JP5420127B2 - 低応力ダイ・アタッチメント - Google Patents
低応力ダイ・アタッチメント Download PDFInfo
- Publication number
- JP5420127B2 JP5420127B2 JP2000605453A JP2000605453A JP5420127B2 JP 5420127 B2 JP5420127 B2 JP 5420127B2 JP 2000605453 A JP2000605453 A JP 2000605453A JP 2000605453 A JP2000605453 A JP 2000605453A JP 5420127 B2 JP5420127 B2 JP 5420127B2
- Authority
- JP
- Japan
- Prior art keywords
- mass
- mils
- package
- preferred
- bond pad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/02—Housings
- G01P1/023—Housings for acceleration measuring devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
- B81B3/001—Structures having a reduced contact area, e.g. with bumps or with a textured surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0067—Mechanical properties
- B81B3/0072—For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0009—Structural features, others than packages, for protecting a device against environmental influences
- B81B7/0016—Protection against shocks or vibrations, e.g. vibration damping
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
- G01D11/24—Housings ; Casings for instruments
- G01D11/245—Housings for sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
- G01D18/008—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00 with calibration coefficients stored in memory
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
- G01V1/02—Generating seismic energy
- G01V1/04—Details
- G01V1/047—Arrangements for coupling the generator to the ground
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
- G01V1/02—Generating seismic energy
- G01V1/04—Details
- G01V1/047—Arrangements for coupling the generator to the ground
- G01V1/053—Arrangements for coupling the generator to the ground for generating transverse waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
- G01V1/02—Generating seismic energy
- G01V1/104—Generating seismic energy using explosive charges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
- G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
- G01V1/18—Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
- G01V1/181—Geophones
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
- G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
- G01V1/18—Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
- G01V1/186—Hydrophones
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0235—Accelerometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N2001/021—Correlating sampling sites with geographical information, e.g. GPS
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/4847—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
- H01L2224/48472—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond the other connecting portion not on the bonding area also being a wedge bond, i.e. wedge-to-wedge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
- H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
Description
本開示は一般に、マスをパッケージに取り付ける方法に関し、詳細には、応力を最小化する目的でマスをパッケージに取り付けることに関する。
マスをパッケージに取り付ける際には、マスに、熱によって誘発された収縮/膨張効果ならびにその他のパッケージ応力効果が生じる。エラストマーまたはエポキシ・ベースの取付け材料はこの熱誘発性収縮/膨張効果を最小化するが、マスの耐衝撃性を制限し、ガスを放出するため真空封止を困難にする。機械的取付けプロセスは、マスに生じる熱誘発性収縮/膨張効果を最小化するが、複雑である。
パッケージ、該パッケージに結合されたマス、該マスを前記パッケージに取り付ける1つまたは複数の弾性カップリングを含む装置を提供する。
マスをパッケージに結合する方法であって、1箇所またはそれより多い異なる箇所でマスをパッケージに弾性的に取り付けることを含む方法を提供する。
まず図1Aから1Eを参照する。マスをパッケージに弾性的に結合するシステムの一実施形態100は、パッケージ102、マス104、1つまたは複数のボンド・パッド106、1つまたは複数の弾性カップリング108、および1つまたは複数の電気接続112を含むことが好ましい。
代替実施形態では弾性カップリング150aおよび150bがさらに、マス104をパッケージ102に電気的に結合する。
代替実施形態では弾性カップリング260aおよび260bがさらに、マス204をパッケージ202に電気的に結合する。
代替実施形態では弾性カップリング362aおよび362bがさらに、マス304をパッケージ302に電気的に結合する。
代替実施形態では弾性カップリング470aおよび470bがさらに、マス404をパッケージ402に電気的に結合する。
代替実施形態では、弾性カップリング566および568もまたマス504をパッケージ502に電気的に結合するかもしれない。
第1の部材628は1つまたは複数の平行な平面を含むことが好ましい。好ましい実施形態では、第1の部材628は平行かつ平坦な上面634を含む。第2の部材630は1つまたは複数の平行な平面を含むことが好ましい。好ましい実施形態では、第2の部材630は平行かつ平坦な中間面636を含む。第3の部材632は1つまたは複数の平行な平面を含むことが好ましい。好ましい実施形態では、第3の部材632は平行かつ平坦な下面638を含む。マス604の平行かつ平坦な下面638は、第1の側面640、第2の側面642、第3の側面644、および第4の側面646を含むことが好ましい。第1の側面640および第3の側面644は互いにほぼ平行であることが好ましく、第2の側面642および第4の側面646は互いにほぼ平行であることが好ましく、そして第1の側面640および第3の側面644にほぼ直角あることが好ましい。
代替実施形態では、弾性カップリング676および678もまたマス604をパッケージ602に電気的に結合するかもしれない。
Claims (34)
- パッケージと、
前記パッケージに結合するマスと、
前記マスが、
下面と、
活性領域とを含み、
前記マスは、微細加工デバイス、集積回路チップ、及び光学デバイスのうちの少なくとも一つからなり、
一つまたは複数のはんだプリフォームと、
前記はんだプリフォームは、前記マスの下面と前記パッケージの底面の間に配置され、熱応力を減少させるために前記マスと前記パッケージとの間に、前記はんだプリフォームの有する弾性に応じた弾性的結合を作り出すように、前記はんだプリフォームの下面及び上面の各々を前記パッケージの底面及び前記マスの下面に取り付けるための一つ又は複数の部材であり、前記活性領域は、前記取り付け点から離間し、
前記マスの滑動を支持するために前記パッケージに結合した一つ又は複数の耐熱性材料製滑動支持体を含み、
前記パッケージの底面と前記マスの下面は前記滑動支持体を介して離間し、
前記パッケージの側壁と前記滑動支持体の間に距離を有することを特徴とする、
熱応力に対する保護を可能とする装置。
- 前記パッケージが前記マスを受けるためのキャビティを含むことを特徴とする、請求項1に記載の装置。
- 前記パッケージが前記はんだプリフォームを受けるためのくぼみを有することを特徴とする、請求項1及び2のいずれかに記載の装置。
- 前記マスが、前記マスを前記パッケージに結合させるための一つ又は複数の結合パッドを含むことを特徴とする、請求項1乃至3のいずれかに記載の装置。
- 前記結合パッドの俯瞰断面形状が、
矩形、楕円形、三連楕円形、八連楕円形、波状辺付き矩形、8つ切りパイウェッジ形、中空8つ切りパイウェッジ形、9円形、星形及び日輪形、からなるグループから選択されることを特徴とする、請求項4に記載の装置。
- 前記マスが、一つ又は複数の受動領域を含み、前記結合パッドが前記受動領域内に位置づけられることを特徴とする、請求項4及び5のうちのいずれかに記載の装置。
- 前記マスが、さらに第1の受動領域を含み、前記結合パッドが前記第1の受動領域内に位置づけられることを特徴とする、請求項4乃至6のいずれかに記載の装置。
- 前記第1の受動領域が、前記マスの一端部に配置されることを特徴とする、請求項7に記載の装置。
- 前記マスがさらに、第1の受動領域と第2の受動領域とを含み、
前記結合パッドが、前記第1の受動領域及び第2の受動領域に配置されることを特徴とする、請求項7及び8のうちのいずれかに記載の装置。
