JP7427400B2 - キャパシタ - Google Patents
キャパシタ Download PDFInfo
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- JP7427400B2 JP7427400B2 JP2019176951A JP2019176951A JP7427400B2 JP 7427400 B2 JP7427400 B2 JP 7427400B2 JP 2019176951 A JP2019176951 A JP 2019176951A JP 2019176951 A JP2019176951 A JP 2019176951A JP 7427400 B2 JP7427400 B2 JP 7427400B2
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- 239000003990 capacitor Substances 0.000 title claims description 123
- 239000004020 conductor Substances 0.000 claims description 178
- 239000000463 material Substances 0.000 claims description 81
- 238000000034 method Methods 0.000 claims description 22
- 230000008018 melting Effects 0.000 claims description 9
- 238000002844 melting Methods 0.000 claims description 9
- 229910052782 aluminium Inorganic materials 0.000 claims description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 8
- 239000010410 layer Substances 0.000 description 152
- 230000015556 catabolic process Effects 0.000 description 28
- 239000011241 protective layer Substances 0.000 description 24
- 238000000605 extraction Methods 0.000 description 21
- 239000010408 film Substances 0.000 description 17
- 238000010586 diagram Methods 0.000 description 13
- 230000004888 barrier function Effects 0.000 description 11
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 9
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 9
- 239000011229 interlayer Substances 0.000 description 9
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 9
- 239000010409 thin film Substances 0.000 description 9
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- 239000010949 copper Substances 0.000 description 7
- 238000000231 atomic layer deposition Methods 0.000 description 6
- 239000010931 gold Substances 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- 238000002161 passivation Methods 0.000 description 5
- 238000007747 plating Methods 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 230000006378 damage Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000007769 metal material Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 230000007257 malfunction Effects 0.000 description 3
- 239000000155 melt Substances 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 238000009623 Bosch process Methods 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 229910052454 barium strontium titanate Inorganic materials 0.000 description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 2
- 229910002113 barium titanate Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/228—Terminals
- H01G4/252—Terminals the terminals being coated on the capacitive element
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
- H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
- H01L28/90—Electrodes with an enlarged surface, e.g. formed by texturisation having vertical extensions
- H01L28/92—Electrodes with an enlarged surface, e.g. formed by texturisation having vertical extensions made by patterning layers, e.g. by etching conductive layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
- H01G4/008—Selection of materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
- H01G4/012—Form of non-self-supporting electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/30—Stacked capacitors
- H01G4/306—Stacked capacitors made by thin film techniques
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/33—Thin- or thick-film capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/38—Multiple capacitors, i.e. structural combinations of fixed capacitors
- H01G4/385—Single unit multiple capacitors, e.g. dual capacitor in one coil
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/12—Ceramic dielectrics
- H01G4/1209—Ceramic dielectrics characterised by the ceramic dielectric material
- H01G4/1236—Ceramic dielectrics characterised by the ceramic dielectric material based on zirconium oxides or zirconates
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Semiconductor Integrated Circuits (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Description
Claims (12)
- Si基材と、
前記Si基材に設けられ、第1誘電体層、前記第1誘電体層の一方の面に設けられ第1導電材料から成る第1電極層、及び前記第1誘電体層の他方の面に設けられた第2電極層を有するMIM構造体と、
前記Si基材に設けられた第1外部電極と、
前記Si基材に設けられた第2外部電極と、
前記第1電極層と前記第1外部電極とを接続する接続導体と、を備え、
前記接続導体は、前記Si基材と接する接触部を有し、
前記第1電極層と前記第1外部電極との間の電流経路に垂直な方向における前記接続導体の断面積は、前記接触部において最小となる、
