JP4041785B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
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- H01L21/76841—Barrier, adhesion or liner layers
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- H01L21/76886—Modifying permanently or temporarily the pattern or the conductivity of conductive members, e.g. formation of alloys, reduction of contact resistances
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Description
なお、この場合には、上述の効果に加えて、第1の絶縁膜と第2の絶縁膜との密着性を向上させることができるという効果を得ることができる。
上記工程(b)では、上記素子と電気的に接続される上記配線層を形成してもよい。この場合には、工程(f)において、除去する深さに誤差が生じても、配線層を露出しにくくすることができる。
以下に、本発明の第1の実施形態に係る半導体装置の製造方法について、図1(a)〜(f)を参照しながら説明する。図1(a)〜(f)は、第1の実施形態の半導体装置の製造方法を示す断面図である。なお、図1(a)〜(f)には、配線形成領域R1と、配線形成領域R1を外部の湿気から保護するためのシールリング領域R2とを示している。シールリング領域R2は配線形成領域R1の側方を囲んでいる。
以下に、本発明の第2の実施形態に係る半導体装置の製造方法について、図2(a)〜(f)を参照しながら説明する。図2(a)〜(f)は、第2の実施形態の半導体装置の製造方法を示す断面図である。なお、図2(a)〜(f)には、配線形成領域R1と、配線形成領域R1を外部の湿気から保護するためのシールリング領域R2とを示している。シールリング領域R2は配線形成領域R1の側方を囲んでいる。
このとき、第2の絶縁膜114の材料としては、シリコン窒化膜、シリコン酸化膜、シリコン酸化炭化膜などを用いてもよい。また、これらの膜の積層体を形成してもよい。
本発明の第3の実施形態に係る半導体装置の製造方法について、図3(a)〜(e)を参照しながら説明する。図3(a)〜(e)は、第3の実施形態の半導体装置の製造工程を示す断面図である。なお、図3(a)〜(e)には、配線形成領域R1と、配線形成領域R1を外部の湿気から保護するためのシールリング領域R2とを示している。なお、シールリング領域R2は配線形成領域R1の側方を囲んでいる。
本発明の第4の実施形態に係る半導体装置の製造方法について、図4(a)〜(e)を参照しながら説明する。図4(a)〜(e)は、第4の実施形態の半導体装置の製造工程を示す断面図である。なお、図4(a)〜(e)には、配線形成領域R1と、配線形成領域R1を外部の湿気から保護するためのシールリング領域R2とを示している。なお、シールリング領域R2は配線形成領域R1の側方を囲んでいる。
以下に、本発明の第5の実施形態に係る半導体装置の製造方法について、図5(a)〜(f)を参照しながら説明する。図5(a)〜(f)は、第5の実施形態において、半導体装置のうち配線領域の製造方法を示す断面図である。なお、第1〜第4の実施形態では、配線領域およびシールリング領域において、ホールパターンとトレンチパターンとの深さの違いが生じる場合を示した。それに対し、本実施形態では、配線領域に多数のホールパターンを形成する場合に、ホールパターンごとに深さの違いが生じる場合について示す。
102 第1の金属配線
102a 表面導体膜
102b 金属配線膜
103 第2の金属配線
103a 表面導体膜
103b 金属配線膜
104 第2の絶縁膜
105 第3の絶縁膜
106 ホールパターン
106’ ホールコンタクト導体部
107 トレンチパターン
107’ トレンチコンタクト導体部
108 配線溝
109 配線溝
110 凹部
111 第1の絶縁膜
112 第1の金属配線
112a 表面導体膜
112b 金属配線膜
113 第2の金属配線
113a 表面導体膜
113b 金属配線膜
114 第2の絶縁膜
115 第3の絶縁膜
116 ホールパターン
116’ ホールコンタクト導体部
117 トレンチパターン
117’ トレンチコンタクト導体部
118 配線溝
119 配線溝
120 凹部
121 第1の絶縁膜
122 第1の金属配線
122a 表面導体膜
122b 金属配線膜
123 第2の金属配線
123a 表面導体膜
123b 金属配線膜
124 第2の絶縁膜
125 第3の絶縁膜
126’ ホールコンタクト導体部
126 ホールパターン
127 トレンチパターン
127’ トレンチコンタクト導体部
128 配線溝
129 配線溝
130 耐酸化性膜
131 第1の絶縁膜
132 第1の金属配線
132a 表面導体膜
132b 金属配線膜
133 第2の金属配線
133a 表面導体膜
133b 金属配線膜
134 第2の絶縁膜
135 第3の絶縁膜
136 ホールパターン
136’ ホールコンタクト導体部
137 トレンチパターン
137’ トレンチコンタクト導体部
138 配線溝
139 配線溝
140 金属膜
141 第1の絶縁膜
142 金属配線
142a 表面導体膜
142b 金属配線膜
143 金属配線
144 第2の絶縁膜
145 第3の絶縁膜
146 ホールパターン
146’ ホールコンタクト導体部
148 配線溝
150 凹部
Claims (10)
- 半導体基板の上方に、第1の絶縁膜を形成する工程(a)と、
上記第1の絶縁膜の少なくとも上部に、第1の金属配線膜と第2の金属配線膜とを形成する工程(b)と、
上記第2の金属配線膜の上部に凹部を形成する工程(c)と、
上記第1の絶縁膜、上記第1の金属配線膜および上記第2の金属配線膜の上に、上記凹部を埋め込むように、第2の絶縁膜を形成する工程(d)と、
上記第2の絶縁膜の上面を平坦化することにより、上記第2の絶縁膜のうち上記第2の金属配線膜の上方に位置する部分の膜厚を、上記第2の絶縁膜のうち上記第1の金属配線膜の上方に位置する部分の膜厚よりも厚くする工程(e)と、