- 前記第1の受動領域が前記マスの一端部に配置され、前記第2の受動領域が前記マスの反対側の端部に配置されることを特徴とする、請求項9に記載の装置。
- 前記マスがさらに、前記第1の受動領域と第1の活性領域とを含み、
前記結合パッドが、前記第1の受動領域及び前記第1の活性領域とに配置されることを特徴とする、請求項4乃至6のいずれかに記載の装置。
- 前記第1の受動領域が前記マスの一端部に配置され、
前記第1の活性領域が前記マスの反対側の端部に配置されることを特徴とする、請求項11に記載の装置。
- 前記マスがさらに、活性領域を含み、
前記結合パッドが、前記活性領域内に配置されることを特徴とする、請求項4乃至6のいずれかに記載の装置。
- 前記結合パッドが、前記活性領域の中心近傍に配置されることを特徴とする、請求項13に記載の装置。
- 前記はんだプリフォームが、
矩形、円形のうちから選択される断面形状を有することを特徴とする、 請求項1乃至14に記載の装置。
- 前記はんだプリフォームが、前記パッケージの一端部近傍に配置されることを特徴とする、請求項1乃至15のいずれかに記載の装置。
- 前記はんだプリフォームが、前記パッケージの中心近傍に配置されることを特徴とする、請求項1乃至15のいずれかに記載の装置。
- 前記一つ又は複数のはんだプリフォームが、一つ又は複数の第1のはんだプリフォームと一つ又は複数の第2のはんだプリフォームであり、
前記第1のはんだプリフォームが、前記パッケージの一端部近傍に配置されており、
前記第2のはんだプリフォームが、前記パッケージの反対側の端部近傍に配置されていることを特徴とする、請求項1乃至15のいずれかに記載の装置。
- 前記滑動支持体の断面形状が、正方形、円形、三角形及び矩形からなるグループから選択されることを特徴とする、請求項1乃至18のいずれかに記載の装置。
- 前記パッケージがさらに、前記はんだプリフォームを支持する台座をさらに含むことを特徴とする、請求項1に記載の装置。
- 前記はんだプリフォームが、前記マスを前記パッケージに電気的に結合するように適合されている、請求項1乃至20に記載の装置。
- 熱応力の効果を低減させるために、活性領域を有するマスをパッケージに結合させる方法であり、前記マスが微細加工デバイス、集積回路チップ、及び光学デバイスのうちの少なくとも一つからなり、
該方法が、
前記パッケージの底面上に、一つ又は複数のはんだプリフォーム、及び、前記マスの滑動を支持するために前記パッケージに一つ又は複数の耐熱性材料製滑動支持体を結合するステップと、次いで、
前記一つ又は複数のはんだプリフォームを介して、前記マスの下面の少なくとも一つの点を前記パッケージに取り付け、前記マスと前記パッケージとの間に前記プリフォームの有する弾性に応じた弾性的結合を作り出すステップとを含み、
前記活性領域の少なくとも一部分が、前記取り付け点から離間しており、及び
前記パッケージの底面と前記マスの下面は前記滑動支持体を介して離間し、
前記パッケージの側壁と前記滑動支持体の間に距離を有する
熱応力を減ずるために活性領域を有するマスをパッケージに結合させる方法。
- 前記マスを取り付けるステップが、前記マスを複数の場所に取り付けるステップをさらに含む、請求項22に記載の方法。
- 前記マスが、受動領域を含み、前記マスを取り付けるステップが、前記受動領域を前記パッケージに取り付けるステップをさらに含む、請求項22及び23のいずれかに記載の方法。
- 前記受動領域が、前記マスの一端部に配置されることを特徴とする、請求項24に記載の方法。
- 前記マスを取り付けるステップが、前記活性領域を前記パッケージに取り付けることを含むことを特徴とする、請求項22乃至25のいずれかに記載の方法。
- 前記活性領域を取り付けるステップが、前記活性領域の中心近傍を前記パッケージに取り付けることを含むことを特徴とする、請求項26に記載の方法。
- 前記マスが、第1の受動領域と第2の受動領域とを含み、
前記マスを取り付けるステップが、前記第1の受動領域を前記パッケージに取り付け、
前記第2の受動領域を前記パッケージに取り付けること含むことを特徴とする、請求項22に記載の方法。
- 前記第1の受動領域が、前記マスの一端部に配置され、前記第2の受動領域が、前記マスの反対側の端部に配置されることを特徴とする、請求項28に記載の方法。
- 前記受動領域が、前記マスの一端部にあり、前記活性領域が、前記マスの反対側の端部にあることを特徴とする、請求項26に記載の方法。
- 前記マスを取り付けるステップが、前記マス内の応力を誘発することなくして、前記マスが膨張し、収縮することを許容するステップを含む、請求項22乃至30のいずれかに記載の方法。
- 前記マスを取り付けるステップが、前記マス内の応力を誘発することなくして、前記パッケージの膨張及び収縮を提供するステップをさらに含む、請求項22乃至31のいずれかに記載の方法。
- 一つ又は複数の異なる場所において、前記マスをスライド可能に支持するステップをさらに含む、請求項22乃至32のいずれかに記載の方法。
- 一つ又は複数の異なる場所において、前記マスを前記パッケージと電気的に結合するステップをさらに含む、請求項22乃至33のいずれかに記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12507699P | 1999-03-17 | 1999-03-17 | |
US60/125,076 | 1999-03-17 | ||
PCT/US2000/006832 WO2000056132A1 (en) | 1999-03-17 | 2000-03-15 | Low stress die attachment |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011220255A Division JP2012004602A (ja) | 1999-03-17 | 2011-10-04 | 低応力ダイ・アタッチメント |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2002539632A JP2002539632A (ja) | 2002-11-19 |
JP2002539632A5 JP2002539632A5 (ja) | 2007-05-10 |
JP5420127B2 true JP5420127B2 (ja) | 2014-02-19 |
Family
ID=22418086
Family Applications (5)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000605453A Expired - Fee Related JP5420127B2 (ja) | 1999-03-17 | 2000-03-15 | 低応力ダイ・アタッチメント |
JP2000605219A Expired - Lifetime JP5078196B2 (ja) | 1999-03-17 | 2000-03-16 | センサの設計およびプロセス |
JP2000605177A Pending JP2003521675A (ja) | 1999-03-17 | 2000-03-16 | センサ |
JP2000605162A Expired - Fee Related JP5008219B2 (ja) | 1999-03-17 | 2000-03-17 | 統合多軸センサ・アセンブリおよびパッケージ化 |
JP2011220255A Pending JP2012004602A (ja) | 1999-03-17 | 2011-10-04 | 低応力ダイ・アタッチメント |
Family Applications After (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000605219A Expired - Lifetime JP5078196B2 (ja) | 1999-03-17 | 2000-03-16 | センサの設計およびプロセス |
JP2000605177A Pending JP2003521675A (ja) | 1999-03-17 | 2000-03-16 | センサ |
JP2000605162A Expired - Fee Related JP5008219B2 (ja) | 1999-03-17 | 2000-03-17 | 統合多軸センサ・アセンブリおよびパッケージ化 |
JP2011220255A Pending JP2012004602A (ja) | 1999-03-17 | 2011-10-04 | 低応力ダイ・アタッチメント |
Country Status (9)
Country | Link |
---|---|
US (2) | US6861587B1 (ja) |
EP (11) | EP1847850B1 (ja) |
JP (5) | JP5420127B2 (ja) |
AT (3) | ATE355728T1 (ja) |
AU (8) | AU3730700A (ja) |
CA (7) | CA2365886A1 (ja) |
DE (4) | DE60033643T2 (ja) |
NO (7) | NO335756B1 (ja) |
WO (8) | WO2000055648A1 (ja) |
Families Citing this family (89)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040105533A1 (en) * | 1998-08-07 | 2004-06-03 | Input/Output, Inc. | Single station wireless seismic data acquisition method and apparatus |
US6725164B1 (en) | 1999-03-17 | 2004-04-20 | Input/Output, Inc. | Hydrophone assembly |
US6347594B1 (en) * | 2000-01-28 | 2002-02-19 | Deere & Company | Narrow profile opener capable of high speed operation |
JP2002257847A (ja) * | 2001-02-28 | 2002-09-11 | Matsushita Electric Ind Co Ltd | 加速度センサ |
US6814179B2 (en) * | 2001-05-25 | 2004-11-09 | Input/Output, Inc. | Seismic sensing apparatus and method with high-g shock isolation |
US7870788B2 (en) * | 2002-01-25 | 2011-01-18 | Kinemetrics, Inc. | Fabrication process and package design for use in a micro-machined seismometer or other device |
GB2395305B (en) | 2002-11-15 | 2006-03-22 | Westerngeco Seismic Holdings | Processing seismic data |
US20040145613A1 (en) * | 2003-01-29 | 2004-07-29 | Stavely Donald J. | User Interface using acceleration for input |
