04-30 Solarex Corporation Solar panel with interconnects and masking structure, and method
JPH03276682A (ja) 1990-03-26 1991-12-06 Sharp Corp 半導体装置
US5073230A (en) 1990-04-17 1991-12-17 Arizona Board Of Regents Acting On Behalf Of Arizona State University Means and methods of lifting and relocating an epitaxial device layer
DK170189B1 (da) * 1990-05-30 1995-06-06 Yakov Safir Fremgangsmåde til fremstilling af halvlederkomponenter, samt solcelle fremstillet deraf
US5067985A (en) 1990-06-08 1991-11-26 The United States Of America As Represented By The Secretary Of The Air Force Back-contact vertical-junction solar cell and method
KR930008580B1 (ko) * 1990-06-22 1993-09-09 현대전자산업 주식회사 표면적이 극대화된 실리콘층 및 그 제조방법
DE4021541C1 (enExample) 1990-07-06 1991-12-19 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De
US5136346A (en) * 1990-09-07 1992-08-04 Motorola, Inc. Photon stimulated variable capacitance effect devices
US5098482A (en) * 1990-11-07 1992-03-24 Solarex Corporation Vertical junction solar cell
US5139974A (en) * 1991-01-25 1992-08-18 Micron Technology, Inc. Semiconductor manufacturing process for decreasing the optical refelctivity of a metal layer
DE69228079T2 (de) * 1991-02-21 1999-09-16 Angewandte Solarenergie - Ase Gmbh Photovoltaische Vorrichtung und Solarmodul mit teilweiser Durchsichtigkeit, und Herstellungsmethode
KR920018987A (ko) * 1991-03-23 1992-10-22 김광호 캐패시터의 제조방법
US5105430A (en) * 1991-04-09 1992-04-14 The United States Of America As Represented By The United States Department Of Energy Thin planar package for cooling an array of edge-emitting laser diodes
JP2837296B2 (ja) * 1991-10-17 1998-12-14 シャープ株式会社 太陽電池
JPH05236980A (ja) * 1991-12-17 1993-09-17 Sankyo Co Ltd トランス−４−ヒドロキシ−ｌ−プロリンの製造法
DE4202455C1 (enExample) 1992-01-29 1993-08-19 Siemens Ag, 8000 Muenchen, De
US5266125A (en) * 1992-05-12 1993-11-30 Astropower, Inc. Interconnected silicon film solar cell array
US5447576A (en) * 1992-08-03 1995-09-05 Siemens Solar Industries International, Inc. Composition and method for encapsulating a solar cell which minimizes thermal discoloration
US5367217A (en) * 1992-11-18 1994-11-22 Alliedsignal Inc. Four bar resonating force transducer
JPH06213554A (ja) 1993-01-14 1994-08-02 Fuji Electric Co Ltd 冷気循環式オープンショーケース
DE4310206C2 (de) 1993-03-29 1995-03-09 Siemens Ag Verfahren zur Herstellung einer Solarzelle aus einer Substratscheibe
US5344517A (en) 1993-04-22 1994-09-06 Bandgap Technology Corporation Method for lift-off of epitaxial layers and applications thereof
US5581346A (en) * 1993-05-10 1996-12-03 Midwest Research Institute System for characterizing semiconductor materials and photovoltaic device
US5416821A (en) * 1993-05-10 1995-05-16 Trw Inc. Grid formed with a silicon substrate
US5538902A (en) * 1993-06-29 1996-07-23 Sanyo Electric Co., Ltd. Method of fabricating a photovoltaic device having a three-dimensional shape
US5391236A (en) 1993-07-30 1995-02-21 Spectrolab, Inc. Photovoltaic microarray structure and fabrication method
US5470761A (en) * 1993-09-13 1995-11-28 Westinghouse Electric Corporation Process for fabricating a front surface resonant mesh array detector
JPH07188947A (ja) 1993-12-27 1995-07-25 Sumitomo Metal Mining Co Ltd 表面粗化方法
KR970002140B1 (ko) * 1993-12-27 1997-02-24 엘지반도체 주식회사 반도체 소자, 패키지 방법, 및 리드테이프
US5478402A (en) * 1994-02-17 1995-12-26 Ase Americas, Inc. Solar cell modules and method of making same
JP3032422B2 (ja) * 1994-04-28 2000-04-17 シャープ株式会社 太陽電池セルとその製造方法
