JPS57194567A - Semiconductor memory device - Google Patents
Semiconductor memory deviceInfo
- Publication number
- JPS57194567A JPS57194567A JP56079210A JP7921081A JPS57194567A JP S57194567 A JPS57194567 A JP S57194567A JP 56079210 A JP56079210 A JP 56079210A JP 7921081 A JP7921081 A JP 7921081A JP S57194567 A JPS57194567 A JP S57194567A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- layer
- misfet
- gate
- memory
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000003990 capacitor Substances 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 238000002844 melting Methods 0.000 abstract 1
- 230000008018 melting Effects 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/4916—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a silicon layer, e.g. polysilicon doped with boron, phosphorus or nitrogen
- H01L29/4925—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a silicon layer, e.g. polysilicon doped with boron, phosphorus or nitrogen with a multiple layer structure, e.g. several silicon layers with different crystal structure or grain arrangement
- H01L29/4933—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a silicon layer, e.g. polysilicon doped with boron, phosphorus or nitrogen with a multiple layer structure, e.g. several silicon layers with different crystal structure or grain arrangement with a silicide layer contacting the silicon layer, e.g. Polycide gate
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
- G11C11/40—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
- G11C11/401—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells
- G11C11/403—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells with charge regeneration common to a multiplicity of memory cells, i.e. external refresh
- G11C11/404—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells with charge regeneration common to a multiplicity of memory cells, i.e. external refresh with one charge-transfer gate, e.g. MOS transistor, per cell
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76886—Modifying permanently or temporarily the pattern or the conductivity of conductive members, e.g. formation of alloys, reduction of contact resistances
- H01L21/76889—Modifying permanently or temporarily the pattern or the conductivity of conductive members, e.g. formation of alloys, reduction of contact resistances by forming silicides of refractory metals
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
- H01L21/86—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body the insulating body being sapphire, e.g. silicon on sapphire structure, i.e. SOS
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/10—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the top-view layout
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Priority Applications (14)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56079210A JPS57194567A (en) | 1981-05-27 | 1981-05-27 | Semiconductor memory device |
GB08212946A GB2107114B (en) | 1981-05-27 | 1982-05-05 | Semiconductor memory device |
IT8221482A IT1151245B (it) | 1981-05-27 | 1982-05-25 | Dispositivo do memoria a semiconduttori in particolare memoria ad accesso casuale dinamica |
DE3250096A DE3250096C2 (de) | 1981-05-27 | 1982-05-25 | Verfahren zur Herstellung einer einen MISFET enthaltenden Halbleiterschaltung |
DE19823219639 DE3219639A1 (de) | 1981-05-27 | 1982-05-25 | Halbleiterspeicher |
KR8202305A KR910002303B1 (ko) | 1981-05-27 | 1982-05-25 | 반도체 기억장치 |
US06/783,531 US4612565A (en) | 1981-05-27 | 1985-10-03 | Semiconductor memory device |
SG372/87A SG37287G (en) | 1981-05-27 | 1987-04-23 | A semiconductor memory device |
HK703/87A HK70387A (en) | 1981-05-27 | 1987-10-01 | A semiconductor memory device |
MY606/87A MY8700606A (en) | 1981-05-27 | 1987-12-30 | A semiconductor memory device |
KR9009660A KR900008667B1 (en) | 1981-05-27 | 1990-06-28 | A method for manufacturing semiconductor memory device |
KR1019910000046A KR910002305B1 (ko) | 1981-05-27 | 1991-01-04 | 반도체 기억장치 |
KR919100044A KR910002293B1 (ko) | 1981-05-27 | 1991-01-04 | 반도체 기억장치의 제조방법 |