WO2004086094A1 (en) * | 2003-03-26 | 2004-10-07 | Westergeco Seismic Holdings Limited | Processing seismic data representative of the acceleration wavefield |
DE10322278B4 (de) * | 2003-05-16 | 2014-06-18 | Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG | Sensorsimulator zum Test von Messumformern |
US7310287B2 (en) | 2003-05-30 | 2007-12-18 | Fairfield Industries Incorporated | Method and apparatus for seismic data acquisition |
US8228759B2 (en) | 2003-11-21 | 2012-07-24 | Fairfield Industries Incorporated | System for transmission of seismic data |
US7124028B2 (en) | 2003-11-21 | 2006-10-17 | Fairfield Industries, Inc. | Method and system for transmission of seismic data |
US7225662B2 (en) * | 2004-08-27 | 2007-06-05 | Schlumberger Technology Corporation | Geophone calibration technique |
US20060133202A1 (en) * | 2004-12-22 | 2006-06-22 | Tenghamn Stig R L | Motion sensors in a marine seismic streamer |
US7026547B1 (en) * | 2005-01-21 | 2006-04-11 | Infineon Technologies Ag | Semiconductor device and a method for fabricating a semiconductor device |
JP2006214898A (ja) * | 2005-02-04 | 2006-08-17 | Seiko Epson Corp | 圧電デバイス及び電子機器 |
WO2006127776A1 (en) * | 2005-05-25 | 2006-11-30 | Northrop Grumman Corporation | Metal electrodes for elimination of spurious charge effects in accelerometers and other mems devices |
US7243544B2 (en) * | 2005-06-16 | 2007-07-17 | Honeywell International Inc. | Passive and wireless acoustic wave accelerometer |
US20070079656A1 (en) * | 2005-10-11 | 2007-04-12 | Honeywell International Inc. | Micro-machined acoustic wave accelerometer |
JP2007127607A (ja) * | 2005-11-07 | 2007-05-24 | Mitsutoyo Corp | センサブロック |
GB2479490B (en) * | 2006-04-13 | 2011-11-16 | Tiax Llc | An orientation sensor system |
US7366055B2 (en) * | 2006-05-05 | 2008-04-29 | Optoplan As | Ocean bottom seismic sensing system |
US8064286B2 (en) * | 2006-05-05 | 2011-11-22 | Optoplan As | Seismic streamer array |
DE102006030616A1 (de) | 2006-07-03 | 2008-01-17 | Valeo Schalter Und Sensoren Gmbh | Schnittstellenvorrichtung |
DE102007013413A1 (de) * | 2007-03-20 | 2008-10-09 | GeoForschungsZentrum Potsdam Stiftung des öffentlichen Rechts | Seismische Quelle mit adaptiver Regelung und entsprechendes Verfahren |
US8136383B2 (en) * | 2007-08-28 | 2012-03-20 | Westerngeco L.L.C. | Calibrating an accelerometer |
CA2996790C (en) | 2007-09-21 | 2022-03-08 | Fairfield Industries, Inc. | Method and apparatus for correcting the timing function in a nodal seismic data acquisition unit |
US8605543B2 (en) * | 2007-09-21 | 2013-12-10 | Fairfield Industries Incorporated | Method and apparatus for correcting the timing function in a nodal seismic data acquisition unit |
US20090210101A1 (en) * | 2008-02-15 | 2009-08-20 | Scott Allan Hawkins | Electronic dice |
CN103064109B (zh) * | 2008-11-04 | 2017-07-18 | 费尔菲尔德工业公司 | 用于校正节点地震数据采集单元中的计时功能的方法和装置 |
US8131494B2 (en) * | 2008-12-04 | 2012-03-06 | Baker Hughes Incorporated | Rotatable orientation independent gravity sensor and methods for correcting systematic errors |
US8117888B2 (en) * | 2009-02-11 | 2012-02-21 | Perception Digital Limited | Method and apparatus of improving accuracy of accelerometer |
US8514655B2 (en) * | 2009-11-12 | 2013-08-20 | Schlumberger Technology Corporation | Method and apparatus for measuring a hydrophone parameter |
JP2011112392A (ja) * | 2009-11-24 | 2011-06-09 | Panasonic Electric Works Co Ltd | 加速度センサ |
US9261530B2 (en) | 2009-11-24 | 2016-02-16 | Panasonic Intellectual Property Management Co., Ltd. | Acceleration sensor |
JP2011112390A (ja) * | 2009-11-24 | 2011-06-09 | Panasonic Electric Works Co Ltd | 加速度センサ |
US8614928B2 (en) * | 2009-12-31 | 2013-12-24 | Wireless Seismic, Inc. | Wireless data acquisition system and method using self-initializing wireless modules |
US20120002504A1 (en) * | 2010-03-01 | 2012-01-05 | Everhard Muyzert | Gravity measurements in marine, land and/or seabed seismic applications |
US9297923B2 (en) * | 2010-03-01 | 2016-03-29 | Westerngeco L.L.C. | Gravity measurements using seismic streamers |
CN102770770B (zh) * | 2010-03-08 | 2014-10-15 | 阿尔卑斯电气株式会社 | 物理量传感器 |
WO2011111540A1 (ja) * | 2010-03-08 | 2011-09-15 | アルプス電気株式会社 | 物理量センサ |
CN101793524B (zh) * | 2010-03-26 | 2012-05-30 | 中北大学 | 一种车载mimu输出信息解算方法 |
US9010170B2 (en) | 2010-08-16 | 2015-04-21 | Westerngeco L.L.C. | Method and apparatus to test an accelerometer |
US9217805B2 (en) | 2010-10-01 | 2015-12-22 | Westerngeco L.L.C. | Monitoring the quality of particle motion data during a seismic acquisition |
US8639442B2 (en) | 2010-11-23 | 2014-01-28 | Westerngeco L.L.C. | Identifying invalid seismic data |
EP2673661B1 (en) * | 2011-02-07 | 2022-08-03 | ION Geophysical Corporation | Method and apparatus for sensing underwater signals |
US8843345B2 (en) | 2011-06-20 | 2014-09-23 | Invensense, Inc. | Motion determination |
EP2726400A4 (en) * | 2011-06-30 | 2015-03-04 | Hewlett Packard Development Co | CALIBRATION OF MEMS SENSORS |
US8577640B2 (en) | 2011-08-17 | 2013-11-05 | Invensense, Inc. | Magnetometer bias and anomaly detector |
US9683865B2 (en) | 2012-01-26 | 2017-06-20 | Invensense, Inc. | In-use automatic calibration methodology for sensors in mobile devices |
GB2513785B (en) | 2012-03-08 | 2017-09-13 | Shell Int Research | Integrated seismic monitoring system and method |
