JP6461603B2 - チップコンデンサ、回路アセンブリ、および電子機器 - Google Patents
チップコンデンサ、回路アセンブリ、および電子機器 Download PDFInfo
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- JP6461603B2 JP6461603B2 JP2014544477A JP2014544477A JP6461603B2 JP 6461603 B2 JP6461603 B2 JP 6461603B2 JP 2014544477 A JP2014544477 A JP 2014544477A JP 2014544477 A JP2014544477 A JP 2014544477A JP 6461603 B2 JP6461603 B2 JP 6461603B2
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Description
以下では、この発明の実施の形態を、添付図面を参照して詳細に説明する。
<この発明の参考例の実施形態>
以下では、この発明の参考例の実施形態を、添付図面を参照して詳細に説明する。
<チップ部品の全体構成>
図22(a)は、この発明の参考例の実施形態に係るチップ部品の構成を説明するための模式的な斜視図であり、図22(b)は、前記チップ部品が回路基板に実装された状態を示す模式的な側面図である。図23は、図22(a)の切断面XXIII-XXIIIから見た前記チップ部品の断面図である。図24は、複合素子の電気回路図である。
<抵抗の全体構成>
図25は、前記複合素子の抵抗の平面図であり、第1配線膜、第2配線膜および抵抗回路網の平面視の構成を示す図である。
<ダイオードの全体構成>
図33は、前記複合素子のダイオードの平面図であり、図34は、図33の切断面XXXIV−XXXIVから見た前記ダイオードの断面図である。さらに、図35は、図33の切断面XXXV−XXXVから見た前記ダイオードの断面図である。
<チップ部品の製造方法>
図39は、前記チップ部品の製造工程の一例を説明するための工程図である。図40は、半導体ウエハに溝を形成するために用いられるレジストパターンの一部の模式的な平面図である。図41(a)は、前記溝が形成された後の半導体ウエハの模式的な平面図であり、図41(b)は、図41(a)における一部の拡大図である。図42A〜Cは、前記チップ部品の製造工程途中の構成を示す断面図である。図43は、ポリイミドのシートを前記半導体ウエハに貼り付ける状態を示す図解的な斜視図である。
(項1)
素子形成面を有する基板と、
前記素子形成面に互いに独立して形成された第1素子および第2素子を含み、第1外部接続電極および第2外部接続電極の2電極からなる外部接続電極を有する複合素子と、
前記第1素子の一方および他方の極として形成された第1内部電極および第2内部電極と、
前記第2素子の一方および他方の極として形成された第3内部電極および第4内部電極とを含み、
前記第1外部接続電極は前記第1内部電極および前記第3内部電極に共通に接続され、
前記第2外部接続電極は前記第2内部電極および前記第4内部電極に共通に接続されている、チップ部品。
(項2)
前記第1内部電極、前記第2内部電極、前記第3内部電極および前記第4内部電極を覆うように形成され、当該第1〜第4内部電極の一部をパッドとして露出させるパッド開口が形成された絶縁膜をさらに含み、
前記第1外部接続電極および前記第2外部接続電極は、前記絶縁膜に跨って各前記パッド開口に入り込んでいる、項1に記載のチップ部品。
(項3)
前記第1および第3内部電極用の前記パッド開口間の距離、および/または前記第2および第4内部電極用の前記パッド開口間の距離は、7μm〜10μmである、項2に記載のチップ部品。
(項4)
前記第1素子は、前記基板上に形成された薄膜抵抗体で形成された抵抗と、前記抵抗に繋がる配線膜とを含み、
前記配線膜の一部が前記第1および第2内部電極を形成している、項1〜3のいずれか一項に記載のチップ部品。