キャパシタ。 - 前記接続導体は、前記第1導電材料よりも融点が低い第2導電材料によって構成される、請求項1に記載のキャパシタ。
- 前記第2導電材料はアルミニウムである、請求項2に記載のキャパシタ。
- 前記Si基材の一面には複数のトレンチが設けられており、
前記MIM構造体は、前記複数のトレンチのうちの少なくとも一つに埋め込まれるように前記Si基材に設けられている、請求項1から請求項3のいずれか1項に記載のキャパシタ。 - 前記複数のトレンチは、前記MIM構造体が埋め込まれていない少なくとも一つの空トレンチを含み、
前記少なくとも一つの空トレンチは、前記接触部によって少なくとも部分的に覆われている、請求項4に記載のキャパシタ。 - 前記空トレンチの深さ方向における寸法は、前記MIM構造体が埋め込まれているトレンチの深さ方向における寸法より小さい、請求項5に記載のキャパシタ。
- 前記第2電極層と前記第2外部電極とを接続し、前記第1導電材料よりも融点が低い第3導電材料から成る引出導体を備える、請求項1から請求項6のいずれか1項に記載のキャパシタ。
- 前記引出導体は、前記Si基材と接触しないように設けられる、請求項7に記載のキャパシタ。
- 前記接続導体を複数備え、
前記MIM構造体は、互いに並列に接続された複数のセクションを有し、
前記複数のセクションのそれぞれに対して前記接続導体が設けられている、請求項1から請求項8のいずれか1項に記載のキャパシタ。 - 前記MIM構造体は、前記第2電極層の上に設けられた第2誘電体層、及び前記第2誘電体層の上に設けられた第3電極層を更に有し、
前記第3電極層と前記第1外部電極とを接続し、前記第3電極層を構成する材料よりも融点が低い前記第2導電材料から成る他の接続導体を備える、請求項2に記載のキャパシタ。 - 請求項1から請求項10のいずれか1項に記載のキャパシタを備える回路基板。
- 請求項11に記載の回路基板を備える電子機器。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019176951A JP7427400B2 (ja) | 2019-09-27 | 2019-09-27 | キャパシタ |
PCT/JP2020/036515 WO2021060552A1 (ja) | 2019-09-27 | 2020-09-28 | キャパシタ |
US17/762,536 US20220384113A1 (en) | 2019-09-27 | 2020-09-28 | Capacitor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019176951A JP7427400B2 (ja) | 2019-09-27 | 2019-09-27 | キャパシタ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021057374A JP2021057374A (ja) | 2021-04-08 |
JP7427400B2 true JP7427400B2 (ja) | 2024-02-05 |
Family
ID=75165270
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019176951A Active JP7427400B2 (ja) | 2019-09-27 | 2019-09-27 | キャパシタ |
Country Status (3)
Country | Link |
---|---|
US (1) | US20220384113A1 (ja) |
JP (1) | JP7427400B2 (ja) |
WO (1) | WO2021060552A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7130931B2 (ja) * | 2017-09-15 | 2022-09-06 | 株式会社三洋物産 | 遊技機 |
JP7110565B2 (ja) * | 2017-09-15 | 2022-08-02 | 株式会社三洋物産 | 遊技機 |
JP7110567B2 (ja) * | 2017-09-15 | 2022-08-02 | 株式会社三洋物産 | 遊技機 |
JP2019051170A (ja) * | 2017-09-15 | 2019-04-04 | 株式会社三洋物産 | 遊技機 |
KR20230091307A (ko) * | 2021-12-16 | 2023-06-23 | 삼성전기주식회사 | 커패시터 부품 |
WO2023182051A1 (ja) * | 2022-03-23 | 2023-09-28 | 株式会社村田製作所 | 電子部品 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009515353A (ja) | 2005-11-08 | 2009-04-09 | エヌエックスピー ビー ヴィ | 極めて高いキャパシタンス値のための集積キャパシタの配置 |
JP2013026540A (ja) | 2011-07-25 | 2013-02-04 | Renesas Electronics Corp | 半導体集積回路装置 |
WO2014069363A1 (ja) | 2012-11-02 | 2014-05-08 | ローム株式会社 | チップコンデンサ、回路アセンブリ、および電子機器 |
US20160020267A1 (en) | 2012-11-26 | 2016-01-21 | Taiwan Semiconductor Manufacturing Co., Ltd. | Low impedance high density deep trench capacitor |
JP2017513218A (ja) | 2014-03-25 | 2017-05-25 | アイピーディーアイエイ | コンデンサ構造 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS58153297A (ja) * | 1982-03-09 | 1983-09-12 | Toshiba Corp | メモリ用icのヒユ−ズ |
JPH06105764B2 (ja) * | 1986-06-20 | 1994-12-21 | 株式会社東芝 | ヒユ−ズ内蔵型半導体装置 |
US20090109582A1 (en) * | 2007-10-30 | 2009-04-30 | Jack Michael D | Method of protecting circuits using integrated array fuse elements and process for fabrication |
TWI400731B (zh) * | 2008-08-29 | 2013-07-01 | Ind Tech Res Inst | 電容元件及其製造方法 |
WO2019239701A1 (ja) * | 2018-06-15 | 2019-12-19 | 株式会社村田製作所 | Crスナバ素子 |
JP7179634B2 (ja) * | 2019-02-07 | 2022-11-29 | 株式会社東芝 | コンデンサ及びコンデンサモジュール |
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2019
- 2019-09-27 JP JP2019176951A patent/JP7427400B2/ja active Active
-
2020
- 2020-09-28 US US17/762,536 patent/US20220384113A1/en active Pending
- 2020-09-28 WO PCT/JP2020/036515 patent/WO2021060552A1/ja active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009515353A (ja) | 2005-11-08 | 2009-04-09 | エヌエックスピー ビー ヴィ | 極めて高いキャパシタンス値のための集積キャパシタの配置 |
JP2013026540A (ja) | 2011-07-25 | 2013-02-04 | Renesas Electronics Corp | 半導体集積回路装置 |
WO2014069363A1 (ja) | 2012-11-02 | 2014-05-08 | ローム株式会社 | チップコンデンサ、回路アセンブリ、および電子機器 |
US20160020267A1 (en) | 2012-11-26 | 2016-01-21 | Taiwan Semiconductor Manufacturing Co., Ltd. | Low impedance high density deep trench capacitor |
JP2017513218A (ja) | 2014-03-25 | 2017-05-25 | アイピーディーアイエイ | コンデンサ構造 |
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Publication number | Publication date |
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US20220384113A1 (en) | 2022-12-01 |
JP2021057374A (ja) | 2021-04-08 |
WO2021060552A1 (ja) | 2021-04-01 |
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