GB2514047B (en) | 2012-03-08 | 2016-05-11 | Shell Int Research | Seismic cable handling system and method |
DE102012014407A1 (de) * | 2012-07-19 | 2014-01-23 | Wabco Gmbh | Vorrichtung zur Erfassung und Verarbeitung von Sensormesswerten und/oder zur Steuerung von Aktuatoren |
EP2690468B1 (en) * | 2012-07-27 | 2019-03-27 | Sercel | A streamer for seismic prospection comprising tilt compensation of directional sensors |
CN102830251B (zh) * | 2012-09-04 | 2013-12-18 | 中国兵器工业集团第二一四研究所苏州研发中心 | 晶圆级单支点电容式加速度计性能参数在线评估装置 |
US9321630B2 (en) | 2013-02-20 | 2016-04-26 | Pgs Geophysical As | Sensor with vacuum-sealed cavity |
US9400337B2 (en) | 2013-03-15 | 2016-07-26 | L-3 Communications Corporation | Beam accelerometer |
CN103278846B (zh) * | 2013-06-03 | 2018-03-02 | 北京京援伟达技术有限公司 | 微震记录仪、微震信号采集去噪方法和微震信号采集方法 |
US10273147B2 (en) | 2013-07-08 | 2019-04-30 | Motion Engine Inc. | MEMS components and method of wafer-level manufacturing thereof |
EP3028007A4 (en) | 2013-08-02 | 2017-07-12 | Motion Engine Inc. | Mems motion sensor and method of manufacturing |
US20160229684A1 (en) * | 2013-09-24 | 2016-08-11 | Motion Engine Inc. | Mems device including support structure and method of manufacturing |
US9772220B1 (en) | 2013-12-06 | 2017-09-26 | Harris Corporation | Hydrophone |
DE102013114140A1 (de) * | 2013-12-16 | 2015-06-18 | Endress + Hauser Wetzer Gmbh + Co. Kg | Messfühlergehäuse und Messfühleranordnung mit einem Messfühlergehäuse |
WO2015101644A1 (en) * | 2013-12-30 | 2015-07-09 | Pgs Geophysical As | Method for calibrating the far-field acoustic output of a marine vibrator |
WO2015103688A1 (en) | 2014-01-09 | 2015-07-16 | Motion Engine Inc. | Integrated mems system |
ES2913339T3 (es) * | 2014-01-31 | 2022-06-01 | Draka Elevator Products Inc | Dispositivo sensor de detección sísmica para equipo de transporte vertical |
CN103852784B (zh) * | 2014-03-12 | 2016-12-07 | 北京矿冶研究总院 | 一种提高矿用微震检波器信噪比的方法 |
US20170030788A1 (en) | 2014-04-10 | 2017-02-02 | Motion Engine Inc. | Mems pressure sensor |
WO2015184531A1 (en) | 2014-06-02 | 2015-12-10 | Motion Engine Inc. | Multi-mass mems motion sensor |
EP3164683B1 (en) | 2014-07-02 | 2023-02-22 | The John Hopkins University | Photodetection circuit |
CN105319597B (zh) * | 2014-07-31 | 2018-05-08 | 中国石油化工股份有限公司 | 一种井中地震接收系统数据记录方法 |
CA3004760A1 (en) | 2014-12-09 | 2016-06-16 | Motion Engine Inc. | 3d mems magnetometer and associated methods |
AU2016206738A1 (en) | 2015-01-14 | 2017-08-10 | Ion Geophysical Corporation | Ocean sensor system |
WO2016112463A1 (en) | 2015-01-15 | 2016-07-21 | Motion Engine Inc. | 3d mems device with hermetic cavity |
DE102015103485A1 (de) | 2015-03-10 | 2016-09-15 | Endress + Hauser Gmbh + Co. Kg | MEMS-Sensor, insb. Drucksensor |
CN108431637B (zh) | 2015-10-30 | 2021-04-13 | 离子地球物理学公司 | 多轴单质量体加速度计 |
US10161956B2 (en) | 2016-04-25 | 2018-12-25 | Honeywell International Inc. | Reducing bias in an accelerometer via a pole piece |
MX2019000532A (es) | 2016-07-12 | 2019-09-13 | Bp Exploration Operating Co Ltd | Sistema y metodo para la correccion de respuesta del sensor sismico. |
TWI639810B (zh) * | 2017-09-20 | 2018-11-01 | 和碩聯合科技股份有限公司 | 重力感測器的校準方法 |
CN109669055B (zh) * | 2017-10-13 | 2021-04-27 | 航天科工惯性技术有限公司 | 振动整流误差试验采集电路及具有其的采集系统 |
CN108168774B (zh) * | 2017-12-27 | 2020-01-14 | 中国航发四川燃气涡轮研究院 | 一种空间矢量力校准方法 |
TWI670475B (zh) * | 2018-04-11 | 2019-09-01 | 逸奇科技股份有限公司 | 多軸力規與其製造方法 |
DE102018211755A1 (de) * | 2018-07-13 | 2020-01-16 | Infineon Technologies Ag | Amplitudenerfassung, amplitudenregelung und richtungserfassung einer schwingung eines schwingkörpers |
GB2575694A (en) | 2018-07-20 | 2020-01-22 | Atlantic Inertial Systems Ltd | Sensor packages |
US11204365B2 (en) * | 2018-09-13 | 2021-12-21 | Ion Geophysical Corporation | Multi-axis, single mass accelerometer |
US11693020B2 (en) * | 2018-11-06 | 2023-07-04 | Rohm Co., Ltd. | Accelerometer having a root-mean-square (RMS) output |
US20230022244A1 (en) * | 2020-12-18 | 2023-01-26 | VK Integrated Systems, Inc. | Distributed Sensor Inertial Measurement Unit |
EP4080168A1 (en) * | 2021-04-20 | 2022-10-26 | Melexis Technologies NV | Sensor interfaces for functional safety applications |
Family Cites Families (121)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US100884A (en) * | 1870-03-15 | Improvement in torpedoes and cartridges | ||
US3244099A (en) * | 1963-11-12 | 1966-04-05 | Pan American Petroleum Corp | Controlled velocity explosive charge for seismic exploration |
US3289583A (en) * | 1965-04-21 | 1966-12-06 | Pan American Petroleum Corp | Explosive charge |
GB1272804A (en) * | 1969-08-13 | 1972-05-03 | Ici Ltd | Seismic prospecting |
US3698316A (en) * | 1970-12-18 | 1972-10-17 | Du Pont | Detonating fuse of petn-polyethylacrylate |
FR2181451B1 (ja) * | 1972-04-25 | 1977-12-23 | France Etat | |
US3863192A (en) * | 1973-01-24 | 1975-01-28 | Irving R Grey | Waterproof mechanically protected sensor package and method of installation |
US3877313A (en) * | 1973-07-23 | 1975-04-15 | Singer Co | Electrostatic accelerometer |
US4188816A (en) * | 1974-11-29 | 1980-02-19 | Sanders Associates, Inc. | Apparatus and method for performing inertial measurements using translational acceleration transducers and for calibrating translational acceleration transducers |
