KR100968990B1 - 플라즈마 처리 장치 및 플라즈마 처리 방법 - Google Patents

플라즈마 처리 장치 및 플라즈마 처리 방법 Download PDF

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Publication number
KR100968990B1
KR100968990B1 KR1020060130066A KR20060130066A KR100968990B1 KR 100968990 B1 KR100968990 B1 KR 100968990B1 KR 1020060130066 A KR1020060130066 A KR 1020060130066A KR 20060130066 A KR20060130066 A KR 20060130066A KR 100968990 B1 KR100968990 B1 KR 100968990B1
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South Korea
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gas
plasma
processing
injection
processing apparatus
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KR20070076415A (ko
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다카히로 호리구치
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도쿄엘렉트론가부시키가이샤
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H01J37/32229—Waveguides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32522—Temperature

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
KR1020060130066A 2006-01-18 2006-12-19 플라즈마 처리 장치 및 플라즈마 처리 방법 Expired - Fee Related KR100968990B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006010131A JP5068458B2 (ja) 2006-01-18 2006-01-18 プラズマ処理装置およびプラズマ処理方法
JPJP-P-2006-00010131 2006-01-18

Related Child Applications (1)

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KR1020090018999A Division KR20090033852A (ko) 2006-01-18 2009-03-05 플라즈마 처리 장치 및 플라즈마 처리 방법

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KR20070076415A KR20070076415A (ko) 2007-07-24
KR100968990B1 true KR100968990B1 (ko) 2010-07-09

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KR1020060130066A Expired - Fee Related KR100968990B1 (ko) 2006-01-18 2006-12-19 플라즈마 처리 장치 및 플라즈마 처리 방법
KR1020090018999A Withdrawn KR20090033852A (ko) 2006-01-18 2009-03-05 플라즈마 처리 장치 및 플라즈마 처리 방법

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US (1) US7655111B2 (enExample)
JP (1) JP5068458B2 (enExample)
KR (2) KR100968990B1 (enExample)
CN (1) CN100530530C (enExample)
TW (1) TW200733201A (enExample)

Families Citing this family (340)

* Cited by examiner, † Cited by third party
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TW200733201A (en) 2007-09-01
KR20090033852A (ko) 2009-04-06
KR20070076415A (ko) 2007-07-24
US20070163996A1 (en) 2007-07-19
JP5068458B2 (ja) 2012-11-07
US7655111B2 (en) 2010-02-02
CN100530530C (zh) 2009-08-19
CN101005007A (zh) 2007-07-25

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