KR1019910000045A KR910002304B1 (ko) | 1981-05-27 | 1991-07-02 | 반도체 장치의 배선층의 형성방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56079210A JPS57194567A (en) | 1981-05-27 | 1981-05-27 | Semiconductor memory device |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63128409A Division JPH0198255A (ja) | 1988-05-27 | 1988-05-27 | 半導体記憶装置 |
JP63128411A Division JPH0636426B2 (ja) | 1988-05-27 | 1988-05-27 | 半導体記憶装置の製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57194567A true JPS57194567A (en) | 1982-11-30 |
Family
ID=13683571
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56079210A Pending JPS57194567A (en) | 1981-05-27 | 1981-05-27 | Semiconductor memory device |
Country Status (9)
Country | Link |
---|---|
US (1) | US4612565A (ja) |
JP (1) | JPS57194567A (ja) |
KR (3) | KR910002303B1 (ja) |
DE (1) | DE3219639A1 (ja) |
GB (1) | GB2107114B (ja) |
HK (1) | HK70387A (ja) |
IT (1) | IT1151245B (ja) |
MY (1) | MY8700606A (ja) |
SG (1) | SG37287G (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61198664A (ja) * | 1985-02-27 | 1986-09-03 | Sharp Corp | 半導体装置の製造方法 |
JPS6286865A (ja) * | 1985-10-14 | 1987-04-21 | Mitsubishi Electric Corp | Mos型トランジスタ |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3304651A1 (de) * | 1983-02-10 | 1984-08-16 | Siemens AG, 1000 Berlin und 8000 München | Dynamische halbleiterspeicherzelle mit wahlfreiem zugriff (dram) und verfahren zu ihrer herstellung |
FR2555364B1 (fr) * | 1983-11-18 | 1990-02-02 | Hitachi Ltd | Procede de fabrication de connexions d'un dispositif a circuits integres a semi-conducteurs comportant en particulier un mitset |
JPH0795395B2 (ja) * | 1984-02-13 | 1995-10-11 | 株式会社日立製作所 | 半導体集積回路 |
JPH0658947B2 (ja) * | 1984-02-24 | 1994-08-03 | 株式会社日立製作所 | 半導体メモリ装置の製法 |
US4672407A (en) * | 1984-05-30 | 1987-06-09 | Kabushiki Kaisha Toshiba | Conductivity modulated MOSFET |
US5061986A (en) * | 1985-01-22 | 1991-10-29 | National Semiconductor Corporation | Self-aligned extended base contact for a bipolar transistor having reduced cell size and improved electrical characteristics |
US5045916A (en) * | 1985-01-22 | 1991-09-03 | Fairchild Semiconductor Corporation | Extended silicide and external contact technology |
US5227316A (en) * | 1985-01-22 | 1993-07-13 | National Semiconductor Corporation | Method of forming self aligned extended base contact for a bipolar transistor having reduced cell size |
JPS6269664A (ja) * | 1985-09-24 | 1987-03-30 | Toshiba Corp | 相補mos型半導体装置 |
JPS62219966A (ja) * | 1986-03-22 | 1987-09-28 | Toshiba Corp | 半導体装置 |
JPH0789569B2 (ja) * | 1986-03-26 | 1995-09-27 | 株式会社日立製作所 | 半導体集積回路装置及びその製造方法 |
FR2616966B1 (fr) * | 1987-06-22 | 1989-10-27 | Thomson Semiconducteurs | Structure de transistors mos de puissance |
US5332682A (en) * | 1990-08-31 | 1994-07-26 | Micron Semiconductor, Inc. | Local encroachment reduction |
KR0121992B1 (ko) * | 1993-03-03 | 1997-11-12 | 모리시다 요이치 | 반도체장치 및 그 제조방법 |
JP4356804B2 (ja) * | 1998-08-06 | 2009-11-04 | 富士通マイクロエレクトロニクス株式会社 | 半導体装置 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5015550A (ja) * | 1973-06-08 | 1975-02-19 | ||
JPS5380985A (en) * | 1976-12-25 | 1978-07-17 | Toshiba Corp | Semiconductor device |
JPS5413283A (en) * | 1977-06-30 | 1979-01-31 | Ibm | Method of forming metal silicide layer on substrate |
JPS5488783A (en) * | 1977-12-26 | 1979-07-14 | Cho Lsi Gijutsu Kenkyu Kumiai | Semiconductor |
JPS54116184A (en) * | 1978-03-01 | 1979-09-10 | Mitsubishi Electric Corp | Manufacture for semiconductor device |
JPS5534492A (en) * | 1978-09-02 | 1980-03-11 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor integrated circuit device having mis field effect type transistor and its manufacture |
JPS5583251A (en) * | 1978-12-20 | 1980-06-23 | Fujitsu Ltd | Method of fabricating semiconductor device |
JPS5650533A (en) * | 1979-10-01 | 1981-05-07 | Hitachi Ltd | Semiconductor device |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3889287A (en) * | 1973-12-06 | 1975-06-10 | Motorola Inc | Mnos memory matrix |
US4021789A (en) * | 1975-09-29 | 1977-05-03 | International Business Machines Corporation | Self-aligned integrated circuits |