US4034801A (en) * | 1975-04-14 | 1977-07-12 | Robert J. Sigel, Inc. | Optimum environmental control system for a building |
JPS527676A (en) * | 1975-07-08 | 1977-01-20 | Seiko Epson Corp | Semiconductor integrated circuit |
US4068208A (en) * | 1975-07-14 | 1978-01-10 | Texas Instruments Incorporated | Marine streamer position determination system |
US4206451A (en) * | 1975-11-05 | 1980-06-03 | Honeywell Inc. | Intrusion detection system |
US4019094A (en) * | 1975-12-19 | 1977-04-19 | General Electric Company | Static control shorting clip for semiconductor package |
CA1039397A (en) * | 1976-11-24 | 1978-09-26 | Huntec (70) Limited | Heave compensation system |
US4210897A (en) * | 1976-12-06 | 1980-07-01 | Huntec (70) Limited | Heave compensation system |
US4253164A (en) * | 1978-10-30 | 1981-02-24 | Western Geophysical Co. Of America | Multi-purpose seismic transducer |
FR2454103A1 (fr) * | 1979-04-11 | 1980-11-07 | Sagem | Perfectionnements aux accelerometres pendulaires asservis |
JPS566134A (en) * | 1979-06-28 | 1981-01-22 | Nissan Motor Co Ltd | Diagnostic unit of controller for car |
US4284006A (en) * | 1979-08-13 | 1981-08-18 | Davis Explosive Sources, Inc. | Linear explosive charge with constant detonation velocity and synchronous booster charges |
FR2470501A1 (fr) * | 1979-11-22 | 1981-05-29 | France Etat | Equipement d'essai de televiseur recepteur de teletexte |
US4300205A (en) * | 1980-04-07 | 1981-11-10 | Acf Industries, Inc. | Automative engine simulating apparatus |
US4437243A (en) * | 1981-02-20 | 1984-03-20 | Amf Incorporated | Gyroscopic instrument |
US4437175A (en) * | 1981-11-20 | 1984-03-13 | Shell Oil Company | Marine seismic system |
JPS6038839A (ja) * | 1983-08-12 | 1985-02-28 | Hitachi Ltd | フリツプチツプ型半導体装置 |
US4912471A (en) * | 1983-11-03 | 1990-03-27 | Mitron Systems Corporation | Interrogator-responder communication system |
US4616320A (en) * | 1984-03-12 | 1986-10-07 | Teledyne Industries Inc. | Seismic strong-motion recorder |
GB8410631D0 (en) * | 1984-04-26 | 1984-05-31 | Hotforge Ltd | Explosive cutting device |
EP0166813B1 (de) * | 1984-06-29 | 1990-08-29 | Siemens Aktiengesellschaft | Überwachungseinrichtung |
US4615752A (en) * | 1984-11-23 | 1986-10-07 | Ireco Incorporated | Methods of pumping and loading emulsion slurry blasting compositions |
FR2584235B1 (fr) * | 1985-06-26 | 1988-04-22 | Bull Sa | Procede de montage d'un circuit integre sur un support, dispositif en resultant et son application a une carte a microcircuits electroniques |
US4922756A (en) | 1988-06-20 | 1990-05-08 | Triton Technologies, Inc. | Micro-machined accelerometer |
DE3622632C2 (de) * | 1986-07-05 | 1995-11-30 | Fichtel & Sachs Ag | Elektronisches Gerät zur Messung und Anzeige der Geschwindigkeit und weiterer Daten bei einem Fahrrad |
US4805197A (en) * | 1986-12-18 | 1989-02-14 | Lecroy Corporation | Method and apparatus for recovering clock information from a received digital signal and for synchronizing that signal |
US4841772A (en) * | 1987-12-03 | 1989-06-27 | University Of Maryland, College Park | Three-axis superconducting gravity gradiometer |
JPH01152637A (ja) * | 1987-12-09 | 1989-06-15 | Nec Corp | 半導体素子の実装方法 |
US4932261A (en) | 1988-06-20 | 1990-06-12 | Triton Technologies, Inc. | Micro-machined accelerometer with tilt compensation |
US5101669A (en) * | 1988-07-14 | 1992-04-07 | University Of Hawaii | Multidimensional force sensor |
US5060504A (en) * | 1988-09-23 | 1991-10-29 | Automotive Systems Laboratory, Inc. | Self-calibrating accelerometer |
DE68920956T2 (de) * | 1988-11-15 | 1995-09-21 | Kenwood Corp | Lautsprecher-Dämpfungsanordnung. |
US5228341A (en) * | 1989-10-18 | 1993-07-20 | Hitachi, Ltd. | Capacitive acceleration detector having reduced mass portion |
JPH03134552A (ja) * | 1989-10-20 | 1991-06-07 | Hitachi Ltd | 自己較正機能付検出装置 |
US5294829A (en) * | 1990-01-26 | 1994-03-15 | Sgs-Thomson Microelectronics, Inc. | IC package having direct attach backup battery |
US4999735A (en) * | 1990-03-08 | 1991-03-12 | Allied-Signal Inc. | Differential capacitive transducer and method of making |
JP2786321B2 (ja) * | 1990-09-07 | 1998-08-13 | 株式会社日立製作所 | 半導体容量式加速度センサ及びその製造方法 |
US5160925C1 (en) * | 1991-04-17 | 2001-03-06 | Halliburton Co | Short hop communication link for downhole mwd system |
US5267564A (en) * | 1991-06-14 | 1993-12-07 | Siemens Pacesetter, Inc. | Pacemaker lead for sensing a physiologic parameter of the body |
US5233873A (en) * | 1991-07-03 | 1993-08-10 | Texas Instruments Incorporated | Accelerometer |
DE4132232A1 (de) * | 1991-09-27 | 1993-04-01 | Bosch Gmbh Robert | Verfahren zur herstellung kapazitiver sensoren und kapazitiver sensor |
JP2804196B2 (ja) * | 1991-10-18 | 1998-09-24 | 株式会社日立製作所 | マイクロセンサ及びそれを用いた制御システム |
US5245637A (en) * | 1991-12-30 | 1993-09-14 | International Business Machines Corporation | Phase and frequency adjustable digital phase lock logic system |
US5343766A (en) * | 1992-02-25 | 1994-09-06 | C & J Industries, Inc. | Switched capacitor transducer |
FR2688315B1 (fr) * | 1992-03-09 | 1994-05-27 | Sagem | Capteur accelerometrique capacitif et accelerometre non asservi en comportant application. |
US5273440A (en) | 1992-05-19 | 1993-12-28 | Elco Corporation | Pad array socket |
