KR100615019B1 - 반도체 패키지, 멀티칩 모듈 및 그 제조방법 - Google Patents

반도체 패키지, 멀티칩 모듈 및 그 제조방법 Download PDF

Info

Publication number
KR100615019B1
KR100615019B1 KR1020000002003A KR20000002003A KR100615019B1 KR 100615019 B1 KR100615019 B1 KR 100615019B1 KR 1020000002003 A KR1020000002003 A KR 1020000002003A KR 20000002003 A KR20000002003 A KR 20000002003A KR 100615019 B1 KR100615019 B1 KR 100615019B1
Authority
KR
South Korea
Prior art keywords
insulating substrate
wiring layer
semiconductor chip
substrate
bonding pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020000002003A
Other languages
English (en)
Korean (ko)
Other versions
KR20000053511A (ko
Inventor
아사다준이치
Original Assignee
가부시끼가이샤 도시바
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시끼가이샤 도시바 filed Critical 가부시끼가이샤 도시바
Publication of KR20000053511A publication Critical patent/KR20000053511A/ko
Application granted granted Critical
Publication of KR100615019B1 publication Critical patent/KR100615019B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • H10P72/7402
    • H10W72/30
    • H10W74/012
    • H10W74/111
    • H10W74/15
    • H10W90/00
    • H10P72/7416
    • H10W46/601
    • H10W70/60
    • H10W72/073
    • H10W72/856
    • H10W72/90
    • H10W72/9415
    • H10W90/722
    • H10W90/724
    • H10W90/734

Landscapes

  • Wire Bonding (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
KR1020000002003A 1999-01-18 2000-01-17 반도체 패키지, 멀티칩 모듈 및 그 제조방법 Expired - Fee Related KR100615019B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1999-9763 1999-01-18
JP11009763A JP2000208698A (ja) 1999-01-18 1999-01-18 半導体装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR10-2003-0020119A Division KR100507300B1 (ko) 1999-01-18 2003-03-31 멀티칩 모듈 및 그 제조방법

Publications (2)

Publication Number Publication Date
KR20000053511A KR20000053511A (ko) 2000-08-25
KR100615019B1 true KR100615019B1 (ko) 2006-08-25

Family

ID=11729322

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020000002003A Expired - Fee Related KR100615019B1 (ko) 1999-01-18 2000-01-17 반도체 패키지, 멀티칩 모듈 및 그 제조방법
KR10-2003-0020119A Expired - Fee Related KR100507300B1 (ko) 1999-01-18 2003-03-31 멀티칩 모듈 및 그 제조방법

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR10-2003-0020119A Expired - Fee Related KR100507300B1 (ko) 1999-01-18 2003-03-31 멀티칩 모듈 및 그 제조방법

Country Status (3)

Country Link
US (2) US6239496B1 (cg-RX-API-DMAC10.html)
JP (1) JP2000208698A (cg-RX-API-DMAC10.html)
KR (2) KR100615019B1 (cg-RX-API-DMAC10.html)