(項5)
前記薄膜抵抗体および前記配線膜の一部がヒューズ素子として用いられている、項4に記載のチップ部品。
(項6)
前記第2素子は、前記基板に形成されたダイオード接合領域を有する複数のダイオードセルと、前記ダイオードセルの一方の極に接続された第1引き出し電極と、前記ダイオードセルの他方の極に接続された第2引き出し電極とを含み、
前記第1引き出し電極の一部が前記第3内部電極を形成し、前記第2引き出し電極の一部が前記第4内部電極を形成している、項1〜5のいずれか一項に記載のチップ部品。
(項7)
前記ダイオード接合領域がpn接合領域である、項6に記載のチップ部品。
(項8)
前記基板がp型半導体基板からなり、前記p型半導体基板との間に前記pn接合領域を形成するn型拡散層が前記p型半導体基板に形成されており、
前記第2引き出し電極が前記半導体基板に電気的に接続されており、
前記第1引き出し電極が前記n型拡散層に接している、項7に記載のチップ部品。
(項9)
前記第2引き出し電極が、前記p型半導体基板に接し、AlSiからなる電極膜を含む、項8に記載のチップ部品。
(項10)
前記第1外部接続電極および前記第2外部接続電極は、Ni層と、Au層とを含み、前記Au層が最表面に露出している、項1〜9のいずれか一項に記載のチップ部品。
(項11)
前記第1外部接続電極および前記第2外部接続電極が、前記Ni層と前記Au層との間に介装されたPd層をさらに含む、項10に記載のチップ部品。
(項12)
前記基板の前記素子形成面が、コーナー部を丸めた矩形形状を有している、項1〜11のいずれか一項に記載のチップ部品。
(項13)
前記矩形形状の少なくとも一辺の途中部に凹部が形成されている、項12に記載のチップ部品。
(項14)
実装基板と、
前記実装基板に実装された項1〜13のいずれか一項に記載のチップ部品とを含む、回路アセンブリ。
(項15)
前記チップ部品が、前記実装基板にワイヤレスボンディングによって接続されている、項14に記載の回路アセンブリ。
(項16)
項14または15に記載の回路アセンブリと、
前記回路アセンブリを収容した筐体とを含む、電子機器。
2 シリコン基板
2A 素子形成面
2B 裏面
2C,2D,2E,2F 側面
2a p型領域
3 第1外部電極
3A 長辺
3B 短辺
3a 表面部分
3b 側面部分
4 第2外部電極
4A 長辺
4B 短辺
4a 表面部分
4b 側面部分
5 キャパシタ素子
7 コーナー部
9 実装基板
10 回路アセンブリ
11 ランド
12 吸着ノズル
13 半田
15 n+型不純物拡散層(下部電極)
16 トレンチ
16a 側壁面
16b 底壁面
17 ヒューズユニット
20 容量膜
20a〜20d 開口
21 上部電極膜
21A キャパシタ電極領域
21B パッド領域
21C ヒューズ領域
22 ポリシリコン膜
23 金属膜
24 パッド金属膜
25 下部電極膜
30 電極膜部分
30A 接続部
30B 主要部
30a 階段状縁部
30b 第1直線状縁部
30c 第2直線状縁部
31〜36 電極膜部分
38 レーザ光
39 カバー膜
40 パッシベーション膜
41 樹脂膜
43,44 パッド開口
45 絶縁膜
45a〜45d 開口
46 絶縁膜
46a,46b 開口
50 双方向ダイオード
501 第1ダイオード
502 第2ダイオード
51 n+型不純物拡散層
52 配線膜
52A パッド領域
53 絶縁層
54 パッド開口
60 検査用プローブ
65 キャパシタ領域
66 ダイオード領域
67 p型不純物拡散層
68 n+型不純物拡散層
69 n+型不純物拡散層
71 配線膜
71A パッド領域
72 配線膜
73 配線膜
75 n型シリコンエピタキシャル層
77 n型不純物拡散層
78 p+型不純物拡散層
79 p+型不純物拡散層
81 長辺
82 短辺
85 表面周縁
90 ポリシリコン膜
91,92 n型ポリシリコン領域
93 p型ポリシリコン領域
94 層間絶縁膜
94a〜94f 開口
95 p型ポリシリコン膜
96,97 n型拡散領域
98 第1ポリシリコン膜