JPH07302890A (ja) 1994-05-09 1995-11-14 Omron Corp 受光素子並びに当該受光素子を用いた光結合器及び光絶縁型固体リレー
US5466302A (en) * 1994-05-09 1995-11-14 Regents Of The University Of California Solar cell array interconnects
US5474620A (en) * 1994-05-16 1995-12-12 United Solar Systems Corporation Cut resistant laminate for the light incident surface of a photovoltaic module
EP0718873A3 (en) * 1994-12-21 1998-04-15 MEMC Electronic Materials, Inc. Cleaning process for hydrophobic silicon wafers
US5538563A (en) * 1995-02-03 1996-07-23 Finkl; Anthony W. Solar energy concentrator apparatus for bifacial photovoltaic cells
US5641381A (en) 1995-03-27 1997-06-24 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Preferentially etched epitaxial liftoff of InP material
JPH08274371A (ja) * 1995-03-31 1996-10-18 Toyoda Gosei Co Ltd 半導体発光素子及びその製造方法
DE59611314D1 (de) * 1995-05-19 2006-01-26 Heidenhain Gmbh Dr Johannes Strahlungsempfindliches detektorelement
US6066516A (en) * 1995-06-26 2000-05-23 Seiko Epson Corporation Method for forming crystalline semiconductor layers, a method for fabricating thin film transistors, and method for fabricating solar cells and active matrix liquid crystal devices
JP2915327B2 (ja) * 1995-07-19 1999-07-05 キヤノン株式会社 太陽電池モジュール及びその製造方法
US5567248A (en) * 1995-09-05 1996-10-22 Chung; Darius Modular solar cell contact arrangement
US6069313A (en) * 1995-10-31 2000-05-30 Ecole Polytechnique Federale De Lausanne Battery of photovoltaic cells and process for manufacturing same
US5851928A (en) * 1995-11-27 1998-12-22 Motorola, Inc. Method of etching a semiconductor substrate
US5733382A (en) * 1995-12-18 1998-03-31 Hanoka; Jack I. Solar cell modules and method of making same
JP3578539B2 (ja) 1996-02-08 2004-10-20 三菱電機株式会社 太陽電池の製造方法および太陽電池構造
US5904546A (en) * 1996-02-12 1999-05-18 Micron Technology, Inc. Method and apparatus for dicing semiconductor wafers
US5895530A (en) * 1996-02-26 1999-04-20 Applied Materials, Inc. Method and apparatus for directing fluid through a semiconductor processing chamber
US6107161A (en) * 1996-06-07 2000-08-22 Rohm Co., Ltd. Semiconductor chip and a method for manufacturing thereof
US5841179A (en) * 1996-08-28 1998-11-24 Advanced Micro Devices, Inc. Conductive layer with anti-reflective surface portion
US5773791A (en) 1996-09-03 1998-06-30 Kuykendal; Robert Water laser machine tool
US6162658A (en) * 1996-10-14 2000-12-19 Unisearch Limited Metallization of buried contact solar cells
US6091021A (en) * 1996-11-01 2000-07-18 Sandia Corporation Silicon cells made by self-aligned selective-emitter plasma-etchback process
US5904548A (en) * 1996-11-21 1999-05-18 Texas Instruments Incorporated Trench scribe line for decreased chip spacing
DE59712371D1 (de) 1996-11-22 2005-08-25 Infineon Technologies Ag Verfahren zur herstellung mikromechanischer funktionselemente
US5909458A (en) * 1996-11-27 1999-06-01 The Regents Of The University Of California Low-cost laser diode array
DE19650111B4 (de) 1996-12-03 2004-07-01 Siemens Solar Gmbh Solarzelle mit geringer Abschattung und Verfahren zur Herstellung
JP3918216B2 (ja) * 1997-01-08 2007-05-23 住友金属鉱山株式会社 単結晶の切断装置と方法
AUPO468697A0 (en) 1997-01-21 1997-02-13 Australian National University, The A method of producing thin silicon epitaxial films
JP3436858B2 (ja) 1997-02-27 2003-08-18 シャープ株式会社 薄膜太陽電池の製造方法
DE19710375C2 (de) * 1997-03-13 2002-11-07 Micronas Semiconductor Holding Verfahren zum Herstellen von räumlich strukturierten Bauteilen