Families Citing this family (187)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6492719B2 (en) * 1999-07-30 2002-12-10 Hitachi, Ltd. Semiconductor device
TW472330B (en) * 1999-08-26 2002-01-11 Toshiba Corp Semiconductor device and the manufacturing method thereof
JP2001077501A (ja) * 1999-09-03 2001-03-23 Seiko Epson Corp フレキシブル配線基板、電気光学装置および電子機器
US6608258B1 (en) 1999-11-18 2003-08-19 Nortel Networks Limited High data rate coaxial interconnect technology between printed wiring boards
JP2001185566A (ja) * 1999-12-22 2001-07-06 Nec Corp 液状樹脂による樹脂封止装置及び樹脂封止方法
JP2001185578A (ja) 1999-12-24 2001-07-06 Toshiba Corp 半導体装置
JP4251421B2 (ja) * 2000-01-13 2009-04-08 新光電気工業株式会社 半導体装置の製造方法
US6528870B2 (en) * 2000-01-28 2003-03-04 Kabushiki Kaisha Toshiba Semiconductor device having a plurality of stacked wiring boards
KR100335717B1 (ko) * 2000-02-18 2002-05-08 윤종용 고용량 메모리 카드
JP2001257307A (ja) * 2000-03-09 2001-09-21 Sharp Corp 半導体装置
US6900534B2 (en) * 2000-03-16 2005-05-31 Texas Instruments Incorporated Direct attach chip scale package
JP2002009236A (ja) * 2000-06-21 2002-01-11 Shinko Electric Ind Co Ltd 多層半導体装置及びその製造方法
JP2002026242A (ja) * 2000-07-10 2002-01-25 Shinko Electric Ind Co Ltd 半導体装置
EP1318546A4 (en) * 2000-07-19 2007-08-08 Shindo Company Ltd SEMICONDUCTOR COMPONENT
US6472758B1 (en) * 2000-07-20 2002-10-29 Amkor Technology, Inc. Semiconductor package including stacked semiconductor dies and bond wires
JP4361670B2 (ja) * 2000-08-02 2009-11-11 富士通マイクロエレクトロニクス株式会社 半導体素子積層体、半導体素子積層体の製造方法、及び半導体装置
JP2002110806A (ja) * 2000-09-29 2002-04-12 Rohm Co Ltd Icチップおよび半導体装置
JP4447143B2 (ja) * 2000-10-11 2010-04-07 新光電気工業株式会社 半導体装置及びその製造方法
JP3913481B2 (ja) * 2001-01-24 2007-05-09 シャープ株式会社 半導体装置および半導体装置の製造方法
US6707135B2 (en) * 2000-11-28 2004-03-16 Texas Instruments Incorporated Semiconductor leadframe for staggered board attach
JP3798620B2 (ja) * 2000-12-04 2006-07-19 富士通株式会社 半導体装置の製造方法
JP2002184937A (ja) * 2000-12-18 2002-06-28 Shinko Electric Ind Co Ltd 半導体装置の実装構造
US6503776B2 (en) * 2001-01-05 2003-01-07 Advanced Semiconductor Engineering, Inc. Method for fabricating stacked chip package
US6885106B1 (en) 2001-01-11 2005-04-26 Tessera, Inc. Stacked microelectronic assemblies and methods of making same
JP4586273B2 (ja) * 2001-01-15 2010-11-24 ソニー株式会社 半導体装置構造
JP2002231885A (ja) * 2001-02-06 2002-08-16 Mitsubishi Electric Corp 半導体装置
JP2002359346A (ja) * 2001-05-30 2002-12-13 Sharp Corp 半導体装置および半導体チップの積層方法
US6881593B2 (en) * 2001-05-31 2005-04-19 The Johns Hopkins University Semiconductor die adapter and method of using
US6680441B2 (en) 2001-06-13 2004-01-20 Denso Corporation Printed wiring board with embedded electric device and method for manufacturing printed wiring board with embedded electric device
US20030006494A1 (en) * 2001-07-03 2003-01-09 Lee Sang Ho Thin profile stackable semiconductor package and method for manufacturing
US6831370B2 (en) * 2001-07-19 2004-12-14 Micron Technology, Inc. Method of using foamed insulators in three dimensional multichip structures
DE10134648A1 (de) * 2001-07-20 2002-10-10 Infineon Technologies Ag Anordnung aus gestapelten elektronischen Bauteilen und Verfahren zur Herstellung der Anordnung
US6790710B2 (en) * 2002-01-31 2004-09-14 Asat Limited Method of manufacturing an integrated circuit package
US20030057544A1 (en) * 2001-09-13 2003-03-27 Nathan Richard J. Integrated assembly protocol
US6613606B1 (en) * 2001-09-17 2003-09-02 Magic Corporation Structure of high performance combo chip and processing method
US20030059976A1 (en) * 2001-09-24 2003-03-27 Nathan Richard J. Integrated package and methods for making same
US6528351B1 (en) 2001-09-24 2003-03-04 Jigsaw Tek, Inc. Integrated package and methods for making same
US6916682B2 (en) * 2001-11-08 2005-07-12 Freescale Semiconductor, Inc. Semiconductor package device for use with multiple integrated circuits in a stacked configuration and method of formation and testing
US6486549B1 (en) * 2001-11-10 2002-11-26 Bridge Semiconductor Corporation Semiconductor module with encapsulant base
JP2003179099A (ja) * 2001-12-12 2003-06-27 Toshiba Corp 半導体装置およびその製造方法
SG104293A1 (en) * 2002-01-09 2004-06-21 Micron Technology Inc Elimination of rdl using tape base flip chip on flex for die stacking