98p p型領域
98n n型領域
99 第2ポリシリコン膜
102 チップコンデンサ(第2の実施形態)
103 チップコンデンサ(第3の実施形態)
104 チップコンデンサ(第4の実施形態)
105 チップコンデンサ(第5の実施形態)
106 チップコンデンサ(第6の実施形態)
107 チップコンデンサ(第7の実施形態)
108 チップコンデンサ(第8の実施形態)
109 チップコンデンサ(第9の実施形態)
110 チップコンデンサ(第10の実施形態)
111 チップコンデンサ(第11の実施形態)
112 チップコンデンサ(第12の実施形態)
C0 キャパシタ要素(基本容量素子)
C1〜C6 キャパシタ要素(調整容量素子)
F1〜F6 ヒューズ
201 チップ部品
202 半導体基板
202A 素子形成面
203 第1外部接続電極
204 第2外部接続電極
205 複合素子
206 抵抗
207 ダイオード
209 回路基板
210 凹部
211 コーナー部
214 第1配線膜
215 第2配線膜
216 カソード電極膜
217 アノード電極膜
218 パッド開口
219 パッド開口
221 抵抗体膜
222 配線膜
223 保護膜
224 樹脂膜
228 パッド開口
229 パッド開口
273 n+型領域
274 pn接合領域
277 カソードパッド
278 アノードパッド
401 スマートフォン
402 筐体
410 電子回路アセンブリ
411 配線基板
421 チップインダクタ
422 チップ抵抗器
424 チップ抵抗器
425 チップインダクタ
427 チップキャパシタ
428 チップダイオード
430 チップキャパシタ
431 チップダイオード
433 チップ抵抗器
434 チップキャパシタ
435 チップインダクタ
L1 引き出し電極
L2 引き出し電極
Claims (34)
- 基板と、
前記基板上に形成された一対の外部電極と、
前記一対の外部電極の間に接続されたキャパシタ素子と、
前記一対の外部電極の間に、前記キャパシタ素子に対して並列に接続された双方向ダイオードとを含み、
前記基板が第1導電型の半導体基板であり、
前記キャパシタ素子が、前記半導体基板内に形成された第2導電型の第1不純物拡散層からなる下部電極であって、前記一対の外部電極の一方の外部電極に電気的に接続された下部電極を含み、
前記双方向ダイオードが、前記第1不純物拡散層と、前記第1不純物拡散層から間隔を空けて前記半導体基板内に形成され、前記一対の外部電極の他方の外部電極に電気的に接続された第2導電型の第2不純物拡散層と、前記第1不純物拡散層と前記第2不純物拡散層との間に挟まれた前記半導体基板の第1導電型の領域とで構成されている、チップコンデンサ。 - 前記双方向ダイオードが、前記外部電極の直下の領域に形成されている部分を含む、請求項1に記載のチップコンデンサ。
- 前記双方向ダイオードの全部が、前記外部電極の直下の領域に形成されている、請求項1または2に記載のチップコンデンサ。
- 前記キャパシタ素子に接続された第1パッド部と、前記双方向ダイオードに接続された第2パッド部とをさらに含み、
前記一対の外部電極の一方が、前記第1パッド部および前記第2パッド部に跨がって形成され、当該第1パッド部および当該第2パッド部を電気的に接続している、請求項1〜3のいずれか一項に記載のチップコンデンサ。 - 前記第1パッド部および前記第2パッド部の間に配置され、前記第1パッド部および前記第2パッド部を分離する絶縁層をさらに含み、
前記外部電極が、前記絶縁層を跨いで前記第1パッド部および前記第2パッド部の両方に接合されている、請求項4に記載のチップコンデンサ。 - 各外部電極が、前記基板の表面および側面に跨がって形成され、前記表面を覆う表面部分および前記側面を覆う側面部分を一体的に有している、請求項1〜5のいずれか一項に記載のチップコンデンサ。
- 前記基板は、平面視において矩形状であり、
前記外部電極が、前記基板の三方の側面の前記表面側の縁部を覆うように形成されている、請求項6に記載のチップコンデンサ。 - 前記キャパシタ素子が、
