JPH11312811A5 - - Google Patents

Info

Publication number
JPH11312811A5
JPH11312811A5 JP1998296216A JP29621698A JPH11312811A5 JP H11312811 A5 JPH11312811 A5 JP H11312811A5 JP 1998296216 A JP1998296216 A JP 1998296216A JP 29621698 A JP29621698 A JP 29621698A JP H11312811 A5 JPH11312811 A5 JP H11312811A5
Authority
JP
Japan
Prior art keywords
thin film
peeling
film device
separation layer
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998296216A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11312811A (ja
JP3809733B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP29621698A external-priority patent/JP3809733B2/ja
Priority to JP29621698A priority Critical patent/JP3809733B2/ja
Priority to EP06075540A priority patent/EP1686626A3/en
Priority to KR10-1999-7009538A priority patent/KR100499998B1/ko
Priority to EP99903936A priority patent/EP1014452B1/en
Priority to US09/403,319 priority patent/US6700631B1/en
Priority to CNB998001732A priority patent/CN1160800C/zh
Priority to DE69931130T priority patent/DE69931130T2/de
Priority to PCT/JP1999/000818 priority patent/WO1999044242A1/ja
Priority to TW088102793A priority patent/TW412774B/zh
Publication of JPH11312811A publication Critical patent/JPH11312811A/ja
Priority to US10/235,935 priority patent/US6885389B2/en
Publication of JPH11312811A5 publication Critical patent/JPH11312811A5/ja
Publication of JP3809733B2 publication Critical patent/JP3809733B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP29621698A 1998-02-25 1998-10-02 薄膜トランジスタの剥離方法 Expired - Fee Related JP3809733B2 (ja)

Priority Applications (10)

Application Number Priority Date Filing Date Title
JP29621698A JP3809733B2 (ja) 1998-02-25 1998-10-02 薄膜トランジスタの剥離方法
DE69931130T DE69931130T2 (de) 1998-02-25 1999-02-23 Verfahren um ein dünnschicht-bauelement zu trennen
KR10-1999-7009538A KR100499998B1 (ko) 1998-02-25 1999-02-23 박막 디바이스의 박리방법, 박막 디바이스의 전사방법, 박막 디바이스, 액티브 매트릭스 기판 및 액정 표시장치
EP99903936A EP1014452B1 (en) 1998-02-25 1999-02-23 Method of detaching thin-film device
US09/403,319 US6700631B1 (en) 1998-02-25 1999-02-23 Method of separating thin-film device, method of transferring thin-film device, thin-film device, active matrix substrate, and liquid crystal display device
CNB998001732A CN1160800C (zh) 1998-02-25 1999-02-23 薄膜器件的剥离方法
EP06075540A EP1686626A3 (en) 1998-02-25 1999-02-23 Method of separating thin film device, method of transferring thin film device, thin film device, active matrix substrate and liquid crystal display device
PCT/JP1999/000818 WO1999044242A1 (fr) 1998-02-25 1999-02-23 Procede servant a detacher un composant a couche mince, procede servant a transferer un composant a couche mince, composant a couche mince, substrat a matrice active et affichage a cristaux liquides
TW088102793A TW412774B (en) 1998-02-25 1999-02-24 The stripping and reprinting methods of the thin film device
US10/235,935 US6885389B2 (en) 1998-02-25 2002-09-06 Method of separating thin film device, method of transferring thin film device, thin film device, active matrix substrate and liquid crystal display device

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP6059498 1998-02-25
JP10-60594 1998-02-25
JP29621698A JP3809733B2 (ja) 1998-02-25 1998-10-02 薄膜トランジスタの剥離方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2003410773A Division JP3849683B2 (ja) 1998-02-25 2003-12-09 薄膜トランジスタの剥離方法

Publications (3)

Publication Number Publication Date
JPH11312811A JPH11312811A (ja) 1999-11-09
JPH11312811A5 true JPH11312811A5 (enExample) 2004-11-25
JP3809733B2 JP3809733B2 (ja) 2006-08-16

Family

ID=26401671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29621698A Expired - Fee Related JP3809733B2 (ja) 1998-02-25 1998-10-02 薄膜トランジスタの剥離方法

Country Status (8)

Country Link
US (2) US6700631B1 (enExample)
EP (2) EP1014452B1 (enExample)
JP (1) JP3809733B2 (enExample)
KR (1) KR100499998B1 (enExample)
CN (1) CN1160800C (enExample)
DE (1) DE69931130T2 (enExample)
TW (1) TW412774B (enExample)
WO (1) WO1999044242A1 (enExample)

Families Citing this family (171)

* Cited by examiner, † Cited by third party
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