JP3772456B2 (ja) * 1997-04-23 2006-05-10 三菱電機株式会社 太陽電池及びその製造方法、半導体製造装置
JP3468670B2 (ja) * 1997-04-28 2003-11-17 シャープ株式会社 太陽電池セルおよびその製造方法
US6180869B1 (en) * 1997-05-06 2001-01-30 Ebara Solar, Inc. Method and apparatus for self-doping negative and positive electrodes for silicon solar cells and other devices
WO1998050604A1 (en) * 1997-05-08 1998-11-12 Nanosystems, Inc. Silicon etching process for making microchannel plates
US6245161B1 (en) 1997-05-12 2001-06-12 Silicon Genesis Corporation Economical silicon-on-silicon hybrid wafer assembly
JP3805889B2 (ja) * 1997-06-20 2006-08-09 株式会社カネカ 太陽電池モジュールおよびその製造方法
US5930644A (en) * 1997-07-23 1999-07-27 Taiwan Semiconductor Manufacturing Co., Ltd. Method of forming a shallow trench isolation using oxide slope etching
US6008449A (en) 1997-08-19 1999-12-28 Cole; Eric D. Reflective concentrating solar cell assembly
JPH1168131A (ja) 1997-08-25 1999-03-09 Citizen Watch Co Ltd 太陽電池の製造方法
JP3205718B2 (ja) * 1997-08-29 2001-09-04 株式会社スーパーシリコン研究所 ワイヤソー切断方法及び装置
JPH1190923A (ja) * 1997-09-19 1999-04-06 Hitachi Cable Ltd マルチワイヤソーによる切断方法
DE19741832A1 (de) 1997-09-23 1999-03-25 Inst Solarenergieforschung Verfahren zur Herstellung einer Solarzelle und Solarzelle
US6320116B1 (en) * 1997-09-26 2001-11-20 Evergreen Solar, Inc. Methods for improving polymeric materials for use in solar cell applications
JP3618973B2 (ja) * 1997-10-01 2005-02-09 キヤノン株式会社 半導体装置及び光検出装置の製造方法
US5904584A (en) * 1997-10-28 1999-05-18 General Motors Corporation Slide assisted grommet assembly
US6005276A (en) * 1997-11-12 1999-12-21 Advanced Photonix, Inc. Solid state photodetector with light-responsive rear face
JPH11163284A (ja) 1997-12-01 1999-06-18 Matsushita Electron Corp 半導体記憶装置の製造方法
US6455873B1 (en) * 1997-12-03 2002-09-24 State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of The University Of Oregon Devices having a semiconductor/conducting polymer interface
US5972732A (en) * 1997-12-19 1999-10-26 Sandia Corporation Method of monolithic module assembly
JPH11186572A (ja) * 1997-12-22 1999-07-09 Canon Inc 光起電力素子モジュール
US6074514A (en) * 1998-02-09 2000-06-13 Applied Materials, Inc. High selectivity etch using an external plasma discharge
JPH11236689A (ja) 1998-02-25 1999-08-31 Babcock Hitachi Kk 発電プラントの水処理装置および水処理方法
JP3174549B2 (ja) * 1998-02-26 2001-06-11 株式会社日立製作所 太陽光発電装置及び太陽光発電モジュール並びに太陽光発電システムの設置方法
US6166318A (en) 1998-03-03 2000-12-26 Interface Studies, Inc. Single absorber layer radiated energy conversion device
DE59915079D1 (de) * 1998-03-13 2009-10-22 Willeke Gerhard Solarzellenanordnung und verfahren zur herstellung einer solarzellenanordnung
US6265741B1 (en) * 1998-04-06 2001-07-24 Siemens Aktiengesellschaft Trench capacitor with epi buried layer
US6156967A (en) * 1998-06-04 2000-12-05 Tecstar Power Systems, Inc. Modular glass covered solar cell array
US5994641A (en) * 1998-04-24 1999-11-30 Ase Americas, Inc. Solar module having reflector between cells
JPH11312815A (ja) 1998-04-28 1999-11-09 Matsushita Electric Ind Co Ltd 薄膜太陽電池の製造方法
JPH11312816A (ja) * 1998-04-30 1999-11-09 Kanegafuchi Chem Ind Co Ltd 集積型薄膜太陽電池モジュール
JP2000036609A (ja) * 1998-05-15 2000-02-02 Canon Inc 太陽電池の製造方法と薄膜半導体の製造方法、薄膜半導体の分離方法及び半導体形成方法
DE69943141D1 (de) * 1998-05-20 2011-03-03 Canon Kk Photovoltaische Leistungserzeugungsvorrichtung
US6110793A (en) * 1998-06-24 2000-08-29 Taiwan Semiconductor Manufacturing Company Method for making a trench isolation having a conformal liner oxide and top and bottom rounded corners for integrated circuits