TW200302685A (en) * 2002-01-23 2003-08-01 Matsushita Electric Industrial Co Ltd Circuit component built-in module and method of manufacturing the same
US7049528B2 (en) 2002-02-06 2006-05-23 Ibiden Co., Ltd. Semiconductor chip mounting wiring board, manufacturing method for same, and semiconductor module
US20030153119A1 (en) * 2002-02-14 2003-08-14 Nathan Richard J. Integrated circuit package and method for fabrication
SG111935A1 (en) * 2002-03-04 2005-06-29 Micron Technology Inc Interposer configured to reduce the profiles of semiconductor device assemblies and packages including the same and methods
SG115455A1 (en) * 2002-03-04 2005-10-28 Micron Technology Inc Methods for assembly and packaging of flip chip configured dice with interposer
SG121707A1 (en) * 2002-03-04 2006-05-26 Micron Technology Inc Method and apparatus for flip-chip packaging providing testing capability
SG115459A1 (en) 2002-03-04 2005-10-28 Micron Technology Inc Flip chip packaging using recessed interposer terminals
US6975035B2 (en) 2002-03-04 2005-12-13 Micron Technology, Inc. Method and apparatus for dielectric filling of flip chip on interposer assembly
SG115456A1 (en) * 2002-03-04 2005-10-28 Micron Technology Inc Semiconductor die packages with recessed interconnecting structures and methods for assembling the same
US7046522B2 (en) * 2002-03-21 2006-05-16 Raymond Jit-Hung Sung Method for scalable architectures in stackable three-dimensional integrated circuits and electronics
US6903458B1 (en) 2002-06-20 2005-06-07 Richard J. Nathan Embedded carrier for an integrated circuit chip
US6940154B2 (en) * 2002-06-24 2005-09-06 Asat Limited Integrated circuit package and method of manufacturing the integrated circuit package
CN100401485C (zh) * 2002-06-26 2008-07-09 威宇科技测试封装有限公司 一种能提高多芯片封装合格率的封装方法
US6906416B2 (en) * 2002-10-08 2005-06-14 Chippac, Inc. Semiconductor multi-package module having inverted second package stacked over die-up flip-chip ball grid array (BGA) package
US7034387B2 (en) * 2003-04-04 2006-04-25 Chippac, Inc. Semiconductor multipackage module including processor and memory package assemblies
KR100480437B1 (ko) * 2002-10-24 2005-04-07 삼성전자주식회사 반도체 칩 패키지 적층 모듈
KR20040045696A (ko) * 2002-11-25 2004-06-02 주식회사 하이닉스반도체 반도체 패키지 제조 방법
TW569416B (en) * 2002-12-19 2004-01-01 Via Tech Inc High density multi-chip module structure and manufacturing method thereof
US7253510B2 (en) 2003-01-16 2007-08-07 International Business Machines Corporation Ball grid array package construction with raised solder ball pads
JP4110992B2 (ja) * 2003-02-07 2008-07-02 セイコーエプソン株式会社 半導体装置、電子デバイス、電子機器、半導体装置の製造方法および電子デバイスの製造方法
US20040160742A1 (en) * 2003-02-14 2004-08-19 Weiss Roger E. Three-dimensional electrical device packaging employing low profile elastomeric interconnection
KR100498488B1 (ko) * 2003-02-20 2005-07-01 삼성전자주식회사 적층형 반도체 패키지 및 그 제조방법
JP3680839B2 (ja) * 2003-03-18 2005-08-10 セイコーエプソン株式会社 半導体装置および半導体装置の製造方法
US7229201B2 (en) * 2003-03-26 2007-06-12 Optim Inc. Compact, high-efficiency, high-power solid state light source using a single solid state light-emitting device
US7102217B2 (en) * 2003-04-09 2006-09-05 Micron Technology, Inc. Interposer substrates with reinforced interconnect slots, and semiconductor die packages including same
JP3912318B2 (ja) * 2003-05-02 2007-05-09 セイコーエプソン株式会社 半導体装置の製造方法および電子デバイスの製造方法
US20040262728A1 (en) * 2003-06-30 2004-12-30 Sterrett Terry L. Modular device assemblies
CN1577819A (zh) * 2003-07-09 2005-02-09 松下电器产业株式会社 带内置电子部件的电路板及其制造方法
US6983359B2 (en) * 2003-08-13 2006-01-03 Via-Cyrix, Inc. Processor and method for pre-fetching out-of-order instructions
US20050035441A1 (en) * 2003-08-15 2005-02-17 Kwanghak Lee Integrated circuit stack with partially etched lead frames
US7180165B2 (en) * 2003-09-05 2007-02-20 Sanmina, Sci Corporation Stackable electronic assembly
DE10345391B3 (de) * 2003-09-30 2005-02-17 Infineon Technologies Ag Verfahren zur Herstellung eines Multi-Chip-Moduls und Multi-Chip-Modul
US8970049B2 (en) * 2003-12-17 2015-03-03 Chippac, Inc. Multiple chip package module having inverted package stacked over die
JP4103796B2 (ja) * 2003-12-25 2008-06-18 沖電気工業株式会社 半導体チップパッケージ及びマルチチップパッケージ