上記工程(e)の後に、上記第2の絶縁膜の上に第3の絶縁膜を形成する工程(f)と、
フォトレジストをマスクに用いたエッチングにより、上記第3の絶縁膜および上記第2の絶縁膜のうち上記第1の金属配線膜の上方に位置する部分を上記第1の金属配線膜に到達しない深さまで除去することによってホールパターンを形成すると共に、上記第3の絶縁膜および上記第2の絶縁膜のうち上記第2の金属配線膜の上方に位置する部分を上記第2の金属配線膜に到達しない深さまで除去することによって開口面積が前記ホールパターンの開口面積よりも広いトレンチパターンを形成する工程(g)と、
上記フォトレジストを除去する工程(h)と、
前記工程(h)の後に、前記ホールパターンの底部における前記第2の絶縁膜を除去して前記第1の金属配線膜を露出させると共に、前記トレンチパターンの底部における前記第2の絶縁膜を除去して前記第2の金属配線膜を露出させる工程(i)とを備える、半導体装置の製造方法。 - 請求項1に記載の半導体装置の製造方法において、
上記工程(c)は、化学的機械研磨によって、前記凹部を形成する工程である、半導体装置の製造方法。 - 請求項1に記載の半導体装置の製造方法において、
上記工程(c)は、エッチングによって、前記凹部を形成する工程である、半導体装置の製造方法。 - 請求項1に記載の半導体装置の製造方法において、
上記トレンチパターンは矩形あるいは帯状の平面形状を有し、
上記ホールパターンは円形あるいは正方形の平面形状を有している、半導体装置の製造方法。 - 請求項1に記載の半導体装置の製造方法において、
上記工程(i)の後に、前記ホールパターンに導体を埋め込んでホールコンタクト導体部を形成すると共に前記トレンチパターンに導体を埋め込んでトレンチコンタクト導体部を形成する工程をさらに備え、
上記第2の金属配線膜およびトレンチコンタクト導体部は、リング状に形成されたシールリングである、半導体装置の製造方法。 - 請求項1に記載の半導体装置の製造方法において、
上記工程(b)において、前記第2の金属配線膜の幅は、前記第1の金属配線膜の幅よりも広い、半導体装置の製造方法。 - 請求項1に記載の半導体装置の製造方法において、
上記工程(b)は、前記第2の金属配線膜の周りにダミーパターンを形成することによって単位面積あたりの金属の占有率を上昇させる工程を含む、半導体装置の製造方法。 - 請求項1〜7のいずれか1項に記載の半導体装置の製造方法において、
上記工程(a)の前に、上記半導体基板内に素子を形成する工程(j)をさらに備え、
上記工程(b)では、上記第1の金属配線膜または上記第2の金属配線膜が上記素子と電気的に接続されるように形成する、半導体装置の製造方法。 - 請求項1〜8のいずれか1項に記載の半導体装置の製造方法において、
上記第2の絶縁膜は、シリコン窒化炭化膜である、半導体装置の製造方法。 - 請求項1〜8のいずれか1項に記載の半導体装置の製造方法において、
上記第2の絶縁膜は、シリコン酸化炭化膜である、半導体装置の製造方法。
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003335185A JP4041785B2 (ja) | 2003-09-26 | 2003-09-26 | 半導体装置の製造方法 |
US10/945,920 US7215028B2 (en) | 2003-09-26 | 2004-09-22 | Semiconductor device and method for fabricating the same |
CN2008100919970A CN101257001B (zh) | 2003-09-26 | 2004-09-22 | 半导体器件及其制造方法 |
CNB2004100118423A CN100431145C (zh) | 2003-09-26 | 2004-09-22 | 半导体器件及其制造方法 |
US11/716,704 US7400045B2 (en) | 2003-09-26 | 2007-03-12 | Semiconductor device and method for fabricating the same |
US12/153,028 US7935623B2 (en) | 2003-09-26 | 2008-05-13 | Semiconductor device and method for fabricating the same |
US13/051,415 US8329572B2 (en) | 2003-09-26 | 2011-03-18 | Semiconductor device and method for fabricating the same |
US13/674,749 US8648472B2 (en) | 2003-09-26 | 2012-11-12 | Semiconductor device |
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US7935623B2 (en) | 2011-05-03 |
US8329572B2 (en) | 2012-12-11 |
US20130062772A1 (en) | 2013-03-14 |
CN101257001A (zh) | 2008-09-03 |
CN100431145C (zh) | 2008-11-05 |
CN101257001B (zh) | 2010-06-16 |
US20070187832A1 (en) | 2007-08-16 |
US20110171824A1 (en) | 2011-07-14 |
US7400045B2 (en) | 2008-07-15 |
US20090017611A1 (en) | 2009-01-15 |
CN1601741A (zh) | 2005-03-30 |
US7215028B2 (en) | 2007-05-08 |
JP2005101433A (ja) | 2005-04-14 |
US20050070086A1 (en) | 2005-03-31 |
US8648472B2 (en) | 2014-02-11 |
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