JP2020509608A5 - - Google Patents

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JP2020509608A5
JP2020509608A5 JP2019562235A JP2019562235A JP2020509608A5 JP 2020509608 A5 JP2020509608 A5 JP 2020509608A5 JP 2019562235 A JP2019562235 A JP 2019562235A JP 2019562235 A JP2019562235 A JP 2019562235A JP 2020509608 A5 JP2020509608 A5 JP 2020509608A5
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superconducting
metal layer
traces
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JP2019562235A 2017-02-01 2018-01-31 超伝導集積回路の製造のためのシステム及び方法 Active JP7223711B2 (ja)

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US201762453358P 2017-02-01 2017-02-01
US62/453,358 2017-02-01
PCT/US2018/016237 WO2018144601A1 (en) 2017-02-01 2018-01-31 Systems and methods for fabrication of superconducting integrated circuits

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JP2020509608A JP2020509608A (ja) 2020-03-26
JP2020509608A5 true JP2020509608A5 (enExample) 2021-03-11
JP7223711B2 JP7223711B2 (ja) 2023-02-16

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US (2) US11038095B2 (enExample)
EP (3) EP3577700B1 (enExample)
JP (1) JP7223711B2 (enExample)
CN (1) CN110462857B (enExample)
WO (1) WO2018144601A1 (enExample)

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