前記下部電極に積層された容量膜と、
前記容量膜に積層され、前記容量膜を挟んで前記下部電極に対向し、前記一対の外部電極の他方に接続された上部電極とを含む、請求項1〜7のいずれか一項に記載のチップコンデンサ。 - 前記基板に当該基板の主面と交差する側壁面を有するトレンチが形成されており、前記容量膜が前記トレンチの側壁面に沿って形成されている、請求項8に記載のチップコンデンサ。
- 前記上部電極が、前記トレンチに埋め込まれたポリシリコン膜を含む、請求項9に記載のチップコンデンサ。
- 前記キャパシタ素子が、複数のキャパシタ要素を含み、
前記基板上に設けられ、前記複数のキャパシタ要素をそれぞれ切り離し可能に前記外部電極に接続する複数のヒューズをさらに含む、請求項1〜10のいずれか一項に記載のチップコンデンサ。 - 前記キャパシタ素子が、前記一対の外部電極の間に並列に接続された複数のキャパシタ要素を含み、
前記複数のキャパシタ要素が、
基本容量素子と、
複数の調整容量素子とを含み、
前記複数の調整容量素子が、複数のヒューズを介して、それぞれ、前記外部電極に接続されている、請求項1〜10のいずれか一項に記載のチップコンデンサ。 - 前記複数の調整容量素子が、互いに平行な短冊形状を有し、前記一対の外部電極の一方側に一端を整列させて、長さの順に配列されており、
前記基本容量素子が、前記複数の調整容量素子のうち、最短の長さの調整容量素子に隣接して前記一方の外部電極に接続される接続部と、前記接続部と一体的に、前記複数の調整容量素子を回避するように形成され、前記一対の外部電極の他方に向かうに従って幅広になる主要部とを含む、請求項12に記載のチップコンデンサ。 - 前記一対の外部電極の間に、前記キャパシタ素子に対して並列に接続された抵抗素子を含む、請求項1〜13のいずれか一項に記載のチップコンデンサ
- 請求項1〜14のいずれか一項に記載のチップコンデンサと、
前記基板の表面に対向する実装面に、前記外部電極に半田接合されたランドを有する実装基板とを含む、回路アセンブリ。 - 前記チップコンデンサが、請求項6または7に係るチップコンデンサであって、
半田が前記外部電極の前記表面部分および前記側面部分を覆うように形成されている、請求項15に記載の回路アセンブリ。 - 請求項15または16に記載の回路アセンブリと、
前記回路アセンブリを収容した筐体とを含む、電子機器。 - 基板と、
前記基板上に形成された一対の外部電極と、
前記一対の外部電極の間に接続されたキャパシタ素子と、
前記一対の外部電極の間に、前記キャパシタ素子に対して並列に接続されたダイオードとを含み、
前記基板が第1導電型の半導体基板であり、
前記キャパシタ素子が、前記半導体基板内に形成された第2導電型の第1不純物拡散層からなる下部電極であって、前記一対の外部電極の一方の外部電極に電気的に接続された下部電極を含み、
前記半導体基板には、前記第1不純物拡散層から間隔を空けて第2導電型の第2不純物拡散層が形成されており、
前記ダイオードが、前記第1不純物拡散層と、前記第1不純物拡散層と前記第2不純物拡散層との間に挟まれた前記半導体基板の第1導電型の領域とで構成されている、チップコンデンサ。 - 前記ダイオードが、前記外部電極の直下の領域に形成されている部分を含む、請求項18に記載のチップコンデンサ。
- 前記ダイオードの全部が、前記外部電極の直下の領域に形成されている、請求項18または19に記載のチップコンデンサ。
- 前記キャパシタ素子に接続された第1パッド部と、前記ダイオードに接続された第2パッド部とをさらに含み、
前記一対の外部電極の一方が、前記第1パッド部および前記第2パッド部に跨がって形成され、当該第1パッド部および当該第2パッド部を電気的に接続している、請求項18〜20のいずれか一項に記載のチップコンデンサ。 - 前記第1パッド部および前記第2パッド部の間に配置され、前記第1パッド部および前記第2パッド部を分離する絶縁層をさらに含み、
