JP4717344B2 - 誘電体薄膜素子、圧電アクチュエータおよび液体吐出ヘッド - Google Patents

誘電体薄膜素子、圧電アクチュエータおよび液体吐出ヘッド Download PDF

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Publication number
JP4717344B2
JP4717344B2 JP2003411167A JP2003411167A JP4717344B2 JP 4717344 B2 JP4717344 B2 JP 4717344B2 JP 2003411167 A JP2003411167 A JP 2003411167A JP 2003411167 A JP2003411167 A JP 2003411167A JP 4717344 B2 JP4717344 B2 JP 4717344B2
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JP
Japan
Prior art keywords
thin film
piezoelectric
intermediate layer
layer
orientation
Prior art date
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Expired - Lifetime
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JP2003411167A
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English (en)
Japanese (ja)
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JP2005175099A5 (enrdf_load_stackoverflow
JP2005175099A (ja
Inventor
俊博 伊福
堅義 松田
哲朗 福井
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Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2003411167A priority Critical patent/JP4717344B2/ja
Priority to TW93137804A priority patent/TWI249437B/zh
Priority to US11/006,639 priority patent/US7279825B2/en
Priority to CNB2004101002725A priority patent/CN100374299C/zh
Priority to KR20040103936A priority patent/KR100643825B1/ko
Publication of JP2005175099A publication Critical patent/JP2005175099A/ja
Publication of JP2005175099A5 publication Critical patent/JP2005175099A5/ja
Application granted granted Critical
Publication of JP4717344B2 publication Critical patent/JP4717344B2/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/076—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by vapour phase deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/079—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing using intermediate layers, e.g. for growth control
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H10N30/706—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
    • H10N30/708—Intermediate layers, e.g. barrier, adhesion or growth control buffer layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead-based oxides
    • H10N30/8554—Lead-zirconium titanate [PZT] based

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2003411167A 2003-12-10 2003-12-10 誘電体薄膜素子、圧電アクチュエータおよび液体吐出ヘッド Expired - Lifetime JP4717344B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2003411167A JP4717344B2 (ja) 2003-12-10 2003-12-10 誘電体薄膜素子、圧電アクチュエータおよび液体吐出ヘッド
TW93137804A TWI249437B (en) 2003-12-10 2004-12-07 Dielectric thin film element, piezoelectric actuator and liquid discharge head, and method for manufacturing the same
US11/006,639 US7279825B2 (en) 2003-12-10 2004-12-08 Dielectric thin film element, piezoelectric actuator and liquid discharge head, and method for manufacturing the same
CNB2004101002725A CN100374299C (zh) 2003-12-10 2004-12-10 介电体薄膜元件、压电致动器、液体排出头及其制造方法
KR20040103936A KR100643825B1 (ko) 2003-12-10 2004-12-10 유전체 박막 소자, 압전 액추에이터 및 액체 토출 헤드와그 제조 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003411167A JP4717344B2 (ja) 2003-12-10 2003-12-10 誘電体薄膜素子、圧電アクチュエータおよび液体吐出ヘッド

Publications (3)

Publication Number Publication Date
JP2005175099A JP2005175099A (ja) 2005-06-30
JP2005175099A5 JP2005175099A5 (enrdf_load_stackoverflow) 2006-08-03
JP4717344B2 true JP4717344B2 (ja) 2011-07-06

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JP2003411167A Expired - Lifetime JP4717344B2 (ja) 2003-12-10 2003-12-10 誘電体薄膜素子、圧電アクチュエータおよび液体吐出ヘッド

Country Status (5)

Country Link
US (1) US7279825B2 (enrdf_load_stackoverflow)
JP (1) JP4717344B2 (enrdf_load_stackoverflow)
KR (1) KR100643825B1 (enrdf_load_stackoverflow)
CN (1) CN100374299C (enrdf_load_stackoverflow)
TW (1) TWI249437B (enrdf_load_stackoverflow)

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KR101305271B1 (ko) * 2012-03-22 2013-09-06 한국기계연구원 자기전기 복합체
US9956774B2 (en) 2015-12-17 2018-05-01 Ricoh Company, Ltd. Electromechanical transducer element, liquid discharge head, liquid discharge device, method for producing electromechanical transducer film, and method for producing liquid discharge head

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JP5164052B2 (ja) * 2005-01-19 2013-03-13 キヤノン株式会社 圧電体素子、液体吐出ヘッド及び液体吐出装置
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US9956774B2 (en) 2015-12-17 2018-05-01 Ricoh Company, Ltd. Electromechanical transducer element, liquid discharge head, liquid discharge device, method for producing electromechanical transducer film, and method for producing liquid discharge head

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TWI249437B (en) 2006-02-21
US20050127780A1 (en) 2005-06-16
TW200531751A (en) 2005-10-01
CN1628977A (zh) 2005-06-22
KR100643825B1 (ko) 2006-11-10
CN100374299C (zh) 2008-03-12
US7279825B2 (en) 2007-10-09
KR20050056891A (ko) 2005-06-16
JP2005175099A (ja) 2005-06-30

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