US7262507B2 (en) * 2003-12-26 2007-08-28 Nec Electronics Corporation Semiconductor-mounted device and method for producing same
JP3950868B2 (ja) * 2004-04-28 2007-08-01 エルピーダメモリ株式会社 半導体装置及びその製造方法
US20050269692A1 (en) * 2004-05-24 2005-12-08 Chippac, Inc Stacked semiconductor package having adhesive/spacer structure and insulation
US20050258527A1 (en) * 2004-05-24 2005-11-24 Chippac, Inc. Adhesive/spacer island structure for multiple die package
US8552551B2 (en) * 2004-05-24 2013-10-08 Chippac, Inc. Adhesive/spacer island structure for stacking over wire bonded die
US7208346B2 (en) * 2004-06-14 2007-04-24 David Lee Methods of forming interposers on surfaces of dies of a wafer
US7744802B2 (en) * 2004-06-25 2010-06-29 Intel Corporation Dielectric film with low coefficient of thermal expansion (CTE) using liquid crystalline resin
US7250684B2 (en) * 2004-06-30 2007-07-31 Intel Corporation Circular wire-bond pad, package made therewith, and method of assembling same
US7253511B2 (en) * 2004-07-13 2007-08-07 Chippac, Inc. Semiconductor multipackage module including die and inverted land grid array package stacked over ball grid array package
KR101078717B1 (ko) * 2004-07-20 2011-11-02 주식회사 하이닉스반도체 칩 스택 패키지
KR100688501B1 (ko) 2004-09-10 2007-03-02 삼성전자주식회사 미러링 구조를 갖는 스택 boc 패키지 및 이를 장착한양면 실장형 메모리 모듈
JP2006120935A (ja) * 2004-10-22 2006-05-11 Matsushita Electric Ind Co Ltd 半導体装置及びその製造方法
US20060267174A1 (en) * 2005-02-09 2006-11-30 William Macropoulos Apparatus and method using stackable substrates
JP4185499B2 (ja) * 2005-02-18 2008-11-26 富士通マイクロエレクトロニクス株式会社 半導体装置
US7160798B2 (en) * 2005-02-24 2007-01-09 Freescale Semiconductor, Inc. Method of making reinforced semiconductor package
US8238699B2 (en) * 2005-03-04 2012-08-07 Finisar Corporation Semiconductor-based optical transceiver
US20060202317A1 (en) * 2005-03-14 2006-09-14 Farid Barakat Method for MCP packaging for balanced performance
TWI442520B (zh) * 2005-03-31 2014-06-21 史達特司奇帕克有限公司 具有晶片尺寸型封裝及第二基底及在上側與下側包含暴露基底表面之半導體組件
JP2008535273A (ja) * 2005-03-31 2008-08-28 スタッツ・チップパック・リミテッド 上面および下面に露出した基板表面を有する半導体積層型パッケージアセンブリ
US7364945B2 (en) * 2005-03-31 2008-04-29 Stats Chippac Ltd. Method of mounting an integrated circuit package in an encapsulant cavity
JP4551255B2 (ja) * 2005-03-31 2010-09-22 ルネサスエレクトロニクス株式会社 半導体装置
JP4237160B2 (ja) * 2005-04-08 2009-03-11 エルピーダメモリ株式会社 積層型半導体装置
US7196427B2 (en) * 2005-04-18 2007-03-27 Freescale Semiconductor, Inc. Structure having an integrated circuit on another integrated circuit with an intervening bent adhesive element
US7098073B1 (en) * 2005-04-18 2006-08-29 Freescale Semiconductor, Inc. Method for stacking an integrated circuit on another integrated circuit
JP4400506B2 (ja) * 2005-04-28 2010-01-20 エルピーダメモリ株式会社 半導体装置及びその製造方法、並びに、回路基板の接続方法
US7429786B2 (en) * 2005-04-29 2008-09-30 Stats Chippac Ltd. Semiconductor package including second substrate and having exposed substrate surfaces on upper and lower sides
US7354800B2 (en) * 2005-04-29 2008-04-08 Stats Chippac Ltd. Method of fabricating a stacked integrated circuit package system
US20060270104A1 (en) * 2005-05-03 2006-11-30 Octavio Trovarelli Method for attaching dice to a package and arrangement of dice in a package
US7582960B2 (en) * 2005-05-05 2009-09-01 Stats Chippac Ltd. Multiple chip package module including die stacked over encapsulated package
US7518224B2 (en) * 2005-05-16 2009-04-14 Stats Chippac Ltd. Offset integrated circuit package-on-package stacking system
US7746656B2 (en) * 2005-05-16 2010-06-29 Stats Chippac Ltd. Offset integrated circuit package-on-package stacking system
US7394148B2 (en) * 2005-06-20 2008-07-01 Stats Chippac Ltd. Module having stacked chip scale semiconductor packages
JP4983049B2 (ja) * 2005-06-24 2012-07-25 セイコーエプソン株式会社 半導体装置および電子機器
SG130055A1 (en) 2005-08-19 2007-03-20 Micron Technology Inc Microelectronic devices, stacked microelectronic devices, and methods for manufacturing microelectronic devices
JP5116268B2 (ja) * 2005-08-31 2013-01-09 キヤノン株式会社 積層型半導体装置およびその製造方法
US8274792B2 (en) * 2005-09-06 2012-09-25 Beyond Blades Ltd. 3-dimensional multi-layered modular computer architecture
KR100668858B1 (ko) 2005-09-07 2007-01-16 주식회사 하이닉스반도체 적층형 패키지 모듈 및 그 제조방법