前記外部電極が、前記絶縁層を跨いで前記第1パッド部および前記第2パッド部の両方に接合されている、請求項21に記載のチップコンデンサ。 - 各外部電極が、前記基板の表面および側面に跨がって形成され、前記表面を覆う表面部分および前記側面を覆う側面部分を一体的に有している、請求項18〜22のいずれか一項に記載のチップコンデンサ。
- 前記基板は、平面視において矩形状であり、
前記外部電極が、前記基板の三方の側面の前記表面側の縁部を覆うように形成されている、請求項23に記載のチップコンデンサ。 - 前記キャパシタ素子が、
前記下部電極に積層された容量膜と、
前記容量膜に積層され、前記容量膜を挟んで前記下部電極に対向し、前記一対の外部電極の他方に接続された上部電極とを含む、請求項18〜24のいずれか一項に記載のチップコンデンサ。 - 前記基板に当該基板の主面と交差する側壁面を有するトレンチが形成されており、前記容量膜が前記トレンチの側壁面に沿って形成されている、請求項25に記載のチップコンデンサ。
- 前記上部電極が、前記トレンチに埋め込まれたポリシリコン膜を含む、請求項26に記載のチップコンデンサ。
- 前記キャパシタ素子が、複数のキャパシタ要素を含み、
前記基板上に設けられ、前記複数のキャパシタ要素をそれぞれ切り離し可能に前記外部電極に接続する複数のヒューズをさらに含む、請求項18〜27のいずれか一項に記載のチップコンデンサ。 - 前記キャパシタ素子が、前記一対の外部電極の間に並列に接続された複数のキャパシタ要素を含み、
前記複数のキャパシタ要素が、
基本容量素子と、
複数の調整容量素子とを含み、
前記複数の調整容量素子が、複数のヒューズを介して、それぞれ、前記外部電極に接続されている、請求項18〜27のいずれか一項に記載のチップコンデンサ。 - 前記複数の調整容量素子が、互いに平行な短冊形状を有し、前記一対の外部電極の一方側に一端を整列させて、長さの順に配列されており、
前記基本容量素子が、前記複数の調整容量素子のうち、最短の長さの調整容量素子に隣接して前記一方の外部電極に接続される接続部と、前記接続部と一体的に、前記複数の調整容量素子を回避するように形成され、前記一対の外部電極の他方に向かうに従って幅広になる主要部とを含む、請求項29に記載のチップコンデンサ。 - 前記一対の外部電極の間に、前記キャパシタ素子に対して並列に接続された抵抗素子を含む、請求項18〜30のいずれか一項に記載のチップコンデンサ
- 請求項18〜31のいずれか一項に記載のチップコンデンサと、
前記基板の表面に対向する実装面に、前記外部電極に半田接合されたランドを有する実装基板とを含む、回路アセンブリ。 - 前記チップコンデンサが、請求項23または24に係るチップコンデンサであって、
半田が前記外部電極の前記表面部分および前記側面部分を覆うように形成されている、請求項32に記載の回路アセンブリ。 - 請求項32または33に記載の回路アセンブリと、
前記回路アセンブリを収容した筐体とを含む、電子機器。
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US20160211077A1 (en) | 2016-07-21 |
US9288908B2 (en) | 2016-03-15 |
US10593480B2 (en) | 2020-03-17 |
WO2014069363A1 (ja) | 2014-05-08 |
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US20150305159A1 (en) | 2015-10-22 |
US20180323011A1 (en) | 2018-11-08 |
CN110504257A (zh) | 2019-11-26 |
US10026557B2 (en) | 2018-07-17 |
US20170250029A1 (en) | 2017-08-31 |
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US9685273B2 (en) | 2017-06-20 |
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