JP2000022185A (ja) * 1998-07-03 2000-01-21 Sharp Corp 太陽電池セル及びその製造方法
US6156620A (en) * 1998-07-22 2000-12-05 Lsi Logic Corporation Isolation trench in semiconductor substrate with nitrogen-containing barrier region, and process for forming same
KR100277695B1 (ko) * 1998-09-12 2001-02-01 정선종 에스 오 아이 광도파로를 이용한 하이브리드 광집적회로용 기판 제조방법
JP2000101111A (ja) 1998-09-17 2000-04-07 Sharp Corp 太陽電池の製造方法
JP3259692B2 (ja) * 1998-09-18 2002-02-25 株式会社日立製作所 集光型太陽光発電モジュール及びその製造方法並びに集光型太陽光発電システム
DE19849902A1 (de) * 1998-10-29 2000-05-11 Roland Sittig Halbleiterbauelement
US6126311A (en) * 1998-11-02 2000-10-03 Claud S. Gordon Company Dew point sensor using mems
AUPP699798A0 (en) * 1998-11-06 1998-12-03 Pacific Solar Pty Limited Thin films with light trapping
US6265653B1 (en) * 1998-12-10 2001-07-24 The Regents Of The University Of California High voltage photovoltaic power converter
US6262358B1 (en) * 1999-02-18 2001-07-17 Sharp Kabushiki Kaisha Solar cell module and solar cell panel using the same
DE60044384D1 (de) * 1999-02-25 2010-06-24 Kaneka Corp Photoelektrische Dünnschicht-Umwandlungsvorrichtung und Verfahren zur Abscheidung durch Zerstäubung
JP2000261008A (ja) 1999-03-10 2000-09-22 Mitsubishi Electric Corp 太陽電池用シリコン基板の粗面化方法
JP4017281B2 (ja) 1999-03-23 2007-12-05 三洋電機株式会社 太陽電池及びその製造方法
US6140603A (en) 1999-03-31 2000-10-31 Taiwan Semiconductor Manufacturing Co., Ltd Micro-cleavage method for specimen preparation
JP2000294813A (ja) 1999-04-07 2000-10-20 Bridgestone Corp 太陽電池用バックカバー材及び太陽電池
WO2000063976A1 (en) * 1999-04-15 2000-10-26 Coroy Trenton G Photodiodes with photoconductive gain enhancement
US6406636B1 (en) 1999-06-02 2002-06-18 Megasense, Inc. Methods for wafer to wafer bonding using microstructures
JP3368876B2 (ja) * 1999-11-05 2003-01-20 株式会社東京精密 半導体チップ製造方法
JP2001148500A (ja) * 1999-11-22 2001-05-29 Sanyo Electric Co Ltd 太陽電池モジュール
JP4441102B2 (ja) * 1999-11-22 2010-03-31 キヤノン株式会社 光起電力素子及びその製造方法
KR100348177B1 (ko) * 2000-01-13 2002-08-09 조동일 단결정 실리콘의 마이크로머시닝 기법에서의 깊은 트렌치절연막을 이용한 절연 방법
JP2001257371A (ja) 2000-03-13 2001-09-21 Hitachi Ltd 太陽電池作製方法及び太陽電池並びに集光型太陽電池モジュール
DE10020541A1 (de) * 2000-04-27 2001-11-08 Univ Konstanz Verfahren zur Herstellung einer Solarzelle und Solarzelle
JP2001332529A (ja) 2000-05-19 2001-11-30 Daido Steel Co Ltd 単結晶半導体基板の表面処理方法、および単結晶半導体基板の電極層形成方法
US6553729B1 (en) * 2000-06-09 2003-04-29 United Solar Systems Corporation Self-adhesive photovoltaic module
DE10031252A1 (de) * 2000-06-27 2002-01-10 Bosch Gmbh Robert Verfahren zur Zertrennung eines Substratwafers in eine Anzahl von Substratchips
AUPR174800A0 (en) 2000-11-29 2000-12-21 Australian National University, The Semiconductor processing
US6649287B2 (en) * 2000-12-14 2003-11-18 Nitronex Corporation Gallium nitride materials and methods
KR100378016B1 (ko) * 2001-01-03 2003-03-29 삼성에스디아이 주식회사 태양 전지용 반도체 기판의 텍스처링 방법
US6515217B1 (en) * 2001-09-11 2003-02-04 Eric Aylaian Solar cell having a three-dimensional array of photovoltaic cells enclosed within an enclosure having reflective surfaces
CA2467112C (en) * 2001-11-29 2010-07-27 Origin Energy Solar Pty Ltd Semiconductor texturing process
US7169669B2 (en) 2001-12-04 2007-01-30 Origin Energy Solar Pty. Ltd. Method of making thin silicon sheets for solar cells
AU2003902270A0 (en) * 2003-05-09 2003-05-29 Origin Energy Solar Pty Ltd Separating and assembling semiconductor strips
US20070277810A1 (en) * 2004-01-23 2007-12-06 Origin Energy Solar Pty Ltd Solar Panel