US8067831B2 (en) * 2005-09-16 2011-11-29 Stats Chippac Ltd. Integrated circuit package system with planar interconnects
US7511371B2 (en) * 2005-11-01 2009-03-31 Sandisk Corporation Multiple die integrated circuit package
US7352058B2 (en) * 2005-11-01 2008-04-01 Sandisk Corporation Methods for a multiple die integrated circuit package
US7576995B2 (en) 2005-11-04 2009-08-18 Entorian Technologies, Lp Flex circuit apparatus and method for adding capacitance while conserving circuit board surface area
US7768125B2 (en) 2006-01-04 2010-08-03 Stats Chippac Ltd. Multi-chip package system
US7456088B2 (en) 2006-01-04 2008-11-25 Stats Chippac Ltd. Integrated circuit package system including stacked die
US7508069B2 (en) 2006-01-11 2009-03-24 Entorian Technologies, Lp Managed memory component
US7608920B2 (en) 2006-01-11 2009-10-27 Entorian Technologies, Lp Memory card and method for devising
US7304382B2 (en) 2006-01-11 2007-12-04 Staktek Group L.P. Managed memory component
US7508058B2 (en) 2006-01-11 2009-03-24 Entorian Technologies, Lp Stacked integrated circuit module
US7605454B2 (en) 2006-01-11 2009-10-20 Entorian Technologies, Lp Memory card and method for devising
US7750482B2 (en) 2006-02-09 2010-07-06 Stats Chippac Ltd. Integrated circuit package system including zero fillet resin
US8704349B2 (en) 2006-02-14 2014-04-22 Stats Chippac Ltd. Integrated circuit package system with exposed interconnects
JP2007266540A (ja) * 2006-03-30 2007-10-11 Elpida Memory Inc 半導体装置及びその製造方法
US7498667B2 (en) * 2006-04-18 2009-03-03 Stats Chippac Ltd. Stacked integrated circuit package-in-package system
US8164168B2 (en) * 2006-06-30 2012-04-24 Oki Semiconductor Co., Ltd. Semiconductor package
US7732912B2 (en) * 2006-08-11 2010-06-08 Tessera, Inc. Semiconductor chip packages and assemblies with chip carrier units
US20080054429A1 (en) * 2006-08-25 2008-03-06 Bolken Todd O Spacers for separating components of semiconductor device assemblies, semiconductor device assemblies and systems including spacers and methods of making spacers
US7868440B2 (en) 2006-08-25 2011-01-11 Micron Technology, Inc. Packaged microdevices and methods for manufacturing packaged microdevices
US7468553B2 (en) 2006-10-20 2008-12-23 Entorian Technologies, Lp Stackable micropackages and stacked modules
KR100817073B1 (ko) * 2006-11-03 2008-03-26 삼성전자주식회사 휨방지용 보강부재가 기판에 연결된 반도체 칩 스택 패키지
US20080123318A1 (en) * 2006-11-08 2008-05-29 Atmel Corporation Multi-component electronic package with planarized embedded-components substrate
US20080160670A1 (en) * 2006-12-27 2008-07-03 Atmel Corporation Physical alignment features on integrated circuit devices for accurate die-in-substrate embedding
US8163600B2 (en) * 2006-12-28 2012-04-24 Stats Chippac Ltd. Bridge stack integrated circuit package-on-package system
US7508070B2 (en) * 2007-01-13 2009-03-24 Cheng-Lien Chiang Two dimensional stacking using interposers
US7800916B2 (en) * 2007-04-09 2010-09-21 Endicott Interconnect Technologies, Inc. Circuitized substrate with internal stacked semiconductor chips, method of making same, electrical assembly utilizing same and information handling system utilizing same
US8421244B2 (en) * 2007-05-08 2013-04-16 Samsung Electronics Co., Ltd. Semiconductor package and method of forming the same
US7982137B2 (en) * 2007-06-27 2011-07-19 Hamilton Sundstrand Corporation Circuit board with an attached die and intermediate interposer
US20110024890A1 (en) * 2007-06-29 2011-02-03 Stats Chippac, Ltd. Stackable Package By Using Internal Stacking Modules
MY154596A (en) 2007-07-25 2015-06-30 Carsem M Sdn Bhd Thin plastic leadless package with exposed metal die paddle
KR20090033605A (ko) * 2007-10-01 2009-04-06 삼성전자주식회사 적층형 반도체 패키지, 그 형성방법 및 이를 구비하는전자장치
US7985628B2 (en) * 2007-12-12 2011-07-26 Stats Chippac Ltd. Integrated circuit package system with interconnect lock
US8084849B2 (en) * 2007-12-12 2011-12-27 Stats Chippac Ltd. Integrated circuit package system with offset stacking
US7781261B2 (en) * 2007-12-12 2010-08-24 Stats Chippac Ltd. Integrated circuit package system with offset stacking and anti-flash structure
US8536692B2 (en) * 2007-12-12 2013-09-17 Stats Chippac Ltd. Mountable integrated circuit package system with mountable integrated circuit die