DE4222472C2 (de) * | 1992-07-09 | 1998-07-02 | Bosch Gmbh Robert | Beschleunigungssensor |
US5285559A (en) * | 1992-09-10 | 1994-02-15 | Sundstrand Corporation | Method and apparatus for isolating electronic boards from shock and thermal environments |
JP3138343B2 (ja) * | 1992-09-30 | 2001-02-26 | 日本電信電話株式会社 | 光モジュールの製造方法 |
DE4234238A1 (de) * | 1992-10-10 | 1994-04-14 | Bosch Gmbh Robert | Beschleunigungssensor |
FR2698447B1 (fr) * | 1992-11-23 | 1995-02-03 | Suisse Electronique Microtech | Cellule de mesure micro-usinée. |
US5408440A (en) * | 1993-03-19 | 1995-04-18 | Western Atlas International, Inc. | Hydrophone circuit with electrical characteristics of a geophone |
US5810607A (en) | 1995-09-13 | 1998-09-22 | International Business Machines Corporation | Interconnector with contact pads having enhanced durability |
DE59304431D1 (de) * | 1993-05-05 | 1996-12-12 | Litef Gmbh | Mikromechanische Beschleunigungsmessvorrichtung und Verfahren zu deren Herstellung |
RU2061246C1 (ru) * | 1993-06-22 | 1996-05-27 | Леонид Николаевич Солодилов | Регистратор сейсмических сигналов |
JP2655802B2 (ja) * | 1993-06-30 | 1997-09-24 | 山一電機株式会社 | コイル形接触子及びこれを用いたコネクタ |
EP0633607A1 (en) * | 1993-07-06 | 1995-01-11 | Motorola Inc. | Optical semiconductor device to optical substrate attachment method |
US5433101A (en) * | 1993-07-12 | 1995-07-18 | Ford Motor Company | Method and apparatus for self-testing a single-point automotive impact sensing system |
JP3019700B2 (ja) * | 1993-12-16 | 2000-03-13 | 日産自動車株式会社 | 加速度センサー |
US5369057A (en) * | 1993-12-21 | 1994-11-29 | Delco Electronics Corporation | Method of making and sealing a semiconductor device having an air path therethrough |
EP0660119B1 (en) * | 1993-12-27 | 2003-04-02 | Hitachi, Ltd. | Acceleration sensor |
US5484073A (en) | 1994-03-28 | 1996-01-16 | I/O Sensors, Inc. | Method for fabricating suspension members for micromachined sensors |
DE69521889T2 (de) | 1994-03-28 | 2002-04-11 | I O Sensors Inc | Messaufnehmerkonstruktion mit l-förmigen federbeinen |
US5777226A (en) | 1994-03-28 | 1998-07-07 | I/O Sensors, Inc. | Sensor structure with L-shaped spring legs |
US5446616A (en) * | 1994-03-28 | 1995-08-29 | Litton Systems, Inc. | Electrode structure and method for anodically-bonded capacitive sensors |
JP3216955B2 (ja) * | 1994-05-31 | 2001-10-09 | 株式会社日立製作所 | 容量式センサ装置 |
DE4420562C2 (de) * | 1994-06-13 | 1999-11-18 | Busch Dieter & Co Prueftech | Drehzahlmeßgerät |
JP3329084B2 (ja) * | 1994-08-23 | 2002-09-30 | 株式会社デンソー | 静電サーボ式の加速度センサ |
US5596322A (en) * | 1994-10-26 | 1997-01-21 | Lucent Technologies Inc. | Reducing the number of trim links needed on multi-channel analog integrated circuits |
DE4439203C2 (de) * | 1994-11-03 | 2001-06-28 | Bosch Gmbh Robert | Schaltungsanordnung zur Auswertung eines Beschleunigungssensorsignals |
FR2728118A1 (fr) * | 1994-12-08 | 1996-06-14 | Matra Mhs | Comparateur de phase entre un signal numerique et un signal d'horloge, et boucle a verrouillage de phase correspondante |
US5535626A (en) * | 1994-12-21 | 1996-07-16 | Breed Technologies, Inc. | Sensor having direct-mounted sensing element |
CA2166162A1 (en) * | 1994-12-29 | 1996-06-30 | John M. Loeffler | Vibration sensor for vehicle transmission |
US5842149A (en) * | 1996-10-22 | 1998-11-24 | Baker Hughes Incorporated | Closed loop drilling system |
DE19506401A1 (de) * | 1995-02-23 | 1996-08-29 | Siemens Ag | Beschleunigungssensor |
JPH08233848A (ja) * | 1995-02-28 | 1996-09-13 | Mitsubishi Electric Corp | 半導体センサ |
US5497084A (en) * | 1995-03-03 | 1996-03-05 | Honeywell Inc. | Geartooth sensor with means for selecting a threshold magnitude as a function of the average and minimum values of a signal of magnetic field strength |
US5834623A (en) * | 1995-03-03 | 1998-11-10 | Ignagni; Mario B. | Apparatus and method to provide high accuracy calibration of machine tools |
JPH08285952A (ja) * | 1995-04-11 | 1996-11-01 | Japan Aviation Electron Ind Ltd | 地震計 |
JP3322067B2 (ja) * | 1995-04-24 | 2002-09-09 | 株式会社デンソー | 物理量検出装置 |
JP3613838B2 (ja) * | 1995-05-18 | 2005-01-26 | 株式会社デンソー | 半導体装置の製造方法 |
US5631602A (en) * | 1995-08-07 | 1997-05-20 | Delco Electronics Corporation | Wheatstone bridge amplifier circuit with integrated diagnostic testing |
FR2738705B1 (fr) * | 1995-09-07 | 1997-11-07 | Sagem | Dispositif capteur electromecanique et procede de fabrication d'un tel dispositif |
US5661240A (en) * | 1995-09-25 | 1997-08-26 | Ford Motor Company | Sampled-data interface circuit for capacitive sensors |
US5852242A (en) | 1995-12-04 | 1998-12-22 | I/O Sensors, Inc. | Apparatus with mechanical and electric springs and method for its manufacture |
US5724241A (en) | 1996-01-11 | 1998-03-03 | Western Atlas International, Inc. | Distributed seismic data-gathering system |
JPH09264800A (ja) * | 1996-03-27 | 1997-10-07 | Omron Corp | 半導体式力学量センサ |
US6077345A (en) * | 1996-04-10 | 2000-06-20 | Ebara Solar, Inc. | Silicon crystal growth melt level control system and method |
US5784260A (en) * | 1996-05-29 | 1998-07-21 | International Business Machines Corporation | Structure for constraining the flow of encapsulant applied to an I/C chip on a substrate |