Also Published As

Publication number Publication date
CA2727658A1 (en) 2002-06-06
US7875794B2 (en) 2011-01-25
AU2034802A (en) 2002-06-11
CA2727641A1 (en) 2002-06-06
US7595543B2 (en) 2009-09-29
EP1575087B1 (en) 2017-08-30
CA2432300C (en) 2011-04-19
US9583668B2 (en) 2017-02-28
CN101286449B (zh) 2011-07-06
CN101299410B (zh) 2012-08-15
CA2728973A1 (en) 2002-06-06
EP1342259A1 (en) 2003-09-10
US20040097012A1 (en) 2004-05-20
EP2273556A2 (en) 2011-01-12
CA2432300A1 (en) 2002-06-06
AUPR174800A0 (en) 2000-12-21
US20050272225A1 (en) 2005-12-08
KR101081478B1 (ko) 2011-11-09
EP2267789A3 (en) 2012-03-28
ZA200304155B (en) 2005-02-23
JP2004526298A (ja) 2004-08-26
KR100883997B1 (ko) 2009-02-17
US20100258161A1 (en) 2010-10-14
IL162190A (en) 2010-12-30
EP1342259A4 (en) 2006-04-05
CN100394553C (zh) 2008-06-11
AU2009251067B2 (en) 2012-06-07
KR20080022218A (ko) 2008-03-10
EP2267790A3 (en) 2012-03-28
WO2002045143A1 (en) 2002-06-06
AU2009251067A1 (en) 2010-01-21
KR20030062416A (ko) 2003-07-25
EP2267789A2 (en) 2010-12-29
AU2002220348B2 (en) 2007-07-19
JP4416399B2 (ja) 2010-02-17
CN101286449A (zh) 2008-10-15
EP1575087A2 (en) 2005-09-14
EP1575087A3 (en) 2006-01-18
CN101373713A (zh) 2009-02-25
CN101373713B (zh) 2015-08-19
CN101299410A (zh) 2008-11-05
CN1592952A (zh) 2005-03-09
IL156166A0 (en) 2003-12-23
MY142148A (en) 2010-09-30
EP2267790A2 (en) 2010-12-29
EP2273556A3 (en) 2012-03-28
US20100269899A1 (en) 2010-10-28
US20100267218A1 (en) 2010-10-21
KR20080021812A (ko) 2008-03-07