US4128670A (en) * | 1977-11-11 | 1978-12-05 | International Business Machines Corporation | Fabrication method for integrated circuits with polysilicon lines having low sheet resistance |
JPS5819144B2 (ja) * | 1977-12-02 | 1983-04-16 | 株式会社東芝 | 読み出し専用記憶装置 |
DE2815605C3 (de) * | 1978-04-11 | 1981-04-16 | Siemens AG, 1000 Berlin und 8000 München | Halbleiterspeicher mit Ansteuerleitungen hoher Leitfähigkeit |
JPS5530846A (en) * | 1978-08-28 | 1980-03-04 | Hitachi Ltd | Method for manufacturing fixed memory |
US4329706A (en) * | 1979-03-01 | 1982-05-11 | International Business Machines Corporation | Doped polysilicon silicide semiconductor integrated circuit interconnections |
JPS55132055A (en) * | 1979-03-30 | 1980-10-14 | Nec Corp | Mos integrated circuit |
JPS55140271A (en) * | 1979-04-20 | 1980-11-01 | Hitachi Ltd | Manufacture of mis transistor |
DE2926874A1 (de) * | 1979-07-03 | 1981-01-22 | Siemens Ag | Verfahren zum herstellen von niederohmigen, diffundierten bereichen bei der silizium-gate-technologie |
JPS5623771A (en) * | 1979-08-01 | 1981-03-06 | Hitachi Ltd | Semiconductor memory |
US4339766A (en) * | 1979-10-11 | 1982-07-13 | Texas Instruments Incorporated | Dummy columns for reducing pattern sensitivity in MOS/LSI dynamic RAM |
US4388121A (en) * | 1980-03-21 | 1983-06-14 | Texas Instruments Incorporated | Reduced field implant for dynamic memory cell array |
JPS5780739A (en) * | 1980-11-07 | 1982-05-20 | Hitachi Ltd | Semiconductor integrated circuit device and manufacture thereof |
US4362597A (en) * | 1981-01-19 | 1982-12-07 | Bell Telephone Laboratories, Incorporated | Method of fabricating high-conductivity silicide-on-polysilicon structures for MOS devices |
-
1981
- 1981-05-27 JP JP56079210A patent/JPS57194567A/ja active Pending
-
1982
- 1982-05-05 GB GB08212946A patent/GB2107114B/en not_active Expired
- 1982-05-25 DE DE19823219639 patent/DE3219639A1/de not_active Ceased
- 1982-05-25 IT IT8221482A patent/IT1151245B/it active
- 1982-05-25 KR KR8202305A patent/KR910002303B1/ko active
-
1985
- 1985-10-03 US US06/783,531 patent/US4612565A/en not_active Expired - Lifetime
-
1987
- 1987-04-23 SG SG372/87A patent/SG37287G/en unknown
- 1987-10-01 HK HK703/87A patent/HK70387A/xx not_active IP Right Cessation
- 1987-12-30 MY MY606/87A patent/MY8700606A/xx unknown
-
1990
- 1990-06-28 KR KR9009660A patent/KR900008667B1/ko not_active IP Right Cessation
-
1991
- 1991-07-02 KR KR1019910000045A patent/KR910002304B1/ko not_active Application Discontinuation
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5015550A (ja) * | 1973-06-08 | 1975-02-19 | ||
JPS5380985A (en) * | 1976-12-25 | 1978-07-17 | Toshiba Corp | Semiconductor device |
JPS5413283A (en) * | 1977-06-30 | 1979-01-31 | Ibm | Method of forming metal silicide layer on substrate |
JPS5488783A (en) * | 1977-12-26 | 1979-07-14 | Cho Lsi Gijutsu Kenkyu Kumiai | Semiconductor |
JPS54116184A (en) * | 1978-03-01 | 1979-09-10 | Mitsubishi Electric Corp | Manufacture for semiconductor device |
JPS5534492A (en) * | 1978-09-02 | 1980-03-11 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor integrated circuit device having mis field effect type transistor and its manufacture |
JPS5583251A (en) * | 1978-12-20 | 1980-06-23 | Fujitsu Ltd | Method of fabricating semiconductor device |
JPS5650533A (en) * | 1979-10-01 | 1981-05-07 | Hitachi Ltd | Semiconductor device |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61198664A (ja) * | 1985-02-27 | 1986-09-03 | Sharp Corp | 半導体装置の製造方法 |
JPS6286865A (ja) * | 1985-10-14 | 1987-04-21 | Mitsubishi Electric Corp | Mos型トランジスタ |
JPH0478188B2 (ja) * | 1985-10-14 | 1992-12-10 | Mitsubishi Electric Corp |
Also Published As
Publication number | Publication date |
---|---|
IT8221482A0 (it) | 1982-05-25 |
GB2107114A (en) | 1983-04-20 |
KR900008667B1 (en) | 1990-11-26 |
KR840000083A (ko) | 1984-01-30 |
US4612565A (en) | 1986-09-16 |
SG37287G (en) | 1987-07-24 |
MY8700606A (en) | 1987-12-31 |
DE3219639A1 (de) | 1982-12-23 |
KR910002303B1 (ko) | 1991-04-11 |
GB2107114B (en) | 1986-02-12 |
KR910002304B1 (ko) | 1991-04-11 |
KR920002830A (ko) | 1992-02-28 |
IT1151245B (it) | 1986-12-17 |
HK70387A (en) | 1987-10-09 |
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