US5644067A (en) * | 1996-07-16 | 1997-07-01 | The United States Of America As Represented By The Secretary Of The Navy | Apparatus and method for calibration of sensing transducers |
GB9619699D0 (en) * | 1996-09-20 | 1996-11-06 | Geco Prakla Uk Ltd | Seismic sensor units |
JPH10104267A (ja) * | 1996-09-27 | 1998-04-24 | Hitachi Ltd | 加速度センサの自己診断方法 |
GB9620391D0 (en) * | 1996-09-30 | 1996-11-13 | Geco Prakla Uk Ltd | Land seismic data acquisition method and seismic cable and cable spool vehicle therefor |
JP3145040B2 (ja) * | 1996-10-18 | 2001-03-12 | 株式会社日立製作所 | 静電容量式加速度センサ |
EP0841754A3 (en) * | 1996-11-08 | 1998-12-16 | Texas Instruments Incorporated | A digitally-controlled oscillator |
JP3446798B2 (ja) * | 1996-11-29 | 2003-09-16 | 日本特殊陶業株式会社 | 接合バンプ付き配線基板 |
JP3045089B2 (ja) * | 1996-12-19 | 2000-05-22 | 株式会社村田製作所 | 素子のパッケージ構造およびその製造方法 |
JPH10209220A (ja) * | 1997-01-27 | 1998-08-07 | Matsushita Electric Ind Co Ltd | プリント基板 |
DE19710217C1 (de) * | 1997-03-12 | 1998-10-01 | Geoforschungszentrum Potsdam | Verfahren und Vorrichtung zur Seismometerprüfung |
US6075754A (en) * | 1997-04-08 | 2000-06-13 | Vanzandt; Thomas R. | Single-coil force balance velocity geophone |
JPH1151960A (ja) * | 1997-08-06 | 1999-02-26 | Murata Mfg Co Ltd | 加速度センサ |
JPH1172534A (ja) | 1997-08-28 | 1999-03-16 | Mitsubishi Electric Corp | テスト端子付き半導体装置およびicソケット |
US6035714A (en) * | 1997-09-08 | 2000-03-14 | The Regents Of The University Of Michigan | Microelectromechanical capacitive accelerometer and method of making same |
US6040625A (en) * | 1997-09-25 | 2000-03-21 | I/O Sensors, Inc. | Sensor package arrangement |
FR2769369B1 (fr) | 1997-10-08 | 1999-12-24 | Sercel Rech Const Elect | Accelerometre a plaque mobile, avec moteur electrostatique de contre-reaction |
US5901939A (en) * | 1997-10-09 | 1999-05-11 | Honeywell Inc. | Buckled actuator with enhanced restoring force |
US5993248A (en) * | 1997-11-20 | 1999-11-30 | Itt Manufacturing Enterprises, Inc. | Battery connector |
US6101864A (en) | 1997-12-17 | 2000-08-15 | I/O Sensors, Inc. | Method and apparatus for generation of test bitstreams and testing of close loop transducers |
US6028817A (en) * | 1997-12-30 | 2000-02-22 | Western Atlas International, Inc. | Marine seismic system with independently powered tow vehicles |
US6255962B1 (en) * | 1998-05-15 | 2001-07-03 | System Excelerator, Inc. | Method and apparatus for low power, micro-electronic mechanical sensing and processing |
GB9812006D0 (en) | 1998-06-05 | 1998-07-29 | Concept Systems Limited | Sensor apparatus |
US6035694A (en) | 1999-03-12 | 2000-03-14 | I/O Of Austin, Inc. | Method and apparatus for calibration of stray capacitance mismatch in a closed loop electro-mechanical accelerometer |
US6512980B1 (en) * | 1999-10-19 | 2003-01-28 | Westerngeco Llc | Noise reference sensor for use in a dual sensor towed streamer |
-
2000
- 2000-03-08 WO PCT/US2000/006024 patent/WO2000055648A1/en active Application Filing
- 2000-03-08 CA CA002365886A patent/CA2365886A1/en not_active Abandoned
- 2000-03-08 EP EP20070012105 patent/EP1847850B1/en not_active Expired - Lifetime
- 2000-03-08 CA CA2365868A patent/CA2365868C/en not_active Expired - Lifetime
- 2000-03-08 EP EP00913804A patent/EP1169657A4/en not_active Withdrawn
- 2000-03-08 WO PCT/US2000/006032 patent/WO2000055652A1/en not_active Application Discontinuation
- 2000-03-08 AU AU37307/00A patent/AU3730700A/en not_active Abandoned
- 2000-03-08 EP EP00916159A patent/EP1183555A4/en not_active Withdrawn
- 2000-03-08 AU AU35176/00A patent/AU3517600A/en not_active Abandoned
- 2000-03-14 AU AU37443/00A patent/AU3744300A/en not_active Abandoned
- 2000-03-14 WO PCT/US2000/006634 patent/WO2000055105A2/en active Application Filing
- 2000-03-15 US US09/914,421 patent/US6861587B1/en not_active Expired - Lifetime
- 2000-03-15 DE DE2000633643 patent/DE60033643T2/de not_active Expired - Lifetime
- 2000-03-15 JP JP2000605453A patent/JP5420127B2/ja not_active Expired - Fee Related
- 2000-03-15 AU AU36289/00A patent/AU3628900A/en not_active Abandoned
- 2000-03-15 WO PCT/US2000/006832 patent/WO2000056132A1/en active Search and Examination
- 2000-03-15 EP EP00914976A patent/EP1169896B8/en not_active Expired - Lifetime
- 2000-03-15 CA CA002367983A patent/CA2367983C/en not_active Expired - Lifetime
- 2000-03-15 AT AT00914976T patent/ATE355728T1/de not_active IP Right Cessation
- 2000-03-16 US US09/936,629 patent/US6883638B1/en not_active Expired - Lifetime
- 2000-03-16 EP EP06005170.3A patent/EP1674873B1/en not_active Expired - Lifetime
- 2000-03-16 WO PCT/US2000/006905 patent/WO2000055646A1/en active Application Filing
- 2000-03-16 JP JP2000605219A patent/JP5078196B2/ja not_active Expired - Lifetime
- 2000-03-16 EP EP00918544A patent/EP1177451B1/en not_active Expired - Lifetime
- 2000-03-16 AU AU37511/00A patent/AU3751100A/en not_active Abandoned
- 2000-03-16 WO PCT/US2000/040039 patent/WO2000055638A1/en not_active Application Discontinuation
- 2000-03-16 WO PCT/US2000/040038 patent/WO2000055593A2/en active IP Right Grant
- 2000-03-16 AT AT00918544T patent/ATE374949T1/de not_active IP Right Cessation
- 2000-03-16 AU AU39339/00A patent/AU3933900A/en not_active Abandoned
- 2000-03-16 DE DE60036614T patent/DE60036614D1/de not_active Expired - Lifetime