Similar Documents

Publication Publication Date Title
KR101081477B1 (ko) 태양 전지의 제조를 위한 반도체 제조물
AU2002220348A1 (en) Semiconductor wafer processing to increase the usable planar surface area
US6084175A (en) Front contact trenches for polycrystalline photovoltaic devices and semi-conductor devices with buried contacts
JP2004526298A5 (enExample)
JP4467337B2 (ja) 太陽電池モジュール
AU2009251069A1 (en) Process for decreasing the reflectivity of a semiconductor material
AU2013201557A1 (en) Process for decreasing the reflectivity of a semiconductor material
AU729342B2 (en) Front contact trenches for polycrystalline photovoltaic devices and semi-conductor devices with buried contacts
CN100490186C (zh) 改进的光生伏打电池及其生产

Legal Events

Date Code Title Description
A107 Divisional application of patent
PA0104 Divisional application for international application

St.27 status event code: A-0-1-A10-A16-div-PA0104

St.27 status event code: A-0-1-A10-A18-div-PA0104

A201 Request for examination
PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

AMND Amendment
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

E90F Notification of reason for final refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

AMND Amendment
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E90F Notification of reason for final refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

AMND Amendment
E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

E601 Decision to refuse application
E801 Decision on dismissal of amendment
PE0601 Decision on rejection of patent

St.27 status event code: N-2-6-B10-B15-exm-PE0601

PE0801 Dismissal of amendment

St.27 status event code: A-2-2-P10-P12-nap-PE0801

J201 Request for trial against refusal decision
PJ0201 Trial against decision of rejection

St.27 status event code: A-3-3-V10-V11-apl-PJ0201

AMND Amendment
E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PB0901 Examination by re-examination before a trial

St.27 status event code: A-6-3-E10-E12-rex-PB0901

E90F Notification of reason for final refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

B701 Decision to grant
PB0701 Decision of registration after re-examination before a trial

St.27 status event code: A-3-4-F10-F13-rex-PB0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

Fee payment year number: 1

St.27 status event code: A-2-2-U10-U12-oth-PR1002

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

FPAY Annual fee payment

Payment date: 20141023

Year of fee payment: 4

PR1001 Payment of annual fee

Fee payment year number: 4

St.27 status event code: A-4-4-U10-U11-oth-PR1001

PN2301 Change of applicant

St.27 status event code: A-5-5-R10-R11-asn-PN2301

PN2301 Change of applicant

St.27 status event code: A-5-5-R10-R14-asn-PN2301

FPAY Annual fee payment

Payment date: 20151016

Year of fee payment: 5

PR1001 Payment of annual fee

Fee payment year number: 5

St.27 status event code: A-4-4-U10-U11-oth-PR1001

FPAY Annual fee payment

Payment date: 20161019

Year of fee payment: 6

PR1001 Payment of annual fee

Fee payment year number: 6

St.27 status event code: A-4-4-U10-U11-oth-PR1001

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee

Not in force date: 20171103

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

St.27 status event code: A-4-4-U10-U13-oth-PC1903

PC1903 Unpaid annual fee

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20171103

St.27 status event code: N-4-6-H10-H13-oth-PC1903

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000