DE102008005320A1 (de) * 2008-01-21 2009-07-23 Giesecke & Devrient Gmbh Kartenförmiger Datenträger
US8063474B2 (en) 2008-02-06 2011-11-22 Fairchild Semiconductor Corporation Embedded die package on package (POP) with pre-molded leadframe
JP2009194143A (ja) * 2008-02-14 2009-08-27 Elpida Memory Inc 半導体装置
US20090243069A1 (en) * 2008-03-26 2009-10-01 Zigmund Ramirez Camacho Integrated circuit package system with redistribution
US9059074B2 (en) * 2008-03-26 2015-06-16 Stats Chippac Ltd. Integrated circuit package system with planar interconnect
CN101572261A (zh) * 2008-04-28 2009-11-04 鸿富锦精密工业(深圳)有限公司 芯片封装结构
US9293385B2 (en) * 2008-07-30 2016-03-22 Stats Chippac Ltd. RDL patterning with package on package system
US8043894B2 (en) * 2008-08-26 2011-10-25 Stats Chippac Ltd. Integrated circuit package system with redistribution layer
KR100997793B1 (ko) * 2008-09-01 2010-12-02 주식회사 하이닉스반도체 반도체 패키지 및 이의 제조 방법
KR101013563B1 (ko) * 2009-02-25 2011-02-14 주식회사 하이닉스반도체 스택 패키지
JP2010262992A (ja) * 2009-04-30 2010-11-18 Sanyo Electric Co Ltd 半導体モジュールおよび携帯機器
US7939369B2 (en) * 2009-05-14 2011-05-10 International Business Machines Corporation 3D integration structure and method using bonded metal planes
KR101078734B1 (ko) * 2009-07-07 2011-11-02 주식회사 하이닉스반도체 반도체 패키지 및 그 제조방법과, 이를 이용한 스택 패키지
US8390083B2 (en) * 2009-09-04 2013-03-05 Analog Devices, Inc. System with recessed sensing or processing elements
US8698321B2 (en) * 2009-10-07 2014-04-15 Qualcomm Incorporated Vertically stackable dies having chip identifier structures
US20110110061A1 (en) * 2009-11-12 2011-05-12 Leung Andrew Kw Circuit Board with Offset Via
WO2012051340A1 (en) 2010-10-12 2012-04-19 Analog Devices, Inc. Microphone package with embedded asic
US9165795B2 (en) * 2010-12-09 2015-10-20 Cypress Semiconductor Corporation High performance low profile QFN/LGA
DE102011100255B3 (de) * 2011-05-03 2012-04-26 Danfoss Silicon Power Gmbh Verfahren zum Herstellen eines Halbleiterbauelements
JP5673423B2 (ja) 2011-08-03 2015-02-18 富士通セミコンダクター株式会社 半導体装置および半導体装置の製造方法
KR101887084B1 (ko) * 2011-09-22 2018-08-10 삼성전자주식회사 멀티-칩 반도체 패키지 및 그 형성 방법
US9443783B2 (en) * 2012-06-27 2016-09-13 Taiwan Semiconductor Manufacturing Company, Ltd. 3DIC stacking device and method of manufacture
US8896106B2 (en) * 2012-07-09 2014-11-25 Infineon Technologies Ag Semiconductor packages having multiple lead frames and methods of formation thereof
US8963335B2 (en) * 2012-09-13 2015-02-24 Invensas Corporation Tunable composite interposer
US20140168914A1 (en) * 2012-12-13 2014-06-19 Kabushiki Kaisha Toshiba Semiconductor device
JP2014187354A (ja) * 2013-02-21 2014-10-02 Ricoh Co Ltd デバイス、及びデバイスの作製方法
US9195929B2 (en) * 2013-08-05 2015-11-24 A-Men Technology Corporation Chip card assembling structure and method thereof
KR102161173B1 (ko) * 2013-08-29 2020-09-29 삼성전자주식회사 패키지 온 패키지 장치 및 이의 제조 방법
CN104576883B (zh) 2013-10-29 2018-11-16 普因特工程有限公司 芯片安装用阵列基板及其制造方法
US10049977B2 (en) * 2014-08-01 2018-08-14 Qualcomm Incorporated Semiconductor package on package structure and method of forming the same
WO2016116889A1 (en) * 2015-01-23 2016-07-28 Gholamreza Chaji Selective micro device transfer to receiver substrate
US9768108B2 (en) * 2015-02-20 2017-09-19 Qualcomm Incorporated Conductive post protection for integrated circuit packages
US9666558B2 (en) 2015-06-29 2017-05-30 Point Engineering Co., Ltd. Substrate for mounting a chip and chip package using the substrate
US10276541B2 (en) * 2015-06-30 2019-04-30 Taiwan Semiconductor Manufacturing Company, Ltd. 3D package structure and methods of forming same
US10892248B2 (en) 2016-12-20 2021-01-12 Intel Corporation Multi-stacked die package with flexible interconnect
US11894347B2 (en) * 2019-08-02 2024-02-06 Semiconductor Components Industries, Llc Low stress asymmetric dual side module
US11469163B2 (en) * 2019-08-02 2022-10-11 Semiconductor Components Industries, Llc Low stress asymmetric dual side module
CN114914234A (zh) * 2021-02-10 2022-08-16 华为技术有限公司 一种功率结构体和制备方法以及设备
WO2023010457A1 (zh) 2021-08-05 2023-02-09 广东省科学院半导体研究所 芯片堆叠封装结构及芯片堆叠封装方法
US12525570B2 (en) * 2023-05-03 2026-01-13 Renesas Electronics Corporation Semiconductor device and method of manufacturing the same

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2876773B2 (ja) * 1990-10-22 1999-03-31 セイコーエプソン株式会社 プログラム命令語長可変型計算装置及びデータ処理装置
JP3547146B2 (ja) * 1991-06-10 2004-07-28 日本特殊陶業株式会社 集積回路用パッケージ
US5334857A (en) * 1992-04-06 1994-08-02 Motorola, Inc. Semiconductor device with test-only contacts and method for making the same
JPH07193184A (ja) * 1993-12-27 1995-07-28 Fujitsu Ltd マルチチップモジュールの製造方法及びマルチチップモジュール
US5418687A (en) * 1994-02-01 1995-05-23 Hewlett-Packard Company Wafer scale multi-chip module
JPH07335783A (ja) * 1994-06-13 1995-12-22 Fujitsu Ltd 半導体装置及び半導体装置ユニット
KR0147259B1 (ko) * 1994-10-27 1998-08-01 김광호 적층형 패키지 및 그 제조방법
JP2944449B2 (ja) 1995-02-24 1999-09-06 日本電気株式会社 半導体パッケージとその製造方法
US5657537A (en) * 1995-05-30 1997-08-19 General Electric Company Method for fabricating a stack of two dimensional circuit modules
US5648684A (en) * 1995-07-26 1997-07-15 International Business Machines Corporation Endcap chip with conductive, monolithic L-connect for multichip stack
US5874781A (en) * 1995-08-16 1999-02-23 Micron Technology, Inc. Angularly offset stacked die multichip device and method of manufacture
US6013948A (en) * 1995-11-27 2000-01-11 Micron Technology, Inc. Stackable chip scale semiconductor package with mating contacts on opposed surfaces
US5798564A (en) * 1995-12-21 1998-08-25 Texas Instruments Incorporated Multiple chip module apparatus having dual sided substrate
US5656552A (en) * 1996-06-24 1997-08-12 Hudak; John James Method of making a thin conformal high-yielding multi-chip module
JP3176307B2 (ja) * 1997-03-03 2001-06-18 日本電気株式会社 集積回路装置の実装構造およびその製造方法
US5994166A (en) * 1997-03-10 1999-11-30 Micron Technology, Inc. Method of constructing stacked packages
JPH10270592A (ja) * 1997-03-24 1998-10-09 Texas Instr Japan Ltd 半導体装置及びその製造方法
JPH11145381A (ja) 1997-11-12 1999-05-28 Denso Corp 半導体マルチチップモジュール
US6028365A (en) * 1998-03-30 2000-02-22 Micron Technology, Inc. Integrated circuit package and method of fabrication
US6020629A (en) * 1998-06-05 2000-02-01 Micron Technology, Inc. Stacked semiconductor package and method of fabrication
US6051887A (en) * 1998-08-28 2000-04-18 Medtronic, Inc. Semiconductor stacked device for implantable medical apparatus
US6242279B1 (en) * 1999-06-14 2001-06-05 Thin Film Module, Inc. High density wire bond BGA