- 2000-03-16 EP EP20000916403 patent/EP1175628B1/en not_active Expired - Lifetime
- 2000-03-16 DE DE60041253T patent/DE60041253D1/de not_active Expired - Lifetime
- 2000-03-16 JP JP2000605177A patent/JP2003521675A/ja active Pending
- 2000-03-16 EP EP20110171126 patent/EP2410344A3/en not_active Withdrawn
- 2000-03-16 CA CA002366317A patent/CA2366317C/en not_active Expired - Lifetime
- 2000-03-16 EP EP20060012101 patent/EP1705489A3/en not_active Withdrawn
- 2000-03-16 CA CA002368127A patent/CA2368127C/en not_active Expired - Lifetime
- 2000-03-16 CA CA2366320A patent/CA2366320C/en not_active Expired - Lifetime
- 2000-03-16 EP EP00926518A patent/EP1208385A4/en not_active Ceased
- 2000-03-16 AU AU45035/00A patent/AU4503500A/en not_active Abandoned
- 2000-03-17 AU AU36317/00A patent/AU3631700A/en not_active Abandoned
- 2000-03-17 EP EP20000915012 patent/EP1192419B1/en not_active Expired - Lifetime
- 2000-03-17 WO PCT/US2000/007310 patent/WO2000055577A1/en active IP Right Grant
- 2000-03-17 AT AT00915012T patent/ATE360191T1/de active
- 2000-03-17 DE DE2000634451 patent/DE60034451T2/de not_active Expired - Lifetime
- 2000-03-17 CA CA002366999A patent/CA2366999C/en not_active Expired - Lifetime
- 2000-03-17 JP JP2000605162A patent/JP5008219B2/ja not_active Expired - Fee Related
-
2001
- 2001-09-14 NO NO20014460A patent/NO335756B1/no not_active IP Right Cessation
- 2001-09-14 NO NO20014459A patent/NO20014459L/no not_active Application Discontinuation
- 2001-09-14 NO NO20014463A patent/NO336325B1/no not_active IP Right Cessation
- 2001-09-14 NO NO20014464A patent/NO334310B1/no not_active IP Right Cessation
- 2001-09-14 NO NO20014461A patent/NO333754B1/no not_active IP Right Cessation
- 2001-09-14 NO NO20014458A patent/NO335926B1/no not_active IP Right Cessation
- 2001-09-14 NO NO20014469A patent/NO332471B1/no not_active IP Right Cessation
-
2011
- 2011-10-04 JP JP2011220255A patent/JP2012004602A/ja active Pending
Also Published As
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5420127B2 (ja) | 低応力ダイ・アタッチメント | |
US9869796B2 (en) | Fabrication process and package design for use in a micro-machined seismometer or other device | |
US6829937B2 (en) | Monolithic silicon acceleration sensor | |
US5626779A (en) | Micromachine transducer with cantilevered movable portion | |
US6230566B1 (en) | Micromachined low frequency rocking accelerometer with capacitive pickoff | |
US7540190B2 (en) | Semiconductor device with acceleration sensor | |
JP6254120B2 (ja) | ジャイロセンサ | |
JP6628212B2 (ja) | 共振装置及びその製造方法 | |
JP5473253B2 (ja) | 複数の導電性領域を有する構造体、及びその製造方法 | |
JP5535927B2 (ja) | 機械的に分離されたボール接続を備えた電子部品 | |
WO2010032820A1 (ja) | Memsセンサ | |
EP1423714B1 (en) | Microstructure with movable mass | |
EP1806315A2 (en) | Discrete stress isolator | |
EP1514122B1 (en) | Method of manufacturing of a monolithic silicon acceleration sensor | |
JPH09135032A (ja) | 加速度検出用混成集積回路装置 | |
JP2006302943A (ja) | マイクロ構造体 | |
JPH04249727A (ja) | 力および加速度の検出装置 | |
WO2024067243A1 (zh) | 一种微机电芯片 | |
JPH08211091A (ja) | 半導体加速度検出装置 | |
CN110366090A (zh) | Mems器件及其制备方法 | |
JPH01156669A (ja) | 加速度センサ | |
JPH07306225A (ja) | 加速度センサ | |
KR20050019758A (ko) | 모놀리식 실리콘 가속도 센서 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070308 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070308 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20100115 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100120 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20100420 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20100427 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100720 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20100720 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20100823 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20101224 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20110218 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110404 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20110704 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20110711 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20111004 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20111107 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20120207 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20120214 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120731 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20121031 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20121107 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130131 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130326 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20130626 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20130703 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20130726 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20130802 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20130826 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20130902 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130906 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20131022 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20131120 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5420127 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |