JP2016225345A - 逆導通igbt - Google Patents
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- JP2016225345A JP2016225345A JP2015107314A JP2015107314A JP2016225345A JP 2016225345 A JP2016225345 A JP 2016225345A JP 2015107314 A JP2015107314 A JP 2015107314A JP 2015107314 A JP2015107314 A JP 2015107314A JP 2016225345 A JP2016225345 A JP 2016225345A
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Abstract
【解決手段】 逆導通IGBT1は、半導体基板10のIGBT領域14aに設けられている格子状のレイアウトを有するトレンチゲート部30及び半導体基板10のダイオード領域14bに設けられているストライプ状のレイアウトを有するダミートレンチ部40を備える。半導体基板10のダイオード領域14bは、p型のボディ領域(アノード領域)25、n-型のドリフト領域23及びバリア領域24を含む。バリア領域24は、半導体基板10の上面から伸びるピラー領域26を介してエミッタ電極38に電気的に接続されている。
【選択図】図2
Description
14a:IGBT領域
14ab:境界領域
14b:ダイオード領域
21:コレクタ領域
22:カソード領域
23:ドリフト領域
24:バリア領域
25:ボディ領域
26:ピラー領域
27:エミッタ領域
30:トレンチゲート部
36:コレクタ電極
38:エミッタ電極
40:ダミートレンチ部
Claims (9)
- 逆導通IGBTであって、
IGBT構造が設けられているIGBT領域とダイオード構造が設けられているダイオード領域に区画されている半導体基板と、
前記半導体基板の前記IGBT領域及び前記ダイオード領域の双方の下面に接する下面電極と、
前記半導体基板の前記IGBT領域及び前記ダイオード領域の双方の上面に接する上面電極と、
前記半導体基板の前記IGBT領域に設けられており、前記半導体基板の前記上面に対して直交する方向から見たときに格子状のレイアウトを有するトレンチゲート部と、
前記半導体基板の前記ダイオード領域に設けられており、前記半導体基板の前記上面に対して直交する方向から見たときにストライプ状のレイアウトを有するトレンチ部と、を備えており、
前記トレンチ部は、第1方向に沿って伸びる複数のストライプトレンチを有し、
前記半導体基板の前記ダイオード領域は、
隣り合う前記ストライプトレンチの間に設けられており、前記半導体基板の前記上面に露出しており、前記上面電極に接する第1導電型のアノード領域と、
前記アノード領域の下方に設けられている第2導電型のドリフト領域と、
隣り合う前記ストライプトレンチの間に設けられており、前記アノード領域と前記ドリフト領域の間に設けられており、前記ドリフト領域の不純物濃度よりも濃い不純物濃度を含んでおり、前記半導体基板の前記上面から伸びるピラー部を介して前記上面電極に電気的に接続されている第2導電型のバリア領域と、を有する、逆導通IGBT。 - 前記ピラー部が前記半導体基板の前記上面に露出する露出面は、前記第1方向に沿って伸びている、請求項1に記載の逆導通IGBT。
- 前記ピラー部が前記半導体基板の前記上面に露出する露出面は、前記第1方向に沿って分散配置されている、請求項1又は2に記載の逆導通IGBT。
- 前記トレンチゲート部は、
前記第1方向に沿って伸びる複数の第1トレンチゲートと、
隣り合う前記第1トレンチゲートの間を前記第1方向に直交する第2方向に沿って伸びる複数の第2トレンチゲートと、を有する、請求項1〜3のいずれか一項に記載の逆導通IGBT。 - 前記第2方向における前記複数の第1トレンチゲートのピッチ長が、前記第2方向における前記複数のストライプトレンチのピッチ長よりも長く、
前記第1方向における前記複数の第2トレンチゲートのピッチ長が、前記第2方向における前記複数のストライプトレンチのピッチ長よりも長い、請求項4に記載の逆導通IGBT。 - 前記半導体基板の前記上面と前記上面電極の間に設けられており、前記上面電極が前記半導体基板の前記上面に接するための複数の開口が形成されている層間絶縁膜をさらに備えており、
前記層間絶縁膜の前記複数の開口は、格子状の前記トレンチゲート部で囲まれる前記半導体基板の前記上面の各々に対応して分散配置されているとともに、隣り合う前記ストライプトレンチの間の前記半導体基板の前記上面に対応して前記第1方向に沿って分散配置されている、請求項1〜4のいずれか一項に記載の逆導通IGBT。 - 前記第2方向における前記複数の第1トレンチゲートのピッチ長が、前記第2方向における前記複数のストライプトレンチのピッチ長に等しく、
前記第1方向における前記複数の第2トレンチゲートのピッチ長が、前記第2方向における前記複数のストライプトレンチのピッチ長に等しい、請求項6に記載の逆導通IGBT。 - 前記第2方向における前記複数の第1トレンチゲートのピッチ長及び前記第1方向における前記複数の第2トレンチゲートのピッチ長において、一方のピッチ長が前記第2方向における前記複数のストライプトレンチのピッチ長に等しく、他方のピッチ長が前記第2方向における前記複数のストライプトレンチのピッチ長よりも長い、請求項6に記載の逆導通IGBT。
- 前記第2方向における前記複数の第1トレンチゲートのピッチ長が、前記第2方向における前記複数のストライプトレンチのピッチ長に等しく、
前記第1方向における前記複数の第2トレンチゲートのピッチ長が、前記第2方向における前記複数のストライプトレンチのピッチ長よりも長い、請求項8に記載の逆導通IGBT。
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