Also Published As

Publication number Publication date
US6413798B2 (en) 2002-07-02
KR100507300B1 (ko) 2005-08-09
US20010012643A1 (en) 2001-08-09
KR20030045696A (ko) 2003-06-11
JP2000208698A (ja) 2000-07-28
KR20000053511A (ko) 2000-08-25
US6239496B1 (en) 2001-05-29

Similar Documents

Publication Publication Date Title
KR100615019B1 (ko) 반도체 패키지, 멀티칩 모듈 및 그 제조방법
KR100865426B1 (ko) 반도체 장치 및 그 제조 방법
KR100565930B1 (ko) 가볍고 얇은 적층형 패키지 반도체 디바이스 및 그 제조방법
JP3186941B2 (ja) 半導体チップおよびマルチチップ半導体モジュール
KR100938970B1 (ko) 반도체 장치 및 그 제조 방법
US6621172B2 (en) Semiconductor device and method of fabricating the same, circuit board, and electronic equipment
KR100475619B1 (ko) 배선 기판, 반도체 장치 및 배선 기판의 제조 방법
JP3565334B2 (ja) 半導体装置およびそれを用いる液晶モジュール、並びに半導体装置の製造方法
US20050282374A1 (en) Method of forming a thin wafer stack for a wafer level package
KR20010060343A (ko) 반도체 장치 및 반도체 장치 제조 방법
CN102067310A (zh) 带有边缘触头的晶片级芯片规模封装的堆叠
JP4379102B2 (ja) 半導体装置の製造方法
US9425177B2 (en) Method of manufacturing semiconductor device including grinding semiconductor wafer
US5151388A (en) Flip interconnect
US20100213605A1 (en) Semiconductor device and method of manufacturing semiconductor device
KR20050065318A (ko) 반도체장치 및 그 제조 방법
US20050269680A1 (en) System-in-package (SIP) structure and fabrication thereof
US20040092129A1 (en) Method for manufacturing circuit devices
JP2002270720A (ja) 半導体装置およびその製造方法
US6528343B1 (en) Semiconductor device its manufacturing method and electronic device
KR20090029646A (ko) 반도체 장치의 제조 방법
JP4034468B2 (ja) 半導体装置の製造方法
US6818542B2 (en) Tape circuit board and semiconductor chip package including the same
KR20020025695A (ko) 얇은 패키지에 실장된 반도체 장치 및 그 제조 방법
KR100726892B1 (ko) 3차원 칩 적층 패키지 모듈 및 이의 제조방법

Legal Events

Date Code Title Description
A201 Request for examination
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

A107 Divisional application of patent
E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0107 Divisional application

St.27 status event code: A-0-1-A10-A18-div-PA0107

St.27 status event code: A-0-1-A10-A16-div-PA0107

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

FPAY Annual fee payment

Payment date: 20110720

Year of fee payment: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20120817

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20120817

R18 Changes to party contact information recorded

Free format text: ST27 STATUS EVENT CODE: A-5-5-R10-R18-OTH-X000 (AS PROVIDED BY THE NATIONAL OFFICE)

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000